CN115128002B - System and method for measuring nonlinear optical properties of material - Google Patents
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Abstract
The invention provides a system and a method for measuring nonlinear optical properties of a material, wherein the measuring method integrates a Z scanning technology and confocal microscopic imaging, adopts a microscopic objective lens to perform excitation light focusing, signal light collection, sample surface morphology imaging and spot synchronous imaging, and realizes real-time monitoring of the size of a spot; the three-dimensional precise translation stage is used for controlling the position of the sample, so that the nonlinear optical property of the micron-sized sample can be measured. The method can synchronously measure the nonlinear absorption and nonlinear refraction data of the material, is simultaneously suitable for measuring uniform and non-uniform, macroscopic and microscopic samples, solves the problem of nonlinear property test of non-uniform irregular small-size samples, and expands the application and test range of Z scanning technology.
Description
Technical Field
The invention relates to the technical field of nonlinear optical measurement, in particular to a system and a method for measuring nonlinear optical properties of a material.
Technical Field
The first ruby laser in the world was developed from Maiman in 1960, and laser science and technology was rapidly developed. In the second year of laser advent (1961), franken et al discovered the optical second harmonic phenomenon, marking nonlinear optics as an emerging discipline.
Nonlinear absorption and nonlinear refraction belong to third-order nonlinear optical effects, and are non-parametric processes related to the mutual conversion of carriers between actual energy levels. Although four-wave mixing, interferometry, pump detection techniques, etc. can be used to measure the third-order nonlinear absorption coefficient or nonlinear refractive index, these methods have a relatively complex experimental optical path, and many difficulties need to be overcome during the experimental process and data analysis. The Z scanning technology is the most main technical means for measuring the nonlinear absorption and refraction of a material by a single beam, and is proposed by Bahae et al in 1990, and a plurality of researchers reform the technology later, so that the technology is the simplest, quick and sensitive experimental method for measuring the optical nonlinearity at present. However, the conventional Z scanning technique has high requirements for samples, is only suitable for testing large-size uniform continuous film samples, and is difficult to realize fixed-point measurement for small-size irregular samples. Aiming at the problems, Y.Li et al propose a microscopic nonlinear intensity scanning system, which has lower requirements on the surface of a sample and can measure an uneven sample, but the method needs to place the sample at a focus position, so that larger system errors are easily caused by inaccurate spot area test at the focus position, and meanwhile, the test of nonlinear refraction signals cannot be realized.
Accordingly, the prior art is still in need of improvement and development.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, the present invention aims to provide a system and a method for measuring nonlinear optical properties of materials, which aims to solve the problem that the nonlinear optical properties of micrometer-sized samples are difficult to measure in the prior art.
The technical scheme of the invention is as follows:
the system for measuring the nonlinear optical property of the material comprises a pulse laser, a first film plating total reflection mirror, a second film plating total reflection mirror, a circular metal film neutral density gradient filter, a first aperture diaphragm, a first beam splitting flat plate, a second beam splitting flat plate, a focusing objective lens, a sample to be measured, a collecting objective lens, a second aperture diaphragm, a third beam splitting flat plate, a second medium density filter and a second detector which are sequentially arranged along the direction of an output light beam of the pulse laser; a first neutral density filter and a first detector are sequentially arranged along the reflecting light direction of the first light splitting flat sheet, and an illumination light source xenon lamp is arranged along the other side of the reflecting direction of the first light splitting flat sheet; an imaging camera is arranged along the other side of the reflection direction of the second beam splitting flat sheet; a third aperture diaphragm, a third neutral density filter and a third detector are sequentially arranged along the reflection direction of the third light splitting flat sheet; the computer is electrically connected with the first detector, the second detector and the third detector respectively; the sample to be measured is arranged on a three-dimensional precise translation stage, and the three-dimensional precise translation stage is electrically connected with the computer through a controller; the imaging camera is electrically connected with the computer.
The system for measuring the nonlinear optical property of the material comprises a circular metal film neutral density gradient filter, a motor-driven rotating table and a controller, wherein the circular metal film neutral density gradient filter is arranged on the motor-driven rotating table, and the motor-driven rotating table is electrically connected with the motor-driven rotating table through the controller.
The system for measuring nonlinear optical properties of a material further comprises an energy meter and a beam quality analyzer electrically connected to the electrical power.
The system for measuring the nonlinear optical property of the material comprises a first coated total reflection mirror, a second coated total reflection mirror, a first light-splitting flat sheet, a second light-splitting flat sheet and a third light-splitting flat sheet, wherein the included angles between the first coated total reflection mirror, the second coated total reflection mirror, the first light-splitting flat sheet, the second light-splitting flat sheet and the optical axis are all 45 degrees.
The system for measuring nonlinear optical properties of a material, wherein the first light splitting flat sheet has a 50% light splitting ratio to the illumination light source xenon lamp.
A method of measuring nonlinear optical properties of a material based on the system, comprising the steps of:
turning on a pulse laser, and selecting laser wavelength, repetition frequency and initial energy according to measurement requirements;
the laser direction passes through the centers of the first aperture diaphragm and the second aperture diaphragm with equal heights by adjusting the first film plating total reflection mirror and the second film plating total reflection mirror; adjusting the collecting objective lens to enable the focus of the collecting objective lens to coincide with the focus of the focusing objective lens, and simultaneously ensuring that the centers of the focusing objective lens and the collecting objective lens coincide with a main light path; placing an energy meter behind a focusing objective lens to measure laser energy at a sample to be measured; the beam quality analyzer is placed at the focus of the focusing objective lens to measure the laser beam waist radius w 0 ；
Placing a sample to be tested on a sample frame, adjusting the sample to be tested to enable the surface of the sample to be tested to be perpendicular to a main light path, adjusting the z axis of a three-dimensional precise translation stage to enable the sample to be tested to form a clear image at an imaging camera, and adjusting the x axis and the y axis of the three-dimensional precise translation stage to find a test target;
defining the laser propagation direction as the positive direction of the z axis, the focal position of the focusing objective lens as z=0, moving the sample to be detected along the negative direction until the light spot edge coincides with the edge of the sample to be detected, and recording the position as-z 0 Setting rotation parameters of the electric rotating table through a computer, wherein the rotation parameters comprise an initial angle theta 0 Termination angle θ and rotation stepDelta theta, each time the electric rotating table rotates by an angle theta i Corresponding to one energy E 1θi Wherein θ i ＝θ 0 +i*Δθ，i＝0，1，2，...，[(θ-θ 0 )/Δθ]，E 1θi With theta i Gradually decreasing in increase of (c) using the formulaAnd->Calculating to obtain z 1θi The first detector, the second detector and the third detector input the detected energy signals into the computer, and the angle of the electric rotating table returns to the initial angle theta after the measurement is finished 0 ；
Starting a three-dimensional precise translation stage through a computer, setting a z-axis movement parameter to enable the movement range of a sample to be measured to be-z 0 To z 0 Each time the z axis of the precise translation stage moves a certain distance z i ，z i ＝-z 0 +i*Δz，i＝0，1，2，...，[2z 0 /Δz]The first detector, the second detector and the third detector input detected energy signals into the computer, and the precise translation stage moves the sample to z after the measurement is finished 0 A location;
setting rotation parameters of the electric rotating table through a computer, wherein the rotation parameters comprise an initial angle theta 0 A termination angle theta and a rotation step delta theta, wherein each rotation of the electric rotating table is one angle theta i Corresponding to one energy E 2θi Wherein θ i ＝θ 0 +i*Δθ，i＝0，1，2，...，[(θ-θ 0 )/Δθ]Using the formulaAnd->E is calculated to obtain 2θi The first detector, the second detector and the third detector output detected energy signalsEntering into the computer;
the energy signal obtained by the first detector is a reference light signal, the ratio of the energy signal of the second detector to that of the first detector is a transmission open hole signal, and the ratio of the energy signal of the third detector to the transmission open hole signal is a transmission closed hole signal; z recorded in the above step 1θi 、z i 、z 2θi Taking the transmission open pore signal as an ordinate and the plotted curve as an open pore nonlinear transmittance curve T of a sample to be measured open (z), i.e. nonlinear absorption signals; at a moving distance z i On the abscissa, the transmission closed cell signal is taken as the ordinate, and the plotted curve is a closed cell nonlinear transmittance curve T of a sample closed (z), i.e. a nonlinear refractive signal;
using the formulax＝z/z 0 ，/>Nonlinear transmittance curve T for the aperture open (z) fitting to obtain nonlinear absorption coefficient beta of the sample to be measured, wherein k is wave number, L is thickness of the sample to be measured, and alpha 0 Is a linear absorption coefficient, z 0 For Rayleigh length, I 0 Is the on-axis intensity at the focus, w 0 Is the beam waist radius of the Gaussian beam; using the formula->ΔΦ 0 ＝k·Δn(0，0)·L eff ，/>A nonlinear transmittance curve T for the closed cells closed (z) fitting to obtain nonlinear refractive index n of the sample to be measured 2 Wherein n is 0 Is a linear refractive index.
The beneficial effects are that: the invention breaks through the size limitation of the sample based on the Z scanning technology and the confocal microscopic imaging technology, and realizes the nonlinear optical property of the micro-area measurement material; the system realizes automatic control and has the characteristics of high integration level, simplicity, sensitivity and rapidness; the system adopts the microscope objective to perform excitation light focusing, signal light collection, sample surface morphology imaging and light spot synchronous imaging, and can realize real-time monitoring of the light spot size; the three-dimensional precise translation stage is used for controlling the sample position, so that the measurement of nonlinear optical properties of the micron-sized sample can be realized, the difficult problem of nonlinear property test of the non-uniform irregular small-sized sample is solved, and the application and test range of the Z scanning technology are expanded.
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FIG. 1 is a schematic diagram of a system for measuring nonlinear optical properties of a material according to the present invention.
Detailed Description
The invention provides a system and a method for measuring nonlinear optical properties of materials, which are used for making the purposes, technical schemes and effects of the invention clearer and more definite, and are further described in detail below. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Referring to fig. 1, fig. 1 is a schematic diagram of a system for measuring nonlinear optical properties of a material according to the present invention, which includes a pulse laser 10, a first coated total reflection mirror 20, a second coated total reflection mirror 30, a circular metal film neutral density gradient filter 40, a first aperture diaphragm 50, a first beam splitting flat sheet 60, a second beam splitting flat sheet 70, a focusing objective 80, a sample to be measured 90, a collecting objective 100, a second aperture diaphragm 110, a third beam splitting flat sheet 120, a second medium density filter 130 and a second detector 140, which are sequentially arranged along an output beam direction of the pulse laser 10; a first neutral density filter 61 and a first detector 62 are sequentially arranged along the reflection direction of the first light splitting flat sheet 60, and an illumination light source xenon lamp 63 is arranged along the other side of the reflection direction of the first light splitting flat sheet 60; an imaging camera 71 is arranged along the other side of the reflection direction of the second beam splitting flat sheet 70; a third aperture diaphragm 121, a third neutral density filter 122 and a third detector 123 are sequentially arranged along the reflection direction of the third light splitting plane 120; a computer 150 electrically connected to the first, second and third probes 62, 140 and 123, respectively; the sample 90 to be measured is arranged on a three-dimensional precise translation stage 91, and the three-dimensional precise translation stage 91 is electrically connected with the computer 150 through a controller; the imaging camera 71 is electrically connected to the computer 150.
The system provided by this embodiment further includes an energy meter 160 and a beam quality analyzer 170 electrically connected to the computer 150. In this embodiment, the circular metal film neutral density gradient filter 40 is disposed on an electric rotating table 41, and the electric rotating table 41 is electrically connected to the computer 150 through a controller. In this embodiment, the included angles between the first coated total reflection mirror 20, the second coated total reflection mirror 30, the first beam splitting flat plate 60, the second beam splitting flat plate 70, and the third beam splitting flat plate 120 and the optical axis are all 45 °. The first light splitting plane 60 has a 50% light splitting ratio to the xenon lamp 63.
According to the embodiment, through improving the traditional Z scanning technology and combining the advantages of a microscopic intensity scanning system, the system for measuring the nonlinear optical property of the material is provided, and adopts a microscope objective to perform excitation light focusing, signal light collection and light spot synchronous imaging, and a three-dimensional precise translation stage is used for controlling the position of a sample to be measured, so that the nonlinear optical property of the micron-sized sample material can be measured. Based on the system, the position of the microscopic sample to be measured can be positioned before the nonlinear optical property is measured, the size of the light spot is monitored in real time in the measuring process, the limitation of the size of the sample to be measured is broken through, the surface requirement of the sample to be measured is low, and the nonlinear optical property of the microscopic small-size transparent and semitransparent irregular sample can be measured. The system provided by the embodiment also realizes automatic control and has the characteristics of high integration level, simplicity, sensitivity and rapidness.
Based on the system, the embodiment of the invention also provides a method for measuring the nonlinear optical property of the material, which mainly comprises the steps of measuring the nonlinear transmittance data and the nonlinear refractive index data of a sample to be measured, and then respectively fitting the nonlinear transmittance data and the nonlinear refractive index data to obtain the nonlinear absorption coefficient beta and the nonlinear refractive index of the sample to be measuredn 2 Which comprises the following steps:
turning on a pulse laser, and selecting laser wavelength, repetition frequency and initial energy according to measurement requirements;
the laser direction passes through the centers of the first aperture diaphragm and the second aperture diaphragm with equal heights by adjusting the first film plating total reflection mirror and the second film plating total reflection mirror; adjusting the collecting objective lens to enable the focus of the collecting objective lens to coincide with the focus of the focusing objective lens, and simultaneously ensuring that the centers of the focusing objective lens and the collecting objective lens coincide with a main light path; placing an energy meter behind a focusing objective lens to measure laser energy at a sample to be measured; the beam quality analyzer is placed at the focus of the focusing objective lens to measure the laser beam waist radius w 0 ；
Placing a sample to be tested on a sample frame, adjusting the sample to be tested to enable the surface of the sample to be tested to be perpendicular to a main light path, adjusting the z axis of a three-dimensional precise translation stage to enable the sample to be tested to form a clear image at an imaging camera, and adjusting the x axis and the y axis of the three-dimensional precise translation stage to find a test target;
defining the laser propagation direction as the positive direction of the z axis, the focal position of the focusing objective lens as z=0, moving the sample to be detected along the negative direction until the light spot edge coincides with the edge of the sample to be detected, and recording the position as-z 0 Setting rotation parameters of the electric rotating table through a computer, wherein the rotation parameters comprise an initial angle theta 0 A termination angle theta and a rotation step delta theta, wherein each rotation of the electric rotating table is one angle theta i Corresponding to one energy E 1θi Wherein θ i ＝θ 0 +i*Δθ，i＝0，1，2，...，[(θ-θ 0 )/Δθ]，E 1θi With theta i Gradually decreasing in increase of (c) using the formulaAnd->Ten calculates to obtain z 1θi The first detector, the second detector and the third detector input the detected energy signals into the computer, and the angle of the electric rotating table returns to the initial angle theta after the measurement is finished 0 ；
Starting a three-dimensional precise translation stage through a computer, setting a z-axis movement parameter to enable the movement range of a sample to be measured to be-z 0 To z 0 Each time the z axis of the precise translation stage moves a certain distance z i ，z i ＝-z 0 +i*Δz，i＝0，1，2，...，[2z 0 /Δz]The first detector, the second detector and the third detector input detected energy signals into the computer, and the precise translation stage moves the sample to z after the measurement is finished 0 A location;
setting rotation parameters of the electric rotating table through a computer, wherein the rotation parameters comprise an initial angle theta 0 A termination angle theta and a rotation step delta theta, wherein each rotation of the electric rotating table is one angle theta i Corresponding to one energy E 2θi Wherein θ i ＝θ 0 +i*Δθ，i＝0，1，2，...，[(θ-θ 0 )/Δθ]Using the formulaAnd->E is calculated to obtain 2θi The first detector, the second detector and the third detector input detected energy signals into the computer;
the energy signal obtained by the first detector is a reference light signal, the ratio of the energy signal of the second detector to the energy signal of the first detector is a transmission open hole signal, and the ratio of the energy signal of the third detector to the transmission open hole signal is a transmission closed hole signal; z recorded in the above step 1θi 、z i 、z 2θi Taking the transmission open pore signal as an ordinate and the plotted curve as an open pore nonlinear transmittance curve T of a sample to be measured open (z), i.e. nonlinear absorption signals; at a moving distance z i On the abscissa, the transmission closed cell signal is taken as the ordinate, and the plotted curve is a closed cell nonlinear transmittance curve T of a sample c1osed (z), i.e. a nonlinear refractive signal;
using the formulax＝z/z 0 ，/>Nonlinear transmittance curve T for the aperture open (z) fitting to obtain nonlinear absorption coefficient beta of the sample to be measured, wherein k is wave number, L is thickness of the sample to be measured, and alpha 0 Is a linear absorption coefficient, z 0 For Rayleigh length, I 0 Is the on-axis intensity at the focus, w 0 Is the beam waist radius, q of Gaussian beam 0 And q 00 Is introduced in the calculation process in order to simplify the formula, without specific physical meaning; using the formula->ΔΦ 0 ＝k·Δn(0，0)·L eff ，A nonlinear transmittance curve T for the closed cells closed (z) fitting to obtain nonlinear refractive index n of the sample to be measured 2 Wherein n is 0 Is a linear refractive index.
The method provided by the embodiment combines the traditional Z scanning technology and the microscopic intensity scanning technology, utilizes the microscope objective to perform excitation light aggregation, signal light collection, sample surface morphology imaging and spot synchronous imaging, and realizes the real-time monitoring of the spot size; meanwhile, the position of the sample to be measured is controlled by using the three-dimensional precise translation stage, so that the measurement of nonlinear optical properties (including nonlinear transmittance data and nonlinear refractive index data) of the micron-sized sample is realized, the nonlinear property testing difficulty of the non-uniform irregular micron-sized small-sized sample is solved, and the application and testing range of the Z scanning technology are expanded.
It is to be understood that the invention is not limited in its application to the examples described above, but is capable of modification and variation in light of the above teachings by those skilled in the art, and that all such modifications and variations are intended to be included within the scope of the appended claims.
Claims (6)
1. The system for measuring the nonlinear optical property of the material is characterized by comprising a pulse laser, a first film plating total reflection mirror, a second film plating total reflection mirror, a circular metal film neutral density gradient filter, a first aperture diaphragm, a first beam splitting flat plate, a second beam splitting flat plate, a focusing objective lens, a sample to be measured, a collecting objective lens, a second aperture diaphragm, a third beam splitting flat plate, a second medium-sized density filter and a second detector which are sequentially arranged along the direction of an output beam of the pulse laser; a first neutral density filter and a first detector are sequentially arranged along the reflecting light direction of the first light splitting flat sheet, and an illumination light source xenon lamp is arranged along the other side of the reflecting direction of the first light splitting flat sheet; an imaging camera is arranged along the other side of the reflection direction of the second beam splitting flat sheet; a third aperture diaphragm, a third neutral density filter and a third detector are sequentially arranged along the reflection direction of the third light splitting flat sheet; the computer is electrically connected with the first detector, the second detector and the third detector respectively; the sample to be measured is arranged on a three-dimensional precise translation stage, and the three-dimensional precise translation stage is electrically connected with the computer through a controller; the imaging camera is electrically connected with the computer.
2. The system for measuring nonlinear optical properties of a material according to claim 1, wherein the circular metal film neutral density graded filter is disposed on an motorized rotary stage, the motorized rotary stage being electrically connected to the motorized rotary stage by a controller.
3. The system for measuring a nonlinear optical property of a material in accordance with claim 1, further comprising an energy meter and a beam quality analyzer electrically connected to said electrode.
4. The system for measuring nonlinear optical properties of a material according to claim 1, wherein the first coated total reflection mirror, the second coated total reflection mirror, the first beam splitting plate, the second beam splitting plate, and the third beam splitting plate are all at an angle of 45 ° to the optical axis.
5. The system for measuring nonlinear optical properties of a material according to claim 1, wherein the first light splitting plane has a 50% split ratio to the illumination source xenon lamp.
6. A method of measuring nonlinear optical properties of a material based on the system of any one of claims 1-5, comprising the steps of:
turning on a pulse laser, and selecting laser wavelength, repetition frequency and initial energy according to measurement requirements;
the laser direction passes through the centers of the first aperture diaphragm and the second aperture diaphragm with equal heights by adjusting the first film plating total reflection mirror and the second film plating total reflection mirror; adjusting the collecting objective lens to enable the focus of the collecting objective lens to coincide with the focus of the focusing objective lens, and simultaneously ensuring that the centers of the focusing objective lens and the collecting objective lens coincide with a main light path; placing an energy meter behind a focusing objective lens to measure laser energy at a sample to be measured; the beam quality analyzer is placed at the focus of the focusing objective lens to measure the laser beam waist radius w 0 ；
Placing a sample to be tested on a sample frame, adjusting the sample to be tested to enable the surface of the sample to be tested to be perpendicular to a main light path, adjusting the z axis of a three-dimensional precise translation stage to enable the sample to be tested to form a clear image at an imaging camera, and adjusting the x axis and the y axis of the three-dimensional precise translation stage to find a test target;
defining the laser propagation direction as the positive direction of the z axis, the focal position of the focusing objective lens as z=0, moving the sample to be detected along the negative direction until the light spot edge coincides with the edge of the sample to be detected, and recording the position as-z 0 Setting rotation parameters of the electric rotating table through a computer, wherein the rotation parameters comprise an initial angle theta 0 A termination angle theta and a rotation step delta theta, wherein each rotation of the electric rotating table is one angle theta i Corresponding to one energy E 1θi Wherein θ i ＝θ 0 +i*Δθ，i＝0,1,2,…,[(θ-θ 0 )/Δθ]，E 1θi With theta i Gradually decreasing in increase of (c) using the formulaAnd->Calculating to obtain z 1θi The first detector, the second detector and the third detector input the detected energy signals into the computer, and the angle of the electric rotating table returns to the initial angle theta after the measurement is finished 0 ；
Starting a three-dimensional precise translation stage through a computer, setting a z-axis movement parameter to enable the movement range of a sample to be measured to be-z 0 To z 0 Each time the z axis of the precise translation stage moves a certain distance z i ，z i ＝-z 0 +i*Δz，i＝0,1,2,…,[2z 0 /Δz]The first detector, the second detector and the third detector input detected energy signals into the computer, and the precise translation stage moves the sample to z after the measurement is finished 0 A location;
setting rotation parameters of the electric rotating table through a computer, wherein the rotation parameters comprise an initial angle theta 0 A termination angle theta and a rotation step delta theta, wherein each rotation of the electric rotating table is one angle theta i Corresponding to one energy E 2θi Wherein θ i ＝θ 0 +i*Δθ，i＝0,1,2,…,[(θ-θ 0 )/Δθ]Using the formulaAnd->E is calculated to obtain 2θi The first detector, the second detector and the third detector input detected energy signals into the computer;
the energy signal obtained by the first detector is a reference light signal, the ratio of the energy signal of the second detector to that of the first detector is a transmission open hole signal, and the ratio of the energy signal of the third detector to that of the transmission open hole signal is transmissionA closed cell signal; z recorded in the above step 1θi 、z i 、z 2θi Taking the transmission open pore signal as an ordinate and the plotted curve as an open pore nonlinear transmittance curve T of a sample to be measured open (z), i.e. nonlinear absorption signals; at a moving distance z i On the abscissa, the transmission closed cell signal is taken as the ordinate, and the plotted curve is a closed cell nonlinear transmittance curve T of a sample closed (z), i.e. a nonlinear refractive signal;
using the formulax＝z/z 0 ，Nonlinear transmittance curve T for the aperture open (z) fitting to obtain nonlinear absorption coefficient beta of the sample to be measured, wherein k is wave number, L is thickness of the sample to be measured, and alpha 0 Is a linear absorption coefficient, z 0 For Rayleigh length, I 0 Is the on-axis intensity at the focus, w 0 Is the beam waist radius of the Gaussian beam; using the formula->ΔΦ 0 ＝k·Δn(0，0)·L eff ，/>A nonlinear transmittance curve T for the closed cells closed (z) fitting to obtain nonlinear refractive index n of the sample to be measured 2 Wherein n is 0 Is a linear refractive index.
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| CN114486739A (en) * | 2022-01-25 | 2022-05-13 | 山东大学 | Z-scan measuring device and method for measuring nonlinear optical coefficient |
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| WO2013072875A2 (en) * | 2011-11-15 | 2013-05-23 | Technion Research & Development Foundation Ltd. | Method and system for transmitting light |
| CN105067528A (en) * | 2015-07-20 | 2015-11-18 | 中国科学院上海光学精密机械研究所 | Two dimension confocal microscopynon-linear intensity scanning system and measurement method |
| CN107192670A (en) * | 2017-05-03 | 2017-09-22 | 中国科学院上海光学精密机械研究所 | The measurement apparatus and measuring method of material linear absorption and non-linear absorption |
| WO2021143527A1 (en) * | 2020-01-18 | 2021-07-22 | 哈尔滨工业大学 | Axial differential dark field confocal microscopic measurement device and method |
| CN114486739A (en) * | 2022-01-25 | 2022-05-13 | 山东大学 | Z-scan measuring device and method for measuring nonlinear optical coefficient |
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