CN2814330Y - Shear speckle interferometer - Google Patents
Shear speckle interferometer Download PDFInfo
- Publication number
- CN2814330Y CN2814330Y CN 200520040730 CN200520040730U CN2814330Y CN 2814330 Y CN2814330 Y CN 2814330Y CN 200520040730 CN200520040730 CN 200520040730 CN 200520040730 U CN200520040730 U CN 200520040730U CN 2814330 Y CN2814330 Y CN 2814330Y
- Authority
- CN
- China
- Prior art keywords
- reflected light
- transmitted light
- square glass
- speckle interferometer
- glass prism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The utility model provides a shear speckle interferometer. It comprises an instrument container, a laser installed inside the container, a beam expanding lens, a cubic prism, a reflected light reflection mechanism, a transmitted light reflection mechanism and an imaging mechanism, wherein the laser is a solid pumping green laser. The utility model is endued with the sensitivity adjustment function; it can realize the shear speckle sensitivity adjustment only by a simple deflection mechanism. It can obtain the interference fringe of the displacement gradient of the distorted surface directly; the software in use can realize the computer automatic collection, computation and image post-processing. It is also endued with the advantages of small volume, strong power, light weight, single module output, long coherence length and convenience for carrying; it is adapted for the field service and can be mounted on anti-vibration platform to work.
Description
Technical field
The utility model relates to a kind of photoelectron instrument, particularly a kind of cutting speckle interferometer.
Background technology
(Electronic Shearographic Speckle PatternInterferometry ESSPI), is a kind of complex art that Computer Image Processing, laser and interference combine in the electronic cutting speckle interference.
Electronic cutting speckle interferometer is used in the optical measurement mechanics field, research and teaching is of many uses in testing, and non-cpntact measurement can obtain measured object whole audience displacement gradient (strain); For finite element provides reliable boundary condition; Can be used for structure optimization; Can be applied in mesomechanics; Residual stress measurement, compound substance research.Especially in structure analysis and non-destructive detection, be widely used.Aftertreatment by necessity obtains the needed information of deviser (digitizing).The traditional photodynamics research that is through with must be equipped with dark place, apparent photographic fixing wet process, the complicated extensive work such as light path of building.
The electronic speckle interferometer of domestic production does not at present also possess the performance of adjustable sensitivity, and can not realize the striped digitizing.
The index path of external a kind of electronic cutting speckle interferometer of producing as shown in Figure 1.This instrument comprises parts such as camera 31, completely reflecting mirror 32, laser instrument 33, and 34 is measured object, and 35 is direction of measurement.As seen from Figure 1, this instrument can obtain the striped of acoplanarity displacement gradient fields, but owing to can not introduce effective sensitivity adjusting, so can not be fit to special engine request.And the apparatus structure complexity, antivibration requires high.
Summary of the invention
The purpose of this utility model is to solve the problems referred to above that the prior art electronic speckle interferometer exists, and a kind of interference fringe that can directly obtain the acoplanarity displacement gradient is provided, and can realizes digitized cutting speckle interferometer.
The technical solution adopted in the utility model is: a kind of cutting speckle interferometer comprises instrument box and is installed in casing interior laser instrument, beam expanding lens, square glass prism, reflected light reflecting mechanism, transmitted light reflecting mechanism and imaging mechanism; Described beam expanding lens is installed on the light path of laser instrument, described square glass prism is installed on the reflected light path of measured object, described reflected light reflecting mechanism is installed on the reflected light path of square glass prism, described transmitted light reflecting mechanism is installed on the transmitted light path of square glass prism, described imaging mechanism is installed on the emitting light path of square glass prism, and described laser instrument is the solid pumping green laser.
Described reflected light reflecting mechanism comprises reflected light completely reflecting mirror and reflected light deflection mechanism, and the reflected light deflection mechanism links to each other with the reflected light completely reflecting mirror and is installed in the rear of reflected light completely reflecting mirror.
Described transmitted light reflecting mechanism comprises transmitted light completely reflecting mirror, transmitted light deflection mechanism and translation mechanism, and the transmitted light deflection mechanism links to each other with the transmitted light completely reflecting mirror respectively with translation mechanism and is installed in the rear of transmitted light completely reflecting mirror.
Be provided with in the described translation mechanism and be used to drive the parallel mobile accurate electric driving element of this mechanism.
Described imaging mechanism comprises image-forming objective lens and CCD charge coupled device, and image-forming objective lens and CCD charge coupled device be coaxial to link to each other and be set in sequence on the emitting light path of square glass prism.
Described beam expanding lens is the sphere beam expanding lens excessively of minor diameter high index of refraction.
Described casing has four supporting seats, is connected with the magnetic force gauge stand under each supporting seat respectively.
The utility model cutting speckle interferometer makes it compared with prior art owing to adopted above technical scheme, and following advantage and characteristics are arranged:
1, owing to adopt pump laser as light source, have that volume is little, power is big, in light weight, single mode output, long, the portable advantage of coherent length, be applicable to on-the-spot the use, and can be contained on the vibrationproof platform and work; The optical maser wavelength that pumping green laser produces is 532nm, and the short 101nm of wavelength than the helium-neon laser of general 633nm can make the sensitivity of measurement improve 20%;
2, have the sensitivity adjusting function, can realize the sensitivity adjusting of cutting speckle by simple deflection mechanism;
3, have noncontact, high sensitivity, without dark place and apparent photographic fixing wet process, be convenient to aftertreatment; For the measurement and the nondestructive inspection of engineering structure displacement field gradient (strain) provides a kind of simple, small and exquisite instrument;
4, since adopted minor diameter, high index of refraction cross the sphere beam expanding lens, can make the laser diffusion area bigger, the survey area at the 1m place is Ф 300mm;
5, can directly obtain the interference fringe of acoplanarity displacement gradient, used software can be realized computer-automatic collection, calculating and post processing of image;
6, can be used for teaching, the effect in electron interference and electronic shearography are interfered has deep understanding to the student who makes photo-measuring experimental mechanics and physical optics specialty to computing machine, and can be used as the strong instrument that master and doctoral candidate are engaged in correlative study;
8, the boundary condition that calculates for FEM (finite element) obtains to provide a kind of effective ways.
Description of drawings
Fig. 1 is the index path of prior art electronic cutting speckle interferometer;
Fig. 2 is the primary structure synoptic diagram of the utility model cutting speckle interferometer;
Fig. 3 is the construction profile figure of the utility model shearing electronic speckle interference instrument;
Fig. 4 is the index path of the utility model cutting speckle interferometer.
Embodiment
Referring to Fig. 2, cooperate referring to Fig. 3, Fig. 4.The utility model cutting speckle interferometer comprises instrument box 1 and is installed in casing interior laser instrument 2, beam expanding lens 3, square glass prism 4, reflected light reflecting mechanism 5, transmitted light reflecting mechanism 6 and imaging mechanism 7.Have the watch window 11 bigger slightly than square glass prism 4 in a side of instrument box 1, the below of instrument box 1 is provided with four supporting seats 12, is connected with magnetic force gauge stand 13 under each supporting seat respectively.Laser instrument 2 is the solid pumping green laser.Beam expanding lens 3 is the sphere beam expanding lens excessively of minor diameter high index of refraction, is installed on the light path of laser instrument.Square glass prism 4 is installed on the reflected light path of measured object.Reflected light reflecting mechanism 5 comprises reflected light completely reflecting mirror 51 and reflected light deflection mechanism 52, and reflected light completely reflecting mirror 51 is installed on the reflected light path of square glass prism 4, and reflected light deflection mechanism 52 links to each other with reflected light completely reflecting mirror 51 and is installed in its rear.Transmitted light reflecting mechanism 6 comprises transmitted light completely reflecting mirror 61, transmitted light deflection mechanism 62 and translation mechanism 63, transmitted light completely reflecting mirror 61 is installed on the transmitted light path of square glass prism, and transmitted light deflection mechanism 62 links to each other with transmitted light completely reflecting mirror 61 respectively with translation mechanism 63 and is installed in the rear of transmitted light completely reflecting mirror 61.Be provided with the accurate electric driving element that is used to drive this mechanism in the translation mechanism 63.Imaging mechanism 7 comprises image-forming objective lens 71 and CCD charge coupled device 72, and image-forming objective lens 71 and CCD charge coupled device 72 be coaxial to link to each other and be set in sequence on the emitting light path of square glass prism 4.
Optical instrument all is contained in the instrument box 1, laser instrument 2 is positioned on the base of instrument box 1 by screw, the bright dipping of laser instrument 2 is radiated on the beam expanding lens 3, laser is just come by the very thin light diffusion of a beam diameter like this, beam expanding lens 3 is contained on its mirror holder, is fixed in equally on the base of instrument box 1.Imaging mechanism 7 is made up of CCD charge coupled device 72 and ZOOM image-forming objective lens 71, and the 71st, the CCD camera lens of standard, its afterbody matches by the internal thread of external thread with CCD charge coupled device 72, is screwed in together, and is fixed in by erecting frame on the base of instrument box 1.Square glass prism 4 is placed on the dead ahead of image-forming objective lens 71, its base side of being plate, and two diagonal angles respectively are fixed with a vertical rod on the plate, and the vertical rod head is a depression bar, together constitutes square glass prism geometrical clamp 41, in order to fixing square glass prism.Square glass prism 4 and geometrical clamp 41 thereof are fixed on the base of instrument box 1.All pre-designed height when all elements are fixed on the base plate of instrument box 1, coaxial with the center that guarantees all elements and watch window 11; The below of instrument box 1 is provided with 4 supporting seats 12, also is connected to magnetic force gauge stand 13 by screw under each supporting seat simultaneously, instrument can be adsorbed on the experiment table.
The utility model cutting speckle interferometer can be realized the adjusting (variation) of sensitivity: after imaging mechanism can be correctly and clearly observed the dislocation picture of measured object, manual any 1 in rotary reflection light deflection mechanism 52 or the transmitted light deflection mechanism 62, can observe the dislocation direction of dislocation picture and the variation of angle, this has just realized the sensitivity adjusting that electronic cutting speckle is interfered.
The utility model cutting speckle interferometer can also be realized time-phase displacement: the accurate electric driving element in translation mechanism 63 applies driving voltage, it is parallel mobile to make translation mechanism 63 do the accurate trickle left and right sides, observing striped in computing machine changes, whenever apply a driving voltage and just produce time-phase displacement one time, write down three times or four inferior driven under the deforming stripe gathered, can obtain the position mutually and solve displacement tonsure value by software.
The light path of the utility model cutting speckle interferometer can be explained as follows in conjunction with Fig. 4:
Claims (7)
1, a kind of cutting speckle interferometer is characterized in that: comprise instrument box and be installed in casing interior laser instrument, beam expanding lens, square glass prism, reflected light reflecting mechanism, transmitted light reflecting mechanism and imaging mechanism; Described beam expanding lens is installed on the light path of laser instrument, described square glass prism is installed on the reflected light path of measured object, described reflected light reflecting mechanism is installed on the reflected light path of square glass prism, described transmitted light reflecting mechanism is installed on the transmitted light path of square glass prism, described imaging mechanism is installed on the emitting light path of square glass prism, and described laser instrument is the solid pumping green laser.
2, cutting speckle interferometer as claimed in claim 1, it is characterized in that: described reflected light reflecting mechanism comprises reflected light completely reflecting mirror and reflected light deflection mechanism, and the reflected light deflection mechanism links to each other with the reflected light completely reflecting mirror and is installed in the rear of reflected light completely reflecting mirror.
3, cutting speckle interferometer as claimed in claim 1, it is characterized in that: described transmitted light reflecting mechanism comprises transmitted light completely reflecting mirror, transmitted light deflection mechanism and translation mechanism, and the transmitted light deflection mechanism links to each other with the transmitted light completely reflecting mirror respectively with translation mechanism and is installed in the rear of transmitted light completely reflecting mirror.
4, cutting speckle interferometer as claimed in claim 3 is characterized in that: be provided with in the described translation mechanism and be used to drive the parallel mobile accurate electric driving element of this mechanism.
5, cutting speckle interferometer as claimed in claim 1 is characterized in that: described imaging mechanism comprises image-forming objective lens and CCD charge coupled device, and image-forming objective lens and CCD charge coupled device be coaxial to link to each other and be set in sequence on the emitting light path of square glass prism.
6, cutting speckle interferometer as claimed in claim 1 is characterized in that: described beam expanding lens is the sphere beam expanding lens excessively of minor diameter high index of refraction.
7, cutting speckle interferometer as claimed in claim 1 is characterized in that: described casing has four supporting seats, is connected with the magnetic force gauge stand under each supporting seat respectively.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200520040730 CN2814330Y (en) | 2005-04-08 | 2005-04-08 | Shear speckle interferometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200520040730 CN2814330Y (en) | 2005-04-08 | 2005-04-08 | Shear speckle interferometer |
Publications (1)
Publication Number | Publication Date |
---|---|
CN2814330Y true CN2814330Y (en) | 2006-09-06 |
Family
ID=36949417
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 200520040730 Expired - Fee Related CN2814330Y (en) | 2005-04-08 | 2005-04-08 | Shear speckle interferometer |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN2814330Y (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102878935A (en) * | 2012-09-25 | 2013-01-16 | 东南大学 | Device and method for measuring optical off-plane displacement field based on shearing speckle interference |
CN103048268A (en) * | 2013-01-10 | 2013-04-17 | 南京中迅微传感技术有限公司 | Digital electronic shear speckle interferometer based on micro-polaroid array |
CN105371778A (en) * | 2015-10-29 | 2016-03-02 | 北京交通大学 | Real-time measurement method and system for digital cutting speckle interference |
-
2005
- 2005-04-08 CN CN 200520040730 patent/CN2814330Y/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102878935A (en) * | 2012-09-25 | 2013-01-16 | 东南大学 | Device and method for measuring optical off-plane displacement field based on shearing speckle interference |
CN102878935B (en) * | 2012-09-25 | 2014-12-10 | 东南大学 | Device and method for measuring optical off-plane displacement field based on shearing speckle interference |
CN103048268A (en) * | 2013-01-10 | 2013-04-17 | 南京中迅微传感技术有限公司 | Digital electronic shear speckle interferometer based on micro-polaroid array |
CN103048268B (en) * | 2013-01-10 | 2015-05-27 | 南京中迅微传感技术有限公司 | Digital electronic shear speckle interferometer based on micro-polaroid array |
CN105371778A (en) * | 2015-10-29 | 2016-03-02 | 北京交通大学 | Real-time measurement method and system for digital cutting speckle interference |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101699328B (en) | Optical grating agglutination alignment mechanism in space heterodyne interferometer | |
CN101033952A (en) | Angle measurement method and device capable of distinguishing rotary direction of angle | |
CN101561401B (en) | Real-time observation method of crystal growing surface microstructure | |
US20130141712A1 (en) | Low coherence interferometric system for phase stepping shearography combined with 3d profilometry | |
CN105891958A (en) | Large-stroke high-scanning frequency optical fiber delay line | |
CN101067546A (en) | Method and apparatus for reducing heterodyne interference nonlinear error first harmonic component | |
CN1556371A (en) | Multifunction tridimension displacement laser interference measuring system | |
CN101063607A (en) | Device for detecting deformation of accurate measuring systems for synthesis ship gesture | |
CN2814330Y (en) | Shear speckle interferometer | |
CN2771816Y (en) | Large-shearing electronic speckle interfering instrument | |
CN107144237A (en) | Heavy caliber interferometer measuration system and algorithm based on three-dimensional splicing | |
CN1384334A (en) | Double-frequency confocal step height microscope measuring device | |
CN2760550Y (en) | Electronic shearing speckle interferometer with time and space phase shift function | |
CN106767521B (en) | Vertical scanning measurement white light interference measuring head | |
CN1786659A (en) | Method and apparatus for enhancing measuring sensitivity of rotating corner | |
CN201532483U (en) | Assembling and adjusting mechanism for grating agglutination in spatial heterodyne interferometer | |
CN2826363Y (en) | Dual wavelength two-dimensional space phase shift electronic speckle interometer | |
CN1818544A (en) | Portable acoplane displacement measuring device | |
CN1186620C (en) | Method for measuring refractive index of transparent material and interferometer thereof | |
CN101033949A (en) | Strain measurement method and device of object based on misplace relative theory | |
CN2651745Y (en) | Three-dimensional electronic speckle interferometer with phase shift function | |
CN1283976C (en) | Dual wavelength two-dimensional space phase shifting electronic speckle interferometer | |
CN112731345B (en) | Vibration-resistant type area array sweep frequency distance measurement/thickness measurement device and method with active optical anti-shake function | |
CN2526783Y (en) | Optical measurer for non-spherical surface shape | |
CN1687748A (en) | 2D phase shift watering interferometer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060906 Termination date: 20100408 |