CN104950421B - A kind of autofocus system - Google Patents
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- CN104950421B CN104950421B CN201410119398.0A CN201410119398A CN104950421B CN 104950421 B CN104950421 B CN 104950421B CN 201410119398 A CN201410119398 A CN 201410119398A CN 104950421 B CN104950421 B CN 104950421B
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Abstract
A kind of autofocus system, it includes light source, collimation camera lens, spectroscope, objective lens, reception camera lens, cylindrical mirror and OPTICAL SENSORS.Light source, collimate camera lens, spectroscope and objective lens are in turn arranged so that the light from light source is projected on tested surface in the first light path, camera lens is received to be arranged on spectroscopical light splitting path, cylindrical mirror is arranged between reception camera lens and OPTICAL SENSORS, reflection light from tested surface is projected on OPTICAL SENSORS in the second light path, OPTICAL SENSORS calculates ideal position scope of the tested surface with respect to objective lens according to the imaging of tested surface, wherein, cylindrical mirror is reflective cylindrical mirror, collimate camera lens, objective lens and reception camera lens are no color differnece or achromat.According to the present invention, the material ranges that can be focused on are wide, optional spectral width, it is ensured that precision improves performance again.
Description
Technical field
The present invention relates to a kind of autofocus system, it is particularly suitable for use in Measurement of Semiconductors equipment.
Background technology
Autofocus system (Automatic Focus System) is that one kind utilizes light wave, ultrasonic wave or other sound waves
The automatic system for calculating focal length and determining focal position.Active and passive type is generally divided into, active i.e. system itself is sent
Light wave or ultrasonic wave complete automatic focusing on testee by receiver receives the signal reflected；Passive type is to be
System directly receives and analyzes that testee is sent or the light wave that reflect completes to focus on automatically.
The application of autofocus system widely, such as：Camera, infra-red inspection, ranging, surface analysis, imaging
Etc. various aspects.Civilian, industrial and military aspect is related to, and the autofocus system of general industry needs to meet precision
It is high, the features such as speed is fast, frequency spectrum is wide, be typically employed in measurements, analyze and related equipment on.
At present, at home in common autofocus system, a part is laser auto focusing system, and its advantage is efficiency
High and accurate positioning, has the disadvantage if failed when running into material that is insensitive or absorbing special spectrum.Some is
Wide spectrum autofocus system, its advantage is that the material ranges that can be achieved to focus on are wide, for some certain materials, it is possible to achieve wear
Focus on thoroughly, have the disadvantage there is aberration, different wave length positioning precision is slightly poor.
However, the autofocus system of broadband and no color differnece is but not present in the prior art.
The content of the invention
The autofocus system of the present invention is broadband no color differnece system, and it can cover ultraviolet, visible ray and near-infrared
Wave band, has been provided simultaneously with the advantage that laser and wide spectrum are focused on automatically, both shortcomings is avoided again.The material ranges that can be focused on
Extensively, optional spectral width, it is ensured that precision improves performance again.
The autofocus system of the present invention is made up of following components, including：Light source, collimation camera lens, light-splitting device, thing
Lens head, reception camera lens, cylindrical mirror and detector.Light source can select wide spectrum or single spectrum light source according to demand, first will
Light beam of light source is coupled into after collimation camera lens, collimation camera lens collimation, and parallel light emergence is then incident on light-splitting device, by dividing
Objective lens are again incident on after optical device, the surface of testee is got to after being focused again, the reflection light of tested surface presses former road
Return, be again incident on light-splitting device, light is reflexed into reception camera lens by light-splitting device, it is incident after receiving lens focus
Reflective cylindrical mirror, after reflective cylindrical mirror, optical signal is received by OPTICAL SENSORS, finally by being built in the meter of OPTICAL SENSORS
Calculate after unit (such as computer program) carries out data analysis and show result.Whole system compact conformation, collimation camera lens, object lens mirror
Head and reception camera lens use achromatism or no color differnece structure, meanwhile, cylindrical mirror uses reflective cylindrical mirror, it ensure that whole system
System no color differnece in broadband.
According to the present invention, a kind of autofocus system is disclosed, it includes light source, collimation camera lens, spectroscope, object lens mirror
Head, reception camera lens, cylindrical mirror and OPTICAL SENSORS.Light source, collimation camera lens, spectroscope and objective lens are in turn arranged so as to come from
The light of light source is projected on tested surface via collimation camera lens, spectroscope and objective lens successively in the first light path, receive mirror
Head is arranged on spectroscopical light splitting path, and cylindrical mirror is arranged between reception camera lens and OPTICAL SENSORS, from the anti-of tested surface
Penetrate light first projected via objective lens in the second light path and project light via reception camera lens and cylindrical mirror again on spectroscope
On sensor, OPTICAL SENSORS calculates ideal position scope of the tested surface with respect to objective lens according to the imaging of tested surface, wherein, post
Face mirror is reflective cylindrical mirror, and collimation camera lens, objective lens and reception camera lens are no color differnece or achromat.It means that
Collimation camera lens, objective lens and receive camera lens and be configured so that aberration is no more than on their wave bands from ultraviolet to infrared
1um.More precisely, collimation camera lens, objective lens and receive camera lens be configured so that they 190-2000nm wave band
Upper aberration is no more than 1um.
It is highly preferred that the collimation camera lens is no color differnece camera lens.
Selectively, the collimation camera lens, the objective lens and the reception camera lens are reflective structure.
Specifically, the reception camera lens includes paraboloidal mirror.
Specifically, the collimation camera lens includes paraboloidal mirror.More specifically, the paraboloidal mirror is close to the light source, institute
Plane mirror is stated to be disposed in by two mirrors close to the spectroscope, and the paraboloidal mirror and the plane mirror
On the optical axis of the heart.
Specifically, the objective lens include the first spherical reflector and diameter provided with central through hole and are less than described first
Second spherical reflector of spherical reflector, wherein, first spherical reflector is close to the spectroscope, second sphere
Speculum is arranged in by two close to the tested surface, and first spherical reflector and second spherical reflector
On the optical axis at mirror center；After the light from light source is by spectroscope, light incides described via the central through hole
On two spherical reflectors, it is subsequently reflected on first spherical reflector, then is reflected on tested surface, from the quilt
The reflection light in survey face is in turn reflected through the center via first spherical reflector and the second spherical reflector again
Through hole is mapped on the spectroscope, is finally entered via light splitting path in the reception camera lens.
Specifically, the collimation camera lens includes paraboloidal mirror.More specifically, the collimation camera lens also includes plane reflection
Mirror, wherein, the paraboloidal mirror is close to the light source, and the plane mirror is close to the spectroscope, and the parabola
Mirror and the plane mirror are disposed on the optical axis by two mirror centers.
Selectively, the spectroscope is 5/5 spectroscope.
Selectively, the OPTICAL SENSORS includes computing unit, and the computing unit is given birth to according to the imaging of the tested surface
Into the FES curves of different wave length, the ideal position scope is drawn according to the FES curves.
Specifically, the OPTICAL SENSORS is 4 quadrant detector.
Preferably, the light source includes beam coupler.Specifically, the beam coupler is optical fiber.
Preferably, the autofocus system also includes driver element, and the driver element is according to the OPTICAL SENSORS meter
The tested surface is driven into the range of the ideal position by the ideal position scope of calculation.
Brief description of the drawings
In order to explain the present invention, it will be described below with reference in its illustrative embodiments, accompanying drawing：
Fig. 1 is the light path principle figure for schematically showing the autofocus system according to the present invention；
Fig. 2 is the layout for the first embodiment for schematically showing the autofocus system according to the present invention；
Fig. 3 is the different-waveband for the first embodiment for schematically showing the autofocus system according to the present invention
FES schemes；
Fig. 4 is the layout for the second embodiment for schematically showing the autofocus system according to the present invention；
Fig. 5 is the objective lens for the second embodiment for schematically showing the autofocus system according to the present invention
Each lens；And
Fig. 6 is the different-waveband for the second embodiment for schematically showing the autofocus system according to the present invention
FES schemes.
Similar features in different figures are indicated by similar reference.
Embodiment
In the detailed description of following embodiment, illustrated with reference to the accompanying drawing for the part for constituting the description.It is attached
Figure shows specific embodiment in an illustrative manner, and the present invention is implemented in these embodiments.Shown implementation
Mode is not configured to limit according to all of the embodiments of the present invention.It is appreciated that other embodiments can be utilized, tie
The change of structure or logicality can be made without departing from the scope of the present invention.For accompanying drawing, the art of directionality
Language, such as " under ", " on ", "left", "right", is used with reference to the orientation of described accompanying drawing.Due to the reality of the present invention
The component for applying mode can be implemented with a variety of orientation, and these directional terminologies are to be for the purpose of illustration, rather than limitation
Purpose.Therefore, following embodiment is not used as the meaning of limitation, and the scope of the present invention is by appended right
Claim is limited.
Fig. 1 is the schematic diagram for schematically showing the autofocus system according to the present invention.As shown in figure 1, of the invention
Autofocus system AFS-10 it is main be made up of following several parts, be respectively：Light source 10, collimation camera lens 20, light-splitting device
30th, objective lens 40, reception camera lens 50, cylindrical mirror 60 and OPTICAL SENSORS 70.Light source 10 can select laser, wide light according to demand
Compose light source or single spectrum light source.Light source 10 generally comprises beam coupler, normally, and the beam coupler is optical fiber, is selected
The advantage of optical fiber is its wide spectral region, simple operation, applied widely and efficiency high.Collimation camera lens 20 is used to that light will to be come from
The light collimation in source 10 is directional light.Light-splitting device 30 acts on the direction for being to change light path, here, its object is to will be from light
Incide tested surface S the first light path L1 and reflect and separated by the second light path that OPTICAL SENSORS 70 is received from tested surface S in source 10.
Light-splitting device 30 generally selects spectroscope, more generally, from 5/5 spectroscope easy to process and higher efficiency.Objective lens
40 can be by the parallel light focusing from light splitting part 30 to tested surface S.Receive camera lens 50 be used to receive from tested surface S and
The light of light splitting part 30.Cylindrical mirror 60 is used to produce astigmatism, by the light that tested surface S defocusing amount change transitions are different directions
Can change.The OPTICAL SENSORS 70 is used to sense the optical signal from cylindrical mirror 60 and is imaged and calculates tested surface S ideal
Position.
More specifically, the light source 10, collimation camera lens 20, light-splitting device 30 and objective lens 40 it is as shown in Figure 1 substantially
On vertical direction in turn arrange so that the light from light source 10 on the first light path L1 successively via collimation camera lens 20, light splitting
Device 30 and objective lens 40 are projected on tested surface S.Receive camera lens 50 to be disposed on the light splitting path of light-splitting device 30, post
Face mirror 60 is arranged between reception camera lens 50 and the OPTICAL SENSORS 70, and the reflection light from tested surface S is in the second light path L2
Upper elder generation is projected on light-splitting device 30 again via projecting optical signal after receiving camera lens 50 and cylindrical mirror 60 via objective lens 40
Onto OPTICAL SENSORS 70, OPTICAL SENSORS 70 calculates ideal position of the tested surface S-phase to objective lens 40 according to tested surface S imaging
Scope, wherein, cylindrical mirror 60 be reflective cylindrical mirror, collimation camera lens 20, objective lens 40 and receive camera lens 50 be no color differnece or
Achromat.It is appreciated that foregoing " generally vertical direction " only shows light source 10, collimation camera lens 20, light-splitting device 30
With the example orientations of objective lens 40 on the whole, however, it is also vertical that this, which is not meant as whole first light path L1, because mirror
Head is internal to be potentially included the element of one or more such as plane mirrors and allows the light side different from previous direction
Advance up.It should also be as it is appreciated that foregoing " no color differnece camera lens " refers to that the camera lens is configured as from ultraviolet to infrared
All without aberration on wave band, " wave band from ultraviolet to infrared " substantially refers to the light that wavelength is 190-2000nm.Before
" achromat " stated is referred to ultraviolet to the camera lens for having very little aberration on infrared band, is also directed to some spies including those
Order wavelength no color differnece but for there is the camera lens of very little aberration on overall wave band, for example, some camera lenses can be on 632nm wavelength
It is no color differnece (also some camera lenses are no color differneces in other single bands), if light source only selects the light of the specific wavelength
Spectrum, though no color differnece can be accomplished, it is in the present invention, this only to have very little aberration to overall wave band to specific Single wavelength no color differnece
Camera lens be still referred to as achromat, wherein the aberration scope of foregoing " very little aberration " refers to aberration within 1um.
OPTICAL SENSORS 70 at least includes imaging unit and computing unit, wherein, imaging unit can include light such as four-quadrant
Survey meter is limited, computing unit can include corresponding computer program, such as focus error signal (Focus Error
Signal, referred to as FES) calculation procedure, it can calculate tested surface according to tested surface S imaging situation and computer program
Ideal position scope of the S-phase to objective lens.
It is appreciated that autofocus system AFS-10 can also include driver element, the driver element includes such as horse
Reach, this is tested by its tested surface S-phase calculated according to foregoing OPTICAL SENSORS 70 for the ideal position scope of objective lens 40
Face S is driven into the range of the ideal position.
According to Fig. 1 autofocus system AFS-10, the light that light source 10 is sent initially enters collimation camera lens 20, is changed
To be again incident on light-splitting device 30 after directional light, through the light-splitting device 30 after enter objective lens 40, then by objective lens
40 focus on tested surface S, are reflected by tested surface S, and light is again introduced into light-splitting device 30 along backtracking, and be split device
30, which turn back to light splitting path, incides reception camera lens 50, then is received after cylindrical mirror 60 by OPTICAL SENSORS 70.
Fig. 2 is the layout for the first embodiment for schematically showing the autofocus system according to the present invention.Ginseng
See Fig. 2, autofocus system AFS-10 according to the first embodiment of the invention includes light source 10, collimation camera lens 20, light splitting
Device 30, objective lens 40, reception camera lens 50, cylindrical mirror 60 and OPTICAL SENSORS 70.The light source 10, collimation camera lens 20, optical splitter
Part 30 and objective lens 40 in turn arrange so that the light from light source 10 in the first light path successively via collimation camera lens 20,
Light-splitting device 30 and objective lens 40 are projected on tested surface S.Camera lens 50 is received to be arranged on the light splitting path of light-splitting device 30,
Cylindrical mirror 60 is arranged between reception camera lens 50 and OPTICAL SENSORS 70, and the reflection light from tested surface S is first in the second light path
Project and projected again via reception camera lens 50 and cylindrical mirror 60 on OPTICAL SENSORS 70 on light-splitting device 30 via objective lens 40.
OPTICAL SENSORS 70 calculates ideal position scope of the tested surface S-phase to objective lens 40 according to tested surface S imaging.Wherein, cylinder
Mirror 60 is reflective cylindrical mirror, and collimation camera lens 20, objective lens 40 and reception camera lens 50 are arranged to no color differnece camera lens.
More specifically, light source 10 includes optical fiber.Light-splitting device 30 includes spectroscope L3, and spectroscope L3 is 5/5 spectroscope,
That is, half-reflecting half mirror.OPTICAL SENSORS 70 includes Quadrant detector instrument.Collimating camera lens 20 includes paraboloidal mirror L1 and plane mirror
L2, wherein, paraboloidal mirror L1 is close to light source 10, and plane mirror L2 is close to spectroscope L3, and paraboloidal mirror L1 and plane are anti-
Penetrate mirror L2 to be disposed on the optical axis by two mirror centers, two mirrors, which coordinate, to be changed into the light from light source 10 for directional light.
Objective lens 40 include the first spherical reflector L4 and the second spherical reflector L5 provided with central through hole H10, wherein, in having
Heart through hole H10 the first spherical reflector L4 close to foregoing spectroscope L3, the second spherical reflector L5 close to tested surface S, and
First spherical reflector L4 and the second spherical reflector L5 are arranged on the optical axis by two mirror centers, the first spherical reflector
L4 (in other words, diameters of the second spherical reflector L5 diameter than the first spherical reflector L4 bigger than the second spherical reflector L5
It is small).So, the first above-mentioned spherical reflector L4 and the second spherical reflector L5 realize catoptric lens camera lens.Receive mirror
First 50 include paraboloidal mirror L6, and the cylindrical mirror 60 is reflective cylindrical mirror L7, and paraboloidal mirror L6 is reflective close to spectroscope L3
Cylindrical mirror L7 close to Quadrant detector instrument, wherein, paraboloidal mirror L6 and reflective cylindrical mirror L7 are disposed in by two mirror centers
Optical axis on.
Light source 10 is emitted beam into collimation camera lens 20, and in collimation camera lens 20, directional light is changed into through paraboloidal mirror L1, then
Reflexed to through plane mirror L2 on light-splitting device 30, i.e. spectroscope L3；After light is by spectroscope L3, light is logical via center
Hole H10 is incided on the second spherical reflector L5, is then reflected and is reflexed on the first spherical reflector L4 at a predetermined angle, then
With predetermined angle reflection and reflex on tested surface S, the reflection light from tested surface S is in turn anti-via the first sphere again
Penetrate mirror L4 and the second spherical reflector L5 gradually reflection and then be injected into by central through hole H10 on spectroscope L3, most passed through afterwards
Entered by light splitting path in reception camera lens 50；In camera lens 50 is received, the reflection light warp of the tested surface from spectroscope L3
Outgoing after paraboloidal mirror L6 convergences；Reflective cylindrical mirror L7 again reflexes to light in OPTICAL SENSORS 70；OPTICAL SENSORS 70 includes
Quadrant detector instrument and computing unit, wherein, Quadrant detector instrument includes computer program to image formation by rays, computing unit, should
Computer program can generate FES (the Focus Error Signal, focus error of different wave length according to tested surface S imaging
Signal) curve, ideal position scope of the tested surface S-phase to objective lens 40 is calculated according to FES curves.
From explanation above, in the autofocus system AFS-10 of first embodiment, whole system eyeglass is equal
For no color differnece, wherein, collimation camera lens 20 and receive camera lens 50 paraboloidal mirror L1 and L6 is respectively adopted and realize collimation and focus on work(
Can, no spherical aberration, aberration, angle of turning back are big, can flexibly select.Cylindrical mirror 60 uses reflective cylindrical mirror L7 rather than refraction type cylinder
Mirror.Objective lens 40 use two panels spherical reflector L4 and L5 combination.Table 1 below provides the automatic focusing system of first embodiment
System AFS-10 parameters, table 2 below gives the spacing between eyeglass.
Table 1- lens parameters
Spacing between table 2- eyeglasses
The optical fiber parameter of the autofocus system AFS-10 of first embodiment light source 10：NA=0.22, core diameter is
100um, design wavelength band is 200~1800nm.
Fig. 3 is the different-waveband for the first embodiment for schematically showing the autofocus system according to the present invention
FES schemes, and covers ultraviolet near infrared band.The X-coordinate of curve is Z axial defocusing amount, and Y-coordinate is FES numerical value.Show from figure
Show that the FES values under different-waveband are substantially unchanged, realize the AF systems of no color differnece.
Fig. 4 is the layout for the second embodiment for schematically showing the autofocus system according to the present invention.Such as
Shown in Fig. 4, autofocus system AFS-10 second embodiment of the invention includes light source 10, collimation camera lens 20, divided
Optical device 30, objective lens 40, reception camera lens 50, cylindrical mirror 60 and OPTICAL SENSORS 70, the light source 10, collimation camera lens 20, light splitting
Device 30 and objective lens 40 in turn arrange so that the light from light source 10 in the first light path successively via collimation camera lens
20th, light-splitting device 30 and objective lens 40 are projected on tested surface S, receive the light splitting path that camera lens 50 is arranged in light-splitting device 30
On, cylindrical mirror 60 is arranged between reception camera lens 50 and OPTICAL SENSORS 70, and the reflection light from tested surface S is in the second light path
First projected via objective lens 40 and project OPTICAL SENSORS 70 via reception camera lens 50 and cylindrical mirror 60 again on light-splitting device 30
On, OPTICAL SENSORS 70 calculates ideal position scope of the tested surface S-phase to objective lens 40 according to tested surface S imaging, wherein, post
Face mirror 60 is reflective cylindrical mirror, collimation camera lens 20 and receives camera lens 50 and is configured as no color differnece camera lens, objective lens 40 by with
It is set to achromat.
More specifically, in this second embodiment, light source 10, collimation camera lens 20, light-splitting device 30, receive camera lens 50,
Cylindrical mirror 60 and OPTICAL SENSORS 70 are identical with first embodiment, and only objective lens 40 are different from first embodiment, below,
This is explained in detail.
Objective lens 40 include the first microscope group and the second microscope group, wherein, the first microscope group includes biconcave lens L41, lenticular
Mirror L42, the second microscope group includes planoconvex spotlight L51, concave-convex lens L52, biconvex lens L53, biconvex lens L54, plano-concave lens L55
With planoconvex spotlight L56.
Light source 10 is emitted beam into collimation camera lens 20, and in collimation camera lens 20, directional light is changed into through paraboloidal mirror L1, then
Reflexed to through plane mirror L2 on light-splitting device 30, i.e. spectroscope L3；Light was projected after spectroscope L3, and light is passed sequentially through
Biconcave lens L41, biconvex lens L42, planoconvex spotlight L51, concave-convex lens L52, biconvex lens L53, biconvex lens L54, plano-concave
Focus on tested surface S surface after lens L55 and planoconvex spotlight L56, tested surface S reflection light again backtracking to spectroscope
On L3, then enter via light splitting path and receive in camera lens 50；Receive camera lens 50 in, the tested surface from spectroscope L3 it is anti-
Light is penetrated to be reflexed in OPTICAL SENSORS 70 by reflective cylindrical mirror L7 again through paraboloidal mirror L6 convergences；OPTICAL SENSORS 70 includes four-quadrant
Survey meter and computing unit are limited, wherein, Quadrant detector instrument includes computer program, the calculating to image formation by rays, computing unit
Machine program can generate the FES curves of different wave length according to tested surface S imaging, and tested surface S-phase is calculated according to FES curves
To the ideal position scope of objective lens 40.
In this second embodiment, the lens focus f=10 of objective lens 40,400~1800nm of spectral region, it is maximum
Aberration 4um.
Table 3 below shows the design parameter of each eyeglass of constitute the objective lens camera lens 40.
Table 3- lens parameters
In upper table 3, S4 and S12 use in face it is aspherical, other faces be index plane.N represents refractive index, and Vd represents Abbe number.
Fig. 6 is the difference for the second embodiment for schematically showing the autofocus system AFS-10 according to the present invention
Wave band FES schemes, and it covers visible near infrared band.The X-coordinate of curve represents Z axial defocusing amount, and Y-coordinate represents FES
Numerical value.It can be seen that being slightly offset with the FES curves of infrared band, offset<4um, realizes achromatic autofocus system.
Although in first embodiment and second embodiment, the collimation camera lens 20 and reception camera lens 50 are both configured to
No color differnece camera lens, however, it will appreciated by the skilled person that similar with objective lens 40, the collimation camera lens 20 and/or
Achromat can also be configured as according to actual conditions by receiving camera lens 50.
As described above, the autofocus system AFS-10 of present invention collimation camera lens 20, objective lens 40, reception camera lens 50
Achromatism or no color differnece are configured as, meanwhile, cylindrical mirror 60 uses reflective cylindrical mirror, and this can ensure the wide ripple of whole system
Section no color differnece.
The those skilled in the art of those the art can be by studying specification, disclosure and accompanying drawing and appended
Claims, understand and implement other changes to the embodiment of disclosure.In the claims, word " comprising " is not arranged
Except other elements and step, and wording " one " is not excluded for plural number.In the practical application of invention, a part may be held
The function of cited multiple technical characteristics in row claim.Any reference in claim should not be construed as to model
The limitation enclosed.
The present invention is not in any way limited to the illustrative embodiments presented in the specification and illustrated in the drawings.Show and
All combinations of the embodiment (part) of description be clearly understood that for be incorporated within the specification and be clearly understood that for
Fall within the scope of the present invention.Moreover, in the scope of the present invention that such as claims are summarized, many variations is possible.
In addition, any reference marker in claims should not be constructed as limiting into the scope of the present invention.
Claims (12)
1. a kind of autofocus system, it include light source, collimation camera lens, spectroscope, objective lens, receive camera lens, cylindrical mirror and
OPTICAL SENSORS, the light source, collimation camera lens, spectroscope and objective lens are in turn arranged so that the light from the light source exists
Projected successively via the collimation camera lens, spectroscope and objective lens on tested surface in first light path, the reception camera lens cloth
Put on spectroscopical light splitting path, the cylindrical mirror is arranged between the reception camera lens and the OPTICAL SENSORS, come
From the reflection light of the tested surface in the second light path first via the objective lens project on the spectroscope again via
The reception camera lens and the cylindrical mirror are projected on the OPTICAL SENSORS, and the OPTICAL SENSORS is according to the imaging of the tested surface
Ideal position scope of the tested surface with respect to objective lens is calculated, wherein, the cylindrical mirror is reflective cylindrical mirror, the standard
Straight camera lens, the objective lens and the reception camera lens are no color differnece or achromat.
2. autofocus system according to claim 1, wherein, the collimation camera lens, the objective lens and described connect
It is reflective structure to receive camera lens.
3. autofocus system according to claim 1 or 2, wherein, the reception camera lens includes paraboloidal mirror.
4. autofocus system according to claim 1 or 2, wherein, the collimation camera lens includes paraboloidal mirror.
5. autofocus system according to claim 4, wherein, the collimation camera lens also includes plane mirror, wherein,
The paraboloidal mirror is close to the light source, and the plane mirror is close to the spectroscope, and the paraboloidal mirror and described
Plane mirror is disposed on the optical axis by two mirror centers.
6. autofocus system according to claim 1 or 2, wherein, the objective lens are included provided with central through hole
First spherical reflector and diameter are less than the second spherical reflector of first spherical reflector, wherein, first sphere
Speculum is close to the spectroscope, and second spherical reflector is close to the tested surface, and first spherical reflector
It is arranged in second spherical reflector on the optical axis by two mirror centers；When the light from light source passes through spectroscope
Afterwards, light is incided on second spherical reflector via the central through hole, is subsequently reflected to first sphere anti-
Penetrate on mirror, then be reflected on tested surface, the reflection light from the tested surface is in turn anti-via first sphere again
Penetrate mirror and the second spherical reflector is reflected through the central through hole and is mapped on the spectroscope, finally enter via light splitting path
Into the reception camera lens.
7. autofocus system according to claim 1 or 2, wherein, the spectroscope is 5/5 spectroscope.
8. autofocus system according to claim 1 or 2, wherein, the OPTICAL SENSORS includes computing unit, the meter
Calculate the FES (Focus Error Signal, focus error signal) that unit generates different wave length according to the imaging of the tested surface
Curve, the ideal position scope is drawn according to the FES curves.
9. autofocus system according to claim 7, wherein, the OPTICAL SENSORS includes 4 quadrant detector.
10. autofocus system according to claim 1 or 2, wherein, the light source includes beam coupler.
11. autofocus system according to claim 10, wherein, the beam coupler is optical fiber.
12. autofocus system according to claim 1 or 2, wherein, it is single that the autofocus system also includes driving
The tested surface is driven into the ideal bit by member, the ideal position scope that the driver element is calculated according to the OPTICAL SENSORS
In the range of putting.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410119398.0A CN104950421B (en) | 2014-03-27 | 2014-03-27 | A kind of autofocus system |
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| CN201410119398.0A CN104950421B (en) | 2014-03-27 | 2014-03-27 | A kind of autofocus system |
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| CN109655232B (en) * | 2017-10-12 | 2021-08-10 | 致茂电子(苏州)有限公司 | Optical measuring device |
| CN115061270B (en) * | 2022-05-30 | 2024-01-16 | 中国人民解放军国防科技大学 | Inclination mode telescopic microscopic combined imaging method |
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|---|---|---|---|---|
| US4972075A (en) * | 1988-08-02 | 1990-11-20 | Minolta Camera Kabushiki Kaisha | Automatic focusing system with dual diffraction gratings and converging means |
| JP3435356B2 (en) * | 1998-09-02 | 2003-08-11 | ペンタックス株式会社 | Automatic focus adjustment device for image reading device |
| CN102478700A (en) * | 2010-11-25 | 2012-05-30 | 财团法人工业技术研究院 | Automatic focusing device and method |
| CN102478699A (en) * | 2010-11-23 | 2012-05-30 | 财团法人工业技术研究院 | Automatic focusing device and method thereof |
| CN103323939A (en) * | 2012-03-20 | 2013-09-25 | 麦克奥迪实业集团有限公司 | Digital slide real-time scanning automatic focus system and method |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4972075A (en) * | 1988-08-02 | 1990-11-20 | Minolta Camera Kabushiki Kaisha | Automatic focusing system with dual diffraction gratings and converging means |
| JP3435356B2 (en) * | 1998-09-02 | 2003-08-11 | ペンタックス株式会社 | Automatic focus adjustment device for image reading device |
| CN102478699A (en) * | 2010-11-23 | 2012-05-30 | 财团法人工业技术研究院 | Automatic focusing device and method thereof |
| CN102478700A (en) * | 2010-11-25 | 2012-05-30 | 财团法人工业技术研究院 | Automatic focusing device and method |
| CN103323939A (en) * | 2012-03-20 | 2013-09-25 | 麦克奥迪实业集团有限公司 | Digital slide real-time scanning automatic focus system and method |
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