CN101788273B - Digital holographic three-dimensional microscopic observation device based on multi-polarization state synthesis - Google Patents
Digital holographic three-dimensional microscopic observation device based on multi-polarization state synthesis Download PDFInfo
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- CN101788273B CN101788273B CN2010101080838A CN201010108083A CN101788273B CN 101788273 B CN101788273 B CN 101788273B CN 2010101080838 A CN2010101080838 A CN 2010101080838A CN 201010108083 A CN201010108083 A CN 201010108083A CN 101788273 B CN101788273 B CN 101788273B
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Abstract
The invention discloses a digital holographic three-dimensional microscopic observation device based on multi-polarization state synthesis. After a light splitting unit in the device splits the received laser into linearly polarized light and circularly polarized light, the linearly polarized light and the circularly polarized light are respectively input into two spatial filters; the linearly polarized light sequentially passes through a plane convex lens and a reflector to form reference light, and the reference light enters a depolarization light splitting prism; and the circularly polarized light sequentially passes through the plane convex lens and the reflector to form illumination light, and the illumination light enters the depolarization light splitting prism after being irradiated on an object to be observed and then scattered. A polarization light splitting prism in the light splitting unit is arranged between a half-wave plate A and a half-wave plate B, and 1/4 wave plate is arranged in the position of the reflected light of the polarization light splitting prism. By changing the polarization direction of the linearly polarized reference light and enabling the circularly polarized scattered light containing the shape information of the object to generate interference, the device of the invention can acquire multiple holographs containing different information of the object under the condition that the angle of the irradiation light and the relative position of the object and a camera are not changed; and the observation device can acquire the three-dimensional information of the object to be observed in a non-contact in-situ detection mode.
Description
Technical field
The present invention relates to a kind of three-dimensional microscopic observation system, more particularly say, be meant a kind of based on the synthetic digital hologram three-dimensional microscopic observation system of multi-polarization state.
Background technology
Digital Holography is to utilize CCD (Charge Coupled Device, charge-coupled image sensor), CMOS (Complementary Metal-Oxide Semiconductor, metal-oxide semiconductor (MOS)) etc. the photoelectronic imaging sensitive detection parts are as recording medium and with the digital form recorded hologram, utilize computer simulation to reproduce reference light and pass through the optical diffraction process of hologram with numerical approach reconstruct three-dimensional scattering light field, thereby obtain the amplitude of scattering light field and the information of phase place, its advantage comprises: (1) obtains object dimensional information in the noncontact mode, very little to the observation sample influence, advantages such as system architecture is simple; (2) record of digital hologram and reproduction process are all finished with digitized forms, therefore can and can carry out quantitative test to object dimensional information with re-constructed in digital form scattering light field; (3) in the digital reconstruction process, can use digital image processing techniques easily, the influence of rectification, compensate for optical aberrations and various noise and detector nonlinear effect etc.
But reproduce in the three-dimensionalreconstruction of picture at digital hologram, the various noises that digital hologram reproduces picture have very large influence.The existence of noise can make judges that with algorithm mistake appears in the focusing of picture, thereby makes the three-dimensionalreconstruction image distortion of acquisition.Reduce even eliminate the key point that various The noise are three-dimensionalreconstructions, the degree direct influence of noise removing is to the quality of three-dimensionalreconstruction picture.Speckle noise is the key factor that influences the Reconstructed Image Quality in Digital Holography amount, also is a kind of more unmanageable noise.It is because coherent light shines the surface emitting scattering of rough object, the surface of scatterer or near light field in form and observable a kind of random bright blackening line.The reproduction that is covered by speckle is difficult to distinguish one from the other as details, makes to reproduce as smudgy.It is significant to the quality that improves digital hologram reproduction picture to reduce laser speckle, also very crucial for the three-dimensionalreconstruction of realizing the reproduction picture.
Summary of the invention
The objective of the invention is to propose a kind of digital holographic three-dimensional microscopic observation device that synthesizes based on multi-polarization state, this device adopts linearly polarized light as reference light on the one hand, and circularly polarized light is treated the illumination light of observed objects as irradiation; Utilize polarization direction that changes the linear polarization reference light and the circular polarization scattered light that includes object appearance information to interfere on the other hand, can under the situation that does not change irradiates light angle and object and camera relative position, obtain several and comprise the hologram of the different information of object; This observation device of the third aspect can obtain the three-dimensional information for the treatment of observed objects with noncontact, in-situ investigation mode.
Of the present invention a kind of based on the synthetic digital holographic three-dimensional microscopic observation device of multi-polarization state, this device includes light source, spectrophotometric unit, spatial filter, plano-convex lens, catoptron, depolarization Amici prism and CMOS camera.
Light source is used to the three-dimensional microscopic observation system of the present invention that optical information is provided.
Spectrophotometric unit is used for receiving from the light source emitting laser on the one hand, and spectrophotometric unit is divided into linearly polarized light and circularly polarized light with the laser that receives on the other hand, and imports two spatial filters respectively.Polarization splitting prism places between A half-wave plate and the B half-wave plate, and quarter wave plate places the reflected light position of polarization splitting prism.Wherein, described A half-wave plate is used for laser with light emitted to carry out the adjustment of polarization direction and polarization splitting prism and cooperates and realize that transmitted light and catoptrical beam intensity ratio are adjustable continuously, and the B half-wave plate is used to adjust the polarization direction of the transmitted light of polarization splitting prism; Adopt quarter wave plate the reflected light of polarization splitting prism can be converted into circularly polarized light; Make the inclined to one side transmission polarization state of light of line change by rotation B half-wave plate, realize the line polarisation and the rotatory polarization coherence stack of different polarization direction, obtain the digital hologram that multiframe comprises different polarization information.Can regulate the beam intensity ratio of linearly polarized light and circularly polarized light by regulating continuous adjustable attenuator simultaneously, and then, improve the signal to noise ratio (S/N ratio) of ginseng thing optical interference picture by controlling the beam intensity ratio of reference light and scattered light.Laser forms circularly polarized light by fiber coupler and exports light illuminating unit to behind A half-wave plate and polarization splitting prism.
A kind of advantage based on the synthetic digital holographic three-dimensional microscopic observation device of multi-polarization state of the present invention is: (1) spectrophotometric unit is polarization light output and circularly polarized light simultaneously, and accurately controls illumination light and with reference to polarization state of light and beam intensity ratio.
(2) the present invention is by changing the polarization direction of linear polarization reference light, interfere with the circular polarization scattered light that includes object appearance information, can be under the prerequisite of the relative position between the angle that does not change the illumination light irradiating object or object and the camera, the record multiframe comprises object information and the separate digital hologram of speckle noise, and then, obtain high resolving power, low noise object picture by synthesizing the reproduction picture of above-mentioned digital hologram.
(3) adopt linear polarization reference light 4a and circular polarization scattered light 14a on the depolarization Amici prism, to close light, utilize the digital hologram record to obtain the three-dimensional information for the treatment of observed objects with reproducting method with object appearance information.
(4) observation device compact conformation of the present invention is easy to operate, is particularly useful for irradiating angle is had the microscopic observation of the object of specific (special) requirements.
Description of drawings
Fig. 1 is the structured flowchart based on the synthetic three-dimensional microscopic observation device of multi-polarization state of the present invention.
Figure 1A is the structural drawing of spectrophotometric unit of the present invention.
Among the figure: 1. light source 1a. laser 1b. transmitted light 1c. reflected light
2. spectrophotometric unit 201.A half-wave plate 202. polarization splitting prism 203.B half-wave plates
204. continuous adjustable attenuator 205.1/4 wave plate 21. linearly polarized lights 22. circularly polarized lights
3A.A spatial filter 3B.A plano-convex lens 3C.B spatial filter 3D.B plano-convex lens 4.A catoptron
4a. reference light 5. depolarization Amici prism 5a. combined light beam 6.CMOS cameras
7.B catoptron 7a. illumination light 14. treats that observed objects 14a. has the scattered light of object appearance information
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing.
Shown in Fig. 1, Figure 1A, the present invention is a kind of based on the synthetic digital holographic three-dimensional microscopic observation device of multi-polarization state, and this device includes light source 1, spectrophotometric unit 2, A spatial filter 3A, B spatial filter 3C, A plano-convex lens 3B, B plano-convex lens 3D, A catoptron 4, B catoptron 7, depolarization Amici prism 5 and CMOS camera 6.Spectrophotometric unit 2 receives light source 1 emitting laser, and polarization light output 21 and circularly polarized light 22; Linearly polarized light 21 is incident on the depolarization Amici prism 5 behind A spatial filter 3A, A plano-convex lens 3B, A catoptron 4 in turn; Circularly polarized light 22 is in turn through B spatial filter 3C, B plano-convex lens 3D, B catoptron 7, be incident on the depolarization Amici prism 5 after treating observed objects 14; Gathered by CMOS camera 6 at last.
The light path of the digital holographic three-dimensional microscopic observation device of the present invention's design is connected to:
The centre wavelength of light source 1 outgoing is that the laser 1a of 532nm passes on the A half-wave plate 201 of spectrophotometric unit 2 and is incident on the polarization splitting prism 202;
Laser 1a is difference polarization light output 21 and circularly polarized light 22 after spectrophotometric unit 2 carries out light-splitting processing;
Behind spatial filter 3A, plano-convex lens 3B, 4 reflection output reference light 4a are incident to depolarization Amici prism 5 to linearly polarized light 21 through catoptron in turn;
Circularly polarized light 22 shines through catoptron 7 reflection output illumination light 7a illumination light 7a and to treat on the observed objects 14 in turn behind spatial filter 3C, plano-convex lens 3D;
Under the irradiation of illumination light 7a, treat that observed objects 14 reflects the scattered light 14a with object appearance information and is incident to depolarization Amici prism 5;
The reference light 4a of 5 pairs of incidents of depolarization Amici prism, the scattered light 14a with object appearance information close optical processing and obtain combined light beam 5a, and the interference hologram that this combined light beam 5a forms is caught by the photosurface of CMOS camera 6.
In the present invention, the linearly polarized light of being told by spectrophotometric unit 2 21 is behind spatial filter 3A, plano-convex lens 3B, catoptron 4, and the reference light 4a of formation is incident to depolarization Amici prism 5, and this road light path can be called reference path.
In the present invention, the circularly polarized light of telling by spectrophotometric unit 2 22 through light illuminating unit 13 expose to treat on the observed objects 14 after, the scattered light 14a with object appearance information that reflection or transmission form is incident to depolarization Amici prism 5, and this road light path can be called thing light light path.
By B half-wave plate 203 in the rotation spectrophotometric unit 2, can change the polarization direction of linearly polarized light 21 in the reference path, thereby make CMOS camera 6 several digital holograms of record.Several digital hologram utilization numerical approach reconstruct of gathering then by CMOS camera 6, thus high resolving power, low noise object dimensional space image synthesized.
In the present invention, light source 1 is used to the three-dimensional microscopic observation system of the present invention that optical information is provided, and the centre wavelength that this light source 1 provides is the laser of 532nm.
It is the laser 1a of 532nm that spectrophotometric unit 2 is used to receive from the centre wavelength of light source 1 outgoing on the one hand, and spectrophotometric unit 2 is divided into linearly polarized light 21 and circularly polarized light 22 with the laser 1a that receives on the other hand, and difference input space wave filter 3A and spatial filter 3C.Polarization splitting prism 202 places between A half-wave plate 201 and the B half-wave plate 203, and quarter wave plate 205 places the reflected light position of polarization splitting prism 202.Wherein, described A half-wave plate 201 is used for adjustment and polarization splitting prism that laser 1a with light emitted carries out the polarization direction and cooperates the beam intensity ratio that realizes transmitted light 1b and reflected light 1c adjustable continuously, and B half-wave plate 203 is used to adjust the polarization direction of the transmitted light 1b of polarization splitting prism 202; Adopt quarter wave plate 205 the reflected light 1c of polarization splitting prism 202 can be converted into circularly polarized light 22; Make the polarization state of the inclined to one side transmitted light 1b of line change by rotation B half-wave plate 203, realize the line polarisation and the rotatory polarization coherence stack of different polarization direction, obtain the digital hologram that multiframe comprises different polarization information.Adjust the beam intensity ratio (1: 5～1: 2) of linearly polarized light 21 and circularly polarized light 22 simultaneously by continuous adjustable attenuator 204, control the beam intensity ratio of reference light 4a and scattered light 14a, thereby improved the signal to noise ratio (S/N ratio) of ginseng thing optical interference picture.Laser 1a is behind A half-wave plate 201 and polarization splitting prism 202, and forming centre wavelengths by fiber coupler 206 is that the circularly polarized light 22 of 532nm exports light illuminating unit 13 to.
In the present invention, A half-wave plate 201 and B half-wave plate 203 can change the polarization direction of incident ray polarized light, can choose the quartzy zero level half-wave plate of the GCL-060411 model of photoelectricity company of Beijing Daheng production.
In the present invention, polarization splitting prism 202 has and 1 bundle incident light is divided into the two bundle directions of propagation are vertical, the light of polarization direction quadrature.Can choose the polarization splitting prism of the GCC-401102 model of photoelectricity company of Beijing Daheng production.
In the present invention, continuously adjustable attenuator 204 can be according to the rotation of disk and the linear luminous power that changes the outgoing spatial light can be the circular adjustable attenuator/spectroscope of GCO-0704M that photoelectricity company of Beijing Daheng produces.
In the present invention, quarter wave plate 205 can be chosen the quartzy zero-th order waveplates of the GCL-060401 model of photoelectricity company of Beijing Daheng production.
In the present invention, spatial filter 3A and 3C can carry out spatial filtering to the laser beam of a branch of incident, obtain uniform outgoing hot spot, choose the GCM-01M type spatial filter that photoelectricity company of Beijing Daheng produces.
In the present invention, plano-convex lens 3B and 3D are used for spatial filter 3A and the approximate pointolite emergent light expansion of 3C bundle are the directional light of certain size.The GCL-010115 type K9 plano-convex lens of selecting for use photoelectricity company of Beijing Daheng to produce.Plano-convex lens 3B and 3D can be installed in GCM-2701381M model lens/mirror support that photoelectricity company of Beijing Daheng produces.
In the present invention, catoptron 4 and 7 can be chosen the GCC-102102 model catoptron that photoelectricity company of Beijing Daheng produces, and is installed in the GCM-082305M model two dimension adjustment rack that photoelectricity company of Beijing Daheng produces.
In the present invention, depolarization Amici prism 5 has the synthetic a branch of light of incident light that the two bundle directions of propagation are vertical.Choose the NT49-004 model depolarization Amici prism that Singapore Edmund Optics Singapore Pte Ltd. company produces.
In the present invention, CMOS camera 6 can choose that Canadian Lumenera company produces, model is that LU125M-WOIR, resolution are that 1280 * 1024 pixels, frame frequency are that to be of a size of 2/3 inch, signaling interface be USB2.0 for 15fps, photosurface.Several that can obtain for CMOS camera 6 contain the hologram image of scattered light three-dimensional information, and eliminate the speckle that reproduces in the picture based on average method of superposition and make an uproar.
Claims (4)
1. one kind based on the synthetic digital holographic three-dimensional microscopic observation device of multi-polarization state, and it is characterized in that: this device includes light source (1), spectrophotometric unit (2), first spatial filter (3A), second spatial filter (3C), first plano-convex lens (3B), second plano-convex lens (3D), first catoptron (4), second catoptron (7), depolarization Amici prism (5) and CMOS camera (6);
Spectrophotometric unit (2) includes A half-wave plate (201), polarization splitting prism (202), B half-wave plate (203), continuous adjustable attenuator (204) and quarter wave plate (205); Polarization splitting prism (202) places between A half-wave plate (201) and the B half-wave plate (203), and quarter wave plate (205) places the reflected light position of polarization splitting prism (202);
Light source (1) emitting laser (1a) passes on the A half-wave plate (201) of spectrophotometric unit (2) and is incident on the polarization splitting prism (202); This laser (1a) is difference polarization light output (21) and circularly polarized light (22) after spectrophotometric unit (2) carries out light-splitting processing;
Linearly polarized light (21) behind first spatial filter (3A), first plano-convex lens (3B), is incident to depolarization Amici prism (5) through first catoptron (4) reflection output reference light (4a) in turn;
Behind second spatial filter (3C), second plano-convex lens (3D), through second catoptron (7) reflection output illumination light (7a), this illumination light (7a) shines to be treated on the observed objects (14) circularly polarized light (22) in turn;
Under the irradiation of illumination light (7a), treat that observed objects (14) reflects the scattered light (14a) with object appearance information and is incident to depolarization Amici prism (5);
Depolarization Amici prism (5) closes optical processing to the reference light (4a) of incident, scattered light (14a) with object appearance information and obtains combined light beam (5a), and the interference hologram that this combined light beam (5a) forms is caught by the photosurface of CMOS camera (6);
A half-wave plate (201) in the described spectrophotometric unit (2) is used for adjustment and polarization splitting prism that laser (1a) with light emitted carries out the polarization direction and cooperates the beam intensity ratio that realizes transmitted light (1b) and reflected light (1c) adjustable continuously, and B half-wave plate (203) is used to adjust the polarization direction of the transmitted light (1b) of polarization splitting prism (202); Adopt quarter wave plate (205) reflected light (1c) of polarization splitting prism (202) can be converted into circularly polarized light (22); Make the polarization state of the inclined to one side transmitted light of line (1b) change by rotation B half-wave plate (203), realize the linearly polarized light and the circularly polarized light coherence stack of different polarization direction, obtain the digital hologram that multiframe comprises different polarization information; By adjusting continuous adjustable attenuator (204) beam intensity ratio of linearly polarized light (21) and circularly polarized light (22) is regulated simultaneously, this beam intensity ratio is 1: 5～1: 2, and then, improve the signal to noise ratio (S/N ratio) of ginseng thing optical interference picture by controlling the beam intensity ratio of reference light (4a) and scattered light (14a);
In spectrophotometric unit (2),, can change the polarization direction of linearly polarized light in the reference path (21), thereby make CMOS camera (6) write down several digital holograms by rotation B half-wave plate (203).
2. according to claim 1 based on the synthetic digital holographic three-dimensional microscopic observation device of multi-polarization state, it is characterized in that: the centre wavelength of light source (1) emitting laser (1a) is 532nm.
3. according to claim 1 based on the synthetic digital holographic three-dimensional microscopic observation device of multi-polarization state, it is characterized in that: the linearly polarized light of being told by spectrophotometric unit (2) (21) is behind first spatial filter (3A), first plano-convex lens (3B), first catoptron (4), the reference light (4a) that forms is incident to depolarization Amici prism (5), and this road light path is called reference path.
4. according to claim 1 based on the synthetic digital holographic three-dimensional microscopic observation device of multi-polarization state, it is characterized in that: the circularly polarized light of telling by spectrophotometric unit (2) (22) through expose to behind second spatial filter (3C), second plano-convex lens (3D), second catoptron (7) treat that observed objects (14) goes up after, the scattered light with object appearance information (14a) that reflection or transmission form is incident to depolarization Amici prism (5), and this road light path is called thing light light path.
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| WO2012032668A1 (en) * | 2010-09-07 | 2012-03-15 | 大日本印刷株式会社 | Scanner device and device for measuring three-dimensional shape of object |
| CN102278952B (en) * | 2010-09-14 | 2012-09-05 | 北京航空航天大学 | Three-dimensional micro-observation apparatus for smooth reflective surface on the basis of synthetic aperture in digital holography |
| CN102288128A (en) * | 2011-05-10 | 2011-12-21 | 北京航空航天大学 | Three-dimensional microscopic observing device for recording and synthesizing digital hologram through rotating polarizing state of linearly polarized light |
| CN102402172B (en) * | 2011-11-30 | 2015-03-11 | 昆明理工大学 | Three-dimensional real time super-resolution digital holography recording system |
| CN102589417B (en) * | 2012-03-13 | 2013-12-18 | 北京航空航天大学 | All-fiber pre-amplification digital holography three-dimensional microscopic observation device |
| CN103217209A (en) * | 2013-04-11 | 2013-07-24 | 北京航空航天大学 | Micro-vibration real-time surface detection device based on digital holography |
| CN104535171A (en) * | 2014-12-31 | 2015-04-22 | 北京航空航天大学 | Micro-vibration long-distance real time image detecting system based on image surface digital holography |
| CN105066908B (en) * | 2015-08-12 | 2017-06-09 | 北京航空航天大学 | A kind of digital hologram three-dimensional Shape measure device based on multi-wavelength and multi-polarization state |
| CN108562241B (en) * | 2018-03-08 | 2020-07-24 | 复旦大学 | Digital holographic flexible measurement device and method based on optical fiber bundle |
| CN110926327B (en) * | 2019-12-26 | 2021-07-30 | 武汉阿格斯科技有限公司 | Matching debugging method and device of OCT optical link, controller and medium |
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Patent Citations (4)
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| CN1088681A (en) * | 1992-12-25 | 1994-06-29 | 中国科学院长春光学精密机械研究所 | Real-time one step double-wavelength holographic interference checking device |
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