CN103292743B - Detection axicon taper angle - Google Patents

Detection axicon taper angle Download PDF

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CN103292743B
CN103292743B CN201310198924.2A CN201310198924A CN103292743B CN 103292743 B CN103292743 B CN 103292743B CN 201310198924 A CN201310198924 A CN 201310198924A CN 103292743 B CN103292743 B CN 103292743B
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axicon
laser
focusing lens
image sensor
light beam
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CN201310198924.2A
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CN103292743A (en
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袁乔
曾爱军
张善华
黄惠杰
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中国科学院上海光学精密机械研究所
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Abstract

一种轴锥镜锥角的检测装置和检测方法,该装置由激光器、扩束镜组、聚焦透镜以及图像传感器组成,其位置关系是:沿所述的激光器出射光束方向依次是所述的扩束镜组、聚焦透镜和图像传感器,在所述的扩束镜组和聚焦透镜之间设置所述的待测轴锥镜的插口。 Detection apparatus and method for detecting axicon taper angle, which device consists of a laser, beam expander lens group, a focusing lens and an image sensor, whose positional relationship is: along the direction of a laser beam emitted is of the order of expansion beam lens group, a focusing lens and an image sensor, provided the test socket axicon between said beam expander and the focusing lens group. 本发明具有结构简单,易于实现对任意轴锥镜锥角的测量等优点。 The present invention has simple structure, easy to achieve measurement of any axicon taper angle and so on.

Description

轴锥镜锥角的检测方法 Detection axicon taper angle

技术领域 FIELD

[0001] 本发明涉及光学检测领域,特别是一种轴锥镜锥角的检测装置和检测方法。 [0001] The present invention relates to the field of optical detection, in particular a method for the detection means and the detection cone angle axicon. 技术背景 technical background

[0002] 轴锥镜作为一个旋转对称角锥形光学元件,它可以为光学系统提供一个长焦深, 由于这一优点使得它在许多领域被广泛使用,诸如激光束整形、激光钻孔技术、光学检测、 激光谐振器、非衍射光束的产生等方面,且在光刻照明系统中利用轴锥镜可以实现环形照明模式。 [0002] The axicon conical angle as a rotational symmetric optical element, which provides a focal depth of the optical system, due to the advantages that it is widely used in many fields, such as a laser beam shaping, laser drilling technique, optical detection aspect, the laser resonator to produce a non-diffracted beam and the like, and may be implemented using an annular illumination pattern in a lithography illumination axicon system. 这就对锥形面的制作精度提出了严格的要求,对轴锥镜锥角的测量需要精确的方法来实现。 This manufacturing accuracy of the tapered surface imposes strict requirements on the measurement of the taper angle axicon requires precise methods.

[0003]在先技术[1] (M.deAngelis,S.DeNicola,P.Ferraro,etal."Test ofaconicallensusingatwo-beamshearinginterferometer',,OptLaser Eng. 39:155-163(2003).)利用两光束剪切干涉技术检测衍射锥形透镜,用于测量由平面和透镜的锥形面形成的角度。此技术是通过待测锥形透镜实现两个相干面波前传输的一种离轴干涉检测方法。该方法对大角度轴锥镜的测量是无效的。 [0003] PRIOR ART [1] (M.deAngelis, S.DeNicola, P.Ferraro, etal "Test ofaconicallensusingatwo-beamshearinginterferometer ',, OptLaser Eng 39:... 155-163 (2003)) using a two-beam shear interference detection diffractive lens cone for measuring the angle formed by the tapered surface and the plane of the lens. this technique is implemented method of detecting an interference of two coherent plane off-axis wavefront transmitted through a conical lenses tested. the the method of measuring the angle of Great axicon is invalid.

[0004] 在先技术[2](JunMa,ChristofPruss,Matthias,etal."Systematicanalysis ofthemeasurementofconeanglesusinghighlinedensitycomputer-generated holograms",OpticalEngineering. 50 (5) : 05580-1-05880-9 (2011) ·),给出了维角测量的实验研究法。 [0004] PRIOR ART [2] (JunMa, ChristofPruss, Matthias, etal "Systematicanalysis ofthemeasurementofconeanglesusinghighlinedensitycomputer-generated holograms", OpticalEngineering 50 (5):.. 05580-1-05880-9 (2011) ·), given dimensions experimental Study on angle measurement method. 此方法首先需要制作一个高线密度的计算全息图,其次对干涉仪进行校准,还需要把待测轴锥镜进行轴向移动以及圆周旋转。 This method first requires making a high-density CGH line, followed by calibration of the interferometer, also need to be tested axicon axial movement and circumferential rotation.

发明内容 SUMMARY

[0005] 本发明的目的在于提供一种轴锥镜锥角的检测装置和检测方法。 [0005] The object of the present invention is to provide detection apparatus and method for detecting axicon cone angle. 该装置和方法具有结构简单,易于实现对任意轴锥镜锥角的测量等优点。 The apparatus and method having a simple structure, easy to achieve measurement of any axicon taper angle and so on.

[0006] 本发明的技术解决方案如下: [0006] The technical solutions of the present invention are as follows:

[0007] -种轴锥镜锥角的检测装置,其特点在于该装置由激光器、扩束镜组、聚焦透镜以及图像传感器组成,其位置关系是:沿所述的激光器出射光束方向依次是所述的扩束镜组、 聚焦透镜和图像传感器,在所述的扩束镜组和聚焦透镜之间设置所述的待测轴锥镜的插□〇 [0007] - species axicon detecting means taper angle, characterized in that the device consists of a laser, beam expander lens group, a focusing lens and an image sensor, whose positional relationship is: along said laser outgoing beam direction followed by said beam expander lens group, a focusing lens and an image sensor, according to the test set between the axicon beam expander and the focusing lens group of the interpolation square □

[0008] 利用上述轴锥镜锥角的检测装置进行轴锥镜锥角的检测方法,其特点在于该检测方法包括以下步骤: [0008] The method of detecting axicon taper angle detecting means using the cone angle of the axicon, characterized in that the detection method comprises the steps of:

[0009] ①在激光器出射光束方向的扩束镜组和聚焦透镜之间的待测轴锥镜的插口置入待测轴锥镜,所述的待测轴锥镜的平面朝向所述的激光器的出光方向; [0009] ① outgoing light beam in the direction of the laser beam expander socket inserted between the tested axicon lens group and the focus lens axicon test, the test plane axicon toward the laser the light-emitting direction;

[0010] ②调整光路:调整所述的扩束镜组的中轴与所述的激光器出射光束的中轴重合; 调整所述的待测轴锥镜的平面与所述的激光器出射光束垂直,同时保证所述的待测轴锥镜的中轴与激光器出射光束的中轴重合;调整所述的聚焦透镜与所述的激光器出射光束垂直,同时保证所述的聚焦透镜的光轴与激光器出射光束的中轴重合;调整所述的图像传感器的平面与所述的激光器出射光束的光轴垂直; [0010] ② adjust the optical path: a beam expander lens assembly and the axis of the outgoing laser beam axis coincides with the adjustment; adjusting the plane of the axicon tested a laser beam emitted perpendicular, while ensuring that said test axicon central axis of the laser coincides with the central axis of the outgoing beam; adjusting the focusing lens and the laser beam emitted vertically while ensuring that the optical axis of the focusing lens and the laser exit beam axis coincident; adjusting the plane of the image sensor of the optical axis perpendicular to the laser beam;

[0011] ③所述的激光器出射的光束经所述的扩束镜组被扩束,此扩束光束透过所述的待测轴锥镜入射到所述的聚焦透镜,经所述的聚焦透镜光束被会聚到所述的图像传感器上; Beam expander laser beam expander is set [0011] according to the light emitted by ③ said, this beam is incident to the beam expander of the focusing lens through said axicon measured by said focusing lens beam is converged onto the image sensor;

[0012] ④调整所述的聚焦透镜与所述的图像传感器之间的距离,使得所述的图像传感器放置在所述的聚焦透镜的像方焦面上,这样便可利用所述的图像传感器检测所得光斑的大小,从而解出所述的待测轴锥镜的锥角。 The distance between the [0012] ④ adjusting the focusing lens and the image sensor, the image sensor is placed such that the image side focal plane of the focusing lens, so that the image sensor can use the the resulting spot size detection, so that the test solution axicon angle of said cone.

[0013] 所述的待测轴锥镜的锥角Θ可表示为: [0013] The tested axicon taper angle Θ can be expressed as:

[0014] [0014]

Figure CN103292743BD00041

[0015] 其中,η为所述的待测轴锥镜的折射率,D为所述的图像传感器接收到的光斑的大小,f表示所述的聚焦透镜的焦距。 [0015] where, [eta] is the refractive index measured axicon, D is the size of the image received by the sensor spot, f denotes a focal length of the focusing lens.

[0016] 所述的待测轴锥镜为凸面轴锥镜或凹面轴锥镜。 [0016] The test of the axicon is convex or concave axicon axicon.

[0017] 与在先技术相比,本发明的技术效果如下: [0017] Compared with the prior art, the technical effect of the present invention are as follows:

[0018] 1.本发明可以实现对任意角度轴锥镜的锥角测量; [0018] 1. The present invention may be implemented to measure any angle cone angle axicon;

[0019] 2.本发明装置结构简单,易于实现检测操作。 [0019] 2. The device structure of the present invention is simple, easy to implement detection operation.

附图说明 BRIEF DESCRIPTION

[0020] 图1为本发明轴锥镜锥角检测装置测量凸面轴锥镜的原理图 [0020] FIG 1 axicon cone angle detecting means for measuring a convex axicon schematic diagram of the present invention

[0021] 图2为本发明轴锥镜锥角检测装置测量凸面轴锥镜的光路图 [0021] FIG. 2 is axicon cone angle detecting means for measuring a convex axicon optical path diagram of the invention

[0022] 图3为本发明轴锥镜锥角检测装置测量凹面轴锥镜的原理图 [0022] FIG. 3 axicon cone angle detecting means measuring principle concave axicon present invention, FIG.

[0023] 图4为本发明轴锥镜锥角检测装置测量凹面轴锥镜的光路图 [0023] FIG. 4 axicon cone angle detecting means for measuring a concave axicon optical path of the present invention.

具体实施方式 Detailed ways

[0024] 下面结合附图和实施实例对本发明作进一步说明,但不应以此限制本发明的保护范围。 [0024] accompanying drawings and the following examples of embodiments of the present invention is further illustrated, but should not be used to limit the scope of the present invention.

[0025] 先请参阅图1和图3,图1和图3是本发明所述轴锥镜锥角检测装置实施实例的原理图。 [0025] Please refer to FIG. 1 and FIG. 3, FIG. 1 and FIG. 3 is a schematic view of the invention of the axicon taper angle detection apparatus of the example embodiment. 由图可见,本发明轴锥镜锥角的检测装置,该装置由激光器1、扩束镜组2、聚焦透镜4以及图像传感器5组成,其位置关系是:沿所述的激光器1出射光束方向依次是所述的扩束镜组2、聚焦透镜4和图像传感器5,在所述的扩束镜组2和聚焦透镜4之间设置待测轴锥镜3的插口。 Seen from the figure, axicon detecting means taper angle of the present invention, the device consists of a laser 1, beam expander lens group 2, focus lens 4 and the image sensor 5, whose positional relationship is: along said laser a light beam direction a beam expander followed by the lens group 2, focus lens 4 and the image sensor 5 is provided axicon test jack 3 4 between the beam expander lens 2 and the focusing lens group.

[0026] 利用上述轴锥镜锥角的检测装置进行轴锥镜锥角的检测方法,其特点在于该检测方法包括以下步骤: [0026] The method of detecting axicon taper angle detecting means using the cone angle of the axicon, characterized in that the detection method comprises the steps of:

[0027] ①在激光器1出射光束方向的扩束镜组2和聚焦透镜4之间置入待测轴锥镜3,所述的待测轴锥镜3的平面朝向所述的激光器1的出光方向; [0027] ① into test axicon between the laser light beam direction a beam expander 2 and the focusing lens group 43, the test axicon plane 3 towards the laser 1 of light direction;

[0028] ②调整光路:调整所述的扩束镜组)的中轴与所述的激光器1出射光束的中轴重合;调整所述的待测轴锥镜3的平面与所述的激光器1出射光束垂直,同时保证所述的待测轴锥镜3的中轴与激光器1出射光束的中轴重合;调整所述的聚焦透镜4与所述的激光器1出射光束垂直,同时保证所述的聚焦透镜4的光轴与激光器1出射光束的中轴重合;调整所述的图像传感器5的平面与所述的激光器1出射光束的光轴垂直; [0028] ② adjust the optical path: a beam expander lens assembly) with the central axis of a laser light beam coincides with the central axis of said adjustment; adjusting the axicon tested plane of the laser 3 1 outgoing light beam vertically, while ensuring that said test axicon axis laser 3 and a light beam coincides with the central axis; adjusting the focusing lens 4 and a laser light beam according to the vertical, while maintaining the the optical axis of the focusing lens 4 a laser light beam coincides with the central axis; adjusting the plane of an image sensor of claim 5 and a laser beam emitted perpendicular to the optical axis;

[0029] ③所述的激光器1出射的光束经所述的扩束镜组2被扩束,此扩束光束透过所述的待测轴锥镜3入射到所述的聚焦透镜4,经所述的聚焦透镜4光束被会聚到所述的图像传感器5上; Beam expander 2 is enlarged group laser beam [0029] ③ 1 according to the light emitted by said, this incident beam transmitted through the beam expander to be measured 3 to the axicon focusing lens 4, by the focusing lens 4 is converged light beam onto the image sensor 5;

[0030] ④调整所述的聚焦透镜4与所述的图像传感器5之间的距离,使得所述的图像传感器5放置在所述的聚焦透镜4的像方焦面上,这样便可利用所述的图像传感器5检测所得光斑的大小,从而解出所述的待测轴锥镜3的锥角。 [0030] ④ to adjust the distance between the focusing lens 4 and the image sensor 5, such that the image sensor 5 is placed on the image side focal plane of the focusing lens 4, so that the use can 5 resulting image spot size detection sensor described later, so as to solve the axicon measured cone angle of 3.

[0031] 所述的待测轴锥镜3的锥角Θ可表示为: [0031] The axicon tested taper angle Θ 3 can be expressed as:

[0032] [0032]

Figure CN103292743BD00051

[0033] 其中,η为所述的待测轴锥镜3的折射率,D为所述的图像传感器5接收到的光斑的大小,f表示所述的聚焦透镜4的焦距。 [0033] wherein, [eta] is measured axicon said refractive index of 3, the size D of the image sensor 5 receives the light spot, f denotes a focal length of the focusing lens 4.

[0034] 实施例1 [0034] Example 1

[0035] 图2为本发明轴锥镜锥角检测装置测量凸面轴锥镜的光路图,由图可见,本发明实施例1的待测轴锥镜3是凸面轴锥镜,测量凸面轴锥镜锥角的步骤如下: [0035] FIG. 2 of the present invention axicon cone angle detecting means for measuring a convex axicon optical path diagram, seen from the figure, measured axicon Example 1 of the embodiment 3 of the present invention axicon is convex, convex measurement axicon step taper angle of the mirror are as follows:

[0036] ①在激光器1出射光束方向的扩束镜组2和聚焦透镜4之间置入待测轴锥镜3,所述的待测轴锥镜3的平面朝向所述的激光器1的出光方向; [0036] ① into test axicon between the laser light beam direction a beam expander 2 and the focusing lens group 43, the test axicon plane 3 towards the laser 1 of light direction;

[0037] ②调整光路:调整所述的扩束镜组2的中轴与所述的激光器1出射光束的中轴重合;调整所述的待测轴锥镜3的平面与所述的激光器1出射光束垂直,同时保证所述的待测轴锥镜3的中轴与激光器1出射光束的中轴重合;调整所述的聚焦透镜4与所述的激光器1出射光束垂直,同时保证所述的聚焦透镜4)光轴与激光器1出射光束的中轴重合;调整所述的图像传感器5的平面与所述的激光器1出射光束的光轴垂直; [0037] ② adjust the optical path: a beam expander lens assembly with said central axis 2 of a laser light beam coincides with the central axis of said adjustment; adjusting the axicon tested plane of the laser 3 1 outgoing light beam vertically, while ensuring that said test axicon axis laser 3 and a light beam coincides with the central axis; adjusting the focusing lens 4 and a laser light beam according to the vertical, while maintaining the 4 a focusing lens) and the optical axis of a laser beam emitted coincides with the central axis; adjusting the plane of an image sensor of claim 5 and a laser beam emitted perpendicular to the optical axis;

[0038] ③所述的激光器1出射的光束经所述的扩束镜组2被扩束,此扩束光束透过所述的待测轴锥镜3入射到所述的聚焦透镜4,经所述的聚焦透镜4光束被会聚到所述的图像传感器5上; Beam expander 2 is enlarged group laser beam [0038] ③ 1 according to the light emitted by said, this incident beam transmitted through the beam expander to be measured 3 to the axicon focusing lens 4, by the focusing lens 4 is converged light beam onto the image sensor 5;

[0039] ④调整所述的聚焦透镜4与所述的图像传感器5之间的距离,使得所述的图像传感器5放置在所述的聚焦透镜4的像方焦面上,这样便可利用所述的图像传感器5检测所得光斑的大小,从而解出所述的待测轴锥镜3的锥角。 [0039] ④ to adjust the distance between the focusing lens 4 and the image sensor 5, such that the image sensor 5 is placed on the image side focal plane of the focusing lens 4, so that the use can 5 resulting image spot size detection sensor described later, so as to solve the axicon measured cone angle of 3.

[0040]所述的待测轴锥镜3的锥角和折射率分别为θ,n,光束经所述的待测轴锥镜3后的折射角β可以表示为: [0040] The tested axicon taper and 3 are refractive indices θ, n, the light beam through the axicon tested after refraction angle β 3 can be expressed as:

[0041 ] β = arcsin (nsin θ ) (1) [0041] β = arcsin (nsin θ) (1)

[0042] 经所述的待测轴锥镜3的折射光线与光轴的夹角Ρ表示为: [0042] measured through the axicon angle of the refracted ray and the optical axis Ρ 3 is expressed as:

Figure CN103292743BD00052

[0045] 其中,D为所述的图像传感器5检测到的光斑的口径,f为所述的聚焦透镜4的焦 [0045] where, D is the diameter of the image sensor 5 detects the light spot, f is the focal lens 4 in the focusing

[0043] [0043]

[0044] 距。 [0044] distance.

[0046] 依据上述公式可以得到所述的待测轴锥镜3的锥角表示为: [0046] can be obtained according to the above equation the measured taper angle axicon 3 is expressed as:

[0047] [0047]

Figure CN103292743BD00061

[0048] 这样便可以解出所述的待测轴锥镜3的锥角。 [0048] Such a solution can be measured taper angle of the axicon 3.

[0049] 实施例2 [0049] Example 2

[0050] 图4为本发明轴锥镜锥角检测装置测量凹面轴锥镜的光路图,由图可见,本发明实施例2的待测轴锥镜3是凹面轴锥镜,测量凹面轴锥镜锥角的步骤如下: [0050] FIG. 4 axicon cone angle detecting means for measuring a concave axicon optical path diagram of the present invention can be seen from the figure, measured axicon Example 2 of the present invention is a concave axicon 3, the measurement concave axicon step taper angle of the mirror are as follows:

[0051 ] ①在激光器1出射光束方向的扩束镜组2和聚焦透镜4之间置入待测轴锥镜3,所述的待测轴锥镜3的平面朝向所述的激光器1的出光方向; [0051] ① into test axicon between the laser light beam direction a beam expander 2 and the focusing lens group 43, the test axicon plane 3 towards the laser 1 of light direction;

[0052] ②调整光路:调整所述的扩束镜组2的中轴与所述的激光器1出射光束的中轴重合;调整所述的待测轴锥镜3的平面与所述的激光器1出射光束垂直,同时保证所述的待测轴锥镜3的中轴与激光器1出射光束的中轴重合;调整所述的聚焦透镜4与所述的激光器1出射光束垂直,同时保证所述的聚焦透镜4的光轴与激光器1出射光束的中轴重合;调整所述的图像传感器5的平面与所述的激光器1出射光束的光轴垂直; [0052] ② adjust the optical path: a beam expander lens assembly with said central axis 2 of a laser light beam coincides with the central axis of said adjustment; adjusting the axicon tested plane of the laser 3 1 outgoing light beam vertically, while ensuring that said test axicon axis laser 3 and a light beam coincides with the central axis; adjusting the focusing lens 4 and a laser light beam according to the vertical, while maintaining the the optical axis of the focusing lens 4 a laser light beam coincides with the central axis; adjusting the plane of an image sensor of claim 5 and a laser beam emitted perpendicular to the optical axis;

[0053] ③所述的激光器1出射的光束经所述的扩束镜组2被扩束,此扩束光束透过所述的待测轴锥镜3入射到所述的聚焦透镜4,经所述的聚焦透镜4光束被会聚到所述的图像传感器5上; Beam expander 2 is enlarged group laser beam [0053] ③ 1 according to the light emitted by said, this incident beam transmitted through the beam expander to be measured 3 to the axicon focusing lens 4, by the focusing lens 4 is converged light beam onto the image sensor 5;

[0054] ④调整所述的聚焦透镜4与所述的图像传感器5之间的距离,使得所述的图像传感器5放置在所述的聚焦透镜4的像方焦面上,这样便可利用所述的图像传感器5检测所得光斑的大小,从而解出所述的待测轴锥镜3的锥角。 [0054] ④ to adjust the distance between the focusing lens 4 and the image sensor 5, such that the image sensor 5 is placed on the image side focal plane of the focusing lens 4, so that the use can 5 resulting image spot size detection sensor described later, so as to solve the axicon measured cone angle of 3.

[0055] 这样便可以利用图像传感器5检测得到的光斑的大小,解出所述的待测轴锥镜3 的锥角。 [0055] In this way one can, using the image sensor 5 detects the size of the resulting spot of the test solution of the axicon cone angle of 3.

Claims (1)

1. 一种轴锥镜锥角的检测方法,该方法采用的检测装置由激光器(1)、扩束镜组(2)、 聚焦透镜(4)和图像传感器(5)组成,其位置关系是:沿所述的激光器(1)出射光束方向依次是所述的扩束镜组(2)、聚焦透镜(4)和图像传感器(5),在所述的扩束镜组(2)和聚焦透镜⑷之间设置待测轴锥镜⑶的插口,其特征在于,该方法包括以下步骤: ① 在激光器(1)出射光束方向的扩束镜组(2)和聚焦透镜(4)之间置入待测轴锥镜(3),所述的待测轴锥镜(3)的平面朝向所述的激光器⑴的出光方向; ② 调整光路:调整所述的扩束镜组(2)的中轴与所述的激光器(1)出射光束的中轴重合;调整所述的待测轴锥镜(3)的平面与所述的激光器(1)出射光束垂直,同时保证所述的待测轴锥镜(3)的中轴与激光器(1)出射光束的中轴重合;调整所述的聚焦透镜(4)与所述的激光器 CLAIMS 1. A method for detecting axial axicon taper angle, detecting means of the method employed by the laser (1), extender lens group (2), a focusing lens (4) and an image sensor (5), whose positional relationship is : along said laser (1) is sequentially outgoing light beam direction beam expander according to group (2), a focusing lens (4) and an image sensor (5), (2) and focusing said beam expander lens assembly set test axicon lens between the socket ⑶ ⑷, characterized in that the method comprises the steps of: ① in the opposite direction of the outgoing light beam between the beam expander lens group (2) and the focusing lens (4) laser (1) the test axicon (3), said test axicon (3) toward the plane of the light-emitting direction of the laser ⑴; ② adjust the optical path: adjusting said beam expander lens group (2) axis of the laser (1) coincides with the central axis of the outgoing light beam; adjusting the axicon tested (3) of the laser plane (1) perpendicular to the outgoing light beam, while ensuring that said test axis axicon (3) of the laser axis (1) coincides with the central axis of the outgoing light beam; adjusting the focusing lens (4) with said laser 1)出射光束垂直,同时保证所述的聚焦透镜(4)的光轴与激光器(1)出射光束的中轴重合;调整所述的图像传感器(5)的平面与所述的激光器(1)出射光束的光轴垂直; ③ 所述的激光器(1)出射的光束经所述的扩束镜组(2)被扩束,此扩束光束透过所述的待测轴锥镜(3)入射到所述的聚焦透镜(4),经所述的聚焦透镜(4)光束被会聚到所述的图像传感器(5)上; ④ 调整所述的聚焦透镜(4)与所述的图像传感器(5)之间的距离,使得所述的图像传感器(5)放置在所述的聚焦透镜(4)的像方焦面上,这样便可利用所述的图像传感器(5) 检测所得光斑的大小,从而解出所述的待测轴锥镜(3)的锥角; 所述的待测轴锥镜(3)的锥角Θ为: 1) perpendicular to the light beam, while ensuring that the focusing lens (4) of the optical axis of the laser (1) coincides with the central axis of the outgoing light beam; adjusting the plane of an image sensor (5) with said laser (1) the optical axis of the outgoing light beam; ③ the laser (1) light emitted by the beam expander lens group (2) is a beam expander, the light beam transmitted through the beam expander tested axicon (3) incident on the focusing lens (4), via said focusing lens (4) of the light beam is converged onto the image sensor (5); ④ adjusting the focusing lens (4) with said image sensor the distance between (5), such that said image sensor (5) is placed on the image side focal plane of the focusing lens (4), so that the can using an image sensor (5) detecting the resulting light spot size, so that the test solution according axicon (3) of the cone angle; measured according axicon (3) taper angle Θ is:
Figure CN103292743BC00021
其中,η为所述的待测轴锥镜(3)的折射率,D为所述的图像传感器(5)接收到的光斑的大小,f表示所述的聚焦透镜(4)的焦距。 Wherein, [eta] is measured axicon said refractive index (3), (5) the size of the received light spot D of the image sensor, f denotes a focal length of the focusing lens (4).
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