CN106247946A - A kind of four-degree-of-freedom laser measurement system - Google Patents
A kind of four-degree-of-freedom laser measurement system Download PDFInfo
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- CN106247946A CN106247946A CN201610548502.7A CN201610548502A CN106247946A CN 106247946 A CN106247946 A CN 106247946A CN 201610548502 A CN201610548502 A CN 201610548502A CN 106247946 A CN106247946 A CN 106247946A
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- light
- displacement
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- position detection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention relates to the four-degree-of-freedom laser measurement system of a kind of improvement.Devices and lens are detected including plane mirror, light reflector, 90 ° of reflecting mirrors, Amici prism, laser instrument, two facula positions.Wherein plane mirror and light reflector constitute target mirror system, and remaining device constitutes emitting-receiving system.Laser instrument sends laser and is divided into orthogonal two-beam line through Amici prism, and light beam is beaten on an angle hot spot position detection device；Another light beam is beaten on another displacement facula position detection device；Realize displacement and the angular metric of two degree of freedom of two degree of freedom of Measuring Object simultaneously.The present invention only uses an Amici prism so that the light ray energy for displacement measurement and angular surveying increases, and promotes the signal to noise ratio of light receiving element, reduces the impact of random error；Displacement measurement light and angular surveying light are mutually isolated, are independent of each other, and eliminate existing measurement system perspective and measure the systematic error causing displacement measurement.
Description
Technical field
The invention belongs to field of optical measuring technologies, be specifically related to a kind of four-degree-of-freedom laser measurement system.
Background technology
At present, the plant equipment that commercial production is relied on often has multiple freedom of motion, along with increasing of degree of freedom,
Its error term increases the most therewith.Such as, for 3 common shaft vertical machining centers, its geometric error the most up to 21 to, be respectively
The position error of 3 directions of motion, straightness error, pitching, beat, windup-degree error, and each direction of motion are with another
The error of perpendicularity between outer two directions of motion.The single-degree-of-freedom that compares displacement measurement system, four-degree-of-freedom measures system can
The error of four degree of freedom is measured simultaneously, greatly reduce measurement difficulty, and cost.
At present, existing four-degree-of-freedom measures system, all uses laser measurement, such as: a kind of laser multi freedom measures system
System and method, and a kind of device utilizing diffraction light-free to measure guide rail four-degree-of-freedom kinematic error；Be all by light splitting and
Turn back and penetrate principle so that the laser beam after light splitting finally has two bundles to beat respectively to be fixed on two target mirror mirrors of testee
On sheet, target mirror eyeglass includes the eyeglass for angular surveying and the eyeglass for displacement measurement.When measured object is subjected to displacement and angle
During degree variation, translation or the angle change of target mirror emergent ray can be caused, changed by light receiving element detection translation or angle
Amount thus inverse goes out displacement and the angles shifts amount of measured object.
Existing four-degree-of-freedom laser measurement system, needs to carry out light repeatedly light splitting for realizing its principle, but finally
Light for measuring only has two bundles, and other light go out of use, and cause the significant wastage of luminous energy.Ultimately result in light receiving element
Output signal-noise ratio declines so that the impact of random error increases the weight of.Additionally, the light for displacement measurement can be by for angle
The eyeglass that degree is measured, causes angle measurement displacement measurement can be produced certain impact to measure system many one
Extra systematic error.Comprehensively cause the decline of existing measurement system accuracy.
Summary of the invention
In order to improve the certainty of measurement of four-degree-of-freedom laser measurement system further, being improved by structure, the present invention provides
A kind of four-degree-of-freedom laser measurement system.
A kind of four-degree-of-freedom laser measurement system includes plane mirror 1, light reflector 2,90 ° of reflecting mirrors 3, light splitting ribs
Mirror 4, laser instrument 5, displacement facula position detection device 6, lens 7 and angle hot spot position detection device 8；
Described plane mirror 1 and light reflector 2 constitute target mirror system, and remaining device constitutes emitting-receiving system；
Along the direction of the emergent light of described laser instrument 5, it is arranged in order and is provided with Amici prism 4 and light reflector 2；
The side of described Amici prism 4 is sequentially provided with lens 7 and angle hot spot position detection device 8；And lens 7 and angle hot spot
The light path that position detection device 8 is constituted is perpendicular to the direction of laser instrument 5 emergent light；
The opposite side of described Amici prism 4 is sequentially provided with 90 ° of reflecting mirrors 3 and plane mirror 1, and wherein 90 ° of reflecting mirrors 3 abutted to
The light path that Amici prism 4,90 ° of reflecting mirrors 3 and plane mirror 1 are constituted is parallel to the direction of the emergent light of laser instrument 5；
Described light reflector 2 is located at the side of plane mirror 1, and light reflector 2 correspond to Amici prism 4 and displacement respectively
Facula position detection device 6, displacement facula position detection device 6 is positioned at the side of laser instrument 5；
During work, laser instrument 5 sends laser and is divided into orthogonal two-beam line through Amici prism 4, and a branch of priority is through 90 °
Reflecting mirror 3, plane mirror 1,90 ° of reflecting mirrors 3, Amici prism 4, lens 7 reflect or reflect, and beat at an angle facula position
Detection device 8；If target mirror system generation beat and pitching change, the light beaten on angle hot spot position detection device 8 can be caused
Speckle shift in position, indirectly measures beat and the luffing angle of target mirror system by measuring facula position variation；Another light beam warp
Cross light reflector 2 reflect or reflect, beat on another displacement facula position detection device 6, if target mirror system occurs up and down
Change with left and right displacement, the facula position variation beaten on displacement facula position detection device 6 can be caused, by measuring hot spot position
Put variation and indirectly measure the displacement of target mirror system；The displacement of realization two degree of freedom of Measuring Object simultaneously and two freedom
The angular metric of degree.
The technical scheme limited further is as follows:
Described light reflector 2 is prism of corner cube or cat's-eye reflector.
Described displacement facula position detection device 6 and angle hot spot position detection device 8 are PSD position sensitive device or four-quadrant
Limit photelectric receiver or CCD photelectric receiver.
The Advantageous Effects of the present invention is embodied in following aspect:
1. the present invention only used an Amici prism, utilizes completely reflecting mirror to replace light splitting eyeglass as far as possible, reduces light
Light splitting so that the light ray energy for displacement measurement and angular surveying increases, and promotes the signal to noise ratio of light receiving element, reduces random
The impact of error.
2. displacement measurement light and the angular surveying light of the present invention are mutually isolated, are independent of each other, eliminate existing measurement
System perspective measures the systematic error causing displacement measurement.
Accompanying drawing explanation
Fig. 1 is present system structure chart；
Fig. 2 is present system principle the first exploded view；
Fig. 3 is present system principle the second exploded view；
Sequence number in upper figure: plane mirror 1, light reflector 2,90 ° of reflecting mirrors 3, Amici prism 4, laser instrument 5, displacement hot spots
Position detection device 6, lens 7, angle hot spot position detection device 8.
Detailed description of the invention
Below in conjunction with the accompanying drawings, by embodiment, the present invention is further described.
Seeing Fig. 1, a kind of four-degree-of-freedom laser measurement system includes plane mirror 1,2,90 ° of reflecting mirrors of light reflector
3, Amici prism 4, laser instrument 5, displacement facula position detection device 6, lens 7 and angle hot spot position detection device 8；Light is anti-
Emitter 2 is prism of corner cube；Displacement facula position detection device 6 and angle hot spot position detection device 8 are PSD position sensitive device.
Plane mirror 1 and light reflector 2 constitute target mirror system, and remaining device constitutes emitting-receiving system.
Along the direction of the emergent light of described laser instrument 5, it is arranged in order and is provided with Amici prism 4 and light reflector 2；
The side of described Amici prism 4 is sequentially provided with lens 7 and angle hot spot position detection device 8；And lens 7 and angle hot spot
The light path that position detection device 8 is constituted is perpendicular to the direction of laser instrument 5 emergent light；
The opposite side of described Amici prism 4 is sequentially provided with 90 ° of reflecting mirrors 3 and plane mirror 1, and wherein 90 ° of reflecting mirrors 3 abutted to
The light path that Amici prism 4,90 ° of reflecting mirrors 3 and plane mirror 1 are constituted is parallel to the direction of the emergent light of laser instrument 5；
Described light reflector 2 is located at the side of plane mirror 1, and light reflector 2 correspond to Amici prism 4 and displacement respectively
Facula position detection device 6, displacement facula position detection device 6 is positioned at the side of laser instrument 5.
Below the operation principle of four-degree-of-freedom laser measurement system is described in detail:
The first step
The A as in figure 2 it is shown, laser instrument 5 emits beam, is divided into two bundles orthogonal light B and C through Amici prism 4, wherein
Light B changes 90 ° in the direction of propagation after 90 ° of reflecting mirror 3 reflections, beats on plane mirror 1 for follow-up angular surveying.Light
Line C moves on, and reflexes to displacement facula position detection device 6 through light reflection device 2, for displacement measurement.Displacement measurement
Principle is with tradition four-degree-of-freedom laser measurement system, as follows: when light reflection device 2 prolongs X-direction or Y-direction is subjected to displacement, to beat
The change that hot spot on displacement facula position detection device 6 can produce accordingly, displacement facula position detection device 6 is by by light
Speckle change in location is converted into the signal of telecommunication to obtain the displacement of light reflection device 2.
Second step
As it is shown on figure 3, light B through plane mirror 1 reflect after formed light E, light E through 90 ° of reflecting mirrors 3 reflect rear to
Changing 90 ° to beat on Amici prism 4, be divided into two bundles orthogonal light F and G, light F goes out of use, and light G passes through lens
7 dozens are used for angular surveying on angle hot spot position detection device 8, and angular surveying principle is similar to autocollimator, as follows: work as plane
Reflecting mirror 1, when X or Y-axis generation angle change, can cause the change of the angle generation twice of light E, cause light G at lens
The angle of incidence of 7 changes, and angle hot spot position detection device 8 is positioned on the focal plane of lens 7, when the incident angle of light G
After change, beat the facula position on angle hot spot position detection device 8 also can respective change, angle hot spot position detection device
8 by being converted into the signal of telecommunication carry out the angle variable quantity of inverse plane mirror 1 by facula position change.
Why add lens 7, be the impact in order to eliminate plane mirror 1 displacement, as follows: the plane measuring angle is anti-
The light reflection device 2 penetrating mirror 1 and measurement displacement is one, so plane mirror 1 is subjected to displacement change unavoidably, causes light
E and G translates, if being not added with lens 7, then the translation of light G can cause the light on angle hot spot position detection device 8 equally
The change of speckle position, produces impact to angular surveying.After lens 7, according to the ultimate principle of lens: directional light is through lens
A bit on focal plane can be converged in.Understand, be parallel before and after light G translation, all beat on focal plane after lens 7 reflect
A bit, so, as long as angle hot spot position detection device 8 is placed on the focal plane of lens 7, so that it may eliminate displacement and angle is surveyed
The impact of amount.
Claims (3)
1. a four-degree-of-freedom laser measurement system, it is characterised in that: include plane mirror (1), light reflector (2), 90 °
Reflecting mirror (3), Amici prism (4), laser instrument (5), displacement facula position detection device (6), lens (7) and angle facula position
Detection device (8)；
Described plane mirror (1) and light reflector (2) constitute target mirror system, and remaining device constitutes emitting-receiving system；
Along the direction of the emergent light of described laser instrument (5), it is arranged in order and is provided with Amici prism (4) and light reflector (2)；
The side of described Amici prism (4) is sequentially provided with lens (7) and angle hot spot position detection device (8)；And lens (7) and
The light path that angle hot spot position detection device (8) is constituted is perpendicular to the direction of laser instrument (5) emergent light；
The opposite side of described Amici prism (4) is sequentially provided with 90 ° of reflecting mirrors (3) and plane mirror (1), wherein 90 ° of reflecting mirrors
(3) abutted to Amici prism (4), the light path that 90 ° of reflecting mirrors (3) and plane mirror (1) are constituted is parallel to going out of laser instrument (5)
Penetrate the direction of light；
Described light reflector (2) is located at the side of plane mirror (1), and light reflector (2) correspond to Amici prism respectively
(4) and displacement facula position detection device (6), displacement facula position detection device (6) is positioned at the side of laser instrument (5)；
During work, laser instrument (5) sends laser and is divided into orthogonal two-beam line, warp after a branch of elder generation through Amici prism (4)
Cross 90 ° of reflecting mirrors (3), plane mirror (1), 90 ° of reflecting mirrors (3), Amici prism (4), lens (7) reflect or reflect, and beat
One angle hot spot position detection device (8)；If target mirror system generation beat and pitching change, can cause and beat in angle hot spot position
Put the facula position variation in detection device (8), by measure facula position variation indirectly measure target mirror system beat and
Luffing angle；Another light beam reflects through light reflector (2) or reflects, and beats and detects device at another displacement facula position
(6), on, if target mirror system occurs up and down and left and right displacement change, can cause and beat on displacement facula position detection device (6)
Facula position changes, and indirectly measures the displacement of target mirror system by measuring facula position variation；Realize Measuring Object simultaneously
The displacement of two degree of freedom and the angular metric of two degree of freedom.
A kind of four-degree-of-freedom laser measurement system the most according to claim 1, it is characterised in that: described light reflector
(2) it is prism of corner cube or cat's-eye reflector.
A kind of four-degree-of-freedom laser measurement system the most according to claim 1, it is characterised in that: described displacement facula position
Detection device (6) and angle hot spot position detection device (8) are PSD position sensitive device or four-quadrant photelectric receiver or CCD light
Electricity receptor.
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| CN201610548502.7A CN106247946B (en) | 2016-07-13 | 2016-07-13 | A kind of four-degree-of-freedom laser measurement system |
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| CN201610548502.7A CN106247946B (en) | 2016-07-13 | 2016-07-13 | A kind of four-degree-of-freedom laser measurement system |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108548488A (en) * | 2018-05-02 | 2018-09-18 | 大连理工大学 | A kind of error-detecting of high-precision laser measuring system and separation method |
| CN109186470A (en) * | 2018-11-06 | 2019-01-11 | 南京林业大学 | A kind of mounting distance can automatic adjusument laser displacement sensor |
| CN110864631A (en) * | 2019-11-19 | 2020-03-06 | 北京东软医疗设备有限公司 | Detection device and detection method |
| CN111384655A (en) * | 2020-03-25 | 2020-07-07 | 龙天洋 | Self-feedback high-stability laser pulse compressor |
| CN111856428A (en) * | 2020-07-01 | 2020-10-30 | 南京理工大学 | 360-degree all-around low-cost three-dimensional imaging sensor |
| CN112902838A (en) * | 2021-01-19 | 2021-06-04 | 上海集成电路装备材料产业创新中心有限公司 | Zero sensor and detection system |
| CN114440766A (en) * | 2022-01-12 | 2022-05-06 | 北京交通大学 | System for simultaneously measuring six-degree-of-freedom motion error of rotating shaft |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101545761A (en) * | 2009-05-06 | 2009-09-30 | 湖北工业大学 | Optical measuring system with multiple degrees of freedom |
| DE102010042749A1 (en) * | 2009-12-11 | 2011-06-16 | Carl Zeiss Smt Gmbh | Precision clamping tool for processing optical element of optical system in microlithography, has cutting plates supported on disk such that plates are individually adjustable in position in two or four degrees of freedom |
| CN103983214A (en) * | 2014-05-30 | 2014-08-13 | 湖北工业大学 | Device for measuring four-freedom-degree kinematic errors of guide rail through non-diffraction light |
| CN104266583A (en) * | 2014-10-14 | 2015-01-07 | 合肥工业大学 | Multi-degree-of-freedom measuring system |
| CN104634283A (en) * | 2015-02-06 | 2015-05-20 | 浙江理工大学 | Laser heterodyne interference linearity measuring device and laser heterodyne interference linearity measuring method with six-degree-of-freedom detection |
| CN105737765A (en) * | 2016-04-06 | 2016-07-06 | 合肥工业大学 | Four-freedom degree optical measuring head based on semiconductor laser assembly |
-
2016
- 2016-07-13 CN CN201610548502.7A patent/CN106247946B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101545761A (en) * | 2009-05-06 | 2009-09-30 | 湖北工业大学 | Optical measuring system with multiple degrees of freedom |
| DE102010042749A1 (en) * | 2009-12-11 | 2011-06-16 | Carl Zeiss Smt Gmbh | Precision clamping tool for processing optical element of optical system in microlithography, has cutting plates supported on disk such that plates are individually adjustable in position in two or four degrees of freedom |
| CN103983214A (en) * | 2014-05-30 | 2014-08-13 | 湖北工业大学 | Device for measuring four-freedom-degree kinematic errors of guide rail through non-diffraction light |
| CN104266583A (en) * | 2014-10-14 | 2015-01-07 | 合肥工业大学 | Multi-degree-of-freedom measuring system |
| CN104634283A (en) * | 2015-02-06 | 2015-05-20 | 浙江理工大学 | Laser heterodyne interference linearity measuring device and laser heterodyne interference linearity measuring method with six-degree-of-freedom detection |
| CN105737765A (en) * | 2016-04-06 | 2016-07-06 | 合肥工业大学 | Four-freedom degree optical measuring head based on semiconductor laser assembly |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108548488A (en) * | 2018-05-02 | 2018-09-18 | 大连理工大学 | A kind of error-detecting of high-precision laser measuring system and separation method |
| CN108548488B (en) * | 2018-05-02 | 2019-06-21 | 大连理工大学 | A kind of error-detecting of high-precision laser measuring system and separation method |
| CN109186470A (en) * | 2018-11-06 | 2019-01-11 | 南京林业大学 | A kind of mounting distance can automatic adjusument laser displacement sensor |
| CN110864631A (en) * | 2019-11-19 | 2020-03-06 | 北京东软医疗设备有限公司 | Detection device and detection method |
| CN110864631B (en) * | 2019-11-19 | 2021-10-08 | 北京东软医疗设备有限公司 | Detection device and detection method |
| CN111384655A (en) * | 2020-03-25 | 2020-07-07 | 龙天洋 | Self-feedback high-stability laser pulse compressor |
| CN111384655B (en) * | 2020-03-25 | 2023-03-14 | 龙天洋 | Self-feedback high-stability laser pulse compressor |
| CN111856428A (en) * | 2020-07-01 | 2020-10-30 | 南京理工大学 | 360-degree all-around low-cost three-dimensional imaging sensor |
| CN112902838A (en) * | 2021-01-19 | 2021-06-04 | 上海集成电路装备材料产业创新中心有限公司 | Zero sensor and detection system |
| CN114440766A (en) * | 2022-01-12 | 2022-05-06 | 北京交通大学 | System for simultaneously measuring six-degree-of-freedom motion error of rotating shaft |
| CN114440766B (en) * | 2022-01-12 | 2023-12-26 | 北京交通大学 | System for simultaneously measuring six-degree-of-freedom motion errors of rotating shaft |
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