CN102878935A - Device and method for measuring optical off-plane displacement field based on shearing speckle interference - Google Patents
Device and method for measuring optical off-plane displacement field based on shearing speckle interference Download PDFInfo
- Publication number
- CN102878935A CN102878935A CN2012103607888A CN201210360788A CN102878935A CN 102878935 A CN102878935 A CN 102878935A CN 2012103607888 A CN2012103607888 A CN 2012103607888A CN 201210360788 A CN201210360788 A CN 201210360788A CN 102878935 A CN102878935 A CN 102878935A
- Authority
- CN
- China
- Prior art keywords
- semi
- reflecting lens
- transparent semi
- transparent
- reflecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention discloses a device for measuring an optical off-plane displacement field based on shearing speckle interference. The device comprises a camera with a lens, a diaphragm adjustment device and a focus adjustment device, a first semi-transparent and semi-reflection mirror, a second semi-transparent and semi-reflection mirror, a third semi-transparent and semi-reflection mirror, a first reflector, a second reflector, a third reflector, a piezoelectric ceramic device, a voltage controller and a computer. Furthermore, the invention also discloses a method for measuring the optical off-plane displacement field based on the shearing speckle interference. The method comprises the following steps of: 1, debugging a test device; 2, before a tested sample is deformed, acquiring a phase shift graph; 3, after the tested sample is deformed, acquiring another phase shift graph; 4, measuring an off-plane displacement gradient field; and 5, measuring an off-plane displacement field. By the device for measuring the optical off-plane displacement field, the surface of the tested sample is lossless; the full field can be measured; the resolution is high; a measurement result is stable; and the device is favorable for site measurement.
Description
Technical field
The present invention relates to a kind of off-surface displacement measurement technology, specifically, relate to optics acoplanarity displacement field measurement device and measuring method based on speckle-shearing interferometry.
Background technology
What all the time, the off-surface displacement measurement in the industrial circle adopted greatly is traditional contact type measurement technology of counting representative with displacement.Yet these measuring techniques are single-point type mostly to be detected, and the distortion that is difficult to obtain the whole audience distributes, even adopt the method for rapid scanning also will face point-to-point measurement so that detection time is relatively long, is difficult to accomplish the problem of a plurality of check point state synchronized.In addition, contact type measurement has hindered the distortion of sample surfaces to a certain extent, and easily to the sample surfaces injury, traditional contact type measurement technology can not be accepted at increasing new material detection field.The contactless triangulation technique such as structured light projection is subject to high-acruracy survey with the demarcation of its relative complex and limited precision, and common electronic laser speckle interference off-surface displacement measurement technology then is difficult to be applied to the detection in the industrial circle because of higher vibration isolation and environmental requirement.
Summary of the invention
Technical matters: technical matters to be solved by this invention is: a kind of optics acoplanarity displacement field measurement device and measuring method based on speckle-shearing interferometry is provided, when using this measurement mechanism to carry out optics acoplanarity displacement field measurement, can be so that sample surface nondestructive, measurement of full field, resolution be high, measurement result is stable and be convenient to in-site measurement.
Technical scheme: for solving the problems of the technologies described above, the present invention adopts following technical scheme:
A kind of optics acoplanarity displacement field measurement device based on speckle-shearing interferometry, this measurement mechanism comprises video camera, the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, the 3rd semi-transparent semi-reflecting lens, the first catoptron, the second catoptron, the 3rd catoptron, piezoelectric ceramics device, voltage controller and the computing machine that is provided with camera lens, aperture regulating device and focusing adjustment; Wherein,
The first side of the first semi-transparent semi-reflecting lens is relative with the camera lens of video camera; The second side of the first semi-transparent semi-reflecting lens is relative with the 4th side of the second semi-transparent semi-reflecting lens, the 3rd side of the first semi-transparent semi-reflecting lens is relative with the first side of the 3rd semi-transparent semi-reflecting lens, the first side of the first semi-transparent semi-reflecting lens is two relative sides of the first semi-transparent semi-reflecting lens with the 3rd side of the first semi-transparent semi-reflecting lens, an end of the reflecting surface of the first semi-transparent semi-reflecting lens is positioned at the 3rd side of the first semi-transparent semi-reflecting lens and the junction, the second side of the first semi-transparent semi-reflecting lens, and another end of the reflecting surface of the first semi-transparent semi-reflecting lens is positioned at the first side of the first semi-transparent semi-reflecting lens and the junction, the 4th side of the first semi-transparent semi-reflecting lens;
The second side of the second semi-transparent semi-reflecting lens is relative with the second catoptron, be provided with second switch between the second catoptron and the second semi-transparent semi-reflecting lens, the first side of the second semi-transparent semi-reflecting lens is relative with the first catoptron, is provided with the first switch between the first catoptron and the second semi-transparent semi-reflecting lens; The 4th side of the second semi-transparent semi-reflecting lens is two relative sides of the second semi-transparent semi-reflecting lens with the second side of the second semi-transparent semi-reflecting lens; An end of the reflecting surface of the second semi-transparent semi-reflecting lens is positioned at the 3rd side of the second semi-transparent semi-reflecting lens and the junction, the 4th side of the second semi-transparent semi-reflecting lens, and another end of the reflecting surface of the second semi-transparent semi-reflecting lens is positioned at the first side of the second semi-transparent semi-reflecting lens and the junction, the second side of the second semi-transparent semi-reflecting lens;
The 3rd side of the 3rd semi-transparent semi-reflecting lens is relative with the 3rd catoptron, the first side of the 3rd semi-transparent semi-reflecting lens is two relative sides of the 3rd semi-transparent semi-reflecting lens with the 3rd side of the 3rd semi-transparent semi-reflecting lens, the one side that the 3rd catoptron deviates from the 3rd semi-transparent semi-reflecting lens is provided with the piezoelectric ceramics device, the piezoelectric ceramics device is connected by wire with voltage controller, voltage controller is connected with computing machine, and video camera is connected with computing machine.
A kind of measuring method of the optics acoplanarity displacement field measurement device based on speckle-shearing interferometry, this measuring method may further comprise the steps:
Beneficial effect: compared with prior art, the present invention has following beneficial effect:
(1) sample surface nondestructive.Compare with traditional contact type measurement technology of counting representative with displacement in the industrial circle, it is optical measuring technique that the present invention adopts, and does not need and the sample Surface Contact, thereby to the not damage of surface of sample, also can not stop its distortion.
(2) measurement of full field.Classic method is to adopt single-point type to measure, and is difficult to obtain the distortion distribution of the whole audience.And the present invention is to the imaging of sample surface integral in the process of measuring.Thereby the present invention has had advantages of measurement of full field.
(3) resolution is high, precision is high.The laser interferometry technology itself has very high precision, can reach the sensitivity of wavelength magnitude, and the present invention has also inherited this characteristic well, has very high resolution and precision.
(4) measurement result is stable.Belong to equally the technology of electronic speckle pattern interferometry acoplanarity displacement of laser interference measuring method because usually be confined in the laboratory for the high request of vibration isolation and environment, can't be applied to industry spot and carry out in site measurement.The present invention has adopted the speckle-shearing interferometry technology that does not need reference light, greatly reduces for the requirement of vibration isolation, and measurement result is more stable than laser interferometry technology such as electronic speckle pattern interferometry.
(5) be convenient to in-site measurement.Measuring method of the present invention is less demanding to measurement environment, is suitable for in-site measurement, thereby has wide application space in the industrial detection field in future.
Description of drawings
Fig. 1 is measurement mechanism structural representation of the present invention.
Fig. 2 is the position view of three semi-transparent semi-reflecting lens of the present invention.
Have among the figure: video camera 1, the first semi-transparent semi-reflecting lens 2, the first side 201 of the first semi-transparent semi-reflecting lens, the second side 202 of the first semi-transparent semi-reflecting lens, the 3rd side 203 of the first semi-transparent semi-reflecting lens, the 4th side 204 of the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens 3, the first side 301 of the second semi-transparent semi-reflecting lens, the second side 302 of the second semi-transparent semi-reflecting lens, the 3rd side 303 of the second semi-transparent semi-reflecting lens, the 4th side 304 of the second semi-transparent semi-reflecting lens, the 3rd semi-transparent semi-reflecting lens 4, the first side 401 of the 3rd semi-transparent semi-reflecting lens, the second side 402 of the 3rd semi-transparent semi-reflecting lens, the 3rd side 403 of the 3rd semi-transparent semi-reflecting lens, the 4th side 404 of the 3rd semi-transparent semi-reflecting lens, the first catoptron 5, the second catoptron 6, the 3rd catoptron 7, piezoelectric ceramics device 8, voltage controller 9, computing machine 10, the first switch 11, second switch 12, sample 13.
Embodiment
Below in conjunction with accompanying drawing, technical scheme of the present invention is explained in detail.
As depicted in figs. 1 and 2, a kind of optics acoplanarity displacement field measurement device based on speckle-shearing interferometry of the present invention comprises the video camera 1, the first semi-transparent semi-reflecting lens 2, the second semi-transparent semi-reflecting lens 3, the 3rd semi-transparent semi-reflecting lens 4, the first catoptron 5, the second catoptron 6, the 3rd catoptron 7, piezoelectric ceramics device 8, voltage controller 9 and the computing machine 10 that are provided with camera lens, aperture regulating device and focusing adjustment.The first side 201 of the first semi-transparent semi-reflecting lens is relative with the camera lens of video camera 1.The second side 202 of the first semi-transparent semi-reflecting lens is relative with the 4th side 304 of the second semi-transparent semi-reflecting lens.The 3rd side 203 of the first semi-transparent semi-reflecting lens is relative with the first side 401 of the 3rd semi-transparent semi-reflecting lens.The 3rd side 203 of the first side 201 of the first semi-transparent semi-reflecting lens and the first semi-transparent semi-reflecting lens is two relative sides of the first semi-transparent semi-reflecting lens 2.The 4th side 204 of the second side 202 of the first semi-transparent semi-reflecting lens and the first semi-transparent semi-reflecting lens is two relative sides of the first semi-transparent semi-reflecting lens 2.An end of the reflecting surface of the first semi-transparent semi-reflecting lens 2 is positioned at the 3rd side 203 of the first semi-transparent semi-reflecting lens and 202 junctions, the second side of the first semi-transparent semi-reflecting lens, and another end of the reflecting surface of the first semi-transparent semi-reflecting lens 2 is positioned at the first side 201 of the first semi-transparent semi-reflecting lens and 204 junctions, the 4th side of the first semi-transparent semi-reflecting lens.The second side 302 of the second semi-transparent semi-reflecting lens is relative with the second catoptron 6.Be provided with second switch 12 between the second catoptron 6 and the second semi-transparent semi-reflecting lens 3.If second switch 12 is in open mode, the light of directive the second catoptron 6 and the light that reflects through the second catoptron 6 are with unaffected.If second switch 12 is in closed condition, the light of directive the second catoptron 6 will be absorbed fully by second switch 12, so also just not have the light that reflects from the second catoptron 6.The first side 301 of the second semi-transparent semi-reflecting lens is relative with the first catoptron 5.Be provided with the first switch 11 between the first catoptron 5 and the second semi-transparent semi-reflecting lens 3.If the first switch 11 is in open mode, the light of directive the first catoptron 5 and the light that reflects through the first catoptron 5 are with unaffected.If the first switch 11 is in closed condition, the light of directive the first catoptron 5 will be absorbed fully by the first switch 11, so also just not have the light that reflects from the first catoptron 5.The 3rd side 303 of the first side 301 of the second semi-transparent semi-reflecting lens and the second semi-transparent semi-reflecting lens is two relative sides of the second semi-transparent semi-reflecting lens 3, and the second side 302 of the 4th side 304 of the second semi-transparent semi-reflecting lens and the second semi-transparent semi-reflecting lens is two relative sides of the second semi-transparent semi-reflecting lens 3.An end of the reflecting surface of the second semi-transparent semi-reflecting lens 3 is positioned at the 3rd side 303 of the second semi-transparent semi-reflecting lens and 304 junctions, the 4th side of the second semi-transparent semi-reflecting lens, and another end of the reflecting surface of the second semi-transparent semi-reflecting lens 3 is positioned at the first side 301 of the second semi-transparent semi-reflecting lens and 302 junctions, the second side of the second semi-transparent semi-reflecting lens.The 3rd side 403 of the 3rd semi-transparent semi-reflecting lens is relative with the 3rd catoptron 7.The 3rd side 403 of the first side 401 of the 3rd semi-transparent semi-reflecting lens and the 3rd semi-transparent semi-reflecting lens is two relative sides of the 3rd semi-transparent semi-reflecting lens 4.The 4th side 404 of the second side 402 of the 3rd semi-transparent semi-reflecting lens and the 3rd semi-transparent semi-reflecting lens is two relative sides of the 3rd semi-transparent semi-reflecting lens 4.The one side that the 3rd catoptron 7 deviates from the 3rd semi-transparent semi-reflecting lens 4 is provided with piezoelectric ceramics device 8.Piezoelectric ceramics device 8 and voltage controller 9 are connected by wire, and voltage controller 9 is connected with computing machine 10.Control the output voltage of voltage controller 9 by the software of installing in the computing machine 10, the thickness of piezoelectric ceramics device 8 is changed, make the 3rd catoptron 7 that acoplanarity displacements occur, and then change through the light path of the light of the 3rd catoptron 7 reflections, thereby realize phase shift.Video camera 1 is connected with computing machine 10.By the software control video camera 1 of installing in the computing machine 10, make video camera 1 can gather image and with image storage in computing machine 10.
Further, the reflecting surface of the 3rd semi-transparent semi-reflecting lens 4 end is positioned at the first side 401 of the 3rd semi-transparent semi-reflecting lens and 402 junctions, the second side of the 3rd semi-transparent semi-reflecting lens; Another end of the reflecting surface of the 3rd semi-transparent semi-reflecting lens 4 is positioned at the 3rd side 403 of the 3rd semi-transparent semi-reflecting lens and 404 junctions, the 4th side of the 3rd semi-transparent semi-reflecting lens.Certainly, as another kind of scheme, an end of the reflecting surface of the 3rd semi-transparent semi-reflecting lens 4 is positioned at the 3rd side 403 of the 3rd semi-transparent semi-reflecting lens and 402 junctions, the second side of the 3rd semi-transparent semi-reflecting lens; Another end of the reflecting surface of the 3rd semi-transparent semi-reflecting lens 4 is positioned at the first side 401 of the 3rd semi-transparent semi-reflecting lens and 404 junctions, the 4th side of the 3rd semi-transparent semi-reflecting lens.
Further, described the first semi-transparent semi-reflecting lens 2, the second semi-transparent semi-reflecting lens 3, the 3rd semi-transparent semi-reflecting lens 4 are cube, and equal in length, and be highly equal, and width equates.That is to say, the product specification of the first semi-transparent semi-reflecting lens 2, the second semi-transparent semi-reflecting lens 3, the 3rd semi-transparent semi-reflecting lens 4 is identical, is conducive to the carrying out of measuring.
The measuring method of above-mentioned optics acoplanarity displacement field measurement device based on speckle-shearing interferometry may further comprise the steps:
In step 1, step 2 or step 3, switch to respectively two shear directions of x direction and y direction, can adopt two kinds of methods.First method is: open the first switch 11, close second switch 12, rotate the first catoptron 5, make in the image that video camera 1 collects, then the shear direction of image closes the first switch 11 in the x-direction, open second switch 12, rotate the second catoptron 6, make in the image that video camera 1 collects, the shear direction of image in the y-direction.Second method is: open the first switch 11, close second switch 12, then rotate the first catoptron 5, make in the image that video camera 1 collects, the shear direction of image in the y-direction; Close the first switch 11, open second switch 12, then rotate the second catoptron 6, make in the image that video camera 1 collects, the shear direction of image in the x-direction.
In step 2 and step 3, utilize voltage controller 9 to produce phase shift, and the method that gathers phase shift figure is: install and the working voltage control program at computing machine 10, utilize the output voltage of Control of Voltage routine change voltage controller 9, thereby change the thickness of piezoelectric ceramics device 8, make the 3rd catoptron 7 that acoplanarity displacement occur, light path through the light of the 3rd catoptron 7 reflection changes, thereby realization phase shift, and utilize video camera 1 to gather phase shift figure, phase shift figure is stored in the computing machine 10 that links to each other with video camera 1.When buying voltage controller 9, trade company can supporting user's Control of Voltage program rom that offers.
In step 4, phase shift algorithm is prior art.For example, journal title is called " Experimental Mechanics ", 03 phase of calendar year 2001, discloses in the article that name is called " the phase measurement method in the Optical interfere mensuration " and discloses phase shift algorithm.
The present invention has adopted two steps to carry out the measurement of acoplanarity displacement field.Wherein, the first step uses the speckle-shearing interferometry technology to realize the measurement of the Grade of Distance field; Second step carries out integration to the resulting the Grade of Distance of first step field, calculates the acoplanarity displacement field.The first step that two steps of the present invention are measured in the acoplanarity displacement field has been used the speckle-shearing interferometry technology, and natural have advantages of that harmless, noncontact, measurement of full field, the measuring speed of measuring method are fast.The laser interferometry technology itself has very high precision, can reach the sensitivity of wavelength magnitude, and the present invention has also inherited this characteristic well, has very high sensitivity.The technology of electronic speckle pattern interferometry acoplanarity displacement can't be applied to industry spot and carry out in site measurement because usually be confined in the laboratory for the high request of vibration isolation and environment.The present invention has adopted the speckle-shearing interferometry technology that does not need reference light, greatly reduces for the requirement of vibration isolation and environment, thereby has wide application space in the industrial detection field in future.
Conventional speckle-shearing interferometry technology can be measured along the gradient fields of a direction the sample surfaces acoplanarity displacement, yet will tend to run into the problem that the integration initial value can't be determined by single displacement gradient field displacement calculating field.In order to overcome this deficiency, the present invention improves on the basis of classical Michelson-optical interference circuit, adopted the first semi-transparent semi-reflecting lens 2, the second semi-transparent semi-reflecting lens 3 and 4 three semi-transparent semi-reflecting lens of the 3rd semi-transparent semi-reflecting lens, and the first catoptron 5, the second catoptron 6 and 7 three catoptrons of the 3rd catoptron replace a semi-transparent semi-reflecting lens and two catoptrons in the classical michelson interferometer optical path.Light through sample 13 surface reflections is carried out light splitting by the first semi-transparent semi-reflecting lens 2, wherein one road reflected light shines the 3rd semi-transparent semi-reflecting lens 4, be transmitted to the 3rd catoptron 7 through the 3rd semi-transparent semi-reflecting lens 4, reflex to again the 3rd semi-transparent semi-reflecting lens 4 through the 3rd catoptron 7, the 3rd semi-transparent semi-reflecting lens 4 is crossed in transmission and the first semi-transparent semi-reflecting lens 2 enters camera lens.When the first switch 11 is opened, when second switch 12 is closed, light through sample 13 surface reflections is carried out light splitting by the first semi-transparent semi-reflecting lens 2, wherein an other Reuter penetrates illumination and is mapped to the second semi-transparent semi-reflecting lens 3, reflex to the first catoptron 5 through the second semi-transparent semi-reflecting lens 3, reflex to the second semi-transparent semi-reflecting lens 3 through the first catoptron 5, reflex to the first semi-transparent semi-reflecting lens 2 through the second semi-transparent semi-reflecting lens 3 again, and entered in the camera lens of video camera 1 by 2 reflections of the first semi-transparent semi-reflecting lens.When the first switch 11 cuts out, when second switch 12 is opened, light through sample 13 surface reflections is carried out light splitting by the first semi-transparent semi-reflecting lens 2, wherein an other Reuter penetrates illumination and is mapped to the second semi-transparent semi-reflecting lens 3, be transmitted to the second catoptron 6 through the second semi-transparent semi-reflecting lens 3, reflex to again the second semi-transparent semi-reflecting lens 3 through the second catoptron 6, transmission is crossed the second semi-transparent semi-reflecting lens 3 and is arrived the first semi-transparent semi-reflecting lens 2, enters in the camera lens of video camera 1 through 2 reflections of the first semi-transparent semi-reflecting lens.No matter open the first switch 11 and close second switch 12, still close the first switch 11 and open second switch 12, this light path can be regarded the Michelson-of classics as and shear light path, can be used for measuring the Grade of Distance field of sample 13.Regulate the yawing moment of the first catoptron 5 and the second catoptron 6 so that the shear direction of two shearing pictures is orthogonal and respectively along x direction and the y direction of image coordinate.According to the 5th step of measuring method among the present invention, choose arbitrarily a Seed Points at last, carry out the acoplanarity displacement field that integration obtains sample in conjunction with the Grade of Distance field of x direction and y direction both direction.
Claims (8)
1. optics acoplanarity displacement field measurement device based on speckle-shearing interferometry, it is characterized in that, this measurement mechanism comprises video camera (1), the first semi-transparent semi-reflecting lens (2), the second semi-transparent semi-reflecting lens (3), the 3rd semi-transparent semi-reflecting lens (4), the first catoptron (5), the second catoptron (6), the 3rd catoptron (7), piezoelectric ceramics device (8), voltage controller (9) and the computing machine (10) that is provided with camera lens, aperture regulating device and focusing adjustment; Wherein,
First side (201) of the first semi-transparent semi-reflecting lens is relative with the camera lens of video camera (1); Second side (202) of the first semi-transparent semi-reflecting lens is relative with the 4th side (304) of the second semi-transparent semi-reflecting lens, the 3rd side (203) of the first semi-transparent semi-reflecting lens is relative with first side (401) of the 3rd semi-transparent semi-reflecting lens, first side (201) of the first semi-transparent semi-reflecting lens and the 3rd side (203) of the first semi-transparent semi-reflecting lens are two relative sides of the first semi-transparent semi-reflecting lens (2), an end of the reflecting surface of the first semi-transparent semi-reflecting lens (2) is positioned at the 3rd side (203) of the first semi-transparent semi-reflecting lens and the junction, the second side (202) of the first semi-transparent semi-reflecting lens, and another end of the reflecting surface of the first semi-transparent semi-reflecting lens (2) is positioned at first side (201) of the first semi-transparent semi-reflecting lens and the junction, the 4th side (204) of the first semi-transparent semi-reflecting lens;
Second side (302) of the second semi-transparent semi-reflecting lens is relative with the second catoptron (6), be provided with second switch (12) between the second catoptron (6) and the second semi-transparent semi-reflecting lens (3), first side (301) of the second semi-transparent semi-reflecting lens is relative with the first catoptron (5), is provided with the first switch (11) between the first catoptron (5) and the second semi-transparent semi-reflecting lens (3); The 4th side (304) of the second semi-transparent semi-reflecting lens and second side (302) of the second semi-transparent semi-reflecting lens are two relative sides of the second semi-transparent semi-reflecting lens (3); An end of the reflecting surface of the second semi-transparent semi-reflecting lens (3) is positioned at the 3rd side (303) of the second semi-transparent semi-reflecting lens and the junction, the 4th side (304) of the second semi-transparent semi-reflecting lens, and another end of the reflecting surface of the second semi-transparent semi-reflecting lens (3) is positioned at first side (301) of the second semi-transparent semi-reflecting lens and the junction, the second side (302) of the second semi-transparent semi-reflecting lens;
The 3rd side (403) of the 3rd semi-transparent semi-reflecting lens is relative with the 3rd catoptron (7), first side (401) of the 3rd semi-transparent semi-reflecting lens and the 3rd side (403) of the 3rd semi-transparent semi-reflecting lens are two relative sides of the 3rd semi-transparent semi-reflecting lens (4), the one side that the 3rd catoptron (7) deviates from the 3rd semi-transparent semi-reflecting lens (4) is provided with piezoelectric ceramics device (8), piezoelectric ceramics device (8) is connected by wire with voltage controller (9), voltage controller (9) is connected with computing machine (10), and video camera (1) is connected with computing machine (10).
2. according to the optics acoplanarity displacement field measurement device based on speckle-shearing interferometry claimed in claim 1, it is characterized in that, an end of the reflecting surface of described the 3rd semi-transparent semi-reflecting lens (4) is positioned at first side (401) of the 3rd semi-transparent semi-reflecting lens and the junction, the second side (402) of the 3rd semi-transparent semi-reflecting lens; Another end of the reflecting surface of the 3rd semi-transparent semi-reflecting lens (4) is positioned at the 3rd side (403) of the 3rd semi-transparent semi-reflecting lens and the junction, the 4th side (404) of the 3rd semi-transparent semi-reflecting lens.
3. according to the optics acoplanarity displacement field measurement device based on speckle-shearing interferometry claimed in claim 1, it is characterized in that, an end of the reflecting surface of described the 3rd semi-transparent semi-reflecting lens (4) is positioned at the 3rd side (403) of the 3rd semi-transparent semi-reflecting lens and the junction, the second side (402) of the 3rd semi-transparent semi-reflecting lens; Another end of the reflecting surface of the 3rd semi-transparent semi-reflecting lens (4) is positioned at first side (401) of the 3rd semi-transparent semi-reflecting lens and the junction, the 4th side (404) of the 3rd semi-transparent semi-reflecting lens.
4. according to the optics acoplanarity displacement field measurement device based on speckle-shearing interferometry claimed in claim 1, it is characterized in that, described the first semi-transparent semi-reflecting lens (2), the second semi-transparent semi-reflecting lens (3), the 3rd semi-transparent semi-reflecting lens (4) are cube, and equal in length, highly equal, width equates.
5. the measuring method of the optics acoplanarity displacement field measurement device based on speckle-shearing interferometry claimed in claim 1 is characterized in that, this measuring method may further comprise the steps:
Step 1. debugging proving installation: place sample (13), sample (13) is aimed at the 4th side (204) of the first semi-transparent semi-reflecting lens, then use laser lighting sample (13) surface, switch to respectively x direction and two shear directions of y direction of image, and the shearing displacement of demarcation x direction and two shear directions of y direction, wherein, the x direction is horizontal direction, and the y direction is vertical direction;
Step 2. gathers phase shift figure before sample (13) deforms: before sample (13) deforms, switch to respectively two shear directions of x direction and y direction, utilize voltage controller (9) to produce phase shift, and gather phase shift figure;
Step 3. is after sample (13) deforms, gather phase shift figure: sample (13) is loaded, make sample (13) produce acoplanarity displacement, then switch to respectively two shear directions of x direction and y direction, utilize voltage controller (9) to produce phase shift, and gather phase shift figure;
Step 4. is measured the Grade of Distance field: according to the phase shift figure that step 2 and step 3 collect, utilize phase shift algorithm to calculate in the x-direction the Grade of Distance field with the y direction;
Step 5. is measured the acoplanarity displacement field: choose the integration initial point in the Grade of Distance field of in the x-direction shear direction, integration goes out an acoplanarity displacement curve in the x-direction, then the every bit on this curve carries out integration in the y-direction as initial value for integral point, and then measures the acoplanarity displacement field; Perhaps along choosing the integration initial point in the Grade of Distance field of y shear direction, integration goes out an acoplanarity displacement curve in the y-direction, and then the every bit on this curve carries out integration in the x-direction as initial value for integral point, and then measures the acoplanarity displacement field.
6. according to the measuring method of the optics acoplanarity displacement field measurement device based on speckle-shearing interferometry claimed in claim 5, it is characterized in that, in described step 1, step 2 or the step 3, the method that switches to respectively x direction and two shear directions of y direction is: open the first switch (11), close second switch (12), then rotate the first catoptron (5), make in the image that video camera (1) collects, the shear direction of image in the x-direction; Close the first switch (11), open second switch (12), then rotate the second catoptron (6), make in the image that video camera (1) collects, the shear direction of image in the y-direction.
7. according to the measuring method of the optics acoplanarity displacement field measurement device based on speckle-shearing interferometry claimed in claim 5, it is characterized in that, in described step 1, step 2 or the step 3, the method that switches to respectively x direction and two shear directions of y direction is: open the first switch (11), close second switch (12), then rotate the first catoptron (5), make in the image that video camera (1) collects, the shear direction of image in the y-direction; Close the first switch (11), open second switch (12), then rotate the second catoptron (6), make in the image that video camera (1) collects, the shear direction of image in the x-direction.
8. according to the measuring method of the optics acoplanarity displacement field measurement device based on speckle-shearing interferometry claimed in claim 5, it is characterized in that, in described step 2 and the step 3, utilize voltage controller (9) to produce phase shift, and the method that gathers phase shift figure is: install and the working voltage control program at computing machine (10), utilize the output voltage of Control of Voltage routine change voltage controller (9), thereby change the thickness of piezoelectric ceramics device (8), make the 3rd catoptron (7) that acoplanarity displacement occur, light path through the light of the 3rd catoptron (7) reflection changes, thereby realization phase shift, and utilize video camera (1) to gather phase shift figure, phase shift figure is stored in the computing machine (10) that links to each other with video camera (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210360788.8A CN102878935B (en) | 2012-09-25 | 2012-09-25 | Device and method for measuring optical off-plane displacement field based on shearing speckle interference |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210360788.8A CN102878935B (en) | 2012-09-25 | 2012-09-25 | Device and method for measuring optical off-plane displacement field based on shearing speckle interference |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102878935A true CN102878935A (en) | 2013-01-16 |
| CN102878935B CN102878935B (en) | 2014-12-10 |
Family
ID=47480358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210360788.8A Expired - Fee Related CN102878935B (en) | 2012-09-25 | 2012-09-25 | Device and method for measuring optical off-plane displacement field based on shearing speckle interference |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102878935B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016029720A1 (en) * | 2014-08-28 | 2016-03-03 | 深圳奥比中光科技有限公司 | Overall z-direction displacement measuring system |
| CN105758719A (en) * | 2016-04-26 | 2016-07-13 | 河海大学 | Homogeneous strain optical measurement device based on double-mirror reflection and method |
| CN106596277A (en) * | 2016-11-28 | 2017-04-26 | 上海大学 | Mechanical testing device and method of high-throughout membrane material |
| CN109357615A (en) * | 2018-09-27 | 2019-02-19 | 北京信息科技大学 | The composite device of speckle interference and speckle-shearing interferometry |
| CN110132846A (en) * | 2019-06-27 | 2019-08-16 | 合肥工业大学 | Multi-direction speckle-shearing interferometry system and measurement method based on Mach once moral optical path |
| CN114018177A (en) * | 2021-11-18 | 2022-02-08 | 南昌航空大学 | Mirror surface object three-dimensional measurement method based on speckle pattern |
| CN114235023A (en) * | 2021-11-18 | 2022-03-25 | 北京卫星制造厂有限公司 | Phase shifter on-line calibration method and device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030035113A1 (en) * | 2001-08-14 | 2003-02-20 | Jianmin Wang | Quadrature phase shift interferometer with unwrapping of phase |
| WO2003067182A1 (en) * | 2002-02-07 | 2003-08-14 | Nikon Corporation | Shearing interference measuring method and shearing interferometer, production method of projection optical system, projection optical system, and projection exposure system |
| CN2814330Y (en) * | 2005-04-08 | 2006-09-06 | 中国船舶重工集团公司第七一一研究所 | Shear speckle interferometer |
| CN102506716A (en) * | 2011-10-24 | 2012-06-20 | 河南科技大学 | Laser speckle measuring device and method for measuring in-plane displacement and out-of-plane displacement simultaneously |
-
2012
- 2012-09-25 CN CN201210360788.8A patent/CN102878935B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030035113A1 (en) * | 2001-08-14 | 2003-02-20 | Jianmin Wang | Quadrature phase shift interferometer with unwrapping of phase |
| WO2003067182A1 (en) * | 2002-02-07 | 2003-08-14 | Nikon Corporation | Shearing interference measuring method and shearing interferometer, production method of projection optical system, projection optical system, and projection exposure system |
| CN2814330Y (en) * | 2005-04-08 | 2006-09-06 | 中国船舶重工集团公司第七一一研究所 | Shear speckle interferometer |
| CN102506716A (en) * | 2011-10-24 | 2012-06-20 | 河南科技大学 | Laser speckle measuring device and method for measuring in-plane displacement and out-of-plane displacement simultaneously |
Non-Patent Citations (2)
| Title |
|---|
| M.H. MAJLES ARA等: "Speckle interferometry methods for displacement and strain measurements using photorefractive crystal", 《OPTIK - INTERNATIONAL JOURNAL FOR LIGHT AND ELECTRON OPTICS》 * |
| 米红林等: "基于电子剪切散斑法的塑封材料的无损检测", 《包装工程》 * |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016029720A1 (en) * | 2014-08-28 | 2016-03-03 | 深圳奥比中光科技有限公司 | Overall z-direction displacement measuring system |
| US10234264B2 (en) | 2014-08-28 | 2019-03-19 | Shenzhen Orbbec Co., Ltd. | Overall Z-direction displacement measuring system |
| CN105758719A (en) * | 2016-04-26 | 2016-07-13 | 河海大学 | Homogeneous strain optical measurement device based on double-mirror reflection and method |
| CN105758719B (en) * | 2016-04-26 | 2018-03-16 | 河海大学 | A kind of homogeneous strain optical measuring device and method based on bimirror reflection |
| CN106596277A (en) * | 2016-11-28 | 2017-04-26 | 上海大学 | Mechanical testing device and method of high-throughout membrane material |
| CN106596277B (en) * | 2016-11-28 | 2020-06-30 | 上海大学 | High-flux membrane material mechanical testing device and method |
| CN109357615A (en) * | 2018-09-27 | 2019-02-19 | 北京信息科技大学 | The composite device of speckle interference and speckle-shearing interferometry |
| CN110132846A (en) * | 2019-06-27 | 2019-08-16 | 合肥工业大学 | Multi-direction speckle-shearing interferometry system and measurement method based on Mach once moral optical path |
| CN114018177A (en) * | 2021-11-18 | 2022-02-08 | 南昌航空大学 | Mirror surface object three-dimensional measurement method based on speckle pattern |
| CN114235023A (en) * | 2021-11-18 | 2022-03-25 | 北京卫星制造厂有限公司 | Phase shifter on-line calibration method and device |
| CN114018177B (en) * | 2021-11-18 | 2023-12-26 | 南昌航空大学 | Three-dimensional measurement method for mirror surface object based on speckle pattern |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102878935B (en) | 2014-12-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102878935B (en) | Device and method for measuring optical off-plane displacement field based on shearing speckle interference | |
| US10145785B2 (en) | Optical element rotation type Mueller-matrix ellipsometer and method for measuring Mueller-matrix of sample using the same | |
| CN101545760A (en) | Optical transmission spherical surface detector | |
| CN105339778A (en) | Method for measuring refractive index, refractive index measuring device, and method for producing optical element | |
| CN102261985A (en) | Optical system wave aberration calibration apparatus and calibration method of using apparatus to test error | |
| CN102425998A (en) | Full parameter detection apparatus of polished surface quality of optical element and detection method thereof | |
| JP5698863B2 (en) | Method and apparatus for measuring refractive index | |
| CN101169601A (en) | Focusing leveling measuring system | |
| CN104215176A (en) | High accuracy optical interval measurement device and method | |
| CN104330039A (en) | High-numerical-aperture optical fiber point diffraction interference device used for three-coordinate measurement and method thereof | |
| CN103322933A (en) | Non-contact type optical mirror surface interval measuring device | |
| US10989524B2 (en) | Asymmetric optical interference measurement method and apparatus | |
| CN105043242B (en) | A kind of contrast anti-interference ladder planar reflector laser interference instrument and scaling method and measuring method | |
| CN103674220B (en) | Vibration measuring system | |
| CN103267478B (en) | High-precision position detection device and method | |
| US20150077759A1 (en) | Compact, Slope Sensitive Optical Probe | |
| CN102519611A (en) | Light path sharing axial shear digital wave surface interferometer | |
| CN209559128U (en) | Nanometer resolution displacement measuring device based on optical wedge interference | |
| CN106908004B (en) | A kind of distance measurement system and its application based on vectorial field | |
| CN203286992U (en) | Detection device for verticality of laser beam | |
| CN109579708A (en) | Nanometer resolution displacement measuring device based on optical wedge interference | |
| CN101881607A (en) | Planar error detection system | |
| CN204757922U (en) | Comparison type anti -interference fine motion cascading ladder corner reflection mirror laser interferometer | |
| CN204807041U (en) | Novel absolute distancer of many light sources multi -wavelength laser Interferometer | |
| JP5704150B2 (en) | White interference device and position and displacement measuring method of white interference device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C53 | Correction of patent of invention or patent application | ||
| CB02 | Change of applicant information |
Address after: Center branch No. 3 ancient Tan Avenue in Gaochun County of Nanjing City, Jiangsu province 211300 Room 405 Applicant after: Southeast University Address before: 210096 Jiangsu city Nanjing Province four pailou No. 2 Applicant before: Southeast University |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141210 Termination date: 20170925 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |