CN108917611A - Displacement measurement errors caliberating device based on laser interference - Google Patents
Displacement measurement errors caliberating device based on laser interference Download PDFInfo
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- CN108917611A CN108917611A CN201810456435.5A CN201810456435A CN108917611A CN 108917611 A CN108917611 A CN 108917611A CN 201810456435 A CN201810456435 A CN 201810456435A CN 108917611 A CN108917611 A CN 108917611A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of displacement measurement errors caliberating device based on laser interference, including：Measurement object analog component, including prism, prism are set on measurement object analog component and move with measurement object analog component；Laser interference component, connect with optical path prism, and generates laser interference output with the movement of measurement object analog component；Sensor probe to be calibrated, sensor probe face prism to be calibrated setting, measure sensor probe to be calibrated to measurement object simulated object linear range；The output of fitting sensor and laser interference export to obtain the nonlinearity erron of sensor and parallel errors；The movement of measurement object analog component is that measurement object analog component rotates around the axis with measurement object analog component close to or far from sensor probe to be calibrated.The device can be achieved at the same time the nonlinearity erron of micro-displacement measurement device and parallel errors calibration in the micro- impulse measurement of microthrust, have preferable versatility.
Description
Technical field
The present invention relates to a kind of displacement measurement errors caliberating device based on laser interference belongs to spacecraft micromass culture neck
Domain.
Background technique
In the microthrust and micro- impulse measurement of spaceborne thruster, direct measurement method is generallyd use, i.e., by thruster
Thrust output is converted into the vibration amplitude or rotational angle of measurement rack.Rotational angle caused by microthrust and micro- momentum is usually small
In 5 degree, replaced using the displacement of the lines of displacement sensor gantry rotation component.In view of electromagnetic interference, vacuum measurement
The factors such as environment, generally use capacitive displacement transducer.
Capacitive displacement transducer belongs to non-cpntact measurement sensor, and probe is used as an electrode when work, is tested conduction
Object is as another comparative electrode, and tested conductive object is mobile to cause pole plate spacing to change, and spacing variation can cause capacitor
It is worth the variation of size, so as to measuring probe to the distance of tested conductive object.Before the use of sensor, need to its
It is non-linear to be demarcated.Meanwhile measure rack rotatable parts rotation when will cause it is not parallel between capacitor plate, can be to measurement
As a result have an impact, it is also desirable to which its parallel errors are demarcated.In microthrust and micro- momentum, the rotation displacement of rack is measured
Measure it is most important, directly determine microthrust and micro- momentum measurement accuracy.And in existing measuring device, shortage turns rack
Dynamic displacement measuring device.
Summary of the invention
According to the one aspect of the application, a kind of displacement measurement errors caliberating device based on laser interference is provided, it should
Device can be demarcated in microthrust and micro- impulse measurement, the nonlinearity erron and lack of parallelisme error of capacitive displacement transducer.
The displacement measurement errors caliberating device based on laser interference, including：
Measurement object analog component, including anti-optical prism, the anti-optical prism are set to measurement object analog component
Above and with the measurement object analog component move；
Laser interference component is connect with the anti-optical prism optical path, and with the movement of the measurement object analog component
Generate laser interference output；
Sensor probe to be calibrated, anti-optical prism setting described in the sensor probe face to be calibrated, described in measurement
Linear range between sensor probe to be calibrated and the measurement object analog component；
It is fitted sensor output and the laser interference exports to obtain the nonlinearity erron of the sensor and non-flat
Row error；
The movement of the measurement object analog component is that the measurement object analog component rotates around the axis and the measurement
Simulating component is close to or far from the sensor probe to be calibrated.
Preferably, the incidence point of the laser beam of the incident anti-optical prism is with the sensor probe to be calibrated to described
The measurement point of measurement object analog component is on same plumb line, and the incidence point and the measurement point are far from the measurement
The shaft of simulating block.
Preferably, the displacement measurement errors caliberating device based on laser interference further includes photoelectric processing component, described
Photoelectric processing component is connect with the laser interference component optical path, and the photoelectric processing component obtains the laser interference output.
Preferably, the photoelectric processing component includes photodetector and oscillograph, and the oscillograph and the photoelectricity are visited
Device data connection is surveyed, the photodetector connect with the laser interference component optical path and obtains the laser interference output.
Preferably, the laser interference component includes：Laser, optical splitter；The anti-optical prism includes the first prism
With the second prism；The laser, first prism and second prism are connect with the optical splitter optical path respectively；It is described
Second prism is set on the measurement object analog component；The plane of incidence of the optical splitter is connect with the laser light path,
The light end that goes out of the optical splitter exports the laser interference output.
Preferably, the displacement measurement errors caliberating device based on laser interference further includes photoelectric processing component, described
The light end that goes out of optical splitter is connect with the photoelectric processing component optical path.
Preferably, the anti-optical prism is corner cube and prism of corner cube, it is further preferred that the anti-optical prism
For corner cube.
Preferably, the laser is ultraviolet laser.The wavelength of the laser is 200~300nm.
Preferably, the displacement measurement errors caliberating device based on laser interference further includes position control component, described
Measurement object analog component is installed on the position control component, and the position control component controls the measurement object simulation
Component rotates or adjusts the measurement object analog component and the biography to be calibrated along the shaft of the measurement object analog component
Sensor probe distance.
Preferably, the position control component includes that distance adjusts component and corner adjusting component, the measurement object mould
Quasi- component is installed on the corner and adjusts on component；The corner adjusts component and is installed on the distance adjusting component, described
Corner adjusts component and travels longitudinally with the distance adjusting component.
Beneficial effects of the present invention include but is not limited to：
(1) the displacement measurement errors caliberating device provided by the present invention based on laser interference, can be achieved at the same time micro- push away
The nonlinearity erron of micro-displacement measurement device and parallel errors calibration, have preferable versatility in the micro- impulse measurement of power.
It is particularly suitable for the micro- impulse measurement of microthrust, accuracy reaches highest at this time.
(2) the displacement measurement errors caliberating device provided by the present invention based on laser interference, the device are dry using laser
It relates to displacement measurement method to measure error, with high resolution, gamut scope intrinsic resolution is constant, only measures measurement point
The advantages such as relative motion displacement, the displacement measuring equipments such as condenser type are demarcated by laser interferance method, are displaced
The nonlinearity erron characteristic and parallel errors characteristic of measurement are that the miniature linear displacement high-precision in the micro- impulse measurement of microthrust is surveyed
Amount provides effective calibration approach.
(3) the displacement measurement errors caliberating device provided by the present invention based on laser interference, to error calibration precision compared with
Height, measurement efficiency is higher, especially suitable real-time measurement error on site.
Detailed description of the invention
Fig. 1 is the displacement measurement errors caliberating device schematic diagram in the preferred embodiment of the present invention based on laser interference；
Fig. 2 is the laser interference mould of the displacement measurement errors caliberating device in the preferred embodiment of the present invention based on laser interference
Block optical path schematic top plan view.
Component and reference signs list：
Specific embodiment
The present invention is described in detail below with reference to embodiment, but the invention is not limited to these embodiments.
Referring to Fig. 1, the displacement measurement errors caliberating device provided by the invention based on laser interference, including：Laser interference
Component, measurement object analog component, sensor probe to be calibrated 301, measurement object analog component include anti-optical prism, anti-saturating
Prism is penetrated to be set on measurement object analog component and move with measurement object analog component；Laser interference component and anti-transmission rib
The connection of mirror optical path, and laser interference output is generated with the movement of measurement object analog component；301 face of sensor probe to be calibrated
Anti- optical prism setting, measures the linear range between sensor probe to be calibrated and measurement object analog component；Fitting sensing
Device output and laser interference export to obtain the nonlinearity erron of sensor and parallel errors.
The device can be to the nonlinearity erron of miniature linear displacement measuring device, non-parallel mistake in the micro- impulse measurement of microthrust
Difference is demarcated.The device is using laser interferometer displacement measurement method high resolution, gamut scope intrinsic resolution is constant, only surveys
The advantages such as the relative motion displacement of measurement point, by laser interferance method, to condenser type etc., there are parallel errors with measuring surface
No-contact Displacement Measurement equipment demarcated, provide the nonlinearity erron characteristic and parallel errors characteristic of displacement measurement, be
Miniature linear displacement high-acruracy survey in the micro- impulse measurement of microthrust provides effective calibration approach.Error needed for obtaining completes mark
It is fixed, and errors are included in subsequent measurement, to effectively correct measurement result.Anti- optical prism herein includes all kinds of
The optical device that incident light can be reflected and transmitted, such as prism of corner cube and corner cube.Fitting can be with herein
For linear fit.
Preferably, the incidence point of the laser beam of incident anti-optical prism and sensor probe to be calibrated 301 are to measurement object
The measurement point of analog component is on same plumb line, and the shaft of incidence point and measurement point far from measurement object simulated block 201.
Separate i.e. finger herein not is other any parts in addition to shaft in the range for including not in shaft.
By the way that stated accuracy can be improved by this setting.
It preferably, further include photoelectric processing component, photoelectric processing component is connect with laser interference component optical path, photoelectric processing
Component obtains laser interference output.
Preferably, photoelectric processing component includes photodetector 105 and oscillograph, and oscillograph and photodetector 105 count
According to connection, photodetector 105 connect with laser interference component optical path and obtains laser interference output.Photodetector 105 will
The optical signal detected is converted into electric signal, and is acquired using oscillograph.
Preferably, laser interference component includes：Laser 101, optical splitter；Anti- optical prism includes the first prism and second
Prism, laser 101, the first prism and the second prism are connect with optical splitter optical path respectively；Second prism is set to measurement object
On analog component；The plane of incidence of optical splitter is connect with 101 optical path of laser, and optical splitter goes out light end output laser interference output.
Preferably, the light end that goes out of optical splitter is connect with photoelectric processing component optical path.
Referring to fig. 2, in one embodiment, optical splitter includes the plane of incidence and light end out, the plane of incidence and laser of optical splitter
The connection of 101 optical paths；Optical splitter goes out light end output laser interference output.Optical splitter further includes first refractive transmission plane and the second folding
Transmission plane is penetrated, first refractive transmission plane is connect with the first optical path prism；Second refractive transmission face is connect with the second optical path prism.
In one embodiment, the laser that laser 101 issues is divided into the equal the reflected beams of intensity through spectroscope 102
And transmitted light beam；The reflected beams/transmitted light beam after the first prismatic reflection, can return spectroscope 102 transmit/it is anti-
Penetrate, generated transmitted light beam/the reflected beams can after the second prismatic reflection, can using 102 reflection/transmission of spectroscope into
Enter the first prism, is finally impinged perpendicularly on after spectroscope 102 converges from two beam laser of the first prism and the second prismatic reflection
Photodetector 105.The optical signal detected is converted electric signal by photodetector 105, and is acquired using oscillograph.
Preferably, prism is corner cube.Corner cube includes quiet corner cube 103 and dynamic corner cube 104, moves corner
Prism 104 is set on measurement object analog component, and is rotated with measurement object analog component；Quiet corner cube 103 is set to
On second refractive transmission face of light-splitting device.Quiet corner cube 103 is used for the extra laser for guaranteeing to be emitted from light-splitting device, then
Secondary reflection returns to optical splitter, generates interference fringe with the reflected laser of dynamic corner cube 104.
The mobile distance of dynamic 104 relative initial position of corner cube is the number and 101 wave of laser of moving interference fringes
The half of long product.The moving distance of dynamic corner cube 104 can be calculated by this, and export measurement result with electrical resistivity survey gauge head
It is fitted as a pair of of data, to be demarcated to electrical resistivity survey gauge head.
Preferably, laser 101 is ultraviolet laser 101.The wavelength of laser is 200~300nm.More preferably 266nm.
It preferably, further include position control component, measurement object analog component is installed on position control component, position control
Shaft rotation and longitudinal movement of the component control measurement object analog component processed along measurement object analog component.
It is furthermore preferred that position control component includes that distance adjusts component 204 and corner adjusting component 203, measurement object mould
Quasi- component is installed on corner and adjusts on component 203 and adjust the rotation of component 203 with corner；Corner adjust component 203 be installed on away from
From adjusting on component 204, corner adjusts component 203 and adjusts 204 longitudinal movement of component with distance.
It preferably, further include first support 202 and second support 302, sensor probe 301 to be processed is set to second
On frame 302；Measurement object simulated block 201 is set in first support 202.It is convenient for passing through both bracket adjustings position by this setting
In same horizontal line.Realize incidence point and measurement point on same straight line.
In one embodiment, distance adjusts component 204 for controlling measurement object simulated block 201 and sensor probe
301 horizontal distance, can be with manually controlling or Electronic control mode.Corner adjusts component 203 for controlling measurement object simulation
Horizontal torsion angle of the block 201 relative to sensor probe 301, using manually controlling or Electronic control mode.
In the application, laser 101 can be semiconductor laser 101.
In one embodiment, referring to Fig. 1, the displacement measurement errors caliberating device based on laser interference includes：Laser
Device 101, optical splitter, quiet corner cube 103, dynamic corner cube 104, photodetector 105 and oscillograph.Laser 101 with point
The connection of light device optical path.Optical splitter is connect with photodetector 105, quiet corner cube 103, dynamic 104 optical path of corner cube respectively.Light
Electric explorer 105 is connected with oscilloscope data.
Measurement object simulated block 201 is fixed on corner by first support 202 and adjusts on component 203, and distance adjusts component
204, which are set to distance, is adjusted on component 204.Corner adjusts component 203 can be along its central longitudinal axis.Distance adjusts component 204
Corner is driven to adjust the longitudinal movement that component 203 adjusts component 204 along distance.Dynamic corner is installed on measurement object simulated block 201
Prism 104.
Sensor probe 301 to be measured is set to the side of measurement object simulated block 201, and face measurement object simulated block
With dynamic corner cube 104 on 201, and the position with dynamic corner cube 104 on same plumb line measures sensor probe to be measured
301 with the linear range of measurement object simulated block 201.Sensor probe 301 to be measured is set in second support 302, thus with
Measurement object simulated block 201 is concordant.
Referring to fig. 2, in use, opening laser 101, laser is generated after optical splitter is divided, beam splitting laser respectively enters
Quiet corner cube 103 and dynamic corner cube 104.Beam splitting laser is undergone in quiet corner cube 103 and dynamic corner cube 104 respectively
After reflection or perspective, after the reflected beams are converged at optical splitter, photodetector 105 is injected.Photodetector 105 will detect
Optical signal be converted into electric signal, and pass through oscillograph acquisition display.In the process, component 203 is adjusted by corner to adjust
Horizontal torsion angle of the measurement object simulated block 201 relative to sensor probe 301 is visited using laser interference module calibration sensor
First 301 output under same initial level distance but different level torsion angle obtains the output of laser interference module and sensor
Output data pair is fitted by data, obtains parallel errors of the same initial level of sensor under.
It on the other hand can also be to adjust component 204 by distance and adjust measurement object simulated block 201 and sensor probe
301 horizontal distance, using laser interference module calibration sensor probe 301 (in sensing tolerance under different level distance
In journey) output, obtain laser interference module output and sensor output data pair, be fitted by data, obtain sensor
Nonlinearity erron.
Using device provided by the invention, the nonlinearity erron and parallel errors to sensor is once can be completed in assembling
While demarcate, calibration result is accurate, and calibration process is easy intuitive, and calculation amount is small, and measurement efficiency is high.
The above is only several embodiments of the present invention, not any type of limitation is done to the present invention, although this hair
It is bright to be disclosed as above with preferred embodiment, however be not intended to limit the invention, any person skilled in the art, it is not taking off
In the range of technical solution of the present invention, a little variation or modification are made using the technology contents of the disclosure above and is equal to
Case study on implementation is imitated, is belonged in technical proposal scope.
Claims (10)
1. a kind of displacement measurement errors caliberating device based on laser interference, which is characterized in that including：
Measurement object analog component, including anti-optical prism, the anti-optical prism are set on measurement object analog component simultaneously
It is moved with the measurement object analog component；
Laser interference component is connect with the anti-optical prism optical path, and is generated with the movement of the measurement object analog component
Laser interference output；
Sensor probe to be calibrated, anti-optical prism setting, measurement described in the sensor probe face to be calibrated are described wait mark
Determine the linear range between sensor probe and the measurement object analog component；
It is fitted the sensor output and the laser interference exports to obtain the nonlinearity erron of the sensor and non-parallel mistake
Difference；
The movement of the measurement object analog component is that the measurement object analog component rotates around the axis and the measurement object
Analog component is close to or far from the sensor probe to be calibrated.
2. the displacement measurement errors caliberating device according to claim 1 based on laser interference, which is characterized in that incident institute
State incidence point and survey of the sensor probe to be calibrated to the measurement object analog component of the laser beam of anti-optical prism
Amount point is on same plumb line, and the incidence point and the measurement point are far from the shaft of the measurement object simulated block.
3. the displacement measurement errors caliberating device according to claim 1 based on laser interference, which is characterized in that the base
In the displacement measurement errors caliberating device of laser interference further include photoelectric processing component, the photoelectric processing component and the laser
The connection of interference component optical path, the photoelectric processing component obtain the laser interference output.
4. the displacement measurement errors caliberating device according to claim 3 based on laser interference, which is characterized in that the light
Electric treatment component includes photodetector and oscillograph, the oscillograph and the photodetector data connection, the photoelectricity
Detector connect with the laser interference component optical path and obtains the laser interference output.
5. the displacement measurement errors caliberating device according to claim 1 based on laser interference, which is characterized in that described to swash
Interference of light component includes：Laser, optical splitter；The anti-optical prism includes the first prism and the second prism；The laser,
First prism and second prism are connect with the optical splitter optical path respectively；Second prism is set to the measurement
On simulating component；The plane of incidence of the optical splitter is connect with the laser light path, and the optical splitter goes out the output of light end
The laser interference output.
6. the displacement measurement errors caliberating device according to claim 5 based on laser interference, which is characterized in that the base
It further include photoelectric processing component in the displacement measurement errors caliberating device of laser interference, the optical splitter goes out light end and the light
The connection of electric treatment component optical path.
7. the displacement measurement errors caliberating device according to claim 1 based on laser interference, which is characterized in that described anti-
Optical prism is corner cube or prism of corner cube；It is further preferred that the anti-optical prism is corner cube.
8. the displacement measurement errors caliberating device according to claim 1 based on laser interference, which is characterized in that described to swash
Light device is ultraviolet laser, and the wavelength of the laser is 200~300nm.
9. the displacement measurement errors caliberating device according to claim 1 based on laser interference, which is characterized in that the base
It further include position control component in the displacement measurement errors caliberating device of laser interference, the measurement object analog component is installed on
On the position control component, the position control component controls the measurement object analog component and simulates along the measurement object
The shaft of component rotates or adjusts the measurement object analog component and the sensor probe distance to be calibrated.
10. the displacement measurement errors caliberating device according to claim 9 based on laser interference, which is characterized in that described
Position control component includes that distance adjusts component and corner adjusting component, and the measurement object analog component is installed on the corner
It adjusts on component；The corner, which adjusts component and is installed on the distance, to be adjusted on component, the corner adjust component with it is described away from
It travels longitudinally from component is adjusted.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810456435.5A CN108917611A (en) | 2018-05-14 | 2018-05-14 | Displacement measurement errors caliberating device based on laser interference |
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| CN201810456435.5A CN108917611A (en) | 2018-05-14 | 2018-05-14 | Displacement measurement errors caliberating device based on laser interference |
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| CN110440698A (en) * | 2019-08-14 | 2019-11-12 | 大连理工大学 | A kind of laser measurement gauge head unit measuring arbitrary surfaces Form and position error |
| CN112084621A (en) * | 2020-07-27 | 2020-12-15 | 北京空间机电研究所 | Method, medium and equipment for long-distance transmission simulation of optical fiber laser |
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| CN110440698B (en) * | 2019-08-14 | 2020-12-11 | 大连理工大学 | Laser measuring probe device for measuring any surface form and position error |
| CN112084621A (en) * | 2020-07-27 | 2020-12-15 | 北京空间机电研究所 | Method, medium and equipment for long-distance transmission simulation of optical fiber laser |
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Application publication date: 20181130 |
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