CN202734770U - Device detecting glued surface parallelism of total reflection prism based on equal thickness interference principle - Google Patents
Device detecting glued surface parallelism of total reflection prism based on equal thickness interference principle Download PDFInfo
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- CN202734770U CN202734770U CN 201220271224 CN201220271224U CN202734770U CN 202734770 U CN202734770 U CN 202734770U CN 201220271224 CN201220271224 CN 201220271224 CN 201220271224 U CN201220271224 U CN 201220271224U CN 202734770 U CN202734770 U CN 202734770U
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Abstract
The utility model discloses a device detecting glued surface parallelism of a total reflection prism based on equal thickness interference principle, and the device comprises a light source, a collimating lens, a total reflection prism to be detected, and a diagram receiver, the light source, the collimating lens, and the total reflection prism to be detected are placed in sequence and are placed on a same horizontal line, the diagram receiver is placed on a reflection light path of the total reflection prism to be detected, a divergent beam emitted by the light source is collimated by the collimating lens and directly shoots on the total reflection prism to be detected, the light beam reflects two reflected light beams on the glued surfaces of the total reflection prism to be detected, interference fringes are formed after interferences generated by the two reflected light beams on the reflection light path, and the interference fringes are received by the diagram receiver. The device detecting glued surface parallelism of the total reflection prism based on equal thickness interference principle is reasonable in design, and accurate results of parallelism of two surfaces can be obtained fast under a premise in which special instruments are not needed.
Description
Technical field
The utility model belongs to semiconductor printed-wiring board (PWB) laser direct-writing exposure image apparatus field, is specifically related to a kind of device that detects the total reflection prism cemented surface depth of parallelism based on the equal thickness interference principle.
Background technology
Total reflection in the litho machine projecting light path (TIR) prism is one of vitals of litho machine, and its effect is to be connected illuminator and imaging system, has simultaneously the turnover light path, makes more compact and reasonable of whole light path layout.
Development along with photoetching technique, requirement to exposure lines quality is more and more higher, the requirement on machining accuracy of optical element wherein also improves constantly, the depth of parallelism of the cemented surface of TIR prism has a great impact aberration and the distortion of whole optical system, and the precision that the depth of parallelism can reach has directly determined the quality of final imaging.
The utility model content
In order to detect the problem of the total reflection prism cemented surface depth of parallelism, reach the purpose that separates the sheep from the goats, the utility model proposes a kind of device that detects the total reflection prism cemented surface depth of parallelism based on the equal thickness interference principle.
The technical scheme that the utility model adopts is:
Detect the device of the total reflection prism cemented surface depth of parallelism based on the equal thickness interference principle, it is characterized in that: include light source, collimation lens, total reflection prism to be detected, the figure receiver, described light source, collimation lens, total reflection prism to be detected is placed successively and is on the same level line, the figure receiver places on the reflected light path of total reflection prism to be detected, the divergent beams that light source sends behind collimation lens collimation direct projection on total reflection prism to be detected, light beam reflects two bundle reflected light at the cemented surface of total reflection prism to be detected, two bundle reflected light form interference fringe after reflected light path interferes, interference fringe is received by the figure receiver.
Described light source is the 405nm laser diode.
Described collimation lens is a plano-convex lens, and the divergent beams that LED source is sent change parallel beam into.
Described figure receiver is an optical screen, is used for observation interference fringe situation.
By the number of interference fringe in the unit length, just can draw the depth of parallelism situation of two cemented surfaces of total reflection prism.
The utility model has the advantages that:
The utility model is reasonable in design, and is convenient and swift, and needed instrument is very common, is easy to realize.
Description of drawings
Fig. 1 is structural representation of the present utility model.
Embodiment
Below in conjunction with accompanying drawing, the utility model is further described by embodiment.
Embodiment:
As shown in Figure 1, detect the device of the total reflection prism cemented surface depth of parallelism based on the equal thickness interference principle, include light source 1, collimation lens 2, total reflection prism 3 to be detected, figure receiver 4, light source 1, collimation lens 2, total reflection prism 3 to be detected is placed successively and is on the same level line, figure receiver 4 places on the reflected light path of total reflection prism 3 to be detected, the divergent beams that light source 1 sends behind collimation lens 2 collimation direct projection on total reflection prism 3 to be detected, light beam reflects two bundle reflected light at the cemented surface of total reflection prism 3 to be detected, two bundle reflected light form interference fringe after reflected light path interferes, interference fringe is received by figure receiver 4.
Figure receiver 4 is an optical screen, is used for observation interference fringe situation.
As shown in Figure 1, the laser-beam divergence angle that laser diode sends is 23 °, through behind the collimation lens 2, light beam changes directional light into, directional light reflects to form two-beam (needing to make the incident angle of light beam to be less than the full emission critical angle of prism) here through the cemented surface of total reflection prism, and this two-beam can interfere when reaching optical screen, forms interference fringe, by the number of interference fringe in the unit length, just can draw the depth of parallelism situation of two faces.
Claims (4)
1. device that detects the total reflection prism cemented surface depth of parallelism based on the equal thickness interference principle, it is characterized in that: include light source, collimation lens, total reflection prism to be detected, the figure receiver, described light source, collimation lens, total reflection prism to be detected is placed successively and is on the same level line, the figure receiver places on the reflected light path of total reflection prism to be detected, the divergent beams that light source sends behind collimation lens collimation direct projection on total reflection prism to be detected, light beam reflects two bundle reflected light at the cemented surface of total reflection prism to be detected, two bundle reflected light form interference fringe after reflected light path interferes, interference fringe is received by the figure receiver.
2. according to claim 1ly detect the device of the total reflection prism cemented surface depth of parallelism based on the equal thickness interference principle, it is characterized in that: described light source is the 405nm laser diode.
3. according to claim 1ly detect the device of the total reflection prism cemented surface depth of parallelism based on the equal thickness interference principle, it is characterized in that: described collimation lens is a plano-convex lens.
4. according to claim 1ly detect the device of the total reflection prism cemented surface depth of parallelism based on the equal thickness interference principle, it is characterized in that: described figure receiver is an optical screen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220271224 CN202734770U (en) | 2012-06-08 | 2012-06-08 | Device detecting glued surface parallelism of total reflection prism based on equal thickness interference principle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN 201220271224 CN202734770U (en) | 2012-06-08 | 2012-06-08 | Device detecting glued surface parallelism of total reflection prism based on equal thickness interference principle |
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| CN202734770U true CN202734770U (en) | 2013-02-13 |
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| CN 201220271224 Expired - Lifetime CN202734770U (en) | 2012-06-08 | 2012-06-08 | Device detecting glued surface parallelism of total reflection prism based on equal thickness interference principle |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104482886A (en) * | 2014-12-05 | 2015-04-01 | 中国石油大学(华东) | Device and method for measuring gluing errors of polarizing prism |
| CN105627955A (en) * | 2016-01-07 | 2016-06-01 | 丹阳丹耀光学有限公司 | Method for detecting deviating core of cementing layer of optical cemented part |
| CN107727009A (en) * | 2017-11-06 | 2018-02-23 | 深圳精创视觉科技有限公司 | Hand-set lid glass quality detection means |
| CN108507497A (en) * | 2017-02-28 | 2018-09-07 | 北京卓力新航科技有限责任公司 | Cannon multibarrel axis parallel degree optical alignment set |
| CN109470183A (en) * | 2018-12-19 | 2019-03-15 | 博众精工科技股份有限公司 | A kind of detection system of prism flatness |
| CN110095264A (en) * | 2019-05-08 | 2019-08-06 | 歌尔股份有限公司 | Prism cementing detection method, detection device and computer readable storage medium |
| CN111928819A (en) * | 2020-07-31 | 2020-11-13 | 西南交通大学 | Instrument for horizontal detection and horizontal detection method |
-
2012
- 2012-06-08 CN CN 201220271224 patent/CN202734770U/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104482886A (en) * | 2014-12-05 | 2015-04-01 | 中国石油大学(华东) | Device and method for measuring gluing errors of polarizing prism |
| CN105627955A (en) * | 2016-01-07 | 2016-06-01 | 丹阳丹耀光学有限公司 | Method for detecting deviating core of cementing layer of optical cemented part |
| CN105627955B (en) * | 2016-01-07 | 2018-03-09 | 丹阳丹耀光学有限公司 | A kind of detection method of optical cemented component glue-line core shift |
| CN108507497A (en) * | 2017-02-28 | 2018-09-07 | 北京卓力新航科技有限责任公司 | Cannon multibarrel axis parallel degree optical alignment set |
| CN107727009A (en) * | 2017-11-06 | 2018-02-23 | 深圳精创视觉科技有限公司 | Hand-set lid glass quality detection means |
| CN107727009B (en) * | 2017-11-06 | 2023-11-24 | 深圳精创视觉科技有限公司 | Quality detection device for mobile phone cover plate glass |
| CN109470183A (en) * | 2018-12-19 | 2019-03-15 | 博众精工科技股份有限公司 | A kind of detection system of prism flatness |
| CN110095264A (en) * | 2019-05-08 | 2019-08-06 | 歌尔股份有限公司 | Prism cementing detection method, detection device and computer readable storage medium |
| CN110095264B (en) * | 2019-05-08 | 2022-09-06 | 歌尔光学科技有限公司 | Prism gluing detection method, detection device and computer readable storage medium |
| CN111928819A (en) * | 2020-07-31 | 2020-11-13 | 西南交通大学 | Instrument for horizontal detection and horizontal detection method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: TIANJIN XINSHUO PRECISION MACHINERY CO., LTD. Free format text: FORMER OWNER: HEFEI ADVANTOOLS SEMICONDUCTOR CO., LTD. Effective date: 20130924 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 230601 HEFEI, ANHUI PROVINCE TO: 300000 BINHAI NEW ZONE, TIANJIN CITY |
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| TR01 | Transfer of patent right |
Effective date of registration: 20130924 Address after: 300000 No. 167 Huang Hai Road, Tianjin Development Zone Patentee after: Tianjin Xinshuo Precision Machinery Co., Ltd. Address before: 230601 No. 68 Jinxiu Avenue, Hefei economic and Technological Development Zone, Anhui, China Patentee before: Hefei AdvanTools Semiconductor Co., Ltd. |
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| ASS | Succession or assignment of patent right |
Owner name: TIANJIN JINXIN MICROELECTRONICS TECHNOLOGY CO., LT Free format text: FORMER OWNER: TIANJIN XINSHUO PRECISION MACHINERY CO., LTD. Effective date: 20140625 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20140625 Address after: 300000 Tianjin City Fifth Street Tianjin Development Zone Taihua Road No. 12 TEDA SME development center room 3103 Patentee after: TIANJIN JINXIN MICROELECTRONIC TECHNOLOGY CO., LTD. Address before: 300000 No. 167 Huang Hai Road, Tianjin Development Zone Patentee before: Tianjin Xinshuo Precision Machinery Co., Ltd. |
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| CP03 | Change of name, title or address |
Address after: 311100 room 204-5, building 3, No. 16, Longtan Road, Cangqian street, Yuhang District, Hangzhou City, Zhejiang Province Patentee after: Zhejiang Jinxin Microelectronics Technology Co.,Ltd. Address before: Room 3103, TEDA SME development center, No.12, Taihua Road, Fifth Avenue, TEDA, Tianjin Patentee before: TIANJIN JINXIN MICROELECTRONIC TECHNOLOGY Co.,Ltd. |
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| CP03 | Change of name, title or address | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130213 |