CN205562427U - Optical element surface defect detecting device of reflection -type synthetic aperture digital holographic art - Google Patents
Optical element surface defect detecting device of reflection -type synthetic aperture digital holographic art Download PDFInfo
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- CN205562427U CN205562427U CN201521133673.0U CN201521133673U CN205562427U CN 205562427 U CN205562427 U CN 205562427U CN 201521133673 U CN201521133673 U CN 201521133673U CN 205562427 U CN205562427 U CN 205562427U
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- 230000003287 optical effect Effects 0.000 title claims abstract description 43
- 230000007547 defect Effects 0.000 title abstract description 36
- 238000012360 testing method Methods 0.000 claims description 57
- 230000005540 biological transmission Effects 0.000 claims description 28
- 238000007689 inspection Methods 0.000 claims description 21
- 238000001093 holography Methods 0.000 claims description 18
- 238000001514 detection method Methods 0.000 abstract description 13
- 238000013519 translation Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 abstract description 2
- 230000001052 transient effect Effects 0.000 abstract 1
- 239000000523 sample Substances 0.000 description 52
- 230000003796 beauty Effects 0.000 description 12
- 101100117236 Drosophila melanogaster speck gene Proteins 0.000 description 9
- 230000000149 penetrating effect Effects 0.000 description 9
- 230000000007 visual effect Effects 0.000 description 7
- 238000003384 imaging method Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000004744 fabric Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006854 communication Effects 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
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Abstract
The utility model discloses an optical element surface defect detecting device of reflection -type synthetic aperture digital holographic art belongs to the optical element surface defect's in the optical detection technology field detection device, but its aim at provides a measured surface defect degree of depth jumps transient range and reach the optical element surface defect detecting device of reflection -type synthetic aperture digital holographic art of lambda wavelength magnitude. Its technical scheme does: including first laser instrument, first microcobjective, pinhole, first lens, the second mirror, the 2nd beam splitting Prism, third speculum, second lens, the 3rd beam splitting Prism, second microcobjective, attenuator, computer, CCD camera, third microcobjective and two -dimensional translation table. The utility model is suitable for a surperficial defect to the great optical element of surperficial defect transverse dimension detects.
Description
Technical field
The utility model belongs to technical field of optical detection, relates to a kind of optical element surface defect
Detection device.
Background technology
Optical element surface defect is owing to element surface grinds uneven institute in polishing process
Producing, it shows as there is a series of cut or pit on element surface, and it can affect optics
The image quality of imaging system to endanger the safety of high power laser system properly functioning.Optics unit
The testing result of part beauty defects is to judge one of the important indicator that whether qualified optical element is.Mesh
Before, in engineering detecting task, main employing scatters, based on details in a play not acted out on stage, but told through dialogues, the equipment instrument that imaging method is developed
Device quantitatively detects for optical element surface defect, and relevant device instrument can be to surface defect
Sick lateral dimension (width of cut, length, and the diameter of pit) carries out quantitative measurment,
But the topographical information such as it can not obtain longitudinal degree of depth of beauty defects, cross sectional shape, it is achieved right
In the D surface contouring of optical element surface defect, this is unfavorable for more in depth understanding and dividing
The analysis beauty defects impact on Optical devices performance.Therefore, determining in optical element surface defect
In amount detection, accurately measuring of beauty defects three-dimensional appearance is significant.
According to existing detection technique, it is possible to use white light interference (WFL) optical profilometer or
The appearance structure of optical element surface defect is detected by AFM (AFM), but
It is that both approaches all exists measuring speed slowly, measures the shortcoming that visual field is less, it is impossible to be suitable for
In to element surface defect real-time, the whole audience quantification detection.Surface profiler has relatively
High accuracy of detection, it is possible to obtain the lateral resolution of 200nm magnitude and nm magnitude axial
Resolution ratio, but it is less to measure visual field, usually millimeter magnitude, and measuring speed is relatively slower,
It is many that it needs to use piezoelectric ceramics (PZT) to carry out multistep machinery phase shift record during measuring
Two field picture；The resolution ratio of AFM can reach nm magnitude, but it measures visual field one
As can only in micron dimension, and measure during need element surface is carried out point by point scanning,
On the one hand this make measuring speed slowly, and on the other hand probe is likely during measuring
Touch element surface and cause element damage.Prior art utilizes directional light to carry out testing sample
Irradiate, through testing sample reflection (or transmission) after reflected parallel light and after Amici prism
Transmissive parallel light shines directly into formation interference figure in CCD camera.Due to partial optical element
The defect on surface is less, the phase that reflected parallel light produces after testing sample reflection (or transmission)
The flexural distortion of position distribution is more weak, thus reflected parallel light and transmissive parallel light are in CCD camera
The interference figure formed is inconspicuous, thus cannot by the interference figure of formation in CCD camera also
It is distributed by a series of three-dimensional appearance calculating testing sample or passes through CCD camera
The error of the three-dimensional appearance distribution that the interference figure of upper formation calculates testing sample is relatively big, makes
Obtain the essence that the three-dimensional appearance of testing sample is distributed by existing optical element surface flaw inspection device
Degree and the degree of accuracy are relatively low.
Based on above-mentioned technical problem, the application on August 26th, 2015 have submitted four for
The utility application of optical element surface flaw inspection, these four utility model patent Shens
It is the most all to use single wavelength laser as light source, utilizes Amici prism that laser is divided into reflection flat
Row light and transmissive parallel light, form two light paths that light path is different, be finally irradiated to testing sample
Reflection (or transmission) directional light through testing sample reflection (or transmission) after and direct irradiation
Transmissive parallel light in CCD camera forms interference figure, divides the three-dimensional appearance of testing sample
The carrying out of cloth accurately measures.
Summary of the invention
In prior art, owing to testing sample is to be placed directly in detection device to detect,
The position of testing sample cannot be moved, thus when in testing sample, the lateral dimension of surface defect is relatively
Time big, if during single width imaging viewing field that the size of surface defect is more than CCD, it is impossible to obtain to be measured
The complete pattern of sample surfaces defect.
Goal of the invention of the present utility model is: the problem existed for prior art, it is provided that
Plant the optical element surface being applicable to measure the bigger testing sample of beauty defects lateral dimension
Flaw inspection device.
To achieve these goals, the technical solution adopted in the utility model is:
A kind of optical element surface flaw inspection device of reflection-type synthetic aperture digital holography,
It is characterized in that: include the first laser instrument, the first microcobjective, pin hole, the first lens,
Two-mirror, the second Amici prism, the 3rd speculum, the second lens, the 3rd Amici prism,
Second microcobjective, attenuator, computer, CCD camera, the 3rd microcobjective and two dimension are flat
Moving stage；
The narrow laser beam that described first laser instrument sends sequentially pass through the first microcobjective, pin hole,
It is incident to the second Amici prism after first lens and is divided into the thin laser of reflection through the second Amici prism
Bundle and transmission narrow laser beam；Described reflection narrow laser beam sequentially passes through the second speculum, the 3rd anti-
It is incident on testing sample after penetrating mirror, the second lens, the 3rd Amici prism, the second microcobjective,
Reflection narrow laser beam sequentially passes through the second microcobjective, the 3rd light splitting rib after testing sample reflects
CCD camera it is incident to after mirror；Described transmission narrow laser beam sequentially passes through attenuator, the 3rd micro-
It is incident to CCD camera after object lens, the 3rd Amici prism；It is flat that described testing sample is connected to two dimension
In moving stage, described CCD camera electrically connects with computer.
Wherein, described pin hole is positioned in the focus of the first microcobjective, and described narrow laser beam is successively
Expand after the first microcobjective, pin hole as umbilical point light source.
Wherein, described pin hole is positioned in the focus of the first lens.
Wherein, described second lens, the focus of the second microcobjective overlap, described second lens,
Second microcobjective forms confocal contracting beam system.
Wherein, described second microcobjective and the 3rd microcobjective be enlargement ratio, numerical aperture,
Between the microcobjective that operating distance is identical, and the second microcobjective and the 3rd Amici prism away from
From equal to the distance between the 3rd microcobjective and the 3rd Amici prism.
Wherein, described first lens and the second lens are achromatic lens.
Wherein, described first microcobjective, the second microcobjective and the 3rd microcobjective are and disappear
Aberration microcobjective.
In sum, owing to have employed technique scheme, the beneficial effects of the utility model are:
In the utility model, done by CCD camera and computer recording optical element to be measured numeral
Relate to the phase distribution of pattern, calculate the three-dimensional appearance profile Δ L of optical element surface defect to be checked,
The whole audience real-time realizing beauty defects three-dimensional appearance quantitatively detects, and test speed is rapid, surveys
Amount visual field is big, and accuracy of detection is high；By arranging microcobjective in detection light path, utilize micro-
The high-frequency information risen and fallen in the Wave-front phase distortion caused due to beauty defects is received by object lens
Collection, amplifies optical element surface defect small for size and is imaged on the target surface of CCD camera,
Efficiently solve the problem that the high-frequency information of fractional phase distortion loses in communication process, improve
Accuracy of detection for the beauty defects of test sample；Use synthetic aperture technique, by surveying
During amount, testing sample is placed in and can carry out the automatically controlled precise 2-D of high-precision two-dimensional translation and put down
In moving stage, often complete the measurement of a CCD single width visual field size, testing sample is carried out two dimension
Translate to realize the scanning survey to whole large scale beauty defects, thus add and can measure
Beauty defects lateral dimension scope.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model；
Wherein, reference is: 1 first laser instrument, 5 first microcobjectives, 6 pins
Hole, 7 first lens, 8 second speculums, 9 second Amici prisms, 10 the 3rd anti-
Penetrate mirror, 11 second lens, 12 the 3rd Amici prisms, 13 second microcobjectives, 14
Attenuator, 15 computers, 16 CCD camera, 17 testing samples, 18 the 3rd show
Speck mirror, 19 two-dimension translational platforms.
Detailed description of the invention
Below in conjunction with the accompanying drawings, the utility model is described in detail.
In order to make the purpose of this utility model, technical scheme and advantage clearer, below
In conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that
Specific embodiment described herein, only in order to explain the utility model, is not used to limit this reality
With novel.
A kind of optical element surface flaw inspection device of reflection-type synthetic aperture digital holography,
It includes that first laser instrument the 1, first microcobjective 5, pin hole the 6, first lens 7, second are anti-
Penetrate mirror the 8, second Amici prism the 9, the 3rd speculum the 10, second lens the 11, the 3rd light splitting rib
Mirror the 12, second microcobjective 13, attenuator 14, computer 15, CCD camera the 16, the 3rd
Microcobjective 18 and two-dimension translational platform 19.
First laser instrument 1 can produce the narrow laser beam that wavelength is λ, and the first laser instrument 1 produces
Narrow laser beam is incident to after sequentially passing through the first microcobjective 5, pin hole the 6, first lens 7
Two Amici prisms 9, this narrow laser beam produces on the second Amici prism 9 and reflects to form reflection carefully
Laser beam, generation transmission form transmission narrow laser beam；This reflection narrow laser beam is anti-second successively
Penetrate and on mirror 8, produce reflection, on the 3rd speculum 10, produce reflection, transmitted through the second lens
11, transmitted through the 3rd Amici prism 12, transmitted through vertical incidence after the second microcobjective 13 extremely
On testing sample 17, reflection narrow laser beam produces reflection on testing sample 17, and through to be measured
Sample 17 reflection after reflection narrow laser beam successively transmitted through the second microcobjective 13, the 3rd
It is incident to CCD camera 16 after producing reflection on Amici prism 12, and in CCD camera 16
Imaging on target surface, forms digitalized intervention pattern A；Transmission narrow laser beam is successively transmitted through attenuator
14, CCD camera 16 it is incident to after the 3rd microcobjective the 18, the 3rd Amici prism 12, and
Imaging on the target surface of CCD camera 16, forms digitalized intervention pattern B；This CCD camera 16 with
Computer 15 electrically connects, and the digitalized intervention pattern transmission that CCD camera 16 is collected is to meter
Calculation machine 15；Testing sample 17 is connected on two-dimension translational platform 19, by during measuring
Testing sample 17 is placed in the automatically controlled precise 2-D translation stage 19 that can carry out high-precision two-dimensional translation
On, often complete the measurement of a CCD single width visual field size, testing sample 17 is carried out two dimension
Translate to realize the scanning survey to whole large scale beauty defects.
The testing process of this detection device is: (1) selects optical element to be detected as survey
Test agent, is placed in certain part edge region of test sample in microcobjective visual field, as sweeping
Retouch starting point, then control element by automatically controlled precise 2-D translation stage and carry out two-dimension translational, with
Realize the horizontal two-dimensional scan to whole surface defect, record corresponding digitalized intervention pattern A0,
A1……An；(2) each width digitalized intervention pattern A0, A1 ... the phase distribution of An are calculated (3) by phase distribution According to the defect area that it is corresponding
Territory position coordinates carries out splicing synthesis, obtains the phase place corresponding with whole large scale beauty defects and divides
Cloth(4) the three-dimensional appearance profile Δ L of optical element surface defect to be checked is calculated,
Wherein λ is the wavelength of laser instrument.
Additionally, described pin hole 6 is positioned in the focus of the first microcobjective 5, described narrow laser beam
Expand as umbilical point light source after the first microcobjective 5, pin hole 6 successively.
Additionally, described pin hole 6 is positioned in the focus of the first lens 7.The ball sent by pin hole 6
Face light beam collimates as collimated light beam after the first lens 7.
Additionally, the focus of described second lens the 11, second microcobjective 13 overlaps, described the
Two lens the 11, second microcobjectives 13 form confocal contracting beam system.
Additionally, described second microcobjective 13 and the 3rd microcobjective 18 are enlargement ratio, number
Value aperture, the microcobjective that operating distance is identical, and the second microcobjective 13 and the 3rd light splitting
Distance between prism 12 is equal between the 3rd microcobjective 18 and the 3rd Amici prism 12
Distance.
Additionally, described first lens 7 and the second lens 11 are achromatic lens.
Additionally, described first microcobjective the 5, second microcobjective 13 and the 3rd microcobjective
18 are achromatic micro objective.
Embodiment 1
A kind of optical element surface flaw inspection device of reflection-type synthetic aperture digital holography,
Reflect including first laser instrument the 1, first microcobjective 5, pin hole the 6, first lens 7, second
Mirror the 8, second Amici prism the 9, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism
12, the second microcobjective 13, attenuator 14, computer 15, CCD camera the 16, the 3rd show
Speck mirror 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends sequentially passes through the first microcobjective 5, pin
It is incident to the second Amici prism 9 after the 6, first lens 7 of hole and is divided into through the second Amici prism 9
Reflection narrow laser beam and transmission narrow laser beam；Described reflection narrow laser beam sequentially passes through the second reflection
Mirror the 8, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism the 12, second micro-thing
After mirror 13, vertical incidence is on testing sample 17, and reflection narrow laser beam is anti-through testing sample 17
It is incident to CCD camera after sequentially passing through the second microcobjective the 13, the 3rd Amici prism 12 after penetrating
16；Described transmission narrow laser beam sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd
CCD camera 16 it is incident to after Amici prism 12；Testing sample 17 is connected to two-dimension translational platform
On 19, described CCD camera 16 electrically connects with computer 15.
Embodiment 2
A kind of optical element surface flaw inspection device of reflection-type synthetic aperture digital holography,
Reflect including first laser instrument the 1, first microcobjective 5, pin hole the 6, first lens 7, second
Mirror the 8, second Amici prism the 9, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism
12, the second microcobjective 13, attenuator 14, computer 15, CCD camera the 16, the 3rd show
Speck mirror 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends sequentially passes through the first microcobjective 5, pin
It is incident to the second Amici prism 9 after the 6, first lens 7 of hole and is divided into through the second Amici prism 9
Reflection narrow laser beam and transmission narrow laser beam；Described reflection narrow laser beam sequentially passes through the second reflection
Mirror the 8, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism the 12, second micro-thing
After mirror 13, vertical incidence is on testing sample 17, and reflection narrow laser beam is anti-through testing sample 17
It is incident to CCD camera after sequentially passing through the second microcobjective the 13, the 3rd Amici prism 12 after penetrating
16；Described transmission narrow laser beam sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd
CCD camera 16 it is incident to after Amici prism 12；Testing sample 17 is connected to two-dimension translational platform
On 19, described CCD camera 16 electrically connects with computer 15.
Wherein, described pin hole 6 is positioned in the focus of the first microcobjective 5, described narrow laser beam
Expand as umbilical point light source after the first microcobjective 5, pin hole 6 successively.
Embodiment 3
A kind of optical element surface flaw inspection device of reflection-type synthetic aperture digital holography,
Reflect including first laser instrument the 1, first microcobjective 5, pin hole the 6, first lens 7, second
Mirror the 8, second Amici prism the 9, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism
12, the second microcobjective 13, attenuator 14, computer 15, CCD camera the 16, the 3rd show
Speck mirror 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends sequentially passes through the first microcobjective 5, pin
It is incident to the second Amici prism 9 after the 6, first lens 7 of hole and is divided into through the second Amici prism 9
Reflection narrow laser beam and transmission narrow laser beam；Described reflection narrow laser beam sequentially passes through the second reflection
Mirror the 8, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism the 12, second micro-thing
After mirror 13, vertical incidence is on testing sample 17, and reflection narrow laser beam is anti-through testing sample 17
It is incident to CCD camera after sequentially passing through the second microcobjective the 13, the 3rd Amici prism 12 after penetrating
16；Described transmission narrow laser beam sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd
CCD camera 16 it is incident to after Amici prism 12；Testing sample 17 is connected to two-dimension translational platform
On 19, described CCD camera 16 electrically connects with computer 15.
Wherein, described pin hole 6 is positioned in the focus of the first lens 7.
Embodiment 4
A kind of optical element surface flaw inspection device of reflection-type synthetic aperture digital holography,
Reflect including first laser instrument the 1, first microcobjective 5, pin hole the 6, first lens 7, second
Mirror the 8, second Amici prism the 9, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism
12, the second microcobjective 13, attenuator 14, computer 15, CCD camera the 16, the 3rd show
Speck mirror 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends sequentially passes through the first microcobjective 5, pin
It is incident to the second Amici prism 9 after the 6, first lens 7 of hole and is divided into through the second Amici prism 9
Reflection narrow laser beam and transmission narrow laser beam；Described reflection narrow laser beam sequentially passes through the second reflection
Mirror the 8, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism the 12, second micro-thing
After mirror 13, vertical incidence is on testing sample 17, and reflection narrow laser beam is anti-through testing sample 17
It is incident to CCD camera after sequentially passing through the second microcobjective the 13, the 3rd Amici prism 12 after penetrating
16；Described transmission narrow laser beam sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd
CCD camera 16 it is incident to after Amici prism 12；Testing sample 17 is connected to two-dimension translational platform
On 19, described CCD camera 16 electrically connects with computer 15.
Wherein, the focus of described second lens the 11, second microcobjective 13 overlaps, and described the
Two lens the 11, second microcobjectives 13 form confocal contracting beam system.
Embodiment 5
A kind of optical element surface flaw inspection device of reflection-type synthetic aperture digital holography,
Reflect including first laser instrument the 1, first microcobjective 5, pin hole the 6, first lens 7, second
Mirror the 8, second Amici prism the 9, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism
12, the second microcobjective 13, attenuator 14, computer 15, CCD camera the 16, the 3rd show
Speck mirror 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends sequentially passes through the first microcobjective 5, pin
It is incident to the second Amici prism 9 after the 6, first lens 7 of hole and is divided into through the second Amici prism 9
Reflection narrow laser beam and transmission narrow laser beam；Described reflection narrow laser beam sequentially passes through the second reflection
Mirror the 8, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism the 12, second micro-thing
After mirror 13, vertical incidence is on testing sample 17, and reflection narrow laser beam is anti-through testing sample 17
It is incident to CCD camera after sequentially passing through the second microcobjective the 13, the 3rd Amici prism 12 after penetrating
16；Described transmission narrow laser beam sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd
CCD camera 16 it is incident to after Amici prism 12；Testing sample 17 is connected to two-dimension translational platform
On 19, described CCD camera 16 electrically connects with computer 15.
Wherein, described second microcobjective 13 and the 3rd microcobjective 18 are enlargement ratio, number
Value aperture, the microcobjective that operating distance is identical, and the second microcobjective 13 and the 3rd light splitting
Distance between prism 12 is equal between the 3rd microcobjective 18 and the 3rd Amici prism 12
Distance.
Embodiment 6
A kind of optical element surface flaw inspection device of reflection-type synthetic aperture digital holography,
Reflect including first laser instrument the 1, first microcobjective 5, pin hole the 6, first lens 7, second
Mirror the 8, second Amici prism the 9, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism
12, the second microcobjective 13, attenuator 14, computer 15, CCD camera the 16, the 3rd show
Speck mirror 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends sequentially passes through the first microcobjective 5, pin
It is incident to the second Amici prism 9 after the 6, first lens 7 of hole and is divided into through the second Amici prism 9
Reflection narrow laser beam and transmission narrow laser beam；Described reflection narrow laser beam sequentially passes through the second reflection
Mirror the 8, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism the 12, second micro-thing
After mirror 13, vertical incidence is on testing sample 17, and reflection narrow laser beam is anti-through testing sample 17
It is incident to CCD camera after sequentially passing through the second microcobjective the 13, the 3rd Amici prism 12 after penetrating
16；Described transmission narrow laser beam sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd
CCD camera 16 it is incident to after Amici prism 12；Testing sample 17 is connected to two-dimension translational platform
On 19, described CCD camera 16 electrically connects with computer 15.
Wherein, described first lens 7 and the second lens 11 are achromatic lens.
Embodiment 7
A kind of optical element surface flaw inspection device of reflection-type synthetic aperture digital holography,
Reflect including first laser instrument the 1, first microcobjective 5, pin hole the 6, first lens 7, second
Mirror the 8, second Amici prism the 9, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism
12, the second microcobjective 13, attenuator 14, computer 15, CCD camera the 16, the 3rd show
Speck mirror 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends sequentially passes through the first microcobjective 5, pin
It is incident to the second Amici prism 9 after the 6, first lens 7 of hole and is divided into through the second Amici prism 9
Reflection narrow laser beam and transmission narrow laser beam；Described reflection narrow laser beam sequentially passes through the second reflection
Mirror the 8, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism the 12, second micro-thing
After mirror 13, vertical incidence is on testing sample 17, and reflection narrow laser beam is anti-through testing sample 17
It is incident to CCD camera after sequentially passing through the second microcobjective the 13, the 3rd Amici prism 12 after penetrating
16；Described transmission narrow laser beam sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd
CCD camera 16 it is incident to after Amici prism 12；Testing sample 17 is connected to two-dimension translational platform
On 19, described CCD camera 16 electrically connects with computer 15.
Wherein, described first microcobjective the 5, second microcobjective 13 and the 3rd microcobjective
18 are achromatic micro objective.
Embodiment 8
A kind of optical element surface flaw inspection device of reflection-type synthetic aperture digital holography,
Reflect including first laser instrument the 1, first microcobjective 5, pin hole the 6, first lens 7, second
Mirror the 8, second Amici prism the 9, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism
12, the second microcobjective 13, attenuator 14, computer 15, CCD camera the 16, the 3rd show
Speck mirror 18 and two-dimension translational platform 19；
The narrow laser beam that described first laser instrument 1 sends sequentially passes through the first microcobjective 5, pin
It is incident to the second Amici prism 9 after the 6, first lens 7 of hole and is divided into through the second Amici prism 9
Reflection narrow laser beam and transmission narrow laser beam；Described reflection narrow laser beam sequentially passes through the second reflection
Mirror the 8, the 3rd speculum the 10, second lens the 11, the 3rd Amici prism the 12, second micro-thing
After mirror 13, vertical incidence is on testing sample 17, and reflection narrow laser beam is anti-through testing sample 17
It is incident to CCD camera after sequentially passing through the second microcobjective the 13, the 3rd Amici prism 12 after penetrating
16；Described transmission narrow laser beam sequentially passes through attenuator the 14, the 3rd microcobjective the 18, the 3rd
CCD camera 16 it is incident to after Amici prism 12；Testing sample 17 is connected to two-dimension translational platform
On 19, described CCD camera 16 electrically connects with computer 15.
Wherein, described pin hole 6 is positioned in the focus of the first microcobjective 5, described narrow laser beam
Expand as umbilical point light source after the first microcobjective 5, pin hole 6 successively.
Wherein, described pin hole 6 is positioned in the focus of the first lens 7.
Wherein, the focus of described second lens the 11, second microcobjective 13 overlaps, and described the
Two lens the 11, second microcobjectives 13 form confocal contracting beam system.
Wherein, described second microcobjective 13 and the 3rd microcobjective 18 are enlargement ratio, number
Value aperture, the microcobjective that operating distance is identical, and the second microcobjective 13 and the 3rd light splitting
Distance between prism 12 is equal between the 3rd microcobjective 18 and the 3rd Amici prism 12
Distance.
Wherein, described first lens 7 and the second lens 11 are achromatic lens.
Wherein, described first microcobjective the 5, second microcobjective 13 and the 3rd microcobjective
18 are achromatic micro objective.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this reality
With novel, all made within spirit of the present utility model and principle any amendment, equivalent replace
Change and improvement etc., within should be included in protection domain of the present utility model.
Claims (7)
1. the optical element surface flaw inspection device of a reflection-type synthetic aperture digital holography, it is characterised in that: include the first laser instrument (1), the first microcobjective (5), pin hole (6), the first lens (7), the second speculum (8), the second Amici prism (9), the 3rd speculum (10), the second lens (11), the 3rd Amici prism (12), the second microcobjective (13), attenuator (14), computer (15), CCD camera (16), the 3rd microcobjective (18) and two-dimension translational platform (19)；
The narrow laser beam that described first laser instrument (1) sends is incident to the second Amici prism (9) and is divided into reflection narrow laser beam and transmission narrow laser beam through the second Amici prism (9) after sequentially passing through the first microcobjective (5), pin hole (6), the first lens (7)；Described reflection narrow laser beam is incident on testing sample (17) after sequentially passing through the second speculum (8), the 3rd speculum (10), the second lens (11), the 3rd Amici prism (12), the second microcobjective (13), and reflection narrow laser beam is incident to CCD camera (16) after sequentially passing through the second microcobjective (13), the 3rd Amici prism (12) after testing sample (17) reflects；Described transmission narrow laser beam is incident to CCD camera (16) after sequentially passing through attenuator (14), the 3rd microcobjective (18), the 3rd Amici prism (12)；Described testing sample (17) is connected on two-dimension translational platform (19), and described CCD camera (16) electrically connects with computer (15).
2. the optical element surface flaw inspection device of reflection-type synthetic aperture digital holography as claimed in claim 1, it is characterized in that: described pin hole (6) is positioned in the focus of the first microcobjective (5), described narrow laser beam expands as umbilical point light source successively after the first microcobjective (5), pin hole (6).
3. the optical element surface flaw inspection device of reflection-type synthetic aperture digital holography as claimed in claim 1, it is characterised in that: described pin hole (6) is positioned in the focus of the first lens (7).
4. the optical element surface flaw inspection device of reflection-type synthetic aperture digital holography as claimed in claim 1, it is characterized in that: described second lens (11), the focus of the second microcobjective (13) overlap, and described second lens (11), the second microcobjective (13) form confocal contracting beam system.
5. the optical element surface flaw inspection device of reflection-type synthetic aperture digital holography as claimed in claim 1, it is characterized in that: described second microcobjective (13) and the 3rd microcobjective (18) are enlargement ratio, numerical aperture, microcobjective that operating distance is identical, and the distance between the second microcobjective (13) and the 3rd Amici prism (12) is equal to the distance between the 3rd microcobjective (18) and the 3rd Amici prism (12).
6. the optical element surface flaw inspection device of the reflection-type synthetic aperture digital holography as described in arbitrary in claim 1-5, it is characterised in that: described first lens (7) and the second lens (11) are achromatic lens.
7. the optical element surface flaw inspection device of the reflection-type synthetic aperture digital holography as described in arbitrary in claim 1-5, it is characterised in that: described first microcobjective (5), the second microcobjective (13) and the 3rd microcobjective (18) are achromatic micro objective.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521133673.0U CN205562427U (en) | 2015-12-30 | 2015-12-30 | Optical element surface defect detecting device of reflection -type synthetic aperture digital holographic art |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521133673.0U CN205562427U (en) | 2015-12-30 | 2015-12-30 | Optical element surface defect detecting device of reflection -type synthetic aperture digital holographic art |
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| CN205562427U true CN205562427U (en) | 2016-09-07 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111829757A (en) * | 2020-07-15 | 2020-10-27 | 中国工程物理研究院激光聚变研究中心 | Transient measurement device and detection method for laser-induced damage characteristics of optical element |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111829757A (en) * | 2020-07-15 | 2020-10-27 | 中国工程物理研究院激光聚变研究中心 | Transient measurement device and detection method for laser-induced damage characteristics of optical element |
| CN111829757B (en) * | 2020-07-15 | 2022-01-28 | 中国工程物理研究院激光聚变研究中心 | Transient measurement device and detection method for laser-induced damage characteristics of optical element |
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