CN103994722B - Grating accurate measurement structure based on self-focusing principle and measuring method - Google Patents
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Abstract
The present invention relates to sensor-based system optical texture.Grating accurate measurement structure based on self-focusing principle and measuring method, including for producing the laser instrument of laser beam, optical prism, grating, photodetector, optical prism includes a reflecting mirror, a spectroscope, a collimating mirror；Grating includes the first grating, the second grating, using the first grating as a spectro-grating, measures grating using the second grating as one；The light-emitting window of laser instrument is provided with spectro-grating, the laser that laser instrument is sent by spectro-grating is divided into three beams diffraction light, spectro-grating is arranged over spectroscope, spectroscopical left is provided with reflecting mirror, the reflecting surface of reflecting mirror is positioned at right side, and reflecting mirror is tilted to the left setting, reflecting mirror be arranged over collimating mirror, collimating mirror be arranged over object lens, object lens be arranged over measure grating；Spectroscopical right is provided with a cylindrical mirror, and cylindrical mirror right is provided with photodetector.Frame of reference low cost of the present invention, and volume is little, integration degree is high.
Description
Technical field
The present invention relates to precision instrument and Technology of Precision Measurement field, be specifically related to sensor-based system optical texture.
Background technology
Grating displacement sensor measures device as manufacturing, detect the crucial of equipment, mechanical position information is converted into the output of the corresponding signal of telecommunication by comprehensive light, mechanical, electrical technology, realize the measurement to associated mechanical geometric senses such as angle, size, displacements, there is the advantages such as certainty of measurement is high, stroke is big, noncontact, nothing is worn and torn, capacity of resisting disturbance is strong, be widely used in the technical fields such as lathe digital display numerical control, measuring instrument, precision manufactureing.
Optical grid line displacement sensor is as precision manufactureing industry and the critical component of fine measuring instrument, progress along with photoelectric technology, the grating sensing method of geometry shading principle is difficult to meet the needs of micro-nano measurement, thus China scientist is also badly in need of developing novel micro nanometer rice sensor to meet the needs of China's industrial development.
Summary of the invention
It is an object of the invention to, it is provided that a kind of grating accurate measurement structure based on self-focusing principle and measuring method, solve above technical problem.
Technical problem solved by the invention can realize by the following technical solutions:
Grating accurate measurement structure based on self-focusing principle, including for producing the laser instrument of laser beam, optical prism, grating, photodetector, it is characterised in that described optical prism includes a reflecting mirror, a spectroscope, a collimating mirror；
Described grating includes one first grating, the second grating, using described first grating as a spectro-grating, measures grating using described second grating as one；
The light-emitting window of described laser instrument is provided with described spectro-grating, the laser that laser instrument is sent by described spectro-grating is divided into three beams diffraction light, described spectro-grating is arranged over described spectroscope, described spectroscopical left is provided with described reflecting mirror, the reflecting surface of described reflecting mirror is positioned at right side, and described reflecting mirror is tilted to the left setting, described reflecting mirror be arranged over described collimating mirror, described collimating mirror be arranged over described object lens, described object lens be arranged over described measurement grating；
Described spectroscopical right is provided with a cylindrical mirror, and described cylindrical mirror right is provided with described photodetector.
The light beam that laser instrument of the present invention sends is divided into 0 grade and ± 1 grade of light beam after spectro-grating diffraction, and 0 grade of light beam is used for measuring, and ± 1 grade of light beam obtains tracking servo signal and is used for differentiating pattern displacement direction.Focus on after spectroscope, described reflecting mirror, described collimating mirror, described object lens described in three beams diffraction light successively approach on described measurement grating；Three beams collimated light beam is become after collimated mirror, enter object lens and focus on measurement grating, the reflection light beam measuring signal on measurement grating is focused on photodetector as after backtracking to spectroscope after cylindrical mirror, the sine wave signal that photodetector receives, for follow-up specific gratings signal processing and sub-circuit, carries out shaping counting and Subdividing Processing to signal.
Described spectro-grating is transmission-type grating, and described measurement grating is reflective gratings.
Described laser instrument can use distributed feedback type semiconductor laser.Distributed feedback has without mode hopping, advantage that output wavelength temperature varying coefficient is less.
Described laser instrument can also use quantum trap type semiconductor laser.To reduce the volume of the present invention.
Described laser instrument includes a laser diode.In order to send light beam.
Described photodetector is one or six quadrant photodetectors, it is provided with a testing circuit in described six quadrant photodetectors, described six quadrant photodetectors connect a signal processing circuit by described testing circuit, and described signal processing circuit connects a PID/feedback control circuit；
Described PID/feedback control circuit connects a piezoelectric ceramic actuator, and described piezoelectric ceramic actuator is fixing connects described object lens.
The focus error signal (voltage signal) of six quadrant photodetector outputs is after the testing circuit of six quadrant photodetectors, PID/feedback control circuit is sent by signal processing circuit, PID/feedback control circuit drives piezoelectric ceramic actuator, thus drive object lens to move, make object focal point and measure the coincidence of grating planar position, it is achieved automatically focusing on.The focus error signal (voltage signal) of six quadrant photodetector outputs presents S type with measuring grating planar position from focal plane of lens distance change.When i.e. there is defocusing phenomenon more than the depth of field of object lens in measured point out of focus distance, piezoelectric ceramic actuator deformation under voltage, drive object lens to move, make object focal point move to measured surface, this is automatic focusing principle.
The photosurface of described photodetector is just to the emergent light towards described cylindrical mirror.
The angle of inclination that described reflecting mirror is gone up in the horizontal direction is 20 °～70 °.Preferably diffracted beam to be injected other optical prisms.
Described six quadrant photodetectors are provided with three photosensitive regions, for the first photosensitive region of 0 grade of light beam of sensing, for sensing the second photosensitive region of-1 grade of light beam, for sensing the 3rd photosensitive region of+1 grade of light beam, described second photosensitive region and described 3rd photosensitive region lay respectively at the left and right sides of described first photosensitive region.Three photosensitive region power correspondences measure the distance that point leaves the focal plane of object lens, and the fluctuating of these three focus point correspondence grating cosine shows the phase information fixed, in conjunction with the size of three sensing area signals, it is achieved the real-time judgment grating direction of motion.
Being provided with a light cell in described photodetector, described light cell is a thin film photocell, and described thin film photocell is coated on above or below described three photosensitive regions uniformly.Thus realize self power generation, it is simple to the required electricity consumption of work.
Described thin film photocell connects an electricity storage device, and described electricity storage device is provided with a power output end.For connecting other electricity consumption devices of the present invention, it is provided that the electricity needed for the electricity consumption device of the present invention.
Also including a driving module, described driving module connects described signal processing circuit；
Being provided with a rotation support below described spectroscope, described driving module connects described rotating basis by a drive mechanism.
Thus realize adjusting spectroscope angle (slit or focal length).
Grating precision measurement method based on self-focusing principle, the light beam that described laser instrument sends is divided into 0 grade and ± 1 grade of light beam after described spectro-grating diffraction, and 0 grade of light beam is used for measuring, and ± 1 grade of light beam obtains tracking servo signal and is used for differentiating pattern displacement direction；
0 grade sequentially passes through described spectroscope, described reflecting mirror, one-tenth three beams collimated light beam after described collimating mirror with ± 1 grade of light beam three light beam, enters described object lens and focus on described measurement grating；
The reflection light beam of signal is measured by backtracking to described spectroscope on described measurement grating；
0 grade focuses on described six quadrant photodetectors after ± 1 grade of light beam three light beam after described cylindrical mirror, focus error signal (voltage signal) circuit after testing of described six quadrant photodetector outputs, signal processing circuit transmission signal are to PID/feedback control circuit, object lens described in feedback control circuit driving pressure electroceramics driver drives move, described object focal point and described measurement grating planar position are overlapped, it is achieved automatically focus on.
Beneficial effect: the scan characteristic of grating precision measurement system and laser instrument is combined by the present invention, utilizes the laser head of laser instrument focus on and automatically focus on the complementary advantage of two kinds of measuring methods, it is achieved the accurate measurement to grating grid.Micro-nano optical grating measuring system based on direct-reading grating grid, it is achieved the self adaptation reading between read head and grating face, reduces the impact on measurement result of error that traditional raster chi introduces because being directed at read head Set and Positioning.This number reading method utilizes laser head to lock rail signal simultaneously, breaks through tradition and debates to method, improves certainty of measurement.Using the industrialization achievement of optical storage technology, frame of reference cost is relatively low, and volume is little, integration degree is higher, can be precision manufactureing, the accurate measurement Embedded nano measurement equipment of offer.The present invention finally realizes range of displacement measurement: 40mm；Measurement reproducibility: 10nm；Systemic resolution reaches: 1nm.
Accompanying drawing explanation
Fig. 1 is a kind of overall structure schematic diagram of the present invention；
Fig. 2 is the structural representation of the present invention six quadrant photodetector；
Fig. 3 is that the three light beams that goes out of laser instrument diffraction of the present invention is at the focusing schematic diagram measured on grating.
Detailed description of the invention
For the technological means making the present invention realize, creation characteristic, reach purpose and effect and be prone to bright from understanding, the present invention is expanded on further below in conjunction with being specifically illustrating.
With reference to Fig. 1, Fig. 2, Fig. 3, grating accurate measurement structure based on self-focusing principle and measuring method, including for producing the laser instrument 1 of laser beam, optical prism, grating, photodetector 9, optical prism includes reflecting mirror 4, spectroscope 3, collimating mirror 5；Grating includes one first grating, the second grating, using the first grating as a spectro-grating 2, measures grating 7 using the second grating as one；The light-emitting window of laser instrument 1 is provided with spectro-grating 2, the laser that laser instrument 1 sends is divided into three beams diffraction light by spectro-grating 2, spectro-grating 2 is arranged over spectroscope 3, the left of spectroscope 3 is provided with reflecting mirror 4, the reflecting surface of reflecting mirror 4 is positioned at right side, and reflecting mirror 4 is tilted to the left setting, reflecting mirror 4 be arranged over collimating mirror 5, collimating mirror 5 be arranged over object lens 6, object lens 6 be arranged over measure grating 7；The right of spectroscope 3 is provided with a cylindrical mirror 8, and cylindrical mirror 8 right is provided with photodetector 9.The light beam that laser instrument 1 of the present invention sends is divided into+1 grade of light beam α ,-1 grade of light beam γ and 0 grade of this three light beams of light beam β after spectro-grating 2 diffraction, and 0 grade of light beam is used for measuring, and ± 1 grade of light beam obtains tracking servo signal and is used for differentiating pattern displacement direction.To focus on after three beams diffraction light successively approach spectroscope 3, reflecting mirror 4, collimating mirror 5, object lens 6 on measurement grating 7；Three beams collimated light beam is become after collimated mirror 5, enter object lens 6 and focus on measurement grating 7, the reflection light beam measuring signal on measurement grating 7 is focused on photodetector 9 as after backtracking to spectroscope 3 after cylindrical mirror 8, the sine wave signal that photodetector 9 receives, for follow-up specific gratings signal processing and sub-circuit, carries out shaping counting and Subdividing Processing to signal.
Spectro-grating is transmission-type grating, and measuring grating is reflective gratings.
Laser instrument 1 can use distributed feedback type semiconductor laser.Distributed feedback has without mode hopping, advantage that output wavelength temperature varying coefficient is less.Laser instrument 1 can also use quantum trap type semiconductor laser.To reduce the volume of the present invention.Laser instrument 1 includes a laser diode.In order to send light beam.
The photosurface of photodetector 9 is just to the emergent light towards cylindrical mirror 8.The angle of inclination that reflecting mirror 4 is gone up in the horizontal direction is 20 °～70 °.Preferably diffracted beam to be injected other optical prisms.
Photodetector 9 is one or six quadrant photodetectors, is provided with a testing circuit 10 in six quadrant photodetectors, and six quadrant photodetectors connect a signal processing circuit 11 by testing circuit 10, and signal processing circuit 11 connects a PID/feedback control circuit 12；PID/feedback control circuit 12 connects a piezoelectric ceramic actuator 12, and piezoelectric ceramic actuator 12 is fixing connects object lens 6.
The focus error signal (voltage signal) of six quadrant photodetector outputs is after the testing circuit of six quadrant photodetectors, PID/feedback control circuit is sent by signal processing circuit, PID/feedback control circuit drives piezoelectric ceramic actuator, thus drive object lens to move, make object focal point and measure the coincidence of grating planar position, it is achieved automatically focusing on.The focus error signal (voltage signal) of six quadrant photodetector outputs presents S type with measuring grating planar position from focal plane of lens distance change.When i.e. there is defocusing phenomenon more than the depth of field of object lens in measured point out of focus distance, piezoelectric ceramic actuator deformation under voltage, drive object lens to move, make object focal point move to measured surface, this is automatic focusing principle.
Object lens are locked burnt on the tested reflecting surface measuring grating automatically, all the time rise and fall along with the Surface Microtexture of the tested reflecting surface measuring grating, lens shift amount becomes one-to-one relationship with the drive voltage signal of piezoelectric ceramic actuator, and the driving voltage of piezoelectric ceramic actuator depends on the focus error signal of six quadrant detector outputs.Owing to focus error signal has high-resolution and high-precision characteristic, it is thus possible to self adaptation grating alignment attitude, it is achieved the self adaptation reading between read head and grating face.
It is about 7um in the range of linearity principle of the focus error signal of six quadrant photodetector outputs, it is difficult in the application be directed at, use during measurement and realize in two steps: first, High Precision Piezoelectric Ceramic driver drives object lens are sent to move after treatment based on this focus error signal, make object focal point and measure the coincidence of grating planar position, finding measurement grating focal plane, it is achieved automatically focus on, now maintain object lens position constant, i.e. lock focal plane.Then use this focus error signal to carry out grating grid period measurement, calculate the grating displacement relative to read head according to the profile test curve incorporating signal processing techniques of grating grid
See Fig. 2, six quadrant photodetectors are provided with three photosensitive regions, for the first photosensitive region 21 of 0 grade of light beam of sensing, for sensing the second photosensitive region 22 of-1 grade of light beam, for sensing the 3rd photosensitive region 23 of+1 grade of light beam, the second photosensitive region 22 and the 3rd photosensitive region 23 lay respectively at the left and right sides of the first photosensitive region 21.Second photosensitive region the 22, the 3rd photosensitive region 23 is corresponding to the lock rail signal (preventing from becoming the signal of rail when disc reading track signal) during disc reading, three photosensitive region power correspondences measure the distance that point leaves the focal plane of object lens, the fluctuating of these three focus point correspondence grating cosine shows the phase information fixed, size in conjunction with three sensing area signals, it is achieved the real-time judgment grating direction of motion.During measurement, tri-photosensitive regions of A/B/C/D, E, F corresponding 0 grade ,+1 grade and-1 grade of light beam in six quadrant photodetectors.First photosensitive region focuses on the focus point shape of the first photosensitive region by 0 grade of light beam of sensing, exports different voltage signals by photodetector, obtains measuring grating planar position from focal plane of lens distance situation of change.
Being provided with a light cell in photodetector, light cell is a thin film photocell, and thin film photocell is coated on above or below three photosensitive regions uniformly.Thus realize self power generation, it is simple to the required electricity consumption of work.Thin film photocell connects an electricity storage device, and electricity storage device is provided with a power output end.For connecting other electricity consumption devices of the present invention, it is provided that the electricity needed for the electricity consumption device of the present invention.
Also include a driving module, drive Module connection signal to process circuit；It is provided with a rotation support below spectroscope, drives module to connect rotating basis by a drive mechanism.Thus realize adjusting spectroscope angle (slit or focal length).
Grating precision measurement method based on self-focusing principle, the light beam that laser instrument 1 sends is divided into 0 grade and ± 1 grade of light beam after spectro-grating 2 diffraction, and 0 grade of light beam is used for measuring, and ± 1 grade of light beam obtains tracking servo signal and is used for differentiating pattern displacement direction；0 grade sequentially passes through spectroscope 3 with ± 1 grade of light beam three light beam, becomes three beams collimated light beam after reflecting mirror 4, collimated mirror 5, enters object lens 6 and focuses on measurement grating 7；Measure the reflection light beam measuring signal on grating 7 by backtracking to spectroscope 3；0 grade focuses on six quadrant photodetectors after ± 1 grade of light beam three light beam after cylindrical mirror 8, focus error signal (voltage signal) circuit 10 after testing of six quadrant photodetector outputs, signal processing circuit 11 transmit signal to PID/feedback control circuit 12, feedback control circuit 12 drives piezoelectric ceramic actuator 13 to drive object lens 6 to move, make object focal point and measure the coincidence of grating planar position, it is achieved automatically focusing on.
Beneficial effect: the scan characteristic of grating precision measurement system and laser instrument is combined by the present invention, utilizes the laser head of laser instrument focus on and automatically focus on the complementary advantage of two kinds of measuring methods, it is achieved the accurate measurement to grating grid.Micro-nano optical grating measuring system based on direct-reading grating grid, it is achieved the self adaptation reading between read head and grating face, reduces the impact on measurement result of error that traditional raster chi introduces because being directed at read head Set and Positioning.This number reading method utilizes laser head to lock rail signal simultaneously, breaks through tradition and debates to method, improves certainty of measurement.Using the industrialization achievement of optical storage technology, frame of reference cost is relatively low, and volume is little, integration degree is higher, can be precision manufactureing, the accurate measurement Embedded nano measurement equipment of offer.The present invention finally realizes range of displacement measurement: 40mm；Measurement reproducibility: 10nm；Systemic resolution reaches: 1nm.
The ultimate principle of the present invention and principal character and advantages of the present invention have more than been shown and described.Skilled person will appreciate that of the industry; the present invention is not restricted to the described embodiments; the principle that the present invention is simply described described in above-described embodiment and description; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and these changes and improvements both fall within scope of the claimed invention.Claimed scope is defined by appending claims and equivalent thereof.
Claims (7)
1. grating accurate measurement structure based on self-focusing principle, including the laser for producing laser beam
Device, optical prism, grating, photodetector, it is characterised in that described optical prism includes a reflection
Mirror, a spectroscope, a collimating mirror；
Described grating includes one first grating, the second grating, using described first grating as a spectro-grating,
Grating is measured as one using described second grating；
The light-emitting window of described laser instrument is provided with described spectro-grating, and laser instrument is sent by described spectro-grating
Laser is divided into three beams diffraction light, described spectro-grating to be arranged over described spectroscope, a described spectroscopical left side
Side is provided with described reflecting mirror, and the reflecting surface of described reflecting mirror is positioned at right side, and described reflecting mirror is tilted to the left
Arrange, described reflecting mirror be arranged over described collimating mirror, described collimating mirror be arranged over object lens, institute
That states object lens is arranged over described measurement grating；
Described spectroscopical right is provided with a cylindrical mirror, and described cylindrical mirror right is provided with described photodetector；
Described photodetector is one or six quadrant photodetectors, is provided with in described six quadrant photodetectors
One testing circuit, described six quadrant photodetectors connect a signal processing circuit by described testing circuit,
Described signal processing circuit connects a PID/feedback control circuit；
Described PID/feedback control circuit connects a piezoelectric ceramic actuator, and described piezoelectric ceramic actuator is solid
Surely described object lens are connected；
The light beam that described laser instrument sends is divided into 0 grade and ± 1 grade of light beam after described spectro-grating diffraction, and 0
Level light beam is used for measuring, and ± 1 grade of light beam obtains tracking servo signal and is used for differentiating pattern displacement direction；
0 grade and ± 1 grade of light beam three light beam sequentially pass through described spectroscope, described reflecting mirror, through described collimation
Become three beams collimated light beam after mirror, enter described object lens and focus on described measurement grating；
The reflection light beam of signal is measured by backtracking to described spectroscope on described measurement grating；
0 grade focuses on described six quadrant photodetectors after ± 1 grade of light beam three light beam after described cylindrical mirror
On, the focus error signal circuit after testing of described six quadrant photodetector outputs, signal processing circuit
Transmission signal drives described object lens to PID/feedback control circuit, feedback control circuit piezoelectric ceramic actuator
Mobile so that described object focal point and described measurement grating planar position overlap, it is achieved automatically focus on.
Grating accurate measurement structure based on self-focusing principle the most according to claim 1, its feature
It is: described laser instrument is distributed feedback type semiconductor laser.
Grating accurate measurement structure based on self-focusing principle the most according to claim 1, its feature
It is: described laser instrument is quantum trap type semiconductor laser.
4. according to the grating accurate measurement structure based on self-focusing principle described in claim 1,2 or 3,
It is characterized in that: described laser instrument includes a laser diode.
Grating accurate measurement structure based on self-focusing principle the most according to claim 1, its feature
It is: the photosurface of described photodetector is just to the emergent light towards described cylindrical mirror.
Grating accurate measurement structure based on self-focusing principle the most according to claim 1, its feature
It is: the angle of inclination that described reflecting mirror is gone up in the horizontal direction is 20 °～70 °.
Grating accurate measurement structure based on self-focusing principle the most according to claim 1, its feature
It is: described six quadrant photodetectors are provided with three photosensitive regions, for the first of 0 grade of light beam of sensing
Photosensitive region, for sensing the second photosensitive region of-1 grade of light beam, for sensing the 3rd sense of+1 grade of light beam
Light region, described second photosensitive region and described 3rd photosensitive region lay respectively at described first photosensitive region
The left and right sides.
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| CN105450949B (en) * | 2015-12-24 | 2018-11-30 | 深圳奥比中光科技有限公司 | Compact-sized image information processing device and it is used for mode of laser group therein |
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