CN103615972A - Optical interferometer used for detecting inner surface of hollow cylinder - Google Patents

Optical interferometer used for detecting inner surface of hollow cylinder Download PDF

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Publication number
CN103615972A
CN103615972A CN201310585701.1A CN201310585701A CN103615972A CN 103615972 A CN103615972 A CN 103615972A CN 201310585701 A CN201310585701 A CN 201310585701A CN 103615972 A CN103615972 A CN 103615972A
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CN
China
Prior art keywords
convex lens
hollow cylinder
conical mirror
splitter
collimation
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Application number
CN201310585701.1A
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Chinese (zh)
Inventor
韩森
李雪园
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苏州慧利仪器有限责任公司
韩森
李雪园
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Application filed by 苏州慧利仪器有限责任公司, 韩森, 李雪园 filed Critical 苏州慧利仪器有限责任公司
Priority to CN201310585701.1A priority Critical patent/CN103615972A/en
Publication of CN103615972A publication Critical patent/CN103615972A/en

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Abstract

The invention discloses an optical interferometer used for detecting the inner surface of a hollow cylinder. The inner surface is located on the inner side or the outer side in the circumferential direction of the hollow cylinder, a condensation convex lens of the inner surface is located between a laser and a collimation convex lens, and the focus of the condensation convex lens and the focus of the collimation convex lens coincide; a beam splitter located between the condensation convex lens and the collimation convex lens is used for dividing light of an auto-collimation convex lens into a first light beam and a second light beam; a standard optical flat is located on one side, back to the beam splitter, of the collimation convex lens, the surface, facing the collimation convex lens, of the standard optical flat is a convex surface, and the surface, back to the convex surface, of the standard optical flat is a standard reference surface; a conical reflector is located in the hollow cylinder to be detected, and a rotary shaft of the conical reflector, the axis of the hollow cylinder and the axis of the standard optical flat coincide. According to the optical interferometer, feature information of the inner surface in the whole stereoscopic hollow cylinder can be obtained at a time, and test efficiency, accuracy and reliability are also greatly improved.

Description

Optical interdferometer for detection of hollow cylinder inside surface

Technical field

The present invention relates to optical detection apparatus, relate in particular to a kind of optical interdferometer for detection of hollow cylinder inside surface.

Background technology

Interference of light technology is modern times one of the most accurate effective measuring technologies, it integrates contemporary state-of-the-art technology, extensively adopt the newest fruits in the fields such as computer technology, laser technology, electronic technology, semiconductor technology, can complete quickly and accurately the check to optical element and system.At optical workshop of today, design processing and check debuging, proofreading and correct and testing to optical system from optical element, interferometer has become a kind of easy operating, reliable, high precision, intelligentized requisite test verification device, and it has immeasurable effect in the production in enormous quantities of optical element and system and check.

But existing interferometer often detects pattern deviation for face shape, for example bending or local bending or embossed area, detect and need repeatedly repeatedly to detect for the pattern of three-dimensional surface shape, can not once obtain whole three-dimensional surface shape patterns; Secondly, existing interferometer accuracy of detection and reliability are easily subject to the such environmental effects such as extraneous vibration and temperature, air-flow.Therefore, how to design the high precision of the whole stereo hollow internal surface of column of a kind of disposable acquisition pattern information, the optical interdferometer of reliability, become the direction that those skilled in the art make great efforts.

Summary of the invention

The invention provides a kind of optical interdferometer for detection of hollow cylinder inside surface, this optical interdferometer has been realized the whole stereo hollow internal surface of column of disposable acquisition pattern information, has also greatly improved testing efficiency, precision and reliability simultaneously.

For achieving the above object, the technical solution used in the present invention is: a kind of optical interdferometer for detection of hollow cylinder inside surface, described inside surface along hollow cylinder circumferentially and be positioned at inner side, comprise laser instrument, optically focused convex lens, beam splitter, as collimation convex lens, standard optic plane glass crystal and the conical mirror of object lens, described optically focused convex lens between laser instrument and collimation convex lens and the focus of optically focused convex lens overlap with the focus that collimates convex lens; Described beam splitter is between optically focused convex lens and collimation convex lens, and for future, the light of autocollimation convex lens is divided into the first light beam and the second light beam; Described standard optic plane glass crystal is positioned at the opposing side of collimation convex lens and beam splitter, and this standard optic plane glass crystal surface opposing with collimating convex lens is standard flat;

Described conical mirror is positioned at described hollow cylinder to be detected, and the turning axle of conical mirror and hollow cylinder and standard optic plane glass crystal dead in line separately, the circular conical surface of described conical mirror and the inside surface of described hollow cylinder are placed face-to-face, thereby this conical mirror moves the inside surface scanning realizing hollow cylinder along axis;

Interference pattern receiving-member is positioned at described beam splitter one side, for receiving the second light beam from beam splitter.

It is as follows that technique scheme is further improved technical scheme:

1. in such scheme, when the inside surface of hollow cylinder and hollow cylindrical shaft line parallel, the circular conical surface of described conical mirror and the axis angle of conical mirror are 45 °; When the angle theta of the inside surface of hollow cylinder and hollow cylinder axis is obtuse angle, the cone angle of described conical mirror is obtuse angle; When the angle theta of the inside surface of hollow cylinder and hollow cylinder axis is acute angle, the cone angle of described conical mirror is acute angle.

2. in such scheme, described optically focused convex lens are provided with one first aperture with the focus overlapping position of collimation convex lens.

3. in such scheme, between described beam splitter and interference pattern receiving-member, be provided with a second orifice diaphragm.

4. in such scheme, described interference pattern receiving-member is CCD camera or imaging screen.

Because technique scheme is used, the present invention compared with prior art has following advantages:

1. the present invention is for detection of the optical interdferometer of hollow cylinder inside surface, its optically focused convex lens between laser instrument and collimation convex lens and the focus of optically focused convex lens overlap with the focus that collimates convex lens; Described beam splitter is between optically focused convex lens and collimation convex lens, and for future, the light of autocollimation convex lens is divided into the first light beam and the second light beam; Described standard optic plane glass crystal is positioned at collimation convex lens and the opposing side of beam splitter, this standard optic plane glass crystal surface opposing with collimating convex lens is standard flat, described conical mirror is positioned at described hollow cylinder to be detected, and the turning axle of conical mirror and hollow cylinder and standard optic plane glass crystal dead in line separately, realize the whole stereo hollow internal surface of column of real-time disposable acquisition pattern information, improved testing efficiency and precision.

2. the present invention is for detection of the optical interdferometer of hollow cylinder inside surface, its reference beam and measuring beam are through same light path, the variation of the environmental factor such as vibration and temperature, air-flow can produce common mode inhibition each other to external world, generally without shock insulation and constant temperature, also can obtain stable interference fringe, anti seismic efficiency is good, environmental requirement is low to external world, has greatly improved precision and reliability.

Accompanying drawing explanation

Accompanying drawing 1 is hollow cylinder one structural representation of the present invention;

Accompanying drawing 2 is the optical interdferometer structural representation for detection of accompanying drawing 1 hollow cylinder inside surface;

Accompanying drawing 3 is hollow cylinder two structural representations of the present invention;

Accompanying drawing 4 is the optical interdferometer structural representation for detection of accompanying drawing 3 hollow cylinder inside surfaces;

Accompanying drawing 5 is the structural representation that accompanying drawing 3 ring-shaped guide rails overturn after 180 °;

Accompanying drawing 6 is the optical interdferometer structural representation for detection of accompanying drawing 5 hollow cylinder inside surfaces;

Accompanying drawing 7 is Perfect Interferometry schematic diagram of the present invention.

In above accompanying drawing: 1, inside surface; 2, hollow cylinder; 3, laser instrument; 4, optically focused convex lens; 5, beam splitter; 6, collimation convex lens; 7, standard optic plane glass crystal; 71, standard flat; 8, conical mirror; 81, circular conical surface; 9, interference pattern receiving-member; 10, the first aperture; 11, second orifice diaphragm.

Embodiment

Below in conjunction with drawings and Examples, the invention will be further described:

Embodiment 1: a kind of optical interdferometer for detection of hollow cylinder inside surface, described inside surface 1 along hollow cylinder 2 circumferentially and be positioned at inner side, comprise laser instrument 3, optically focused convex lens 4, beam splitter 5, the collimation convex lens 6 as object lens, standard optic plane glass crystal 7 and conical mirror 8, described optically focused convex lens 4 between laser instrument 3 and collimation convex lens 6 and the focus of optically focused convex lens 4 overlap with the focus that collimates convex lens 6; Described beam splitter 5 between optically focused convex lens 4 and collimation convex lens 6, for future autocollimation convex lens 6 light be divided into the first light beam and the second light beam; Described standard optic plane glass crystal 7 is positioned at the opposing side of collimation convex lens 6 and beam splitter 5, and the opposing surface of this standard optic plane glass crystal 7 and collimation convex lens 6 is standard flat 71;

Described conical mirror 8 is positioned at described hollow cylinder 2 to be detected, and the turning axle of conical mirror 8 and hollow cylinder 2 and standard optic plane glass crystal 7 dead in line separately, the circular conical surface 81 of described conical mirror 8 is placed face-to-face with the inside surface 1 of described hollow cylinder 2, thereby this conical mirror 8 moves inside surface 1 scanning realizing hollow cylinder 2 along axis;

Interference pattern receiving-member 9 is positioned at described beam splitter 5 one sides, for receiving the second light beam from beam splitter 5.

Above-mentioned optically focused convex lens 4 are provided with one first aperture 10 with the focus overlapping position of collimation convex lens 6.

Between above-mentioned beam splitter 5 and interference pattern receiving-member 9, be provided with a second orifice diaphragm 11.

Above-mentioned interference pattern receiving-member 9 is CCD camera or imaging screen.

The inside surface of hollow cylinder and hollow cylindrical shaft line parallel, the circular conical surface of described conical mirror and the axis angle of conical mirror are 45 °, the vertical scanning of realizing whole hollow cylinder 2 inside surfaces by moving up and down conical mirror 8 detects.

Embodiment 2: a kind of optical interdferometer for detection of hollow cylinder inside surface, described inside surface 1 along hollow cylinder 2 circumferentially and be positioned at inner side, comprise laser instrument 3, optically focused convex lens 4, beam splitter 5, the collimation convex lens 6 as object lens, standard optic plane glass crystal 7 and conical mirror 8, described optically focused convex lens 4 between laser instrument 3 and collimation convex lens 6 and the focus of optically focused convex lens 4 overlap with the focus that collimates convex lens 6; Described beam splitter 5 between optically focused convex lens 4 and collimation convex lens 6, for future autocollimation convex lens 6 light be divided into the first light beam and the second light beam; Described standard optic plane glass crystal 7 is positioned at the opposing side of collimation convex lens 6 and beam splitter 5, and the opposing surface of this standard optic plane glass crystal 7 and collimation convex lens 6 is standard flat 71;

Described conical mirror 8 is positioned at described hollow cylinder 2 to be detected, and the turning axle of conical mirror 8 and hollow cylinder 2 and standard optic plane glass crystal 7 dead in line separately, the circular conical surface 81 of described conical mirror 8 is placed face-to-face with the inside surface 1 of described hollow cylinder 2, thereby this conical mirror 8 moves inside surface 1 scanning realizing hollow cylinder 2 along axis;

Interference pattern receiving-member 9 is positioned at described beam splitter 5 one sides, for receiving the second light beam from beam splitter 5.

Above-mentioned optically focused convex lens 4 are provided with one first aperture 10 with the focus overlapping position of collimation convex lens 6.

Between above-mentioned beam splitter 5 and interference pattern receiving-member 9, be provided with a second orifice diaphragm 11.

Above-mentioned interference pattern receiving-member 9 is CCD camera or imaging screen.

The angle of the inside surface of above-mentioned hollow cylinder and hollow cylinder axis is acute angle, as shown in Figure 3, can adopt two kinds of conical mirror 8, a kind of circular conical surface 81 angles of conical mirror 8 its left and right sides are obtuse angle, and circular conical surface 81 angles of another kind of conical mirror 8 its left and right sides are acute angle.

When detecting the hollow cylinder of accompanying drawing 3, the conical mirror 8 that circular conical surface 81 angles that use left and right side are obtuse angle, detects measured piece inside surface, and the vertical scanning of realizing whole hollow cylinder 2 inside surfaces by moving up and down conical mirror 8 detects;

When detecting the hollow cylinder of accompanying drawing 5, the conical mirror 8 that circular conical surface 81 angles that use left and right side are acute angle, detects measured piece inside surface, and the vertical scanning of realizing whole hollow cylinder 2 inside surfaces by moving up and down conical mirror 8 detects.

The present embodiment is for detection of the optical interdferometer of hollow cylinder inside surface, and the course of work is as follows.

The described light beam by laser instrument 3 outgoing is converged at aperture 10 places in the focus that collimates convex lens 6 by optically focused convex lens 4, light beam sees through beam splitter 5 by collimating convex lens 6 with parallel light emergence, is incident upon on standard optic plane glass crystal 7.The lower surface of standard optic plane glass crystal 7 is standard flats 71, the conical mirror 8 and vertical below that be put in standard optic plane glass crystal 7 coaxial with tested hollow cylinder 2, the circular conical surface of conical mirror 8 the inside surface 1 of corresponding hollow cylinder 2 be tested surface.Part light is from standard flat 71 reflections, and another part light is mapped on the inside surface 1 of measured piece through standard flat 71, by tested inside surface 1, is reflected back a part of light.This two parts light is all through beam splitter 5 reflections, and at emergent pupil, 11 places form two bright aperture pictures.By interference pattern receiving-member 9, be that CCD camera focusing is on the interference fringe localization face between canonical reference face 72 and the inside surface 1 of tested hollow cylinder 2 again, just can absorb on localization face by the interference pattern forming between canonical reference face 72 and tested inside surface 1, then the professional software in computing machine carries out corrugated recovery and information processing.As shown in Figure 1, during one-time detection, can only detect the first half of guide rail arc surface,

So tested hollow cylinder 2 will be turned over to turnback after one-time detection completes, the inside surface 1 that carries out the latter half detects.

Above-described embodiment is only explanation technical conceive of the present invention and feature, and its object is to allow person skilled in the art can understand content of the present invention and implement according to this, can not limit the scope of the invention with this.All equivalences that Spirit Essence is done according to the present invention change or modify, within all should being encompassed in protection scope of the present invention.

Claims (5)

1. the optical interdferometer for detection of hollow cylinder inside surface, described inside surface (1) along hollow cylinder (2) circumferentially and be positioned at inner side, it is characterized in that: comprise laser instrument (3), optically focused convex lens (4), beam splitter (5), the collimation convex lens (6) as object lens, standard optic plane glass crystal (7) and conical mirror (8), described optically focused convex lens (4) are positioned between laser instrument (3) and collimation convex lens (6) and the focus of optically focused convex lens (4) overlaps with the focus of collimation convex lens (6); Described beam splitter (5) is positioned between optically focused convex lens (4) and collimation convex lens (6), for the light of autocollimation convex lens in future (6), is divided into the first light beam and the second light beam; Described standard optic plane glass crystal (7) is positioned at collimation convex lens (6) and the opposing side of beam splitter (5), and the opposing surface of this standard optic plane glass crystal (7) and collimation convex lens (6) is standard flat (71);
Described conical mirror (8) is positioned at described hollow cylinder to be detected (2), and the turning axle of conical mirror (8) and hollow cylinder (2) and standard optic plane glass crystal (7) dead in line separately, the circular conical surface (81) of described conical mirror (8) and the inside surface (1) of described hollow cylinder (2) are placed face-to-face, this conical mirror (8) thus along axis, moving realization scans the inside surface of hollow cylinder (2) (1);
Interference pattern receiving-member (9) is positioned at described beam splitter (5) one sides, for receiving the second light beam from beam splitter (5).
2. optical interdferometer according to claim 1, it is characterized in that: when the inside surface (1) of hollow cylinder (2) is parallel with hollow cylinder (2) axis, the circular conical surface (81) of described conical mirror (8) is 45 ° with the axis angle of conical mirror (8); When the inside surface (1) of hollow cylinder (2) and the angle theta of hollow cylinder (2) axis are obtuse angle, the cone angle of described conical mirror (8) is obtuse angle; When the inside surface (1) of hollow cylinder (2) and the angle theta of hollow cylinder (2) axis are acute angle, the cone angle of described conical mirror (8) is acute angle.
3. optical interdferometer according to claim 1 and 2, is characterized in that: described optically focused convex lens (4) are provided with one first aperture (10) with the focus overlapping position of collimation convex lens (6).
4. optical interdferometer according to claim 1 and 2, is characterized in that: between described beam splitter (5) and interference pattern receiving-member (9), be provided with a second orifice diaphragm (11).
5. optical interdferometer according to claim 1 and 2, is characterized in that: described interference pattern receiving-member (9) is CCD camera or other imaging receiving devices.
CN201310585701.1A 2013-11-19 2013-11-19 Optical interferometer used for detecting inner surface of hollow cylinder CN103615972A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107462188A (en) * 2017-07-28 2017-12-12 西安工业大学 The method of high precision test surface shape of plane optical component
CN107976155A (en) * 2017-11-23 2018-05-01 中国科学技术大学 A kind of engine air inside wall of cylinder detection device and method based on digital hologram interference
CN110030949A (en) * 2019-05-06 2019-07-19 苏州慧利仪器有限责任公司 Air insulated device and laser interference detection device

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US4898470A (en) * 1988-07-12 1990-02-06 Eastman Kodak Company Apparatus and method for testing circular cylindrical or conical surfaces
US20030202186A1 (en) * 2002-04-24 2003-10-30 Hong Kong Baptist University Method and apparatus for ultra high-resolution interferometry
CN101324421A (en) * 2008-07-30 2008-12-17 中国科学院上海光学精密机械研究所 Synchronous phase-shift fiso interferometer
CN101558281A (en) * 2006-12-13 2009-10-14 株式会社尼康 Measurement device and measurement method
US20120320380A1 (en) * 2011-06-17 2012-12-20 Precitec Optronik Gmbh Test device for testing a bonding layer between wafer-shaped samples and test process for testing the bonding layer
CN203657757U (en) * 2013-11-19 2014-06-18 苏州慧利仪器有限责任公司 Optical detection apparatus of hollow cylinder inner surface

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4898470A (en) * 1988-07-12 1990-02-06 Eastman Kodak Company Apparatus and method for testing circular cylindrical or conical surfaces
US20030202186A1 (en) * 2002-04-24 2003-10-30 Hong Kong Baptist University Method and apparatus for ultra high-resolution interferometry
CN101558281A (en) * 2006-12-13 2009-10-14 株式会社尼康 Measurement device and measurement method
CN101324421A (en) * 2008-07-30 2008-12-17 中国科学院上海光学精密机械研究所 Synchronous phase-shift fiso interferometer
US20120320380A1 (en) * 2011-06-17 2012-12-20 Precitec Optronik Gmbh Test device for testing a bonding layer between wafer-shaped samples and test process for testing the bonding layer
CN203657757U (en) * 2013-11-19 2014-06-18 苏州慧利仪器有限责任公司 Optical detection apparatus of hollow cylinder inner surface

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107462188A (en) * 2017-07-28 2017-12-12 西安工业大学 The method of high precision test surface shape of plane optical component
CN107976155A (en) * 2017-11-23 2018-05-01 中国科学技术大学 A kind of engine air inside wall of cylinder detection device and method based on digital hologram interference
CN107976155B (en) * 2017-11-23 2019-10-25 中国科学技术大学 A kind of engine air inside wall of cylinder detection device and method based on digital hologram interference
CN110030949A (en) * 2019-05-06 2019-07-19 苏州慧利仪器有限责任公司 Air insulated device and laser interference detection device

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