CN1257384C - High precision two-dimensional narrow angle measuring method - Google Patents
High precision two-dimensional narrow angle measuring method Download PDFInfo
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- CN1257384C CN1257384C CN 200410094051 CN200410094051A CN1257384C CN 1257384 C CN1257384 C CN 1257384C CN 200410094051 CN200410094051 CN 200410094051 CN 200410094051 A CN200410094051 A CN 200410094051A CN 1257384 C CN1257384 C CN 1257384C
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Abstract
The present invention discloses a high precision two-dimensional minor angle measuring method which belongs to light non-contact two-dimensional minor angle measuring technique. A two-dimensional minor angle measuring device is used for realizing the angle measuring method. The present invention is characterized in that a light splitting light path design is used for splitting light reflected by objects to be measured and having two-dimensional angle information into two paths which are mutually orthogonal; the two light paths respectively having corner information winding Z, X axes enter XY, YZ measurement planes; a light differential measurement method is used for the angle measurement; the attitudes of the objects to be measured change, namely the incidence angles of light rays change; the change of the incidence angles of the light rays is converted to electrical signals with proportional angular change values; a single-chip microcomputer carries out signal analysis treatment and display to obtain the indicating values of the two-dimensional angular change amount caused by the change of the attitudes of the objects/ the corners. The present invention has the advantages of high system accuracy, adjustable resolution and measuring range, small volume and simple structure; a lighting source and a light splitting light path are used for realizing the simultaneous measurement of two-dimensional minor angles; the resolution can reach 0.05 arcsec, and the measuring range is from-600 arcsec to 600 arcsec.
Description
Technical field
The present invention relates to a kind of high precision two-dimensional narrow angle measuring method, belong to optics noncontact Bidimensional small angle measuring technique.
Background technology
At present, Chang Yong optics angle-measuring method comprises optical dividing head method, polygon method, photoelectric coding method, autocollimation method, Moire fringe technique, parallel interferogram technique, circle raster method, laser interferance method and loop laser method etc.And for small angle measurement (α≤1 °, particularly ± 10～20arcmin in), main measuring method comprises laser small angle measurement instrument method, normalized optical angle gauge method, circle grating angle-measuring method, laser interferometry, photoelectric auto-collimator method.Though these methods can provide higher measuring accuracy, bigger based on measuring system structure more complicated, the volume of this design, installing space is limited, and major part can only be carried out the measurement of one dimension angle.Wanting to realize measurement for angle in 2 D, all is that two one dimension devices combine usually, and the result is that the volume of measuring system is huger, thereby has bigger limitation in industrial practical application, and particularly very difficult the combination with processing equipment is used for on-line measurement.Therefore, the two-dimensional narrow angle measuring method that seek that volume is little, measurement resolution is high and have certain measurement range is to adapt to the requirement of on-line measurement.
Summary of the invention
The objective of the invention is to propose a kind of high precision two-dimensional narrow angle measuring method, overcome the deficiency of existing narrow angle measuring method, system has characteristics such as volume is little, simple in structure, easy to adjust, stable height.
The objective of the invention is to be achieved through the following technical solutions: a kind of high precision two-dimensional narrow angle measuring method, this method adopts through collimated laser light light source 2, polarisation spectroscope 14, quarter wave plate 15, body surface or catoptron 1, first spectroscope 3, second spectroscope 4, the 3rd spectroscope 13, first critical angle prism 5, second critical angle prism 7, third critiical angle prism 10, the 4th critical angle prism 11 and first photodiode 6, second photodiode 8, the 3rd photodiode 9, the 4th photodiode 12; Wherein second spectroscope 4, first critical angle prism 5, first photodiode 6, second critical angle prism 7, second photodiode 8 constitute the one dimension measurement of angle on XY plane, the 3rd photodiode 9, third critiical angle prism 10, the 4th critical angle prism 11, the 4th photodiode 12, the 3rd spectroscope 13 constitute the one dimension measurement of angle on XZ plane, spectroscope 3 is divided into two-beam with the body surface reflected light, enter XY, XZ measurement of angle plane respectively, thereby realize Bidimensional small angle measuring device.Realize that angle measurement method is characterised in that, adopt the beam split light path, the light that has tested two dimension angular information that testee is reflected is divided into mutually orthogonal two-beam, enters XY, XZ one dimension measurement of angle plane respectively, and optical differences dynamic formula measuring method is adopted in the measurement of angle of every Shu Guang; When initial measurement, the angle measurement unit output signal is made as " zero ", in measuring process, the testee attitude changes, incident angle into the light that injects angle measurement system is changed, and this variable quantity is detected and converts to by angle measurement unit and the proportional electric signal of angle changing value; This electric signal again through being the signal analysis and processing and the display circuit of CPU (central processing unit) with the single-chip microcomputer, obtains because the two dimension angular variable quantity indicating value that object attitude or corner variation cause after amplifying.
The invention has the advantages that and only adopt a lighting source and beam split light path, the realization Bidimensional small angle is measured simultaneously, system accuracy height, resolving power and measurement range are adjustable, volume is little, simple in structure, resolving power can reach 0.05arcsec, measurement range is ± 600arcsec.
Description of drawings
Fig. 1 is for realizing the apparatus structure schematic perspective view of the inventive method.
Among the figure: 1 is testee surface or catoptron, and 2 are the collimation LASER Light Source, and 3,4,13 is spectroscope, and 5,7,10,11 is critical angle prism, and 6,8,9,12 is photodiode, and 14 is the polarisation spectroscope, and 15 is quarter wave plate.
Embodiment
Two-dimension optical non-contact type narrow angle measuring method, adopt optical differences dynamic formula angle measurement method, detect the corner variable quantity of testee, its process is: the optical alignment that semiconductor laser 2 sends is after behind the polarisation spectroscope 14, the S polarisation is reflected after become rotatory polarization behind the quarter wave plate 15, incide and be fixed on the testee surface or be fixed on its surperficial catoptron 1, the rotatory polarization that reflects from tested reflecting surface, by becoming the P polarisation behind the spectroscope 15, the light that behind spectroscope 3, is divided into two equal bundle mutually orthogonals of energy again, its polarization state remains unchanged, wherein a branch of light is divided into two-beam behind spectroscope 4, incide two respectively along in the prism 5 and 7 of right angle orientation arrangement, the emergent light light intensity is detected by photodiode 6 and 8 respectively, this part is installed in the XY face when design, and the corner that therefore can detect around Z-direction changes; Be divided into two-beam behind another Shu Guangjing spectroscope 13, incide two respectively along in the prism 10 and 11 of right angle orientation setting, the emergent light light intensity is detected by photodiode 9 and 12 respectively, and this part is installed in the XZ face when design, and the corner that therefore can detect around Y direction changes.When existing the angle of a two dimension to change, just can be measured simultaneously by tested level crossing like this.When initial measurement, can think that angle measurement unit two-way output signal is " zero "; When the object attitude changes in the measuring process, the dimensional orientation angle of object or reflecting surface changes, and promptly with respect to the incident light of angle measurement unit, its incident angle also produces corresponding variation to reflected light, this variable quantity is a times of reflecting surface angle variable quantity, and measured obtaining amplified.
Owing to adopt the variate method, when catoptrical angle has beat, the incident angle of the incident light of two internal reflection prisms increases or reduces Δ θ respectively, the reflectance varies amount also increases respectively or reduces, the light intensity of emergent light is detected and is converted into photocurrent by photodiode, the two-way photo-signal is through current-voltage conversion and addition, behind subtraction and the division arithmetic, obtain the angle variable quantity after the linearization process, under the operation program control of single-chip microcomputer, sample, filtering, after the analyzing and processing, angle variable quantity is shown, thereby obtains changing owing to the object attitude changes the two dimension angular that causes.
Claims (1)
1. high precision two-dimensional narrow angle measuring method, this method adopts through collimated laser light light source (2), polarisation spectroscope (14), quarter wave plate (15), body surface or catoptron (1), first spectroscope (3), second spectroscope (4), the 3rd spectroscope (13), first critical angle prism (5), second critical angle prism (7), third critiical angle prism (10), the 4th critical angle prism (11) and first photodiode (6), second photodiode (8), the 3rd photodiode (9), the 4th photodiode (12); Wherein second spectroscope (4), first critical angle prism (5), first photodiode (6), second critical angle prism (7), second photodiode (8) constitute the one dimension measurement of angle on XY plane, the 3rd photodiode (9), third critiical angle prism (10), the 4th critical angle prism (11), the 4th photodiode (12), the 3rd spectroscope (13) constitute the one dimension measurement of angle on XZ plane, spectroscope (3) is divided into two-beam with the body surface reflected light, enter XY, XZ measurement of angle plane respectively, thereby realize Bidimensional small angle measuring device; Realize that angle measurement method is characterised in that, adopt the beam split light path, the light that has tested two dimension angular information that testee is reflected is divided into mutually orthogonal two-beam, enters XY, XZ one dimension measurement of angle plane respectively, and optical differences dynamic formula measuring method is adopted in the measurement of angle of every Shu Guang; When initial measurement, the angle measurement unit output signal is made as " zero ", in measuring process, the testee attitude changes, incident angle into the light that injects angle measurement system is changed, and this variable quantity is detected and converts to by angle measurement unit and the proportional electric signal of angle changing value; This electric signal again through being the signal analysis and processing and the display circuit of CPU (central processing unit) with the single-chip microcomputer, obtains because the two dimension angular variable quantity indicating value that object attitude or corner variation cause after amplifying.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410094051 CN1257384C (en) | 2004-12-28 | 2004-12-28 | High precision two-dimensional narrow angle measuring method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410094051 CN1257384C (en) | 2004-12-28 | 2004-12-28 | High precision two-dimensional narrow angle measuring method |
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| Publication Number | Publication Date |
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| CN1632454A CN1632454A (en) | 2005-06-29 |
| CN1257384C true CN1257384C (en) | 2006-05-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200410094051 Expired - Fee Related CN1257384C (en) | 2004-12-28 | 2004-12-28 | High precision two-dimensional narrow angle measuring method |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100449359C (en) * | 2006-02-06 | 2009-01-07 | 友达光电股份有限公司 | Method and apparatus for measuring angle of metal wire of liquid crystal display panel |
| CN108731593B (en) * | 2018-05-31 | 2020-09-11 | 武汉环汉机电工程技术有限公司 | Front and back binocular position and attitude optical measurement structure and method |
| CN109556566B (en) * | 2018-12-06 | 2020-07-03 | 中国科学院长春光学精密机械与物理研究所 | System and method for measuring relative three-dimensional attitude angle between three bases |
| CN111765853B (en) * | 2020-07-29 | 2024-07-30 | 天津大学 | High-resolution one-dimensional angle measurement laser sensor |
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- 2004-12-28 CN CN 200410094051 patent/CN1257384C/en not_active Expired - Fee Related
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