CN104613865B - High subdivision high dencity grating interferometer - Google Patents
High subdivision high dencity grating interferometer Download PDFInfo
- Publication number
- CN104613865B CN104613865B CN201510080676.0A CN201510080676A CN104613865B CN 104613865 B CN104613865 B CN 104613865B CN 201510080676 A CN201510080676 A CN 201510080676A CN 104613865 B CN104613865 B CN 104613865B
- Authority
- CN
- China
- Prior art keywords
- subdivision
- prism
- grating
- light
- polarization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
A kind of high subdivision high dencity grating interferometer, including：The high density diffraction grating of relative motion, linear polarization light source, polarization beam apparatus, the first and second high subdivision prisms, the first and second reflecting mirrors, the first and second quarter-wave plates, polarization phase-shifting interfere photoelectric detection unit or double frequency difference interference photoelectric detection unit, data acquisition and processing (DAP) and control unit.High dencity grating is designed to the high diffraction light efficiency of negative one level by the present invention；And then the multiple diffraction repeatedly between prismatic reflection face and high dencity grating is realized using high subdivision prism, and final in prism collimation plane auto-collimation retroeflection and again diffraction repeatedly between high dencity grating, so that grating interferometer obtains high subdivision effect, grating interferometer optical resolution is effectively improved.
Description
Technical field
The present invention relates to optical gauge, particularly a kind of high subdivision high dencity grating interferometer.
Background technology
Grating interferometer is the nucleus module of high accuracy optical grating ruler measurement system (pitch is generally less than 10 microns), determines
Its precision and resolution.High accuracy optical grating ruler measurement system is by grating scale body, installs fixture, the read head based on grating interferometer
And signal controller and display composition, its function is to carry out the measurement of high precision displacement amount.It is widely used in machine tooling control
System, chip process and cutting, IC etching equipment, quasiconductor detection, robot system, Aero-Space, scientific research, army
The fields such as thing.
High accuracy optical grating ruler measurement system is not only one of modern most basic automatization amount instrument, and be modern processing and
One of high accuracy, important guarantee means of high-quality in production and scientific research.Especially 20nm/14nm IC etchings set
The fields such as standby, nanometer/Asia nano science research, Aero-Space, scientific research, military affairs, carry to high accuracy optical grating ruler measurement system
The demand of higher precision and resolution is gone out.
For high-precision laser interferometer, the optical grating ruler measurement system based on grating interferometer has to environment not
Sensitive advantage.Its electronic fine-grained resolution has reached micromicron magnitude.But in practical application, the synthesis of optical grating ruler measurement system
Resolution is together decided on by grating interferometer optical resolution and electronic fine-grained resolution；Grating interferometer optical resolution determines
The effectiveness of electronic fine-grained resolution.Therefore, it is further to improve optical grating ruler measurement to improve grating interferometer optical resolution
The basic place of systemic resolution.
Canon proposes patent, the U.S. IBM such as US5038032, US5146085, US4912320 and proposes patent
US5442172, U.S. ZYGO have also applied for the grating interferometer patent of many novelties, such as US8300233B2, US0194824A1,
US0114061A1, to obtain higher precision and resolution.German Heidenhain, Sony are also proposed high-resolution grating
Chi measuring system.But with the above-mentioned technical scheme as representative, grating interferometer optical fine number generally 2 or 4.How using high
Electronic fine-grained, such as 12bit, 14bit；Further high bit is electronic fine-grained is easily achieved, but is limited to grating interferometer light
Learn 4 and segment resolution, meaningless.Therefore, grating interferometer optical fine number is further improved for the actual grating that improves is done
Interferometer optical resolution or even optical grating ruler measurement system overall resolution, with important value.
Content of the invention
The purpose of the present invention is to overcome above-mentioned prior art not enough, proposes a kind of high subdivision high dencity grating and interferes
Instrument:High dencity grating is designed to the high diffraction light efficiency of negative one level first；And then prismatic reflection face is realized using high subdivision prism
Multiple diffraction repeatedly between high dencity grating, and final in prism collimation plane auto-collimation retroeflection and again in high dencity grating
Between diffraction repeatedly so that grating interferometer obtains high subdivision effect, effectively improve grating interferometer optical resolution.
The technical solution of the present invention is as follows：
A kind of high subdivision high dencity grating interferometer, including：The high density diffraction grating of relative motion, linear polarization light source,
Polarization beam apparatus, the first high subdivision prism, the second high subdivision prism, the first reflecting mirror, the second reflecting mirror, the first quarter-wave
Piece, the second quarter-wave plate, data acquisition and processing (DAP) and control unit and interfere photoelectric detection unit, its feature is, institute
The linear polarization light source that states sends polarized beam and is divided into the P light of transmission and the S light of reflection through polarization beam apparatus, and described P light is successively
Described relative motion diffraction grating is incided through the first described quarter-wave plate, the first reflecting mirror, described S light is successively
Described relative motion diffraction grating is incided through the second described quarter-wave plate, the second reflecting mirror；High thin by first
Point prism, the second high subdivision prism, incident beam on the diffraction grating 2N time -1 order diffraction (N on diffraction grating unidirectional repeatedly
Diffraction number of times), produce positive and negative 2N times of doppler optical frequency displacement respectively, and then realize 4N times of optical fine.Spread out through the relative motion
- 1 order diffraction light of two beams that penetrates after 2N diffraction of grating through the described first high subdivision prism and the second high subdivision prism transmission and
After reflection, then auto-collimation backtracking, be converted to through the first described quarter-wave plate and the second quarter-wave plate respectively
The line polarized light orthogonal with former polarization state, incides described interference photoelectric detection unit, the interference through polarization beam apparatus again
The outfan of photoelectric detection unit is connected with the input of described data acquisition and processing (DAP) and control unit.
The high subdivision prism of described first and the second high subdivision prism include at least one reflecting surface, an adjacent standard
Face the transmission plane relative with directly；Described high subdivision prismatic reflection face and collimation plane angle α, high subdivision prismatic reflection face with
The angle α of transmission plane included angle, high subdivision prism transmission face and high density diffraction grating plane3Meet following relation：
Wherein, n0For air refraction, n1High subdivision Refractive Index of Glass Prism, λ are optical source wavelength, and β is incident beam and high density
Diffraction grating normal angle, pitch of the d for high density diffraction grating, α3≥0.
Described first high subdivision prism and the second high subdivision prism include at least one reflecting surface and one adjacent
Collimation plane；Described high subdivision prismatic reflection face meets following relation with collimation plane angle α：
Wherein, n0For air refraction, n1High subdivision Refractive Index of Glass Prism, λ are optical source wavelength, and β is incident beam and high density
Diffraction grating normal angle, pitch of the d for high density diffraction grating.
Described linear polarization light source is light emitting diode, laser diode, the light source of solid or gas lamp；Single-frequency swash
Light device or the laser instrument of double frequency cross-polarization.
Described interference photoelectric detection unit is that polarization phase-shifting interferes photoelectric detection unit or double frequency difference interference light electrical resistivity survey
Survey unit.
Described polarization phase-shifting interfere photoelectric detection unit include the 3rd quarter-wave plate, non-polarizing beamsplitter, first
Polarization beam apparatus, the second polarization beam apparatus of 45 degree of placements of place's cross-polarization, the first detector, the second detector, the 3rd detection
Device and the 4th detector.
Described double frequency difference interference photoelectric detection unit includes non-polarizing beamsplitter, is in orthogonal double frequency line polarized light 45
The first analyzer and corresponding first detector, the second analyzer in the 45 degree of placements of orthogonal double frequency line polarized light that degree is placed
And corresponding second detector, described linear polarization light source sends polarized beam and is divided into two beams through described non-polarizing beamsplitter,
A branch of P light for being divided into transmission through described polarization beam apparatus and the S light of reflection, another beam enter the first described analyzer.
Described data acquisition and processing (DAP) and control unit are by data collecting card and motion control card and industrial computer group
Into or by least have collection and the circuit board group of computing function into.
In such scheme, diffraction grating can also be transmission-type；When transmission-type is used, place in one side of diffraction light and be all-trans
Mirror is penetrated, and by -1 order diffraction light reversely with former incident angle of light incident transmission type diffraction grating, the first and second high subdivision prisms
Parameter constant.
Compared with prior art, technique effect of the invention：
The high diffraction light efficiency of negative one level is designed to using by high dencity grating；And then realize that prism is anti-using high subdivision prism
The multiple diffraction repeatedly between face and high dencity grating is penetrated, and final in prism collimation plane auto-collimation retroeflection and again in high density
Diffraction repeatedly between grating.Incident beam on the diffraction grating 2N time -1 order diffraction (N is unidirectional diffraction repeatedly on diffraction grating
Number), produce positive and negative 2N times of doppler optical frequency displacement respectively, and then realize 4N times of optical fine.If N=10,40 times are can achieve
Optical fine.So that grating interferometer obtains high subdivision effect, grating interferometer optical resolution is effectively improved significantly.
Description of the drawings
Fig. 1 is the enforcement illustration of the high subdivision high dencity grating interferometer using double frequency difference interference photoelectric detection unit.
Fig. 2 is the enforcement illustration of the high subdivision high dencity grating interferometer for interfering photoelectric detection unit using polarization phase-shifting.
Fig. 3 is the fundamental diagram of high subdivision prism.
Fig. 4 is another kind of fundamental diagram of high subdivision prism.
Fig. 5 is the fundamental diagram of the high subdivision prism of integral type.
Fig. 6 is the fundamental diagram of simplified high subdivision prism.
Specific embodiment
With reference to embodiment and accompanying drawing, the invention will be further described, but should not limit protection model of the invention with this
Enclose.
1st, embodiment 1.Such as Fig. 1.
Laser instrument 8 sends orthogonal double frequency line polarized light, is divided equally into two-beam through non-polarizing beamsplitter 10, a branch of entrance dashed box
Interior double frequency difference interference photoelectric detection unit, by with shape after the first analyzers 11 of 45 degree of orthogonal double frequency line polarized light placement
Into interference signal, and received by the first detector 12, as the reference signal of double frequency difference interference art；Another beam is by polarization point
Beam device 9 is divided into the S light of the P light of transmission and reflection, is converted by the first quarter-wave plate 6 and the second quarter-wave plate 7 respectively
For circularly polarized light, then by 3 incident diffraction grating 1 of the first reflecting mirror 2 and the second reflecting mirror.By two after 1 diffraction of diffraction grating
- 1 grade of beam respectively enters the first high subdivision prism 4 and the second high subdivision prism 5 on respective one side, then auto-collimation backtracking, warp
First quarter-wave plate 6 and the second quarter-wave plate 7 are transformed to the line polarized light orthogonal with former polarization state, again through polarization
Double frequency difference interference photoelectric detection unit in 9 common entrance dashed box of beam splitter, is put by 45 degree with orthogonal double frequency line polarized light
Interference signal is formed after the second analyzer 14 that puts, and is received by the second detector 13, as the measurement of double frequency difference interference art
Signal；Above-mentioned reference signal and measurement signal are processed via data acquisition and processing (DAP) and control unit 15 and can obtain diffraction grating
1 lateral displacement amount.
First high subdivision prism 4 and operation principle such as Fig. 3 of the second high subdivision prism 5, only segment rib with the first height below
As a example by mirror 4.
After incident beam 30 is through 1 diffraction of grating, -1 order diffraction light beam is passed through by the first high transmission plane 33 for segmenting prism 4,
Transmission plane 33 is reflected by the first high reflecting surface 32 for segmenting prism 4 again, and parallel with incident beam 30.So repeatedly repeatedly,
Until finally a branch of -1 order diffraction light beam in the 34 auto-collimation retroeflection of collimation plane of the first high subdivision prism 4 is and 30 weight of incident beam
Close but light beam 31 in opposite direction.Relevant parameter is as follows：
Wherein, n0It is Refractive Index of Glass Prism for air refraction, n1, θ is the angle of diffraction, λ is wavelength, α3For prism transmission face 33
Angle with 1 plane of diffraction grating.
Incident beam 30 and 1 angle of incidence of diffraction grating are β, and 1 pitch of diffraction grating is d, the reflection of the first high subdivision prism 4
Face 32 meets (1) formula with 34 angle α of collimation plane.The reflecting surface 32 of the first high subdivision prism 4 meets (2) with 33 included angle of transmission plane
Formula.
After using the first high subdivision prism 4 and the second high subdivision prism 5, incident beam 2N time -1 grade on diffraction grating 1
Diffraction (N is unidirectional diffraction number of times repeatedly on diffraction grating 1), produces positive and negative 2N times of doppler optical frequency displacement respectively, and then realizes
4N times of optical fine.If N=10,40 times of optical fine is can achieve.So that pitch is 2000 lines per millimeter gratings as an example, by which
It is designed to the high diffraction light efficiency of negative one level, such as larger than 90%, if N=10, then still can effectively detect its interference signal, then can obtain
Obtain the optical cycle signal of 12.5nm.It is aided with 1024 grades electronic fine-grained, then can achieve the high-resolution of about 12.2pm.
Fig. 4 is another kind of working method schematic diagram of the first high subdivision prism 4 or the second high subdivision prism 5.Incident ray
Compared with Fig. 3 away from diffraction grating 1, from the first high subdivision prism 4 or the top incidence diffraction grating 1 of the second high subdivision prism 5.
High subdivision prism 4 and 5 can be further designed to the high subdivision prism of integral type, as shown in Figure 5.Fig. 5 is Fig. 3 and Fig. 4
Work as α3Special case when=0 °.
Parameter is consistent with the above.
In Fig. 5, sequence number of the right with single quotation marks is the antitrope of left side sequence number.
First high subdivision prism 4 and the second high subdivision prism 5 can be reduced to a reflecting surface and an adjacent collimation
Face, is directly processed into or bonds and form, such as Fig. 5.By that analogy, the first high subdivision prism 4 and the second high subdivision prism 5 can enter one
The integrated equally symmetrical structure of step design.Two faces meet following relation：
Parameter is consistent with the above.
2nd, embodiment 2.Such as Fig. 2.
Laser instrument 8 sends line polarized light, is divided into the P light of transmission and the S light of reflection through polarization beam apparatus 9, respectively by four points
One of wave plate 6 and 7 be transformed to circularly polarized light, then by 3 incident diffraction grating 1 of the first reflecting mirror 2 and the second reflecting mirror.By diffraction
- 1 grade of two beam after 1 diffraction of grating respectively enters the first high subdivision prism 4 and the second high subdivision prism 5 on respective one side, then from
Collimation backtracking, is transformed to the line orthogonal with former polarization state through the first quarter-wave plate 6 and the second quarter-wave plate 7 inclined
Shake light, again through the entrance dotted line inframe of polarization beam apparatus 9 by the 3rd quarter-wave plate 16, non-polarizing beamsplitter 17, first
Polarization beam apparatus 18, the second polarization beam apparatus 22 (45 degree of rotations are placed) and the first detector 19, the second detector the 20, the 3rd are visited
The polarization phase-shifting for surveying device 21, the 4th detector 23 composition interferes photoelectric detection unit, forms the detectable signal of 90 ° of four tunnel phase shift.
And then the lateral displacement amount of diffraction grating 1 by being processed, is obtained by data acquisition and processing (DAP) and control unit 15.
In the scheme, data acquisition and processing (DAP) and control unit 15 are by data collecting card and motion control card and industry meter
Calculation machine composition or by least have collection and the circuit board group of computing function into.
In the scheme, diffraction grating 1 can also be transmission-type；When transmission-type is used, in -1 order diffraction light, one side is put
Completely reflecting mirror is put, and by -1 order diffraction light reversely with former incident angle of light incident transmission type diffraction grating, the first subdivision 4 He of prism
Second high subdivision 5 parameter constant of prism.
Claims (9)
1. a kind of height segments high dencity grating interferometer, including：The high density diffraction grating (1) of relative motion, linear polarization light source
(8), polarization beam apparatus (9), the first high subdivision prism (4), the second high subdivision prism (5), the first reflecting mirror (2), the second reflection
Mirror (3), the first quarter-wave plate (6), the second quarter-wave plate (7), data acquisition and processing (DAP) and control unit (15) and
Interfere photoelectric detection unit, it is characterised in that described linear polarization light source (8) sends polarized beam through polarization beam apparatus (9) point
The S light of P light and reflection for transmission, described P light is successively through described the first quarter-wave plate (6), the first reflecting mirror (2)
Incide described high density diffraction grating (1), described S light is successively through described the second quarter-wave plate (7), second anti-
Penetrate mirror (3) and incide described high density diffraction grating (1), respectively via the first high subdivision prism (4) and the second high subdivision rib
After mirror (5) transmission and reflection, the upper unidirectional n times diffraction of -1 order diffraction light beam of two beams each comfortable high density diffraction grating (1), then autocollimatic
The unidirectional n times diffraction in Zhi Yuan roads is returned, and is turned through described the first quarter-wave plate (6) and the second quarter-wave plate (7) respectively
The line polarized light orthogonal with former polarization state is changed to, and described interference photoelectric detection unit is incided through polarization beam apparatus (9) again,
The outfan of the interference photoelectric detection unit is connected with the input of described data acquisition and processing (DAP) and control unit (15)；Institute
The first high subdivision prism (4) and the second high subdivision prism (5) that states includes at least one reflecting surface and an adjacent collimation
Face.
2. height according to claim 1 segments high dencity grating interferometer, it is characterised in that the high subdivision rib of described first
Mirror (4) and the second high subdivision prism (5) include at least one reflecting surface, an adjacent collimation plane and a relative transmission
Face；Described high subdivision prismatic reflection face and collimation plane angle α, high subdivision prismatic reflection face and transmission plane included angle, high subdivision
Prism transmission face and the angle α of high density diffraction grating plane3Meet following relation：
Wherein, n0For air refraction, n1For high subdivision Refractive Index of Glass Prism, λ is optical source wavelength, and β is spread out with high density for incident beam
Penetrate grating normal angle, pitch of the d for high density diffraction grating, α3≥0.
3. height according to claim 1 segments high dencity grating interferometer, it is characterised in that described high subdivision prism is anti-
Penetrate face following relation is met with collimation plane angle α：
Wherein, λ is optical source wavelength, and β is incident beam and high density diffraction grating normal angle, and d is high density diffraction grating (1)
Pitch.
4. high subdivision high dencity grating interferometer according to claim 1, it is characterised in that described linear polarization light source is
Light emitting diode, laser diode, the light source of solid or gas lamp；The laser instrument of single-frequency or the laser of double frequency cross-polarization
Device.
5. the height according to any one of claim 1-4 segments high dencity grating interferometer, it is characterised in that described interference
Photoelectric detection unit is that polarization phase-shifting interferes photoelectric detection unit or double frequency difference interference photoelectric detection unit.
6. height according to claim 5 segments high dencity grating interferometer, it is characterised in that described polarization phase-shifting is interfered
Photoelectric detection unit is just including the 3rd quarter-wave plate (16), non-polarizing beamsplitter (17), the first polarization beam apparatus (18), place
Hand over polarization 45 degree of the second polarization beam apparatus (22) that places, the first detector (19), the second detector (20), the 3rd detectors
And the 4th detector (23) (21).
7. height according to claim 5 segments high dencity grating interferometer, it is characterised in that described double frequency difference interference
Photoelectric detection unit includes non-polarizing beamsplitter (10), the first analyzer (11) in the 45 degree of placements of orthogonal double frequency line polarized light
And corresponding first detector (12), the second analyzers (14) that places in 45 degree of orthogonal double frequency line polarized light and corresponding the
Two detectors (13), described linear polarization light source (8) send polarized beam and are divided into two beams through described non-polarizing beamsplitter (10),
A branch of P light for being divided into transmission through described polarization beam apparatus (9) and the S light of reflection, another beam enter the first described analyzer
(11).
8. the height according to any one of claim 1-4 segments high dencity grating interferometer, it is characterised in that described data
Collection and process and control unit are made up of data collecting card and motion control card and industrial computer or are gathered by least having
With the circuit board group of computing function into.
9. the height according to any one of claim 1-4 segments high dencity grating interferometer, it is characterised in that described is highly dense
Degree diffraction grating (1) is reflection-type or transmission-type.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510080676.0A CN104613865B (en) | 2015-02-15 | 2015-02-15 | High subdivision high dencity grating interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510080676.0A CN104613865B (en) | 2015-02-15 | 2015-02-15 | High subdivision high dencity grating interferometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104613865A CN104613865A (en) | 2015-05-13 |
| CN104613865B true CN104613865B (en) | 2017-03-15 |
Family
ID=53148427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510080676.0A Active CN104613865B (en) | 2015-02-15 | 2015-02-15 | High subdivision high dencity grating interferometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104613865B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110966939B (en) * | 2018-09-28 | 2021-10-01 | 上海微电子装备（集团）股份有限公司 | Interferometric measuring device, measuring method and photoetching equipment |
| CN110849593B (en) * | 2019-11-22 | 2021-06-01 | 中国科学院长春光学精密机械与物理研究所 | Measuring equipment for measuring wave aberration of optical system based on heterodyne interference of acousto-optic modulator |
| CN111207674B (en) * | 2020-01-17 | 2021-08-24 | 中北大学 | Displacement sensor based on multiple diffraction of single-layer grating |
| CN112484646B (en) * | 2020-11-17 | 2021-12-17 | 中国科学院长春光学精密机械与物理研究所 | Homodyne one-dimensional grating displacement measuring device |
| CN113865480A (en) * | 2021-09-18 | 2021-12-31 | 桂林电子科技大学 | Heterodyne grating interferometer reading head system signal analysis method based on ZEMAX simulation |
| CN114111587B (en) * | 2021-11-01 | 2024-03-01 | 中国科学院上海光学精密机械研究所 | Triaxial high-optical subdivision grating ruler |
| CN117146870A (en) * | 2023-11-01 | 2023-12-01 | 中国科学院长春光学精密机械与物理研究所 | Two-dimensional grating interferometry device and measurement method |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2629948B2 (en) * | 1989-03-03 | 1997-07-16 | キヤノン株式会社 | encoder |
| JP4722474B2 (en) * | 2004-12-24 | 2011-07-13 | 株式会社ミツトヨ | Displacement detector |
| CN201653358U (en) * | 2009-12-31 | 2010-11-24 | 范光照 | Novel linear diffraction grating interferometer structure |
| CN103673892B (en) * | 2013-11-21 | 2016-03-30 | 清华大学 | A kind of symmetrical expression grating difference interference re-diffraction measurement mechanism |
| CN104048597B (en) * | 2014-06-13 | 2017-06-13 | 中国科学院上海光学精密机械研究所 | Self adaptation common light path grating interferometer and its implementation |
-
2015
- 2015-02-15 CN CN201510080676.0A patent/CN104613865B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104613865A (en) | 2015-05-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104613865B (en) | High subdivision high dencity grating interferometer | |
| CN104729402B (en) | High-optical-subdivision grating interferometer based on plane mirrors | |
| CN103307986B (en) | A kind of two degrees of freedom heterodyne grating interferometer displacement measurement system | |
| CN103322927B (en) | A kind of Three Degree Of Freedom heterodyne grating interferometer displacement measurement system | |
| CN104048597B (en) | Self adaptation common light path grating interferometer and its implementation | |
| CN103604375B (en) | Double frequency laser grating interference two-dimensional measurement method and system with optical aliasing resistance | |
| CN104713473B (en) | Laser mixes grating interferometer and its measuring method certainly | |
| CN103673892B (en) | A kind of symmetrical expression grating difference interference re-diffraction measurement mechanism | |
| CN106813578B (en) | A kind of two-dimensional grating measuring system | |
| CN103075969B (en) | Differential laser interference nano-displacement measurement method and differential laser interference nano-displacement measurement apparatus | |
| CN103162645B (en) | A kind of rolling measurement method and apparatus measured based on the ellipse degree of bias | |
| CN103433810A (en) | Complicated curve surface normal vector on-machine detection device and method | |
| CN104729411B (en) | High-resolution gration interferometer based on high dencity grating | |
| CN103673891A (en) | Grating heterodyne interference auto-collimation measuring device | |
| CN103673899B (en) | A kind of diaxon grating displacement measuring system surveying vertical displacement | |
| Shimizu et al. | Design and testing of a four-probe optical sensor head for three-axis surface encoder with a mosaic scale grating | |
| CN107462166A (en) | Long stroke based on diffraction grating, high precision displacement measuring method | |
| CN103630077A (en) | Two-axis grating displacement measurement system adopting double-frequency laser | |
| Lu et al. | Two-degree-of-freedom displacement measurement system based on double diffraction gratings | |
| CN103759655B (en) | The two degrees of freedom homodyne grating interferometer displacement measurement system of optically-based times of journey method | |
| CN109579744B (en) | Following type three-dimensional photoelectric auto-collimation method and device based on grating | |
| CN106247992B (en) | A kind of high-precision, wide scope and big working distance autocollimation and method | |
| Šiaudinytė et al. | Multi-dimensional grating interferometer based on fibre-fed measurement heads arranged in Littrow configuration | |
| CN209706746U (en) | A kind of lathe five degree of freedom geometric moving error measuring system | |
| CN103759657B (en) | Two-freedom heterodyne grating interferometer displacement measuring system based on optical octave method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |