CN106443996A - Spectral confocal lens module - Google Patents
Spectral confocal lens module Download PDFInfo
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- CN106443996A CN106443996A CN201611119077.6A CN201611119077A CN106443996A CN 106443996 A CN106443996 A CN 106443996A CN 201611119077 A CN201611119077 A CN 201611119077A CN 106443996 A CN106443996 A CN 106443996A
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- lens
- aberration
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- light
- measured object
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
- G02B13/002—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having at least one aspherical surface
- G02B13/003—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having at least one aspherical surface having two lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
Abstract
The invention discloses a spectral confocal lens module. The spectral confocal lens module comprises a shell and a lens group arranged on the shell, a entrance of light hole and an exit of light hole. The lens module gathers the lights with the different wavelengths from the entrance of light holes to different positions of an optical axis in the direction of the object, so as for the function of spectral confocal lens. The lens module is composed of a first lens and a second lens. The first lens and the second lens produce a chromatic aberration by way of alternately expanding the chromatic aberration. And at least one surface of the first lens is aspherical. The first lens is used to reduce aberration and enlarge the chromatic aberration. The spectral confocal lens module has the advantages of few in number of lenses, easy in assembling, small in size, low in cost, and less in aberration due to setting the first lens as an aspherial surface.
Description
Technical field
The present invention relates to accurate displacement fields of measurement, more particularly to a kind of spectrum copolymerization focus lens assembly.
Background technology
Nineteen fifty-five, M.Minsky invented Laser Scanning Confocal Microscope, can non-contactly Measuring Object distance or displacement.This is former
The development through decades for the reason has been widely used now.Its cardinal principle is：Beam of laser is very thin through focusing on one
Focus be irradiated on measured object and then reflect back, the focal point on reflected light path places a minimum aperture diaphragm
(being commonly called as pin hole), then moves axial distance or certain eyeglass axially position of light path, to find signal position the strongest, should
Position is exactly the position that reverberation and pin hole form focus simultaneously, and referred to as copolymerization is burnt or confocal.
1986《Journal of Optics》Magazine, volume 17, Number 6, G Molesini and FQuercioli sends out
Table《Pseudocolor effects of longitudinal chromatic aberration》In article, describe one
The method of kind, introduces in check axial chromatic aberration in optical imaging systems, produces the wavelength dispersion according to dull rule change,
Apparent height distribution with Wavelength-encoding measured object.
Nineteen ninety-five, some companies of Europe were proposed the product of commercialization.Some products come transmission light source or reflection using optical fiber
Optical fiber, camera lens and master controller separately.
The burnt principle such as accompanying drawing 1 of spectrum copolymerization, light source 1 launches a broadband light, reaches lens 4, lens 4 through needle passing hole 2
Dispersion light is irradiated to measured object 5, each wavelength focus comes by rule distribution on optical axis.Reflected light is again through lens
4 and light-dividing device 3 through needle passing hole 6, be irradiated to spectral measurement part 7.Only on optical axis and with measured object surface intersection area
The light of wavelength, could pass through pin hole 6 and reach part 7, other wavelength due to by pin hole 6 stop cannot or only few part arrival portion
Part 7, the crest finding spectrum is assured that relative position.
Focusing technology widely uses, particularly in submicrometer field, measured object spectrum in accurate non-cpntact measurement altogether
The diversified field in surface has been one of only a few feasible program.Company's addition light of the specialty that gets more and more with countries in the world
Spectrum focus area altogether, this technology has been widely used for biology, quasiconductor, components and parts, historical relic, Precise outline measurement, accurate position
Move the fields such as feedback, mobile phone part or profile measurement, and several noncontact 3D of only a few is adopted as by ISO25178 standard and survey
One of amount recommended technology.This technology can to all trades and professions for example the measurement of mechanical five metals plastic cement, measurement of coordinates, medical treatment scanning, too
Positive energy, material analysis, vibration survey, glass measurement, optical element measurement, packaging for foodstuff, measured thin film, liquid crystal display or touch
Screen measurement, transportation and energy's equipment, construction of road bridges, chemical equipment measurement, nuclear energy, Aero-Space etc. field extension, is a use
Way widely basic technology.
However, existing spectrum copolymerization zoom lens are typically necessary much individual eyeglasses, structure is more complicated.
Content of the invention
The main object of the present invention is to provide a kind of spectrum copolymerization focus lens assembly, and structure is relatively simply it is easy to assemble.
For achieving the above object, spectrum copolymerization focus lens assembly proposed by the present invention, including：Housing and be arranged at described shell
Lens group on body, incidence hole and light hole, this lens group dispersion ground is the light distribution ground of the different wave length coming from incidence hole
Gather the diverse location on the optical axis of measured object direction at least one, in order to producing spectrum copolymerization zoom lens function it is characterised in that
Described lens group is made up of the first lens and the second lens, and described first lens expand aberration with described second lens with relay
Mode produces aberration, and at least one surface of described first lens is aspheric surface, and described first lens are used for expanding aberration
While reduce aberration.
Preferably, described first lens and the second lens are convex lenss.
Preferably, two surfaces of described first lens are aspheric surface.
Preferably, at least one surface of described second lens is aspheric surface.
Preferably, the profile on two surfaces being oppositely arranged of described first lens is different, two of described second lens
The profile on the surface being oppositely arranged all differs.
Preferably, two surfaces being oppositely arranged of described second lens are sphere, and described second lens are arranged at
Described housing is near the side of described measured object.
Preferably, the first lens are additionally operable to for the light coming from incidence hole to gather collimation or close to collimation.
Preferably, described first lens are different from the material of described second lens, and dispersion values are different.
Preferably, leave gap between described first lens and described second lens, and described gap is less than described first
The diameter of the lens being relatively large in diameter between lens and described second lens.
Preferably, the numerical aperture in measured object direction is more than the numerical aperture in incidence hole direction.
Above-mentioned spectrum altogether focusing lens component, lens group is made up of the first lens and the second lens, described first lens with
Described second lens produce aberration in the way of relay expands aberration, and at least one surface of described first lens is aspheric
Face, described first lens are used for while expanding aberration reducing aberration.The present invention only need to adopt two eyeglasses, and number of lenses is relatively
Less, it is easily assembled to, small volume, cost are relatively low, and aberration is less.
Brief description
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
Have technology description in required use accompanying drawing be briefly described it should be apparent that, drawings in the following description be only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, acceptable
Structure according to these accompanying drawings obtains other accompanying drawings.
Fig. 1 is the burnt measuring principle figure of spectrum copolymerization；
Fig. 2 is the structural representation of the common focusing lens component of spectrum of one embodiment of the invention；
Fig. 3 is the structural representation of the common focusing lens component of spectrum of another embodiment of the present invention；
Fig. 4 is the MTF curve of the common focusing lens component of spectrum shown in Fig. 3.
Drawing reference numeral explanation：
| Label | Title | Label | Title |
| 10 | Spectrum copolymerization focus lens assembly | 100 | Housing |
| 101 | Incidence hole | 200 | Lens group |
| 210 | First lens | 220 | Second lens |
| 300 | Keeper | 310 | First location division |
| 320 | Second location division | 330 | 3rd location division |
| 20 | Measured object |
The realization of the object of the invention, functional characteristics and advantage will be described further in conjunction with the embodiments referring to the drawings.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation description is it is clear that described embodiment is only a part of embodiment of the present invention, rather than whole embodiments.Base
Embodiment in the present invention, those of ordinary skill in the art obtained under the premise of not making creative work all its
His embodiment, broadly falls into the scope of protection of the invention.
It is to be appreciated that the directional instruction (such as up, down, left, right, before and after ...) of institute is only used in the embodiment of the present invention
In explaining the relative position relation between each part, motion conditions etc. under a certain particular pose (as shown in drawings), if should
When particular pose changes, then directionality instruction also correspondingly changes therewith.
In addition, in the present invention such as relating to the description of " first ", " second " etc. is only used for describing purpose, and it is not intended that
Indicate or imply its relative importance or imply the order of technical characteristic indicated by indicating or quantity.Thus, define " the
One ", the feature of " second " can be expressed or implicitly include at least one this feature.In describing the invention, " multiple "
It is meant that at least two, such as two, three etc., unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, term " connection ", " fixation " etc. should be interpreted broadly,
For example, " fixing " can be to be fixedly connected or be detachably connected, or integral；Can be mechanically connected or
Electrical connection；Can be to be joined directly together it is also possible to be indirectly connected to by intermediary, can be the connection or two of two element internals
The interaction relationship of individual element, limits unless otherwise clear and definite.Term incidence hole and light hole, refer to and are equivalent to optics aperture
Structure, such as fiber optic aperture, incidence hole and light hole can also be overlapped.For those of ordinary skill in the art
Speech, can understand above-mentioned term concrete meaning in the present invention as the case may be.
In addition, the technical scheme between each embodiment of the present invention can be combined with each other, but must be general with this area
Based on logical technical staff is capable of, will be understood that this when the combination appearance of technical scheme is conflicting or cannot realize
The combination of technical scheme does not exist, also not within the protection domain of application claims.
The present invention proposes a kind of spectrum copolymerization focus lens assembly 10 for being detected to the displacement of measured object 20.
Refer to Fig. 2, in an embodiment of the present invention, spectrum copolymerization focus lens assembly 10 includes housing 100 and is arranged at
Lens group 200 on housing 100, described housing 100 is provided with incidence hole 101 and light hole (schemes not marking, with incidence hole weight
Close), described incidence hole 101 and described light hole are located at the side away from described measured object 20 for the described lens group, and light is from described
Incidence hole 101 is injected, and by the effect of described lens group 200, is dispersed on measured object 20, and part reflected light again passes by described
The effect of lens group 200, returns described light hole.
This lens group dispersion ground gathers one, measured object direction light the light distribution of the different wave length coming from incidence hole
Diverse location on axle, in order to produce spectrum copolymerization zoom lens function (it should be noted that lens group can produce whole or master
The spectrum copolymerization zoom lens function of wanting).The first lens 210 and the second lens that described lens group 200 is arranged by two panels common optical axis
220 compositions, described first lens 210 produce aberration with described second lens 220 in the way of relay expands aberration, and described the
At least one surface of one lens 210 is aspheric surface, and described first lens 210 are used for while expanding aberration reducing aberration.
In the present embodiment, the first lens 210 are arranged at the side near described incidence hole 101 for the described housing 100, and second
Lens 220 are arranged at described housing 100 near the side of measured object 20.Certainly, in other embodiments, the first lens 210 He
The position of the second lens 220 can also be exchanged, i.e. the first lens 210 are arranged at described housing 100 near the one of measured object 20
Side, the second lens 220 are arranged at the side near described incidence hole 101 for the described housing 100.
Further, in addition to the aforementioned function of reducing aberration while expanding aberration, the first lens also 210 are used for will
The light coming from incidence hole gathers collimation or close to collimation, and then increases a function having concurrently for the first lens 210, passes through
Have function concurrently and can reduce number of lenses.
Specifically, spectrum copolymerization focus lens assembly 10 also includes the keeper being arranged on described housing 100, described lens
Group 200 is fixed on described housing 100 by described keeper.Refer to Fig. 1, keeper 300 includes being fixedly installed on described
The first location division 310 on housing 100, the second location division 320 and the 3rd location division 330, described first lens 210 are arranged on institute
State between the first location division 310 and described second location division 320, described second lens be arranged on described second location division 320 with
Between described 3rd location division 330.
Specific in the present embodiment, the first location division 310 is fixed on the housing by screwing togather.For example, described first
Location division 310 is provided with external screw thread (not shown), in the correspondence position of described housing 100 is provided with and is mated with described external screw thread
Screw thread (not shown), described first location division 310 is fixed on housing 100 by described female thread and described externally threaded cooperation
On.First location division 310 is used for determining described first lens 210 apart from the position of incidence hole 101.Second location division 320 is ring
Shape barrel structure, for keeping the gap between the first lens 210 and the second lens 220, for example, the second location division 320 is detachable
Be arranged in housing 100.3rd location division 330 is passed through to screw togather the end away from incidence hole 101 being fixed on housing 100, example
As the 3rd location division 330 is provided with external screw thread, and the end of housing 100 is also equipped with corresponding female thread, and location division 330 is passed through
Screw thread is removably disposed in the end of housing 100.Specifically, by pulling down the 3rd keeper 330, the second lens can be changed
220, after the second lens 220 are removed, the second keeper 320 can also pull down replacing, as such, it is possible to adjustment the first lens
210 and second gaps between lens 220.
It is appreciated that it is in approximate reverse ratio that spectrum copolymerization Jiao's measurement apparatus generally have range with measured value absolute resolution
Relation.User is generally required for selecting a range section as needed.By changing the second lens 220, so that spectrum
Focusing lens component 10 has multiple range sections altogether, and several range sections share a kind of first lens 210, by changing the second lens
220, to change range section, so can save the die cost of aspheric surface batch production.
Refer to Fig. 1, leave gap between described first lens 210 and described second lens 220, and described gap is less than
The diameter of the lens being relatively large in diameter between described first lens 210 and described second lens 220, structure is compacter, reduces mirror
The length of head.In this application, the diameter of lens, refers to the diameter of its disc, and the first lens 210 and the second lens
Gap between 220 is controlled by the second keeper 320, compared with the mode using glue glued with traditional double, it is to avoid glue
The physicochemical property problem that for example temperature-resistance characteristic, thermal coefficient of expansion, aging resistance characteristic and moisture resistance cause, improve spectrum focus lamp altogether
The reliability of head assembly 10.
Certainly, in other embodiments, the first lens 210 and the second lens 220 can also be solid by other mechanical systems
It is scheduled on housing 100.
It should be noted that in the present embodiment, incidence hole 101 and light hole are same, i.e. realize into light simultaneously and
Go out light function, for example, an optical fiber is used both as incidence hole 101 and light hole.Certainly, in other embodiments, light hole
Can also be independent with incidence hole 101, i.e. light hole and incidence hole 101 are arranged at the diverse location of housing 100.
Preferably, described first lens 210 and the second lens 220 are all convex lenss.Further, described first lens
The profile on 210 two surfaces being oppositely arranged is different, to facilitate optimization optimum profiles to combine.Reduce aberration further, expand
Big aberration.In the present embodiment, two surfaces being oppositely arranged of described second lens 220 are aspheric surface, and relay ground expands
Aberration, reduces aberration, and aspheric curved surface profile is freer, is that software optimization increased degree of freedom.Preferably, described
The profile on two surfaces being oppositely arranged of two lens 220 all differs, and with the profile of described first lens 210 also not phase
With.
Normally, imaging optical path produces the aberration that aberration is to offset other eyeglasses, in order to clearly describe generation color
The direction of difference, is used herein as " expansion " one word, and " expansion " is meant that the direction producing aberration and another eyeglass produce aberration
Direction consistent, both are superposed to the aberration bigger than the aberration that single eyeglass produces.In order to clearly describe aspheric surface convex lenss
Significantly expand the implication of " significantly " in aberration sentence, the aberration defining its generation exceedes the 15% of camera lens total color difference and is
" significantly ".Because the dispersity of material is limited, produce the load of aberration in order to reduce by another eyeglass, be easy to excellent
Change, the aberration that the first lens 210 produce is preferably greater than 25%.First lens 210 and the second lens 220 expand color in relay mode
Difference, makes measured object 20 side maximum wavelength and the distance of minimum wavelength imaging focal length expand.
Further, described first lens 210 are different from the material of described second lens 220, and dispersion values are different, i.e.
Refractive index is different, and dispersion values are different, be conducive to optical design software to during light path optimization design using multiple refractive indexs, dispersion values
It is combined optimizing.
It is appreciated that camera lens is irradiated on measured object can produce a hot spot, the less Measurement Resolution of hot spot is higher.In order to
Copolymerization focus lens assembly is made to produce less hot spot, for example, using asymmetrical design, the numerical aperture quilt in measured object 20 direction
It is designed to the numerical aperture in significantly greater than light hole 101 direction, be so easier to obtain little hot spot.Optical fiber is usually used to make
For light hole, depending on fiber numerical aperture, on market, conventional optical fiber is typically both economical for the numerical aperture of unthreaded hole side, these
Mostly between 0.1 to 0.22, the numerical aperture in measured object direction is designed to more than 0.3, preferably greater than fiber numerical aperture
0.5, the hot spot of measured object can be reduced while taking into account cost.In addition, the numerical aperture in measured object direction is larger, in measurement
Allow measured object surface to have larger deflection angle with respect to optical axis during direct reflection, also can effectively obtain light, improve light
Can utilization rate.Specific in the present embodiment, the numerical aperture of light path measured object 20 side is more than 0.3, the numerical value of incidence hole side
Aperture is 0.1, and so, the diameter of certain wavelength incidence hole is imaged onto and is greatly reduced on measured object, improves resolution.
Specifically, the first lens 210 have at least following effect concurrently：
First, the light coming from incidence hole 101 is gathered collimation or close to collimation.
2nd, reduce camera lens by come from the light of incidence hole 101 to measured object 20 transmittance process in the aberration that produces.
3rd, expand the aberration of camera lens.
4th, having gathered collimation or having gathered to light hole close to the light collimating poly- of measured object 20 will be come from
Burnt.
5th, reduce or revise what camera lens produced during transmit the reflected light coming from measured object 20 to light hole
Aberration.
And the second lens 220 then have at least following effect concurrently：
First, by coming from, incidence hole 101 has been focused into collimating or the light of close collimation focuses on to measured object 20.
2nd, reduce camera lens by come from the light of the first lens 210 to measured object 20 transmittance process in the aberration that produces.
3rd, expand camera lens aberration.
4th, the reflected light coming from measured object 20 is gathered collimation or close to collimation to the first lens 210.
5th, reduce camera lens by come from the light of measured object 20 to light hole transmittance process in the aberration that produces.
It should be noted that the first lens 210 and the second lens 220 all realize above-mentioned functions through software optimization design,
Its specific optimization process is known for those skilled in the art, will not be described here.
Using during the above-mentioned test of focusing lens component 10 altogether, the light that light source sends is after incidence hole 101, saturating through first
Mirror 210 and the second lens 220 dispersion are irradiated on measured object 20, and the light just overlapping with measured object 20 reflecting surface is through first
Lens 210 and the second lens 220 return light hole, and other light are divergently radiated on measured object 20 due to leaving focus, absolutely
Most of reflected light returning gathers the surrounding of light hole it is impossible to pass through light hole, is divided by follow-up some devices such as spectrum
Analyzer is to measuring analytical calculation by the optical wavelength of light hole it is possible to parse measured object 20 focusing lens component together
10 relative position.Technology due to parsing position with spectrum be known technology and be not this patent main points, here
Repeat no more.
Refer to Fig. 3, it is the structural representation of the common focusing lens component 10 of the embodiment of the present invention two.
From unlike spectrum altogether focusing lens component 10, two surfaces being oppositely arranged of the second lens 220 are sphere,
And described second lens 220 are arranged at the side near described measured object 20 for the described housing 100, due to the low cost of spherical lenss
In the cost of non-spherical lens, so advantageously reduce the cost of common focusing lens component 10.And, the second camera lens 220 is set
Put in housing 100 near the side of measured object 20, the second lens 220 can be convenient for changing, and then it is burnt conveniently to change copolymerization
The range of lens assembly 10, i.e. several range sections can share a kind of non-by changing the second lens 220 of different spheres
First lens 210 of sphere, so can save the die cost of aspheric surface batch production, the first lens 210 are to the second lens
220 spherical aberration plays main correcting action, reduces cost while obtaining low aberrations.In the present embodiment, second lens 220
The radius of curvature on two surfaces being oppositely arranged is different.
And, the first location division 310 and housing 100 are formed in one structure, and so, structure is more firm, and can subtract
The quantity of few part, reduces production cost.
Additionally, the 3rd location division 330 is set on housing 100, being twisted by handss can be by the 3rd location division 330 from housing
Take apart on 100, to facilitate the replacing of the second lens 220.
Refer to Fig. 4, it is the MTF curve of the common focusing lens component 10 of spectrum of embodiment two, MTF (Modulation
Transfer function), i.e. modulation transfer function (MTF).Entered by the common focusing lens component 10 of the spectrum for 2.5mm to range
Row test, its MTF curve is almost overlapped with optical diffraction limit, i.e. image quality can approach optical diffraction limit.
Above-mentioned spectrum focusing lens component 10 altogether, lens group 200 is made up of the first lens 210 and the second lens 220, described
First lens 210 and described second lens 220 produce aberration in the way of relay expands aberration, and described first lens 210
At least one surface is aspheric surface, and described first lens are used for while expanding aberration reducing aberration.The present invention only needs to adopt
Two eyeglasses, number of lenses is less, be easily assembled to, and small volume, cost are relatively low, and aberration is less.
The foregoing is only the preferred embodiments of the present invention, not thereby limit the present invention the scope of the claims, every this
Under the inventive concept of invention, the equivalent structure transformation made using description of the invention and accompanying drawing content, or increase and do not change
The additional component of the basic function that present configuration reaches, or directly/be indirectly used in other related technical fields and all include
In the scope of patent protection of the present invention.
Claims (10)
1. a kind of spectrum copolymerization focus lens assembly, including：Housing and the lens group being arranged on described housing, incidence hole and go out light
Hole, this lens group dispersion ground gathers measured object direction at least one optical axis the light distribution of the different wave length coming from incidence hole
On diverse location, in order to produce spectrum copolymerization zoom lens function it is characterised in that described lens group is by the first lens and second
Lens form, and described first lens and described second lens produce aberration in the way of relay expands aberration, and described first saturating
At least one surface of mirror is aspheric surface, and described first lens are used for while expanding aberration reducing aberration.
2. spectrum copolymerization focus lens assembly as claimed in claim 1 is it is characterised in that described first lens and the second lens are equal
For convex lenss.
3. spectrum copolymerization focus lens assembly as claimed in claim 1 is it is characterised in that two surfaces of described first lens are equal
For aspheric surface.
4. spectrum copolymerization focus lens assembly as claimed in claim 1 is it is characterised in that at least one table of described second lens
Face is aspheric surface.
5. spectrum copolymerization focus lens assembly as claimed in claim 1 is it is characterised in that two of described first lens set relatively
The profile on the surface put is different, and the profile on two surfaces being oppositely arranged of described second lens all differs.
6. spectrum copolymerization focus lens assembly as claimed in claim 1 is it is characterised in that two of described second lens set relatively
The surface put is sphere, and described second lens are arranged at the side near described measured object for the described housing.
7. spectrum copolymerization focus lens assembly as claimed in claim 1 it is characterised in that the first lens be additionally operable to by come from into
The light of unthreaded hole gathers collimation or close to collimation.
8. the spectrum copolymerization focus lens assembly as described in any one of claim 1～7 it is characterised in that described first lens with
The material of described second lens is different, and dispersion values are different.
9. the spectrum copolymerization focus lens assembly as described in any one of claim 1～7 it is characterised in that described first lens and
Leave gap between described second lens, and described gap is less than and is relatively large in diameter between described first lens and described second lens
Lens diameter.
10. the spectrum copolymerization focus lens assembly as described in any one of claim 1～7 is it is characterised in that the number in measured object direction
Value aperture is more than the numerical aperture in incidence hole direction.
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| CN201611119077.6A CN106443996A (en) | 2016-12-07 | 2016-12-07 | Spectral confocal lens module |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109061863A (en) * | 2018-09-11 | 2018-12-21 | 深圳立仪科技有限公司 | A kind of confocal camera lens of lateral illumination spectra |
| CN109357623A (en) * | 2018-11-16 | 2019-02-19 | 中国科学院光电技术研究所 | A kind of method and apparatus with confocal microscope system measurement mobile phone faceplate thickness |
| CN111879239A (en) * | 2020-06-11 | 2020-11-03 | 东莞市神州视觉科技有限公司 | Spectrum confocal measuring device and measuring method |
| CN113654482A (en) * | 2021-08-30 | 2021-11-16 | 东北大学秦皇岛分校 | Optical 3D imaging device and method based on chromatic aberration and spectral domain interference |
| CN114280774A (en) * | 2021-12-30 | 2022-04-05 | 深圳立仪科技有限公司 | Multifunctional device with spectrum confocal measurement function |
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