CN103604375B - Double frequency laser grating interference two-dimensional measurement method and system with optical aliasing resistance - Google Patents
Double frequency laser grating interference two-dimensional measurement method and system with optical aliasing resistance Download PDFInfo
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Abstract
The invention discloses a double frequency laser grating interference two-dimensional measurement method and system with optical aliasing resistance, and belongs to a grating measurement technology. The system comprises a laser device, a grating interference mirror set and a photoelectric detection and signal processing unit. Two laser beams which are simultaneously output by the laser device, different in frequency and separated in space enter a polarizing beam splitter in parallel and in an incident mode. The first laser beam enters a reference grating in an incident mode after being reflected by the polarizing beam splitter to form multiple reference diffraction laser beams with multiple levels, the second laser beam enters a measurement grating in an incident mode after being transmitted by the polarizing beam splitter to form multiple measurement diffraction laser beams, three of the reference diffraction laser beams are sequentially and correspondingly joint with the 0 laser beam, the +1 laser beam and the -1 laser beam in the measurement diffraction laser beams respectively to form an optical beat frequency, and two-dimensional relative motion information of the measurement grating is acquired through photoelectric detection and signal processing. By the adoption of the method and system, optical frequency aliasing, polarization state aliasing and corresponding periodic non-linear errors caused by traditional incomplete polarizing beam splitting are eliminated, and combination properties of a photoetching machine ultra-precise workpiece table position measurement system can be improved when the double frequency laser grating interference two-dimensional measurement system is used for the photoetching machine ultra-precise workpiece table position measurement system.
Description
Technical field
The present invention relates to a kind of grating measuring method and measuring system, more particularly, to a kind of double-frequency laser grating interference two dimension
Measuring method and measuring system.
Background technology
Litho machine in semiconductor manufacturing equipment is the key equipment in semiconductor chip fabrication.Ultra-precision table system is light
Quarter machine kernel subsystems, complete high speed ultraprecise step-scan campaign for carrying mask plate and silicon chip.Ultra-precision table system
With its at a high speed, high acceleration, the movement characteristic such as big stroke, ultraprecise, multiple degrees of freedom become in ultraprecise motor system and most represent
One class system of property.For realizing above-mentioned motion, ultra-precision table system generally adopts the measurement of two-frequency laser interferometer measuring system super
Precision workpiece stage multiple degrees of freedom displacement.However as constantly carrying of the motion index such as certainty of measurement, measurement distance, measuring speed
Height, two-frequency laser interferometer is difficult to improve, is taken up room with environmental sensitivity, measuring speed, expensive, measurement target workpiece
Platform is difficult to a series of problems, such as manufacture and design control and is difficult to meet measurement demand.
For the problems referred to above, each major company in ultra precise measurement field and research institution expand a series of grinding in the world
Study carefully, research focuses primarily upon the optical grating measuring system based on diffraction interference principle, achievement in research all has in many patent papers
Disclose.Dutch asml company United States Patent (USP) us7,102,729b2 (publication date 2005 on August 4), us7,483,120b2 are (open
Day on November 15th, 2007), us7,940,392b2 (publication date on December 24th, 2009), us2010/0321665a1 (publication date
On December 23rd, 2010) disclose a kind of plane grating measuring system being applied to Ultra-precision Stages of Lithography and arrangement side
Case, this measuring system mainly utilizes the one-dimensional or two-dimentional plane grating cooperation read head measurement big travel displacement of work stage level,
Short transverse displacement measurement adopts the height sensor such as current vortex or interferometer, but the application of multiple sensors limits work stage and surveys
Accuracy of measurement.Zygo company of U.S. U.S. Patent Publication No. us2011/0255096a1 (publication date on October 20th, 2011) discloses
A kind of optical grating measuring system being applied to Ultra-precision Stages of Lithography, this measuring system also adopts one-dimensional or two-dimensional grating cooperation
Specific read head realizes displacement measurement, can carry out level simultaneously measure to vertical deviation；Tsing-Hua University's Chinese patent
Cn102937411a (publication date on 02 20th, 2013), Tsing-Hua University Chinese patent cn102944176a (publication date 2013
02 month 27 days) disclose a kind of dual-frequency grating interferometer displacement measurement system of Ultra-precision Stages of Lithography, this measuring system
It is that the measurement target reflector (pyramid) of traditional two-frequency laser interferometer is substituted for grating, realize double-frequency laser grating interference
Measurement, the level that can simultaneously measure is to big travel displacement and vertical deviation, but because double-frequency laser is coaxial, is to adopt polarization spectro
Mirror is split up into reference light and measurement light, exist the optical frequency aliasing that polarization spectro not exclusively causes, polarization state aliasing and
Corresponding cycle nonlinearity erron problem.PLA University of Science and Technology for National Defense Chinese patent cn102353327a
(publication date on 02 15th, 2013) discloses a kind of double-frequency laser grating interference measuring method and measuring system, and the program utilizes
Double-frequency laser is divided into reference light and measurement light by polarization spectroscope, and reference light and measurement light are made simultaneously incident to the measurement grating moving
On, reference light and measurement light through measuring optical grating diffraction converge formation optical beat, obtain fortune by photodetection with signal processing
The displacement of dynamic grating, this system only enables one-dimensional measurement, equally exist the optical frequency aliasing that polarization spectro not exclusively causes,
Polarization state aliasing and corresponding cycle nonlinearity erron problem.
Content of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, seeks a kind of anti-light double frequency learning aliasing and swashs
Light grating interference measuring method and system, this measuring system is capable of sub- nanometer even more high resolution and precision, and can
Measurement level is to big travel displacement and vertical deviation simultaneously.This measuring system is used for ultra-precision table system displacement measurement, Neng Gouyou
Deficiency in ultra-precision table system application for the reduction laser interferometer measurement system of effect, makes Ultra-precision Stages of Lithography performance
Lifting.
The object of the present invention is achieved like this:
The anti-light double-frequency laser grating interference two-dimensional measurement method learning aliasing, laser instrument exports two bundle laser, wherein simultaneously
Beam of laser is first frequency, and the second bundle laser is second frequency, and described beam of laser and the second bundle laser are in sky
Between upper separately and parallel incide a spectroscope, beam of laser forms reference beam through dichroic mirror and incides reference light
Grid, by forming the multi beam of multiple levels time with reference to optical grating diffraction with reference to diffracted beam, the second bundle laser is formed through spectroscope transmission to be surveyed
Amount light beam incides measurement grating, is formed the multi beam measurement diffracted beam of multiple levels time by measurement optical grating diffraction, and described reference is spread out
In irradiating light beam first bundle, second bundle, three beams of laser Shu Yici respectively with measurement diffracted beam in first bundle, second bundle,
Three beams of laser bundle correspondence is converged formation optical beat and is interfered, and optical beat signal is measured with signal processing through photodetection
The two-dimentional relative movement information of grating.
The anti-light double-frequency laser grating interference two-dimensional measurement system learning aliasing, including exportable two bundle different frequency laser beams
Laser instrument and polarization spectroscope, wherein one laser beam transmits to the incidence of polarization spectroscope through first single-mode polarization maintaining fiber
End forms the first incoming laser beam, and another one laser beam transmits to the incidence end of polarization spectroscope through second single-mode polarization maintaining fiber
Form the second incoming laser beam, the polarization state of adjustment the first incoming laser beam, make the first incoming laser beam in polarization spectroscope
Light splitting face reflects to form reference arm light beam, configures reference arm quarter-wave successively in the light path of described reference arm light beam
Piece, reference arm dioptric element and reference grating, reference arm light beam is through reference arm quarter-wave plate and reference arm dioptric element
Directive with reference to grating, reference arm light beam through with reference to grating diffraction reflection formed (+1,0) level light beam, (+1 ,+1) level light beam and (+
1, -1) level light beam, described (+1,0) level light beam, (+1 ,+1) level light beam and (+1, -1) level light beam are after reference arm dioptric element
Its beam direction is adjusted to reference arm parallel beam and reversely, (+1,0) level light beam, (+1 ,+1) level light beam and (+1, -1) level
Light beam returns to polarization spectroscope through reference arm quarter-wave plate again, and passes through spectro-film, in the transmitted light through spectro-film
Photodetector a, photodetector b and photodetector c successively on road, described (+1 ,+1) level light beam directive light electrical resistivity survey
Survey device a, (+1,0) level light beam directive photodetector b, (+1, -1) level light beam directive photodetector c；Adjustment second is incident to swash
The polarization state of light beam, makes the second incoming laser beam become measurement arm light beam in the light splitting face transmission of polarization spectroscope, described
In measurement arm beam path, configuration measures arm quarter-wave plate, measurement arm dioptric element and measurement grating successively, measures arm light
Restraint measured arm quarter-wave plate and measurement arm dioptric element directive measurement grating, measurement arm light beam is through measuring optical grating diffraction
Reflect to form 0 grade of light beam ,+1 grade of light beam and -1 grade of light beam, described 0 grade of light beam ,+1 grade of light beam and the measured arm folding of -1 grade of light beam
After optical element, its beam direction is adjusted to and measures arm parallel beam reverse, 0 grade of light beam ,+1 grade of light beam and -1 grade of light beam warp again
Cross measurement arm quarter-wave plate and return to polarization spectroscope, through polarization spectroscope reflection successively respectively formed light beam b, light beam a,
Light beam c, described light beam a and (+1 ,+1) level light beam converge directive photodetector a, and light beam b and (+1,0) level light beam converge directive
Photodetector b, light beam c and (+1, -1) level light beam converge directive photodetector c, and described photodetector a, b, c are by beat frequency
Optical signal is converted into the signal of telecommunication, delivers to signal processing unit respectively by wire or optical fiber and completes to process.
Compared with prior art, it is an advantage of the current invention that:
(1) the spatially separated transmission of double-frequency laser bundle that in the present invention, laser instrument exports, and separately incide polarization point
On light microscopic, eliminate optical frequency aliasing, the polarization that traditional coaxial double-frequency laser is not exclusively caused by polarization spectroscope light splitting
State aliasing and corresponding cycle nonlinearity erron；
(2) separately transmit double-frequency laser by two single-mode polarization maintaining fibers in the present invention, this is conducive to the polarization of double-frequency laser
State adjustment and light path be aligned；
(3) 0 grade and symmetrically senior time diffraction light produced by measurement optical grating diffraction in the present invention is respectively with reference to grating
Diffraction light forms optical beat interferes, and is measured by three photodetectors simultaneously, can accurately measure measurement light by signal processing
Grid, in the relative displacement of two dimensional surface, due to not needing laser instrument to provide the beat signal of single double-frequency laser difference on the frequency, subtract
Lack optical element, simplify light path layout.
Brief description
Accompanying drawing is a kind of anti-light double-frequency laser grating interference two-dimensional measurement system structure diagram learning aliasing.
In figure: 1- laser instrument；First single-mode polarization maintaining fiber of 2-；Second single-mode polarization maintaining fiber of 3-；4- polarization spectroscope；
5- reference arm quarter-wave plate；6- reference arm dioptric element；7- is with reference to grating；8- measures arm quarter-wave plate；9- measures
Arm dioptric element；10- measures grating；11- photodetector a；12- photodetector b；13- photodetector c；At 14- signal
Reason unit；20- first incoming laser beam；21- reference arm light beam；22- (+1 ,+1) level light beam；23- (+1,0) level light beam；24-(+
1, -1) level light beam；30- second incoming laser beam；31- measures arm light beam；32-+1 level light beam；33-0 level light beam；34--1 level light
Bundle；35th, 36,37- light beam a, b, c.
Specific embodiment
Below in conjunction with the accompanying drawings the specific embodiment of the invention is described in further detail.
The anti-light double-frequency laser grating interference two-dimensional measurement method learning aliasing, laser instrument exports two bundle laser, wherein simultaneously
Beam of laser is first frequency, and the second bundle laser is second frequency, and described beam of laser and the second bundle laser are in sky
Between upper separately and parallel incide a spectroscope, beam of laser forms reference beam through dichroic mirror and incides reference light
Grid, by forming the multi beam of multiple levels time with reference to optical grating diffraction with reference to diffracted beam, the second bundle laser is formed through spectroscope transmission to be surveyed
Amount light beam incides measurement grating, is formed the multi beam measurement diffracted beam of multiple levels time by measurement optical grating diffraction, and described reference is spread out
In irradiating light beam first bundle, second bundle, three beams of laser Shu Yici respectively with measurement diffracted beam in first bundle, second bundle,
Three beams of laser bundle correspondence is converged formation optical beat and is interfered, and optical beat signal is measured with signal processing through photodetection
The two-dimentional relative movement information of grating.
The anti-light double-frequency laser grating interference two-dimensional measurement system learning aliasing, including exportable two bundle different frequency laser beams
Laser instrument 1 and polarization spectroscope 4, wherein one laser beam transmits to polarization spectroscope 4 through first single-mode polarization maintaining fiber 2
Incidence end forms the first incoming laser beam 20, and another one laser beam transmits to polarization spectroscope 4 through second single-mode polarization maintaining fiber 3
Incidence end formed the second incoming laser beam 30, adjustment the first incoming laser beam 20 polarization state, make the first incoming laser beam 20
Reflect to form reference arm light beam 21 in the light splitting face of polarization spectroscope 4, the light path of described reference arm light beam 21 is joined successively
Put reference arm quarter-wave plate 5, reference arm dioptric element 6 and with reference to grating 7, reference arm light beam 21 through reference arm four/
One wave plate 5 and reference arm dioptric element 6 directive with reference to grating 7, reference arm light beam 21 through being formed with reference to grating 7 diffraction reflection (+1,
0) level light beam 23, (+1 ,+1) level light beam 22 and (+1, -1) level light beam 24, described (+1,0) level light beam 23, (+1 ,+1) level light beam
22 and (+1, -1) level light beam 24 its beam direction after reference arm dioptric element 6 be adjusted to parallel with reference arm light beam 21 simultaneously
Reversely, (+1,0) level light beam 23, (+1 ,+1) level light beam 22 and (+1, -1) level light beam 24 return through reference arm quarter-wave plate 5 again
Return to polarization spectroscope 4, and pass through spectro-film, photodetector a11, light successively on the transmitted light path through spectro-film
Electric explorer b12 and photodetector c13, described (+1 ,+1) level light beam 22 directive photodetector a11, (+1,0) level light beam
23 directive photodetector b12, (+1, -1) level light beam 24 directive photodetector c13；Adjust the inclined of the second incoming laser beam 30
Polarization state, makes the second incoming laser beam 30 become measurement arm light beam 31 in the light splitting face transmission of polarization spectroscope 4, in described measurement
In arm light beam 31 light path, configuration measures arm quarter-wave plate 8, measurement arm dioptric element 9 and measurement grating 10 successively, measures arm
The measured arm quarter-wave plate 8 of light beam 31 and measurement arm dioptric element 9 directive measurement grating 10, measurement arm light beam 31 is through surveying
Amount grating 10 diffraction reflection forms 33 ,+1 grade of light beam 32 of 0 grade of light beam and -1 grade of light beam 34, described 33 ,+1 grade of light beam 32 of 0 grade of light beam
After arm dioptric element 9 measured with -1 grade of light beam 34, its beam direction is adjusted to parallel with measuring arm light beam 31 and reverse, 0 grade
Measured arm quarter-wave plate 8 returns to polarization spectroscope 4 again, through partially for 33 ,+1 grade of light beam 32 of light beam and -1 grade of light beam 34
The spectroscope 4 that shakes reflects and forms light beam b36, light beam a35, light beam c37, described light beam a35 and (+1 ,+1) level light beam 22 successively respectively
Converge directive photodetector a11, light beam b36 and (+1,0) level light beam 23 converge directive photodetector b12, light beam c37 with
(+1, -1) level light beam 24 converges directive photodetector c13, and beat frequency optical signal is turned by described photodetector a11, b12, c13
Change the signal of telecommunication into, signal processing unit 14 is delivered to respectively by wire or optical fiber and completes to process.
The anti-light double-frequency laser grating interference two-dimensional measurement system learning aliasing, described is flat reflective two with reference to grating 7
Orthogonal dimension grating, described measurement grating 10 is flat reflective one-dimensional grating or flat reflective two-dimensional quadrature grating.
The anti-light double-frequency laser grating interference two-dimensional measurement system learning aliasing, described photodetector a11, b12, c13 couple
The detection of optical beat signal can be by photodetector direct detection or by fibre-optical probe remote probe.
When measuring grating 10 and being static, (+1 ,+1) level light beam 22 and light beam a35, (+1,0) level light beam 23 and light beam b36,
(+1, -1) level light beam 24 and light beam c37 form measurement optical beat respectively and interfere, and its beat frequency is that the double frequency of laser instrument 1 output swashs
The difference of the frequency of light, when measuring grating 10 parallel to measurement arm light beam 31 motion, 0 grade of light beam 33 will produce corresponding Doppler
Frequency displacement, when measurement grating 10 is portrayed direction and transported perpendicular to measurement arm light beam 31 and both perpendicular to the grating of measurement grating 10
When dynamic ,+1 grade of light beam 32 and -1 grade of light beam 34 are produced equal in magnitude, the contrary Doppler frequency shift of symbol respectively, and this makes photoelectricity
The optical beat signal that detector a11, b12, c13 detect changes, and finally receives photodetector a11, b12, c13
Signal is processed, and can accurately measure the relative displacement in two dimensional surface for the grating 10.
Claims (3)
1. a kind of anti-light double-frequency laser grating interference two-dimensional measurement system learning aliasing, including exportable two bundle different frequency laser
The laser instrument (1) of bundle and polarization spectroscope (4), wherein one laser beam transmits to polarization through first single-mode polarization maintaining fiber (2)
The incidence end of spectroscope (4) forms the first incoming laser beam (20), and another one laser beam passes through second single-mode polarization maintaining fiber (3)
The incidence end transporting to polarization spectroscope (4) forms the second incoming laser beam (30) it is characterised in that adjusting the first incoming laser beam
(20) polarization state, makes the first incoming laser beam (20) reflect to form reference arm light beam in the light splitting face of polarization spectroscope (4)
(21), the light path of described reference arm light beam (21) configures reference arm quarter-wave plate (5), reference arm dioptric element successively
(6) with reference to grating (7), reference arm light beam (21) is penetrated through reference arm quarter-wave plate (5) and reference arm dioptric element (6)
To with reference to grating (7), reference arm light beam (21) is through forming (+1,0) level light beam (23), (+1 ,+1) with reference to grating (7) diffraction reflection
Level light beam (22) and (+1, -1) level light beam (24), described (+1,0) level light beam (23), (+1 ,+1) level light beam (22) and (+1, -1)
Level light beam (24) its beam direction after reference arm dioptric element (6) is adjusted to parallel and reverse with reference arm light beam (21),
(+1,0) level light beam (23), (+1 ,+1) level light beam (22) and (+1, -1) level light beam (24) are again through reference arm quarter-wave plate
(5) return to polarization spectroscope (4), and pass through spectro-film, photodetection is configured successively on the transmitted light path through spectro-film
Device a (11), photodetector b (12) and photodetector c (13), described (+1 ,+1) level light beam (22) directive photodetector a
(11), (+1,0) level light beam (23) directive photodetector b (12), (+1, -1) level light beam (24) directive photodetector c
(13)；Adjust the polarization state of the second incoming laser beam (30), make the light splitting in polarization spectroscope (4) for the second incoming laser beam (30)
Face transmission forms measurement arm light beam (31), and in described measurement arm light beam (31) light path, configuration measures arm quarter-wave successively
Piece (8), measurement arm dioptric element (9) and measurement grating (10), the measured arm quarter-wave plate (8) of measurement arm light beam (31)
With measurement arm dioptric element (9) directive measurement grating (10), measurement arm light beam (31) is through measurement grating (10) diffraction reflection formation 0
Level light beam (33) ,+1 grade of light beam (32) and -1 grade of light beam (34), described 0 grade of light beam (33) ,+1 grade of light beam (32) and -1 grade of light beam
(34) measured arm dioptric element (9) its beam direction is adjusted to and parallel and reverse, the 0 grade of light beam that measures arm light beam (31) afterwards
(33) ,+1 grade of light beam (32) and -1 grade of light beam (34) measured arm quarter-wave plate (8) returns to polarization spectroscope again
(4), light beam b (36), light beam a (35), light beam c (37), described light beam a are formed successively respectively through polarization spectroscope (4) reflection
(35) converge directive photodetector a (11) with (+1 ,+1) level light beam (22), light beam b (36) is converged with (+1,0) level light beam (23)
Close directive photodetector b (12), light beam c (37) and (+1, -1) level light beam (24) converge directive photodetector c (13), institute
State photodetector a, b, c (11,12,13) and beat frequency optical signal is converted into the signal of telecommunication, letter is delivered to respectively by wire or optical fiber
Number processing unit (14) completes to process.
2. according to claim 1 anti-light learn aliasing double-frequency laser grating interference two-dimensional measurement system it is characterised in that
Described is flat reflective two-dimensional quadrature grating with reference to grating (7), and described measurement grating (10) is flat reflective one-dimensional grating
Or flat reflective two-dimensional quadrature grating.
3. according to claim 1 anti-light learn aliasing double-frequency laser grating interference two-dimensional measurement system it is characterised in that
Described photodetector a, b, c (11,12,13) to the detection of optical beat signal can by photodetector direct detection or by
Fibre-optical probe remote probe.
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| CN112097650B (en) * | 2020-09-11 | 2022-04-26 | 中国科学院长春光学精密机械与物理研究所 | Heterodyne grating displacement measuring method |
| CN112097651B (en) * | 2020-09-11 | 2022-07-22 | 中国科学院长春光学精密机械与物理研究所 | Heterodyne two-dimensional grating displacement measurement system and measurement method |
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| CN112097652B (en) * | 2020-09-11 | 2021-12-17 | 中国科学院长春光学精密机械与物理研究所 | Grating displacement measuring device |
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| CN115046482B (en) * | 2022-06-15 | 2023-07-07 | 中国科学院长春光学精密机械与物理研究所 | Two-dimensional grating displacement measuring device |
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|---|---|
| CN103604375A (en) | 2014-02-26 |
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