CN111406197A - Transparent or translucent material curved surface contour detection system - Google Patents
Transparent or translucent material curved surface contour detection system Download PDFInfo
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- CN111406197A CN111406197A CN201980005539.7A CN201980005539A CN111406197A CN 111406197 A CN111406197 A CN 111406197A CN 201980005539 A CN201980005539 A CN 201980005539A CN 111406197 A CN111406197 A CN 111406197A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
Abstract
The invention discloses a system for detecting the curved surface contour of a transparent or semitransparent material, which comprises: an illumination device for emitting an illumination beam of a wide spectral band; the dispersion objective lens is positioned in the light outgoing direction of the illumination light beam and is used for dispersing and decomposing the transmitted illumination light beam into a set of monochromatic light beams corresponding to the convergence point and the wavelength; the material checking support is used for fixing the transparent or semitransparent curved surface material checking; the spectrum analysis device is used for receiving the upper surface reflected light and the lower surface reflected light and detecting the spectrum color difference of the upper surface reflected light and the lower surface reflected light; and the processor is used for receiving the spectral chromatic aberration, obtaining the thickness of the scanning position according to the spectral chromatic aberration, and determining the profile of the transparent or semitransparent curved surface material to be inspected according to the thicknesses of two or more scanning positions. The system can accurately detect the contour without being influenced by the light transmittance of the detected material.
Description
Technical Field
The invention relates to the technical field of industrial detection, in particular to a curved surface contour detection system for a transparent or semitransparent material.
Background
With the trend of narrower borders, larger screen occupation ratio and better visual perception, more intelligent terminal manufacturers begin to adopt 3D curved glass screens in product design. The production process of the 3D curved glass is similar to the 2D and 2.5D production methods, and all processes of cutting, engraving, polishing, coating and the like need to be performed on the glass substrate, but additionally, the production process of the 3D curved glass screen needs to be additionally provided with a hot bending forming process, namely, the edge of the planar 2D glass plate is subjected to hot bending forming to form the 3D curved glass screen.
However, if the angle of the chamfer is not accurately machined in the process of machining the chamfer of the 3D curved glass screen, the chamfer and the bottom surface of the 3D glass screen are not parallel after the hot bending process, and the overall performance of the mobile phone is affected due to the fact that the contact area of the joint is small when the mobile phone is subsequently jointed with the mobile phone shell.
And whether the curved surface profile of the 3D curved surface screen is qualified or not needs to be measured, the bending radian and the chamfering flatness of the curved surface glass are measured, but the 3D curved surface screen is made of transparent or semitransparent materials such as glass, most laser is transmitted and reflected back to a sensor by the traditional laser triangulation method, so that the sensor cannot detect a reflected light spot, the light spot deviation cannot be measured, the three-dimensional information of a product is calculated, and the detection accuracy of the 3D curved surface profile is low.
Disclosure of Invention
Based on the above, in order to solve the problem that the detection accuracy of the laser triangulation method in the traditional technology for the bending radian of the transparent/semitransparent curved glass and the flatness of the chamfer is low, a system for detecting the curved surface contour of the transparent or semitransparent material is provided.
A system for detecting the curved surface contour of a transparent or semitransparent material comprises:
an illumination device for emitting an illumination beam of a wide spectral band;
the dispersion objective lens is positioned in the light outgoing direction of the illumination light beam and is used for carrying out dispersion decomposition on the illumination light beam into a set of monochromatic light beams corresponding to the convergence points and the wavelengths;
the material detecting support is used for fixing a transparent or semitransparent curved surface material to be detected, the set of monochromatic light beams irradiates a scanning position of the transparent or semitransparent curved surface material to be detected, and two reflections are generated on the upper surface and the lower surface of the scanning position to form upper surface reflected light and lower surface reflected light;
the spectrum analysis device is used for receiving the upper surface reflected light and the lower surface reflected light and detecting the spectrum color difference of the upper surface reflected light and the lower surface reflected light;
and the processor is used for receiving the spectral chromatic aberration, obtaining the thickness of the scanning position according to the spectral chromatic aberration, and determining the profile of the transparent or semitransparent curved surface material to be inspected according to the thicknesses of two or more scanning positions.
In one embodiment, the material detecting support comprises a movement mechanism, the movement mechanism comprises an X-axis movement assembly and a Y-axis movement assembly, and the movement mechanism is used for driving the transparent or semitransparent curved material to move in the X-axis direction and/or the Y-axis direction so as to change the scanning position.
In one embodiment, the movement mechanism further comprises a rotating assembly, and the rotating assembly is used for rotating the transparent or semitransparent curved material to be tested by a preset angle;
the scanning positions comprise at least two groups, each group of scanning positions corresponds to a rotation angle of the rotating assembly, and the processor is used for acquiring the thickness of each scanning position in the at least two groups of scanning positions and generating at least two partial profiles corresponding to the at least two groups of scanning positions, wherein the at least two partial profiles correspond to the corresponding rotation angles.
In one embodiment, the processor is configured to control the rotating assembly to rotate by a first angle, and under the first angle, the X-axis moving assembly and the Y-axis moving assembly are controlled to drive the transparent or semi-transparent curved material to move, so as to generate a first set of scanning positions corresponding to the first angle, where the first set of scanning positions corresponds to a curved portion of the transparent or semi-transparent curved material;
and acquiring the thickness of each of the first group of scanning positions, and generating the profile corresponding to the first group of scanning positions.
In one embodiment, the processor is configured to control the rotating assembly to rotate to keep the transparent or semitransparent curved material to be inspected horizontal, and control the X-axis moving assembly and the Y-axis moving assembly to drive the transparent or semitransparent curved material to move, so as to generate a second set of scanning positions, where the second set of scanning positions corresponds to a planar portion of the transparent or semitransparent curved material to be inspected;
and acquiring the thickness of each of the second group of scanning positions, and generating the profile corresponding to the second group of scanning positions.
In one embodiment, the processor is configured to perform point cloud fusion on the at least two part of outlines by combining the respective corresponding rotation angles to obtain the outline information of the transparent or semitransparent curved material to be inspected.
In one embodiment, the movement mechanism further comprises a Z-axis movement assembly for adjusting the distance between the transparent or semi-transparent curved material and the dispersive objective lens.
In one embodiment, the system for detecting the curved profile of the transparent or semitransparent material further comprises a light coupling device, wherein the light coupling device reflects the illumination light beam to the dispersive objective lens and transmits the light beam reflected by the material to be detected to enter the spectral analysis device.
In one embodiment, the lighting device is an L ED light source with a spectral range in the interval 245nm to 780nm or a xenon lamp light source with a spectral range in the interval 200nm to 2500 nm.
In one embodiment, the processor is further configured to identify at least one of a chamfer angle defect, a left-right bending inconsistency defect, or an arc surface bending angle defect according to the profile of the transparent or translucent curved inspection material.
The embodiment of the invention has the following beneficial effects:
after the transparent or semitransparent material curved surface contour detection system is adopted, the relation between the spectral chromatic aberration of reflected light on the upper surface and the lower surface of the transparent or semitransparent material to be detected and the thickness values of the upper surface and the lower surface can be measured by the spectral confocal technology for the curved surface contour of the transparent or semitransparent material to be detected and after the dispersion and decomposition of the dispersion objective lens, the thicknesses of a plurality of scanning positions can be measured, and therefore the contour of the transparent or semitransparent material to be detected can be obtained. The detection of the profile of the material to be detected by the profile detection system is not influenced by the light transmittance of the material to be detected. And through contour detection, whether the curved surface contour of the transparent or semitransparent curved surface inspection material has the defects of chamfer angle deviation, horizontal bending, inconsistent curved surface bending radian and the like can be quickly identified, so that the defects of the transparent or semitransparent curved surface inspection material can be accurately and quickly detected.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without any creative effort.
Wherein:
FIG. 1 is a schematic diagram of a system for detecting a curved surface profile of a transparent or translucent material according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the distance measurement by spectral confocal technique;
FIG. 3 is a schematic diagram of the distance measurement by spectral confocal technique;
FIG. 4 is a schematic diagram of a process of scanning by regions and synthesizing the region outline into an overall outline of a material under examination according to an embodiment;
FIG. 5 is a schematic diagram of a four-stage tandem structure dispersion objective lens according to an embodiment;
FIG. 6 is a schematic diagram illustrating major defects that may occur in a 3D curved glass inspection material according to an embodiment.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In order to solve the problem of low detection accuracy of the laser triangulation method in the prior art for the bending camber and the chamfer flatness of the transparent/semitransparent curved glass, as shown in fig. 1, a curved surface contour detection system for transparent or semitransparent materials is especially provided, which comprises:
the illumination device 102 is preferably an L ED light source with a spectral range in the range of 245nm to 780nm or a xenon light source with a spectral range in the range of 200nm to 2500 nm.
And the dispersion objective 104 is positioned in the light-emitting direction of the illumination light beam and is used for dispersing and decomposing the transmitted illumination light beam into a set of monochromatic light beams with the convergence points corresponding to the wavelengths.
The material checking support 106 is used for fixing the transparent or semitransparent curved surface material checking, the set of monochromatic light beams irradiates a scanning position of the transparent or semitransparent curved surface material checking, and two reflections are generated on the upper surface and the lower surface of the scanning position to form upper surface reflected light and lower surface reflected light.
And the spectrum analysis device 108 is used for receiving the upper surface reflected light and the lower surface reflected light and detecting the spectrum color difference of the upper surface reflected light and the lower surface reflected light.
And the processor 110 is configured to receive the spectral color difference, obtain the thickness of the scanning position according to the spectral color difference, and determine the profile of the transparent or semitransparent curved inspection material according to the thicknesses of two or more scanning positions. The processor 110 may be a computer system based on the von neumann architecture, such as a terminal computer or a server device, which relies on the execution of a computer program.
In this embodiment, as shown in fig. 1, the system for detecting the curved profile of the transparent or semitransparent material further comprises an optical coupling device 112, which reflects the illumination light beam toward the dispersive objective lens and transmits the light beam reflected by the material to be detected to enter the spectral analysis device. The relative positions of the illumination means 102 and the spectral analysis means 108 can then be set accordingly depending on the characteristics of the light coupling device.
The invention adopts the spectrum confocal technology, thereby having higher resolution and being insensitive to factors such as the texture, the inclination of the surface of the measured object, the stray light of the surrounding environment and the like. And because the light emission and the receiving are in the same optical path, the situation that the light path of the laser triangulation method is easily blocked or the surface of the measured target is too smooth to receive the reflected light of the target can not occur, and the adaptability to the measured target is strong. The system can realize the precise measurement of distance, transparent/semitransparent object thickness, three-dimensional object morphology and the like.
As shown in fig. 2 and 3, the illumination beam emitted from the wide-band light source of the white-light lamp is dispersed and decomposed into a plurality of convergent monochromatic beams after passing through the dispersive objective lens, and the respective convergence points (or called imaging points) of the monochromatic beams are all located on the optical axis of the dispersive objective lens, but the refractive index of the dispersive objective lens to the monochromatic beams changes linearly with the wavelength, so that the convergence points of the monochromatic beams are arranged on the optical axis of the dispersive objective lens according to the wavelength of the monochromatic beams, wherein the focusing distance of the short wavelength is short, the focusing distance of the long wavelength is short, and the focusing distance of the short wavelength is close to the dispersive objective lens, and the focusing distance of the long wavelength is long, and the focusing distance of the long wavelength is far from the dispersive objective.
I.e. a linear relationship should be satisfied between wavelength and focus position, the wavelength lambdaiAnd its focus position f (λ)i) The relationship between can be expressed as:
f(λi)＝z+kλi
the spectrometer S in fig. 2 is the spectral analysis device 108 in fig. 1, and when the object to be measured is transparent/translucent, two lights with different wavelengths are respectively focused on the upper and lower surfacesThe light returns to the spectral analysis device 108, is imaged in the spectral analysis device 108, and the spectrum at the center of the circle in the imaging is analyzed to obtain the spectrum lambda of the monochromatic light condensed on the upper surfaceaboveAnd a spectrum lambda of monochromatic light condensed on the lower surfacebelowAnd calculating the difference value between the focusing positions by combining the formula to obtain the distance values of the upper surface and the lower surface:
ΔL＝f(λabove)-f(λbelow)＝k(λabove-λbelow)
when the wide-spectrum illuminating light beam emitted by the illuminating device has a spectrum range of lambdaminTo lambdamaxRange of (2), measurement range of the system Δ LmaxNamely the distance difference between the focus positions of the monochromatic light image points with the maximum wavelength and the minimum wavelength, and is expressed by a formula as follows:
ΔLmax＝f(λmax)-f(λmin)
that is, for any position on the transparent or semitransparent curved test material, the spectral chromatic aberration of the reflected light on the upper and lower surfaces can be detected by the above spectral confocal technology, so as to obtain the thickness value of the position. Then, the profile of the transparent or semitransparent curved surface material to be inspected can be obtained only by scanning and collecting the thickness values of a plurality of scanning positions on the transparent or semitransparent curved surface material to be inspected.
Specifically, as shown in fig. 1, the material detecting support 106 includes a moving mechanism, the moving mechanism includes an X-axis moving component and a Y-axis moving component, and the moving mechanism 106 is configured to drive the transparent or semitransparent curved material to move in the X-axis direction and/or the Y-axis direction, so as to change the scanning position.
The plane formed by the X-axis direction and the Y-axis direction is a plane perpendicular to the optical axis of the dispersion objective, and as shown in fig. 1, the X-axis moving assembly and the Y-axis moving assembly are both provided with slide rails in the plane, so that the material checking support 106 can drive the material checking support to move in the X-axis direction or the Y-axis direction, and the material checking support 106 can be fixed by a clamp. By driving the material to be detected to move in the X-axis direction or the Y-axis direction, the color difference of the reflected light at a scanning position (X, Y) is collected by the spectral analysis device 108 when the material to be detected moves to the scanning position, so that the thickness value of the scanning position is calculated and recorded by the processor 110, when a plurality of scanning positions on the surface of the material to be detected are scanned, the profile of the material to be detected can be obtained, and the distance between the scanning positions is the horizontal resolution of the scanning.
Further, as shown in fig. 1, the moving mechanism further includes a rotating assembly, and the rotating assembly is configured to rotate the transparent or semitransparent curved material to be inspected by a preset angle.
In this embodiment, the scanning positions include at least two groups, each group of scanning positions corresponds to a rotation angle of a rotating assembly, and the processor is configured to obtain respective thicknesses of the scanning positions in the at least two groups of scanning positions, and generate at least two partial profiles corresponding to the at least two groups of scanning positions, where the at least two partial profiles correspond to respective corresponding rotation angles.
As shown in fig. 4, taking the contour detection of the 3D curved glass screen as an example, the 3D curved glass material can be divided into three detection areas: the left cambered surface area, the plane area and the right cambered surface area, and each detection area corresponds to a group of corresponding scanning positions. The plane area must include a part of left arc area and a part of right arc area, so as to facilitate the subsequent synthesis of the three part of area into a complete contour of the 3D curved glass inspection material, which can be specifically performed according to the following method:
detection of the left arc surface area: the left cambered surface region profile is obtained by rotating the 3D glass to the right by a first angle relative to the horizontal (which can be determined according to the actual curvature of the 3D glass edge) through the rotating shaft, moving the product by X1mm through the X-axis, and acquiring the thickness of a group of scanning positions(s) in the range of the X-axis direction X1 mm. And a first angle corresponding to the contour of the left cambered surface area needs to be recorded.
Detection of the plane area: the 3D glass is moved back to the horizontal position by the rotating shaft, the X-axis drives the product to move X2mm, and the thickness of a set of scan location(s) is collected over the X-axis direction X2mm, resulting in the profile of the planar area.
And (3) detecting a right cambered surface area: the 3D glass is rotated to the right by a second angle relative to the horizontal by the rotation axis, the product is moved X3mm by the X-axis drive, the thickness of a set of scan position(s) is acquired over the X-axis direction X2mm, and the right camber area profile is obtained. And a second angle corresponding to the contour of the right cambered surface area needs to be recorded.
In this embodiment, the rotation of the rotating assembly may be controlled by the processor 110 and the corresponding first and second angles may be recorded. Namely:
the processor 110 may be configured to control the rotating assembly to rotate by a first angle, and under the first angle, control the X-axis moving assembly and the Y-axis moving assembly to drive the transparent or semitransparent curved material to be inspected to move, so as to generate a first group of scanning positions corresponding to the first angle, where the first group of scanning positions correspond to a curved portion of the transparent or semitransparent curved material to be inspected; and acquiring the thickness of each of the first group of scanning positions, and generating the profile corresponding to the first group of scanning positions.
The processor 110 may be configured to control the rotating assembly to rotate to keep the transparent or semitransparent curved material to be inspected horizontal, and control the X-axis moving assembly and the Y-axis moving assembly to drive the transparent or semitransparent curved material to be inspected to move, so as to generate a second set of scanning positions, where the second set of scanning positions corresponds to a planar portion of the transparent or semitransparent curved material to be inspected; and acquiring the thickness of each scanning position of the second group, and generating the profile corresponding to the scanning position of the second group.
The processor can refer to the method for acquiring the left cambered surface area profile in a mode of acquiring the right cambered surface area profile, only the rotation angles are different, and other parts are consistent.
Then, the processor 110 may perform point cloud fusion on at least two part of the outlines by combining the respective corresponding rotation angles to obtain the outline information of the transparent or semitransparent curved surface inspection material, that is, the outline of the left arc surface area, the outline of the plane area and the outline of the right arc surface area may be combined by combining the first angle and the second angle to obtain the overall outline of the 3D curved surface glass inspection material.
Specifically, the outlines of different parts may be represented as two or more sets of point cloud data in different coordinate systems, each point cloud data is a thickness value of a scanning position in a set of scanning positions corresponding to the outline of the part, and the processor 110 may unify the two or more sets of point cloud data in different coordinate systems into the same reference coordinate system through a certain rotation and translation transformation.
In this process, it can be implemented by means of a set of mapping transformations. Assuming that the mapping is to be H, then H can be represented by the following equation:
and the number of the first and second electrodes,
T＝[txtytz]T，V＝[vxvyvz]
wherein A represents a rotation matrix; t represents the translation vector, V represents the perspective transformation vector, and S represents the scale factor of the whole body.
Since the point cloud data obtained by the processor 110 only has rotation and translation dislocation and no deformation, the mapping transformation H can be simply represented as rigid body transformation with unchanged length and angle. The transformed rigid transformation matrix H can be represented by the following formula:
and the number of the first and second electrodes,
T3*1＝[txtytz]T
wherein α, β and gamma represent the rotation angles of the points along the x, y and z axes, respectively, and tx、ty、tzRepresenting the amount of translation of the point along the x, y, z axes, respectively.
In the above example, the first angle and the pair corresponding to the contour of the left arc surface region are respectively setThe α value (no rotation of Y-axis and Z-axis) of the above formula is substituted for the angle 0 of the planar region, the second angle of the contour of the right arc region, and x1, x2 and x3 are substituted for t of the above formulaxAnd (4) the image registration and the outline synthesis of the point cloud data of a plurality of groups of scanning positions can be realized.
In other embodiments not directed to the contour detection of 3D curved glass, such as the contour detection of the free-form surface mirror, the rotating assembly can rotate arbitrarily in space by an angle whose components of the rotation angles along the x, y and z axes are α, β and gamma, respectively, and can move arbitrarily in space to scan the material to be inspected, and the components of the spatial translation along the x, y and z axes are tx、ty、tz. Substituting the data into the above formula can still realize image registration and contour synthesis of point cloud data of multiple groups of scanning positions.
In one embodiment, the movement mechanism further comprises a Z-axis movement assembly for adjusting the distance between the transparent or translucent curved inspection material and the dispersive objective lens.
Referring to fig. 1, 2 and 3, and also referring to the principle of the spectral confocal technique described above, the measurement range of the dispersive objective lens is f (λ)min) To f (lambda)max) If the position of the material to be inspected is too far away from the dispersive objective lens, the distance exceeds f (lambda)max) Is too close to, less than f (λ)min) The thickness of the film can not be accurately measured due to the fact that the thickness of the film exceeds the measuring range. After the Z-axis movement assembly is arranged, the distance from the material to be detected to the dispersion objective lens can be controlled through the Z-axis movement assembly, so that the material to be detected is in the optimal measurement range of the dispersion objective lens, and the accuracy is improved.
In one embodiment, the dispersive objective lens may be a four-stage series configuration, as shown with reference to FIG. 5. The vertical resolution of a curved surface profile detection system for transparent or translucent materials is generally evaluated by a spectral bandwidth, which refers to a wavelength interval corresponding to two points when the light intensity is reduced to half of the peak light intensity, and the vertical resolution of the system is higher as the spectral bandwidth is smaller. The short wavelength focus is located close to the dispersive objective lens with a large object numerical aperture, while the long wavelength focus is located far from the dispersive objective lens with a small object numerical aperture. Therefore, the vertical resolution is related to the size of the object-side numerical aperture of the dispersive objective lens, and the larger the object-side numerical aperture of the dispersive objective lens is, the higher the vertical resolution is. If the optical structure of combining four stages in series by using a plurality of materials or combining a refraction element and a diffraction element is adopted, the measurement range of the dispersive objective lens can be enlarged.
In this embodiment, referring to fig. 6, after the processor 110 detects the profile of the transparent or semitransparent curved inspection material, it may detect a chamfer angle defect, a left-right bending inconsistency defect, or an arc surface bending angle defect, and for a 3D curved glass screen, the detection of the chamfer angle defect, the left-right bending inconsistency defect, or the arc surface bending angle defect is a main defect affecting the assembly of the 3D curved glass screen. The processor 110 may quickly and accurately identify the defects by image processing the contour image, thereby preventing the defective 3D curved glass screen from affecting the overall assembly and structural performance.
The embodiment of the invention has the following beneficial effects:
after the transparent or semitransparent material curved surface contour detection system is adopted, the relation between the spectral chromatic aberration of reflected light on the upper surface and the lower surface of the transparent or semitransparent material to be detected and the thickness values of the upper surface and the lower surface can be measured by the spectral confocal technology for the curved surface contour of the transparent or semitransparent material to be detected and after the dispersion and decomposition of the dispersion objective lens, the thicknesses of a plurality of scanning positions can be measured, and therefore the contour of the transparent or semitransparent material to be detected can be obtained. The detection of the profile of the material to be detected by the profile detection system is not influenced by the light transmittance of the material to be detected. And through contour detection, whether the curved surface contour of the transparent or semitransparent curved surface inspection material has the defects of chamfer angle deviation, horizontal bending, inconsistent curved surface bending radian and the like can be quickly identified, so that the defects of the transparent or semitransparent curved surface inspection material can be accurately and quickly detected.
The above disclosure is only for the purpose of illustrating the preferred embodiments of the present invention, and it is not to be construed as limiting the scope of the present invention, therefore, the present invention is not limited by the appended claims.
Claims (10)
1. A system for detecting the curved surface contour of a transparent or semitransparent material is characterized by comprising:
an illumination device for emitting an illumination beam of a wide spectral band;
the dispersion objective lens is positioned in the light outgoing direction of the illumination light beam and is used for dispersing and decomposing the transmitted illumination light beam into a set of monochromatic light beams corresponding to the convergence point and the wavelength;
the material detecting support is used for fixing a transparent or semitransparent curved surface material to be detected, the set of monochromatic light beams irradiates a scanning position of the transparent or semitransparent curved surface material to be detected, and two reflections are generated on the upper surface and the lower surface of the scanning position to form upper surface reflected light and lower surface reflected light;
the spectrum analysis device is used for receiving the upper surface reflected light and the lower surface reflected light and detecting the spectrum color difference of the upper surface reflected light and the lower surface reflected light;
and the processor is used for receiving the spectral chromatic aberration, obtaining the thickness of the scanning position according to the spectral chromatic aberration, and determining the profile of the transparent or semitransparent curved surface material to be inspected according to the thicknesses of two or more scanning positions.
2. The system for detecting the curved surface profile of the transparent or semitransparent material according to claim 1, wherein the material detection support comprises a motion mechanism, the motion mechanism comprises an X-axis motion component and a Y-axis motion component, and the motion mechanism is used for driving the transparent or semitransparent curved surface material detection component to move in the X-axis direction and/or the Y-axis direction so as to change the scanning position.
3. The system for detecting the curved profile of a transparent or translucent material according to claim 2, wherein the moving mechanism further comprises a rotating assembly for rotating the transparent or translucent curved material to be inspected by a preset angle;
the scanning positions comprise at least two groups, each group of scanning positions corresponds to a rotation angle of the rotating assembly, the processor is used for acquiring the thickness of each scanning position in the at least two groups of scanning positions and generating at least two partial profiles corresponding to the at least two groups of scanning positions, and the at least two partial profiles correspond to the corresponding rotation angles respectively.
4. The system according to claim 3, wherein the processor is configured to control the rotating assembly to rotate by a first angle, and under the first angle, the X-axis moving assembly and the Y-axis moving assembly are controlled to move the transparent or translucent curved material to be inspected, so as to generate a first set of scanning positions corresponding to the first angle, and the first set of scanning positions corresponds to the curved portion of the transparent or translucent curved material to be inspected;
and acquiring the thickness of each of the first group of scanning positions, and generating the profile corresponding to the first group of scanning positions.
5. The system according to claim 4, wherein the processor is configured to control the rotating assembly to rotate to keep the transparent or translucent curved material to be inspected horizontal, and control the X-axis moving assembly and the Y-axis moving assembly to move the transparent or translucent curved material to be inspected, so as to generate a second set of scanning positions, and the second set of scanning positions corresponds to the planar portion of the transparent or translucent curved material to be inspected;
and acquiring the thickness of each of the second group of scanning positions, and generating the profile corresponding to the second group of scanning positions.
6. The system for detecting the curved surface contour of the transparent or semitransparent material according to any one of claims 3 to 5, wherein the processor is configured to perform point cloud fusion on the at least two partial contours by combining the respective corresponding rotation angles to obtain contour information of the transparent or semitransparent curved surface material.
7. The system according to any one of claims 2 to 6, wherein the motion mechanism further comprises a Z-axis motion assembly for adjusting the distance between the transparent or translucent curved material to be inspected and the dispersive objective lens.
8. The system according to any one of claims 2 to 6, further comprising an optical coupling device, wherein the optical coupling device reflects the illumination beam toward the dispersive objective lens and transmits the beam reflected by the material to the optical coupling device of the spectroscopic analyzer.
9. The system for detecting the curved surface profile of a transparent or semitransparent material according to any one of claims 2 to 6, wherein the illumination device is an L ED light source with a spectral range in the range of 245nm to 780nm or a xenon lamp light source with a spectral range in the range of 200nm to 2500 nm.
10. The system for detecting the curved surface profile of the transparent or semitransparent material according to any one of claims 2 to 6, wherein the processor is further configured to identify at least one of a chamfer angle defect, a left-right bending inconsistency defect or a cambered surface bending angle defect according to the profile of the transparent or semitransparent curved surface material.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2019/084845 WO2020220168A1 (en) | 2019-04-28 | 2019-04-28 | System for measuring contour of curved surface of transparent or semi-transparent material |
Publications (1)
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112097690A (en) * | 2020-09-17 | 2020-12-18 | 深圳技术大学 | Transparent object reconstruction method and system based on multi-wavelength ray tracing |
| CN112304249A (en) * | 2020-09-22 | 2021-02-02 | 江苏大学 | System and method for simultaneously detecting three-dimensional surface and thickness distribution of transparent material |
| CN113639661A (en) * | 2021-08-11 | 2021-11-12 | 中国科学院长春光学精密机械与物理研究所 | Morphology detection system and morphology detection method |
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| CN1657872A (en) * | 2005-02-25 | 2005-08-24 | 中国海洋大学 | Rotary scanning measuring apparatus |
| CN202748008U (en) * | 2012-09-19 | 2013-02-20 | 佛山华国光学器材有限公司 | Measurement apparatus for non-contact measurement of thickness of optical lens center |
| CN104061867A (en) * | 2014-07-09 | 2014-09-24 | 西安工业大学 | Spectrum confocal type measurement method and device for thickness of center of lens |
| CN206037950U (en) * | 2016-08-15 | 2017-03-22 | 深圳市和兴盛光电有限公司 | Non -contact thickness gauge |
| CN106871798A (en) * | 2017-03-09 | 2017-06-20 | 广东工业大学 | The measuring method and system of a kind of film thickness and refractive index |
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| DE10325942B4 (en) * | 2003-06-07 | 2010-09-16 | Jurca Optoelektronik Gmbh & Co. Kg | Device and method for non-contact thickness measurement of transparent bodies |
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- 2019-04-28 CN CN201980005539.7A patent/CN111406197A/en active Pending
Patent Citations (5)
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| CN1657872A (en) * | 2005-02-25 | 2005-08-24 | 中国海洋大学 | Rotary scanning measuring apparatus |
| CN202748008U (en) * | 2012-09-19 | 2013-02-20 | 佛山华国光学器材有限公司 | Measurement apparatus for non-contact measurement of thickness of optical lens center |
| CN104061867A (en) * | 2014-07-09 | 2014-09-24 | 西安工业大学 | Spectrum confocal type measurement method and device for thickness of center of lens |
| CN206037950U (en) * | 2016-08-15 | 2017-03-22 | 深圳市和兴盛光电有限公司 | Non -contact thickness gauge |
| CN106871798A (en) * | 2017-03-09 | 2017-06-20 | 广东工业大学 | The measuring method and system of a kind of film thickness and refractive index |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112097690A (en) * | 2020-09-17 | 2020-12-18 | 深圳技术大学 | Transparent object reconstruction method and system based on multi-wavelength ray tracing |
| CN112097690B (en) * | 2020-09-17 | 2022-04-29 | 深圳技术大学 | Transparent object reconstruction method and system based on multi-wavelength ray tracing |
| CN112304249A (en) * | 2020-09-22 | 2021-02-02 | 江苏大学 | System and method for simultaneously detecting three-dimensional surface and thickness distribution of transparent material |
| CN113639661A (en) * | 2021-08-11 | 2021-11-12 | 中国科学院长春光学精密机械与物理研究所 | Morphology detection system and morphology detection method |
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| WO2020220168A1 (en) | 2020-11-05 |
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