TWI270659B - Optical device using a reflection principle to measure levelness - Google Patents

Abstract

An optical device using a reflection principle to measure levelness comprises a laser beam, a reflection mirror and a position sensor, in which a pendulum mechanism is used to keep the reflection mirror constantly parallel to the horizontal plane. When the laser beam incidents on the reflection mirror of the pendulum and reflects to the reflection mirror that is fixed on the mechanism, the laser beam again reflects to the position sensor. Finally, by analyzing the position of laser point in the position sensor, the levelness of the tested horizontal plane can be obtained. The essential feature of the present invention is that it can simultaneously measure levelness of two different directions. Therefore, when performing the geometric measurements of, straightness, levelness, flatness, verticality, half of measuring steps and time can be saved.

Description

1270659 ———— - IX, invention description: f-years of the month ~ 曰修 (more) is the replacement page [Technical field of the invention] The present invention relates to an optical level measuring device using reflection, in particular A set of high-precaution level measuring devices built by position sensors and mirrors combined with lasers. [Prior Art]

With the development of technology, the demand for machine precision in the industry is also increasing. The measurement requirements for the straightness, parallelism, verticality and flatness of the machine are becoming more frequent and severe. Therefore, for the horizontal measurement The requirements of the device are also stricter; the conventional level measuring device can be divided into two types, the first is a measuring device established by the principle of gravity; the second is a measuring device established by the principle of gravity. The horizontal measuring devices established by the principle of gravity mainly include Mi Mi bubble level meter, electrolysis bubble level meter, electric level meter, electric pen level meter and photoelectric level meter. The horizontal measurement of the non-gravity principle mainly includes a laser interferometer, an automatic collimator, a sextant and the like. At present, the most commonly used level in the industry is the precision bubble level, but the resolution of the gas: package level can not meet the current precision machinery for horizontal measurement and the existing precision level measurement device is mainly based on capacitive level meter' - Referred to as an electronic level meter, the current horizontal resolution of such devices can be: rc sec. However, the electronic level has the following shortcomings: (丨) The higher the resolution, the lower the measurement, the smaller the circumference, the lower the measurement. The arc level can only be measured. 0.2 Arc-sec electronic level can only |, 丨J—4〇〇Arc —sec; (2) Single-only measurement list 5 1270659 |?r year / evaluation of the day) The replacement page, often need to measure the level of two degrees of freedom, but the level of the general measure ( Pitch and Rolling.) In addition to measuring the horizontal tilt, the level can also be applied to geometric measurements, straightness, parallelism and flatness; the geometric error measurement used in the survey uses a laser interferometer 'but {Laser} + The involvement of the instrument on large machines is very difficult and time consuming, and it is expensive, and the cost is much higher than the electronic level.

It can be seen that the above-mentioned horizontal measurement and geometric error measurement devices still have many defects, which need to be improved. The inventor of the present invention, in view of the above-mentioned conventional levels and various shortcomings derived from the geometric error measuring device, has improved and innovated, and after years of painstaking research, 'finally succeeded in research and development of this piece—the optical level using the reflection principle Measuring device. SUMMARY OF THE INVENTION The object (4) of the present invention is to provide an optical level measuring device capable of simultaneously measuring the inclination of two degrees of freedom of pitch and roll. The second objective of the present invention is to provide an optical level measuring device that utilizes reflection and has a larger measurement range with the same measurement accuracy. Still another object of the present invention is to provide a horizontal measuring device that utilizes an optical principle such as reflection. An optical level measuring device utilizing the principle of reflection, comprising: an optical level structure using light to walk in space

The device is placed on a horizontal surface with a tilt angle. Because of the action of gravity, the mirror will be parallel to the earth's horizontal plane. (4) The phase and position phase devices have relative movements, and the position of the light spot finally falling on the position sensor is analyzed. The tilt angle of the plane can be obtained. The reflective optical level of the present invention can improve the principle of angular sensitivity after light reflection, and improve the angular resolution of the measuring device by two reflections. [Embodiment] () System structure and operation description (1) Referring to FIG. 1 , an optical level measuring device using the reflection principle provided by the present invention has a plan view as shown in FIG. 1 , and a perspective view shown in FIG. 2 , which mainly includes: (a) a laser light source 11 The mirror 122 and the position sensor 13 are fixed on the fixture 16 of the reflective optical level, and the laser source u can be visible light, microwave, infrared light, ultraviolet light, and xenon rays. It needs to be replaced with the required accuracy and can be applied to the relative distance measurement; the position sensor 13 can be a Charge Coupled Device Camera (CCD) or 127〇659-----f With the v month, the Japanese repair (more) replacement page - the sensing instrument instead of the two-dimensional signal; the mirror 121 is fixed on the pendulum mechanism 14, the pendulum mechanism 14 can be point contact, universal joint, two-way Bearing or rope (8) connecting the signal line of the position sensing ϋ 13 to the position sensor signal processor 17; (c) connecting the output of the signal processor 17 to the analog/digital conversion card 18, so that the analog of the _ signal processor The signal is converted into a digital signal for the storage of the computer 19; (d) The reflective optical level is placed on the plane to be tested. The planar optical path of the reflective optical level is shown in Figure 3. The three-dimensional optical path is shown in Figure 4. The laser source 11 emits a laser beam from the point P1, hits the P2 point on the mirror 121, and then reflects to the P3 point. Finally, the laser beam is reflected by mirror 122 onto position sensor J3. Since the mirror 固定2 is fixed above the pendulum mechanism 14, it is always parallel with the horizontal plane, but when the structure is placed on a non-horizontal surface, the position of the laser light source U, the mirror 122, and the position sensor 13 The relative movement of the mirror 121 is performed because the laser source 11, the mirror 122, and the position sensor 13 are fixed to the jig 16 and thus interlock with the yaw of the stencil|16. Figure 5(a)(b) shows the case where the fixture is placed at a tilt angle and a tilt angle, and the fixture 16 is yawed. The operation flow of the reflective optical level is shown in Figure 6. The operation flow is the same as the 1270659?]^year/month V repair (more) replacement page (the same as the general electronic level, first the level is required to perform the zeroing procedure, then the level Placed on the surface of the object to be tested, and start the measurement program to sample. After the measurement is finished, the signal is processed by the signal processor 17 and converted by the analog/digital conversion card 18 to convert the analog signal into a digital signal and pass the computer 1 9 output amount, then select D /,,,, ° When the laser source 11 is hit on the position sensor 13, the sensor 13 will generate a corresponding X, Y axis signal, the signal is the laser light The position signal on the position sensor 13 corresponds to the position of the laser spot on the position sensor when the invention is located at a different inclination level of the plane to be measured. Therefore, by analyzing the position of the laser spot on the position sensor, the inclination of the plane to be measured can be obtained; since the signal drawn by the analog/digital conversion card 8 is a voltage signal, it is doing Measurement needs to be advanced Correction of the position sensor 13 to obtain a relationship between the voltage and the position of the spot (correction curve equation); the calibration curve is obtained by using the reference coordinates provided by the laser interferometer and the voltage output from the position sensor. Calculated by the least squares difference method. (2) Two-dimensional position sensor correction One-dimensional position sensor must be corrected before being used for measurement. The corrected wood composition is shown in Figure 7. Position sensing The device 3 is placed on the micro-motion platform 8, on which the laser light 1 is driven in, and then the laser interferometer 7 is mounted, so that the laser interferometer 7 can measure the amount of movement of the micro-motion platform 8. Finally, the micro-motion platform & 9

1270659 Fixed distance fixed point back and forth G times, take position sensor 3 signal and laser interferometer 7 reading value 'The data extracted by this process, after the least square method is calculated, you can get this group position sensing The calibration curve of the device 7. - The correction of the dimensional position sensing H 3 is divided into the χ axis correction and the γ axis correction twice. The correction flow chart is as shown in Fig. 8 (1) and Fig. 8 (8), and the laser spot is first moved to the shoulder of the position sensor, especially ν ά ^ ^ When doing the 校正 axis correction, the moving direction of the micro-motion platform 8 is parallel to the position sensor axis, and then moves back and forth several times at a fixed distance within the working circumference of the position sensor 3; The correction is to turn the position sensor 3 to 9. After the degree, let the moving direction of the micro-motion platform 8 and the position sense! The axis is parallel. Then, the micro-motion platform 8 is moved in the position sensor; the distance is moved back and forth several times in the circumference, and the position sensing is taken. The signal is recorded and the coordinate position measured by the laser interferometer is recorded, and the data obtained by the above two action processes are subjected to the calibration curve of the tube and the axis.四 (4) Two-dimensional position sense · 3 (9) (3) Geometric error measurement - The present invention can be applied to machine tool geometric error measurement, such as measurement of true straightness and flatness. True straight measurement is generally used for the rails of rectangular objects, which will be used to measure the number of points, such as P, ., P3, p2, from the point of view, from the second, the ▲ ', 丨 or the object to be tested. The measurement is carried out, and the straight and amu items are arranged together to obtain the guide rail or the elongated object, and the straightness. Parallel measurement that the level can do, usually refers to the direction of twist 1270659

兮兮年^月,日修 (more) is replacing the parallelism of the page. If you want to measure the degree J, divide the two objects to be measured into several measuring points (as shown in Fig. + π α10), then Ordinal quantity (Pn-l, Ρη... ρ3 ρ〇Ρ1 level of the point •·Μ P2' P and Qn-i, Qn. The measurement results of each point are arranged in the line degree ρ The flat/flat measurement of the two guide rails is mostly applied to the measurement of large objects, such as the wing of the machine bed machine. For the object to be tested, the point of the air can be measured by the air, and the point of the L-view is not measured. ), and then measure in sequence, the flatness of the whole piece. The general electronic level ·,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, Therefore, each measurement point must be measured twice, so that the yaw of the workpiece can be measured in both directions, but the invention can simultaneously measure the yaw in two directions, so that it can save half of the traditional level. The above measurement time. This watch month can also be used to measure the pitch and roll of slides such as rails or hard rails, such as the electronic level meter Only the energy measurement of the pitch or (four) degrees must be measured after one of the errors, the electronic level is rotated 90 degrees, in order to measure another error 'but the invention can measure two errors at the same time, so it can be more common The level meter saves more than half of the measurement time. The optical level measuring device using the principle of optical reflection provided by the present invention has the following advantages when compared with the prior art: 1. The horizontal quantity of the present invention The measuring device can measure the inclination of two degrees of freedom at the same time. 11 1270659/month>^ repair (more) is replacing the page skew. Under the same measurement process, the half-measurement step is used for The flat measurement can save half a time, so it is very useful for the detection of fine gifts and implements; with the same 4 measurement accuracy, it has a larger 2 · The horizontal measuring device of the present invention is in the phase measurement range; The horizontal measuring device of the present invention is not affected by the optical magnetic quantity; 4. The reflective optical k# of the present invention can be used after the light reflection is used.

To improve the sensitivity of the angle sensitivity, the two reflections of the invention can achieve four times the angular resolution of the present invention; the above detailed description is directed to a specific embodiment of a possible embodiment of the present invention, but the embodiment is The scope of the patents of the present invention is intended to be limited to the scope of the patents of the present invention. In summary, this case is not only innovative in terms of structure, but also can improve the above-mentioned multiple functions compared with the conventional level measuring device. It should fully comply with the novelty and progressive method. 2. Invent the patent requirements, and submit the towel according to law. _ You have approved this invention patent application, in order to invent invention, to the sense of virtue. Figure 1 is a schematic diagram of a reflective optical level; Figure 1 is a perspective view of a reflective optical level; 12 1270659 y years ^ month ^ ^ repair (more) replacement page Figure 2 reflective optical level plane light path diagram; Figure four reflection Three-dimensional optical path diagram of the optical level; Figure 5 is a schematic diagram of the yaw of the level; Figure 6 is an action diagram of the optical level; Figure 7 is a schematic diagram of the correction of the two-dimensional position sensor;

Figure 8 (A) Flowchart for correcting the X-axis of the position sensor; Figure 8 (B) Flow chart for correcting the Y-axis by the position sensor; Figure 9: True straightness and tilt measurement path diagram; Figure 10 Parallel measurement Path map; Figure 11 flat measurement path map. [Main component symbol description] 11 Laser light source 121 Mirror 122 Mirror

13 Position sensor 14 Pendulum mechanism 16 Fixture 17 Position sensor signal processor 18 Analog/digital converter card 19 Computer 1 Laser light source 13 1270659 Book year of the month IQ repair (more) is replacing page 2 Mirror 3 2D position sensor 6 position sensor fixture 7 laser interferometer 8 linear micro-motion platform

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Claims (1)

1270659 Patent application park: - 一丨^"__,,. 尸私月,修(^£ Replacement of the optical level measuring device using the reflection principle, including a laser source; two mirrors, one pendulum a mechanism; a two-dimensional position sensor; a signal processor; a type of analog/digital signal conversion card; a computer; the laser light source, a mirror and the position sensor are fixed on the structure, and another mirror is fixed on the pendulum mechanism to make the mirror parallel to the horizontal plane, The laser source emits a laser beam, is mounted on the mirror fixed to the pendulum mechanism, and is reflected to the mirror fixed on the structure, and the laser beam is reflected to the position sensor, the sense of position The signal generated by the detector is transmitted to the signal processor, the signal is converted into a voltage nickname, and the signal is transmitted to the analog/digital conversion card to convert the 4 apostrophe into a digital signal and connected to the computer. To store the digital signal. 2: An optical level measuring device using the reflection principle described in the patent application scope ", the position sensor is erected on the plane to be measured with different inclination degrees to measure two planes to be tested The degree of inclination of the horizontal plane perpendicular to each other. An optical level measuring device using the reflection principle described in the first paragraph of the patent scope of the wind claims, the fourth measuring device utilizes the reflection of learning 15 1270659 a-~______ " The positive replacement page '* principle increases the system measurement accuracy. A light-predicting horizontal measuring device using a reflection principle according to claim 1, wherein the laser light source is selected from any of the following light sources: visible light, microwave, infrared light, ultraviolet light, and X-ray. The amount of sight / / is required to be replaced by the required and precision of the environment, and can be applied to the relative distance measurement. 5. An optical level measuring device using a reflection principle as described in claim 1, wherein the position sensor is a two-dimensional position sensor. 6. The optical level measuring device using the reflection principle according to claim 1, wherein the position sensor can be a CCD camera (Charge Coupled Device camera) or a measuring two-dimensional signal. Instrument replacement. 7. An optical level measuring device using a reflection principle according to claim 1, wherein the pendulum mechanism is constituted by a point contact, a universal φ joint, a bidirectional bearing or a rope. 16