CN2760550Y - Electronic shearing speckle interferometer with time and space phase shift function - Google Patents
Electronic shearing speckle interferometer with time and space phase shift function Download PDFInfo
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- CN2760550Y CN2760550Y CN 200420114712 CN200420114712U CN2760550Y CN 2760550 Y CN2760550 Y CN 2760550Y CN 200420114712 CN200420114712 CN 200420114712 CN 200420114712 U CN200420114712 U CN 200420114712U CN 2760550 Y CN2760550 Y CN 2760550Y
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Abstract
An electronic shearing speckle interferometer with time and space phase shift function consists of a laser, an optical beam expander which is positioned on the light path of the light beam emerged from the laser and is used to irradiate the light beam expansively to the surfaces of the measured objects, a shearing mirror which is positioned on the light path of the light beam reflected from the measured object surface and is used to cast the rays that come from different points on the measured object surface to an identical point on the image formation plane, a shearing mirror driving mechanism which connects with the shearing mirror and drives the shearing mirror to move along the directions perpendicular and parallel to the reflected beam, a polarizer which is arranged on the light path of the light beam emerged from the shearing mirror and a digital image-forming device whose light activated element is situated at the image formation plane. The electronic shearing speckle interferometer is provided with many advantages of small volume, strong power, light weight, simple module output, long coherent length, convenience for carrying, adequacy for site, etc; it can also create time phase shift and space phase shift with convenience.
Description
Technical field
Harmless, non-contact detection technology that the utility model relates to, particularly a kind of electronic cutting speckle interferometer.
Background technology
Along with the continuous lifting of product quality and reliability index, need to adopt lossless detection method to study the defective that exists with test material.Because possess the whole audience, noncontact and plurality of advantages such as pollution-free, the optical technology such as thermal imaging, holographic imaging art, electronic speckle pattern interferometry art (ESPI) and electronic cutting speckle interferometry (ESSPI) has obtained application widely in the Non-Destructive Testing field.
ESSPI is a kind of laser measuring technique based on computer data processing, phase-shifting technique and interferometry, adopt the principle of the identical light beam generation interference fringe of two bundles different with other interference technique, ESSPI utilizes clipper that the same point that the light wave of two points of body surface reflexes on the imaging plane be need not to adopt other reference beam to produce so-called speckle interference picture, is a kind of self-reference interference system therefore.
Fig. 1 shows a kind of typical electronic cutting speckle interferometer, and this device comprises laser instrument 1, beam expander optical system 2, lens combination 3, improved michelson interferometer 4 and video camera 5.As shown in Figure 1, the light beam of laser instrument 1 shines the surface of testee 6 through beam expander optical system 2, and folded light beam is incident to michelson interferometer 4 after lens combination 3, be incident upon then on the video camera imaging plane.The view data that video camera obtains exports computing machine 8 to through frame grabber 7 and carries out the successive image processing.
Clipper is the critical component in the ESSPI technology, interfere thereby the same point that it causes imaging plane with the scattered light of two points of body surface produces, clipper commonly used comprises optical glass wedge, two angle prism, birefringent prism or shear mirror and improved michelson interferometer.ESSPI device shown in Figure 1 adopts michelson interferometer 4 as clipper, and the catoptron 4a in this michelson interferometer also is not orthogonal to catoptron 4b but very little angle of deflection, thereby makes 6 lip-deep somes P of Measuring Object
1And P
2Light wave be incident to the same point P of imaging plane (being the imaging plane of video camera 5).
Postulated point P place is through a P
1And P
2The light wave U of reflection
1And U
2For:
U
1=a
1e
I θ 1And U
2=a
2e
I θ 2(1)
The θ here
1And θ
2Be respectively through a P
1And P
2The phase place of the light wave of reflection, a
1And a
2Be respectively amplitude.Total light field U at P point place
TotFor:
U
tot＝a
1e
iθ1+a
2e
iθ2 (2)
Therefore the light intensity I that puts the P place can be expressed as:
I＝(a
1 2+a
2 2)+2cos(θ
1-θ
2)＝A+Bcosφ (3)
The φ=θ here
1-θ
2Expression is through a P
1And P
2The phase differential of reflecting light.When testee 6 is applied in a load, deformation may take place in it, thereby causes phase differential to be changed to φ ' from φ, below Δ=φ '-φ ' is called relative phase changes, because it is the function of testee surface deformation gradient, therefore can directly obtain the Gradient distribution of body surface.
Utilize phase-shifting technique can quantitatively obtain phase data φ and φ ', when adopting michelson interferometer, change shearing displacement and direction to realize phase shift by changing the angle between the catoptron and catoptron being subjected to displacement as shear mirror.For example, in michelson interferometer shown in Figure 1, utilize piezoelectric crystal device (PZT) to drive catoptron 4b generation displacement and change shearing displacement and direction, but because the voltage of PZT and the nonlinear relationship of displacement, cause this type of drive to have the shortcoming of control difficulty and the accurate scale of needs, in addition, the complex structure of device shown in Figure 1, antivibration requires also higher.
Summary of the invention
The purpose of this utility model provides a kind of electronic cutting speckle interferometer, and it can be accurately, implementation space and time-phase displacement function easily.
Foregoing invention purpose of the present utility model realizes by following technical proposal:
A kind of electronic cutting speckle interferometer with time and spatial phase shift function comprises: laser instrument;
Beam expander optical system, it is positioned on the light path of described laser emitting light beam, is used for beam spread is exposed to the testee surface;
Shear mirror, it is positioned on the light path of the light beam of testee surface reflection, is used for from the ray cast of difference on the testee surface same point to the imaging plane;
The shear mirror driving mechanism, its link to each other with described shear mirror and drive described shear mirror along perpendicular to the direction displacement that is parallel to folded light beam;
Polaroid, it is arranged on the light path of the light beam of described shear mirror outgoing; And
Digitalized image device, its light activated element are positioned at described imaging plane place.
In above-mentioned electronic cutting speckle interferometer with time and spatial phase shift function, reasonable is that described laser instrument adopts the 532nm pump laser.
In above-mentioned electronic cutting speckle interferometer with time and spatial phase shift function, described shear mirror driving mechanism is accurate screw mechanism.
In above-mentioned electronic cutting speckle interferometer with time and spatial phase shift function, described digitalized image equipment adopts CCD as the light intensity element.
Electronic cutting speckle interferometer of the present utility model has that volume is little, power is big, in light weight, single mode output, coherent length is long, plurality of advantages such as being applicable to the scene is easy to carry, when adopting the 532nm pump laser, compare with 633nm laser instrument commonly used, can also make and measure sensitivity raising 20%.In addition, in the above-mentioned interference instrument, by making shear mirror displacement generation time phase shift and spatial phase shift easily along the vertical and horizontal directions.
Description of drawings
Below by accompanying drawing better embodiment of the present utility model is described, same or analogous unit adopts identical label in the accompanying drawing.
Fig. 1 is a kind of structural representation of typical electronic cutting speckle interferometer.
Fig. 2 is the structural representation according to the electronic cutting speckle interferometer of the utility model preferred embodiment.
Embodiment
Fig. 2 shows the structure according to the electronic cutting speckle interferometer of the utility model preferred embodiment, this interferometer comprise laser instrument 1, beam expander optical system 2, shear mirror 9, shear mirror driving mechanism (not shown), polaroid 10 and digitalized image equipment 5 '.
In the present embodiment, adopt the 532nm pump laser as LASER Light Source, advantages such as this has brought that volume is little, power is big, in light weight, single mode output, coherent length grow, are easy to carry, and compare with the helium-neon laser wavelength of 633nm, can make and measure sensitivity raising 20%.The beam expander optical system 2 of above-mentioned interference instrument adopts the sphere beam expanding lens excessively of minor diameter highs index of refraction, thereby can make the laser diffusion area bigger, and for example the survey area at the 1m place can reach 300mm.In addition, here adopt the CCD camera as digitalized image equipment 5 ', it comprises object lens 5a and CCD 5b, but this does not also mean that digitalized image equipment is confined to described form, for example can also adopt digital camera as imaging device, and light activated element also can adopt cmos device to realize.
As shown in Figure 2, beam expanding lens 2 is positioned on the light path of outgoing beam of laser instrument 1, it exposes to beam spread on the surface of testee 6, shear mirror 9 is positioned on the light path of the light beam of testee surface reflection, it will be from the ray cast of difference on the testee surface same point to the imaging plane, the shear mirror driving mechanism links to each other with shear mirror 9, thereby drives shear mirror 9 along perpendicular to realizing the time and the spatial phase shift function of shear mirror respectively with the direction displacement that is parallel to folded light beam.In the present embodiment, the shear mirror driving mechanism adopts accurate screw mechanism to realize.Polaroid 10 is positioned on the light path of the light beam of shear mirror 9 outgoing, and its effect is that the light beam that is projected to the digital imaging apparatus place is vibrated along same direction, also promptly realizes the normalizing of light beam.From the light beam of polaroid 10 outgoing through object lens 5a imaging to the photosurface of CCD 5b, and every light intensity data exports the successive image treatment facility on the imaging surface that CCD obtains.
Claims (4)
1, a kind of electronic cutting speckle interferometer with time and spatial phase shift function is characterized in that, comprises:
Laser instrument;
Beam expander optical system, it is positioned on the light path of described laser emitting light beam, is used for beam spread is exposed to the testee surface;
Shear mirror, it is positioned on the light path of the light beam of testee surface reflection, is used for from the ray cast of difference on the testee surface same point to the imaging plane;
The shear mirror driving mechanism, its link to each other with described shear mirror and drive described shear mirror along perpendicular to the direction displacement that is parallel to folded light beam;
Polaroid, it is arranged on the light path of the light beam of described shear mirror outgoing; And
Digitalized image device, its light activated element are positioned at described imaging plane place.
2, the electronic cutting speckle interferometer with time and spatial phase shift function as claimed in claim 1 is characterized in that, described laser instrument adopts the 532nm pump laser.
3, the electronic cutting speckle interferometer with time and spatial phase shift function as claimed in claim 1 or 2 is characterized in that, described shear mirror driving mechanism is accurate screw mechanism.
4, the electronic cutting speckle interferometer with time and spatial phase shift function as claimed in claim 3 is characterized in that, described digitalized image equipment adopts CCD as the light intensity element.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420114712 CN2760550Y (en) | 2004-12-24 | 2004-12-24 | Electronic shearing speckle interferometer with time and space phase shift function |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420114712 CN2760550Y (en) | 2004-12-24 | 2004-12-24 | Electronic shearing speckle interferometer with time and space phase shift function |
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| Publication Number | Publication Date |
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| CN2760550Y true CN2760550Y (en) | 2006-02-22 |
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| CN 200420114712 Expired - Fee Related CN2760550Y (en) | 2004-12-24 | 2004-12-24 | Electronic shearing speckle interferometer with time and space phase shift function |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100374817C (en) * | 2006-03-07 | 2008-03-12 | 中国船舶重工集团公司第七一一研究所 | Portable acoplane displacement measuring device |
| CN103048268A (en) * | 2013-01-10 | 2013-04-17 | 南京中迅微传感技术有限公司 | Digital electronic shear speckle interferometer based on micro-polaroid array |
| CN105371778A (en) * | 2015-10-29 | 2016-03-02 | 北京交通大学 | Real-time measurement method and system for digital cutting speckle interference |
| CN105486699A (en) * | 2015-11-19 | 2016-04-13 | 中国航空工业集团公司北京航空材料研究院 | Experimental apparatus and method for detecting crazes and defects of organic glass |
| CN106091974A (en) * | 2016-08-04 | 2016-11-09 | 北京信息科技大学 | A kind of object distortion measurement instrument, method and apparatus |
| CN107402215A (en) * | 2016-05-18 | 2017-11-28 | 波音公司 | Devices, systems, and methods for Non-Destructive Testing |
| CN107462581A (en) * | 2016-06-02 | 2017-12-12 | 株式会社岛津制作所 | Defect inspection method and defect detecting device |
| CN107656288A (en) * | 2017-09-15 | 2018-02-02 | 中国科学院长春光学精密机械与物理研究所 | A kind of new shearing Beam Imaging System and target image acquisition methods |
| CN108760878A (en) * | 2017-03-29 | 2018-11-06 | 株式会社岛津制作所 | Vibration measurement device |
| CN108871220A (en) * | 2018-05-07 | 2018-11-23 | 北京信息科技大学 | A kind of time-phase displacement device |
| CN110132846A (en) * | 2019-06-27 | 2019-08-16 | 合肥工业大学 | Multi-direction speckle-shearing interferometry system and measurement method based on Mach once moral optical path |
| CN111578844A (en) * | 2020-05-15 | 2020-08-25 | 上海工程技术大学 | High vibration resistance electronic speckle interferometry system and method |
| CN112858344A (en) * | 2021-01-20 | 2021-05-28 | 昆明理工大学 | Nondestructive testing device and method |
-
2004
- 2004-12-24 CN CN 200420114712 patent/CN2760550Y/en not_active Expired - Fee Related
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100374817C (en) * | 2006-03-07 | 2008-03-12 | 中国船舶重工集团公司第七一一研究所 | Portable acoplane displacement measuring device |
| CN103048268A (en) * | 2013-01-10 | 2013-04-17 | 南京中迅微传感技术有限公司 | Digital electronic shear speckle interferometer based on micro-polaroid array |
| CN103048268B (en) * | 2013-01-10 | 2015-05-27 | 南京中迅微传感技术有限公司 | Digital electronic shear speckle interferometer based on micro-polaroid array |
| CN105371778A (en) * | 2015-10-29 | 2016-03-02 | 北京交通大学 | Real-time measurement method and system for digital cutting speckle interference |
| CN105486699A (en) * | 2015-11-19 | 2016-04-13 | 中国航空工业集团公司北京航空材料研究院 | Experimental apparatus and method for detecting crazes and defects of organic glass |
| CN107402215A (en) * | 2016-05-18 | 2017-11-28 | 波音公司 | Devices, systems, and methods for Non-Destructive Testing |
| CN107402215B (en) * | 2016-05-18 | 2021-07-30 | 波音公司 | Apparatus, system and method for non-destructive testing |
| CN107462581B (en) * | 2016-06-02 | 2020-02-14 | 株式会社岛津制作所 | Defect detection method and defect detection device |
| CN107462581A (en) * | 2016-06-02 | 2017-12-12 | 株式会社岛津制作所 | Defect inspection method and defect detecting device |
| CN106091974A (en) * | 2016-08-04 | 2016-11-09 | 北京信息科技大学 | A kind of object distortion measurement instrument, method and apparatus |
| CN108760878A (en) * | 2017-03-29 | 2018-11-06 | 株式会社岛津制作所 | Vibration measurement device |
| CN108760878B (en) * | 2017-03-29 | 2020-12-18 | 株式会社岛津制作所 | Vibration measuring device and method, defect inspecting device and method |
| CN107656288A (en) * | 2017-09-15 | 2018-02-02 | 中国科学院长春光学精密机械与物理研究所 | A kind of new shearing Beam Imaging System and target image acquisition methods |
| CN107656288B (en) * | 2017-09-15 | 2020-01-14 | 中国科学院长春光学精密机械与物理研究所 | Novel shearing light beam imaging system and target image acquisition method |
| CN108871220A (en) * | 2018-05-07 | 2018-11-23 | 北京信息科技大学 | A kind of time-phase displacement device |
| CN110132846A (en) * | 2019-06-27 | 2019-08-16 | 合肥工业大学 | Multi-direction speckle-shearing interferometry system and measurement method based on Mach once moral optical path |
| CN111578844A (en) * | 2020-05-15 | 2020-08-25 | 上海工程技术大学 | High vibration resistance electronic speckle interferometry system and method |
| CN111578844B (en) * | 2020-05-15 | 2021-10-19 | 上海工程技术大学 | High vibration resistance electronic speckle interferometry system and method |
| CN112858344A (en) * | 2021-01-20 | 2021-05-28 | 昆明理工大学 | Nondestructive testing device and method |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060222 Termination date: 20101224 |