CN1213279C - Multifunctional electronic speckle interferometer including semiconductor pump and total solid laser - Google Patents
Multifunctional electronic speckle interferometer including semiconductor pump and total solid laser Download PDFInfo
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- CN1213279C CN1213279C CN 03116506 CN03116506A CN1213279C CN 1213279 C CN1213279 C CN 1213279C CN 03116506 CN03116506 CN 03116506 CN 03116506 A CN03116506 A CN 03116506A CN 1213279 C CN1213279 C CN 1213279C
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Abstract
The present invention relates to a semiconductor pumping all-solid laser multifunctional electronic speckle interferometer which comprises a measurement device and a computer for processing measurement data. The present invention is characterized in that the measurement device comprises a box body, a laser source, a light path component, an image-forming component and a light splitting device, wherein the laser source is arranged on the front part of the inner part of the box body, the light path component is composed of a plurality of reflecting mirrors, a light splitting lens and a plurality of beam expansion assembles, the image-forming component is composed of a camera arranged in the back part of the box body and an imaging mirror which is arranged outside the back part of the box body, and the camera and the imaging mirror are correspondingly arranged. The signal output end of the camera is connected with the input end of a computer through a data bus, the light splitting device is arranged on the front end part of the imaging mirror, the position of an individual element is replaced or changed, the image of a measured piece is obtained by the camera, and the image is input into the computer and is processed. The gradients of the high accuracy off-plane displacement, the in-plane displacement and the off-plane displacement can be measured after objects are deformed, and interference fringes are displayed on a screen. The present invention has the advantages of convenient use and strong function.
Description
Technical field
The present invention relates to a kind of semiconductor pumped total solids laser multifunction electronic speckle interferometer of its structure micrometric displacement amount accurately being measured behind the deformation of body of being used for.
Background technology
Be used for having following several to the detection technique after the object structures distortion at present: a kind of is holographic interferometry technique, arrange holographic light path earlier, to testee stressed front and back double exposure, again holographic plate is shown photographic fixing and handle, realize reproducing by laser at last.In a word, this technology must be passed through numerous and diverse apparent photographic fixing wet process, and also will be through the process of a reproduction, and above work must strict be carried out in dark place.If will realize detecting in real time with this technology, holographic plate is accurately resetted, method is more complicated, so this technology is restricted in actual applying.
Another kind of electronic speckle pattern interferometry device forms reference light with reference substance, and the acoplanarity displacement after the Measuring Object distortion is not the result of pure acoplanarity displacement W field but record.
Also have bright its grating generation of a kind of employing to shear, realize the electronic cutting speckle interference, the acoplanarity displacement after the inspected object distortion, but bright its grating manufacturing is difficult relatively.
Multiple electronic speckle interferometer is abroad also arranged at present, but only have independent measurement acoplanarity displacement W field function or have only the measuring ability of single cutting speckle, external all kinds of electronic speckle interferometer structure relative complex, function singleness, and what record is not pure acoplanarity displacement W field, but the mixing field of acoplanarity displacement W field and in-plane displacement U field.
Summary of the invention
The objective of the invention is to solve existing electronic speckle interferometer function singleness, complex structure, the shortcoming that measuring error is big, and provide a kind of measurement acoplanarity displacement that has, in-plane displacement, the multinomial function of electronic cutting speckle is measured accurately semiconductor pumped total solids laser multifunction electronic speckle interference measurement mechanism easy to use.
The object of the present invention is achieved like this, and a kind of semiconductor pumped total solids laser multifunction electronic speckle interferometer is made of measurement mechanism and the computing machine of handling measurement data, and this input end and computer is connected with the output terminal of measurement mechanism by data bus; Be characterized in that described measurement mechanism comprises casing, lasing light emitter, light path part, image-forming block, light-splitting device; Described lasing light emitter is arranged in the casing anterior; Described light path part is formed by being located at several catoptrons, the Amici prism in the casing and being located at several outer beam expanding lens assemblies of casing; Wherein: first mirror separation is arranged on laser output one side of lasing light emitter, and this catoptron center and laser output are on same optical axis; One Amici prism and the forward and backward corresponding first catoptron rear portion that is disposed on of second catoptron, the center of this Amici prism and second catoptron is on same optical axis; The 3rd catoptron and the horizontal corresponding second catoptron right side that is disposed on of the 4th catoptron, the center of the 3rd catoptron center and the 4th catoptron is on same optical axis; The 5th catoptron correspondence is disposed on the 4th catoptron rear portion, and the center of the 5th catoptron center and the 4th catoptron is on same optical axis; The 7th catoptron correspondence is disposed on the left side of Amici prism, and the center of the 7th catoptron center and Amici prism is on same optical axis; The 8th catoptron correspondence is disposed on the 7th catoptron rear portion, and the center of the 8th catoptron center and the 7th catoptron is on same optical axis; Described several the outer beam expanding lens assemblies of casing that are located at, wherein: the first beam expanding lens assembly is made of first beam expanding lens and the 6th catoptron, first beam expanding lens and the horizontal correspondence of the 6th catoptron are disposed on the casing external right side, and the center of circle of first beam expanding lens and the center that is arranged on the 5th catoptron in the casing are on same optical axis; The second beam expanding lens assembly is made of second beam expanding lens and the 9th catoptron, second beam expanding lens and the 9th catoptron are laterally corresponding to be located at the outer left side of casing at interval, and the center of the center of circle of second beam expanding lens eight catoptron interior with being arranged on casing is on same optical axis; The 3rd beam expanding lens assembly is made of the 3rd beam expanding lens and the tenth catoptron, the 3rd beam expanding lens and forward and backward corresponding being disposed on outside the casing rear portion of the tenth catoptron structure, and the center of circle of the 3rd beam expanding lens and the center that is arranged on the 3rd catoptron in the casing are on same optical axis;
Described image-forming block is made of the camera that is arranged on rear portion in the casing forward and backward correspondence setting of imaging mirror outer with being arranged on casing; Signal at output end of camera through data bus is connected with input end and computer;
Described light-splitting device is arranged on the leading section of imaging mirror.
Above-mentioned semiconductor pumped total solids laser multifunction electronic speckle interferometer, wherein, described light-splitting device is made of the spectroscope of half reflection and half transmission and the diffusing globe that is arranged in this spectroscope one side.
Above-mentioned semiconductor pumped total solids laser multifunction electronic speckle interferometer, wherein, described lasing light emitter is made of the solid pump laser.
Above-mentioned semiconductor pumped total solids laser multifunction electronic speckle interferometer wherein, also comprises a crystal shear mirror, and this crystal shear mirror can exchange with light-splitting device, is arranged on imaging mirror leading section.
The present invention makes it compared with prior art owing to adopted above-mentioned technical scheme, has following advantage and good effect:
1, the semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer, only need to change or change the position of individual elements, just can realize three kinds of function conversion easily, by lasing light emitter, light path part, obtain first width of cloth image of testee by the CCD camera, testee is loaded and obtains second width of cloth image, image card in the input computing machine, two width of cloth images are subtracted each other processing, can on screen, observe directly the interference fringe relevant with deformation of body, can measure the calculating acoplanarity displacement, in-plane displacement, acoplanarity displacement gradient; Utility function is strong.
2, the semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer is owing to realized the vertical incidence and the reception of light path, measured acoplanarity displacement is pure normal direction displacement W field, in-plane displacement U field also is pure U field displacement, and this is very important to mechanical analysis and intensive analysis.
3, in the semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer owing to be provided with the crystal shear mirror, speckle-shearing interferometry is effective.
4, the lasing light emitter in the semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer is owing to adopt the solid pump laser, and it is big to make this instrument have power, and volume is little, and the coherence is good, can be used for on-the-spot the detection.
5, the semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer is if change the 6th catoptron into have the piezoelectric ceramics phase-shifter catoptron in the light path of the in-plane displacement U field of measuring horizontal structure; In the light path of measuring acoplanarity displacement W field, change diffusing globe into have the piezoelectric ceramics phase-shifter catoptron; Acoplanarity displacement and in-plane displacement all can be realized phase shift, thereby make this instrument have high sensitivity.
6, the semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer owing to adopt non-cpntact measurement, can obtain the displacement of the measured object whole audience: the measured object surface is not needed special processing, and easy to use; Can be used for Optimal Structure Designing; Can provide reliable boundary condition for FEM (finite element) calculation; Can be widely used in thin sight unrelieved stress, compound substance, structure analysis and non-destructive detects; Can be used for on-the-spot to the detection behind the deformation of body; Can study impact, dynamic and vibration problem; Can be used for mechanical analysis and measurement; And can obtain the required information of deviser by necessary aftertreatment, directly on watch-dog, show interference fringe image; Also can be used in the teaching, help the student to understand the effect of computing machine in laser interference.
Description of drawings
To the description of one embodiment of the invention, can further understand purpose of the present invention, specific structural features and advantage by following in conjunction with its accompanying drawing.Wherein, accompanying drawing is:
Fig. 1 is the structural representation of the semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer proving installation.
Fig. 2 is the twin-beam light path principle figure of the semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer when measuring in-plane displacement U field.
Fig. 3 is the light path principle figure of the semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer when measuring acoplanarity displacement W field.
Fig. 4 is the light path principle figure of the semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer when measuring the acoplanarity displacement gradient.
Embodiment
See also Fig. 1, semiconductor pumped total solids laser multifunction electronic speckle interferometer is made of measurement mechanism 1 and deal with data data computing machine 2; Measurement mechanism 1 is made up of casing 11, lasing light emitter 12, light path part 13, image-forming block 14, light-splitting device 15, crystal shear mirror 16; Lasing light emitter 12 is arranged in the casing anterior; Light path part 13 is formed by being located at seven catoptrons 131,133,134,135,136,139,1310, the Amici prism 132 in the casing and being located at three outer beam expanding lens assemblies of casing; Wherein: first catoptron 131 is disposed on laser output one side of lasing light emitter 12, and these catoptron 131 centers and laser output are on same optical axis; One Amici prism 132 and second catoptron, 133 forward and backward corresponding first catoptron, 131 rear portions that are disposed on, the center of these Amici prism 132 centers and second catoptron 133 is on same optical axis; The 3rd catoptron 134 and the 4th catoptron 135 horizontal corresponding second catoptron, 133 right sides that are disposed on, the center of the center of the 3rd catoptron 134 and the 4th catoptron 135 is on same optical axis; The 5th catoptron 136 correspondences are disposed on the 4th catoptron 135 rear portions, and the center of the 5th catoptron 136 and the 4th catoptron 135 centers are on same optical axis; The 7th catoptron 139 correspondences are disposed on the left side of Amici prism 132, and the center of the center of the 7th catoptron 139 and Amici prism 132 is on same optical axis; The 8th catoptron 1310 correspondences are disposed on the 7th catoptron 139 rear portions, and the center of the center of the 8th catoptron 1310 and the 7th catoptron 139 is on same optical axis; Described three the outer beam expanding lens assemblies of casing that are located at, wherein: the first beam expanding lens assembly is made of first beam expanding lens 137 and the 6th catoptron 138, first beam expanding lens 137 and the 6th catoptron 138 horizontal correspondences are disposed on the casing external right side, and the center of circle of first beam expanding lens 137 and the center that is arranged on the 5th catoptron 136 in the casing 11 are on same optical axis; The second beam expanding lens assembly is made of second beam expanding lens 1311 and the 9th catoptron 1312, second beam expanding lens 1311 is located at casing 11 outer left sides at interval with the 9th catoptron 1312 is laterally corresponding, and the center of the center of circle of second beam expanding lens 1,311 eight catoptron 1310 interior with being arranged on casing is on same optical axis; The 3rd beam expanding lens assembly is made of the 3rd beam expanding lens 1314 and the tenth catoptron 1315, the 3rd beam expanding lens 1314 and the tenth catoptron 1315 forward and backward corresponding being disposed on outside casing 11 rear portions, and the center of circle of the 3rd beam expanding lens 1314 and the center that is arranged on the 3rd catoptron 134 in the casing 11 are on same optical axis.
Image-forming block 14 is made of camera 141 that is arranged on rear portion in the casing 11 and the imaging mirror 142 forward and backward correspondence settings that are arranged on outside the casing 11; The signal output part of camera 141 is connected by the input end of data bus with computing machine 2.
Light-splitting device 15 is arranged on the leading section of imaging mirror 142.Light-splitting device 15 is made of the spectroscope 151 of half reflection and half transmission and the diffusing globe 152 that is arranged in spectroscope one side; Crystal shear mirror 16 can exchange with light-splitting device 16 and use, and is arranged on imaging mirror 142 leading sections.
The semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer has a wide range of applications in conjunction with computer technology, image processing technique, laser speckle and holographic interference technique, its ultimate principle is: when the surface of laser radiation at measured object, form the bright and dark spots (speckle) of stochastic distribution in the space in surperficial the place ahead, speckle moves with the distortion (or moving) of body surface, former and later two changing of the relative positions of meter record deformation of body speckle pattern, and the relatively variation of distortion front and back speckle pattern, the each point displacement of inspected object surface accurately.At first obtain the first preceding width of cloth image of loading with the CCD camera, load and obtain second width of cloth image to detecting thing then, input picture card AD changes into data (quantizing) and goes out reason by computing machine by program, make and directly on computer screen, to show the interference fringe relevant at last by two width of cloth image subtractions with deformation of body.
Body in the measurement mechanism cabinet of the present invention can be measured acoplanarity displacement; Open beam expanding lens and catoptron that the outer limit, the left and right sides of casing is provided with respectively, promptly can survey in-plane displacement; Light-splitting device under imaging mirror front dump is loaded onto then energy measurement acoplanarity displacement gradient of crystal shear mirror; The present invention only need change or change the position of individual elements, just can realize three kinds of function conversion easily.
See also Fig. 2, the semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer is measured the principle of work of the in-plane displacement U field of horizontal structure: lasing light emitter 12 emission laser, reflex to Amici prism 132 through first catoptron 131, when laser passes through Amici prism, be divided into reflection and transmission two-way light; Wherein one road light forms through the 7th catoptron 139, the 8th catoptron 1310, by second beam expanding lens 1311 and expands Shu Guang, again through 1312 reflections of the 9th catoptron, be radiated at the surface of test specimen A, form speckle light, through 142 imagings of imaging mirror, accepted by CCD camera 141, light signal is handled by the image pick-up card of data line input computing machine, by COMPUTER CALCULATION; Wherein another Lu Guangjing second catoptron 133, the 4th catoptron 135, the 5th catoptron 136, form by first beam expanding lens 137 and to expand Shu Guang, again through 138 reflections of the 6th catoptron, be radiated at the surface of test specimen A, form speckle light, through 142 imagings of imaging mirror, accepted by CCD camera 141, light signal is handled by the image pick-up card of data line input computing machine, by COMPUTER CALCULATION; Because two beam incident angles are equal, thereby can measure the in-plane displacement U field of horizontal structure.The semiconductor pumped total solids laser of the present invention multifunction electronic speckle interference measurement mechanism has the piezoelectric ceramics phase-shifter if in the light path of the in-plane displacement U field of measuring horizontal structure the 6th catoptron changed into, in-plane displacement can be realized phase shift, thereby makes this device have high sensitivity.
See also Fig. 3, the semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer is measured the principle of work of acoplanarity displacement W field: lasing light emitter 12 emission laser, through first catoptron 131, second catoptron 133 and 134 reflections of the 3rd catoptron, form expansion Shu Guang by the 3rd beam expanding lens 1314; Again through 1315 reflections of the tenth catoptron, vertical incidence is on the spectroscope 151 of light-splitting device 15, form reflection and transmission two-way light, wherein one road reflected light is through spectroscope 151 reflections, vertical irradiation forms speckle light on the surface of test specimen A, and the reflection back sees through spectroscope 151, through 42 imagings of imaging mirror, accepted by CCD camera 141, light signal is handled by the image pick-up card of data line input computing machine equally; After light transmission spectroscope 151 is penetrated by another Reuter, be radiated on the diffusing globe 152, after the reflection again through the reflection of spectroscope 151, through 142 imagings of imaging mirror, accepted by CCD camera 141, light signal is handled by the image pick-up card of data line input computing machine, by COMPUTER CALCULATION acoplanarity displacement W field.The semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer is if change diffusing globe into have the piezoelectric ceramics phase-shifter catoptron in the light path of measuring acoplanarity displacement W field, acoplanarity displacement can be realized phase shift, thereby makes this device have high sensitivity.
See also Fig. 4, the semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer is measured the principle of work of acoplanarity displacement gradient, removes light-splitting device 15 earlier, and crystal shear mirror 16 is arranged on imaging mirror 142 leading sections; Lasing light emitter 12 emission laser through first catoptron 131, second catoptron 133 and 134 reflections of the 3rd catoptron, form expansion Shu Guang by the 3rd beam expanding lens 1314; Be radiated at the surface of test specimen A, form speckle light, reflection is by crystal shear mirror 16, through 142 imagings of imaging mirror, accepted by CCD camera 141, light signal is handled by the image pick-up card of data line input computing machine, by COMPUTER CALCULATION acoplanarity displacement gradient.
The semiconductor pumped total solids laser of the present invention multifunction electronic speckle interferometer light path arrangement compactness, reasonable, highly sensitive, can be used for in-site measurement, by laser part, CCD camera view data is imported computing machine, can measure the calculating acoplanarity displacement, in-plane displacement, the acoplanarity displacement gradient, functions of use is strong; Show the interference fringe relevant with distortion on screen, intuitive is strong.The semiconductor pumped total solids laser of the present invention multifunction electronic speckle interference measurement mechanism has been applied to the deformation measurement after pressure vessel is subjected to air pressure, and is easy to use, measures accurately.
Claims (4)
1, a kind of semiconductor pumped total solids laser multifunction electronic speckle interferometer is made of measurement mechanism and the computing machine of handling measurement data, and this input end and computer is connected with the output terminal of measurement mechanism by data bus; It is characterized in that: described measurement mechanism comprises casing, lasing light emitter, light path part, image-forming block, light-splitting device; Described lasing light emitter is arranged in the casing anterior; Described light path part is formed by being located at several catoptrons, the Amici prism in the casing and being located at several outer beam expanding lens assemblies of casing; Wherein: first mirror separation is arranged on laser output one side of lasing light emitter, and this catoptron center and laser output are on same optical axis; One Amici prism and the forward and backward corresponding first catoptron rear portion that is disposed on of second catoptron, the center of this Amici prism and second catoptron is on same optical axis; The 3rd catoptron and the horizontal corresponding second catoptron right side that is disposed on of the 4th catoptron, the center of the 3rd catoptron center and the 4th catoptron is on same optical axis; The 5th catoptron correspondence is disposed on the 4th catoptron rear portion, and the center of the 5th catoptron center and the 4th catoptron is on same optical axis; The 7th catoptron correspondence is disposed on the left side of Amici prism, and the center of the 7th catoptron center and Amici prism is on same optical axis; The 8th catoptron correspondence is disposed on the 7th catoptron rear portion, and the center of the 8th catoptron center and the 7th catoptron is on same optical axis; Described several the outer beam expanding lens assemblies of casing that are located at, wherein: the first beam expanding lens assembly is made of first beam expanding lens and the 6th catoptron, first beam expanding lens and the horizontal correspondence of the 6th catoptron are disposed on the casing external right side, and the center of circle of first beam expanding lens and the center that is arranged on the 5th catoptron in the casing are on same optical axis; The second beam expanding lens assembly is made of second beam expanding lens and the 9th catoptron, second beam expanding lens and the 9th catoptron are laterally corresponding to be located at the outer left side of casing at interval, and the center of the center of circle of second beam expanding lens eight catoptron interior with being arranged on casing is on same optical axis; The 3rd beam expanding lens assembly is made of the 3rd beam expanding lens and the tenth catoptron, the 3rd beam expanding lens and forward and backward corresponding being disposed on outside the casing rear portion of the tenth catoptron structure, and the center of circle of the 3rd beam expanding lens and the center that is arranged on the 3rd catoptron in the casing are on same optical axis;
Described image-forming block is made of camera and imaging mirror, and described camera is arranged on rear portion in the casing, and described imaging mirror is arranged on outside the casing, is positioned on the same axis of camera; Signal at output end of camera through data bus is connected with input end and computer;
Described light-splitting device is arranged on the leading section of imaging mirror.
2, semiconductor pumped total solids laser multifunction electronic speckle interferometer according to claim 1 is characterized in that: described light-splitting device is made of the spectroscope of half reflection and half transmission and the diffusing globe that is arranged in this spectroscope one side.
3, semiconductor pumped total solids laser multifunction electronic speckle interferometer according to claim 1, it is characterized in that: described lasing light emitter is made of the solid pump laser.
4, semiconductor pumped total solids laser multifunction electronic speckle interferometer according to claim 1, it is characterized in that: also comprise a crystal shear mirror, this crystal shear mirror can exchange with light-splitting device, is arranged on imaging mirror leading section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03116506 CN1213279C (en) | 2003-04-21 | 2003-04-21 | Multifunctional electronic speckle interferometer including semiconductor pump and total solid laser |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 03116506 CN1213279C (en) | 2003-04-21 | 2003-04-21 | Multifunctional electronic speckle interferometer including semiconductor pump and total solid laser |
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| CN1540281A CN1540281A (en) | 2004-10-27 |
| CN1213279C true CN1213279C (en) | 2005-08-03 |
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| CN 03116506 Expired - Fee Related CN1213279C (en) | 2003-04-21 | 2003-04-21 | Multifunctional electronic speckle interferometer including semiconductor pump and total solid laser |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100362316C (en) * | 2006-03-08 | 2008-01-16 | 中国船舶重工集团公司第七一一研究所 | Three-dimensional electronic speckle interferometer |
| CN102735380B (en) * | 2012-05-28 | 2014-03-26 | 天津大学 | Multi-function electronic speckle interferometer |
| CN104132624B (en) * | 2014-08-14 | 2017-01-11 | 北京卫星环境工程研究所 | Device for measuring spacecraft structure deformation based on speckle interference and fringe projection and measurement method |
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