CN217930170U - Optical detection type main shaft rotation error measuring device - Google Patents
Optical detection type main shaft rotation error measuring device Download PDFInfo
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- CN217930170U CN217930170U CN202221846316.9U CN202221846316U CN217930170U CN 217930170 U CN217930170 U CN 217930170U CN 202221846316 U CN202221846316 U CN 202221846316U CN 217930170 U CN217930170 U CN 217930170U
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Abstract
The utility model discloses an optical detection formula main shaft gyration error measuring device. The measuring device comprises a laser interferometer, a first pyramid reflector, a second pyramid reflector and a first spectroscope. The laser interferometer, the first spectroscope and the second pyramid reflector are sequentially arranged along the axial direction of the measured spindle. And in the measuring process, the second pyramid reflector is coaxially and fixedly arranged at the end part of the measured main shaft. The first angle cone reflector is arranged on the side part of the first spectroscope. The utility model discloses set up the cone angle reflector at the tip of main shaft, utilize laser interference principle to measure main shaft axial error, realize that high accuracy measurement only has higher requirement to the optical device precision, lower to the requirement that detects the machining precision of installing part, installation accuracy. Furthermore, the utility model discloses only set up a set of spectroscope and PSD sensor on the basis that the axial detected, just realized the radial error detection in step under the condition of additionally not setting up the light source again.
Description
Technical Field
The utility model belongs to main shaft gyration error measurement field in the precision measurement technique, concretely relates to use laser interferometer, PSD sensor and laser autocollimator to detect device of main shaft axial, radial, inclination error simultaneously.
Background
The accuracy of the machine tool determines to a large extent the accuracy of the machined part. In order to ensure the processing quality of mechanical products, the development of machine tools towards high precision is a necessary trend. The main shaft is a core component of a numerical control machine tool, and the rotation error of the main shaft is an important factor influencing the machining precision of the machine tool. Experimental research shows that: in precision machining, the main shaft rotation error accounts for 30-70% of the total error proportion, and the higher the precision grade of the machine tool is, the larger the main shaft rotation error accounts for the total error proportion. The measurement of the rotation error has very important practical significance for evaluating the precision of the machine tool spindle, monitoring the running state of the spindle and timely finding and diagnosing the fault of the spindle.
At present, a plurality of methods are available for measuring the rotation error of the spindle, and a commonly used measuring method is an error separation method using a standard rod and measuring the error motion of the spindle by using a capacitance type, an eddy current type and other one-dimensional displacement sensors. However, the measurement needs to use a standard rod, which increases the processing and manufacturing cost and difficulty, and requires error separation. The scholars propose a method for measuring the rotation error of the spindle based on an optical target marking and scratch tracking method, but the method is only sensitive to the radial error and is difficult to measure other errors.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an optical detection formula main shaft gyration error measuring device.
The utility model provides an optical detection formula main shaft gyration error measuring device, including laser interferometer, first pyramid speculum, second pyramid speculum and first spectroscope. The laser interferometer, the first spectroscope and the second pyramid reflector are sequentially arranged along the axial direction of the measured spindle. And in the measuring process, the second pyramid reflector is coaxially and fixedly arranged at the end part of the measured main shaft. The first angle cone reflector is arranged on the side part of the first spectroscope.
In the measuring process, incident laser emitted by the laser interferometer enters the second pyramid reflecting mirror through the first spectroscope. Incident laser forms a first split beam at a first beam splitter; the first light beam is reflected by the first angle cone reflector and then re-enters the first light splitter, and is reflected by the first light splitter and then emitted to the detection area of the laser interferometer. The incident laser is reflected on the second pyramid reflector to form a reflected beam; the reflected beam is directed to the detection region of the laser interferometer. The first split beam is used as standard light, the reflected beam is used as test light, and interference fringes are formed in a detection area of the laser interferometer.
Preferably, the spindle rotation error measuring device based on laser interference further comprises a second beam splitter and a PSD sensor. The second beam splitter is arranged between the laser interferometer and the second pyramid reflector. The PSD sensor is arranged on the side part of the second spectroscope. In the test process, the reflected light beam forms a second split light beam at the second beam splitter; the second split beam is incident on the PSD sensor.
Preferably, the main shaft rotation error measuring device based on laser interference further comprises an annular plane mirror and a laser autocollimator. The annular plane mirror is fixed on the measured main shaft. The laser autocollimator is installed on the frame and vertically faces the mirror surface of the annular plane mirror.
Preferably, the coating directions of the first beam splitter and the second beam splitter form an included angle of 45 degrees with the laser emission direction of the laser interferometer.
Preferably, the reflecting surface of the second pyramid reflector is conical with a cone angle of 90 °.
Preferably, the reflecting surface of the first pyramid mirror is in a right-angle L-shape or a cone shape with a cone angle of 90 °.
Preferably, the laser emission direction of the laser interferometer does not coincide with the axis of the spindle to be measured.
Preferably, during the measurement, the distance between the straight line of the part of the first split beam entering the first corner cone reflector and the tip of the first corner cone reflector is equal to the distance between the straight line of the incident laser and the tip of the second corner cone reflector in the initial state.
The utility model discloses beneficial effect who has:
1. the utility model discloses set up the cone angle reflector at the tip of main shaft, utilize laser interference principle to measure main shaft axial error, realize that high accuracy measurement only has higher requirement to the optical device precision, lower to the requirement that detects the machining precision of installation part, installation accuracy, and need not to control factors such as surface accuracy roughness, main shaft material.
2. The utility model discloses only set up a set of spectroscope and PSD sensor on the basis that the axial detected, just realized the radial error detection in step under the condition of not additionally setting up the light source, reduced equipment cost, simplified the operation, and avoided the extra error that asynchronous error detected and brought.
3. When detecting axial and radial error, the utility model discloses utilize annular reflecting mirror and laser autocollimator synchronous detection inclination error.
Drawings
Fig. 1 is a schematic view of the overall optical path of the measuring device adopted by the present invention;
FIG. 2 is a schematic view of the installation of the main shaft plane mirror of the present invention;
fig. 3 is a schematic diagram of the measurement of the laser autocollimator according to the present invention.
Detailed Description
The present invention will be further described with reference to the accompanying drawings.
As shown in fig. 1, an optical detection type spindle rotation error measuring device includes a laser interferometer, a first pyramid reflector a, a second pyramid reflector b, a first beam splitter 1, a second beam splitter 2, a PSD sensor, an annular plane mirror c, and a laser autocollimator 3.
The laser interferometer, the first beam splitter 1, the second beam splitter 2 and the second pyramid reflector b are sequentially arranged along the axial direction of the measured main shaft. The laser interferometer, the first spectroscope 1 and the second spectroscope 2 are all arranged on the rack; and in the measurement process, the second pyramid reflector b is coaxially and fixedly arranged at the end part of the main shaft. The mirror surface direction of the second cube-corner reflecting mirror b faces the laser interferometer.
The reflecting surface of the first pyramid reflecting mirror a is in a right-angle L shape. The reflecting surface of the second pyramid reflecting mirror b is conical, and the angle of the cone angle is 90 degrees; the coating directions of the first spectroscope 1 and the second spectroscope 2 form an included angle of 45 degrees with the axial direction of the measured spindle.
The first pyramid reflector a is installed at the side of the first beam splitter 1. The PSD sensor is arranged on the frame and below the second spectroscope 2 perpendicular to the axis, so that the reflected light of the second spectroscope 2 can strike on the PSD sensor.
The reflecting surface of the first angle cone reflector a and the coating of the first light splitter 1 are kept oppositely arranged, so that the light reflected by the first light splitter 1 is reflected by the first angle cone reflector a and then is incident on the coating of the first light splitter 1 in a direction perpendicular to the initial incidence direction of the laser.
In the testing process, incident laser emitted by the laser interferometer enters the second pyramid reflecting mirror b through the first spectroscope 1 and the second spectroscope 2. The incident laser forms a first split beam at the first beam splitter 1; the first light beam is reflected by the first angle cone reflector a and then enters the first light splitter 1 again, and is reflected by the first light splitter 1 and then enters the detection area of the laser interferometer.
The incident laser is reflected by the second pyramid reflector b to form a reflected light beam; the reflected light beam is emitted to the detection area of the laser interferometer through the second spectroscope 2 and the first spectroscope 1; the reflected beam forms a second split beam at the second beam splitter 2; the second split beam is incident on the PSD sensor. The first split beam is used as standard light, the reflected beam is used as test light, and interference fringes are formed in the detection area of the laser interferometer.
The incident laser is not coincident with the axis of the measured spindle. The distance between the straight line of the part of the first split beam, which enters the first pyramid reflector a, and the tip of the first pyramid reflector a is equal to the distance between the straight line of the incident laser and the tip of the second pyramid reflector b in the initial state, so that the positions of the first split beam and the reflected beam, which enter the detection area of the laser interferometer, are the same or similar.
The part of the first split beam passing through the first spectroscope 1, the split beam reflected by the incident laser on the second spectroscope 2, and the split beam reflected by the reflected beam on the first spectroscope 1 are not emitted to any element in the measuring device, and do not play any role and influence the detection result, so that the description is omitted.
The annular plane mirror c is coaxially fixed on the outer circumferential surface of the measured spindle. The surface quality of the annular plane mirror c is ensured, and meanwhile, the perpendicularity of the plane mirror surface and the axis of the main shaft needs to be ensured. The laser autocollimator 3 is mounted on the frame, faces the mirror surface of the annular flat mirror c, and is configured to emit and receive laser light.
The utility model discloses a theory of operation as follows:
step one, a first spectroscope 1 and a second spectroscope 2 are assembled, the light splitting surfaces of the first spectroscope 1 and the second spectroscope 2 are kept parallel to each other, and an included angle of 45 degrees is formed between the light splitting surfaces and the axial direction of a measured spindle, so that the accuracy of light path measurement is guaranteed; the first angle cone reflector a is arranged at the upper part of the first spectroscope 1 and is used for forming standard light; the second pyramid reflector b is installed at the center of the end surface of the main shaft to generate the experimental light. The PSD sensor is arranged on the side of the second spectroscope 2 and used for receiving light reflected by the second spectroscope 2 and obtaining radial error of the main shaft, and the center of the PSD sensor is aligned to a light path during installation, so that the utilization rate of the PSD sensor is ensured, and omission of optical signals is prevented.
Step two, operating the tested main shaft, and driving the second pyramid reflector b to rotate by the tested main shaft; after the motion is stable, operating the laser interferometer; laser emitted by the laser interferometer is divided into two beams by the first beam splitter 1, one beam is reflected at the first beam splitter 1 and returns to the laser interferometer under the secondary reflection action of the first angle cone reflecting mirror a and the first beam splitter 1, and the beam is standard light; and the other beam passes through the first spectroscope 1, is reflected by a second pyramid reflector b arranged at the measured main shaft and then returns to the laser interferometer, the beam is experimental light, and the standard light and the experimental light are split by the same laser beam, so the standard light and the experimental light accord with coherence conditions and interfere with each other.
Because the axial direction of the main shaft can be displaced in the movement process of the main shaft, namely, the axial error exists, the interference fringe between the two beams of light can be changed along with the rotation of the main shaft; when the pyramid reflector moves half a laser wavelength along the axial direction of the spindle, an interference fringe light intensity change cycle (bright-dark-bright) appears, and the axial error of the spindle can be solved by calculating the change, and the part is an axial detection module part1 for measuring the axial error of the spindle.
Specifically, the optical path of the test light changes with the axial movement of the spindle, and the number of interference fringes also changes with the optical path of the test light. Thereby, the variation N of the number of interference fringes relative to the initial time can be passed θ Calculating the axial error of the measured spindle
Wherein λ is 0 Is the laser wavelength; n is the refractive index of air.
Step three, after the experimental light is acted by a second pyramid reflecting mirror b arranged at the main shaft, the experimental light returns to the receiving end of the laser interferometer on the way and is acted by a second beam splitter 2; the experimental light is divided into two beams under the action of the second spectroscope 2, and one beam of light directly transmits through the spectroscope and returns to the detection area of the laser interferometer; and the other beam of light is reflected at the second beam splitter 2, so that the light path is changed and projected onto a PSD sensor at the side part of the second beam splitter 2. Because the radial movement of the main shaft can change the incident point of the laser at the second pyramid reflector b, so that the position of the emergent point also changes, the incident position signal of the laser detected by the PSD sensor also changes, and the vector taking the spot position signal and the initial position signal detected by the PSD sensor as the end point and the starting point respectively when the measured main shaft is at different phases theta is the radial error of the measured main shaft at different phases theta. This part is the radial detection module part2 for measuring the spindle radial error.
The principle of the process is that: because the geometrical relationship exists between the light paths, the radial displacement of the spindle can be reversely deduced through the position of the light spot track on the PSD sensor. When the second pyramid reflector b moves a certain distance along the x or y direction on the radial plane of the measured main shaft, the light spot on the PSD sensor also moves the same distance along the x or y direction of the PSD plane.
And step four, resolving the inclination angle error of the main shaft. The process of measuring the tilt error by using the laser autocollimator 3 is shown in fig. 3; the laser light emitted from the laser autocollimator 3 returns to the detection region of the laser autocollimator 3 after being reflected by the annular plane mirror c. When the annular plane mirror c runs along with the main shaft, the inclination error of the main shaft can be reflected on the mirror surface, so that the falling point of the light beam received by the laser autocollimator 3 is deviated. By the principle, the inclination angle error of the main shaft can be solved, and the part is the inclination angle detection module part3 for measuring the inclination angle error of the main shaft.
As an alternative embodiment, the following equation can be used to calculate the tilt error of the spindle in both directions X, Y:
wherein alpha is θ (x)、α θ (y) are spindle inclination errors α, respectively θ Components in the x-direction, y-direction; gamma ray θ (x)、γ θ (y) autocollimator readings γ θ Components in the x-direction, y-direction;
respectively, mounting error of the annular flat mirror c
The components in the x-direction and the y-direction.
Claims (8)
1. An optical detection formula main shaft gyration error measuring device which characterized in that: comprises a laser interferometer, a first pyramid reflector, a second pyramid reflector and a first spectroscope (1); the laser interferometer, the first beam splitter (1) and the second pyramid reflector are sequentially arranged along the axial direction of the measured spindle; in the measuring process, the second pyramid reflector is coaxially and fixedly arranged at the end part of the measured main shaft; the first angle cone reflector is arranged on the side part of the first spectroscope (1);
in the measuring process, incident laser emitted by the laser interferometer is emitted into the second pyramid reflecting mirror through the first beam splitter (1); incident laser forms a first split beam at a first beam splitter (1); the first light beam is reflected by the first angle cone reflector and then re-enters the first light splitter (1), and is reflected by the first light splitter (1) and then is emitted to the detection area of the laser interferometer; the incident laser is reflected on the second pyramid reflector to form a reflected beam; the reflected light beam is emitted to the detection area of the laser interferometer; the first split beam is used as standard light, the reflected beam is used as test light, and interference fringes are formed in a detection area of the laser interferometer.
2. An optical detection type spindle gyration error measuring apparatus according to claim 1, characterized in that: the device also comprises a second spectroscope (2) and a PSD sensor; the second beam splitter (2) is arranged between the laser interferometer and the second pyramid reflector; the PSD sensor is arranged on the side part of the second spectroscope (2); during the test, the reflected light beam forms a second split beam at the second beam splitter (2); the second split beam is incident on the PSD sensor.
3. An optical detection type spindle gyration error measuring apparatus according to claim 2, wherein: the laser collimator also comprises an annular plane mirror and a laser autocollimator; the annular plane mirror is fixed on the measured main shaft; the laser autocollimator is mounted on the frame and faces the mirror surface of the annular plane mirror vertically.
4. An optical detection type spindle revolution error measuring device according to claim 2, characterized in that: the coating directions of the first spectroscope (1) and the second spectroscope (2) form 45-degree included angles with the laser emitting direction of the laser interferometer.
5. An optical detection type spindle gyration error measuring apparatus according to claim 1, characterized in that: the reflecting surface of the first angle cone reflecting mirror is in a right-angle L shape or a cone shape with a cone angle of 90 degrees.
6. An optical detection type spindle gyration error measuring apparatus according to claim 1, characterized in that: the reflecting surface of the second pyramid reflector is conical with a cone angle of 90 degrees.
7. An optical detection type spindle gyration error measuring apparatus according to claim 1, characterized in that: and the laser emitting direction of the laser interferometer is not coincident with the axis of the measured spindle.
8. An optical detection type spindle revolution error measuring device according to claim 7, characterized in that: in the measuring process, the distance between the straight line of the part of the first split beam, which enters the first angle cone reflector, and the tip of the first angle cone reflector is equal to the distance between the straight line of the incident laser and the tip of the second angle cone reflector in the initial state.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221846316.9U CN217930170U (en) | 2022-07-18 | 2022-07-18 | Optical detection type main shaft rotation error measuring device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221846316.9U CN217930170U (en) | 2022-07-18 | 2022-07-18 | Optical detection type main shaft rotation error measuring device |
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| CN217930170U true CN217930170U (en) | 2022-11-29 |
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| CN202221846316.9U Expired - Fee Related CN217930170U (en) | 2022-07-18 | 2022-07-18 | Optical detection type main shaft rotation error measuring device |
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- 2022-07-18 CN CN202221846316.9U patent/CN217930170U/en not_active Expired - Fee Related
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Granted publication date: 20221129 |