CN106596277A - Mechanical testing device and method of high-throughout membrane material - Google Patents

Abstract

The invention relates to a high-flux membrane material mechanical testing device and method. The device includes an electronic speckle interference off-plane displacement measurement system, a sealed cabin, an air pressure pump and a high-sensitivity air pressure sensor. The high-throughput membrane material test sample is installed at the opening of the sealed cabin to form a completely sealed airtight cabin. The air pressure pump is used to control the air pressure P in the cabin, and the real-time pressure in the cabin is recorded and fed back by a high-sensitivity air pressure sensor; during the test, the electronic speckle interference out-of-plane displacement measurement system and the sealed cabin are fixed on the optical isolation table, and Let the surface of the sample on the sealed cabin be within the field of view of the electronic speckle interference off-plane displacement measurement system. According to the functional relationship between the uniform pressure, the displacement of the membrane center point from the plane and other mechanical parameters, the method can respectively deduce the mechanical parameters such as the elastic modulus of multiple film materials, so as to achieve multiple mechanical experiments through one mechanical experiment. The purpose of the mechanical parameters of a thin film material.

Description

High-throughput membrane material mechanical testing device and method

technical field

The invention relates to a high-throughput membrane material mechanical testing device and method, belonging to the field of optical mechanical testing.

Background technique

On June 24, 2011, U.S. President Barack Obama announced the launch of an "Advanced Manufacturing Partnership" (Advanced Manufacturing Partnership, AMP) program worth more than 500 million U.S. dollars, calling on the U.S. government, universities and companies to strengthen cooperation to Strengthen the leading position of the US manufacturing industry, and the "Materials Genome Initiative (MGI)" is an important part of the AMP plan. In recent years, high-throughput material preparation and characterization platform technology at home and abroad has achieved rapid development, and has been proven to effectively accelerate the development and application of materials. Therefore, it is listed as one of the three major technical elements of the Materials Genome Project. While vigorously developing high-throughput material preparation technology, high-throughput testing technology is required to match it. High-throughput experimental tools are also another important technical element in the Materials Genome Project. At present, the commonly used high-throughput experimental tools all have the disadvantage of low test efficiency. It is urgent to explore a new high-throughput test technology that takes into account both efficiency and test accuracy, so as to effectively promote the implementation of the Materials Genome Project.

Optical interferometry is a typical photomechanical method, such as speckle interferometry, moiré interferometry and shear speckle interferometry, and has become an important method for deformation field measurement. They are based on the principle of optical interference, have high sensitivity, and can measure the displacement and displacement derivative of the surface of the object under force. At the same time, because it has the characteristics of full-field measurement, simple optical path, convenient adjustment, and low environmental requirements, it is widely used in various precision measurements. Among them, the speckle interference out-of-plane displacement measurement system can accurately measure the out-of-plane deformation of the measured object, and the measurement accuracy reaches nanometer level. The introduction of the phase shift method improves the measurement accuracy and the signal-to-noise ratio of the results, and the speckle interference out-of-plane displacement measurement technology based on real-time phase shift technology can measure the out-of-plane deformation of the measured object in real time, with high measurement efficiency and good accuracy Etc.

Contents of the invention

The purpose of the present invention is to propose a new high-throughput mechanical characterization experimental method-high-throughput membrane material mechanical testing device and method for the deficiencies of the prior art. The invention can be used to characterize the mechanical properties of various membrane materials under physical (temperature) and chemical (corrosion) conditions, and can also be used to characterize the fatigue mechanical properties of various membrane materials. The concrete technical invention scheme that adopts is as follows:

A high-throughput membrane material mechanical testing device, including an electronic speckle interference off-plane displacement measurement system, a sealed cabin, an air pressure pump and a high-sensitivity air pressure sensor, is characterized in that: the high-throughput membrane material test sample is installed in the sealed cabin At the opening of the body, a completely sealed airtight cabin is formed. The air pressure pump is used to control the air pressure in the cabin, and the real-time pressure in the cabin is recorded and fed back through a high-sensitivity air pressure sensor; during the test, the electronic speckle interference out-of-plane displacement measurement system and The sealed cabin is fixed on the optical shock isolation table, and the surface of the sample on the sealed cabin is located within the field of view of the electronic speckle interference out-of-plane displacement measurement system.

The electronic speckle interference out-of-plane displacement measurement system includes a computer, a CCD area array camera, piezoelectric ceramics, a reference surface, a beam splitter, a mirror, and a laser; the laser light emitted by the laser enters the semi-reflective and semi-transparent beam splitter through the mirror The CCD camera acquires the speckle interference image of the measured object—the surface of the sample, and after inputting the digital image to the computer, it can realize automatic real-time measurement of in-plane displacement and out-of-plane displacement.

The sealed cabin is a cabin with an opening on one side, and the opening is used to install a high-flux membrane material substrate—sample, and the substrate and the cabin together form a completely sealed sealed cabin.

The air pressure pump accurately controls the pressure value in the sealed cabin through inflation, so that various membrane material samples bear the same uniform pressure, and the air pressure value in the sealed cabin is accurately measured and recorded in real time by a high-sensitivity air pressure sensor inside the sealed cabin.

A high-throughput membrane material mechanics testing method, which is operated according to the above-mentioned high-throughput membrane material mechanics testing device, is characterized in that the operation steps are as follows:

1) Preparation of test samples of high-flux membrane materials;

2) Install the high-flux membrane material test sample at the opening of the sealed cabin;

3) Install the speckle interference out-of-plane displacement measurement system, and debug the measurement optical path;

4) Control the pressure in the sealed cabin;

5) Record the pressure in the sealed cabin and the phase fringe diagram of the thin film sample during the high-flux membrane material test;

6) Obtain the mechanical parameters of various thin film material samples;

The step 1) is to first prepare test samples of high-flux membrane materials: the membrane materials of various materials are installed on a substrate at the same time in the form of an array using the same process flow, and each membrane material is fixed on the periphery. Constraints, there is no interconnection between the membranes, and there is no mutual interference between them, and the thin film samples are distributed on the substrate in the form of a matrix.

The step 2) is to install the substrate of the high-flux membrane material sample prepared above at the opening of a sealed cabin with one side open to form a completely sealed closed cabin.

The step 3) is to fix the speckle interference out-of-plane displacement measurement system with real-time phase shift technology on the optical vibration isolation table, and then fix the above-mentioned sealed cabin on the optical vibration isolation table, and let the sealed cabin body The surface of the sample is located within the field of view of the electronic speckle interference out-of-plane displacement measurement system; the electronic speckle interference out-of-plane displacement measurement system has a real-time phase shift function, which can simultaneously measure the out-of-plane displacement of the surface of multiple membrane material samples.

The step 4) is that the pressure in the sealed cabin can be precisely controlled by the air pump, so that various membrane material samples bear the same uniform pressure, and the high-sensitivity air pressure sensor inside the cabin accurately displays and records the air pressure value in the cabin in real time .

The step 5) is a high-sensitivity air pressure sensor and an electronic speckle interference out-of-plane displacement measurement system to simultaneously record the uniform pressure on various membrane material samples and the corresponding out-of-plane deformation interference phase fringes of multiple circular film samples picture.

The step 6) is to use the electronic speckle interference post-processing software to perform automatic filtering, dephasing and phase extraction operations on the out-of-plane deformation phase maps of multiple films obtained in step 5), to obtain the out-of-plane displacement of the center point of each film ; The mechanical model of the high-flux membrane material is a circular membrane structure fixed around the periphery, and the corresponding relationship between its mechanical parameters and geometric dimensions is as follows:

Among them is the elastic modulus of the membrane material, is the Poisson's ratio, is the radius of the membrane material, and is the thickness, which indicates the pressure inside the sealed cabin, that is, the same uniform pressure that various membrane materials bear, representing that each membrane material is in The out-of-plane displacement of the corresponding center point under the action of uniform pressure; according to the functional relationship between the uniform pressure, the out-of-plane displacement of the membrane center point and other mechanical parameters, the elastic modulus and other mechanical properties of multiple film materials can be deduced respectively. parameters, so as to achieve the purpose of obtaining the mechanical parameters of various thin film materials through one mechanical experiment.

Description of drawings

Fig. 1 is a program block diagram of the optical measurement method of the present invention.

Fig. 2 is a schematic diagram of the optical path of the high-throughput membrane material mechanical testing technology of the present invention.

Fig. 3 is a simplified mechanical model of the high-flux membrane material of the present invention—discussing the out-of-plane deformation of a series of peripheral fixed-branched membranes under uniform pressure.

Fig. 4 is a schematic diagram of the high-throughput membrane material test sample in the embodiment, and a total of 10 × 10 arrays of circular membrane samples were prepared.

Fig. 5 is a phase fringe diagram representing the out-of-plane displacement of a high-throughput membrane material sample under a certain uniform pressure obtained by using the electronic speckle interference out-of-plane displacement measurement system with real-time phase shift technology.

Fig. 6 is a curve diagram of the uniform pressure and the displacement of the center point of the circular membrane from the plane of the high-flux membrane material.

detailed description

Preferred examples of the present invention are described in detail as follows in conjunction with accompanying drawings:

Embodiment one:

Referring to Fig. 2 and Fig. 3, the high-throughput membrane material mechanical testing device includes an electronic speckle interference off-plane displacement measurement system, a sealed cabin, an air pressure pump and a high-sensitivity air pressure sensor, and is characterized in that: high-throughput membrane material test The sample is installed at the opening of the sealed cabin to form a completely sealed airtight cabin. The air pressure pump is used to control the air pressure in the cabin, and the real-time pressure in the cabin is recorded and fed back by a high-sensitivity air pressure sensor; the electronic speckle interference is used during the test The out-of-plane displacement measurement system and the sealed cabin are fixed on the optical vibration isolation table, and the surface of the sample on the sealed cabin is located within the field of view of the electronic speckle interference out-of-plane displacement measurement system.

Embodiment two:

The electronic speckle interference out-of-plane displacement measurement system includes a computer, a CCD area array camera, piezoelectric ceramics, a reference surface, a beam splitter, a mirror, and a laser; the laser light emitted by the laser enters the semi-reflective and semi-transparent beam splitter through the mirror The CCD camera acquires the speckle interference image of the measured object—the surface of the sample, and after inputting the digital image to the computer, it can realize automatic real-time measurement of in-plane displacement and out-of-plane displacement.

The sealed cabin is a cabin with an opening on one side, and the opening is used to install a high-flux membrane material substrate—sample, and the substrate and the cabin together form a completely sealed sealed cabin.

The air pressure pump accurately controls the pressure value in the sealed cabin through inflation, so that various membrane material samples bear the same uniform pressure, and the air pressure value in the sealed cabin is accurately measured and recorded in real time by a high-sensitivity air pressure sensor inside the sealed cabin.

Embodiment three:

Figure 2 shows a schematic diagram of the optical path of the high-throughput membrane material mechanical testing technology. The thin film materials of various materials in the sample are fixed on the test substrate in the form of a matrix, and each thin film is in a peripheral fixed state. Figure 3 is a simplified mechanical model of the membrane material—the diameter is , the thickness is , and the out-of-plane deformation of a circular membrane fixed around it under uniform pressure.

The detailed test process of this example is:

1) To prepare test samples of high-flux membrane materials, the membrane materials of various materials are installed on the substrate in the form of a 10×10 array at the same time using the same process flow, and each membrane material is in a state of fixed support around the periphery. There is no interference between membranes. The sample is composed of two steel plates with the same array of circular holes and a series of circular film materials of various materials. The size of the steel plate is 85mm × 85mm, and the diameter of the circular holes on the steel plate is 5 mm, which is slightly smaller than that of the high-throughput Round membrane material. Firstly, place all kinds of thin film materials regularly at the circular holes in the array on a steel plate. The round thin film and the round holes on the steel plate are as concentric as possible, and then covered with another steel plate and pressed tightly, so that the above-mentioned various membrane materials are all in the peripheral solid. The state of support constraints, the schematic diagram is shown in Figure 4.

2) Install the substrate of the above-mentioned high-flux membrane material at the opening of a sealed cabin with one side open to form a completely sealed sealed cabin. The schematic diagram is shown on the right side of Figure 2.

3) The air pressure in the sealed cabin is precisely controlled by the air pump, and the air pump is used to inflate the samples of various membrane materials to bear the same uniform pressure. A high-sensitivity air pressure sensor is installed in the sealed cabin, which can accurately display and record the pressure value in the cabin in real time.

4) Fix the electronic speckle interference out-of-plane displacement measurement system with real-time phase shift technology and the above-mentioned sealed cabin on the optical vibration isolation table, and the sample surface of the sealed cabin is used as the measured area. Using the electronic speckle interference out-of-plane displacement measurement system, the out-of-plane displacement of multiple membrane material sample surfaces can be measured simultaneously.

5) Before charging, collect a speckle interference image of the measured area as a reference image. Then inflate the array film material with uniform pressure through the air pump. At this moment, the phase fringe diagram representing the out-of-plane displacement of the measured area is collected in real time, and the air pressure value in the sealed cabin is simultaneously recorded. The out-of-plane displacement phase fringe diagram of the array thin film material sample is shown in Fig. 5 .

6) Automated filtering, unwrapping and phase extraction processing of the phase fringe image in Figure 5 by software, and the out-of-plane displacement of each circular film due to the uniform pressure can be obtained, focusing on the out-of-plane displacement value of the center point of the film .

7) According to the above synchronously recorded relationship between the uniform pressure and the out-of-plane displacement of the center point of the film, draw the curve of the uniform pressure and the cube of the out-of-plane displacement of the center point, as shown in Figure 6. From the mechanical model of the peripheral fixed-supported membrane disk under the action of uniform pressure shown in Figure 3, and through the corresponding relationship between mechanical parameters and geometric dimensions, parameters such as the elastic modulus of each membrane material can be obtained.

8) This high-throughput membrane material mechanical testing technology can also be used to characterize the mechanical properties of various membrane materials under physical (temperature) and chemical (corrosion) conditions; it can also be used to characterize the fatigue mechanical properties of various membrane materials.

Claims (11)

1. a kind of high flux membrane Material mechanics test device, including ESPI off-surface displacement measurement system, sealing cabin （5）, pulsometer（6）With high sensitivity baroceptor（11）, it is characterised in that：High flux membrane testing of materials sample（9）Install In sealing cabin（5）Opening at, form the closed nacelle that fully seals, pulsometer（6）For the air pressure P in control cabinet body, By high sensitivity baroceptor（11）Record and feed back the real-time pressure in nacelle；By ESPI from face during test Displacement measurement system and sealing cabin（5）It is fixed on optics Isolating Platform, and allows sealing cabin（5）On sample（9）Surface position In the field range of ESPI off-surface displacement measurement system.

2. high flux membrane Material mechanics test device according to claim 1, it is characterised in that：The ESPI Off-surface displacement measurement system includes computer（1）, CCD area array cameras（2）, piezoelectric ceramics（3）, the plane of reference（4）, spectroscope （10）, reflecting mirror（7）, laser instrument（8）；Laser instrument（8）The reflected mirror of laser for sending（7）Into the spectroscope of half-reflection and half-transmission （10）, CCD camera（2）Obtain testee --- sample（9）Digital picture is input to calculating by the speckle interference image on surface Machine（1）Afterwards, the in-plane displacement and acoplanarity displacement for being capable of achieving automatization is measured in real time.

3. high flux membrane Material mechanics test device according to claim 1, it is characterised in that：The sealing cabin（5） It is an openings at one side nacelle, to install high flux membrane material substrate at opening --- sample（9）, the substrate is common with nacelle Form a sealing cabin for fully sealing（5）.

4. high flux membrane Material mechanics test device according to claim 1, it is characterised in that：The pulsometer（6）It is logical Gas overcharging precise control sealing cabin（5）Interior pressure value P so that various membrane material samples（9）Identical well-distributed pressure is born, Sealing cabin（5）It is internal to pass through high sensitivity baroceptor（11）Atmospheric pressure value P in real―time precision measurment and record cabin.

5. a kind of high flux membrane Material mechanics test method, is surveyed using the high flux membrane mechanics of materials according to claim 1 Trial assembly is put and is operated, it is characterised in that operating procedure is as follows：

1）Prepare the test sample of high flux membrane material（9）；

2）By high flux membrane testing of materials sample（9）Installed in sealing cabin（5）At opening；

3）Speckle interference off-surface displacement measurement system is installed, optical path is debugged；

4）Control sealing cabin（5）Interior pressure；

5）Sealing cabin during record high flux membrane testing of materials（5）Interior pressure P and film sample（9）Position phase bar graph；

6）Obtain various thin-film material samples（9）Mechanics parameter.

6. high flux membrane Material mechanics test method according to claim 5, it is characterised in that：The step 1）It is first Prepare the test sample of high flux membrane material（9）：The thin-film material of various material is adopted identical technological process, with array shape Formula is arranged on one piece of substrate simultaneously, and each membrane material is constrained all in periphery fixed, and between film and film, nothing is interconnected, they Between do not produce and interfere, film sample（9）It is distributed on substrate with a matrix type.

7. high flux membrane Material mechanics test method according to claim 5, it is characterised in that：The step 2）Being will be upper State the high flux membrane material sample of preparation（9）Substrate be arranged on one side opening sealing cabin（5）Opening at, formed one The closed nacelle for fully sealing（5）.

8. high flux membrane Material mechanics test method according to claim 5, it is characterised in that：The step 3）First will be Speckle interference off-surface displacement measurement system with real-time phase-shifting technique is fixed in optics vibration isolation table, then again by above-mentioned sealing Nacelle（5）It is fixed in optics vibration isolation table, and allows sealing cabin（5）Sample（9）Surface is located at ESPI from face position In the field range of shift measurement system；ESPI off-surface displacement measurement system has real-time phase shift function, can survey simultaneously Measure multiple membrane material samples（9）The acoplanarity displacement on surface.

9. high flux membrane Material mechanics test method according to claim 5, it is characterised in that：The step 4）It is sealing Nacelle（5）Interior pressure P can pass through inflator pump（6）Precise control so that various membrane material samples（9）Bear identical uniform Pressure, passes through high sensitivity baroceptor inside nacelle（11）It is accurate in real time to show and record the atmospheric pressure value P in cabin.

10. high flux membrane Material mechanics test method according to claim 5, it is characterised in that：The step 5）It is high Sensitivity baroceptor and ESPI off-surface displacement measurement system synchronization record various membrane material samples（9）Bear Well-distributed pressure and corresponding multiple circular membrane samples（9）Surface deformation interfere position phase bar graph.

11. high flux membrane Material mechanics test methods according to claim 5, it is characterised in that：The step 6）It is logical ESPI the poster processing soft is crossed to step 5）The surface deformation position phasor of multiple thin film of middle acquisition carries out automatization's filter Ripple, solution phase place and phase extraction operation, obtain the acoplanarity displacement of each thin film center point；High flux membrane material（9）Mechanical model For the circular membrane structure of a periphery fixed, between its mechanics parameter and physical dimension, corresponding relation is as follows：

Wherein it is thin-film material（9）Elastic modelling quantity, be Poisson's ratio, be the radius of membrane material, be thickness, represent sealing cabin （5）Internal pressure, namely the same well-distributed pressure that various membrane materials bear, represent every kind of membrane material under well-distributed pressure effect The acoplanarity displacement of corresponding central point；According to the function between well-distributed pressure, center membrane point acoplanarity displacement and other mechanics parameters Relation, can derive multiple thin-film materials respectively（9）The mechanics parameters such as respective elastic modelling quantity, so as to realize by a mechanics Experiment, obtains the purpose of various thin film material mechanics parameters.