CN102865835A - Vernier slit type photoelectric auto-collimator - Google Patents

Vernier slit type photoelectric auto-collimator Download PDF

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CN102865835A
CN102865835A CN2012103800048A CN201210380004A CN102865835A CN 102865835 A CN102865835 A CN 102865835A CN 2012103800048 A CN2012103800048 A CN 2012103800048A CN 201210380004 A CN201210380004 A CN 201210380004A CN 102865835 A CN102865835 A CN 102865835A
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vernier
slit
array ccd
collimator
line array
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CN102865835B (en
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刘爱敏
高立民
吴易明
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

The invention provides a vernier slit type photoelectric auto-collimator which is high in precision and good in reliability. The vernier slit type photoelectric auto-collimator comprises a monochromatic source (1), a multi-slit (2), a spectroscope (3), a collimator objective (4), a rotatable plane mirror (5) and a linear array CCD (charge coupled device) (6), wherein the monochromatic source (1), the multi-slit (2), the spectroscope (3), the collimator objective (4) and the rotatable plane mirror (5) are sequentially arranged on a main light path, the linear array CCD (6) is arranged on a spectroscopical light path of the spectroscope, and the multi-slit (2) and the linear array CCD (6) are conjugated. The multi-slit (2) consists of a plurality of parallel single slits, the widths as well as the intervals of the parallel single slits are equal, the linear array CCD serves as a main scale while an image of the multi-slit (2) serves as a vernier scale, and the vernier scale and the main scale satisfy the vernier sub-division principle. The vernier slit type photoelectric auto-collimator can be widely applied to high-precision small-angle precision testing, dynamic and static small-angle-error high-precision measurement of reflectors, angular calibration of angular displacement sensors, small-angle measurement of optically plane cold machining workpieces and the like.

Description

Vernier slit photoelectric auto-collimator
Technical field
The present invention relates to a kind of high precision angular displacement detecting device, be specifically related to a kind of vernier slit photoelectric auto-collimator.
Background technology
In the precision measurement field of measuring techniques, the fields of measurement such as the flatness that is widely used in small angle measurement, high precision Angle Calibration, guide rail of photoelectric auto-collimator, the flatness of precision surface plate, revolving table position uncertainty are the routine measurement instruments of department's indispensabilities such as machine-building, shipbuilding, Aero-Space, metrology and measurement, scientific research.Particularly aspect precision, ultraprecise location, irreplaceable effect is arranged more.It both can be used for separately engineering survey, also can be used as aiming and measurement component in the optical metrological instruments such as transit, angular instrument, optical comparator.
Because photoelectric auto-collimator essence is high-precision digital picture micrometric displacement detection system, changes slit type and become the key element that improves its precision.At present, used slit type mainly contains in the photoelectric auto-collimator: crosshair, circular hole, M shape/V-arrangement/N shape graduation, single slit, grating etc.Crosshair, circular hole etc. directly cooperate with planar array detector finishes two-dimensional measurement, is subject to the principle of work of face battle array device self, and its measuring speed and precision all can be restricted.The main combination with single linear CCD of M shape/V-arrangement/N shape graticule realized two-dimentional outer corner measurement, slit and line array CCD installation accuracy had relatively high expectations, and then affect measurement range and measuring accuracy.If adopt single slit, when then single slit was as image, image-element was only seamed wide, is unfavorable for improving precision.The appearance of optical grating photoelectric self-collimator is a kind of new exploration, and the type autocollimator obtains the angular displacement information of level crossing by the displacement of the Moire fringe of a pair of optical grating pair generation.Moire fringe displacement information not only with optical grating pair between the pitch difference of single grid line relevant, also with optical grating pair between angle relevant, cause such autocollimator higher to the installation of grating, the in addition complicacy of Moire fringe itself, to accurately locate it, higher to the later image processing requirements, Surveying Actual Precision and reliability also are restricted (if there is the error of explorer response or grating portrayal, impact will be even more serious).
Summary of the invention
The deficiency that exists for overcoming aforementioned background art, the present invention provide that a kind of precision is high, the vernier slit photoelectric auto-collimator of good reliability.
Technical solution of the present invention is:
Vernier slit photoelectric auto-collimator, the line array CCD (6) that is included in the monochromatic source (1) that sets gradually on the main optical path, many slits (2), spectroscope (3), collimator objective (4), rotating plane mirror (5) and arranges at the spectroscope light splitting optical path, many slits (2) and line array CCD (6) conjugation, the light that light source (1) sends images in line array CCD (6) and locates by many slits (2), is reflected back the spectroscope light splitting at plane mirror (5) after the spectroscope transmission; Its special character is:
Described many slits (2) are comprised of a plurality of parallel single slits, and parallel single slit seam is wide all equates with kerf spacing for each; As main scale, the picture of many slits (2) is as vernier scale with line array CCD, and vernier scale and main scale satisfy the vernier Principle of sub-division.
Like this, when plane mirror (5) rotates a low-angle, many slits (can be referred to as " vernier slit ") image has the certain displacement amount at line array CCD, obtain inferior pixel displacement information after the vernier segmentation by cursor principle, ccd output signal is through the A/D conversion, by the mathematics transformational relation positional information is converted to angular metric, thereby accurately angles of display changes.
Based on above-mentioned basic technical scheme, the present invention has also carried out following optimization and has limited and improve:
The width of above-mentioned single slit is more than or equal to 3 times line array CCD original image elemental size.
If each parallel single slit seam is wide and kerf spacing is d, the slit number is N, and line array CCD pixel dimension and pixel spacing are P d, the ccd signal of output has been carried out M times of hardware segmentation, then vernier scale and main scale satisfy following mathematical relation:
( 2 N - 1 ) × d = [ k × ( 2 N - 1 ) - 1 ] × P d M , Wherein, N=1,2,3, M=1,2,3, K=1,2,3 ...
The value of above-mentioned each parameter is preferably 2≤N≤50; 2≤k≤100; 1≤M≤20.
Above-mentioned light source specifically can adopt led light source, LASER Light Source etc.
Want to obtain higher measuring accuracy, the focal length of collimator objective (4) can be longer, and the pixel number of line array CCD can be less, adopts corresponding vernier narrow slit structure can obtain higher precision.
The present invention has the following advantages:
The ingenious vernier Principle of sub-division of having used of the present invention, this collimator can be realized high-acruracy survey in the situation that to debug requirement lower, reliability is high.The present invention can allow suitably to regulate the defocusing amount between line array CCD photosurface and the best image planes.
The present invention can be widely used in the high-precision small-angle accuracy test, the high-acruracy survey of the verticality/flatness of small angle measurement, high precision table top or the workpiece of catoptron sound attitude small angle error high-acruracy survey, angular displacement sensor Angle Calibration, optical flat cold working part etc.
Description of drawings
Fig. 1 is principle schematic of the present invention.
Fig. 2 is the mathematical relation schematic diagram between line array CCD of the present invention and the vernier slit.
Embodiment
As shown in Figure 1, include led light source assembly (1), vernier slit (2), spectroscope (3), collimator objective (4), plane mirror (5), line array CCD (6).Vernier slit (2) and line array CCD (6) are positioned on the focal plane of collimator objective (4) or near it.The bright vernier slit of the illumination that led light source assembly (1) sends (2), light collimate and image in line array CCD (6) after level crossing (5) reflections through collimator objective (4) and locate.When control plane catoptron (5) rotates a low-angle, the vernier slit image has the certain displacement amount at line array CCD, obtain inferior pixel displacement information after the vernier segmentation by cursor principle, by the mathematics transformational relation positional information is converted to angular metric, and angles of display changes in real time.
Among Fig. 1, the led light source assembly adopts the red-light LED light source.Line array CCD adopts single linear CCD, and single pixel dimension and pixel spacing are 7 μ m, and single pixel dimension and pixel spacing also can be less; Equate to be all d with kerf spacing when the seam of vernier slit (2) is wide, when vernier slit number is N, and single linear CCD pixel dimension and pixel spacing are P d, as main scale, the picture of vernier slit (2) is as vernier scale with line array CCD, when satisfying the vernier Principle of sub-division between the picture of vernier slit (2) and the line array CCD (6), and when namely satisfying following mathematical relation,
(2N-1) * d=[k * (2N-1)-1] * P d, N=1 wherein, 2,3, K=1,2,3 ... (A)
The picture of vernier slit (2) is to line array CCD (6) the pixel P of unit dRealized satisfying the error free segmentation of cursor principle, the segmentation multiple is:
f = 1 2 N - 1 - - - ( B )
Namely working as the vernier slit moves
Figure BDA00002220276200042
The time, the justified margin of the slit edge of correspondence position and line array CCD pixel has been realized sub-pixel subdivision on the vernier slit, the whole pixel of the CCD that the edge of first slit is corresponding on the vernier scale, the error free inferior pixel displacement of both sum reaction vernier slit chis.
Ccd output signal is digital signal through A/D conversion by analog-signal transitions, when the A/D change over clock signal that adopts be CCD integral time M doubly, namely M times of hardware segmentation carried out in the ccd signal of output; Suppose that the original pixel number of CCD is N c, the pixel number of output then becomes MN c, when adopting this divided method, the width of single slit is more preferably greater than 3 times of original Pixel sizes.In this case, when satisfying the vernier Principle of sub-division between the picture of vernier slit (2) and the line array CCD (6), when namely satisfying following mathematical relation,
Figure BDA00002220276200051
Wherein, N=1,2,3, M=1,2,3, K=1,2,3 ... (C)
Unit pixel after the picture of vernier slit (2) segments line array CCD (6)
Figure BDA00002220276200052
Realized satisfying the error free segmentation of cursor principle, the segmentation multiple is:
f = 1 2 N - 1 - - - ( D )
Namely working as the vernier slit moves
Figure BDA00002220276200054
The time, the justified margin of the line array CCD pixel on the vernier slit after the slit edge of correspondence position and the segmentation, realized sub-pixel subdivision, the whole pixel of the CCD after the segmentation that the edge of first slit is corresponding on the vernier scale, the error free inferior pixel displacement of both sum reaction vernier slit chis.
If the focal length of collimator objective (4) is f, the distance that moves when many slit images is S, when tested level crossing (5) rotates θ, according to the autocollimation principle, has: S=ftan2 θ.If select the focal distance f=300mm of collimator objective (4), the single pixel dimension of line array CCD is 7 μ m, and the effective resolution of single pixel is: θ = 1 2 arctan ( S f ) = 1 2 arctan ( 7 300 × 1000 ) ≈ 2.4 ′ ′ . Actual measuring accuracy often is lower than 2.4 ", satisfy four narrow slit structures (getting N=4) of above-mentioned condition (A) by employing, when getting k=5, namely single slit of vernier slit and kerf spacing are
Figure BDA00002220276200056
Can realize line array CCD Individual Image segmentation precision, the subdivision accuracy that can reach this moment is:
Figure BDA00002220276200058
Doubly segment if Output Signal of Linear CCD's is carried out M=4, the effective resolution of the single pixel after the segmentation is:
θ = 1 2 arctan ( S f ) = 1 2 arctan ( 7 300 × 1000 × 4 ) ≈ 0.6 ′ ′ , Four narrow slit structures (getting N=4) are when getting k=20, and namely single slit of vernier slit and kerf spacing are
Figure BDA00002220276200061
Can realize the line array CCD after the segmentation
Figure BDA00002220276200062
Individual Image segmentation precision, the subdivision accuracy that can reach this moment is:
Figure BDA00002220276200063
Mathematical relation schematic diagram between line array CCD and the vernier slit as shown in Figure 2.
Want to obtain higher measuring accuracy, the focal length of collimator objective (4) can be longer, and the pixel number of line array CCD can be less, adopts corresponding vernier narrow slit structure can obtain higher precision.
The present invention can be widely used in the high-precision small-angle accuracy test, the high-acruracy survey of the verticality/flatness of small angle measurement, high precision table top or the workpiece of catoptron sound attitude small angle error high-acruracy survey, angular displacement sensor Angle Calibration, optical flat cold working part etc.

Claims (5)

1. vernier slit photoelectric auto-collimator, the line array CCD (6) that is included in the monochromatic source (1) that sets gradually on the main optical path, many slits (2), spectroscope (3), collimator objective (4), rotating plane mirror (5) and arranges at the spectroscope light splitting optical path, many slits (2) and line array CCD (6) conjugation, the light that light source (1) sends images in line array CCD (6) and locates by many slits (2), is reflected back the spectroscope light splitting at plane mirror (5) after the spectroscope transmission; It is characterized in that:
Described many slits (2) are comprised of a plurality of parallel single slits, and parallel single slit seam is wide all equates with kerf spacing for each; As main scale, the picture of many slits (2) is as vernier scale with line array CCD, and vernier scale and main scale satisfy the vernier Principle of sub-division.
2. vernier slit photoelectric auto-collimator according to claim 1 is characterized in that: the width of described single slit is more than or equal to 3 times line array CCD original image elemental size.
3. vernier slit photoelectric auto-collimator according to claim 1 is characterized in that: establish each parallel single slit seam is wide and be d with kerf spacing, the slit number is N, and line array CCD pixel dimension and pixel spacing are P d, the ccd signal of output has been carried out M times of hardware segmentation, then vernier scale and main scale satisfy following mathematical relation:
Figure FDA00002220276100011
Wherein, N=1,2,3, M=1,2,3, K=1,2,3 ...
4. vernier slit photoelectric auto-collimator according to claim 3, it is characterized in that: the value of each parameter is 2≤N≤50; 2≤k≤100; 1≤M≤20.
5. vernier slit photoelectric auto-collimator according to claim 4, it is characterized in that: described light source is led light source or LASER Light Source.
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103949775A (en) * 2014-04-22 2014-07-30 中国科学院上海光学精密机械研究所 Fast collimation method for light path of stereoscopic space laser
CN106767545A (en) * 2017-01-19 2017-05-31 中国科学院高能物理研究所 A kind of high accuracy high-space resolution angel measuring instrument and angle measurement method
CN111121618A (en) * 2018-10-31 2020-05-08 中国科学院长春光学精密机械与物理研究所 Zero position detection system of rotary motion turntable
CN114111570A (en) * 2021-11-01 2022-03-01 广东亚微伽科技有限公司 Two-dimensional autocollimator and image positioning calculation method and device based on same

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103949775A (en) * 2014-04-22 2014-07-30 中国科学院上海光学精密机械研究所 Fast collimation method for light path of stereoscopic space laser
CN106767545A (en) * 2017-01-19 2017-05-31 中国科学院高能物理研究所 A kind of high accuracy high-space resolution angel measuring instrument and angle measurement method
CN111121618A (en) * 2018-10-31 2020-05-08 中国科学院长春光学精密机械与物理研究所 Zero position detection system of rotary motion turntable
CN114111570A (en) * 2021-11-01 2022-03-01 广东亚微伽科技有限公司 Two-dimensional autocollimator and image positioning calculation method and device based on same
CN114111570B (en) * 2021-11-01 2024-05-10 广东亚微伽科技有限公司 Image positioning calculation method and device based on two-dimensional autocollimator

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