CN107300419B - A kind of Method of Adjustment and assembling ＆ adjusting system of spectrometer - Google Patents
A kind of Method of Adjustment and assembling ＆ adjusting system of spectrometer Download PDFInfo
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- CN107300419B CN107300419B CN201710516790.2A CN201710516790A CN107300419B CN 107300419 B CN107300419 B CN 107300419B CN 201710516790 A CN201710516790 A CN 201710516790A CN 107300419 B CN107300419 B CN 107300419B
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- 238000006243 chemical reaction Methods 0.000 claims abstract description 17
- 238000003384 imaging method Methods 0.000 claims description 17
- 238000001228 spectrum Methods 0.000 claims description 15
- 230000007246 mechanism Effects 0.000 claims description 7
- 238000012795 verification Methods 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 230000003595 spectral effect Effects 0.000 claims description 5
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- 230000004888 barrier function Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J2003/2866—Markers; Calibrating of scan
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Abstract
This application discloses a kind of Method of Adjustment of spectrometer and assembling ＆ adjusting systems, including：Calculate the associated change amount of the optical element in caused spectrometer in low temperature and normal temperature phase co-conversion；Adjustment is carried out to optical element at normal temperatures, and according to associated change amount, good optical element is modified to adjustment.The technological means that the application passes through Computer Aided Assembly Process Planning, calculate the associated change amount of optical element at different temperatures, can at normal temperatures accurate adjustment optical element to low temperature perfect condition, the spectrometer under low temperature is set to obtain ideal image quality, and due to not increasing adjustment optical element and adjustment cryogenic system, Method of Adjustment is more succinct efficient.
Description
Technical field
The present invention relates to spectral technique fields, more particularly to the Method of Adjustment and assembling ＆ adjusting system of a kind of spectrometer.
Background technology
Near-infrared is worked to short infrared wave band ultrahigh resolution spectrometer system between 0.7 μm of -2.5 mu m waveband, spectrum
The indexs such as resolution ratio, radiometric resolution and signal-to-noise ratio have a higher requirement, thus design to system and adjustment propose it is higher
Requirement.It is influenced by Infrared background radiation effect, the dark field signal water of near infrared band ultrahigh resolution spectrometer system
Flat higher, the mode of generally use optical filter cold stop and instrument body refrigeration combination reduces this influence.But short-wave infrared
Band of light spectrometer is generally operational in 0 DEG C of low temperature below, to bring the technical barrier of low temperature adjustment.
Short-wave infrared optical system works at low temperature, optical element refractive index, radius of curvature, relative position relation with often
The phenomenon that differing greatly under temperature, quality of optical imaging will be caused to decline with focal plane defocus.Low temperature integration techno logy seeks to solve low
Negative effect caused by temperature.Therefore, the Method of Adjustment under room temperature is not suitable for low temperature adjustment.In order to obtain high imaging quality
Cryogenic Optical System, the mode adjusted frequently with active displacement mechanism at low temperature realize adjustment.The work of low temperature driving mechanism
Environment is more severe, and the design of mechanism is realized complex, while adjustment process needs to be constantly in low temperature, needs special low
Warm equipment supports, therefore such method adjustment is complicated, and adjustment period and funds are more demanding.
Invention content
In view of this, the purpose of the present invention is to provide a kind of Method of Adjustment of spectrometer and assembling ＆ adjusting system, it can be normal
The lower accurate adjustment optical element of temperature makes the spectrometer under low temperature obtain ideal image quality to the perfect condition of low temperature,
And Method of Adjustment is more succinct efficient.Its concrete scheme is as follows：
A kind of Method of Adjustment of spectrometer, including：
Calculate the associated change amount of the optical element in the caused spectrometer in low temperature and normal temperature phase co-conversion；
Adjustment is carried out to the optical element at normal temperatures, and according to the associated change amount, the light good to adjustment
Element is learned to be modified.
Preferably, it in the Method of Adjustment of above-mentioned spectrometer provided in an embodiment of the present invention, calculates in low temperature and room temperature
When phase co-conversion in the caused spectrometer optical element associated change amount, specifically include：
It is calculated in low temperature and optical element in caused spectrometer when normal temperature phase co-conversion by optical software
Optical defocus amount；
The optics member in low temperature and when normal temperature phase co-conversion caused spectrometer is calculated by project analysis software
The mechanical compensation amount of part.
Preferably, in the Method of Adjustment of above-mentioned spectrometer provided in an embodiment of the present invention, at normal temperatures to the optics
Element carries out adjustment, and according to the associated change amount, the optical element good to adjustment is modified, specifically includes：
According to the optical defocus amount and mechanical compensation amount, the theoretical position of the spectrometer focal plane described at low temperature is determined；
The optical element is actively subjected to adjustment at normal temperatures, it is good to adjustment according to the theoretical position of the focal plane
The optical element is modified.
Preferably, in the Method of Adjustment of above-mentioned spectrometer provided in an embodiment of the present invention, the optical element includes：It is narrow
Stitch component, collimation mirror assembly, spectrum groupware, imaging mirror assembly and focal plane subassembly；
The slit component is N order array slits, for carrying out space filtering to incident ray, the incident ray is made to enter
It is mapped on the collimation mirror assembly；
The incident ray is successively by collimation mirror assembly collimation, spectrum groupware light splitting, the imaging microscope group
Part is imaged on after focusing on the focal plane subassembly.
Preferably, in the Method of Adjustment of above-mentioned spectrometer provided in an embodiment of the present invention, at normal temperatures by the optics
Element actively carries out adjustment, and according to the theoretical position of the focal plane, the optical element good to adjustment is modified, specific to wrap
It includes：
At normal temperatures, the collimation mirror assembly and the imaging mirror assembly are filled respectively according to setup parameter information
It adjusts；
At normal temperatures, the collimation mirror assembly, the imaging mirror assembly and the spectrum groupware are integrated to dress on frame
It adjusts；
At normal temperatures, adjustment is carried out to the slit component according to setting constraints, and according to the theory of the focal plane
The good slit component of adjustment is modified by position；
At normal temperatures, adjustment is carried out to the focal plane subassembly, and according to the theoretical position of the focal plane, by the good institute of adjustment
Focal plane subassembly is stated to be modified.
Preferably, in the Method of Adjustment of above-mentioned spectrometer provided in an embodiment of the present invention, the collimation mirror assembly and institute
It is parallel light path to state the light path between spectrum groupware；
Light path between the imaging mirror assembly and the spectrum groupware is parallel light path.
Preferably, in the Method of Adjustment of above-mentioned spectrometer provided in an embodiment of the present invention, the setup parameter packet
Include the interval width range between each lens in the collimation mirror assembly described at low temperature and the imaging mirror assembly.
Preferably, in the Method of Adjustment of above-mentioned spectrometer provided in an embodiment of the present invention, the setting constraints packet
Include spectrometer position of spectral line and half width range.
Preferably, in the Method of Adjustment of above-mentioned spectrometer provided in an embodiment of the present invention, further include：
The entire spectrometer is subjected to verification experimental verification at low temperature.
The embodiment of the present invention additionally provides a kind of assembling ＆ adjusting system of spectrometer, including：
Variable quantity computing module, for calculating the optics in low temperature and when normal temperature phase co-conversion caused spectrometer
The associated change amount of element；
Optical element adjustment module, for carrying out adjustment to the optical element at normal temperatures, and according to the related change
Change amount, the optical element good to adjustment are modified.
The Method of Adjustment and assembling ＆ adjusting system of a kind of spectrometer provided by the present invention, including：It calculates in low temperature and room temperature
When phase co-conversion in caused spectrometer optical element associated change amount；Adjustment, and root are carried out to optical element at normal temperatures
According to associated change amount, to adjustment, good optical element is modified.The present invention passes through the technological means of Computer Aided Assembly Process Planning, meter
Calculate optical element associated change amount at different temperatures, can at normal temperatures accurate adjustment optical element to low temperature ideal
State makes the spectrometer under low temperature obtain ideal image quality, and due to not increasing adjustment optical element and adjustment
Cryogenic system, Method of Adjustment are more succinct efficient.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 is the flow chart of the Method of Adjustment of spectrometer provided in an embodiment of the present invention；
Fig. 2 is the structural schematic diagram of entire spectrometer provided in an embodiment of the present invention；
Fig. 3 is the structural schematic diagram of the assembling ＆ adjusting system of spectrometer provided in an embodiment of the present invention.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The present invention provides a kind of Method of Adjustment of spectrometer, as shown in Figure 1, including the following steps：
S101, the associated change amount for calculating the optical element in caused spectrometer in low temperature and normal temperature phase co-conversion；
S102, adjustment is carried out to optical element at normal temperatures, and according to associated change amount, to the good optical element of adjustment into
Row is corrected.
In the Method of Adjustment of above-mentioned spectrometer provided in an embodiment of the present invention, calculate first mutual with room temperature in low temperature
When transformation in caused spectrometer optical element associated change amount；Then adjustment, and root are carried out to optical element at normal temperatures
According to associated change amount, to adjustment, good optical element is modified.Method of Adjustment provided by the present application is through entire optical system
The overall process of system design and adjustment, calculates the correlation of optical element at different temperatures before spectrometer optical element adjustment
Variable quantity, you can to calculate the spatial relationship between the optical element under low-temperature condition, pass through the technology of Computer Aided Assembly Process Planning
Means can ensure optical element under low temperature by accurate adjustment optical element in this way to the perfect condition of low temperature at normal temperatures
Position relationship, so that the spectrometer under low temperature is obtained ideal image quality, and due to not increasing adjustment optical element
With adjustment cryogenic system, Method of Adjustment more it is succinct efficiently.
In the specific implementation, in the Method of Adjustment of above-mentioned spectrometer provided in an embodiment of the present invention, step S101 is calculated
The associated change amount for going out the optical element in caused spectrometer in low temperature and normal temperature phase co-conversion, can specifically include following step
Suddenly：
Step 1: calculating the optical element in low temperature and when normal temperature phase co-conversion caused spectrometer by optical software
Optical defocus amount；
Step 2: calculating the optics in low temperature and when normal temperature phase co-conversion caused spectrometer by project analysis software
The mechanical compensation amount of element.
The method for using Computer Aided Assembly Process Planning in this way, calculates optical defocus amount and mechanical compensation caused by temperature change
Amount quantitatively replaces room temperature focal plane pad, can further make the optical system focal plane under low temperature on coke, not need Traditional project hand
The complicated embodiment of section.
It should be noted that step 1 and step 2 are regardless of tandem.Optical defocus amount is mainly optical system by temperature
The influence of degree and pressure, caused by mechanical compensation amount is mainly expanded with heat and contract with cold.
In the specific implementation, in the Method of Adjustment of above-mentioned spectrometer provided in an embodiment of the present invention, step S102 is normal
Adjustment is carried out to optical element under temperature, and according to associated change amount, good optical element is modified to adjustment, can specifically be wrapped
Include following steps：
First, according to optical defocus amount and mechanical compensation amount, the theoretical position of spectrometer focal plane at low temperature is determined；
Then, optical element is actively subjected to adjustment at normal temperatures, according to the theoretical position of focal plane, the optics good to adjustment
Element is modified.
It should be noted that during focal plane adjustment, focal plane adjustment is first carried out at normal temperatures, according to optical defocus amount and machine
Tool compensation rate, it may be determined that the theoretical position of focal plane under low temperature, then at normal temperatures by the reason under focal plane active adjustment to low temperature
By position, so as to complete the room temperature adjustment of Cryogenic Optical System.
In the specific implementation, in the Method of Adjustment of above-mentioned spectrometer provided in an embodiment of the present invention, as shown in Fig. 2, light
Learning element may include：Slit component 1, collimation mirror assembly 2, spectrum groupware 3, imaging mirror assembly 4 and focal plane subassembly 5；
Slit component 1 is N order array slits, for carrying out space filtering to incident ray, incident ray is made to be incident on standard
On straight mirror assembly 2；
Incident ray is imaged on after collimation mirror assembly 2 collimation, the light splitting of spectrum groupware 3, imaging mirror assembly 4 focus successively
On focal plane subassembly 5.
Further, in the specific implementation, in the Method of Adjustment of above-mentioned spectrometer provided in an embodiment of the present invention, normal
Optical element is actively subjected to adjustment under temperature, according to the theoretical position of focal plane, good optical element is modified to adjustment, is such as schemed
Shown in 2, following steps are can specifically include：
At normal temperatures, straight mirror assembly 2 is respectively aligned to according to setup parameter information and imaging mirror assembly 4 carries out adjustment；
At normal temperatures, collimation mirror assembly 2, imaging mirror assembly 4 and spectrum groupware 3 are integrated into adjustment on frame 6；(at this time
Without considering influence of the low temperature to optical system)
At normal temperatures, adjustment is carried out to slit component according to setting constraints, and according to the theoretical position of focal plane, will filled
The slit component mixed up is modified；
At normal temperatures, focusing plane component carries out adjustment, and according to the theoretical position of focal plane, by the good focal plane subassembly of adjustment into
Row is corrected.
It should be noted that in the specific implementation, setup parameter information may include collimate at low temperature mirror assembly and at
As the interval width range between each lens in mirror assembly.Here setup parameter information is to consider to collimate microscope group under low temperature
Parameter under the low-temperature condition of the influence of part, imaging mirror assembly optical system and machinery.
In addition, in the specific implementation, setting constraints may include spectrometer position of spectral line and half width range.This sets
Determine constraints and can also be other indexs, does not limit herein.
In the specific implementation, in the Method of Adjustment of above-mentioned spectrometer provided in an embodiment of the present invention, in order to ensure light
Propagation distance is unaffected, and the light path collimated between mirror assembly and spectrum groupware can be parallel light path；It is imaged mirror assembly and divides
Light path between optical assembly can be parallel light path.
Further, in the specific implementation, it in the Method of Adjustment of above-mentioned spectrometer provided in an embodiment of the present invention, also wraps
Include following steps：
Entire spectrometer is subjected to verification experimental verification at low temperature.
Based on same inventive concept, the embodiment of the present invention additionally provides a kind of assembling ＆ adjusting system of spectrometer, due to the adjustment
The principle that system solves the problems, such as is similar to a kind of aforementioned Method of Adjustment, therefore the implementation of the assembling ＆ adjusting system may refer to Method of Adjustment
Implementation, overlaps will not be repeated.
In the specific implementation, the assembling ＆ adjusting system of spectrometer provided in an embodiment of the present invention, as shown in figure 3, specifically including：
Variable quantity computing module 11, for calculating, in low temperature and normal temperature phase co-conversion, optics is first in caused spectrometer
The associated change amount of part；
Optical element adjustment module 12 is right for carrying out adjustment to optical element at normal temperatures, and according to associated change amount
The good optical element of adjustment is modified.
The assembling ＆ adjusting system of spectrometer provided in an embodiment of the present invention is according to low temperature design result adjustment optical element, Neng Goubao
The Performance of Optical System under low temperature is demonstrate,proved, and does not increase additional mechanical-optical setup and facility, it is simple and practicable, it is convenient and reliable.
The Method of Adjustment and assembling ＆ adjusting system of a kind of spectrometer provided in an embodiment of the present invention, including：Calculate low temperature with
When normal temperature phase co-conversion in caused spectrometer optical element associated change amount；Adjustment is carried out to optical element at normal temperatures,
And according to associated change amount, to adjustment, good optical element is modified.The technology hand that the present invention passes through Computer Aided Assembly Process Planning
Section, calculates the associated change amount of optical element at different temperatures, can at normal temperatures accurate adjustment optical element to low temperature
Perfect condition, so that the spectrometer under low temperature is obtained ideal image quality, and due to not increasing adjustment optical element
With adjustment cryogenic system, Method of Adjustment more it is succinct efficiently.
Finally, it is to be noted that, herein, relational terms such as first and second and the like be used merely to by
One entity or operation are distinguished with another entity or operation, without necessarily requiring or implying these entities or operation
Between there are any actual relationship or orders.Moreover, the terms "include", "comprise" or its any other variant meaning
Covering non-exclusive inclusion, so that the process, method, article or equipment including a series of elements includes not only that
A little elements, but also include other elements that are not explicitly listed, or further include for this process, method, article or
The intrinsic element of equipment.In the absence of more restrictions, the element limited by sentence "including a ...", is not arranged
Except there is also other identical elements in the process, method, article or apparatus that includes the element.
The Method of Adjustment and assembling ＆ adjusting system of spectrometer provided by the present invention are described in detail above, answered herein
With specific case, principle and implementation of the present invention are described, and the explanation of above example is only intended to help to manage
Solve the method and its core concept of the present invention；Meanwhile for those of ordinary skill in the art, according to the thought of the present invention,
There will be changes in specific implementation mode and application range, in conclusion the content of the present specification should not be construed as to this hair
Bright limitation.
Claims (10)
1. a kind of Method of Adjustment of spectrometer, which is characterized in that including：
Calculate the associated change amount of the optical element in the caused spectrometer in low temperature and normal temperature phase co-conversion；The phase
It includes optical defocus amount and mechanical compensation amount to close variable quantity；
Adjustment is carried out to the optical element at normal temperatures, and according to the associated change amount, actively using active displacement mechanism
The position of the optical element good to this adjustment is modified, and is corrected to the theoretical position under low temperature.
2. the Method of Adjustment of spectrometer according to claim 1, which is characterized in that calculate and mutually turn with room temperature in low temperature
When change in the caused spectrometer optical element associated change amount, specifically include：
The optics of the optical element in the caused spectrometer in low temperature and normal temperature phase co-conversion is calculated by optical software
Defocusing amount；
It is calculated in low temperature and optical element in caused spectrometer when normal temperature phase co-conversion by project analysis software
Mechanical compensation amount.
3. the Method of Adjustment of spectrometer according to claim 2, which is characterized in that at normal temperatures to the optical element into
Luggage tune, and according to the associated change amount, use the active displacement mechanism active optical element good to this adjustment
Position is modified, and is specifically included：
According to the optical defocus amount and mechanical compensation amount, the theoretical position of the spectrometer focal plane described at low temperature is determined；
Optical element progress adjustment is used into active displacement mechanism master according to the theoretical position of the focal plane at normal temperatures
The position for moving the optical element good to this adjustment is modified.
4. the Method of Adjustment of spectrometer according to claim 3, which is characterized in that the optical element includes：Slot set
Part, collimation mirror assembly, spectrum groupware, imaging mirror assembly and focal plane subassembly；
The slit component is N order array slits, for carrying out space filtering to incident ray, the incident ray is made to be incident on
On the collimation mirror assembly；
The incident ray is poly- by collimation mirror assembly collimation, spectrum groupware light splitting, the imaging mirror assembly successively
It is defocused to be imaged on the focal plane subassembly.
5. the Method of Adjustment of spectrometer according to claim 4, which is characterized in that at normal temperatures by the optical element into
Luggage tune, according to the theoretical position of the focal plane, the position of the optical element good to this adjustment is modified, specific to wrap
It includes：
At normal temperatures, adjustment is carried out to the collimation mirror assembly and the imaging mirror assembly according to setup parameter information respectively；Institute
It includes that the collimation mirror assembly described at low temperature and the interval being imaged in mirror assembly between each lens are wide to state setup parameter information
Spend range；
At normal temperatures, the collimation mirror assembly, the imaging mirror assembly and the spectrum groupware are integrated to adjustment on frame；
At normal temperatures, adjustment is carried out to the slit component according to setting constraints, and according to the theoretical position of the focal plane,
The position of the good slit component of this adjustment is modified；The setting constraints include spectrometer position of spectral line and
Half width range；
At normal temperatures, adjustment is carried out to the focal plane subassembly, and according to the theoretical position of the focal plane, by the good institute of this adjustment
The position for stating focal plane subassembly is modified.
6. the Method of Adjustment of spectrometer according to claim 5, which is characterized in that the collimation mirror assembly and the light splitting
Light path between component is parallel light path；
Light path between the imaging mirror assembly and the spectrum groupware is parallel light path.
7. the Method of Adjustment of spectrometer according to claim 5, which is characterized in that the setup parameter information is included in low
The collimation mirror assembly and the interval width range being imaged in mirror assembly between each lens under temperature.
8. the Method of Adjustment of spectrometer according to claim 5, which is characterized in that the setting constraints includes spectrum
Instrument position of spectral line and half width range.
9. according to claim 1 to 8 any one of them Method of Adjustment, which is characterized in that further include：
The entire spectrometer is subjected to verification experimental verification at low temperature.
10. a kind of assembling ＆ adjusting system of spectrometer, which is characterized in that including：
Variable quantity computing module, for calculating the optical element in low temperature and when normal temperature phase co-conversion caused spectrometer
Associated change amount；The associated change amount includes optical defocus amount and mechanical compensation amount；
Optical element adjustment module, for carrying out adjustment to the optical element at normal temperatures, and according to the associated change amount,
It is modified, and is corrected to low temperature using the position of the active displacement mechanism active optical element good to this adjustment
Theoretical position.
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| CN115236852B (en) * | 2022-08-16 | 2024-01-26 | 中国科学院上海技术物理研究所 | Optical compensation device of all-optical-path low-temperature system and design method |
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