CN203657757U - Optical detection apparatus of hollow cylinder inner surface - Google Patents
Optical detection apparatus of hollow cylinder inner surface Download PDFInfo
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- CN203657757U CN203657757U CN201320733413.1U CN201320733413U CN203657757U CN 203657757 U CN203657757 U CN 203657757U CN 201320733413 U CN201320733413 U CN 201320733413U CN 203657757 U CN203657757 U CN 203657757U
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- convex lens
- hollow cylinder
- conical mirror
- inside surface
- beam splitter
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- 230000001154 acute effect Effects 0.000 claims description 7
- 238000003384 imaging method Methods 0.000 claims description 4
- 238000012360 testing method Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 description 8
- 230000007613 environmental effect Effects 0.000 description 3
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Abstract
Disclosed in the utility model is an optical detection apparatus of a hollow cylinder inner surface. The inner surface is arranged along the circumference of the hollow cylinder and particularly, is arranged at the inner side or the outer side. A light-collecting convex lens is arranged between a laser and a collimating convex lens; and the focus of the light-collecting convex lens is superposed with the focus of the collimating convex lens. A beam splitter is arranged between the light-collecting convex lens and the collimating convex lens and is used for splitting lights from the collimating convex lens into a first light beam and a second light beam. A standard optical flat unit is arranged at one side, opposite to the beam splitter, of the collimating convex lens; and the surface, opposite to the collimating convex lens, of the standard optical flat unit is a convex surface and the surface, opposite to the convex surface, of the standard optical flat unit is a standard reference surface. A conical reflector is arranged in a to-be-detected hollow cylinder; and the rotating shaft of the conical reflector is superposed with respective axises of the hollow cylinder and the standard optical flat unit. With the apparatus, all morphology information of the inner surface of the three-dimensional hollow cylinder can be obtained by one time. Meanwhile, the testing efficient, precision and reliability are substantially improved.
Description
Technical field
The utility model relates to optical detection apparatus, relates in particular to a kind of optical detection apparatus of hollow cylinder inside surface.
Background technology
Interference of light technology is modern times one of the most accurate effective measuring technologies, it integrates contemporary state-of-the-art technology, the newest fruits that extensively adopts the fields such as computer technology, laser technology, electronic technology, semiconductor technology, can complete the check to optical element and system quickly and accurately.At optical workshop of today, from the design processing and check debuging, proofreading and correct and testing to optical system of optical element, interferometer has become a kind of easy operating, reliable, high precision, intelligentized requisite test verification device, and it has immeasurable effect in the production in enormous quantities of optical element and system and check.
But existing interferometer often detects pattern deviation for face shape, for example bending or local bending or embossed area, detect and need repeatedly repeatedly to detect for the pattern of three-dimensional surface shape, can not once obtain whole three-dimensional surface shape patterns; Secondly, existing interferometer accuracy of detection and reliability are easily subject to the such environmental effects such as extraneous vibration and temperature, air-flow.Therefore, how to design the high precision of the whole stereo hollow internal surface of column of a kind of disposable acquisition pattern information, the optical interdferometer of reliability, become the direction that those skilled in the art make great efforts.
Summary of the invention
The utility model provides a kind of optical detection apparatus of hollow cylinder inside surface, and this optical interdferometer has been realized the whole stereo hollow internal surface of column of disposable acquisition pattern information, has also greatly improved testing efficiency, precision and reliability simultaneously.
For achieving the above object, the technical solution adopted in the utility model is: a kind of optical detection apparatus of hollow cylinder inside surface, described inside surface along hollow cylinder circumferentially and be positioned at inner side, comprise laser instrument, optically focused convex lens, beam splitter, collimation convex lens, standard optic plane glass crystal and conical mirror as object lens, described optically focused convex lens between laser instrument and collimation convex lens and the focus of optically focused convex lens overlap with the focus that collimates convex lens; Described beam splitter is between optically focused convex lens and collimation convex lens, and for future, the light of autocollimation convex lens is divided into the first light beam and the second light beam; Described standard optic plane glass crystal is positioned at the opposing side of collimation convex lens and beam splitter, and this standard optic plane glass crystal surface opposing with collimating convex lens is standard flat;
Described conical mirror is positioned at described hollow cylinder to be detected, and the turning axle of conical mirror and hollow cylinder and standard optic plane glass crystal dead in line separately, the circular conical surface of described conical mirror and the inside surface of described hollow cylinder are placed face-to-face, thereby this conical mirror moves the inside surface scanning realizing hollow cylinder along axis;
Interference pattern receiving-member is positioned at described beam splitter one side, for receiving the second light beam from beam splitter.
It is as follows that technique scheme is further improved technical scheme:
1. in such scheme, in the time of the inside surface of hollow cylinder and hollow cylindrical shaft line parallel, the circular conical surface of described conical mirror and the axis angle of conical mirror are 45 °; When the angle theta of the inside surface of hollow cylinder and hollow cylinder axis is obtuse angle, the cone angle of described conical mirror is obtuse angle; When the angle theta of the inside surface of hollow cylinder and hollow cylinder axis is acute angle, the cone angle of described conical mirror is acute angle.
2. in such scheme, described optically focused convex lens are provided with one first aperture with the focus overlapping position of collimation convex lens.
3. in such scheme, between described beam splitter and interference pattern receiving-member, be provided with a second orifice diaphragm.
4. in such scheme, described interference pattern receiving-member is CCD camera or imaging screen.
Because technique scheme is used, the utility model compared with prior art has following advantages:
1. the optical detection apparatus of the utility model hollow cylinder inside surface, its optically focused convex lens between laser instrument and collimation convex lens and the focus of optically focused convex lens overlap with the focus that collimates convex lens; Described beam splitter is between optically focused convex lens and collimation convex lens, and for future, the light of autocollimation convex lens is divided into the first light beam and the second light beam; Described standard optic plane glass crystal is positioned at collimation convex lens and the opposing side of beam splitter, this standard optic plane glass crystal surface opposing with collimating convex lens is standard flat, described conical mirror is positioned at described hollow cylinder to be detected, and the turning axle of conical mirror and hollow cylinder and standard optic plane glass crystal dead in line separately, realize the whole stereo hollow internal surface of column of real-time disposable acquisition pattern information, improved testing efficiency and precision.
2. the optical detection apparatus of the utility model hollow cylinder inside surface, its reference beam and measuring beam are through same light path, the variation of the environmental factor such as vibration and temperature, air-flow can produce common mode inhibition each other to external world, generally also can obtain stable interference fringe without shock insulation and constant temperature, anti seismic efficiency is good, environmental requirement is low to external world, has greatly improved precision and reliability.
Accompanying drawing explanation
Accompanying drawing 1 is the utility model hollow cylinder one structural representation;
Accompanying drawing 2 is the optical interdferometer structural representation for detection of accompanying drawing 1 hollow cylinder inside surface;
Accompanying drawing 3 is the utility model hollow cylinder two structural representations;
Accompanying drawing 4 is the optical interdferometer structural representation for detection of accompanying drawing 3 hollow cylinder inside surfaces;
Accompanying drawing 5 is the structural representation that accompanying drawing 3 ring-shaped guide rails overturn after 180 °;
Accompanying drawing 6 is the optical interdferometer structural representation for detection of accompanying drawing 5 hollow cylinder inside surfaces;
Accompanying drawing 7 is the utility model Perfect Interferometry schematic diagram.
In above accompanying drawing: 1, inside surface; 2, hollow cylinder; 3, laser instrument; 4, optically focused convex lens; 5, beam splitter; 6, collimation convex lens; 7, standard optic plane glass crystal; 71, standard flat; 8, conical mirror; 81, circular conical surface; 9, interference pattern receiving-member; 10, the first aperture; 11, second orifice diaphragm.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further described:
Embodiment 1: a kind of optical detection apparatus of hollow cylinder inside surface, described inside surface 1 along hollow cylinder 2 circumferentially and be positioned at inner side, comprise laser instrument 3, optically focused convex lens 4, beam splitter 5, collimation convex lens 6, standard optic plane glass crystal 7 and conical mirror 8 as object lens, described optically focused convex lens 4 between laser instrument 3 and collimation convex lens 6 and the focus of optically focused convex lens 4 overlap with the focus that collimates convex lens 6; Described beam splitter 5 between optically focused convex lens 4 and collimation convex lens 6, for future autocollimation convex lens 6 light be divided into the first light beam and the second light beam; Described standard optic plane glass crystal 7 is positioned at the opposing side of collimation convex lens 6 and beam splitter 5, and the opposing surface of this standard optic plane glass crystal 7 and collimation convex lens 6 is standard flat 71;
Described conical mirror 8 is positioned at described hollow cylinder 2 to be detected, and the turning axle of conical mirror 8 and hollow cylinder 2 and standard optic plane glass crystal 7 dead in line separately, the circular conical surface 81 of described conical mirror 8 is placed face-to-face with the inside surface 1 of described hollow cylinder 2, thereby this conical mirror 8 moves realization along axis, the inside surface 1 of hollow cylinder 2 is scanned;
Interference pattern receiving-member 9 is positioned at described beam splitter 5 one sides, for receiving the second light beam from beam splitter 5.
Above-mentioned optically focused convex lens 4 are provided with one first aperture 10 with the focus overlapping position of collimation convex lens 6.
Between above-mentioned beam splitter 5 and interference pattern receiving-member 9, be provided with a second orifice diaphragm 11.
Above-mentioned interference pattern receiving-member 9 is CCD camera or imaging screen.
The inside surface of hollow cylinder and hollow cylindrical shaft line parallel, the circular conical surface of described conical mirror and the axis angle of conical mirror are 45 °, the vertical scanning of realizing whole hollow cylinder 2 inside surfaces by moving up and down conical mirror 8 detects.
Embodiment 2: a kind of optical detection apparatus of hollow cylinder inside surface, described inside surface 1 along hollow cylinder 2 circumferentially and be positioned at inner side, comprise laser instrument 3, optically focused convex lens 4, beam splitter 5, collimation convex lens 6, standard optic plane glass crystal 7 and conical mirror 8 as object lens, described optically focused convex lens 4 between laser instrument 3 and collimation convex lens 6 and the focus of optically focused convex lens 4 overlap with the focus that collimates convex lens 6; Described beam splitter 5 between optically focused convex lens 4 and collimation convex lens 6, for future autocollimation convex lens 6 light be divided into the first light beam and the second light beam; Described standard optic plane glass crystal 7 is positioned at the opposing side of collimation convex lens 6 and beam splitter 5, and the opposing surface of this standard optic plane glass crystal 7 and collimation convex lens 6 is standard flat 71;
Described conical mirror 8 is positioned at described hollow cylinder 2 to be detected, and the turning axle of conical mirror 8 and hollow cylinder 2 and standard optic plane glass crystal 7 dead in line separately, the circular conical surface 81 of described conical mirror 8 is placed face-to-face with the inside surface 1 of described hollow cylinder 2, thereby this conical mirror 8 moves realization along axis, the inside surface 1 of hollow cylinder 2 is scanned;
Interference pattern receiving-member 9 is positioned at described beam splitter 5 one sides, for receiving the second light beam from beam splitter 5.
Above-mentioned optically focused convex lens 4 are provided with one first aperture 10 with the focus overlapping position of collimation convex lens 6.
Between above-mentioned beam splitter 5 and interference pattern receiving-member 9, be provided with a second orifice diaphragm 11.
Above-mentioned interference pattern receiving-member 9 is CCD camera or imaging screen.
The angle of the inside surface of above-mentioned hollow cylinder and hollow cylinder axis is acute angle, as shown in Figure 3, can adopt two kinds of conical mirror 8, a kind of circular conical surface 81 angles of conical mirror 8 its left and right sides are obtuse angle, and circular conical surface 81 angles of another kind of conical mirror 8 its left and right sides are acute angle.
When detecting the hollow cylinder of accompanying drawing 3, the conical mirror 8 that circular conical surface 81 angles that use left and right side are obtuse angle, detects measured piece inside surface, and realizes the vertical scanning detection of whole hollow cylinder 2 inside surfaces by moving up and down conical mirror 8;
When detecting the hollow cylinder of accompanying drawing 5, the conical mirror 8 that circular conical surface 81 angles that use left and right side are acute angle, detects measured piece inside surface, and realizes the vertical scanning detection of whole hollow cylinder 2 inside surfaces by moving up and down conical mirror 8.
The optical detection apparatus of the present embodiment hollow cylinder inside surface, the course of work is as follows.
The described light beam by laser instrument 3 outgoing is converged at aperture 10 places in the focus that collimates convex lens 6 by optically focused convex lens 4, light beam sees through beam splitter 5 by collimating convex lens 6 with parallel light emergence, is incident upon on standard optic plane glass crystal 7.The lower surface of standard optic plane glass crystal 7 is standard flats 71, the conical mirror 8 and vertical below that be put in standard optic plane glass crystal 7 coaxial with tested hollow cylinder 2, the circular conical surface of conical mirror 8 the inside surface 1 of corresponding hollow cylinder 2 be tested surface.Part light reflects from standard flat 71, and another part light is mapped on the inside surface 1 of measured piece through standard flat 71, is reflected back a part of light by tested inside surface 1.This two parts light all reflects through beam splitter 5, and at emergent pupil, 11 places form two bright aperture pictures.Be that CCD camera focusing is on the interference fringe localization face between canonical reference face 72 and the inside surface 1 of tested hollow cylinder 2 again by interference pattern receiving-member 9, just can absorb on localization face by the interference pattern forming between canonical reference face 72 and tested inside surface 1, then carry out corrugated recovery and information processing by the professional software in computing machine.As shown in Figure 1, when one-time detection, can only detect the first half of guide rail arc surface,
So tested hollow cylinder 2 will be turned over to turnback after one-time detection completes, the inside surface 1 that carries out the latter half detects.
Above-described embodiment is only explanation technical conceive of the present utility model and feature, and its object is to allow person skilled in the art can understand content of the present utility model and implement according to this, can not limit protection domain of the present utility model with this.All equivalences of doing according to the utility model Spirit Essence change or modify, within all should being encompassed in protection domain of the present utility model.
Claims (5)
1. the optical detection apparatus of a hollow cylinder inside surface, described inside surface (1) along hollow cylinder (2) circumferentially and be positioned at inner side, it is characterized in that: comprise laser instrument (3), optically focused convex lens (4), beam splitter (5), collimation convex lens (6), standard optic plane glass crystal (7) and conical mirror (8) as object lens, described optically focused convex lens (4) are positioned between laser instrument (3) and collimation convex lens (6) and the focus of optically focused convex lens (4) overlaps with the focus that collimates convex lens (6); Described beam splitter (5) is positioned between optically focused convex lens (4) and collimation convex lens (6), is divided into the first light beam and the second light beam for the light of autocollimation convex lens in future (6); Described standard optic plane glass crystal (7) is positioned at collimation convex lens (6) and the opposing side of beam splitter (5), and the opposing surface of this standard optic plane glass crystal (7) and collimation convex lens (6) is standard flat (71);
Described conical mirror (8) is positioned at described hollow cylinder to be detected (2), and the turning axle of conical mirror (8) and hollow cylinder (2) and standard optic plane glass crystal (7) dead in line separately, the circular conical surface (81) of described conical mirror (8) and the inside surface (1) of described hollow cylinder (2) are placed face-to-face, this conical mirror (8) thus moving along axis the inside surface (1) of realizing hollow cylinder (2) scans;
Interference pattern receiving-member (9) is positioned at described beam splitter (5) one sides, for receiving the second light beam from beam splitter (5).
2. optical detection apparatus according to claim 1, it is characterized in that: in the time that the inside surface (1) of hollow cylinder (2) is parallel with hollow cylinder (2) axis, the circular conical surface (81) of described conical mirror (8) is 45 ° with the axis angle of conical mirror (8); In the time that the inside surface (1) of hollow cylinder (2) and the angle theta of hollow cylinder (2) axis are obtuse angle, the cone angle of described conical mirror (8) is obtuse angle; In the time that the inside surface (1) of hollow cylinder (2) and the angle theta of hollow cylinder (2) axis are acute angle, the cone angle of described conical mirror (8) is acute angle.
3. optical detection apparatus according to claim 1 and 2, is characterized in that: described optically focused convex lens (4) are provided with one first aperture (10) with the focus overlapping position of collimation convex lens (6).
4. optical interdferometer according to claim 1 and 2, is characterized in that: between described beam splitter (5) and interference pattern receiving-member (9), be provided with a second orifice diaphragm (11).
5. optical detection apparatus according to claim 1 and 2, is characterized in that: described interference pattern receiving-member (9) is CCD camera or other imaging receiving devices.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320733413.1U CN203657757U (en) | 2013-11-19 | 2013-11-19 | Optical detection apparatus of hollow cylinder inner surface |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201320733413.1U CN203657757U (en) | 2013-11-19 | 2013-11-19 | Optical detection apparatus of hollow cylinder inner surface |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103615972A (en) * | 2013-11-19 | 2014-03-05 | 苏州慧利仪器有限责任公司 | Optical interferometer used for detecting inner surface of hollow cylinder |
| CN105509639A (en) * | 2014-09-24 | 2016-04-20 | 通用电气公司 | Measuring system and measuring method for measuring geometrical characteristics |
| CN105651180A (en) * | 2016-03-16 | 2016-06-08 | 苏州富强科技有限公司 | Carrier assembly for vision imaging measurement system |
| CN105651176A (en) * | 2016-03-16 | 2016-06-08 | 苏州富强科技有限公司 | Light deflection device for vision imaging measurement system |
| CN107436127A (en) * | 2017-09-07 | 2017-12-05 | 王镛 | A kind of device and method for railway train body interior space dimension high-acruracy survey |
| CN110595389A (en) * | 2019-09-02 | 2019-12-20 | 深圳技术大学 | Monocular-lens-based acquisition device and three-dimensional reconstruction imaging system |
| CN110595390A (en) * | 2019-09-02 | 2019-12-20 | 深圳技术大学 | Stripe projection device based on rectangular pyramid reflector and three-dimensional reconstruction imaging system |
| CN110617781A (en) * | 2019-09-02 | 2019-12-27 | 深圳技术大学 | Binocular-based acquisition device and three-dimensional reconstruction imaging system |
| CN110617780A (en) * | 2019-09-02 | 2019-12-27 | 深圳技术大学 | Laser interference device and three-dimensional reconstruction imaging system applying same |
| CN111536876A (en) * | 2020-06-02 | 2020-08-14 | 华东理工大学 | In-situ measurement method for sealing surface of three-eccentric center butterfly valve |
| CN112817117A (en) * | 2020-12-28 | 2021-05-18 | 西南技术物理研究所 | Parabolic reflector auxiliary device with auto-collimation adjusting function |
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2013
- 2013-11-19 CN CN201320733413.1U patent/CN203657757U/en not_active Expired - Lifetime
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103615972A (en) * | 2013-11-19 | 2014-03-05 | 苏州慧利仪器有限责任公司 | Optical interferometer used for detecting inner surface of hollow cylinder |
| CN105509639A (en) * | 2014-09-24 | 2016-04-20 | 通用电气公司 | Measuring system and measuring method for measuring geometrical characteristics |
| US9970753B2 (en) | 2014-09-24 | 2018-05-15 | General Electric Company | System and method of measuring geometric characteristics of object |
| CN105509639B (en) * | 2014-09-24 | 2019-01-01 | 通用电气公司 | For the measuring system and measurement method of measure geometry feature |
| CN105651180B (en) * | 2016-03-16 | 2019-05-28 | 苏州富强科技有限公司 | A kind of carrier component for visual imaging measuring system |
| CN105651180A (en) * | 2016-03-16 | 2016-06-08 | 苏州富强科技有限公司 | Carrier assembly for vision imaging measurement system |
| CN105651176A (en) * | 2016-03-16 | 2016-06-08 | 苏州富强科技有限公司 | Light deflection device for vision imaging measurement system |
| CN105651176B (en) * | 2016-03-16 | 2019-03-05 | 苏州富强科技有限公司 | A kind of light-deflection apparatus for visual imaging measuring system |
| CN107436127A (en) * | 2017-09-07 | 2017-12-05 | 王镛 | A kind of device and method for railway train body interior space dimension high-acruracy survey |
| CN110595389A (en) * | 2019-09-02 | 2019-12-20 | 深圳技术大学 | Monocular-lens-based acquisition device and three-dimensional reconstruction imaging system |
| CN110595390A (en) * | 2019-09-02 | 2019-12-20 | 深圳技术大学 | Stripe projection device based on rectangular pyramid reflector and three-dimensional reconstruction imaging system |
| CN110617781A (en) * | 2019-09-02 | 2019-12-27 | 深圳技术大学 | Binocular-based acquisition device and three-dimensional reconstruction imaging system |
| CN110617780A (en) * | 2019-09-02 | 2019-12-27 | 深圳技术大学 | Laser interference device and three-dimensional reconstruction imaging system applying same |
| CN110617780B (en) * | 2019-09-02 | 2021-11-09 | 深圳技术大学 | Laser interference device and three-dimensional reconstruction imaging system applying same |
| CN111536876A (en) * | 2020-06-02 | 2020-08-14 | 华东理工大学 | In-situ measurement method for sealing surface of three-eccentric center butterfly valve |
| CN111536876B (en) * | 2020-06-02 | 2021-07-13 | 华东理工大学 | In-situ measurement method for sealing surface of three-eccentric center butterfly valve |
| CN112817117A (en) * | 2020-12-28 | 2021-05-18 | 西南技术物理研究所 | Parabolic reflector auxiliary device with auto-collimation adjusting function |
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