CN203687888U - Optical detecting apparatus for outer groove surface of annular guide rail - Google Patents
Optical detecting apparatus for outer groove surface of annular guide rail Download PDFInfo
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- CN203687888U CN203687888U CN201320735708.2U CN201320735708U CN203687888U CN 203687888 U CN203687888 U CN 203687888U CN 201320735708 U CN201320735708 U CN 201320735708U CN 203687888 U CN203687888 U CN 203687888U
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- convex lens
- guide rail
- lens
- ring
- shaped guide
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- 230000003287 optical effect Effects 0.000 title claims abstract description 28
- 238000001514 detection method Methods 0.000 claims description 26
- 238000003384 imaging method Methods 0.000 claims description 3
- 238000012360 testing method Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 description 8
- 230000007613 environmental effect Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000004807 localization Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001915 proofreading effect Effects 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
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Abstract
The utility model discloses an optical detecting apparatus for the outer groove surface of an annular guide rail. A condenser convex lens is arranged between a laser device and a collimating convex lens and the focus of the condenser convex lens and the focus of the collimating convex lens are superposed. A beam splitter is arranged between the condenser convex lens and the collimating convex lens and is used for dividing light from the collimating convex lens into a first light beam and a second light beam. Opposite surfaces of a reference lens and the collimating convex lens are convex surfaces. A reverse surface of the convex surface of the reference lens is a standard reference surface. An annular reflection inclined surface on the center of an annular inclined surface reflector is arranged along the circumference and in the annular inclined surface reflector. The annular guide rail to be detected is arranged in the annular inclined surface reflector. The rotating shaft of the annular inclined surface reflector is superposed on the axes of the annular guide rail and the reference lens. The annular guide rail is outside the focus of the reference lens. The optical detecting apparatus may acquire all three-dimensional morphology information of the outer groove surface of the annular guide rail at one time and greatly improve testing efficiency, precision, and reliability.
Description
Technical field
The utility model relates to optical detection apparatus, relates in particular to the optical detection apparatus of the outer groove surface of a kind of ring-shaped guide rail.
Background technology
Interference of light technology is modern times one of the most accurate effective measuring technologies, it integrates contemporary state-of-the-art technology, the newest fruits that extensively adopts the fields such as computer technology, laser technology, electronic technology, semiconductor technology, can complete the inspection to optical element and system quickly and accurately.At optical workshop of today, from the design processing and inspection debuging, proofreading and correct and testing to optical system of optical element, interferometer has become a kind of easy operating, reliable, high precision, intelligentized requisite test verification device, and it has immeasurable effect in the production in enormous quantities of optical element and system and inspection.
But existing interferometer often detects pattern deviation for face shape, for example bending or local bending or embossed area, detect and need repeatedly repeatedly to detect for the pattern of three-dimensional surface shape, can not once obtain whole three-dimensional surface shape patterns; Secondly, existing interferometer accuracy of detection and reliability are easily subject to the such environmental effects such as extraneous vibration and temperature, air-flow.Therefore, how to design the high precision of the outer groove surface pattern information of the whole three-dimensional circular guide rails of a kind of disposable acquisition, the optical detection apparatus of reliability, become the direction that those skilled in the art make great efforts.
Summary of the invention
The utility model provides the optical detection apparatus of the outer groove surface of a kind of ring-shaped guide rail, and the outer groove surface pattern information of the whole three-dimensional circular guide rails of this optical detection apparatus disposable acquisition of energy, has also improved testing efficiency, precision and reliability simultaneously greatly.
For achieving the above object, the technical solution adopted in the utility model is: the optical detection apparatus of the outer groove surface of a kind of ring-shaped guide rail, described outer groove surface along ring-shaped guide rail circumferentially and be positioned at inner side or outside, comprise laser instrument, optically focused convex lens, beam splitter, as the collimation convex lens of object lens, with reference to lens and annular slope catoptron, described optically focused convex lens between laser instrument and collimation convex lens and the focus of optically focused convex lens overlap with the focus that collimates convex lens; Described beam splitter is between optically focused convex lens and collimation convex lens, and for future, the light of autocollimation convex lens is divided into the first light beam and the second light beam; Describedly be positioned at the opposing side of collimation convex lens and beam splitter with reference to lens, this is convex surface with reference to the lens surface relative with collimating convex lens, and this is canonical reference face with reference to lens and the opposing surface of convex surface;
The annular reflection inclined-plane that is positioned at annular slope catoptron central authorities along it circumferentially and be positioned at inner side, described described ring-shaped guide rail to be detected is positioned at annular slope catoptron, and the turning axle of annular slope catoptron and ring-shaped guide rail and with reference to lens dead in line separately, the annular reflection inclined-plane of described annular slope catoptron with arrange face-to-face along the outer groove surface of ring-shaped guide rail, described ring-shaped guide rail is positioned at beyond 1 times of focal length with reference to lens;
Interference pattern receiving-member is positioned at described beam splitter one side, for receiving the second light beam from beam splitter.
It is as follows that technique scheme is further improved technical scheme:
1. in such scheme, the vertical line on annular reflection inclined-plane of described annular slope catoptron and the axis angle of ring-shaped guide rail are 45 ° or between 45 ° and 90 ° or be less than 45 °.
2. in such scheme, the vertical line on annular reflection inclined-plane of described annular slope catoptron and the axis angle of ring-shaped guide rail are 60 ° or 30 °.
3. in such scheme, described optically focused convex lens are provided with one first aperture with the focus overlapping position of collimation convex lens.
4. in such scheme, between described beam splitter and interference pattern receiving-member, be provided with a second orifice diaphragm.
5. in such scheme, described interference pattern receiving-member is CCD camera or imaging receiving device.
Because technique scheme is used, the utility model compared with prior art has following advantages:
1. the optical detection apparatus of the outer groove surface of the utility model ring-shaped guide rail, its optically focused convex lens between laser instrument and collimation convex lens and the focus of optically focused convex lens overlap with the focus that collimates convex lens; Described beam splitter is between optically focused convex lens and collimation convex lens, and for future, the light of autocollimation convex lens is divided into the first light beam and the second light beam; Describedly be positioned at collimation convex lens and the opposing side of beam splitter with reference to lens, this is convex surface with reference to the lens surface relative with collimation convex lens, this is canonical reference face with reference to lens and the opposing surface of convex surface, described annular slope catoptron is positioned at described ring-shaped guide rail to be detected, and the turning axle of annular slope catoptron and ring-shaped guide rail and with reference to lens dead in line separately, the outer groove surface pattern information of the whole three-dimensional circular guide rails of the real-time disposable acquisition of energy, has improved testing efficiency and precision.
2. the optical detection apparatus of the outer groove surface of the utility model ring-shaped guide rail, its reference beam and measuring beam are through same light path, the variation of the environmental factor such as vibration and temperature, air-flow can produce common mode inhibition each other to external world, generally also can obtain stable interference fringe without shock insulation and constant temperature, anti seismic efficiency is good, environmental requirement is low to external world, has greatly improved precision and reliability.
Brief description of the drawings
Accompanying drawing 1 is the utility model ring-shaped guide rail one structural representation;
Accompanying drawing 2 is the optical detection apparatus structural representation for detection of the outer groove surface of accompanying drawing 1 ring-shaped guide rail;
Accompanying drawing 3 is the utility model ring-shaped guide rail two structural representations;
Accompanying drawing 4 is the optical detection apparatus structural representation for detection of the outer groove surface of accompanying drawing 3 ring-shaped guide rails;
Accompanying drawing 5 is the utility model ring-shaped guide rail three structural representations;
Accompanying drawing 6 is the optical detection apparatus structural representation for detection of the outer groove surface of accompanying drawing 5 ring-shaped guide rails;
Accompanying drawing 7 is the utility model Perfect Interferometry schematic diagram.
In above accompanying drawing: 1, outer groove surface; 2, ring-shaped guide rail; 3, laser instrument; 4, optically focused convex lens; 5, beam splitter; 6, collimation convex lens; 7, with reference to lens; 71, convex surface; 72, canonical reference face; 8, annular slope catoptron; 81, annular reflection inclined-plane; 9, interference pattern receiving-member; 10, the first aperture; 11, second orifice diaphragm.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further described:
The annular reflection inclined-plane 81 that is positioned at annular slope catoptron 8 central authorities along it circumferentially and be positioned at inner side, described described ring-shaped guide rail 2 to be detected is positioned at annular slope catoptron 8, and the turning axle of annular slope catoptron 8 and ring-shaped guide rail 2 with reference to lens 7 dead in line separately, the annular reflection inclined-plane 81 of described annular slope catoptron 8 with arrange face-to-face along the outer groove surface 1 of ring-shaped guide rail 2, described ring-shaped guide rail 2 is positioned at beyond the focus with reference to lens 7;
Interference pattern receiving-member 9 is positioned at described beam splitter 5 one sides, for receiving the second light beam from beam splitter 5.
Above-mentioned optically focused convex lens 4 are provided with one first aperture 10 with the focus overlapping position of collimation convex lens 6.
Between above-mentioned beam splitter 5 and interference pattern receiving-member 9, be provided with a second orifice diaphragm 11.
Above-mentioned interference pattern receiving-member 9 is accepted device for CCD camera or imaging.
As shown in accompanying drawing 1,2, in embodiment 1, the vertical line on the annular reflection inclined-plane 81 of above-mentioned annular slope catoptron 8 and the axis angle of ring-shaped guide rail 2 are 45 °, and to be measured is ring-shaped guide rail one; As shown in accompanying drawing 3,4, in embodiment 2, the vertical line on the annular reflection inclined-plane 81 of above-mentioned annular slope catoptron 8 and the axis angle of ring-shaped guide rail 2 are 60 °, and to be measured is ring-shaped guide rail two; As shown in accompanying drawing 5,6, in embodiment 3, the vertical line on the annular reflection inclined-plane 81 of above-mentioned annular slope catoptron 8 and the axis angle of ring-shaped guide rail 2 are 30 °, and to be measured is ring-shaped guide rail three.
The optical detection apparatus of the outer groove surface of the present embodiment ring-shaped guide rail, the course of work is as follows.
The described light beam by laser instrument 3 outgoing is converged at aperture 10 places in the focus that collimates convex lens 6 by optically focused convex lens 4, light beam sees through beam splitter 5 by collimating convex lens 6 with parallel outgoing, see through with reference to lens 7, then reflex on tested ring-shaped guide rail 2 through conical mirror 8.Its lower surface is canonical reference face 72, conical mirror 8 and the coaxial also vertical below being put in reference to lens 7 of tested ring-shaped guide rail 2, and the outer groove surface 1 in the corresponding ring-shaped guide rail of circular cone reflecting surface 81 2 outsides of conical mirror 8 is tested surface.Part light reflects from canonical reference face 72, and another part light is mapped on tested outer groove surface 1 through canonical reference face 72, is reflected back a part of light by tested outer groove surface 1.This two parts light all reflects through beam splitter 5, and at emergent pupil, 11 places form two bright aperture pictures.Be that CCD camera focusing is on the interference fringe localization face between canonical reference face 72 and tested outer groove surface 1 again by interference pattern receiving-member 9, just can absorb on localization face by the interference pattern forming between canonical reference face 72 and tested outer groove surface 1, then carry out corrugated recovery and information processing by the professional software in computing machine.The same, when one-time detection, can only detect the latter half of measured piece, so after one-time detection,, by measured piece Rotate 180 degree, detect the first half.
Above-described embodiment is only explanation technical conceive of the present utility model and feature, and its object is to allow person skilled in the art can understand content of the present utility model and implement according to this, can not limit protection domain of the present utility model with this.All equivalences of doing according to the utility model Spirit Essence change or modify, within all should being encompassed in protection domain of the present utility model.
Claims (6)
1. the optical detection apparatus of the outer groove surface of ring-shaped guide rail, described outer groove surface (1) along ring-shaped guide rail (2) circumferentially and be positioned at outside, it is characterized in that: comprise laser instrument (3), optically focused convex lens (4), beam splitter (5), as the collimation convex lens (6) of object lens, with reference to lens (7) and annular slope catoptron (8), described optically focused convex lens (4) are positioned between laser instrument (3) and collimation convex lens (6) and the focus of optically focused convex lens (4) overlaps with the focus that collimates convex lens (6); Described beam splitter (5) is positioned between optically focused convex lens (4) and collimation convex lens (6), is divided into the first light beam and the second light beam for the light of autocollimation convex lens in future (6); Describedly be positioned at collimation convex lens (6) and the opposing side of beam splitter (5) with reference to lens (7), this is convex surface (71) with reference to lens (7) surface relative with collimation convex lens (6), and this is canonical reference face (72) with reference to the opposing surface of lens (7) and convex surface (71);
The annular reflection inclined-plane (81) that is positioned at annular slope catoptron (8) central authorities along it circumferentially and be positioned at inner side, described described ring-shaped guide rail to be detected (2) is positioned at annular slope catoptron (8), and the turning axle of annular slope catoptron (8) and ring-shaped guide rail (2) with reference to lens (7) dead in line separately, the annular reflection inclined-plane (81) of described annular slope catoptron (8) with arrange face-to-face along the outer groove surface (1) of ring-shaped guide rail (2), described ring-shaped guide rail (2) is positioned at beyond 1 times of focal length with reference to lens (7);
Interference pattern receiving-member (9) is positioned at described beam splitter (5) one sides, for receiving the second light beam from beam splitter (5).
2. optical detection apparatus according to claim 1, is characterized in that: the vertical line on the annular reflection inclined-plane (81) of described annular slope catoptron (8) and the axis angle of ring-shaped guide rail (2) are 45 ° or between 45 ° and 90 ° or be less than 45 °.
3. optical detection apparatus according to claim 2, is characterized in that: the vertical line on the annular reflection inclined-plane (81) of described annular slope catoptron (8) and the axis angle of ring-shaped guide rail (2) are 60 ° or 30 °.
4. optical detection apparatus according to claim 1 and 2, is characterized in that: described optically focused convex lens (4) are provided with one first aperture (10) with the focus overlapping position of collimation convex lens (6).
5. optical detection apparatus according to claim 1 and 2, is characterized in that: between described beam splitter (5) and interference pattern receiving-member (9), be provided with a second orifice diaphragm (11).
6. optical detection apparatus according to claim 1 and 2, is characterized in that: described interference pattern receiving-member (9) is CCD camera or imaging receiving device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320735708.2U CN203687888U (en) | 2013-11-19 | 2013-11-19 | Optical detecting apparatus for outer groove surface of annular guide rail |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320735708.2U CN203687888U (en) | 2013-11-19 | 2013-11-19 | Optical detecting apparatus for outer groove surface of annular guide rail |
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| Publication Number | Publication Date |
|---|---|
| CN203687888U true CN203687888U (en) | 2014-07-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320735708.2U Expired - Lifetime CN203687888U (en) | 2013-11-19 | 2013-11-19 | Optical detecting apparatus for outer groove surface of annular guide rail |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103697806A (en) * | 2013-11-19 | 2014-04-02 | 苏州慧利仪器有限责任公司 | Optical interferometer for detecting outer arc surface of annular guide rail |
| CN105466350A (en) * | 2015-11-17 | 2016-04-06 | 江苏永信光学仪器有限公司 | Optical glass detector lens protection device |
-
2013
- 2013-11-19 CN CN201320735708.2U patent/CN203687888U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103697806A (en) * | 2013-11-19 | 2014-04-02 | 苏州慧利仪器有限责任公司 | Optical interferometer for detecting outer arc surface of annular guide rail |
| CN105466350A (en) * | 2015-11-17 | 2016-04-06 | 江苏永信光学仪器有限公司 | Optical glass detector lens protection device |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20140702 |