CN104613865A - Grating interferometer with high subdivision and high density - Google Patents

Grating interferometer with high subdivision and high density Download PDF

Info

Publication number
CN104613865A
CN104613865A CN201510080676.0A CN201510080676A CN104613865A CN 104613865 A CN104613865 A CN 104613865A CN 201510080676 A CN201510080676 A CN 201510080676A CN 104613865 A CN104613865 A CN 104613865A
Authority
CN
China
Prior art keywords
segmentation
prism
light
grating
polarization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510080676.0A
Other languages
Chinese (zh)
Other versions
CN104613865B (en
Inventor
韦春龙
卢炎聪
周常河
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Institute of Optics and Fine Mechanics of CAS
Original Assignee
Shanghai Institute of Optics and Fine Mechanics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Institute of Optics and Fine Mechanics of CAS filed Critical Shanghai Institute of Optics and Fine Mechanics of CAS
Priority to CN201510080676.0A priority Critical patent/CN104613865B/en
Publication of CN104613865A publication Critical patent/CN104613865A/en
Application granted granted Critical
Publication of CN104613865B publication Critical patent/CN104613865B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Optical Transform (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a grating interferometer with high subdivision and high density. The grating interferometer comprises a diffraction grating with high density which does a relative movement, a linear polarization light source, a polarization beam splitter, a first high fineness prism, a second high fineness prism, a first reflector, a second reflector, a first quarter-wave plate, a second quarter-wave plate, a polarization phase-shifting interference photoelectric detection unit or a double frequency heterodyne interference photoelectric detection unit, a data acquisition and processing unit and a control unit. According to the grating interferometer provided by the invention, the grating interferometer with high density can be designed to be negative primary high diffraction optical efficiency; furthermore, the multiple repeated diffraction between a reflecting surface of the prism and a raster compartment with high density can be realized by adopting the high fineness prisms, and finally the auto-collimation retroreflection of collimation planes of the prisms can be realized and then the repeated diffraction on the raster compartment can be realized, so as to enable the grating interferometer to obtain the high subdivision effect, and improve the optical resolution of the grating interferometer effectively.

Description

High segmentation high dencity grating interferometer
Technical field
The present invention relates to optical gauge, particularly a kind of high segmentation high dencity grating interferometer.
Background technology
Grating interferometer is the nucleus module of high precision optical grating ruler measurement system (pitch is generally less than 10 microns), determines its precision and resolution.High precision optical grating ruler measurement system is by grating scale body, sectional fixture, form based on the read head of grating interferometer and signal controller and display, and its function carries out the measurement of high precision displacement amount.Be widely used in the fields such as machine tooling control, processing of wafers and cutting, integrated circuit (IC) etching equipment, semiconductor detection, robot system, Aero-Space, scientific research, military affairs.
High precision optical grating ruler measurement system is not only one of modern most basic robotization amount instrument, and is modern processing and produces and one of the important guarantee means of high precision, high-quality in scientific research.Especially the field such as 20nm/14nm integrated circuit (IC) etching equipment, nanometer/sub-nano science research, Aero-Space, scientific research, military affairs, proposes the demand of more high precision and resolution to high precision optical grating ruler measurement system.
For high-precision laser interferometer, the optical grating ruler measurement system based on grating interferometer has the insensitive advantage of environment.Its electronic fine-grained resolution has reached micromicron magnitude.But in practical application, the synthetic resolution of optical grating ruler measurement system is determined jointly by grating interferometer optical resolution and electronic fine-grained resolution; Grating interferometer optical resolution determines the validity of electronic fine-grained resolution.Therefore, improving grating interferometer optical resolution is the basic place of improving optical grating ruler measurement systemic resolution further.
Canon proposes patent, the American I BM such as US5038032, US5146085, US4912320 and proposes patent US5442172, U.S. ZYGO has also applied for the grating interferometer patent of many novelties, as US8300233B2, US0194824A1, US0114061A1, to obtain more high precision and resolution.Germany's Heidenhain, Sony are also proposed high-resolution optical grating ruler measurement system.But with above-mentioned be the technical scheme of representative, grating interferometer optical fine number is generally 2 or 4.Many employings are high electronic fine-grained, as 12bit, 14bit; Further high bit is electronic fine-grained to be easy to realize, but is limited to grating interferometer optics 4 and segments resolution, meaningless.Therefore, improve grating interferometer optical fine number further and grating interferometer optical resolution and even optical grating ruler measurement overall system resolution are improved for reality, there is important value.
Summary of the invention
The object of the invention is to overcome above-mentioned prior art not enough, propose a kind of high segmentation high dencity grating interferometer: first high dencity grating is designed to negative one-level height diffraction light efficiency; And then the repeatedly diffraction repeatedly adopting high segmentation prism to realize between prismatic reflection face and high dencity grating, and finally in the retroeflection of prism collimation plane autocollimation and again diffraction repeatedly between high dencity grating, thus make grating interferometer obtain high segmentation effect, effectively improve grating interferometer optical resolution.
Technical solution of the present invention is as follows:
A kind of high segmentation high dencity grating interferometer, comprise: the high density diffraction grating of relative motion, linear polarization light source, polarization beam apparatus, first high segmentation prism, second high segmentation prism, first catoptron, second catoptron, first quarter-wave plate, second quarter-wave plate, data acquisition and processing (DAP) and control module and interference photoelectric detection unit, its feature is, described linear polarization light source sends light beam and is divided into the P light of transmission and the S light of reflection through polarization beam apparatus, described P light is successively through the first described quarter-wave plate, first catoptron incides described relative motion diffraction grating, described S light is successively through the second described quarter-wave plate, second catoptron incides described relative motion diffraction grating, by the first high segmentation prism, the second high segmentation prism, incident beam is 2N time-1 order diffraction (N is the unidirectional number of times of diffraction repeatedly on diffraction grating) on the diffraction grating, produce positive and negative 2N times of doppler optical frequency displacement respectively, and then realize 4N times of optical fine.Two bundle-1 order diffraction light after this relative motion diffraction grating 2N diffraction are after the described first high segmentation prism and the second high segmentation prism transmission and reflection, the former road of autocollimation returns again, the linearly polarized light orthogonal with former polarization state is converted to respectively through the first described quarter-wave plate and the second quarter-wave plate, again incide described interference photoelectric detection unit through polarization beam apparatus, the output terminal of this interference photoelectric detection unit is connected with the input end of described data acquisition and processing (DAP) and control module.
Described first high segmentation prism and the second high segmentation prism include at least one reflecting surface, transmission plane that an adjacent collimation plane is relative with one; Described height segmentation prismatic reflection face and collimation plane angle α, height segment prismatic reflection face and transmission plane included angle, the high angle α segmenting prism transmission face and high density diffraction grating plane 3meet following relation:
α = π - arcsin ( n 0 / n 1 · sin ( β - α 3 ) ) - arcsin ( n 0 / n 1 · sin ( arcsin ( λ / d - sin ( β ) ) - α 3 ) ) 2 - - - ( 1 )
φ = arcsin ( n 0 / n 1 · sin ( arcsin ( λ / d - sin ( β ) ) - α 3 ) ) + arcsin ( n 0 / n 1 · sin ( β - α 3 ) ) 2 - - - ( 2 )
Wherein, n 0for air refraction, n 1high segmentation Refractive Index of Glass Prism, λ is optical source wavelength, and β is incident beam and high density diffraction grating normal angle, and d is the pitch of high density diffraction grating, α 3>=0.
Described first high segmentation prism and the second high segmentation prism include at least one reflecting surface collimation plane adjacent with; Described height segmentation prismatic reflection face and collimation plane angle α meet following relation:
α = π - β - arcsin ( λ / d - sin ( β ) ) 2
Wherein, n 0for air refraction, n 1high segmentation Refractive Index of Glass Prism, λ is optical source wavelength, and β is incident beam and high density diffraction grating normal angle, and d is the pitch of high density diffraction grating.
Described linear polarization light source is light emitting diode, laser diode, the light source of solid or gas lamp; The laser instrument of single-frequency or the laser instrument of double frequency cross polarization.
Described interference photoelectric detection unit is that polarization phase-shifting interferes photoelectric detection unit or double frequency difference interference photoelectric detection unit.
Described polarization phase-shifting interferes photoelectric detection unit to comprise the 3rd quarter-wave plate, non-polarizing beamsplitter, the first polarization beam apparatus, the second polarization beam apparatus locating cross polarization 45 degree placement, the first detector, the second detector, the 3rd detector and the 4th detector.
Described double frequency difference interference photoelectric detection unit comprises non-polarizing beamsplitter, is in the first detector of the first analyzer of orthogonal double frequency linearly polarized light 45 degree placement and correspondence, is in the second analyzer of orthogonal double frequency linearly polarized light 45 degree placement and the second detector of correspondence, described linear polarization light source sends light beam and is divided into two bundles through described non-polarizing beamsplitter, polarization beam apparatus described in a branch of warp is divided into the P light of transmission and the S light of reflection, and another beam enters the first described analyzer.
Described data acquisition and processing (DAP) and control module are by data collecting card and motion control card and industrial computer forms or be made up of the circuit board at least with collection and computing function.
In such scheme, diffraction grating can also be transmission-type; When transmission-type uses, place completely reflecting mirror diffraction light one side, and by-1 order diffraction light oppositely with former incident angle of light incident transmission type diffraction grating, the first and second high segmentation prism parameters are constant.
Compared with prior art, technique effect of the present invention:
Adopt and high dencity grating is designed to negative one-level height diffraction light efficiency; And then the repeatedly diffraction repeatedly adopting high segmentation prism to realize between prismatic reflection face and high dencity grating, and final in the retroeflection of prism collimation plane autocollimation and again diffraction repeatedly between high dencity grating.Incident beam is 2N time-1 order diffraction (N is the unidirectional number of times of diffraction repeatedly on diffraction grating) on the diffraction grating, produces positive and negative 2N times of doppler optical frequency displacement respectively, and then realize 4N times of optical fine.If N=10, then can realize the optical fine of 40 times.Thus make grating interferometer obtain high segmentation effect, greatly effectively improve grating interferometer optical resolution.
Accompanying drawing explanation
Fig. 1 is the enforcement illustration of the height segmentation high dencity grating interferometer adopting double frequency difference interference photoelectric detection unit.
Fig. 2 is the enforcement illustration adopting polarization phase-shifting to interfere the height segmentation high dencity grating interferometer of photoelectric detection unit.
Fig. 3 is the fundamental diagram of high segmentation prism.
Fig. 4 is the another kind of fundamental diagram of high segmentation prism.
Fig. 5 is the fundamental diagram of integral type height segmentation prism.
Fig. 6 is the fundamental diagram of the height segmentation prism simplified.
Embodiment
Below in conjunction with embodiment and accompanying drawing, the invention will be further described, but should not limit the scope of the invention with this.
1, embodiment 1.As Fig. 1.
Laser instrument 8 sends orthogonal double frequency linearly polarized light, two-beam is divided equally into through non-polarizing beamsplitter 10, a branch of double frequency difference interference photoelectric detection unit entered in empty frame, interference signal is formed by after the first analyzer 11 of placing with orthogonal double frequency linearly polarized light 45 degree, and received, as the reference signal of double frequency difference interference art by the first detector 12; Another bundle is divided into the P light of transmission and the S light of reflection by polarization beam apparatus 9, is transformed to circularly polarized light respectively by the first quarter-wave plate 6 and the second quarter-wave plate 7, then by the first catoptron 2 and the incident diffraction grating 1 of the second catoptron 3.First high segmentation prism 4 and the second high segmentation prism 5 on one side is separately entered respectively by two bundle-1 grade after diffraction grating 1 diffraction, the former road of autocollimation returns again, the linearly polarized light orthogonal with former polarization state is transformed to through the first quarter-wave plate 6 and the second quarter-wave plate 7, the double frequency difference interference photoelectric detection unit in empty frame is again jointly entered through polarization beam apparatus 9, interference signal is formed by after the second analyzer 14 of placing with orthogonal double frequency linearly polarized light 45 degree, and received, as the measuring-signal of double frequency difference interference art by the second detector 13; Above-mentioned reference signal and measuring-signal can obtain the transversal displacement amount of diffraction grating 1 via data acquisition and processing (DAP) and control module 15 process.
First high segmentation prism 4 and the second height segment the principle of work of prism 5 as Fig. 3, below only for the first high segmentation prism 4.
Incident beam 30 after grating 1 diffraction ,-1 order diffraction light beam by the first high segmentation prism 4 transmission plane 33 through, then reflected transmission plane 33 by the reflecting surface 32 of the first high segmentation prism 4, and parallel with incident beam 30.So repeatedly repeatedly, until finally a branch of-1 order diffraction light beam be overlap with incident beam 30 but the contrary light beam 31 in direction in the collimation plane 34 autocollimation retroeflection of the first high segmentation prism 4.Correlation parameter is as follows:
α = π - arcsin ( n 0 / n 1 · sin ( β - α 3 ) ) - arcsin ( n 0 / n 1 · sin ( arcsin ( λ / d - sin ( β ) ) - α 3 ) ) 2 - - - ( 1 )
φ = arcsin ( n 0 / n 1 · sin ( arcsin ( λ / d - sin ( β ) ) - α 3 ) ) + arcsin ( n 0 / n 1 · sin ( β - α 3 ) ) 2 - - - ( 2 )
Wherein, n 0for air refraction, n1 are Refractive Index of Glass Prism, θ is angle of diffraction, and λ is wavelength, α 3for prism transmission face 33 and the angle of diffraction grating 1 plane.
Incident beam 30 and diffraction grating 1 incident angle are β, and diffraction grating 1 pitch is d, and the reflecting surface 32 of the first high segmentation prism 4 meets (1) formula with collimation plane 34 angle α.The reflecting surface 32 of the first high segmentation prism 4 meets (2) formula with transmission plane 33 included angle.
After adopting the first high segmentation prism 4 and the second high segmentation prism 5, incident beam is 2N time-1 order diffraction (N is the unidirectional number of times of diffraction repeatedly on diffraction grating 1) on diffraction grating 1, produce positive and negative 2N times of doppler optical frequency displacement respectively, and then realize 4N times of optical fine.If N=10, then can realize the optical fine of 40 times.Be 2000 lines per millimeter gratings for pitch, be designed to negative one-level height diffraction light efficiency, as being greater than 90%, if N=10, so still can effectively detect its interference signal, then can obtain the optical cycle signal of 12.5nm.Be aided with 1024 grades electronic fine-grained, then can realize the high resolving power of about 12.2pm.
Fig. 4 is the another kind of working method schematic diagram of the first high segmentation prism 4 or the second high segmentation prism 5.Incident ray comparatively Fig. 3, away from diffraction grating 1, segments the incident diffraction grating 1 in top of prism 5 from the first high segmentation prism 4 or the second height.
High segmentation prism 4 and 5 can be designed to integral type height segmentation prism further, as shown in Figure 5.Fig. 5 is that Fig. 3 and Fig. 4 works as α 3special case when=0 °.
α = π - arcsin ( n 0 / n 1 · sin ( β ) ) - arcsin ( n 0 / n 1 · sin ( arcsin ( λ / d - sin ( β ) ) ) ) 2
φ = arcsin ( n 0 / n 1 · sin ( arcsin ( λ / d - sin ( β ) ) ) ) + arcsin ( n 0 / n 1 · sin ( β ) ) 2
Parameter is consistent with above-mentioned.
In Fig. 5, the sequence number of the right band single quotation marks is the symmetric body of left side sequence number.
First high segmentation prism 4 and the second high segmentation prism 5 can be reduced to the reflecting surface collimation plane adjacent with, are directly processed into or bond to form, as Fig. 5.By that analogy, the first high segmentation prism 4 and the second high segmentation prism 5 can be designed to the same symmetrical structure of integral type further.Two faces meet following relation:
α = π - β - arcsin ( λ / d - sin ( β ) ) 2
Parameter is consistent with above-mentioned.
2, embodiment 2.As Fig. 2.
Laser instrument 8 sends linearly polarized light, is divided into the P light of transmission and the S light of reflection, is transformed to circularly polarized light respectively by quarter-wave plate 6 and 7 through polarization beam apparatus 9, then by the first catoptron 2 and the incident diffraction grating 1 of the second catoptron 3.First high segmentation prism 4 and the second high segmentation prism 5 on one side is separately entered respectively by two bundle-1 grade after diffraction grating 1 diffraction, the former road of autocollimation returns again, the linearly polarized light orthogonal with former polarization state is transformed to through the first quarter-wave plate 6 and the second quarter-wave plate 7, again through polarization beam apparatus 9 enter in dotted line frame by the 3rd quarter-wave plate 16, non-polarizing beamsplitter 17, first polarization beam apparatus 18, second polarization beam apparatus 22 (45 degree rotate placement) and the first detector 19, second detector 20, 3rd detector 21, the polarization phase-shifting that 4th detector 23 forms interferes photoelectric detection unit, form the detectable signal of four tunnel phase shift 90 °.And then the transversal displacement amount that can obtain diffraction grating 1 is processed by data acquisition and processing (DAP) and control module 15.
In described scheme, data acquisition and processing (DAP) and control module 15 are by data collecting card and motion control card and industrial computer forms or be made up of the circuit board at least with collection and computing function.
In described scheme, diffraction grating 1 can also be transmission-type; When transmission-type uses, place completely reflecting mirror-1 order diffraction light one side, and by-1 order diffraction light oppositely with former incident angle of light incident transmission type diffraction grating, the first segmentation prism 4 and the second high segmentation prism 5 parameter constant.

Claims (9)

1. one kind high segmentation high dencity grating interferometer, comprise: the high density diffraction grating (1) of relative motion, linear polarization light source (8), polarization beam apparatus (9), first high segmentation prism (4), second high segmentation prism (5), first catoptron (2), second catoptron (3), first quarter-wave plate (6), second quarter-wave plate (7), data acquisition and processing (DAP) and control module (15) and interfere photoelectric detection unit, it is characterized in that, described linear polarization light source (8) sends light beam and is divided into the P light of transmission and the S light of reflection through polarization beam apparatus (9), described P light is successively through described the first quarter-wave plate (6), first catoptron (2) incides described relative motion diffraction grating (1), described S light is successively through described the second quarter-wave plate (7), second catoptron (3) incides described relative motion diffraction grating (1), respectively via after the first high segmentation prism (4) and the second high segmentation prism (5) transmittance and reflectance, upper unidirectional N the diffraction of two bundle-1 each comfortable diffraction grating of order diffraction light beams (1), unidirectional N the diffraction in the former road of autocollimation returns again, the linearly polarized light orthogonal with former polarization state is converted to respectively through described the first quarter-wave plate (6) and the second quarter-wave plate (7), again incide described interference photoelectric detection unit through polarization beam apparatus (9), the output terminal of this interference photoelectric detection unit is connected with the input end of described data acquisition and processing (DAP) and control module (15).
2. height segmentation high dencity grating interferometer according to claim 1, it is characterized in that, the described first high segmentation prism (4) and the second high prism (5) that segments include at least one reflecting surface, transmission plane that an adjacent collimation plane is relative with one; Described height segmentation prismatic reflection face and collimation plane angle α, height segment prismatic reflection face and transmission plane included angle, the high angle α segmenting prism transmission face and high density diffraction grating plane 3meet following relation:
α = π - arcsin ( n 0 / n 1 · sin ( β - α 3 ) ) - arcsin ( n 0 / n 1 · sin ( arcsin ( λ / d - sin ( β ) ) - α 3 ) ) 2 - - - ( 1 )
φ = arcsin ( n 0 / n 1 · sin ( arcsin ( λ / d - sin ( β ) ) - α 3 ) ) + arcsin ( n 0 / n 1 · sin ( β - α 3 ) ) 2 - - - ( 2 )
Wherein, n 0for air refraction, n 1for height segmentation Refractive Index of Glass Prism, λ is optical source wavelength, and β is incident beam and high density diffraction grating normal angle, and d is the pitch of high density diffraction grating, α 3>=0.
3. height segmentation high dencity grating interferometer according to claim 1, is characterized in that, the described first high segmentation prism (4) and the second high segmentation prism (5) include at least one reflecting surface collimation plane adjacent with; Described height segmentation prismatic reflection face and collimation plane angle α meet following relation:
α = π - β - arcsin ( λ / d - sin ( β ) ) 2
Wherein, n 0for air refraction, n1 are high segmentation Refractive Index of Glass Prism, λ is optical source wavelength, and β is incident beam and high density diffraction grating normal angle, and d is the pitch of high density diffraction grating (1).
4. height segmentation high dencity grating interferometer according to claim 1, is characterized in that described linear polarization light source is light emitting diode, laser diode, the light source of solid or gas lamp; The laser instrument of single-frequency or the laser instrument of double frequency cross polarization.
5. the height segmentation high dencity grating interferometer according to any one of claim 1-4, is characterized in that described interference photoelectric detection unit is that polarization phase-shifting interferes photoelectric detection unit or double frequency difference interference photoelectric detection unit.
6. height segmentation high dencity grating interferometer according to claim 5, it is characterized in that, described polarization phase-shifting interferes photoelectric detection unit to comprise the 3rd quarter-wave plate (16), non-polarizing beamsplitter (17), the first polarization beam apparatus (18), the second polarization beam apparatus (22) locating cross polarization 45 degree placement, the first detector (19), the second detector (20), the 3rd detector (21) and the 4th detector (23).
7. height segmentation high dencity grating interferometer according to claim 5, it is characterized in that, described double frequency difference interference photoelectric detection unit comprises non-polarizing beamsplitter (10), be in first analyzer (11) of orthogonal double frequency linearly polarized light 45 degree placement and first detector (12) of correspondence, be in second analyzer (14) of orthogonal double frequency linearly polarized light 45 degree placement and second detector (13) of correspondence, described linear polarization light source (8) sends light beam and is divided into two bundles through described non-polarizing beamsplitter (10), polarization beam apparatus (9) described in a branch of warp is divided into the P light of transmission and the S light of reflection, another beam enters described the first analyzer (11).
8. the height segmentation high dencity grating interferometer according to any one of claim 1-4, it is characterized in that, described data acquisition and processing (DAP) and control module are by data collecting card and motion control card and industrial computer forms or be made up of the circuit board at least with collection and computing function.
9. the height segmentation high dencity grating interferometer according to any one of claim 1-4, it is characterized in that, described high density diffraction grating (1) is reflection-type or transmission-type.
CN201510080676.0A 2015-02-15 2015-02-15 High subdivision high dencity grating interferometer Active CN104613865B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510080676.0A CN104613865B (en) 2015-02-15 2015-02-15 High subdivision high dencity grating interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510080676.0A CN104613865B (en) 2015-02-15 2015-02-15 High subdivision high dencity grating interferometer

Publications (2)

Publication Number Publication Date
CN104613865A true CN104613865A (en) 2015-05-13
CN104613865B CN104613865B (en) 2017-03-15

Family

ID=53148427

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510080676.0A Active CN104613865B (en) 2015-02-15 2015-02-15 High subdivision high dencity grating interferometer

Country Status (1)

Country Link
CN (1) CN104613865B (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110849593A (en) * 2019-11-22 2020-02-28 中国科学院长春光学精密机械与物理研究所 Measuring equipment for measuring wave aberration of optical system based on heterodyne interference of acousto-optic modulator
CN110966939A (en) * 2018-09-28 2020-04-07 上海微电子装备（集团）股份有限公司 Interferometric measuring device, measuring method and photoetching equipment
CN111207674A (en) * 2020-01-17 2020-05-29 中北大学 Displacement sensor based on multiple diffraction of single-layer grating
CN112484646A (en) * 2020-11-17 2021-03-12 中国科学院长春光学精密机械与物理研究所 Homodyne one-dimensional grating displacement measuring device
CN113865480A (en) * 2021-09-18 2021-12-31 桂林电子科技大学 Heterodyne grating interferometer reading head system signal analysis method based on ZEMAX simulation
CN114111587A (en) * 2021-11-01 2022-03-01 中国科学院上海光学精密机械研究所 Three-axis high-optical subdivision grating ruler
CN117146870A (en) * 2023-11-01 2023-12-01 中国科学院长春光学精密机械与物理研究所 Two-dimensional grating interferometry device and measurement method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5038032A (en) * 1989-03-03 1991-08-06 Canon Kabushiki Kaisha Encoder incorporating a displaceable diffraction grating
CN1793778A (en) * 2004-12-24 2006-06-28 三丰株式会社 Displacement detector
CN201653358U (en) * 2009-12-31 2010-11-24 范光照 Novel linear diffraction grating interferometer structure
CN103673892A (en) * 2013-11-21 2014-03-26 清华大学 Symmetric-type grating heterodyne interference secondary diffraction measuring device
CN104048597A (en) * 2014-06-13 2014-09-17 中国科学院上海光学精密机械研究所 Self-adaptive common-light-path grating interferometer and realizing method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5038032A (en) * 1989-03-03 1991-08-06 Canon Kabushiki Kaisha Encoder incorporating a displaceable diffraction grating
CN1793778A (en) * 2004-12-24 2006-06-28 三丰株式会社 Displacement detector
CN201653358U (en) * 2009-12-31 2010-11-24 范光照 Novel linear diffraction grating interferometer structure
CN103673892A (en) * 2013-11-21 2014-03-26 清华大学 Symmetric-type grating heterodyne interference secondary diffraction measuring device
CN104048597A (en) * 2014-06-13 2014-09-17 中国科学院上海光学精密机械研究所 Self-adaptive common-light-path grating interferometer and realizing method thereof

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
刘玉圣等: "高精度衍射光栅干涉仪的研制", 《计量测试与检定》 *

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110966939A (en) * 2018-09-28 2020-04-07 上海微电子装备（集团）股份有限公司 Interferometric measuring device, measuring method and photoetching equipment
CN110849593A (en) * 2019-11-22 2020-02-28 中国科学院长春光学精密机械与物理研究所 Measuring equipment for measuring wave aberration of optical system based on heterodyne interference of acousto-optic modulator
CN110849593B (en) * 2019-11-22 2021-06-01 中国科学院长春光学精密机械与物理研究所 Measuring equipment for measuring wave aberration of optical system based on heterodyne interference of acousto-optic modulator
CN111207674A (en) * 2020-01-17 2020-05-29 中北大学 Displacement sensor based on multiple diffraction of single-layer grating
CN111207674B (en) * 2020-01-17 2021-08-24 中北大学 Displacement sensor based on multiple diffraction of single-layer grating
CN112484646A (en) * 2020-11-17 2021-03-12 中国科学院长春光学精密机械与物理研究所 Homodyne one-dimensional grating displacement measuring device
CN112484646B (en) * 2020-11-17 2021-12-17 中国科学院长春光学精密机械与物理研究所 Homodyne one-dimensional grating displacement measuring device
CN113865480A (en) * 2021-09-18 2021-12-31 桂林电子科技大学 Heterodyne grating interferometer reading head system signal analysis method based on ZEMAX simulation
CN114111587A (en) * 2021-11-01 2022-03-01 中国科学院上海光学精密机械研究所 Three-axis high-optical subdivision grating ruler
WO2023070757A1 (en) * 2021-11-01 2023-05-04 中国科学院上海光学精密机械研究所 Three-axis high-optical subdivision grating ruler
CN114111587B (en) * 2021-11-01 2024-03-01 中国科学院上海光学精密机械研究所 Triaxial high-optical subdivision grating ruler
CN117146870A (en) * 2023-11-01 2023-12-01 中国科学院长春光学精密机械与物理研究所 Two-dimensional grating interferometry device and measurement method

Also Published As

Publication number Publication date
CN104613865B (en) 2017-03-15

Similar Documents

Publication Publication Date Title
CN104613865A (en) Grating interferometer with high subdivision and high density
US9879979B2 (en) Heterodyne grating interferometer displacement measurement system
CN103307986B (en) A kind of two degrees of freedom heterodyne grating interferometer displacement measurement system
CN104729402B (en) High-optical-subdivision grating interferometer based on plane mirrors
US11525673B2 (en) Five-degree-of-freedom heterodyne grating interferometry system
CN102937411B (en) Double-frequency grating interferometer displacement measurement system
CN103322927B (en) A kind of Three Degree Of Freedom heterodyne grating interferometer displacement measurement system
CN101581577B (en) Device for measuring straightness accuracy and position thereof based on double frequency interference principle
CN201187993Y (en) Device for large distance light parallel regulation
CN106813578B (en) A kind of two-dimensional grating measuring system
CN104729411A (en) High-resolution grating interferometer based on high-density gratings
CN108775878B (en) Grating heterodyne interference system and roll angle measuring method thereof
CN103759656A (en) Two-degree-of-freedom heterodyne grating interferometer displacement measurement system
CN107462166B (en) Long stroke, high precision displacement measurement method based on diffraction grating
CN103630077B (en) A kind of diaxon grating displacement measuring system that uses double-frequency laser
CN108106536A (en) A kind of plane grating interferometer displacement measurement system
CN101846506A (en) Roll angle measurement method based on common path parallel beams
CN107462167A (en) The pattern displacement measuring method of long stroke, high-acruracy survey
CN110081823A (en) A kind of lathe five degree of freedom geometric moving error measuring system
CN103673899A (en) Two-axis grating displacement measuring system capable of measuring vertical displacement
CN103217104A (en) Non-guide measurement device and method of point diffraction three-dimensional absolute displacement
CN107860318A (en) A kind of plane grating interferometer displacement measurement system
JPS58191907A (en) Method for measuring extent of movement
CN103759655A (en) Two-freedom homodyne grating interferometer displacement measuring system based on optical octave method
CN106247992B (en) A kind of high-precision, wide scope and big working distance autocollimation and method

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant