CN105509639B - For the measuring system and measurement method of measure geometry feature - Google Patents
For the measuring system and measurement method of measure geometry feature Download PDFInfo
- Publication number
- CN105509639B CN105509639B CN201410493810.5A CN201410493810A CN105509639B CN 105509639 B CN105509639 B CN 105509639B CN 201410493810 A CN201410493810 A CN 201410493810A CN 105509639 B CN105509639 B CN 105509639B
- Authority
- CN
- China
- Prior art keywords
- light
- ring
- lens
- measuring system
- reflecting surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/24—Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/60—Analysis of geometric attributes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Immunology (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Geometry (AREA)
- Optics & Photonics (AREA)
- Astronomy & Astrophysics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Quality & Reliability (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention discloses the measuring systems and measurement method that are used to measure geometry feature.The measuring system includes: luminescence unit, for issuing collimated light beam；Front lens carrys out the prefocusing ring of light of emitting structural light to measurand to obtain the front-reflection ring of light from the measurand for collimated light beam described in reflective portion, and is used to that part collimated light beam is allowed to pass through；Rear lens, it is located at the downstream of the front lens on propagation path of light, emits the rear focusing ring of light of the structure light for reflexing to the collimated light beam at least partially through the front lens to the measurand and obtain the back reflection ring of light from the measurand；Imaging unit, for recording the combination image of the front-reflection ring of light and the back reflection ring of light；And processing unit, it is connected to the imaging unit, for obtaining at least one geometrical characteristic of the measurand according to the combination image.The invention further relates to a kind of measurement methods for measuring the geometrical characteristic of measurand.
Description
Technical field
The present invention is in relation to a kind of measuring system and measurement method more particularly to a kind of geometrical characteristic for measuring measurand
Measuring system and measurement method.
Background technique
Often there is many challenges, such as inner surface, the opening of measurement cavity when measuring the geometrical characteristic of measurand
Ladder between the radius in gap, cross section between surface, two edges or two faces.Current measuring system includes light emitting source
Emit light beam to lens, such as conical mirror.Reflection from lens light beam, which is formed, focuses ring of light irradiation measurand, the surface of measurand
Reflection focuses the ring of light and forms the reflection ring of light.Measuring system obtains the geometrical characteristic of measurand according to the reflection ring of light.However, utilizing
The measuring system that the monofocal ring of light carrys out measure geometry feature has its limitation, and such single measurement can only obtain measurand
A cross section profile.When focusing the angle of the measured surface of plane and measurand where the ring of light at non-90 degree, very
Hardly possible obtains accurate geometrical characteristic.
Therefore, it is necessary to provide a kind of measuring system and method to solve at least one above mentioned technical problem.
Summary of the invention
One aspect of the present invention is to provide a kind of measuring system.The measuring system includes: luminescence unit, for issuing
Collimated light beam；Front lens, the prefocusing ring of light to the measurand for carrying out emitting structural light for collimated light beam described in reflective portion are come
The front-reflection ring of light from the measurand is obtained, and is used to that part collimated light beam is allowed to pass through；Rear lens, in light propagation
It is located at the downstream of the front lens on path, emits for reflexing to the collimated light beam at least partially through the front lens
The rear focusing ring of light of the structure light obtains the back reflection ring of light from the measurand to the measurand；Imaging is single
Member, for recording the combination image of the front-reflection ring of light and the back reflection ring of light；And processing unit, it is connected to the imaging
Unit, for obtaining at least one geometrical characteristic of the measurand according to the combination image.
Another aspect of the present invention is to provide a kind of measuring system.The measuring system includes: luminescence unit, for sending out
Collimated light beam out；Structure light generates unit, for generating structure light, comprising: preceding conical reflecting surface is used to standard described in reflective portion
Collimated optical beam forms the prefocusing ring of light of the structure light to obtain the front-reflection ring of light, and is used to allow part collimated light beam logical
It crosses；And rear conical reflecting surface, for reflex to formed at least partially through the collimated light beam of the preceding conical reflecting surface it is described
The rear focusing ring of light of structure light obtains the back reflection ring of light.The measuring system further includes imaging unit, described preceding anti-for recording
Penetrate the combination image of the ring of light and the back reflection ring of light；And processing unit, it is connected to the imaging unit, is used to according to described group
Close at least one geometrical characteristic that image obtains measurand.
Another aspect of the present invention is to provide a kind of measurement method.The measurement method is comprising steps of issue collimated light
Beam；The prefocusing ring of light that collimated light beam described in reflective portion carrys out emitting structural light obtains the front-reflection ring of light to measurand, and
And part collimated light beam is passed through；Reflex at least partially through the collimated light beam be generated and transmitted by the structure light after
It focuses the ring of light and obtains the back reflection ring of light to the measurand；Record the group of the front-reflection ring of light and the back reflection ring of light
Close image；And at least one geometrical characteristic of the measurand is obtained according to the combination image.
Detailed description of the invention
Embodiments of the present invention are described in conjunction with the accompanying drawings, the present invention may be better understood, in attached drawing
In:
Fig. 1 show the schematic diagram of one embodiment of measuring system of the present invention；
Fig. 2 show the schematic diagram of one embodiment of present invention combination image and independent image；
Fig. 3 show the schematic diagram of another embodiment of measuring system of the present invention；
Fig. 4 show the schematic diagram of another embodiment of measuring system of the present invention；
The structure light that Fig. 5 show measuring system of the present invention generates the schematic diagram of one embodiment of unit；
Fig. 6 show the schematic diagram that structure of the invention light generates another embodiment of unit；
Fig. 7 show the schematic diagram that structure of the invention light generates the further embodiment of unit；
Fig. 8 show the schematic diagram that structure of the invention light generates another embodiment of unit；
Fig. 9 show the schematic diagram that structure of the invention light generates another embodiment of unit；
Figure 10 show the flow chart of one embodiment of measurement method of the present invention；
Figure 11 show the flow chart of another embodiment of measurement method of the present invention；
Figure 12 show the schematic diagram that one embodiment of cavity of cone is measured using measuring system of the present invention；
Figure 13 show the schematic diagram of one embodiment using measuring system of the present invention measurement open surface.
Specific embodiment
Unless otherwise defined, the technical term or scientific term used herein should be in fields of the present invention and has
The ordinary meaning that the personage of general technical ability is understood.Used in present patent application specification and claims " the
One " " the second " and similar word are not offered as any sequence, quantity or importance, and are used only to distinguish different groups
At part.The similar word such as " comprising " or "comprising" means to appear in the element or object before " comprising " or "comprising"
Part covers the element for appearing in " comprising " or "comprising" presented hereinafter or object and its equivalent, it is not excluded that other elements or
Person's object." connection " either the similar word such as " connected " is not limited to physics or mechanical connection, but can wrap
Electrical or optical connection is included, it is either direct or indirect.
Fig. 1 show the schematic diagram of the measuring system 100 of one embodiment.Measuring system 100 can be used to measure tested
At least one geometrical characteristic of object.Such as the mistake of the three-D profile of cavity, the diameter of cylindrical cavity, open surface can be measured
Cross the distance between radius, the ladder sign of step and two edges in gap.The crack on the surface of measurand and protuberance
It can be measured by measuring system 100.Measuring system 100 includes luminescence unit 15, structure light generation unit 16, imaging unit 21
With processing unit 23.Luminescence unit 15 is used to issue collimated light beam 25.In one embodiment, luminescence unit 15 includes light source 27
With collimating mirror 29.Light source 27 can be laser diode, light emitting diode (LED) or other point light sources.Collimating mirror 29 is used to standard
The light that direct light source 27 issues generates collimated light beam 25.In another embodiment, luminescence unit 15 includes according to certain rule
Several collimating mirrors of arrangement collimate the light from light source 27.In another embodiment, luminescence unit 15 includes one or more
Other a optical elements.For example, light source 27 is placed in the position for deviateing the measurement axis 31 of measuring system 100, multiple plane mirrors are used
Come change light source 27 light the direction of propagation.In the illustrated embodiment, light source 27 and collimating mirror 29 are located on measurement axis 31.In figure
Each light beam only indicates that actual light beam is not an only line but several light with a line with the arrow.In this reality
It applies in example, measurand 11 is pipeline.
Structure light generates unit 16 and is used to generate structure light 32 comprising front lens 17 and rear lens 19.Front lens 17 is used
Carry out reflective portion collimated light beam 25 and carry out the prefocusing ring of light 33 of emitting structural light 32 to be obtained to measurand 11 from tested pair
As the 11 front-reflection ring of light 37, and it is used to that part collimated light beam 25 is allowed to pass through.Wherein, " pass through " and refer to light from front lens 17
In pass through or around front lens 17 around front lens 17.Front lens 17 includes preceding conical reflecting surface 50, and it is quasi- to be used to reflective portion
Collimated optical beam 25 forms the prefocusing ring of light 33 of structure light 32 to obtain the front-reflection ring of light 37, and is used to allow part collimated light beam
25 pass through.
In the illustrated embodiment, front lens 17 includes the light transmission that the permission collimated light beam 25 being set in front lens 17 passes through
Channel 39.Light transmission passage 39 passes through preceding conical reflecting surface 50 and collimated light beam 25 is allowed to pass through.The diameter of light transmission passage 39 is less than
The diameter of collimated light beam 25 so allows part collimated light beam 25 to pass therethrough.In one embodiment, light transmission passage 39 is one
The through-hole extended along measurement axis 31.In another embodiment, light transmission passage 39 is made of translucent material, such as glass, can allow
Collimated light beam 25 passes through.In one embodiment, the end of front lens 17 is plane, that is to say, that light transmission passage 39 is cylinder
Shape, end are plane, so that collimated light beam 25 is propagated in light transmission passage 39 along measurement axis 31.
In the illustrated embodiment, the preceding conical reflecting surface 50 of front lens 17 reflects the peripheral part and collimation of collimated light beam 25
The inner round portion of light beam 25 propagates to rear lens 19.Front lens 17 is located on measurement axis 31.In the illustrated embodiment, front lens 17
For conical mirror, such as 45 degree of conical mirror.Light transmission passage 39 extends from the tip of conical mirror along central shaft.In front lens 17
Mandrel and measurement axis 31 are overlapped.The prefocusing ring of light 33 is perpendicular to measurement axis 31.The prefocusing ring of light 33 is irradiated to measurand 11
Reflecting surface 35 generates the front-reflection ring of light 37.
Rear lens 19 are located at the downstream of front lens 17 on propagation path of light, for emitting at least partially by front lens 17
Collimated light beam 25 carry out the rear focusing ring of light 41 of emitting structural light 32 and obtained after measurand 11 to measurand 11
Reflect the ring of light 43.Rear lens 19 include rear conical reflecting surface 52, for reflexing to the standard at least partially through preceding conical reflecting surface 50
Collimated optical beam 25 forms the rear focusing ring of light 41 of structure light to obtain the back reflection ring of light 43.
In the illustrated embodiment, structure light 32 includes the prefocusing ring of light 33 and the rear focusing ring of light 41.Rear lens, such as taper
Mirror is located on measurement axis 31.In the illustrated embodiment, the conical mirror that rear lens 19 are 45 degree.In one embodiment, rear lens
19 and 17 arranged in co-axial alignment of front lens, 52 arranged in co-axial alignment of preceding conical reflecting surface 50 and rear conical reflecting surface.The prefocusing ring of light 33 is with after
It is parallel to focus the ring of light 41.The generation back reflection ring of light 43 of reflecting surface 35 that the ring of light 41 is irradiated to measurand 11 is focused afterwards.
Imaging unit 21, such as camera, for recording the combination image of the front-reflection ring of light 37 and the back reflection ring of light 43.Imaging
Unit 21 includes object lens or objective lens 45 and detector array 46.The front-reflection ring of light 37 and the back reflection ring of light 43 by object lens 45 at
Picture.Image is recorded in detector array 46, such as CCD, CMOS.In one embodiment, luminescence unit 15 and imaging unit
21 are located at the opposite sides of front lens 17 and rear lens 19.
Processing unit 23 is connected to imaging unit 21, for several according at least one of combination image acquisition measurand 11
What feature.In one embodiment, processing unit 23 is computer or other calculate equipment, such as field programmable gate array
(FPGA), microprocessor etc., wherein processor can be multi-core processor.Processing unit 23 connects the front-reflection ring of light 37 and rear anti-
Corresponding point on the ring of light 43 is penetrated to obtain the geometrical characteristic of measurand 11.For example, processing unit 23 is according to the front-reflection ring of light
37 generate the two-dimensional silhouette of the preceding cross section of measurand 11 and generate the rear transversal of measurand 11 according to the back reflection ring of light 43
The two-dimensional silhouette in face, it is right in the two-dimensional silhouette of the preceding cross section of linearly connected and the two-dimensional silhouette of rear cross section that processing unit 23 passes through
The structure of the three-dimensional measurand 11 of the point output answered.An example is only enumerated herein, however it is not limited to this.
In one embodiment, measuring system 100 further comprises opening and closing member 47.Opening and closing member 47 operationally prevents
The back reflection ring of light 43 generates.When opening and closing member 47 is opened, light be may pass through.When opening and closing member 47 is closed, light is blocked.One
In a embodiment, opening and closing member 47 is on propagation path of light between front lens 17 and rear lens 19.Opening and closing member 47 passes through
Stop collimated light beam 25 to reach rear lens 19 to prevent to generate the back reflection ring of light 43, so only generates and the front-reflection ring of light is imaged
37.In another embodiment, opening and closing member 47 is arranged around rear lens 19, focuses the ring of light 41 after operationally stopping and reaches
Measurand 11, to not generate the back reflection ring of light 43.In a further embodiment, opening and closing member 47 can be used to stop back reflection
The ring of light 43 reaches imaging unit 21, so that the back reflection ring of light 43 not be imaged.Imaging unit 21 is used to record the front-reflection ring of light 37
Independent image, and processing unit 23 is used under the auxiliary of independent image distinguish 37 He of the front-reflection ring of light from combination image
The back reflection ring of light 43.Opening and closing member 47 can be mechanical opening and closing member, liquid crystal opening and closing member or other can in light transmission and
The component switched between light-blocking.
Fig. 2 show the schematic diagram of the combination image 200 and independent image 202 of one embodiment.Image 200 is combined to show
The image of the front-reflection ring of light 37 and the image of the back reflection ring of light 43.The image of the front-reflection ring of light 37 illustrates measurand 11
The profile of the preceding cross section of reflecting surface 35, and the image of the back reflection ring of light 43 illustrates the rear cross of the reflecting surface 35 of measurand 11
The profile in section.In the illustrated embodiment, the image of the front-reflection ring of light 37 and the back reflection ring of light 43 is all annular, that is to say, that
The preceding cross section of measurand 11 and the profile of rear cross section are all annulars.In the present embodiment, measurand 11 can be rotary table
The cavity of shape.It is only illustrated herein with this but not limited to this.The image of the front-reflection ring of light 37 and the back reflection ring of light 43 is not according to
With cross section shape and change.
Independent image 202 only shows the front-reflection ring of light 37.According to combination image 200 and independent image 202 by constitutional diagram
As the image of the 200 front-reflection ring of light 37 and the image of the back reflection ring of light 43 separate.In this way, even if combining the preceding anti-of image 200
Penetrate point on point and the back reflection ring of light 43 on the ring of light 37 very close to or when overlapping, the point on two rings of light can also be distinguished.
In conjunction with reference Fig. 1, the image of the front-reflection ring of light 37 of Fig. 2 amplifies multiplied by amplification factor to obtain the figure of the prefocusing ring of light 33
Picture, wherein the amplification factor be the distance between the prefocusing ring of light 33 and object lens 45 L1 divided by object lens 45 and detector array 46 it
Between distance L3 result.Similar, the image of the back reflection ring of light 43 of Fig. 2 amplifies multiplied by another amplification factor come after obtaining
The image for focusing the ring of light 41 focuses the distance between the ring of light 41 and object lens 45 L2 divided by 45 He of object lens after wherein the amplification factor is
The result of the distance between detector array 46 L3.In one embodiment, the image of the prefocusing ring of light 33 and the rear focusing ring of light
41 image is overlapped annulus.
Fig. 3 show the schematic diagram of the measuring system 300 of another embodiment.The measuring system 300 of Fig. 3 is similar to Fig. 1
Measuring system 100.It is compared to the measuring system 100 of Fig. 1, the luminescence unit 15 and imaging unit of the measuring system 300 of Fig. 3
21 are located at the same side of front lens 17 and rear lens 19, and the structure of such measuring system 300 is compacter.The light source of luminescence unit 15
27 launch collimated light beam 25 to front lens 17 by collimating mirror 29, and 17 reflecting part of front lens is divided to the reflection of measurand 11
Face 35, and part light passes through front lens 17 to opening and closing member 47 and rear lens 19.Remaining propagation path of light and Fig. 1 embodiment phase
Together.
Fig. 4 show the schematic diagram of the measuring system 400 of further embodiment.The measuring system 400 of Fig. 4 is similar to Fig. 1
Measuring system 100.Be compared to the measuring system 100 of Fig. 1, the structure light 32 of the measuring system 400 of Fig. 4 generate unit 16 into
One step includes at least one intermediate lens 18 on propagation path of light between front lens 17 and rear lens 19.Intermediate lens
18, which are used to reflective portion collimated light beam 25, carrys out at least one intermediate focusing ring of light 34 of emitting structural light 32 to obtain at least one
The centre reflection ring of light 38, and be used to so that part collimated light beam 25 passes through.Only for the purpose illustrated, one is only shown in figure
A intermediate lens 18.It is used according to specific, it may include any number of intermediate lens 18 that structure light, which generates unit 16,.One
In embodiment, intermediate lens 18 can be used for the precision of images and require in relatively high utilization, for example, between the ring of light 33,34 and 41 away from
Measurement accuracy can be improved from smaller.In another embodiment, intermediate lens 18 can measure the reflecting surface 35 of measurand 11
Bigger region, to improve measuring speed.
In the illustrated embodiment, intermediate lens 18 includes light transmission passage 40, is similar to the light transmission passage 39 of front lens 17.
The diameter of the light transmission passage 40 of intermediate lens 18 is less than the light transmission passage 39 of front lens 17.In one embodiment, structure light produces
Raw unit 16 includes two or more intermediate lenses 18.The diameter of the light transmission passage 40 of the intermediate lens 18 in downstream is less than
The light transmission passage 40 of the intermediate lens 18 of upstream.In this way, collimated light beam 25 can be reflected by intermediate lens 18 and part passes through
Between lens 18.The centre reflection ring of light 38 is also imaged by imaging unit 21, and processing unit 23 is anti-according to the front-reflection ring of light 37, centre
The ring of light 38 and the back reflection ring of light 43 are penetrated to obtain the geometrical characteristic of measurand 11, to improve the precision of measurement.In a reality
It applies in example, structure light imaging unit 16 further comprises opening and closing member 48, is similar to opening and closing member 47.Opening and closing member 47 and 48
It is located between two lens.The number of opening and closing member is set according to the number of lens.In this way, multiple in combination image
The reflection ring of light 37,38,43 can be distinguished.
The structure light that Fig. 5 show another embodiment generates the schematic diagram of unit 16.First bottom surface of front lens 17
Diameter D1 is less than the diameter of collimated light beam 25, and the diameter D2 of the second bottom surface of rear lens 19 is greater than the first bottom surface of front lens 17
171 diameter D1.Front lens 17 is smaller than collimated light beam 25 and rear lens 19 are bigger than front lens 17.What preceding conical reflecting surface 50 surrounded
The diameter D1 of first bottom surface 171 is less than the diameter of collimated light beam 25, and the second bottom surface 191 that conical reflecting surface 52 surrounds afterwards is straight
Diameter D2 is greater than the diameter D1 for the first bottom surface 171 that preceding conical reflecting surface 50 surrounds.In this way, preceding conical reflecting surface 50 reflects collimated light
The inner round portion of beam 25 forms the prefocusing ring of light 33, and the peripheral part of collimated light beam 25 passes through front lens from the side of front lens 17
17 to rear lens 19.The peripheral part that the rear conical reflecting surface 52 of rear lens 19 reflects collimated light beam 25 focuses the ring of light after being formed
41。
In one embodiment, front lens 17 and rear lens 19 manufacture integrally, are a piece of lens.Preceding conical reflecting surface 50
It is arranged into a ladder with rear conical reflecting surface 52.Step 54 is formed between preceding conical reflecting surface 50 and rear conical reflecting surface 52.
Preceding conical reflecting surface 50 and rear conical reflecting surface 52 are staggered on the direction perpendicular to lens centre axis, so that two tapers are anti-
Penetrating face 50,52 can receive collimated light beam 25.In another embodiment, front lens 17 and rear lens 19 can be made into
Independent two panels lens.For example, front lens 17 is the conical mirror smaller than collimated light beam 25, and rear lens 19 are bigger than front lens 17
Conical mirror.Front lens 17 and rear lens 19 in Fig. 1,3 and 4 may be produced that independent two panels lens.In the illustrated embodiment,
Opening and closing member 47 is provided around rear lens 19, for the opening and closing member of annular, can be used to focus the arrival quilt of the ring of light 41 after stopping
Survey object.
The structure light that Fig. 6 show further embodiment generates the schematic diagram of unit 16.The structure light of Fig. 6 generates unit 16
Unit 16 is generated similar to structure light shown in fig. 5.Structure light compared to Fig. 5 generates unit 16, and the structure light of Fig. 6 generates single
Member 16 includes intermediate lens 18, and intermediate lens 18 includes intermediate conical reflecting surface 51.It includes at least one that structure light, which generates unit 16,
A intermediate conical reflecting surface 51 on propagation path of light between inner cone shape reflecting surface 50 and rear conical reflecting surface 52, it is intermediate
Conical reflecting surface 51 be used to reflective portion collimated light beam 25 formed structure light at least one it is intermediate focus ring of light 34 obtain to
Few intermediate reflection ring of light, and be used to so that part collimated light beam 25 passes through.In another embodiment, two or more
Intermediate lens 18 is used to generate the intermediate focusing ring of light 34.Conical reflecting surface 50,51 and 52 arranges into a ladder.
The structure light that Fig. 7 show another embodiment generates the schematic diagram of unit 16.The structure light of Fig. 7 generates unit 16
Unit 16 is generated similar to structure light shown in fig. 5.Structure light compared to Fig. 5 generates unit 16, and the structure light of Fig. 7 generates single
The front lens 17 and rear lens 19 of member 16 are the interior tapered mirror formed in the inside of an eyeglass.Front lens 17 and rear lens 19
It is formed in the block 60 for the light transmission that a piece of outer surface 601 is plane, the block 60 of light transmission can be by glass or other light transmissions
Material be made.Preceding conical reflecting surface 50 and rear conical reflecting surface 52 are formed in the inner surface of the block 60 of light transmission by reflecting material
Carry out reflection light.In one embodiment, the lens 17 to 19 that structure light shown in fig. 6 generates unit 16 can be made into inside
Tapered lens, be similar to structure light shown in Fig. 7 generate unit 16 lens.
The structure light that Fig. 8 show another embodiment generates the schematic diagram of unit 16.Rear lens 19 are to be formed in light transmission
Block 60 inside conical mirror.Front lens 17 is formed in the front surface of block 60.The top of front lens 17 is the flat of light transmission
Face 62, so that part collimated light beam 25 is by rear lens 19.Preceding conical reflecting surface 50 is directly on the surface of the block of light transmission 60
It is formed or is attached to 60 surface of block after being formed.
The structure light that Fig. 9 show another embodiment generates the schematic diagram of unit 16.The structure light of Fig. 9 generates unit 16
Unit 16 is generated similar to structure light shown in Fig. 8.Structure light compared to Fig. 8 generates unit 16, and the structure light of Fig. 9 generates single
Member 16 further comprises the intermediate lens 18 being formed in the block 60 of light transmission.Intermediate lens 18 is smaller than rear lens 19, and intermediate
The basal diameter of lens 18 is smaller than the diameter of the top plan 62 of front lens 17, carrys out reflective portion collimated light beam 25 and makes part quasi-
Collimated optical beam 25 is by rear lens 19.Arrangement of the arrangement of intermediate lens 18 and rear lens 19 similar to the lens of Fig. 5 and 7.?
In another embodiment, two or more intermediate lenses 18 be may be formed in the block 60 of light transmission.
Figure 10 show the process of the measurement method 600 of the geometrical characteristic for being used to measure measurand of one embodiment
Figure.In step 601, collimated light beam is issued.In step 603, reflective portion collimated light beam carrys out the prefocusing ring of light of emitting structural light
The front-reflection ring of light is obtained to measurand, and part collimated light beam is passed through.Collimated light beam is reflected to form by front lens
The prefocusing ring of light.The surface reflection prefocusing ring of light of measurand forms the front-reflection ring of light.
In step 605, reflex at least partially through collimated light beam carry out the rear focusing ring of light of emitting structural light to tested pair
As obtaining the back reflection ring of light.By collimated light beam reflected to form by rear lens after focus the ring of light.The surface of measurand is anti-
The ring of light is focused after penetrating generates the back reflection ring of light.In one embodiment, the front-reflection ring of light is parallel with the back reflection ring of light.
In step 607, the combination image of the front-reflection ring of light and the back reflection ring of light is recorded.Combination image shows measurand
Preceding cross section profile and rear cross section profile.In step 609, at least one of measurand is obtained according to combination image
Geometrical characteristic.It puts and handles to obtain the geometrical characteristic of measurand accordingly on the connection front-reflection ring of light and the back reflection ring of light.
In one embodiment, measurement method 600 further comprises recording the independent image of the front-reflection ring of light and independent
The front-reflection ring of light and the back reflection ring of light are distinguished from combination image under the auxiliary of image.Only the front-reflection ring of light is imaged, such as
This obtains the point on the front-reflection ring of light.It is thus possible to distinguish the point and the back reflection ring of light of the front-reflection ring of light from combination image
Point.In another embodiment, only the back reflection ring of light is imaged, and so obtains the point on the back reflection ring of light.It is thus possible to from
The point of the front-reflection ring of light and the point of the back reflection ring of light are distinguished in combination image.
In one embodiment, traverse measuring device or measurand continuously measure and are imaged measurand.Example
Such as, measuring device is packaged in borescope, and the geometrical characteristic of pipeline or cavity is measured in borescope insertion pipeline or cavity.Figure
As that can be used to check crack, warpage, surface bulge etc..
Figure 11 show the flow chart of the measurement method 700 of another embodiment.The measurement method 700 of Figure 11 is similar to figure
10 measurement method 600.It is compared to the measurement method 600 of Figure 10, the measurement method 700 of Figure 11 further comprises step 604.
In step 604, reflection collimated light beam is generated and transmitted by being located at the prefocusing ring of light and rear focusing between the ring of light for structure light
Between focus the ring of light and obtain the intermediate reflection ring of light to measurand.The centre reflection ring of light is also imaged.According to the front-reflection ring of light, in
Between reflect the image of the ring of light and the back reflection ring of light to obtain the geometrical characteristic of measurand, to improve measurement accuracy.
In one embodiment, in order to distinguish the front-reflection ring of light, the back reflection ring of light and the intermediate reflection ring of light, the back reflection ring of light and
The centre reflection ring of light is imaged respectively, and and combines image comparison to distinguish each ring of light.In another embodiment, front-reflection light
Ring and the intermediate reflection ring of light can independently be imaged to obtain the point on the front-reflection ring of light and the intermediate reflection ring of light respectively, and with
Image comparison is combined to distinguish each ring of light.In a further embodiment, the front-reflection ring of light and the back reflection ring of light are imaged respectively, and
Each ring of light is distinguished with image comparison is combined.
Figure 12 is the signal that one embodiment of cavity 800 of cone is measured using measuring system 100,300 or 400
Figure.Measuring system 100,300 or 400 obtains the front-reflection ring of light 37 and back reflection reflected from 800 inner surface of conical cavity
The ring of light 43.Corresponding point obtains the three-D profile of cavity 800 on the linearly connected front-reflection ring of light 37 and the back reflection ring of light 43, such as
This obtains the geometrical characteristic of cavity 800.In one embodiment, the front-reflection ring of light 37 and the back reflection ring of light 43 are not orthogonal to circular cone
The central axis 801 of shape cavity 800.
Figure 13 is the schematic diagram that one embodiment of open surface 900 is measured using measuring system 100,300 or 400.Measurement
System 100,300 or 400 obtains the front-reflection ring of light 37 and the back reflection ring of light 43 gone out from the surface reflection of open surface 900.It is preceding anti-
Penetrating the ring of light 37 and the back reflection ring of light 43 is curve respectively.It is corresponding on the linearly connected front-reflection ring of light 37 and the back reflection ring of light 43
Point obtains the three-D profile of open surface 900, so obtains the geometrical characteristic of open surface 900.
Although in conjunction with specific embodiment, the present invention is described, it will be appreciated by those skilled in the art that
It can be with many modifications may be made and modification to the present invention.It is therefore contemplated that claims are intended to cover in the present invention
All such modifications and modification in true spirit and range.
Claims (16)
1. a kind of measuring system, characterized in that it comprises:
Luminescence unit, for issuing collimated light beam；
Front lens carrys out the prefocusing ring of light of emitting structural light to measurand for collimated light beam described in reflective portion to be come
From the front-reflection ring of light of the measurand, and it is used to that part collimated light beam is allowed to pass through；
Rear lens are located at the downstream of the front lens, on propagation path of light for reflexing at least partially through the front lens
The collimated light beam obtain to emit the rear focusing ring of light of the structure light to the measurand from described tested pair
The back reflection ring of light of elephant；
Imaging unit, for recording the combination image of the front-reflection ring of light and the back reflection ring of light；And
Processing unit is connected to the imaging unit, for obtaining at least the one of the measurand according to the combination image
A geometrical characteristic；
Wherein, the diameter of the first bottom surface of the front lens is less than the diameter of the collimated light beam, and the second of the rear lens
The diameter of bottom surface is greater than the diameter of the first bottom surface of the front lens.
2. measuring system as described in claim 1, it is characterised in that: the front lens includes being set in the front lens
The light transmission passage for allowing the collimated light beam to pass through.
3. measuring system as described in claim 1, it is characterised in that: the front lens includes preceding conical reflecting surface, after described
Lens include rear conical reflecting surface, and the preceding conical reflecting surface and the rear conical reflecting surface arrange into a ladder.
4. measuring system as described in claim 1, it is characterised in that: the front lens and the rear lens arranged in co-axial alignment.
5. measuring system as described in claim 1, it is characterised in that: the measuring system further comprises at least one in light
Intermediate lens on propagation path between the front lens and the rear lens, the intermediate lens are used to reflective portion institute
Collimated light beam is stated to emit at least one intermediate focusing ring of light of the structure light and reflect ring of light among at least one to obtain, and
For so that the part collimated light beam passes through.
6. measuring system as described in claim 1, it is characterised in that: the measuring system further comprises opening and closing member, institute
Stating opening and closing member operationally prevents the back reflection ring of light from generating, and the imaging unit is used to record the front-reflection ring of light
Independent image, and the processing unit is used to distinguish the front-reflection light from the combination image using the independent image
Ring and the back reflection ring of light.
7. a kind of measuring system, characterized in that it comprises:
Luminescence unit, for issuing collimated light beam；
Structure light generates unit, for generating structure light, comprising:
Preceding conical reflecting surface, it is preceding anti-to obtain to form the prefocusing ring of light of the structure light for collimated light beam described in reflective portion
The ring of light is penetrated, and is used to that the part collimated light beam is allowed to pass through；And
Conical reflecting surface afterwards forms the knot at least partially through the collimated light beam of the preceding conical reflecting surface for reflexing to
The rear focusing ring of light of structure light obtains the back reflection ring of light；
Imaging unit, for recording the combination image of the front-reflection ring of light and the back reflection ring of light；And
Processing unit is connected to the imaging unit, for several according at least one of the combination image acquisition measurand
What feature；
Wherein, the diameter for the first bottom surface that the preceding conical reflecting surface surrounds be less than the collimated light beam diameter, and it is described after
The diameter for the second bottom surface that conical reflecting surface surrounds is greater than the diameter for the first bottom surface that the preceding conical reflecting surface surrounds.
8. measuring system as claimed in claim 7, it is characterised in that: it includes across the inner cone that the structure light, which generates unit,
The light transmission passage that the permission collimated light beam of shape reflecting surface passes through.
9. measuring system as claimed in claim 7, it is characterised in that: the preceding conical reflecting surface and the rear conical reflecting surface
It arranges into a ladder.
10. measuring system as claimed in claim 7, it is characterised in that: the preceding conical reflecting surface and the rear taper reflection
Face arranged in co-axial alignment.
11. measuring system as claimed in claim 7, it is characterised in that: it further comprises at least that the structure light, which generates unit,
One intermediate conical reflecting surface being located between the preceding conical reflecting surface and the rear conical reflecting surface on propagation path of light,
The intermediate conical reflecting surface is used at least one intermediate focusing light that collimated light beam described in reflective portion forms the structure light
Ring reflects ring of light to obtain among at least one, and is used to so that the part collimated light beam passes through.
12. measuring system as claimed in claim 7, it is characterised in that: the measuring system further comprises opening and closing member, institute
Stating opening and closing member operationally prevents the back reflection ring of light from generating, and the imaging unit is used to record the front-reflection ring of light
Independent image, and the processing unit is described for distinguishing from the combination image under the auxiliary of the independent image
The front-reflection ring of light and the back reflection ring of light.
13. a kind of measurement method, which is characterized in that itself comprising steps of
Issue collimated light beam；
The prefocusing ring of light that collimated light beam described in reflective portion is generated and transmitted by structure light obtains front-reflection light to measurand
Ring, and part collimated light beam is passed through；
Reflex at least partially through the collimated light beam be generated and transmitted by the rear focusing ring of light of the structure light to described tested
Object obtains the back reflection ring of light；
Record the combination image of the front-reflection ring of light and the back reflection ring of light；And
At least one geometrical characteristic of the measurand is obtained according to the combination image.
14. measurement method as claimed in claim 13, it is characterised in that: the prefocusing ring of light of the structure light and described
It is parallel that the ring of light is focused afterwards.
15. measurement method as claimed in claim 13, it is characterised in that: the measurement method further comprises reflecting the standard
Collimated optical beam come emit the structure light be located at the prefocusing ring of light and it is described after focus between the ring of light intermediate focus the ring of light
The intermediate reflection ring of light is obtained to the measurand.
16. measurement method as claimed in claim 13, it is characterised in that: the measurement method further comprise record it is described before
It reflects the independent image of the ring of light and distinguishes the front-reflection from the combination image under the auxiliary of the independent image
The ring of light and the back reflection ring of light.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410493810.5A CN105509639B (en) | 2014-09-24 | 2014-09-24 | For the measuring system and measurement method of measure geometry feature |
| EP15186566.4A EP3001139B1 (en) | 2014-09-24 | 2015-09-23 | System and method of measuring geometric characteristics of an object |
| KR1020150135539A KR102004576B1 (en) | 2014-09-24 | 2015-09-24 | System and method of measuring geometric characteristics of object |
| US14/863,481 US9970753B2 (en) | 2014-09-24 | 2015-09-24 | System and method of measuring geometric characteristics of object |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410493810.5A CN105509639B (en) | 2014-09-24 | 2014-09-24 | For the measuring system and measurement method of measure geometry feature |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105509639A CN105509639A (en) | 2016-04-20 |
| CN105509639B true CN105509639B (en) | 2019-01-01 |
Family
ID=54199574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410493810.5A Active CN105509639B (en) | 2014-09-24 | 2014-09-24 | For the measuring system and measurement method of measure geometry feature |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9970753B2 (en) |
| EP (1) | EP3001139B1 (en) |
| KR (1) | KR102004576B1 (en) |
| CN (1) | CN105509639B (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3594668A4 (en) * | 2017-05-31 | 2020-12-16 | Nippon Steel Corporation | Tubular body inner surface inspection method and tubular body inner surface inspection device |
| US10732106B2 (en) * | 2018-02-02 | 2020-08-04 | Honeywell International Inc. | Two detector gas detection system |
| KR102545980B1 (en) | 2018-07-19 | 2023-06-21 | 액티브 서지컬, 인크. | Systems and methods for multi-modal sensing of depth in vision systems for automated surgical robots |
| CN113950279B (en) | 2019-04-08 | 2023-04-14 | 艾科缇弗外科公司 | System and method for medical imaging |
| US11347039B2 (en) * | 2019-05-22 | 2022-05-31 | The Boeing Company | Optical imaging and scanning of holes |
| WO2021035094A1 (en) | 2019-08-21 | 2021-02-25 | Activ Surgical, Inc. | Systems and methods for medical imaging |
| CN110595389A (en) * | 2019-09-02 | 2019-12-20 | 深圳技术大学 | Monocular-lens-based acquisition device and three-dimensional reconstruction imaging system |
| CN110595390B (en) * | 2019-09-02 | 2021-09-07 | 深圳技术大学 | Stripe projection device based on rectangular pyramid reflector and three-dimensional reconstruction imaging system |
| CN110617780B (en) * | 2019-09-02 | 2021-11-09 | 深圳技术大学 | Laser interference device and three-dimensional reconstruction imaging system applying same |
| CN110617781A (en) * | 2019-09-02 | 2019-12-27 | 深圳技术大学 | Binocular-based acquisition device and three-dimensional reconstruction imaging system |
| CN111156932B (en) * | 2020-03-10 | 2021-08-27 | 凌云光技术股份有限公司 | Mirror surface material roughness detection device |
| CN114706211B (en) * | 2022-04-19 | 2023-07-07 | 江苏亮点光电科技有限公司 | Beam transmission direction adjusting device based on wedge-shaped mirror pair |
| CN117268287A (en) * | 2023-11-21 | 2023-12-22 | 中国工程物理研究院激光聚变研究中心 | Contour measuring device and method for internal structure of workpiece |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040075842A1 (en) * | 2002-10-22 | 2004-04-22 | Dunn Thomas J. | Two-wavelength confocal interferometer for measuring multiple surfaces |
| CN1888817A (en) * | 2006-07-20 | 2007-01-03 | 厦门大学 | Body surface three-dimensional topographic information measuring device |
| CN101023319A (en) * | 2004-09-22 | 2007-08-22 | 罗伯特·博世有限公司 | Optical measuring device for measuring several surfaces of a measuring object |
| CN203657757U (en) * | 2013-11-19 | 2014-06-18 | 苏州慧利仪器有限责任公司 | Optical detection apparatus of hollow cylinder inner surface |
| CN103968777A (en) * | 2013-01-31 | 2014-08-06 | 奥林巴斯株式会社 | Inner surface shape measuring apparatus |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4411528A (en) * | 1981-01-19 | 1983-10-25 | Control Data Corporation | Optical displacement and contour measuring |
| US5325177A (en) | 1992-10-29 | 1994-06-28 | Environmental Research Institute Of Michigan | Optical, interferometric hole gauge |
| US5933231A (en) | 1996-07-10 | 1999-08-03 | Industrial Technology Institute | Method and system for measuring cavities and probe for use therein |
| WO2008015677A2 (en) * | 2006-08-02 | 2008-02-07 | Camtek Ltd. | Dark field illuminator and a dark field illumination method |
| JP2009025006A (en) * | 2007-07-17 | 2009-02-05 | Soatec Inc | Optical device, light source device, and optical measuring device |
| CA2597891A1 (en) | 2007-08-20 | 2009-02-20 | Marc Miousset | Multi-beam optical probe and system for dimensional measurement |
| US8638453B2 (en) | 2011-03-02 | 2014-01-28 | Envirosight Llc | Pipe diameter measurement device |
| US8786866B2 (en) | 2012-03-02 | 2014-07-22 | Baker Hughes Incorporated | Apparatus and method for determining inner profiles of hollow devices |
-
2014
- 2014-09-24 CN CN201410493810.5A patent/CN105509639B/en active Active
-
2015
- 2015-09-23 EP EP15186566.4A patent/EP3001139B1/en active Active
- 2015-09-24 KR KR1020150135539A patent/KR102004576B1/en active IP Right Grant
- 2015-09-24 US US14/863,481 patent/US9970753B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040075842A1 (en) * | 2002-10-22 | 2004-04-22 | Dunn Thomas J. | Two-wavelength confocal interferometer for measuring multiple surfaces |
| CN101023319A (en) * | 2004-09-22 | 2007-08-22 | 罗伯特·博世有限公司 | Optical measuring device for measuring several surfaces of a measuring object |
| CN1888817A (en) * | 2006-07-20 | 2007-01-03 | 厦门大学 | Body surface three-dimensional topographic information measuring device |
| CN103968777A (en) * | 2013-01-31 | 2014-08-06 | 奥林巴斯株式会社 | Inner surface shape measuring apparatus |
| CN203657757U (en) * | 2013-11-19 | 2014-06-18 | 苏州慧利仪器有限责任公司 | Optical detection apparatus of hollow cylinder inner surface |
Also Published As
| Publication number | Publication date |
|---|---|
| US9970753B2 (en) | 2018-05-15 |
| US20160084644A1 (en) | 2016-03-24 |
| EP3001139B1 (en) | 2019-02-06 |
| CN105509639A (en) | 2016-04-20 |
| KR102004576B1 (en) | 2019-07-26 |
| EP3001139A1 (en) | 2016-03-30 |
| KR20160036003A (en) | 2016-04-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105509639B (en) | For the measuring system and measurement method of measure geometry feature | |
| JP6818702B2 (en) | Optical inspection equipment and optical inspection method | |
| US20190265153A1 (en) | Integrated Lens Free Imaging Device | |
| JP6101176B2 (en) | Optical characteristic measuring apparatus and optical characteristic measuring method | |
| KR101317947B1 (en) | Apparatus for inspecting cylinder | |
| EP3220100A1 (en) | Three-dimensional shape measuring apparatus using diffraction grating | |
| CN105167766A (en) | Blood flow measuring device and blood flow measuring method | |
| FR3013129B1 (en) | DEVICE AND METHOD FOR THREE DIMENSIONAL FOCUSING FOR MICROSCOPE | |
| KR102043881B1 (en) | Inspection apparatus for hign speed and large area | |
| JP2018517147A (en) | Apparatus and method for determining characteristics of a laser beam | |
| TWI565974B (en) | Optical devices, light systems and ticket machines | |
| JP2020076717A (en) | Optical inspection device and optical inspection method | |
| JP2009015180A (en) | Interference objective lens | |
| US20140347679A1 (en) | Gap measurement device | |
| JP2015017837A (en) | Three-dimensional shape measurement device | |
| JP6570938B2 (en) | System and method for measuring geometric features of an object | |
| TWI738808B (en) | Method and system for measuring geometric parameters of through holes | |
| JP2015145978A (en) | Light regression inner surface reflection mirror conical cube | |
| JP6671938B2 (en) | Surface shape measuring device, defect determination device, and surface shape measuring method | |
| EP3796081A1 (en) | Optical imaging apparatus, robot hand, moving body, and lidar apparatus | |
| JP2015132577A (en) | Image pickup structure, image pickup head which employs the same, and three-dimensional shape measurement apparatus | |
| KR102008253B1 (en) | Multi channel optical profiler based on interferometer | |
| Hilbig et al. | Testing the performance of freeform LED optics by gradient based measurement | |
| EP3332277A1 (en) | Backscatter reductant anamorphic beam sampler | |
| JP2014173912A (en) | Shape measuring device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |