CN110319788A - Adjustable interference position test device and its test method - Google Patents
Adjustable interference position test device and its test method Download PDFInfo
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- CN110319788A CN110319788A CN201910552419.0A CN201910552419A CN110319788A CN 110319788 A CN110319788 A CN 110319788A CN 201910552419 A CN201910552419 A CN 201910552419A CN 110319788 A CN110319788 A CN 110319788A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
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Abstract
A kind of adjustable interference position test device and method, including interferometer, MEMS reflecting mirror, spectroscope, Amici prism, position sensor and computer etc..The present invention can make the measuring head of the face shape of complicated optical surface, it is ensured that wider test scope, high measuring accuracy and bigger test visual field.
Description
Technical field
The present invention relates to interference position testing field, specifically a kind of adjustable interference position test device and its test side
Method, be particularly suitable for optical element it is complex-curved face shape test, it can be achieved that heavy caliber complicated optics face shape test,
Test scope is wide, and precision is high, there is biggish visual field.
Background technique
The complex-curved work in-process of optical element needs to be repeated processing iteration.The test equipment of work in-process point at present
For two classes, contact and contactless.Wherein contact mainly has contourgraph and three-coordinates measuring machine；Contactless having is dry
Interferometer.The test probe of these equipment is difficult to meet wide test scope simultaneously, and high measuring accuracy and bigger visual field are to meet
The complex-curved test of optical element.
In view of the above problems, the present invention is tested by the way of laser interference, thus guarantee measuring accuracy, collocation point
Light prism and displacement sensor determine the light deflection in test process, pass through MEMS reflecting mirror regulating guarantee light
Interferometer can be returned to, to complete position measurement.
Summary of the invention
The purpose of the present invention is overcoming the above-mentioned prior art insufficient, a kind of adjustable interference position test device and side are proposed
Method, interferometer, MEMS reflecting mirror, spectroscope, Amici prism, position sensor, computer etc..The present invention can make optics
The complex-curved test probe of element, during carrying out high precision measurement, guarantees biggish measurement range and biggish visual field.
The principle of the present invention is:
1, light deflection is detected using Amici prism collocation displacement sensor:
The part of detection light deflection is made of Amici prism, displacement sensor 1# and displacement sensor 2#, such as Fig. 1 institute
Show, it is assumed that system is calibrated (i.e. for displacement sensor 1# and displacement sensor 2#, X-axis is identical with the relative direction of Y-axis).
Displacement sensor 1#, displacement sensor 2# are D apart from Amici prism range difference.For displacement sensor 1#, test beams distance
The relative position difference of reference beam is (X1,Y1)；For displacement sensor 2#, the relative position of test beams distance reference light beam
Difference is (X2,Y2), the unit twist vector of light beam is as shown in formula 5；
2, the adjusting of test light is completed using MEMS reflecting mirror, MEMS reflecting mirror can be along X-axis
It is quickly adjusted with Y direction.To meet the Frequency Index requirement of test, after calibration, MEMS can control
Reflecting mirror is deflected respectively along Y-axis and X-axis, and the deflection angle of test light is adjusted to original position；
3, test beams are issued using interferometer and received, obtained obtaining displacement difference, by error compensation, obtain in place
Set test result.
The present invention can test complicated face shape process using MEMS reflecting mirror cooperation light deflection probe portion
In obtain deflection and the correction of test light, equipment control and data processing are completed by computer, in the item of high-precision and high scope
Position measurement result is obtained under part.
Technical solution of the invention is as follows:
A kind of adjustable interference position test device, it is characterized in that, comprising: laser interferometer, spectroscope, light splitting rib
Mirror, computer, position sensor 1#, position sensor 2#, MEMS reflecting mirror；
It is described it is spectroscopical be coated with anti-reflection film on one side, another side is coated with semi-transparent semi-reflecting film；
The laser interferometer output light is incident on described micro electronmechanical after described spectroscopical anti-reflection film transmission
System mirror, after MEMS reflecting mirror reflection, directive element surface to be tested is reflected through element surface to be tested
Afterwards, along backtracking, the spectroscope is incident on after the reflection of MEMS reflecting mirror, it is spectroscopical semi-transparent semi-reflecting through this
Film is divided into reflected light and transmitted light, and the transmitted light is received by laser interferometer, and the reflected light is incident on Amici prism,
It is divided into the second reflected light and the second transmitted light through the Amici prism, second reflected light is received by position sensor 2#, institute
The second transmitted light stated is received by position sensor 1#；
The spacing and position sensor 1# of the position sensor 2# and Amici prism and the spacing of Amici prism differ；
The output end of the laser interferometer is connected with computer input terminal, the output end of the position sensor 1#
It is connected respectively with the input terminal of computer with the output end of position sensor 2#, MEMS reflecting mirror input terminal and computer
Output end be connected.
The interferometer be general purpose type high accuracy laser interferometer, using single-frequency laser (operation wavelength: 633 ±
10nm), measurement range: 0~10m, beam diameter: 1~2mm, resolution ratio: 1nm, measurement accuracy: ± 0.5ppm；
The spectroscope is the otpical leaf (0.5~10mm of diameter range, 0.1~1mm of thickness) that plated film is distinguished on two sides,
The depth of parallelism is less than 2 ", thin slice both sides are coated with semi-transparent semi-reflecting film respectively, and (mixed polarized, transmitance: 50% ± 3%) and anti-reflection film is (mixed
Close polarization, transmitance > 99.8%)；
The MEMS reflecting mirror can complete the quick deflection of light beam, 1~20kHz of response frequency, reflecting mirror
0.5~5.0mm of diameter, -10 ° of mechanical slewing area~10 °；
The Amici prism be polarization splitting prism, size 5mm × 5mm × 5mm, the face λ of shape PV < 1/4 (λ=
632.8nm), through parameter (Tp>95%, Ts<1%), reflection parameters (Rs>99%, Rp<5%)；
The position sensor is transversal effect position sensor, and the resolution ratio of transversal effect position sensor is less than 2 μ
m；
The computer includes and interferometer, the communication interface of MEMS reflecting mirror and position sensor and
With the control interface of MEMS reflecting mirror.
According to the adjustable interference position test device, it is characterised in that the test light can be according to light splitting
The test result of prism and position sensor, is adjusted by MEMS reflecting mirror, and Returning beam is adjusted back laser
Interferometer receiving portion, to complete the complex-curved test of optics.
The adjustable interference position test device need using two-dimension adjustment frame (up and down, left and right range > 10mm, point
Resolution < 0.001mm), two-dimension adjustment frame (pitching, 5 ° of range > of inclination, resolution ratio < 5 "), two dimension electronic arc pendulum regulating platform (adjust
10 ° of adjusting range >, uniaxial repetitive positioning accuracy is less than 0.002 °), ruler (range > 500mm, resolution ratio < 1mm) and plane
Reflecting mirror cooperation calibration；
The test of optical element complex surface is carried out using the adjustable interference position test device, is characterized in that the party
Method includes the following steps:
Step 1: zeroing, calibration.Using the electronic arc pendulum regulating platform of translation stage collocation two dimension and flat normal microscope group at standard
Reflection calibration component, is reflected back interferometer for reflection measurement light beam, adjusts displacement sensor 1# and displacement sensor 2# at this time, make
Test beams are by displacement sensor 1#, the center displacement sensor 2#, using the electronic arc pendulum regulating platform of two dimension respectively along X-direction
It turns an angle with Y-direction, and test beams is adjusted into go back to interferometer receiving portion using MEMS reflecting mirror, according to
It is obtained by the rotational angle that the obtained rotational angle of displacement sensor 1# and displacement sensor 2# and MEMS reflecting mirror input
To regulation coefficient matrix；
Step 2: installation testing element.Testing element is installed to and adjusted installation elements position, guarantees that Returning beam returns to
Interferometer receiving portion, all devices are in running order；
Step 3: starting to test.Testing element guarantees that interferometer has always valid data during the test, and programs
Record the facula position of the record of displacement sensor 1#, 2#, the survey of the adjusting position and interferometer of MEMS reflecting mirror
Measure result.
Step 4: data processing.Using computer by calibration result, displacement sensor record position result and micro-electro-mechanical systems
The adjusting position result of system reflecting mirror compensates interferometer test result, obtains the face shape result of actual test.
The advantages of the invention patent, is:
The present invention can test the complex-curved face shape of optical element, and the test scope of the device is wide, and measuring accuracy is high,
Visual field is big, can satisfy in optical manufacturing and tests the complex-curved face shape of optical element.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of adjustable interference position test device；
In figure: 1- interferometer；2- spectroscope；3- Amici prism；4- computer；5- position sensor 1#；6- position sensing
Device 2#；7- MEMS reflecting mirror；
Fig. 2 is installation process structural schematic diagram；
In figure: 8- standard reflection mirror；
Fig. 3 is calibration process structural schematic diagram；
Specific embodiment
Below with reference to embodiment, the invention will be further described, but should not be limited the scope of the invention with this.
Refering to fig. 1, Fig. 1 is the structural schematic diagram of adjustable interference position test device, and as can be seen, the present invention is adjustable
Interference position test device, comprising: laser interferometer 1, spectroscope 2, Amici prism 3, computer 4, position sensor 1#5, position
Set sensor 2#6, MEMS reflecting mirror 7.The laser interferometer 1 is fixed on two-dimension adjustment frame, and (pitching, inclination are adjusted
It is whole), the output end of laser interferometer 1 is connected with 4 input terminal of computer, the position that when test in real time tests laser interferometer 1
As a result it is transferred to computer 4；The spectroscope 2 is fixed on two-dimension adjustment frame (pitching, tilt adjustments)；The Amici prism is solid
It is scheduled on two-dimension adjustment frame (pitching, tilt adjustments)；The position sensor 1# and position sensor 2# is separately fixed at two tune
Whole frame (up and down, left and right adjustment), the output end of position sensor 1# and position sensor 2# respectively with the input terminal phase of computer 4
Even, the position result of position sensor 1# and position sensor 2# light spot received are transferred to computer 4 in real time when test；Microcomputer
Electric system reflecting mirror 7 is fixed on two-dimension adjustment frame, and 7 input terminal of MEMS reflecting mirror is connected with the output end of computer 4,
Pose adjustment signal is transferred to MEMS reflecting mirror 7 in real time by computer 4 when test.
Using the method for the above-mentioned measuring device measurement complex-curved face shape of optical element, comprising the following steps:
1) light output direction referring to fig. 2, which is tested, in the laser interferometer 1 is sequentially placed spectroscope 2, microelectromechanical-systems
Reflecting mirror 7 and reflecting mirror 8, spectroscope 2 tilt 44 ° to 46 ° placements, and anti-reflection film 2 (a) is located at interferometer side, semi-transparent semi-reflecting
Film 2 (b) is located at electric system reflecting mirror side, and the reflecting mirror 8 is fixed on electronic arc pendulum regulating platform, laser interferometer 1
Output end is connected with the input terminal of computer 4, and the input terminal of microelectromechanical-systems reflecting mirror 7 is connected with the output end of computer 4, adjusts
The fixed two-dimension adjustment frame of whole reflecting mirror 8 guarantees that the light returned can be received by laser interferometer 1；
2) referring to Fig. 3, on the direction of the output light of the semi-transparent semi-reflecting film 2 (b), Amici prism 3, Amici prism are placed
Placement location sensor 1#5 and position sensor 2#6 is distinguished on 3 two outbound courses, uses ruler measurement position sensor
2#6 and 3 distance of Amici prism and measurement position sensor 1#5 and 3 distance of Amici prism, and calculate range difference D；
3) referring to Fig. 3, the fixed two-dimension adjustment frame of the displacement sensor 1#5 is adjusted, so that the hot spot of test is located at
It adjusts displacement sensor 1#5 and tests center sensor, and record current position signal (Xo1,Y01), similarly adjust displacement sensor
2#6 fixed two-dimension adjustment frame, and record current position signal (Xo2,Y02)；
4) referring to Fig. 3, the electronic arc pendulum regulating platform of the fixed two dimension of the reflecting mirror 8 rotates θ along X-directionx, record
The current location displacement sensor 1#5 and (Xo1,Y01) relative position deflection (Xx1,Yx1), record the current location displacement sensor 2#6
With (Xo2,Y02) at relative position deflect (Xx2,Yx2), according to 1 unit of account twist vector of formula3 times turns
Move different deflection angle thetasx1、θx2、θx3And calculate separately unit twist vectorDue to unit twist vector
And θxRelationship is as shown in formula 2, is fitted to obtain deflection factor (A using least square methodx,Bx,Cx)；
5) referring to Fig. 3, the electronic arc pendulum regulating platform of the fixed two dimension of the reflecting mirror 8 rotates θ along Y directiony, record
The current location displacement sensor 1#5 and (Xo1,Y01) relative position deflection (Xy1,Yy1), record the current location displacement sensor 2#6
With (Xo2,Y02) at relative position deflect (Xy2,Yy2), unit of account twist vectorIt is calculated according to formula 3
Unit twist vectorRotate different deflection angle thetas 3 timesy1、θy2、θy3And calculate separately unit twist vectorDue to unit twist vectorAnd θyRelationship is as shown in formula 4, is fitted to obtain partially using least square method
Transfer from one department to another number (Ay,By,Cy)；
6) referring to Fig. 3, the electronic arc pendulum regulating platform of the fixed two dimension of the reflecting mirror 8 turns respectively along X-axis and Y direction
Dynamic θxAnd θy.Record the current location displacement sensor 1#5 and (Xo1,Y01) relative position deflection (X1,Y1), record displacement sensor
The current location 2#6 and (Xo2,Y02) at relative position deflect (X2,Y2), according to 5 unit of account twist vector of formulaThe MEMS reflecting mirror 7 is first rotated along after X-axis along Y-axis, and records relative swing position
And unit of account twist vector againUntilMEMS reflecting mirror 7 is along X-axis rotational angle at this timeAlong Y-axis rotational angleThe unit turn vector of MEMS reflecting mirror 7 is calculated according to formula 6
7) it is repeated 3 times step 6 and obtains 3 groups of unit turn vectorsWith unit twist vector
It is fitted according to formula 7 using least square method, is adjusted coefficient matrix E；
8) referring to Fig. 1, the reflecting mirror 8 is removed into optical path, and testing element surface, table are placed at 8 position of reflecting mirror
Face normal direction is opposite with output test light direction, and the fixed two-dimension adjustment frame of testing element guarantees that the light returned can be swashed
Optical interferometer 1 receives, and records displacement sensor 1#5 current position signal (Xeo1,Yeo1), record displacement sensor 2#6 present bit
Confidence number (Xeo2,Yeo2), measurement testing element and displacement sensor 1#5 distance K；
9) along measurement direction moving element, the record of computer 4 this moment the current position signal of displacement sensor 1#5 with
(Xeo1,Yeo1) relative position defection signal (Xe1,Ye1), record current location and the (X of displacement sensor 2#6eo2,Yeo2)
Relative position defection signal (Xe2,Ye2), according to 8 unit of account twist vector of formulaMEMS is calculated according to formula 9
7 rotational angle of reflecting mirrorAnd rotational angleComputer 4 controls MEMS reflecting mirror 7 along X-axis rotational angle
Along Y-axis rotational angleAnd record present laser interferometer 1 test displacement variable Δ Z, according to formula 2, formula 4 and
Unit twist vectorCalculate deflection angle thetaxAnd θy；
10) referring to Fig. 1, test terminates, and is fitted component side shape, fit procedure according to element movement and displacement variable Δ Z
In need to calibrate test point position, actual coordinate x, y and coordinates of motion x0、y0Relationship it is as shown in formula 10；
11) referring to Fig. 1, testing practical face shape S is using rotational angleIt is tied after being calibrated to displacement variation delta Z
Fruit.It tests practical face shape S and displacement variable Δ Z relationship is as shown in formula 11.
Experiment shows the present invention using laser interference principle, tests visual field < 20 °, test scope < 1m, test repeatability <
100nm, precision < 0.1 μm realize the complex-curved face shape test of optical element.
Claims (8)
1. a kind of adjustable interference position test device characterized by comprising laser interferometer (1), spectroscope (2), light splitting
Prism (3), computer (4), position sensor 1# (5), position sensor 2# (6), MEMS reflecting mirror (7)；
The spectroscope (2) is coated with anti-reflection film (2 (a)) on one side, and another side is coated with semi-transparent semi-reflecting film (2 (b))；
Laser interferometer (1) output light is incident on described after the transmission of the anti-reflection film (2 (a)) of the spectroscope (2)
MEMS reflecting mirror (7), through the MEMS reflecting mirror (7) reflection after, directive element surface to be tested, through to be measured
After trying element surface reflection, along backtracking, it is incident on the spectroscope (2) after MEMS reflecting mirror (7) reflection,
Semi-transparent semi-reflecting film (2 (b)) through the spectroscope (2) is divided into reflected light and transmitted light, and the transmitted light is by laser interferometer (1)
It receiving, the reflected light is incident on Amici prism (3), is divided into the second reflected light and the second transmitted light through the Amici prism (3),
Second reflected light is received by position sensor 2# (6), and second transmitted light is received by position sensor 1# (5)；
The spacing and position sensor 1# (5) of the position sensor 2# (6) and Amici prism (3) and Amici prism (3)
Spacing etc.；
The output end of the laser interferometer (1) is connected with computer (4) input terminal, the position sensor 1#'s (5)
The output end of output end and position sensor 2# (6) are connected with the input terminal of computer (4) respectively, MEMS reflecting mirror
(7) input terminal is connected with the output end of computer (4).
2. adjustable interference position test device according to claim 1, which is characterized in that the spectroscope (2) is put
Angle setting degree is 44 °~46 °.
3. adjustable interference position test device according to claim 1 or 2, which is characterized in that the spectroscope (2)
The otpical leaf of plated film is distinguished for two sides, 0.5~10mm of diameter range, 0.1~1mm of thickness, the depth of parallelism is less than 2 ", thin slice both sides
It is coated with semi-transparent semi-reflecting film (mixed polarized, transmitance: 50% ± 3%) and anti-reflection film (mixed polarized, transmitance > respectively
99.8%).
4. adjustable interference position test device according to claim 1, which is characterized in that the Amici prism (3)
For polarization splitting prism, 1/4 λ (λ=632.8nm) of face shape PV <, through parameter (Tp > 95%, Ts < 1%), reflection parameters
(Rs > 99%, Rp < 5%).
5. adjustable interference position test device according to claim 1, which is characterized in that the position sensor 1#
(5) and position sensor 2# (6) is transversal effect position sensor, and the resolution ratio of transversal effect position sensor is less than 2 μm.
6. adjustable interference position test device according to claim 1, which is characterized in that the MEMS is anti-
The quick deflection of light beam, 1~20kHz of response frequency, 0.5~5.0mm of mirror diameter, machinery rotation can be completed by penetrating mirror (7)
- 10 ° of range~10 °.
7. adjustable interference position test device according to claim 1, which is characterized in that the laser interferometer
(1), position sensor 1# (5), position sensor 2# (6) and MEMS reflecting mirror (7) are both placed on two-dimension adjustment frame.
8. the measurement method of interference position is carried out using the adjustable interference position test device as claimed in claim 1 to 7,
It is characterized in that, method includes the following steps:
1) reflecting mirror (8) is fixed on the electronic arc pendulum regulating platform of two dimension, and the electronic arc pendulum regulating platform of the two dimension and computer (4)
It is connected, adjusts the electronic arc of two dimension and put regulating platform, guarantee laser interferometer (1) output light successively through spectroscope (2), MEMS
After reflecting mirror (7) and reflecting mirror (8), received along backtracking, and by laser interferometer (1)；
2) using ruler measurement position sensor 2# (6) and Amici prism (3) distance and measurement position sensor 1# (5) and light splitting
Prism (3) distance, and calculate range difference D；
3) the two-dimension adjustment frame of displacement sensor 1# (5) is placed in adjustment, and the displacement sensor 1# (5) received hot spot is made to be located at position
The center of displacement sensor 1# (5) records current position signal (Xo1, Y01)；The two dimension that displacement sensor 2# (6) are placed in adjustment is adjusted
Whole frame makes the displacement sensor 2# (6) received hot spot be located at the center of displacement sensor 2# (6), and records present bit confidence
Number (Xo2, Y02)；
4) the electronic arc of rotation two dimension puts regulating platform, it is made to rotate θ along the X-direction of the electronic arc pendulum regulating platform of the two dimensionx, record
The current position signal of displacement sensor 1# (5) and (X this momento1, Y01) relative position defection signal (Xx1, Yx1), record displacement
The current location of sensor 2# (6) and (Xo2, Y02) relative position defection signal (Xx2, Yx2)；
Calculate X-axis unit twist vectorFormula is as follows:
In formula,
N times rotate different deflection angles and calculate separately unit twist vector, and n >=3, due to unit twist vectorAnd θxRelationship
As follows, n group data can be used least square method and be fitted to obtain deflection factor (Ax, Bx, Cx)；
Ax·xx+Bx·yx+Cx·zx=θx (2)
5) the electronic arc of rotation two dimension puts regulating platform, it is made to rotate θ along the Y direction of the electronic arc pendulum regulating platform of the two dimensiony, record
(5) current location displacement sensor 1# and (X this momento1, Y01) relative position defection signal (Xy1, Yy1), displacement passes record this moment
(6) current location sensor 2# and (Xo2, Y02) place relative position deflection (X this momenty2, Yy2)；
Calculate Y-axis unit twist vectorFormula is as follows:
In formula,
N times rotate different deflection angles and calculate separately unit twist vector, and n >=3, due to unit twist vectorAnd θxRelationship
As follows, n group data can be used least square method and be fitted to obtain deflection factor (Ay, By, Cy)；
Ay·xy+By·yy+Cy·zy=θy (4)
6) the electronic arc of rotation two dimension puts regulating platform, turns it respectively along the X-axis and Y direction of the electronic arc pendulum regulating platform of the two dimension
Dynamic θxAnd θy, record (5) current location displacement sensor 1# this moment and (Xo1, Y01) relative position defection signal (X1, Y1), record
(6) current location displacement sensor 2# and (X this momento2, Y02) at relative position defection signal (X2, Y2)；
Calculate X-axis and Y-axis unit twist vectorFormula is as follows:
In formula,
7) it is rotated using computer (4) control MEMS reflecting mirror (7), makes its elder generation along MEMS reflecting mirror (7)
X-direction rotationFurther along the Y direction rotation of MEMS reflecting mirror (7)And record displacement sensor this moment
1# (5) relative position defection signal and this moment the relative position defection signal of displacement sensor 2# (6), recalculate X according to formula 5
Axis and Y-axis unit twist vectorUntil
Calculate the unit turn vector of MEMS reflecting mirror (7)Formula is as follows:
In formula,
N times rotate different deflection angles and calculate separately unit turn vector, and n >=3, due to unit turn vectorIt is inclined with unit
Steering volumeRelationship is shown below, and E is regulation coefficient matrix in formula, indicates by unit twist vectorInverse unit turn to
AmountInstitute's multiplying factor is adjusted coefficient matrix E with least square method fitting is all,
8) reflecting mirror (8) are removed into optical path, and places element to be tested at reflecting mirror (8) position, keep the element to be tested solid
It is scheduled on two-dimension adjustment frame, and the testing element surface normal direction is opposite with the output light direction of laser interferometer (1),
Guarantee that the light returned can be received by laser interferometer (1), records displacement sensor 1# (5) current position signal (Xeo1, Yeo1),
Record displacement sensor 2# (6) current position signal (Xeo2, Yeo2), measure the light of element to be tested Yu displacement sensor 1# (5)
Road distance K；
9) along measurement direction moving element, computer (4) record this moment the current position signal of displacement sensor 1# (5) with
(Xeo1, Yeo1) relative position defection signal (Xe1, Ye1), record current location and the (X of displacement sensor 2# (6)eo2, Yeo2)
Relative position defection signal (Xe2, Ye2)；
Calculate X-axis and Y-axis unit twist vectorFormula is as follows:
In formula,
Calculate MEMS reflecting mirror (7) rotational angleAnd rotational angleFormula is as follows:
10) computer (4) control MEMS reflecting mirror (7) is along X-axis rotational angleAlong Y-axis rotational angleAnd
The displacement variable Δ Z for recording present laser interferometer (1) test, according to formula 2, formula 4 and unit twist vectorMeter
Calculate deflection angle thetaxAnd θy；
11) move to obtain element test position x in test process according to element0、y0, practical test points are obtained according to formula fitting
Position xr、yr, formula is as follows:
12) rotational angle is usedDisplacement variation delta Z is calibrated to obtain and tests practical face shape S, test practical face shape S and
Displacement variable Δ z relationship is as follows:
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| CN111060143A (en) * | 2019-12-18 | 2020-04-24 | 重庆大学 | Rotor axial distance, rotating speed and inclination angle synchronous measurement method based on sweep frequency interference |
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