CN203657756U - Optical detection apparatus of cylinder external surface - Google Patents
Optical detection apparatus of cylinder external surface Download PDFInfo
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- CN203657756U CN203657756U CN201320732395.5U CN201320732395U CN203657756U CN 203657756 U CN203657756 U CN 203657756U CN 201320732395 U CN201320732395 U CN 201320732395U CN 203657756 U CN203657756 U CN 203657756U
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- convex lens
- cylinder
- catoptron
- annular slope
- outside surface
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- 230000001154 acute effect Effects 0.000 claims description 6
- 238000003384 imaging method Methods 0.000 claims description 4
- 238000012360 testing method Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 description 8
- 230000007613 environmental effect Effects 0.000 description 3
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Abstract
Disclosed in the utility model is an optical detection apparatus of a cylinder external surface. A light-collecting convex lens is arranged between a laser and a collimating convex lens, wherein the focus of the light-collecting convex lens is superposed with that of the collimating convex lens. A beam splitter is arranged between the light-collecting convex lens and the collimating convex lens and is used for splitting lights from the collimating convex lens into a first light beam and a second light beam. A standard optical flat unit is arranged at one side, opposite to the beam splitter, of the collimating convex lens; and the surface, opposite to the collimating convex lens, of the standard optical flat unit is a standard plane. An annular reflection inclined-surface located in the center of an annular inclined-surface reflection mirror is arranged along the circumference and is arranged at the inner side; a to-be-detected cylinder is arranged in the annular inclined-surface reflection mirror; and the rotating shaft of the annular inclined-surface reflection mirror is superposed with respective axises of the cylinder and the standard optical flat unit and the annular reflection inclined-surface of the annular inclined-surface reflection mirror and the external surface of the cylinder are arranged in a face-to-face mode. With the apparatus, all morphology information of the external surface of the three-dimensional cylinder can be obtained by one time. Meanwhile, the testing efficient, precision and reliability are substantially improved.
Description
Technical field
The utility model relates to optical detection apparatus, relates in particular to a kind of optical detection apparatus of right cylinder outside surface.
Background technology
Interference of light technology is modern times one of the most accurate effective measuring technologies, it integrates contemporary state-of-the-art technology, the newest fruits that extensively adopts the fields such as computer technology, laser technology, electronic technology, semiconductor technology, can complete the check to optical element and system quickly and accurately.At optical workshop of today, from the design processing and check debuging, proofreading and correct and testing to optical system of optical element, interferometer has become a kind of easy operating, reliable, high precision, intelligentized requisite test verification device, and it has immeasurable effect in the production in enormous quantities of optical element and system and check.
But existing interferometer often detects pattern deviation for face shape, for example bending or local bending or embossed area, detect and need repeatedly repeatedly to detect for the pattern of three-dimensional surface shape, can not once obtain whole three-dimensional surface shape patterns; Secondly, existing interferometer accuracy of detection and reliability are easily subject to the such environmental effects such as extraneous vibration and temperature, air-flow.Therefore, how to design the high precision of the whole stereoscopic column external surface of a kind of disposable acquisition pattern information, the optical interdferometer of reliability, become the direction that those skilled in the art make great efforts.
Summary of the invention
The utility model provides a kind of optical detection apparatus of right cylinder outside surface, and this optical interdferometer has been realized the whole stereoscopic column external surface of disposable acquisition pattern information, has also greatly improved testing efficiency, precision and reliability simultaneously.
For achieving the above object, the technical solution adopted in the utility model is: a kind of optical detection apparatus of right cylinder outside surface, described outside surface along cylinder circumferentially and be positioned at inner side or outside, comprise laser instrument, optically focused convex lens, beam splitter, collimation convex lens, standard optic plane glass crystal and annular slope catoptron as object lens, described optically focused convex lens between laser instrument and collimation convex lens and the focus of optically focused convex lens overlap with the focus that collimates convex lens; Described beam splitter is between optically focused convex lens and collimation convex lens, and for future, the light of autocollimation convex lens is divided into the first light beam and the second light beam; Described standard optic plane glass crystal is positioned at the opposing side of collimation convex lens and beam splitter, and this standard optic plane glass crystal surface opposing with collimating convex lens is standard flat;
The annular reflection inclined-plane that is positioned at annular slope catoptron central authorities along it circumferentially and be positioned at inner side, described described cylinder to be detected is positioned at annular slope catoptron, and the turning axle of annular slope catoptron and cylinder and standard optic plane glass crystal dead in line separately, the annular reflection inclined-plane of described annular slope catoptron and the outside surface of cylinder are placed face-to-face, thereby this annular slope catoptron moves the outside surface scanning realizing cylinder along axis;
Interference pattern receiving-member is positioned at described beam splitter one side, for receiving the second light beam from beam splitter.
It is as follows that technique scheme is further improved technical scheme:
1. in such scheme, in the time that the outside surface of cylinder is parallel with column axis, the cone angle of described annular slope catoptron is right angle; In the time that the outside surface of cylinder and the angle theta of column axis are acute angle, the cone angle of described annular slope catoptron is obtuse angle; In the time that the outside surface of cylinder and the angle theta of column axis are obtuse angle, the cone angle of described annular slope catoptron is acute angle.
2. in such scheme, described optically focused convex lens are provided with one first aperture with the focus overlapping position of collimation convex lens.
3. in such scheme, between described beam splitter and interference pattern receiving-member, be provided with a second orifice diaphragm.
4. in such scheme, described interference pattern receiving-member is CCD camera or imaging screen.
Because technique scheme is used, the utility model compared with prior art has following advantages:
1. the optical detection apparatus of the utility model right cylinder outside surface, its optically focused convex lens between laser instrument and collimation convex lens and the focus of optically focused convex lens overlap with the focus that collimates convex lens, described beam splitter is between optically focused convex lens and collimation convex lens, and for future, the light of autocollimation convex lens is divided into the first light beam and the second light beam, described standard optic plane glass crystal is positioned at collimation convex lens and the opposing side of beam splitter, this standard optic plane glass crystal surface opposing with collimating convex lens is standard flat, the annular reflection inclined-plane that is positioned at annular slope catoptron central authorities along it circumferentially and be positioned at inner side, described described cylinder to be detected is positioned at annular slope catoptron, and the turning axle of annular slope catoptron and cylinder and standard optic plane glass crystal dead in line separately, the annular reflection inclined-plane of described annular slope catoptron and the outside surface of cylinder are placed face-to-face, the whole stereoscopic column external surface of the real-time disposable acquisition of energy pattern information, testing efficiency and precision are improved.
2. the optical detection apparatus of the utility model right cylinder outside surface, its reference beam and measuring beam are through same light path, the variation of the environmental factor such as vibration and temperature, air-flow can produce common mode inhibition each other to external world, generally also can obtain stable interference fringe without shock insulation and constant temperature, anti seismic efficiency is good, environmental requirement is low to external world, has greatly improved precision and reliability.
Accompanying drawing explanation
Accompanying drawing 1 is the utility model cylinder one structural representation;
Accompanying drawing 2 is the optical interdferometer structural representation for detection of accompanying drawing 1 cartridge outer surface;
Accompanying drawing 3 is the utility model cylinder two structural representations;
Accompanying drawing 4 is the optical interdferometer structural representation for detection of accompanying drawing 3 cartridge outer surfaces;
Accompanying drawing 5 is the structural representation that accompanying drawing 3 cylinders overturn after 180 °;
Accompanying drawing 6 is the optical interdferometer structural representation for detection of accompanying drawing 5 open column outside surfaces;
Accompanying drawing 7 is the utility model Perfect Interferometry schematic diagram.
In above accompanying drawing: 1, outside surface; 2, cylinder; 3, laser instrument; 4, optically focused convex lens; 5, beam splitter; 6, collimation convex lens; 7, standard optic plane glass crystal; 71, standard flat; 8, annular slope catoptron; 81, annular reflection inclined-plane; 9, interference pattern receiving-member; 10, the first aperture; 11, second orifice diaphragm.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further described:
Embodiment 1: a kind of optical detection apparatus of right cylinder outside surface, described outside surface 1 along cylinder 2 circumferentially and be positioned at outside, comprise laser instrument 3, optically focused convex lens 4, beam splitter 5, collimation convex lens 6, standard optic plane glass crystal 7 and annular slope catoptron 8 as object lens, described optically focused convex lens 4 between laser instrument 3 and collimation convex lens 6 and the focus of optically focused convex lens 4 overlap with the focus that collimates convex lens 6; Described beam splitter 5 between optically focused convex lens 4 and collimation convex lens 6, for future autocollimation convex lens 6 light be divided into the first light beam and the second light beam; Described standard optic plane glass crystal 7 is positioned at the opposing side of collimation convex lens 6 and beam splitter 5, and the opposing surface of this standard optic plane glass crystal 7 and collimation convex lens 6 is standard flat 71;
The annular reflection inclined-plane 81 that is positioned at annular slope catoptron 8 central authorities along it circumferentially and be positioned at inner side, described described cylinder 2 to be detected is positioned at annular slope catoptron 8, and the turning axle of annular slope catoptron 8 and cylinder 2 and standard optic plane glass crystal 7 dead in line separately, the annular reflection inclined-plane 81 of described annular slope catoptron 8 is placed face-to-face with the outside surface 1 of cylinder 2, thereby this annular slope catoptron 8 moves realization along axis, the outside surface 1 of cylinder 2 is scanned;
Interference pattern receiving-member 9 is positioned at described beam splitter 5 one sides, for receiving the second light beam from beam splitter 5.
Above-mentioned optically focused convex lens 4 are provided with one first aperture 10 with the focus overlapping position of collimation convex lens 6.
Between above-mentioned beam splitter 5 and interference pattern receiving-member 9, be provided with a second orifice diaphragm 11.
Above-mentioned interference pattern receiving-member 9 is CCD camera or imaging screen.
The outside surface 1 of above-mentioned cylinder 2 and cylinder 2 axis are when parallel, and as shown in accompanying drawing 1,2, the cone angle of described annular slope catoptron 8 is right angle, and the vertical scanning that can realize by moving up and down annular slope catoptron 8 whole cylinder 2 outside surfaces detects.
Embodiment 2: a kind of optical detection apparatus of right cylinder outside surface, described outside surface 1 along cylinder 2 circumferentially and be positioned at outside, comprise laser instrument 3, optically focused convex lens 4, beam splitter 5, collimation convex lens 6, standard optic plane glass crystal 7 and annular slope catoptron 8 as object lens, described optically focused convex lens 4 between laser instrument 3 and collimation convex lens 6 and the focus of optically focused convex lens 4 overlap with the focus that collimates convex lens 6; Described beam splitter 5 between optically focused convex lens 4 and collimation convex lens 6, for future autocollimation convex lens 6 light be divided into the first light beam and the second light beam; Described standard optic plane glass crystal 7 is positioned at the opposing side of collimation convex lens 6 and beam splitter 5, and the opposing surface of this standard optic plane glass crystal 7 and collimation convex lens 6 is standard flat 71;
The annular reflection inclined-plane 81 that is positioned at annular slope catoptron 8 central authorities along it circumferentially and be positioned at inner side, described described cylinder 2 to be detected is positioned at annular slope catoptron 8, and the turning axle of annular slope catoptron 8 and cylinder 2 and standard optic plane glass crystal 7 dead in line separately, the annular reflection inclined-plane 81 of described annular slope catoptron 8 is placed face-to-face with the outside surface 1 of cylinder 2, thereby this annular slope catoptron 8 moves realization along axis, the outside surface 1 of cylinder 2 is scanned;
Interference pattern receiving-member 9 is positioned at described beam splitter 5 one sides, for receiving the second light beam from beam splitter 5.
Above-mentioned optically focused convex lens 4 are provided with one first aperture 10 with the focus overlapping position of collimation convex lens 6.
Between above-mentioned beam splitter 5 and interference pattern receiving-member 9, be provided with a second orifice diaphragm 11.
Above-mentioned interference pattern receiving-member 9 is CCD camera or imaging screen.
In the time that the outside surface 1 of above-mentioned cylinder 2 is acute angle with the angle theta of cylinder 2 axis, the cone angle of described annular slope catoptron 8 is obtuse angle, and the vertical scanning that can realize by moving up and down annular slope catoptron 8 whole cylinder 2 outside surfaces detects;
In the time that the outside surface 1 of above-mentioned cylinder 2 is obtuse angle with the angle theta of cylinder 2 axis, the cone angle of described annular slope catoptron 8 is acute angle, and the vertical scanning that can realize by moving up and down annular slope catoptron 8 whole cylinder 2 outside surfaces detects.
The optical detection apparatus of the present embodiment right cylinder outside surface, the course of work is as follows.
The described light beam by laser instrument 3 outgoing is converged at aperture 10 places in the focus that collimates convex lens 6 by optically focused convex lens 4, light beam sees through beam splitter 5 by collimating convex lens 6 with parallel outgoing, see through standard optic plane glass crystal 7, then reflex on tested cylinder 2 outside surfaces 1 through annular slope catoptron 8.The lower surface of accurate optical flat 7 is standard flats 71, annular slope catoptron 8 and the coaxial also vertical below that is put in standard optic plane glass crystal 7 of tested cylinder 2, and the outside flat 1 in corresponding cylinder 2 outsides, annular reflection inclined-plane 81 of annular slope catoptron 8 is tested surface.Part light reflects from standard flat 71, and another part light is mapped on tested outside surface 1 through standard flat 71, is reflected back a part of light by tested outside surface 1.This two parts light all reflects through beam splitter 5, and at emergent pupil, 11 places form two bright aperture pictures.Be that CCD camera focusing is on the interference fringe localization face between standard flat 71 and tested outside surface 1 again by interference pattern receiving-member 9, just can absorb on localization face by the interference pattern forming between standard flat 71 and tested outside surface 1, then carry out corrugated recovery and information processing by the professional software in computing machine.The same, when one-time detection, can only detect the latter half of measured piece, so after one-time detection,, by measured piece Rotate 180 degree, detect the first half.
Above-described embodiment is only explanation technical conceive of the present utility model and feature, and its object is to allow person skilled in the art can understand content of the present utility model and implement according to this, can not limit protection domain of the present utility model with this.All equivalences of doing according to the utility model Spirit Essence change or modify, within all should being encompassed in protection domain of the present utility model.
Claims (5)
1. the optical detection apparatus of a right cylinder outside surface, described outside surface (1) along described cylinder (2) circumferentially and be positioned at outside, it is characterized in that: comprise laser instrument (3), optically focused convex lens (4), beam splitter (5), collimation convex lens (6), standard optic plane glass crystal (7) and annular slope catoptron (8) as object lens, described optically focused convex lens (4) are positioned between laser instrument (3) and collimation convex lens (6) and the focus of optically focused convex lens (4) overlaps with the focus that collimates convex lens (6); Described beam splitter (5) is positioned between optically focused convex lens (4) and collimation convex lens (6), is divided into the first light beam and the second light beam for the light of autocollimation convex lens in future (6); Described standard optic plane glass crystal (7) is positioned at collimation convex lens (6) and the opposing side of beam splitter (5), and the opposing surface of this standard optic plane glass crystal (7) and collimation convex lens (6) is standard flat (71);
The annular reflection inclined-plane (81) that is positioned at annular slope catoptron (8) central authorities along it circumferentially and be positioned at inner side, described described cylinder to be detected (2) is positioned at annular slope catoptron (8), and the turning axle of annular slope catoptron (8) and cylinder (2) and standard optic plane glass crystal (7) dead in line separately, the annular reflection inclined-plane (81) of described annular slope catoptron (8) and the outside surface (1) of cylinder (2) are placed face-to-face, this annular slope catoptron (8) thus moving along axis the outside surface (1) of realizing cylinder (2) scans;
Interference pattern receiving-member (9) is positioned at described beam splitter (5) one sides, for receiving the second light beam from beam splitter (5).
2. optical detection apparatus according to claim 1, is characterized in that: in the time that the outside surface (1) of cylinder (2) is parallel with cylinder (2) axis, the cone angle of described annular slope catoptron (8) is right angle; In the time that the outside surface (1) of cylinder (2) and the angle theta of cylinder (2) axis are acute angle, the cone angle of described annular slope catoptron (8) is obtuse angle; In the time that the outside surface (1) of cylinder (2) and the angle theta of cylinder (2) axis are obtuse angle, the cone angle of described annular slope catoptron (8) is acute angle.
3. optical detection apparatus according to claim 1, is characterized in that: described optically focused convex lens (4) are provided with one first aperture (10) with the focus overlapping position of collimation convex lens (6).
4. optical detection apparatus instrument according to claim 1, is characterized in that: between described beam splitter (5) and interference pattern receiving-member (9), be provided with a second orifice diaphragm (11).
5. optical detection apparatus according to claim 1, is characterized in that: described interference pattern receiving-member (9) is CCD camera or imaging screen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320732395.5U CN203657756U (en) | 2013-11-19 | 2013-11-19 | Optical detection apparatus of cylinder external surface |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320732395.5U CN203657756U (en) | 2013-11-19 | 2013-11-19 | Optical detection apparatus of cylinder external surface |
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| CN203657756U true CN203657756U (en) | 2014-06-18 |
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| CN201320732395.5U Expired - Lifetime CN203657756U (en) | 2013-11-19 | 2013-11-19 | Optical detection apparatus of cylinder external surface |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103615971A (en) * | 2013-11-19 | 2014-03-05 | 苏州慧利仪器有限责任公司 | Optical interferometer used for detecting outer surface of cylinder |
| CN105651180A (en) * | 2016-03-16 | 2016-06-08 | 苏州富强科技有限公司 | Carrier assembly for vision imaging measurement system |
| CN105651176A (en) * | 2016-03-16 | 2016-06-08 | 苏州富强科技有限公司 | Light deflection device for vision imaging measurement system |
| WO2018000943A1 (en) * | 2016-07-01 | 2018-01-04 | 苏州大学张家港工业技术研究院 | Method and apparatus for detecting concave cylindrical surfaces and cylindrical diverging lenses |
-
2013
- 2013-11-19 CN CN201320732395.5U patent/CN203657756U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103615971A (en) * | 2013-11-19 | 2014-03-05 | 苏州慧利仪器有限责任公司 | Optical interferometer used for detecting outer surface of cylinder |
| CN103615971B (en) * | 2013-11-19 | 2016-06-29 | 苏州慧利仪器有限责任公司 | For detecting the optical interdferometer of cylindrical outer surface |
| CN105651180A (en) * | 2016-03-16 | 2016-06-08 | 苏州富强科技有限公司 | Carrier assembly for vision imaging measurement system |
| CN105651176A (en) * | 2016-03-16 | 2016-06-08 | 苏州富强科技有限公司 | Light deflection device for vision imaging measurement system |
| CN105651176B (en) * | 2016-03-16 | 2019-03-05 | 苏州富强科技有限公司 | A kind of light-deflection apparatus for visual imaging measuring system |
| CN105651180B (en) * | 2016-03-16 | 2019-05-28 | 苏州富强科技有限公司 | A kind of carrier component for visual imaging measuring system |
| WO2018000943A1 (en) * | 2016-07-01 | 2018-01-04 | 苏州大学张家港工业技术研究院 | Method and apparatus for detecting concave cylindrical surfaces and cylindrical diverging lenses |
| US10663289B2 (en) | 2016-07-01 | 2020-05-26 | Soochow University | Method and apparatus for detecting concave cylinder and cylindrical diverging lens |
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Granted publication date: 20140618 |