JP2009025006A - Optical device, light source device, and optical measuring device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical measuring device capable of performing various measurements with a simple constitution. <P>SOLUTION: Measuring light 124 from a light source 126 is reflected by a reflection part 121 of a cone mirror 108 through a lens system 107, and output to the measuring object 150 side through openings of light shielding members 105, 106 as wide radial light 119 for measuring a defect. Measuring light 125 transmitted through a through hole 109 of the cone mirror 108 is reflected by a reflection part 122 on the periphery of the top part 111 of a cone mirror 110, and output to the measuring object 150 side through the openings of the light shielding members 105, 106 as narrow radial light 120 for measuring a length characteristic. The light 119 for measuring a defect and the light 120 for measuring a length characteristic reflected by the measuring object 150 are detected respectively by measuring parts 112, 116, and existence determination, shape calculation or the like of a defect of the measuring object 150 is performed by an operation control part 128. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to an optical device that reflects light, a light source device that outputs light, and an optical measurement device that optically measures a measurement target.

  Conventionally, measurement light is irradiated onto a measurement target from a light source such as a semiconductor laser, the measurement light reflected by the measurement target is detected, and the shape and orientation of the measurement target based on the detected measurement light are determined. An optical measurement device has been developed that measures the distance, coordinates, and the like to the measurement point on the measurement object with respect to the position (see, for example, Patent Document 1).

  As in the invention described in Patent Document 1, when the light source is a laser semiconductor or the like, only one kind of light such as a thin linear parallel light beam can be generated. Therefore, this alone is suitable as a light source for performing various measurements. is not. Further, if it is configured to generate various lights using a large number of light emitting elements, it is possible to generate various forms of light, but there is a problem that the configuration is complicated and expensive.

JP 2006-349362 A

An object of the present invention is to provide an optical device that can be used for light generation in various forms with a simple configuration.
An object of the present invention is to provide a light source device capable of generating various forms of light with a simple configuration.
An object of the present invention is to provide an optical measurement apparatus capable of various measurements with a simple configuration.

  According to the present invention, the first cone mirror having a through hole along the central axis of the cone and having the first reflecting portion formed on the conical surface, and disposed on the bottom surface side of the first cone mirror, includes the top portion. And a second cone mirror having a second reflecting portion formed in a predetermined region of the conical surface, wherein the first and second cone mirrors are arranged so that the central axes of the cones are coaxial. An optical device is provided.

  According to the invention, the optical device includes: a light source that emits parallel light from a top side of the first cone mirror of the optical device to a region including a conical central axis of the first cone mirror; Is reflected by the first reflector and output as first output light having a predetermined width, and the light from the light source that has passed through the through hole of the first cone mirror is reflected by the second reflector. Thus, a light source device is provided that outputs the second output light that is narrower than the first output light.

Here, the first and second output lights may be configured to be output radially about the conical central axis.
The optical axis of the light source and the conical center axis of the first cone mirror are parallel axes separated by a predetermined distance, and the first output light has a profile decentered from the conical center axis, and the second output You may comprise so that light may be output radially centering | focusing on the said cone central axis.
Moreover, you may comprise so that the light shielding member which shields a part of said 1st output light and 2nd output light may be provided.

According to the invention, the light source device according to any one of the above, the first measuring means for detecting the light reflected from the measurement target by the first output light of the light source device, and the second output light being the measurement target. There is provided an optical measuring device comprising: a second measuring means for detecting the light reflected by the light.
Here, the first measurement means includes polarization means for polarizing the first output light reflected by the measurement object, and detection means for detecting the first output light polarized by the polarization means. It may be configured.

The first and second output lights are a defect measurement light for measuring a defect and a length characteristic measurement light for measuring a characteristic relating to the length, respectively, and the first measurement means is a defect reflected by a measurement object. The presence or absence of a defect in the measurement object is measured based on the measurement light, and the second measurement means measures a characteristic related to the length of the measurement object based on the length characteristic measurement light reflected from the measurement object. It may be configured.
The first and second measuring means may be configured by combining one measuring means.

The optical device according to the present invention can be used for various forms of light generation with a simple configuration.
Further, according to the light source device of the present invention, various forms of light can be generated with a simple configuration.
In addition, according to the optical measurement apparatus according to the present invention, various measurements can be performed with a simple configuration.

Hereinafter, an optical device, a light source device, and an optical measurement device according to embodiments of the present invention will be described with reference to the drawings. In addition, in each figure used by the following description, the same code | symbol is attached | subjected to the same part.
FIG. 1 is a side sectional view of an optical measuring apparatus according to a first embodiment of the present invention.
2 and 3 are respectively a cross-sectional view taken along line AA and a cross-sectional view taken along line BB in FIG.
FIG. 4 is a diagram showing a beam profile of measurement light in the first embodiment.

1 to 4, the optical measurement apparatus includes a light source unit 101, a first measurement unit 112, a second measurement unit 116, and a calculation control unit 128. The first measurement unit 112 and the calculation control unit 128 constitute a first measurement unit, and the second measurement unit 116 and the calculation control unit 128 constitute a second measurement unit.
The optical measuring device is provided so as to be movable relative to the measuring object 150 in order to measure the measuring object 150 in a wide range.

For example, the optical measuring device is used by being mounted on a linear scanning mechanism, a rotational scanning mechanism, a robot, a CNC-controlled machine tool or the like that can move and scan in three orthogonal directions. Alternatively, the optical measurement device is fixed at a predetermined position, and the measurement object 150 is measured by being attached to a moving mechanism such as an XYZ table of a machine tool.
The light source unit 101 includes a light source 126, a first lens system 107, a first cone mirror 108, a second cone mirror 110, and light shielding members 105 and 106.
The light source 126 is configured by a light emitting element such as a semiconductor laser or a light emitting diode (LED).

  The first cone mirror 108 has a through hole 109 from the top 123 to the bottom along the central axis of the cone, and a first reflecting portion 121 is formed on the conical surface. The second cone mirror 110 is disposed on the bottom surface side of the first cone mirror 108, and the second reflecting portion 122 is formed in a predetermined region of the conical surface including the top 111 thereof. In the present embodiment, the apex angles of the apex portions 123 and 111 of the first and second cone mirrors 108 and 110 are each 90 degrees.

The optical axis of the light source 126, the optical axis of the lens system 107, the conical center axis of the first cone mirror 108, and the conical center axis of the second cone mirror 110 are arranged to coincide with the optical axis 100. Thus, the first and second cone mirrors 108 and 110 are arranged so that the respective conical center axes are coaxial.
The light source 126 outputs measurement light 124 along the optical axis 100. The measurement light 124 may be light that is parallel to the optical axis or light that is not parallel.

The first lens system 107 converts measurement light 124, which is output light from the light source 126, into measurement light parallel to the optical axis 100 and outputs the measurement light.
The profile of the measurement light 125 irradiated from the first lens system 107 to the first cone mirror 108 is centered on the top 123 (in other words, the through hole 109) of the first cone mirror 108, as shown in FIG. It becomes a circular shape.

  Of the measurement light 125, the light corresponding to the through hole 109 passes through the through hole 109. On the other hand, the portion of the measurement light 125 corresponding to the first reflection portion 121 (that is, the portion not corresponding to the through hole 109 of the measurement light 125) intersects the optical axis 100 by the first reflection portion 121 (this embodiment). In this form, the light is reflected in the orthogonal direction). The light reflected by the first reflecting part 121 becomes a strip-like light having a predetermined width. The band-shaped light (light cutting band) composed of all or part of the band-shaped and disk-shaped light is used as, for example, light (defect measurement light) 119 for measuring a surface defect of the measurement object 150. The defect measurement light 119 constitutes the first output light.

  The measurement light 125 that has passed through the through hole 109 travels along the optical axis 100, and intersects the optical axis 100 by the second reflecting portion 122 including the top 111 of the second cone mirror 110 (in this embodiment, Reflected in the orthogonal direction). The light reflected by the second reflecting portion 122 is disk-shaped light having a narrower width than the defect measurement light. The linear light (light cutting line) made up of all or part of the disk-shaped light is related to, for example, the shape and size of the measurement target 150 or the length of the distance from the predetermined position to the measurement point on the measurement target 150. Used as light 120 for measuring characteristics (length characteristic measuring light) 120. The length characteristic measuring light 120 constitutes the second output light.

  A casing 127 is constituted by the cylindrical portions 102 and 103 made of a light-transmissive member and the cylindrical portion 104 made of the light-transmissive member. The light source 126, the first lens system 107, the first cone mirror 108, the second cone mirror 110, and the first measurement unit 112 of the light source unit 101 are disposed in the housing 127.

  The first light shielding member 105 has an opening 201 along the optical axis 100 and is formed in a cylindrical shape. The light shielding member 105 is configured to be rotatable in the clockwise direction or the counterclockwise direction (the arrow direction in FIGS. 2 and 3) relative to the housing 127 around the optical axis 100. Thereby, it is comprised so that the position of the opening 201 can be changed.

  A second light shielding member 106 is coaxially provided outside the first light shielding member 105. The second light shielding member 106 has an opening 202 along the optical axis 100 and is formed in a cylindrical shape. The light shielding member 106 is rotatable about the optical axis 100 relative to the casing 127 and the first light shielding member 105 in the clockwise direction or the counterclockwise direction (the arrow direction in FIGS. 2 and 3). It is configured. Thereby, it is comprised so that the position of the opening 202 can be changed.

The measurement target 150 is irradiated with the defect measurement light 119 and the length characteristic measurement light 120 through the opening 203 common to the openings 201 and 202 of the light shielding members 105 and 106.
The irradiation surface of the band-shaped defect measurement light 119 is imaged by a first measurement unit 112 configured by a CCD (Charge Coupled Device) camera or the like and used for detecting surface defects. Further, the light cutting line by the length characteristic measuring light 120 is imaged by the second measuring unit 116 constituted by a CCD camera or the like, and the feature extraction image is used for shape measurement and dimension measurement by the principle of triangulation. The

By rotating the light shielding members 105 and 106 relatively, the position and size of the opening 203 common to the openings 201 and 202 are changed, and the defect measurement light 119 and the length characteristic measurement light that irradiates the measurement target 150. The position of 120, the length of the light cutting line, etc. can be changed.
The first measurement unit 112 is a measurement unit that measures a surface defect of the measurement target 150 based on the defect measurement light 119 reflected by the measurement target 150, and includes a polarizing plate 113, a second lens system 114, and a light detection element 115. It has. As the first measurement unit 112, for example, a CCD camera can be used.

The polarizing plate 113 polarizes and outputs the defect measurement light 119 reflected by the measurement object 150. The second lens system 114 receives and converges the defect measurement light 119 from the polarizing plate 113 and outputs it. The light detection element 115 detects the defect measurement light 119 from the second lens system 114.
As the photodetection element 115, various photodetection elements such as a CCD (Position Sensitive Detector), a CMOS (Complementary Metal Oxide Semiconductor) type photosensor array (CMOS photosensor array), and the like can be used.
The polarizing plate 113 is provided in order to improve the defect measuring function. If the necessary defect measuring function can be obtained even if the polarizing plate 113 is omitted, the polarizing plate 113 can be omitted.

The second measurement unit 116 is a measurement unit that measures a defect of the measurement target 150 based on the length characteristic measurement light 120 reflected by the measurement target 150, and includes a first lens system 117 and a light detection element 118. Yes. As the second measurement unit 116, a CCD camera or the like can be used similarly to the first measurement unit 112.
The first lens system 117 receives, converges and outputs the length characteristic measurement light reflected by the measurement object 150. The light detection element 118 detects the length characteristic measurement light from the first lens system 117.

As the light detection element 118, various light detection elements such as a CCD, PSD, and CMOS light sensor array can be used in the same manner as the light detection element 115.
The arithmetic control unit 128 configured by a central processing unit (CPU) or the like determines the presence or absence of a defect in the measurement target 150 based on the defect measurement light 119 detected by the light detection element 115.

In addition, the arithmetic control unit 128 calculates characteristics relating to the length such as the shape of the measurement target 150 based on the length characteristic measurement light 120 detected by the light detection element 118.
Further, the measurement target 150 is moved while the first and second cone mirrors 108 and 110 and the measurement target 150 are relatively moved by controlling the movement of the measurement target 150 or the movement of the casing 127 by the arithmetic control unit 128. Measure characteristics of defects and length.

  In the optical measurement apparatus configured as described above, the measurement light 124 from the light source 126 is reflected in the direction intersecting the optical axis 100 by the reflection unit 121 of the cone mirror 108 via the lens system 107, and the light. A wide (width L1) fan-shaped and radial defect measurement light 119 is output to the measurement object 150 side through the opening 203 common to the shielding members 105 and 106.

The measurement light 125 that has passed through the through-hole 109 of the cone mirror 108 is reflected by the reflection portion 122 around the top 111 of the cone mirror 110, and is narrow (width) via the opening 203 common to the light shielding members 105 and 106. L2) It is output to the measuring object 150 side as fan-shaped and radial length characteristic measuring light 120.
As a result, the measurement target 150 is irradiated with the defect measuring light 119 over a wide band-shaped predetermined region, and the length characteristic measuring light 120 in which the narrow linear predetermined region is linear light (light cutting line). Irradiated by.

The defect measurement light 119 reflected by the measurement target 150 is detected as light of width m1 by the light detection element 115 via the polarizing plate 113 and the lens system 114 of the measurement unit 112, and the surface of the measurement target 150 is calculated by the arithmetic control unit 128. Whether or not there is a defect is determined.
The arithmetic control unit 128 performs image distortion processing on the image of the measurement target 150 measured by the measurement unit 112, and calculates the size and position when it is determined that a surface defect exists.

Further, the length characteristic measurement light 120 reflected by the measurement object 150 is detected by the light detection element 118 via the lens system 117 of the measurement unit 116 (position m2 from the center of the light detection element 115), and the calculation control unit. 128 calculates the shape of the measurement object 150 and the like.
In this manner, the unevenness on the optical cutting line of the measurement object 150 is imaged by the measurement unit 116 and detected as a size or shape by the arithmetic control unit 138 on the principle of triangulation.

  By performing a relative movement operation (linear scanning or rotational scanning in three orthogonal directions) between the optical measurement device and the measurement object 150 under the control of the arithmetic control unit 128, Defects, three-dimensional shapes, etc. of the measuring object 150 can be measured over a wide range. In this case, the arithmetic control unit 128 constitutes a control means.

FIG. 5 is a side sectional view of an optical measuring apparatus according to the second embodiment of the present invention.
In the first embodiment, the light shielding members 105 and 106 shared by the cone mirrors 108 and 110 are used. However, in the second embodiment, the light shielding members 105 and 106 are replaced with the cone mirrors 108 and 110. The cone mirrors 108 and 110 are configured to use different light shielding members.

  That is, in FIG. 5, corresponding to the cone mirror 108, a cylindrical first light shielding member 501 having an opening for passing the defect measuring light 119 and the defect measuring light 119 passing outside the first light shielding member 501. A second light shielding member 502 having an opening is disposed coaxially. The first light shielding member 501 and the second light shielding member 502 can rotate relative to each other and can also rotate relative to the housing 127.

  Further, a cylindrical third light shielding member 503 having an opening for passing the length characteristic measuring light 120 corresponding to the cone mirror 110, and the length characteristic measuring light 120 outside the third light shielding member 503. A fourth light shielding member 504 having a passage opening is disposed coaxially. The third light shielding member 503 and the fourth light shielding member 504 can rotate relative to each other and can also rotate relative to the casing 127.

  Since the light shielding members 501 to 504 are configured as described above, the first light shielding member 501 and the second light shielding member 502, and the third light shielding member 503 and the fourth light shielding member 504 are independently rotated. As a result, it is possible to independently change the region for outputting the defect measurement light 119 and the region for outputting the length characteristic measurement light 120. As a result, the positions and lengths of the defect measurement light 119 and the length characteristic measurement light 120 that irradiate the measurement object 150 can be changed independently, and various measurements can be performed.

FIG. 6 is a diagram showing a profile of measurement light emitted from the first lens system 107 to the first cone mirror 108 in the optical measurement apparatus according to another embodiment of the present invention.
In each of the embodiments described above, the optical axis of the first lens system 107 (the axis passing through the center of the first lens system) and the optical axis of the first cone mirror 108 are matched, and the optical axis of the first lens system 107 is aligned. The parallel measuring light 125 is applied to the first cone mirror 108. Therefore, the profile of the measurement light 125 irradiated from the first lens system 107 to the first cone mirror 108 has a circular shape with the top 123 of the first cone mirror 108 as the center, as shown in FIG.

  However, in order to output the measurement light 120 from the second cone mirror 110, the measurement light 125 output from the first lens system 107 has a profile that includes the through hole 109 and the first lens system 107. As long as the measurement light 125 can be irradiated in parallel to the through hole 109 of the first cone mirror 108. In other words, the measurement light 125 may be light that includes the through hole 109 and has an optical axis parallel to the optical axis 100. FIGS. 6A and 6B show an example in which this is realized.

  That is, in FIG. 6A, the measurement light 125 is a circular profile including the through hole 109 and the center is eccentric, and in FIG. 6B, the measurement light 125 is a semicircular profile including the through hole 109. It is. In any case, the measurement light 125 is reflected by the reflecting portion 121 of the first cone mirror 108 and is output as defect measurement light, and is output from the through hole 109 to the second cone mirror 122 side. The light is reflected by the cone mirror 110 and output as length characteristic measurement light.

In addition, since the light reflection parts 108 and 110 should just reflect the light of the width | variety required for a measurement, the reflection area | region of a light reflection part can be suitably selected as needed.
In the above-described embodiment, a plurality of measuring units 112 and 116 are used. However, the measuring units 112 and 116 may be configured by using one measuring unit.

That is, the measurement units 112 and 116 may be configured by switching according to the light for detecting one measurement unit.
Moreover, in the said embodiment, although demonstrated with the example of the light for defect measurement, and the light for length characteristic measurement, it is applicable to various light according to a use.

  The present invention is applicable to optical devices that can be used for generating various forms of light, light source devices that can generate various forms of light, and optical measuring devices that can perform various optical measurements.

It is a sectional side view of the optical measuring device which concerns on the 1st Embodiment of this invention. It is AA sectional drawing of the optical measuring device which concerns on the 1st Embodiment of this invention. It is a BB sectional view of the optical measuring device concerning a 1st embodiment of the present invention. It is explanatory drawing of the optical measuring device which concerns on the 1st Embodiment of this invention. It is a side cross section of the optical measuring device which concerns on the 2nd Embodiment of this invention. It is explanatory drawing of the optical measuring device which concerns on other embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 ... Optical axis 101 ... Light source part 102, 103, 104 ... Cylindrical part 105, 106 ... Light shielding member 107, 114, 117 ... Lens system 108, 110 ... Cone mirror 109 ... Through holes 111, 123 ... Top 112,116 ... Measurement part 113 ... Polarizing plate 115,118 ... Photodetection element 119 ... Defect measurement light 120 ... Length characteristics Measurement light 121, 122 ... Reflection parts 124, 125 ... Measurement light 126 ... Light source 127 ... Housing 128 ... Calculation control unit 150 ... Measurement object 201, 202, 203 ..Openings 501, 502, 503, 504 ... light shielding members

Claims (9)

A first cone mirror having a through hole along the central axis of the cone and having a first reflecting portion formed on the conical surface; and disposed on a bottom surface side of the first cone mirror, and including a top portion in a predetermined region of the conical surface. A second cone mirror having a second reflecting portion formed thereon,
The optical device according to claim 1, wherein the first and second cone mirrors are arranged so that central axes of the cones are coaxial. An optical device according to claim 1, and a light source that radiates parallel light from a top side of the first cone mirror of the optical device to a region including a conical central axis of the first cone mirror,
The light from the light source is reflected by the first reflector and output as first output light having a predetermined width, and the light from the light source that has passed through the through hole of the first cone mirror is reflected by the second reflector. A light source device that reflects and outputs the light as second output light that is narrower than the first output light.   The light source device according to claim 2, wherein the first and second output lights are output radially about the conical central axis. The optical axis of the light source and the conical central axis of the first cone mirror are parallel axes separated by a predetermined distance;
3. The light source device according to claim 2, wherein the first output light has a profile decentered from the conical central axis, and the second output light is output radially about the conical central axis.   5. The light source device according to claim 1, further comprising a light shielding member that shields part of the first output light and the second output light. A light source device according to any one of claims 2 to 5,
The light source device includes first measurement means for detecting light reflected by the measurement target, and second measurement means for detecting light reflected by the measurement target by the second output light. An optical measuring device.   The first measuring unit includes a polarizing unit that polarizes the first output light reflected by the measurement target, and a detecting unit that detects the first output light polarized by the polarizing unit. The optical measuring device according to claim 6.   The first and second output lights are defect measurement light for defect measurement and length characteristic measurement light for measuring characteristics related to length, respectively, and the first measurement means is for defect measurement reflected by a measurement object. Measuring the presence or absence of a defect in the measurement object based on light, and measuring the characteristic relating to the length of the measurement object based on the length characteristic measurement light reflected on the measurement object. The optical measuring device according to claim 6 or 7.   9. The optical measuring apparatus according to claim 6, wherein the first and second measuring units are configured by combining one measuring unit.

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