CN106596277A - Mechanical testing device and method of high-throughout membrane material - Google Patents
Mechanical testing device and method of high-throughout membrane material Download PDFInfo
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- CN106596277A CN106596277A CN201611058590.9A CN201611058590A CN106596277A CN 106596277 A CN106596277 A CN 106596277A CN 201611058590 A CN201611058590 A CN 201611058590A CN 106596277 A CN106596277 A CN 106596277A
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- 239000000463 material Substances 0.000 title claims abstract description 101
- 239000012528 membrane Substances 0.000 title claims abstract description 87
- 238000012360 testing method Methods 0.000 title claims abstract description 28
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000006073 displacement reaction Methods 0.000 claims abstract description 52
- 239000010409 thin film Substances 0.000 claims abstract description 20
- 238000002955 isolation Methods 0.000 claims abstract description 6
- 230000003287 optical effect Effects 0.000 claims abstract description 6
- 238000002474 experimental method Methods 0.000 claims abstract description 4
- 230000004907 flux Effects 0.000 claims description 52
- 238000007789 sealing Methods 0.000 claims description 51
- 238000005259 measurement Methods 0.000 claims description 34
- 239000010408 film Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 15
- 230000035945 sensitivity Effects 0.000 claims description 14
- 238000010998 test method Methods 0.000 claims description 8
- 238000004154 testing of material Methods 0.000 claims description 8
- 230000000694 effects Effects 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 claims description 3
- 238000011017 operating method Methods 0.000 claims description 2
- 230000010363 phase shift Effects 0.000 claims description 2
- 238000012545 processing Methods 0.000 claims description 2
- 238000005305 interferometry Methods 0.000 abstract 3
- 238000004441 surface measurement Methods 0.000 abstract 3
- 238000005070 sampling Methods 0.000 abstract 2
- 238000005516 engineering process Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
- G01N3/10—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces generated by pneumatic or hydraulic pressure
- G01N3/12—Pressure testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/02—Details
- G01N3/06—Special adaptations of indicating or recording means
- G01N3/068—Special adaptations of indicating or recording means with optical indicating or recording means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0014—Type of force applied
- G01N2203/0016—Tensile or compressive
- G01N2203/0019—Compressive
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/003—Generation of the force
- G01N2203/0042—Pneumatic or hydraulic means
- G01N2203/0044—Pneumatic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/0641—Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
- G01N2203/0647—Image analysis
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- General Health & Medical Sciences (AREA)
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- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
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Abstract
The invention relates to a mechanical testing device and method of a high-throughout membrane material. The device comprises an electronic speckle pattern interferometry off-surface measurement system, a sealed cabin, a pneumatic pump, and a high-sensitivity baroceptor, wherein a high-throughout membrane material sampling is installed at the opening position of the sealed cabin so that a completely airtight sealed cabin is formed, the pneumatic pump is used for controlling air pressure P in the cabin, and recording and giving feedbacks on real-time pressure in the cabinet through the high-sensitivity baroceptor; when an experiments undergoes, the electronic speckle pattern interferometry off-surface measurement system and the sealed cabin are fixed on an optical vibration isolation table, and the surface of the sampling in the sealed cabin is located in field of view of the electronic speckle pattern interferometry off-surface measurement system. According to the mechanical testing device and method of the high-throughout membrane material, a function relationship among uniform pressure, membrane central point off-plane displacement, and other mechanical parameters is adopted, so that each mechanical parameter such as elasticity modulus of multiple thin-film materials is induced respectively, and thus the purpose that multiple kinds of the mechanical parameters of the thin-film materials can be obtained at mere one test is achieved.
Description
Technical field
The present invention relates to a kind of high flux membrane Material mechanics test device and method, belongs to photodynamics detection field.
Background technology
On June 24th, 2011, US President Barack Obama are announced to start " an advanced manufacturing industry for overbalancing 500,000,000 dollars
Fellowship "（Advanced Manufacturing Partnership, AMP）Plan, appeals U.S. government, colleges and universities and enterprise
Between should strengthen cooperation, to strengthen US Manufacturing Industry leading position, and " material genome plan "（Materials Genome
Initiative, MGI）It is the calculated important component parts of AMP.In the last few years, domestic and international high flux material was prepared and was characterized
Platform technology achieves very fast development, and be proved to can effectively accelerated material research and development application process, therefore be listed in material
One of three big technology essential factors of genome plan.While high flux material preparation technology is greatly developed, need high-throughout
Measuring technology is matching, and high flux experimental tool is also another important technical key element in material genome plan.At present
Conventional high flux experimental tool all haves the shortcomings that testing efficiency is low, and this is just badly in need of exploring a kind of new high flux test skill
Art, while efficiency and measuring accuracy are taken into account, so as to effectively facilitate the enforcement of material genome plan.
Optical interference techniques are a kind of typical optical measurement mechanics method, for example, speckle interference, moire interference and cutting speckle
The technologies such as interference, it has also become the important method of deformation field measurement.Their principles based on optical interference, with very high sensitive
Degree, can measure displacement and the displacement derivatives of stress body surface.Simultaneously because it has, measurement of full field, light path are simple, adjust
Conveniently, to the low feature of environmental requirement, therefore it is widely used in all kinds of accurate measurements.Wherein speckle interference off-surface displacement measurement
System can accurately measure the surface deformation of testee, and certainty of measurement reaches nanoscale.The introducing of phase shift method improves measurement essence
The signal to noise ratio of degree and result, and can measure tested in real time based on the speckle interference off-surface displacement measurement technology of real-time phase-shifting technique
The surface deformation situation of object, has the advantages that measurement efficiency height, precision are good.
The content of the invention
Present invention aims to the deficiency of prior art, proposes a kind of new high flux mechanics characterization experiment side
Method --- high flux membrane Material mechanics test device and method.The invention can be used in physics（Temperature）, chemistry（Corrosion）Bar
Sign under part to multiple film material mechanical performance, it may also be used for the sign to multiple film fatigue of materials mechanical property.Using
Particular technique scheme of the invention is as follows：
A kind of high flux membrane Material mechanics test device, including ESPI off-surface displacement measurement system, sealing cabin, gas
Press pump and high sensitivity baroceptor, it is characterised in that：High flux membrane testing of materials sample is arranged on the opening of sealing cabin
Place, forms the closed nacelle for fully sealing, and pulsometer is used for the air pressure in control cabinet body, is remembered by high sensitivity baroceptor
Record and feed back the real-time pressure in nacelle；ESPI off-surface displacement measurement system and sealing cabin are fixed on during test
On optics Isolating Platform, and the specimen surface allowed on sealing cabin is located at the visual field model of ESPI off-surface displacement measurement system
In enclosing.
The ESPI off-surface displacement measurement system includes computer, CCD area array cameras, piezoelectric ceramics, reference
Face, spectroscope, reflecting mirror, laser instrument；The reflected mirror of laser that laser instrument sends enters the spectroscope of half-reflection and half-transmission, CCD camera
Testee --- the speckle interference image of specimen surface is obtained, digital picture is input to after computer, be capable of achieving automatization
In-plane displacement and acoplanarity displacement measure in real time.
The sealing cabin is an openings at one side nacelle, to install high flux membrane material substrate at opening --- examination
Sample, the substrate are collectively forming a sealing cabin for fully sealing with nacelle.
The pulsometer is by inflating the pressure value in precise control sealing cabin so that various membrane material samples bear phase
Same well-distributed pressure, by the air pressure in high sensitivity baroceptor real―time precision measurment and record cabin inside sealing cabin
Value.
A kind of high flux membrane Material mechanics test method, adopts to be entered according to above-mentioned high flux membrane Material mechanics test device
Row operation, it is characterised in that operating procedure is as follows：
1）Prepare the test sample of high flux membrane material；
2）High flux membrane testing of materials sample is arranged at sealing cabin opening；
3）Speckle interference off-surface displacement measurement system is installed, optical path is debugged；
4）Pressure in control sealing cabin；
5）Pressure and film sample position phase bar graph during record high flux membrane testing of materials in sealing cabin；
6）Obtain the mechanics parameter of various thin-film material samples；
The step 1）It is the test sample for preparing high flux membrane material first：The thin-film material of various material is adopted identical
Technological process, is simultaneously arranged on one piece of substrate in the form of an array, and each membrane material is constrained all in periphery fixed, film and film it
Between without being interconnected, do not produce between them and interfere, film sample is distributed on substrate with a matrix type.
The step 2）It is the sealed compartment that the substrate of the high flux membrane material sample of above-mentioned preparation is arranged on one side opening
At the opening of body, a closed nacelle for fully sealing is formed.
The step 3）It is that the speckle interference off-surface displacement measurement system with real-time phase-shifting technique is fixed on into optics first
In vibration isolation table, then again above-mentioned sealing cabin is fixed in optics vibration isolation table, and allows the specimen surface of sealing cabin to be located at electricity
In the field range of sub- speckle interference off-surface displacement measurement system；ESPI off-surface displacement measurement system has real-time phase
Shifting function, can measure the acoplanarity displacement of multiple membrane material specimen surfaces simultaneously.
The step 4）It is that pressure in sealing cabin can pass through inflator pump precise control so that various membrane material samples
Identical well-distributed pressure is born, is accurately shown by high sensitivity baroceptor in real time inside nacelle and is recorded the air pressure in cabin
Value.
The step 5）It is high sensitivity baroceptor and ESPI off-surface displacement measurement system synchronization record
The well-distributed pressure and the surface deformation of corresponding multiple circular membrane samples that various membrane material samples bear interferes position phase bar graph.
The step 6）It is to step 5 by ESPI the poster processing soft）Multiple thin film of middle acquisition from face
Deforming position phasor carries out automatization's filtering, solution phase place and phase extraction operation, obtains the acoplanarity displacement of each thin film center point；High pass
The mechanical model of amount membrane material is the circular membrane structure of a periphery fixed, and between its mechanics parameter and physical dimension, correspondence is closed
System is as follows：
It is wherein the elastic modelling quantity of thin-film material, is Poisson's ratio, is the radius of membrane material, be thickness, represents inside sealing cabin
Pressure, namely the same well-distributed pressure that various membrane materials bear represents every kind of membrane material corresponding under well-distributed pressure effect
The acoplanarity displacement of central point；According to the functional relationship between well-distributed pressure, center membrane point acoplanarity displacement and other mechanics parameters, can
The mechanics parameters such as the respective elastic modelling quantity of multiple thin-film materials are derived respectively, so as to realize, by an Experiments of Machanics, obtaining
The purpose of various thin film material mechanics parameters.
Description of the drawings
Fig. 1 is the measuring method flow chart of the present invention.
Fig. 2 is the light path schematic diagram of high flux membrane Material mechanics test technology of the present invention.
Fig. 3 is the mechanical simplified model of high flux membrane material of the present invention --- discuss a series of periphery fixed thin film uniform
Surface deformation under pressure effect.
Fig. 4 is the schematic diagram of the high flux membrane testing of materials sample in embodiment, prepares the circle of 10 × 10 arrays altogether
Film sample.
Fig. 5 is the high flux membrane obtained with the ESPI off-surface displacement measurement system with real-time phase-shifting technique
Material sample represents the position phase bar graph of acoplanarity displacement under the effect of a certain well-distributed pressure.
Fig. 6 is the well-distributed pressure of high flux membrane material, circular membrane central point acoplanarity displacement curve chart.
Specific embodiment
It is as follows that the preferred embodiment of the present invention combines detailed description：
Embodiment one：
Referring to Fig. 2 and Fig. 3, this high flux membrane Material mechanics test device, including ESPI off-surface displacement measurement system,
Sealing cabin, pulsometer and high sensitivity baroceptor, it is characterised in that：High flux membrane testing of materials sample is arranged on sealing
At the opening of nacelle, the closed nacelle for fully sealing is formed, pulsometer is used for the air pressure in control cabinet body, by high sensitivity gas
Pressure sensor is recorded and feeds back the real-time pressure in nacelle；By ESPI off-surface displacement measurement system and sealing during test
Nacelle is fixed on optics Isolating Platform, and the specimen surface allowed on sealing cabin is located at ESPI off-surface displacement measurement system
In the field range of system.
Embodiment two：
The ESPI off-surface displacement measurement system include computer, CCD area array cameras, piezoelectric ceramics, the plane of reference, point
Light microscopic, reflecting mirror, laser instrument；The reflected mirror of laser that laser instrument sends enters the spectroscope of half-reflection and half-transmission, and CCD camera obtains quilt
Object --- the speckle interference image of specimen surface is surveyed, digital picture is input to after computer, be capable of achieving in the face of automatization
Displacement and acoplanarity displacement are measured in real time.
The sealing cabin is an openings at one side nacelle, to install high flux membrane material substrate at opening --- examination
Sample, the substrate are collectively forming a sealing cabin for fully sealing with nacelle.
The pulsometer is by inflating the pressure value in precise control sealing cabin so that various membrane material samples bear phase
Same well-distributed pressure, by the air pressure in high sensitivity baroceptor real―time precision measurment and record cabin inside sealing cabin
Value.
Embodiment three：
As Fig. 2 gives the light path schematic diagram of high flux membrane Material mechanics test technology, the thin-film material of various material in sample
It is fixed on test substrate in the matrix form, each thin film is in periphery fixed state.Fig. 3 is the simplified mechanics mould of membrane material
Type --- a diameter of, thickness is, the surface deformation that periphery fixed circular membrane is produced in the case where well-distributed pressure effect is born.
The DCO process of this example is：
1）The test sample of high flux membrane material is prepared, the thin-film material of various material identical technological process is adopted, with 10
× 10 array formats are arranged on substrate simultaneously, and each membrane material fixes the state for supporting, nothing between film and film all in periphery
Any interference.Sample is to be provided with the steel plate of identical array circular hole, a series of circular membrane material of various materials by two pieces to constitute,
Plate size is 85mm × 85mm, and the Circularhole diameter on its light plate is 5 mm, is slightly less than high flux circle membrane material.First
At the array circular hole that various thin-film material rules are placed on one block of steel plate, the circular hole on circular membrane and steel plate is as far as possible same
The heart, then cover another block of steel plate and compress so that above-mentioned various membrane materials are in periphery fixed restrained condition, and schematic diagram is shown in
Fig. 4.
2）At the opening of the sealing cabin that the substrate of above-mentioned high flux membrane material is arranged on one side opening, formation one is complete
Hermetic closed nacelle, schematic diagram are shown on the right side of Fig. 2.
3）Air pressure in sealing cabin is inflated by inflator pump and causes various membrane material samples by inflator pump precise control
Bear identical well-distributed pressure.Sealing cabin can be accurately shown in real time and be recorded in cabin built with high sensitivity baroceptor
Pressure value.
4）ESPI off-surface displacement measurement system with real-time phase-shifting technique and above-mentioned sealing cabin are fixed
In optics vibration isolation table, the specimen surface of sealing cabin is used as tested region.With ESPI off-surface displacement measurement system
System can measure the acoplanarity displacement of multiple membrane material specimen surfaces simultaneously.
5）The speckle interference image of a secondary tested region is gathered before pressurising first as with reference to figure.Then filled by inflator pump
Gas bears well-distributed pressure by array film material, and Real-time Collection represents the position phase bar graph of tested region acoplanarity displacement this moment, and
Atmospheric pressure value in synchronous recording sealed compartment.The acoplanarity displacement position phase bar graph of array film material sample is as shown in Figure 5.
6）Automatization's filtering is carried out by software to the position phase bar graph in Fig. 5, goes parcel and phase extraction to process, can be obtained
To each circular membrane as well-distributed pressure acts on the acoplanarity displacement for producing, the acoplanarity displacement value of thin film center point is paid close attention to.
7）According to the relation between the acoplanarity displacement of the well-distributed pressure and thin film center point of above-mentioned synchronous recording, draw out
Cloth pressure and the three cubed curve of central point acoplanarity displacement, as shown in Figure 6.Periphery fixed thin film disk as shown in Figure 3 is equal
Mechanical model under the effect of cloth pressure, then by the corresponding relation between mechanics parameter and physical dimension, you can try to achieve each thin
The parameters such as the elastic modelling quantity of membrane material.
8）The high flux membrane Material mechanics test technology is can also be used in physics（Temperature）, chemistry（Corrosion）Under the conditions of to many
Plant the sign of membrane material mechanical property；Can be additionally used in the sign to multiple film fatigue of materials mechanical property.
Claims (11)
1. a kind of high flux membrane Material mechanics test device, including ESPI off-surface displacement measurement system, sealing cabin
（5）, pulsometer（6）With high sensitivity baroceptor（11）, it is characterised in that：High flux membrane testing of materials sample（9）Install
In sealing cabin（5）Opening at, form the closed nacelle that fully seals, pulsometer（6）For the air pressure P in control cabinet body,
By high sensitivity baroceptor（11）Record and feed back the real-time pressure in nacelle；By ESPI from face during test
Displacement measurement system and sealing cabin（5）It is fixed on optics Isolating Platform, and allows sealing cabin（5）On sample（9）Surface position
In the field range of ESPI off-surface displacement measurement system.
2. high flux membrane Material mechanics test device according to claim 1, it is characterised in that：The ESPI
Off-surface displacement measurement system includes computer（1）, CCD area array cameras（2）, piezoelectric ceramics（3）, the plane of reference（4）, spectroscope
（10）, reflecting mirror（7）, laser instrument（8）；Laser instrument（8）The reflected mirror of laser for sending（7）Into the spectroscope of half-reflection and half-transmission
（10）, CCD camera（2）Obtain testee --- sample（9）Digital picture is input to calculating by the speckle interference image on surface
Machine（1）Afterwards, the in-plane displacement and acoplanarity displacement for being capable of achieving automatization is measured in real time.
3. high flux membrane Material mechanics test device according to claim 1, it is characterised in that：The sealing cabin（5）
It is an openings at one side nacelle, to install high flux membrane material substrate at opening --- sample（9）, the substrate is common with nacelle
Form a sealing cabin for fully sealing（5）.
4. high flux membrane Material mechanics test device according to claim 1, it is characterised in that：The pulsometer（6）It is logical
Gas overcharging precise control sealing cabin（5）Interior pressure value P so that various membrane material samples（9）Identical well-distributed pressure is born,
Sealing cabin（5）It is internal to pass through high sensitivity baroceptor（11）Atmospheric pressure value P in real―time precision measurment and record cabin.
5. a kind of high flux membrane Material mechanics test method, is surveyed using the high flux membrane mechanics of materials according to claim 1
Trial assembly is put and is operated, it is characterised in that operating procedure is as follows：
1）Prepare the test sample of high flux membrane material（9）；
2）By high flux membrane testing of materials sample（9）Installed in sealing cabin（5）At opening；
3）Speckle interference off-surface displacement measurement system is installed, optical path is debugged；
4）Control sealing cabin（5）Interior pressure；
5）Sealing cabin during record high flux membrane testing of materials（5）Interior pressure P and film sample（9）Position phase bar graph；
6）Obtain various thin-film material samples（9）Mechanics parameter.
6. high flux membrane Material mechanics test method according to claim 5, it is characterised in that：The step 1）It is first
Prepare the test sample of high flux membrane material（9）：The thin-film material of various material is adopted identical technological process, with array shape
Formula is arranged on one piece of substrate simultaneously, and each membrane material is constrained all in periphery fixed, and between film and film, nothing is interconnected, they
Between do not produce and interfere, film sample（9）It is distributed on substrate with a matrix type.
7. high flux membrane Material mechanics test method according to claim 5, it is characterised in that：The step 2）Being will be upper
State the high flux membrane material sample of preparation（9）Substrate be arranged on one side opening sealing cabin（5）Opening at, formed one
The closed nacelle for fully sealing（5）.
8. high flux membrane Material mechanics test method according to claim 5, it is characterised in that：The step 3）First will be
Speckle interference off-surface displacement measurement system with real-time phase-shifting technique is fixed in optics vibration isolation table, then again by above-mentioned sealing
Nacelle（5）It is fixed in optics vibration isolation table, and allows sealing cabin（5）Sample（9）Surface is located at ESPI from face position
In the field range of shift measurement system；ESPI off-surface displacement measurement system has real-time phase shift function, can survey simultaneously
Measure multiple membrane material samples（9）The acoplanarity displacement on surface.
9. high flux membrane Material mechanics test method according to claim 5, it is characterised in that：The step 4）It is sealing
Nacelle（5）Interior pressure P can pass through inflator pump（6）Precise control so that various membrane material samples（9）Bear identical uniform
Pressure, passes through high sensitivity baroceptor inside nacelle（11）It is accurate in real time to show and record the atmospheric pressure value P in cabin.
10. high flux membrane Material mechanics test method according to claim 5, it is characterised in that：The step 5）It is high
Sensitivity baroceptor and ESPI off-surface displacement measurement system synchronization record various membrane material samples（9）Bear
Well-distributed pressure and corresponding multiple circular membrane samples（9）Surface deformation interfere position phase bar graph.
11. high flux membrane Material mechanics test methods according to claim 5, it is characterised in that：The step 6）It is logical
ESPI the poster processing soft is crossed to step 5）The surface deformation position phasor of multiple thin film of middle acquisition carries out automatization's filter
Ripple, solution phase place and phase extraction operation, obtain the acoplanarity displacement of each thin film center point；High flux membrane material（9）Mechanical model
For the circular membrane structure of a periphery fixed, between its mechanics parameter and physical dimension, corresponding relation is as follows：
Wherein it is thin-film material（9）Elastic modelling quantity, be Poisson's ratio, be the radius of membrane material, be thickness, represent sealing cabin
（5）Internal pressure, namely the same well-distributed pressure that various membrane materials bear, represent every kind of membrane material under well-distributed pressure effect
The acoplanarity displacement of corresponding central point；According to the function between well-distributed pressure, center membrane point acoplanarity displacement and other mechanics parameters
Relation, can derive multiple thin-film materials respectively（9）The mechanics parameters such as respective elastic modelling quantity, so as to realize by a mechanics
Experiment, obtains the purpose of various thin film material mechanics parameters.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108414257A (en) * | 2018-03-02 | 2018-08-17 | 北京空间技术研制试验中心 | A kind of precision of equipment installation measurement method for spacecraft |
| CN108802095A (en) * | 2018-08-24 | 2018-11-13 | 上海大学 | The method and system of rigid material coefficient of thermal expansion are measured using speckle-shearing interferometry |
| CN113640133A (en) * | 2021-08-11 | 2021-11-12 | 中国工程物理研究院激光聚变研究中心 | Sealing film mechanical property testing device based on expansion method |
| CN114441326A (en) * | 2021-12-31 | 2022-05-06 | 天津大学 | Multifunctional thin film material bulging testing device |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108414257A (en) * | 2018-03-02 | 2018-08-17 | 北京空间技术研制试验中心 | A kind of precision of equipment installation measurement method for spacecraft |
| CN108802095A (en) * | 2018-08-24 | 2018-11-13 | 上海大学 | The method and system of rigid material coefficient of thermal expansion are measured using speckle-shearing interferometry |
| CN113640133A (en) * | 2021-08-11 | 2021-11-12 | 中国工程物理研究院激光聚变研究中心 | Sealing film mechanical property testing device based on expansion method |
| CN113640133B (en) * | 2021-08-11 | 2024-05-07 | 中国工程物理研究院激光聚变研究中心 | Sealing film mechanical property testing device based on expansion method |
| CN114441326A (en) * | 2021-12-31 | 2022-05-06 | 天津大学 | Multifunctional thin film material bulging testing device |
| CN114441326B (en) * | 2021-12-31 | 2024-03-12 | 天津大学 | Multifunctional film material bulging testing device |
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