CN201983921U - Lens focal length and wavefront distortion measuring device - Google Patents
Lens focal length and wavefront distortion measuring device Download PDFInfo
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- CN201983921U CN201983921U CN2010206637839U CN201020663783U CN201983921U CN 201983921 U CN201983921 U CN 201983921U CN 2010206637839 U CN2010206637839 U CN 2010206637839U CN 201020663783 U CN201020663783 U CN 201020663783U CN 201983921 U CN201983921 U CN 201983921U
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- 238000005259 measurement Methods 0.000 claims description 26
- 230000007246 mechanism Effects 0.000 claims description 17
- 238000013519 translation Methods 0.000 claims description 13
- 230000011514 reflex Effects 0.000 claims description 7
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Abstract
The utility model relates to a lens focal length and wavefront distortion measuring device, which comprises a laser, a semi-transparent semi-reflective plane mirror, a plane reflector and a focal length and wavefront distortion control unit; the semi-transparent semi-reflective plane mirror and the plane mirror are sequentially arranged on an emergent light path of the laser; the focus and wavefront distortion control unit is arranged on a reflection light path which is reflected to the semi-transparent semi-reflection plane mirror by the plane mirror and reflected along the semi-transparent semi-reflection plane mirror. The utility model provides a measuring range is big, stability is high, repeatability is good, lens focus and wavefront distortion measuring device that the measuring result confidence is high.
Description
Technical field
The utility model belongs to optical field, relates to a kind of focal length of lens and wavefront distortion measurement mechanism, relates in particular to a kind of laser with collimating and condenser lens focal length and wavefront distortion parameter auto-testing device.
Background technology
In refreshing light three host apparatus big science engineering researchs, collimation for light laser all needs all kinds of caliber sizes lens different with focal length length with focusing on to reach in a large number to its parameter sampling diagnosis, and the focal length of lens and transmission wavefront distortion directly influence the transmission quality and the performance of laser, thereby do not reach the index of requirement.In order to make laser reach focal length and wavefront that the good transmission quality just must strict control transmission lens, so the focal length of lens and the accurate measurement of wavefront just seem extremely important.Measure the focal length of lens and wavefront distortion at present and use two complete equipments respectively, wherein the focal length of lens uses the enlargement ratio method to measure.Specifically be to enter lens after laser collimates through parallel light tube, place the double aperture slit Target Board at the focal surface of collimator tube place, slit Target Board scioptics are imaged on its focal plane and receive image with CCD and carry out the interpretation calculating focal length of lens.Shortcoming is when measuring lens, owing to can producing spherical aberration, lens cause the unintelligible image interpretation that influences of imaging, make focal length of lens measuring error big, make the measurement range of the focal length of lens not cover the demand of refreshing light three main frame focal length of lens scopes owing to being subjected to the restriction of zero diopter pipe focal length in addition.The lens wavefront distortion adopts interferometer to measure, shortcoming is the transmission wavefront that single face type that interferometer can only be measured lens can not really be measured lens, can produce corresponding error like this, in addition the optical maser wavelength used of interferometer measurement and actual wavelength is inconsistent also can produce error.Focal length and wavefront with above two kinds of measurement device lens all can produce bigger error, can not in time revise and cause the transmission performance of laser and quality to be affected.
The utility model content
In order to solve the above-mentioned technical matters that exists in the background technology, the utility model provides a kind of measurement range big, stable high, good reproducibility, the focal length of lens that the measurement result degree of confidence is high and wavefront distortion measurement mechanism.
Technical solution of the present utility model is: the utility model provides a kind of focal length of lens and wavefront distortion measurement mechanism, and its special character is: the described focal length of lens and wavefront distortion measurement mechanism comprise laser instrument, semi-transparent semi-reflecting level crossing, plane mirror and focal length and wavefront distortion control module; Described semi-transparent semi-reflecting level crossing and plane mirror are set in turn on the laser emitting light path; Described focal length and wavefront distortion control module be arranged at through plane mirror reflex on the semi-transparent semi-reflecting level crossing and reflected light path after the semi-transparent semi-reflecting flat mirror reflects on.
Above-mentioned focal length and wavefront distortion control module comprise control and collecting computer, angular instrument and focal length and wavefront distortion measuring unit; Described control links to each other with angular instrument with collecting computer; Described control and collecting computer control angular instrument drive the angle value that plane mirror rotates and the record plane mirror rotates; Described focal length and wavefront distortion measuring unit be arranged at through plane mirror reflex on the semi-transparent semi-reflecting level crossing and reflected light path after the semi-transparent semi-reflecting flat mirror reflects on; Described focal length and wavefront distortion measuring unit link to each other with collecting computer with control.
Above-mentioned focal length and wavefront distortion measuring unit comprise ccd detector, Hartmann sensor and electronic control translation stage; Described ccd detector be arranged at through plane mirror reflex on the semi-transparent semi-reflecting level crossing and reflected light path after the semi-transparent semi-reflecting flat mirror reflects on; The focal length of lens to be measured is calculated in described ccd detector collection light beam and interpretation after semi-transparent semi-reflecting flat mirror reflects; The Beam Wave-Front image of described Hartmann sensor collection after semi-transparent semi-reflecting flat mirror reflects; Described ccd detector and Hartmann sensor place on the electronic control translation stage; Described electronic control translation stage links to each other with collecting computer with control; Described collection and control computer control electronic control translation stage drive the Hartmann sensor motion.
Above-mentioned focal length and wavefront distortion measuring unit also comprise collimating mirror, and described collimating mirror links to each other with Hartmann sensor.
Above-mentioned laser instrument equates with the distance of ccd detector at a distance of the semi-transparent semi-reflecting lens center.
Above-mentioned laser instrument is a fiber laser.
Above-mentioned ccd detector is full frame spectral order science CCD, frame transfer science CCD, L3Vision camera or COMS imageing sensor.
Above-mentioned angular instrument is 0.05 second automatically controlled precise rotating platform or 0.01 second automatically controlled angular instrument.
The utility model has the advantages that:
The utility model provides a kind of focal length of lens and wavefront distortion measurement mechanism, and this device utilizes fiber laser, semi-transparent semi-reflecting level crossing, precision goniometer, plane mirror and ccd detector combination, adopts autocollimatic principle accurately to measure the focal length of lens; Adopt the wavefront distortion of the accurate measuring beam mirror of autocollimatic principle after the lens transmission; Focal length and the axle that can measure lens simultaneously gone up, the outer wavefront distortion of axle, and focal length and the bore of measuring lens are unrestricted, and measurement range is big; Utilize the different wave length laser instrument, can expand and measure collimation, focusing, the sampling lens that under the different wave length condition, use in refreshing light three main frames; The focal length of lens and the wavefront measured, stability is high, good reproducibility, measurement result degree of confidence height; The automaticity of the focal length of lens and wavefront measurement is increased substantially, be applicable to the mass check, saved labour and cost.
Description of drawings
Fig. 1 is the preferable structural representation of the focal length of lens provided by the utility model and wavefront distortion measurement mechanism.
Embodiment
Referring to Fig. 1, the utility model provides a kind of focal length of lens and wavefront distortion measurement mechanism, and this device comprises laser instrument 1, semi-transparent semi-reflecting level crossing 2, plane mirror 3 and focal length and wavefront distortion control module; Semi-transparent semi-reflecting level crossing 2 and plane mirror 3 are set in turn on the laser emitting light path.
Focal length and wavefront distortion control module comprise control and collecting computer 9, angular instrument 4 and focal length and wavefront distortion measuring unit; Control links to each other with angular instrument 4 with collecting computer 9; Control drives the angle value that plane mirror 3 rotates and record plane mirror 3 rotates with collecting computer 9 control angular instruments 4; Focal length and wavefront distortion measuring unit link to each other with collecting computer 9 with control.
Focal length and wavefront distortion measuring unit comprise ccd detector 5, Hartmann sensor 6 and electronic control translation stage 8; Ccd detector 5 be arranged at through plane mirror 3 reflex on the semi-transparent semi-reflecting level crossing 2 and reflected light path after semi-transparent semi-reflecting level crossing 2 reflections on; Ccd detector 5 is gathered the focal length that lens 10 to be measured are calculated in after semi-transparent semi-reflecting level crossing 2 reflections light beam and interpretation; Hartmann sensor 6 is gathered the wavefront image of light beam after semi-transparent semi-reflecting level crossing 2 reflections; Ccd detector 5 and Hartmann sensor 6 place on the electronic control translation stage 8; Electronic control translation stage 8 links to each other with collecting computer 9 with control; Gather with control computer 9 control electronic control translation stages 8 and drive Hartmann sensor 6 motions.
Laser instrument can be that the laser instrument of fiber laser 1 or other models all is feasible.Laser instrument requires power stable in a short time, and wavelength can customize according to the actual requirements, and fiber laser equates at a distance of semi-transparent semi-reflecting lens centre distance with ccd detector herein.
Ccd detector 5 can be full frame spectrum and science CCD, for example model C CD30-11 or CCD42-40; Can also be frame transfer science CCD, for example model be CCD39-01 or CCD47-20; Certainly, ccd detector 5 can also be L3Vision camera or COMS imageing sensor.
Above-mentioned angular instrument is 0.05 second automatically controlled precise rotating platform or 0.01 second automatically controlled angular instrument etc.
The utility model is when work, at first measured lens 10 is placed plane mirror 3 fronts, open fiber laser 1 make light beam by semi-transparent semi-reflecting level crossing 2 with measured lens 10 after plane mirror 3 return, regulating measured lens 10 all around makes the focus of folded light beam through focusing on behind the semi-transparent semi-reflecting level crossing 2 on ccd detector 5 target surfaces, gather with control computer 9 control precision goniometers 4 and drive plane mirrors 3 turn an angle scope and recording angular value, ccd detector 5 is gathered the beams focusing dot image and is also adopted the interpretation of pixel subdivide technology to calculate the focal length of lens.Gather with control computer 9 control electronic control translation stages 8 and drive collimating mirror 7 and Hartmann sensor 6 motions, the focal plane of collimating mirror 7 is overlapped with the light beam focus point that returns, Hartmann sensor 6 is gathered the wavefront image of light beam behind lens, calculates the lens wavefront distortion.
Claims (8)
1. the focal length of lens and wavefront distortion measurement mechanism, it is characterized in that: the described focal length of lens and wavefront distortion measurement mechanism comprise laser instrument, semi-transparent semi-reflecting level crossing, plane mirror and focal length and wavefront distortion control module; Described semi-transparent semi-reflecting level crossing and plane mirror are set in turn on the laser emitting light path; Described focal length and wavefront distortion control module be arranged at through plane mirror reflex on the semi-transparent semi-reflecting level crossing and reflected light path after the semi-transparent semi-reflecting flat mirror reflects on.
2. the focal length of lens according to claim 1 and wavefront distortion measurement mechanism is characterized in that: described focal length and wavefront distortion control module comprise control and collecting computer, angular instrument and focal length and wavefront distortion measuring unit; Described control links to each other with angular instrument with collecting computer; Described control and collecting computer control angular instrument drive the angle value that plane mirror rotates and the record plane mirror rotates; Described focal length and wavefront distortion measuring unit be arranged at through plane mirror reflex on the semi-transparent semi-reflecting level crossing and reflected light path after the semi-transparent semi-reflecting flat mirror reflects on; Described focal length and wavefront distortion measuring unit link to each other with collecting computer with control.
3. the focal length of lens according to claim 2 and wavefront distortion measurement mechanism is characterized in that: described focal length and wavefront distortion measuring unit comprise ccd detector, Hartmann sensor and electronic control translation stage; Described ccd detector be arranged at through plane mirror reflex on the semi-transparent semi-reflecting level crossing and reflected light path after the semi-transparent semi-reflecting flat mirror reflects on; The focal length of lens to be measured is calculated in described ccd detector collection light beam and interpretation after semi-transparent semi-reflecting flat mirror reflects; Described Hartmann sensor is gathered the wavefront image of light beam after the semi-transparent semi-reflecting flat mirror reflects; Described ccd detector and Hartmann sensor place on the electronic control translation stage; Described electronic control translation stage links to each other with collecting computer with control; Described collection and control computer control electronic control translation stage drive the Hartmann sensor motion.
4. the focal length of lens according to claim 3 and wavefront distortion measurement mechanism is characterized in that: described focal length and wavefront distortion measuring unit also comprise collimating mirror, and described collimating mirror links to each other with Hartmann sensor.
5. according to claim 1 or 2 or the 3 or 4 described focal length of lens and wavefront distortion measurement mechanisms, it is characterized in that: described laser instrument equates with the distance of ccd detector at a distance of the semi-transparent semi-reflecting lens center.
6. the focal length of lens according to claim 5 and wavefront distortion measurement mechanism is characterized in that: described laser instrument is a fiber laser.
7. the focal length of lens according to claim 6 and wavefront distortion measurement mechanism is characterized in that: described ccd detector is full frame spectral order science CCD, frame transfer science CCD, L3Vision camera or COMS imageing sensor.
8. the focal length of lens according to claim 7 and wavefront distortion measurement mechanism is characterized in that: described angular instrument is 0.05 second automatically controlled precise rotating platform or 0.01 second automatically controlled angular instrument.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010206637839U CN201983921U (en) | 2010-12-16 | 2010-12-16 | Lens focal length and wavefront distortion measuring device |
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| CN2010206637839U CN201983921U (en) | 2010-12-16 | 2010-12-16 | Lens focal length and wavefront distortion measuring device |
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| CN201983921U true CN201983921U (en) | 2011-09-21 |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102564731A (en) * | 2010-12-16 | 2012-07-11 | 中国科学院西安光学精密机械研究所 | Lens focal length and wavefront distortion measuring device |
| CN102564340A (en) * | 2011-12-09 | 2012-07-11 | 中国科学院西安光学精密机械研究所 | Large-caliber plane mirror surface shape detection device |
| CN102608771A (en) * | 2012-03-16 | 2012-07-25 | 中国科学院上海光学精密机械研究所 | Simulated light-spot light source for high-power laser system |
| CN103105283A (en) * | 2011-11-15 | 2013-05-15 | 中国科学院西安光学精密机械研究所 | Focal length measuring device of single-spectrum large-caliber long-focus lens |
| CN104793445A (en) * | 2014-01-22 | 2015-07-22 | 海益视系统有限公司 | Focusing device of video camera module, and method |
| CN106768882A (en) * | 2016-12-15 | 2017-05-31 | 中国科学院光电技术研究所 | Optical system distortion measurement method based on shack-Hartmann wavefront sensor |
| CN113124821A (en) * | 2021-06-17 | 2021-07-16 | 中国空气动力研究与发展中心低速空气动力研究所 | Structure measurement method based on curved mirror and plane mirror |
-
2010
- 2010-12-16 CN CN2010206637839U patent/CN201983921U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102564731A (en) * | 2010-12-16 | 2012-07-11 | 中国科学院西安光学精密机械研究所 | Lens focal length and wavefront distortion measuring device |
| CN103105283A (en) * | 2011-11-15 | 2013-05-15 | 中国科学院西安光学精密机械研究所 | Focal length measuring device of single-spectrum large-caliber long-focus lens |
| CN102564340A (en) * | 2011-12-09 | 2012-07-11 | 中国科学院西安光学精密机械研究所 | Large-caliber plane mirror surface shape detection device |
| CN102608771A (en) * | 2012-03-16 | 2012-07-25 | 中国科学院上海光学精密机械研究所 | Simulated light-spot light source for high-power laser system |
| CN102608771B (en) * | 2012-03-16 | 2013-12-25 | 中国科学院上海光学精密机械研究所 | Simulated light-spot light source for high-power laser system |
| CN104793445A (en) * | 2014-01-22 | 2015-07-22 | 海益视系统有限公司 | Focusing device of video camera module, and method |
| CN106768882A (en) * | 2016-12-15 | 2017-05-31 | 中国科学院光电技术研究所 | Optical system distortion measurement method based on shack-Hartmann wavefront sensor |
| CN113124821A (en) * | 2021-06-17 | 2021-07-16 | 中国空气动力研究与发展中心低速空气动力研究所 | Structure measurement method based on curved mirror and plane mirror |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110921 Termination date: 20151216 |
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| EXPY | Termination of patent right or utility model |