CN1818544A - Portable acoplane displacement measuring device - Google Patents
Portable acoplane displacement measuring device Download PDFInfo
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- CN1818544A CN1818544A CN 200610024418 CN200610024418A CN1818544A CN 1818544 A CN1818544 A CN 1818544A CN 200610024418 CN200610024418 CN 200610024418 CN 200610024418 A CN200610024418 A CN 200610024418A CN 1818544 A CN1818544 A CN 1818544A
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Abstract
A portable measurer of a coplanar displacement consists of measuring element including CCD shooting head, vavifocus ZOOM imaging lens, spectroscope, phase shifter connected to spectroscope and computer connected to output end phase shifter; laser; extender lens; rectangular wedge lens and wave carrier element .It features that two light paths are formed at front and back surface of said wedge lens as one path being reflected to target surface of CCD shooting head and another path being shined on surface of object to be measured .
Description
Technical field
The present invention relates to portable acoplane displacement measuring device.
Background technology
Portable acoplane displacement measuring device claims electronic speckle pattern interferometry (ESPI) again, and full name ElectronicSpeckle Pattern Interferometry is a kind of complex art that Computer Image Processing, laser and interference combine.
Electronic speckle interferometer is used in the optical measurement mechanics field, research and teaching is of many uses in testing, and non-cpntact measurement can obtain the striped of measured object from face field displacement field (W field), for finite element provides reliable boundary condition, can be used for structure optimization.Be applied in mesomechanics, residual stress measurement, composite study.Especially in structure analysis and non-destructive detection, be widely used.It obtains the needed information of deviser (digitizing) by necessary aftertreatment, and the traditional photodynamics research institute that is through with must be equipped with dark place, shows the photographic fixing wet process, the complicated extensive work such as light path of building.
The applicant had once disclosed the technology of three-dimensional electronic speckle interferometer in the utility model patent " three-dimensional electronic speckle interferometer with phase shift function " of patent No. ZL200320109179.1, the light path of wherein measuring acoplanarity displacement comprises: 532nm laser instrument 11, cross hemisphere beam expanding lens 12, CCD camera 13, ZOOM imaging mirror 14, computing machine and Flame Image Process software and hardware 15, PZT phase-shifter 16, measured object 17, the optical splitter 18 of special diffuse reflectance device arranged, at the laser total reflection mirror 19 of 532nm.This laser instrument 11 is launched beam of laser and is transferred to completely reflecting mirror 19 through beam expanding lens 12, passes through optical splitter 18 directive measured objects 17 by completely reflecting mirror 19 again; Simultaneously, camera 13 is filmed the position situation of measured object 17 in the imaging mirror 14 and this information is delivered in the computing machine 15 by phase-shifter 16.
Measure because light path is a method of using time-phase displacement, its intrinsic characteristics decision must be gathered a series of images in a period of time when calculating (or measurement) displacement.And at this section in the period, the outside error of bringing to system can be introduced in the calculating, and the time of its size or effect is with unpredictable.In practical application or on-the-spot the use, make troubles for the user, even may obtain wrong result.Because this method data acquisition amount is big, the information that contains is many, and only at environment preferably under the situation, the result of measurement could be accurately.For reducing in this method error to result's image, have to repeat to do the measurement under a large amount of same states, average then as the result who measures, increased workload (quantity on sampling is decided), and also very uninteresting.
Summary of the invention
The present invention is in order to adapt to the application request of engineering, and a kind of result that can obtain under the situation preferably at environment of exploitation, can comparatively obtain real-time result's portable acoplane displacement measuring device again in operating mode in the rugged environment, two kinds of methods of this measuring instrument integrating time and spatial phase shift are in same instrument, for the measurement of engineering structure displacement field provides simple and practical, portable instrument.Have noncontact, high sensitivity, without the advantage of dark place and apparent photographic fixing wet process.Also can be directly used in the scene, be convenient to aftertreatment.
The technical scheme that the present invention takes is: portable acoplane displacement measuring device comprises light path part and computing machine part; Described light path part comprises housing, is located at the measuring sensor in the housing; Described measuring sensor comprises laser instrument, is located at the beam expanding lens of laser instrument rear side; The ZOOM imaging mirror of CCD camera and zoom, the spectroscope that is located at the ZOOM imaging mirror rear side of zoom, the phase-shifter that is connected with spectroscope, the output terminal of phase-shifter connects computing machine; Be characterized in that measuring sensor also comprises: rectangle mirror, carrier element and light-radiating lens; Described rectangle mirror and carrier element are located at the rear side of beam expanding lens in proper order; Described light-radiating lens is located between rectangle mirror and the spectroscope; The light that described laser instrument sends expands through beam expanding lens restraints into scattered light, front and rear surfaces at rectangle mirror is divided into two-way light, and one road light is radiated at light-radiating lens after the reflection of the rear surface of rectangle mirror rear surface is mapped to the target surface of CCD camera through the ZOOM imaging mirror reversal of zoom; Another road light transmission rectangle mirror and carrier element are radiated at the measured object surface, form speckle diffused light reflection process ZOOM imaging mirror to the target surface of CCD camera and a road above-mentioned interference of light.
Above-mentioned portable acoplane displacement measuring device, wherein, the optical axis of described laser instrument, beam expanding lens, rectangle mirror and carrier element and the center of measured object are on same axis A.The center of described imaging device, spectroscopical optical axis and measured object is on same axis B.Described axis A and axis B intersect at the center of measured object, and form an angle α.
Above-mentioned portable acoplane displacement measuring device, wherein, described laser instrument is a 532nm solid pumping green laser.
Above-mentioned portable acoplane displacement measuring device, wherein, described beam expanding lens was the hemisphere beam expanding lens.
Above-mentioned portable acoplane displacement measuring device, wherein, described rectangle mirror is the rectangle mirror of band bidimensional regulating device.
Above-mentioned portable acoplane displacement measuring device, wherein, described carrier element is the anti-reflection carrier element of two sides plating of band bidimensional regulating device.
Above-mentioned portable acoplane displacement measuring device, wherein, described light-radiating lens is two-sided acute-matte light-radiating lens.
Above-mentioned portable acoplane displacement measuring device wherein, also comprises a mechanism for regulating elevation angle, and described mechanism for regulating elevation angle is made of the adjustable support foot that the bottom at the light path part housing is provided with.
The present invention is owing to adopted above technical scheme, and its technique effect is tangible:
1), adopt 532nm solid pumping green laser as light source.Have volume small and exquisite (being about 120mm, wide about 50mm, high about 50mm), in light weight, advantages such as single mode is exported, coherent length is long, distribution of light intensity big (can reach 16mw), strong, the luminous stable life-span length of shock resistance.
2), being easy to carry property of green laser can make whole apparatus structure more compact, and wavelength short (532nm is than the short 100nm of helium-neon laser wavelength of general 633nm commonly used) can make the sensitivity of measurement improve 20%.
3), on an instrument, realized simultaneously two kinds of all right comparisons mutually and checking of result that method is measured, having satisfied the actual needs of engineering by the numerical measuring from face time and spatial phase shift field.
4), adopt the scatterometry element of two-sided frosted to carry out the light field homogenising, make reference light become more even, eliminate the saturation effect that local bright spot is brought to CCD fully, make measure accurately interference-free.Solved in the light path uneven illumination even, obtain a difficult problem such as carrier fringe instability.
5), adopt the once saturating technology of the two-sided plating of wave carrier piece, make thing light energy losses minimum, and brought the better effect of carrier wave contrast, improve the accuracy of measuring.
Description of drawings
Specific structural features of the present invention is further described by following embodiment and accompanying drawing thereof.
Fig. 1 is the light channel structure synoptic diagram that prior art is measured the time-phase displacement instrument of acoplanarity displacement.
Fig. 2 is the contour structures synoptic diagram of the light path part of portable acoplane displacement measuring device of the present invention.
Fig. 3 is the light channel structure synoptic diagram of portable acoplane displacement measuring device of the present invention.
Fig. 4 is the structural representation of the light path part mechanism for regulating elevation angle of portable acoplane displacement measuring device of the present invention.
Embodiment
See also Fig. 2, Fig. 3.Portable acoplane displacement measuring device of the present invention comprises light path part 2 and computing machine part 3.Light path part 2 comprises housing 21 and is located at the interior measuring sensor 22 of housing.The bottom of housing is provided with feet 211.Described measuring sensor comprises laser instrument 221, is located at the beam expanding lens 222 of laser instrument rear side, order is located at the beam expanding lens rear side rectangle mirror 223 and carrier element 224.Also comprise an imaging device 225, be located at the spectroscope 226 of imaging device rear side, the phase-shifter 227 that is connected with spectroscope, the output terminal of phase-shifter connects computing machine.And also comprise the light-radiating lens 228 that is located between rectangle mirror and the spectroscope.
The center of the optical axis of described laser instrument, beam expanding lens, rectangle mirror and carrier element and measured object 100 is on same axis A.
The center of described imaging device, spectroscopical optical axis and measured object 100 is on same axis B.Described axis A and axis B intersect at the center of measured object 100, and form an angle α.
In the present embodiment, laser instrument adopts 532nm solid pumping green laser, it as light source, had volume small and exquisite (for example being about 120mm, wide about 50mm, high about 50mm), in light weight, advantages such as single mode is exported, coherent length is long, distribution of light intensity big (can reach 16mw), strong, the luminous stable life-span length of shock resistance.Beam expanding lens adopts the sphere beam expanding lens excessively of minor diameter high index of refraction, thereby can make the laser diffusion area bigger, and as the 1m place, the area that can measure is 300mm.Imaging device 225 is combined as a whole by the ZOOM imaging mirror 2252 of CCD camera 2251 and zoom and constitutes, and its camera 2251 is stretched outside the housing of light path part.Rectangle mirror is the rectangle mirror of band bidimensional regulating device.Carrier element is the anti-reflection carrier element of two sides plating of band bidimensional regulating device.Light-radiating lens is two-sided acute-matte light-radiating lens.
See also Fig. 4.Use for convenient, portable acoplane displacement measuring device of the present invention also comprises a mechanism for regulating elevation angle 4, and described mechanism for regulating elevation angle is made of the adjustable support foot that can adjust the camera elevation angle up and down that the bottom at the light path part housing is provided with.But in the present embodiment adjustable support foot take by the external thread bolt 41 that is connected with the light path part housing bottom and with this external thread bolt adaptive, not only the adjustable diameter and screw adjusting housing the elevation angle up and down, but also constitute as the inner thread sleeve 42 of feet.This structure also can make housing integral body move up and down to regulate height of center.
Principle of work of the present invention is: laser instrument 221 emits beam and restraints into scattered light through 222 expansions of beam expanding lens beam expanding lens, front and rear surfaces at rectangle mirror 223 is divided into two-way light, and one road light is radiated at light-radiating lens 228 rear surfaces reflex to CCD camera 2251 through the ZOOM imaging mirror 2252 of zoom target surface after the reflection of the rear surface of rectangle mirror 223; Another road light transmission rectangle mirror 223 and carrier element 224 are radiated at measured object 100 surfaces, form the reflection of speckle diffused light and arrive the target surface of CCD camera 2251 and a road above-mentioned interference of light through ZOOM imaging mirror 2252.Rotate carrier element 224 and can produce uniform linear carrier fringe, measured object 100 is loaded, reflection load striped just by carrier modulation, calculate and can obtain the acoplanarity displacement deflection by calculating images acquired.
Portable acoplane displacement measuring device of the present invention both can be used as the measurement of time shifting, can be used as the measurement of space displacement again.
The present invention for measurement structure displacement field in the engineering provide a kind of high sensitivity, noncontact, the optical measurement instrument, be the product that new and high technologies such as laser, precision optical machinery and computing machine organically combine.Can be used for the static state of acoplanarity displacement field deformation, dynamically accurate and kinetic measurement.Whole instrument is light-duty, compact, and the rigidity height is easy to carry, and use at the scene that is suitable for carrying out.
Claims (8)
1, portable acoplane displacement measuring device comprises light path part and computing machine part; Described light path part comprises housing, is located at the measuring sensor in the housing; Described measuring sensor comprises laser instrument, is located at the beam expanding lens of laser instrument rear side; The ZOOM imaging mirror of CCD camera and zoom, the spectroscope that is located at the ZOOM imaging mirror rear side of zoom, the phase-shifter that is connected with spectroscope, the output terminal of phase-shifter connects computing machine; It is characterized in that measuring sensor also comprises: rectangle mirror, carrier element and light-radiating lens;
Described rectangle mirror and carrier element are located at the rear side of beam expanding lens in proper order;
Described light-radiating lens is located between rectangle mirror and the spectroscope;
The light that described laser instrument sends expands through beam expanding lens restraints into scattered light, front and rear surfaces at rectangle mirror is divided into two-way light, and one road light is radiated at light-radiating lens after the reflection of the rear surface of rectangle mirror rear surface is mapped to the target surface of CCD camera through the ZOOM imaging mirror reversal of zoom; Another road light transmission rectangle mirror and carrier element are radiated at the measured object surface, form speckle diffused light reflection process ZOOM imaging mirror to the target surface of CCD camera and a road above-mentioned interference of light.
2, portable acoplane displacement measuring device according to claim 1 is characterized in that,
The optical axis of described laser instrument, beam expanding lens, rectangle mirror and carrier element and the center of measured object are on same axis A.
The center of described imaging device, spectroscopical optical axis and measured object is on same axis B.Described axis A and axis B intersect at the center of measured object, and form an angle α.
3, portable acoplane displacement measuring device according to claim 1 is characterized in that, described laser instrument is a 532nm solid pumping green laser.
4, portable acoplane displacement measuring device according to claim 1 is characterized in that, described beam expanding lens was the hemisphere beam expanding lens.
5, portable acoplane displacement measuring device according to claim 1 is characterized in that, described rectangle mirror is the rectangle mirror of band bidimensional regulating device.
6, portable acoplane displacement measuring device according to claim 1 is characterized in that, described carrier element is the anti-reflection carrier element of two sides plating of band bidimensional regulating device.
7, portable acoplane displacement measuring device according to claim 1 is characterized in that, described light-radiating lens is two-sided acute-matte light-radiating lens.
8, portable acoplane displacement measuring device according to claim 1 is characterized in that, also comprises a mechanism for regulating elevation angle, and described mechanism for regulating elevation angle is made of the adjustable support foot that the bottom at the light path part housing is provided with.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100244181A CN100374817C (en) | 2006-03-07 | 2006-03-07 | Portable acoplane displacement measuring device |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2006100244181A CN100374817C (en) | 2006-03-07 | 2006-03-07 | Portable acoplane displacement measuring device |
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| CN1818544A true CN1818544A (en) | 2006-08-16 |
| CN100374817C CN100374817C (en) | 2008-03-12 |
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| CNB2006100244181A Expired - Fee Related CN100374817C (en) | 2006-03-07 | 2006-03-07 | Portable acoplane displacement measuring device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101893683A (en) * | 2010-07-15 | 2010-11-24 | 桂林电子科技大学 | Method for forecasting operation life of integrated circuit based on phase shifting electronic speckle pattern interferometry |
| CN102135413A (en) * | 2010-12-14 | 2011-07-27 | 河南科技大学 | Phase vortex based digital speckle correlation measurement method |
| CN102506710A (en) * | 2011-10-25 | 2012-06-20 | 天津大学 | Device for detecting in-plane error in micro/nano device out-of-plane motion test and compensating method |
| CN103148785A (en) * | 2013-01-10 | 2013-06-12 | 广东工业大学 | Optics interference spectrum domain phase contrast B-scanner and measuring method thereof |
| CN105716536A (en) * | 2016-04-26 | 2016-06-29 | 盐城工学院 | Three-dimensional digital speckle pattern interferometry synchronous measurement method and device |
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| US4280764A (en) * | 1980-02-21 | 1981-07-28 | The United States Of America As Represented By The Secretary Of The Navy | Phase-conjugate interferometer |
| GB8820761D0 (en) * | 1988-09-02 | 1988-10-05 | Tyrer J R | Interferometry |
| JPH07198319A (en) * | 1993-12-28 | 1995-08-01 | Agency Of Ind Science & Technol | Real-time phase-shift interferometer |
| US6128082A (en) * | 1998-09-18 | 2000-10-03 | Board Of Trustees Operating Michigan State University | Technique and apparatus for performing electronic speckle pattern interferometry |
| CN2651745Y (en) * | 2003-10-24 | 2004-10-27 | 中国船舶重工集团公司第七一一研究所 | Three-dimensional electronic speckle interferometer with phase shift function |
| CN1304817C (en) * | 2004-01-02 | 2007-03-14 | 清华大学 | Multifunction tridimension displacement laser interference measuring system |
| CN100552431C (en) * | 2004-05-12 | 2009-10-21 | 中国科学院长春光学精密机械与物理研究所 | Laser speckle interferometry measuring method and device |
| CN2760550Y (en) * | 2004-12-24 | 2006-02-22 | 中国船舶重工集团公司第七一一研究所 | Electronic shearing speckle interferometer with time and space phase shift function |
| CN2881540Y (en) * | 2006-03-07 | 2007-03-21 | 中国船舶重工集团公司第七一一研究所 | Portable acoplanarity displacement measuring instrument |
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2006
- 2006-03-07 CN CNB2006100244181A patent/CN100374817C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101893683A (en) * | 2010-07-15 | 2010-11-24 | 桂林电子科技大学 | Method for forecasting operation life of integrated circuit based on phase shifting electronic speckle pattern interferometry |
| CN102135413A (en) * | 2010-12-14 | 2011-07-27 | 河南科技大学 | Phase vortex based digital speckle correlation measurement method |
| CN102135413B (en) * | 2010-12-14 | 2012-08-22 | 河南科技大学 | Phase vortex based digital speckle correlation measurement method |
| CN102506710A (en) * | 2011-10-25 | 2012-06-20 | 天津大学 | Device for detecting in-plane error in micro/nano device out-of-plane motion test and compensating method |
| CN103148785A (en) * | 2013-01-10 | 2013-06-12 | 广东工业大学 | Optics interference spectrum domain phase contrast B-scanner and measuring method thereof |
| CN103148785B (en) * | 2013-01-10 | 2016-08-17 | 广东工业大学 | A kind of optical interference spectral domain phase place comparison B-scan instrument and measuring method thereof |
| CN105716536A (en) * | 2016-04-26 | 2016-06-29 | 盐城工学院 | Three-dimensional digital speckle pattern interferometry synchronous measurement method and device |
| CN105716536B (en) * | 2016-04-26 | 2018-09-28 | 盐城工学院 | A kind of 3-dimensional digital speckle interference method for synchronously measuring and device |
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| CN100374817C (en) | 2008-03-12 |
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