CN103743707B - The microscopic method and device of controllable high-speed layer phase separation position - Google Patents
The microscopic method and device of controllable high-speed layer phase separation position Download PDFInfo
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- CN103743707B CN103743707B CN201310721772.XA CN201310721772A CN103743707B CN 103743707 B CN103743707 B CN 103743707B CN 201310721772 A CN201310721772 A CN 201310721772A CN 103743707 B CN103743707 B CN 103743707B
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Abstract
The invention discloses a kind of microscope equipment of controllable high-speed layer phase separation position, including：The d scanning system that is sequentially arranged along sample light light path, the first 4f systems, sample, the 2nd 4f systems；The piezoelectric ceramics control speculum examined in light light path is arranged on, for changing the optical path difference of the sample light light path and reference light light path；Second polarization splitting prism, for by sample light and with reference to combiner；The polarizer and CCD being sequentially arranged along the polarization splitting prism emitting light path.The invention also discloses a kind of microscopic method of controllable high-speed layer phase separation position.Present system stability is higher, and controllability is stronger, and economy is more preferable, can realize the angle scanning of complexity；And the speed for chromatographing phase microscopic system can be improved more than 4 times.
Description
Technical field
The invention belongs to the micro- field of optical ultra-discrimination, more particularly to a kind of microscopic method of controllable high-speed layer phase separation position with
Device.
Background technology
Different cells has different refractive indexes in biological tissue, carries different organization tasks；It is same intracellular
Nucleus, cytoplasm and various organelles have different refractive indexes, when biology vital movement change when, its is corresponding
Cellular refractive index distribution in tissue can also change, such as the increase of cancerous tumor cell refractive index, by the red thin of Infected With Plasmodium
Born of the same parents' index distribution change etc., so the quantitative three-dimensional values to biological cell refractive index are optical microphotograph field and life science
The important problem in one, field.
Observation to the refractive index of cell is different from the observation to fluorescent samples and stained specimens, and cell is nearly at transparent
State, refractive index are mainly reflected in the modulation of light path to light wave modulation, so must pass through the method ability doubling of interference
The rate information of penetrating is acquired, and the method for present refractive index imaging mainly has phase contrast microscopy, interference microscopy, but these methods
One face can only be imaged, and because the change of light path has additive effect, the imaging knot of both microscope modes can be caused
Fruit has very strong noise, can not accurate quantification index distribution.
2007, W Choi proposed a kind of chromatography phase microscopy, 3-D quantitative refractive index imaging are realized, to transparent work
Dynamic biological sample imaging has good effect, can accurately in response sample refractive index distribution situation.It is micro- to chromatograph phase
Art carrys out quantitative measurment phase with the method for four step phase shifts of interference, and a three-dimensional refractive is reconstructed by 120 quantitative phase figures
Rate is distributed.In order to improve the image taking speed of chromatography phase microscopy, W Choi realize per second 10 with acousto-optic modulator phase shift
The acquisition speed of frame.The use of acousto-optic modulator defines the data acquiring frequency of the whole decorum, the control of whole system
Become single, while the acquisition speed of 10 frame per second is still inadequate for the fast-changing biological activity cell of observation, institute
With design a kind of stabilization, controllable, high speed chromatography phase microscope be microoptic imaging and life science one intentionally
The breakthrough of justice.
The content of the invention
The invention provides the microscopic method and device of controllable high-speed layer phase separation position, the piezoelectric ceramics that low-frequency phase should be stablized
The control method of scan round in chromatography phase microscope is applied to, improves sample rate and the operation of chromatography phase microscope
Controllability.The present invention can be with the speed acquisition sample phase information of the most fast frame of 512x512 pixels 50 per second, and system is more steady
Fixed, controllability is stronger, and a kind of power has been provided with for crystal doping processing detection, movable biological sample three dimensional viewing and medical diagnosis on disease
Instrument.
A kind of microscopic method of controllable high-speed layer phase separation position, comprises the following steps：
（1）Laser launches laser beam, and the light beam is expanded by beam expanding lens and is irradiated on speculum, through speculum
The laser transmission half wave plate of reflection enters polarization splitting prism, and it is inclined to rotate p in the half wave plate regulation light beam
Shake the component of light and s polarised lights, light intensity of the adjustment sample road with reference arm；
（2）The reference arm laser, by stationary mirror and piezoelectric ceramics control speculum structure " Z " type light path, pressure
Electroceramics control speculum includes speculum and controls speculum that the piezoelectric ceramics of micro-displacement occurs, and two lens are along light propagation
Direction is placed sequentially in before and after the piezoelectric ceramics control speculum, and two lens form 4f systems, and reference arm is swashed
Light progress is secondary to be expanded, and wherein the front focus of first lens and the rear focus of second lens are anti-in piezoelectric ceramics control
Penetrate on mirror reflecting surface.The piezoelectric ceramics control speculum moves under piezoelectric ceramics control, changes reference arm light path 1/4 every time
The distance of wavelength, realize four step phase shifts；
（3）The sample illumination is mapped to d scanning system, and the d scanning system is mutually hung down by two direction of vibration
The one-dimensional galvanometer directly put is formed, and has two lens between described two one-dimensional galvanometers, forms 4f systems, and two galvanometers are put respectively
Put on focal plane, the sample light passes through d scanning system before and after 4f systems, can be with second one-dimensional vibration mirror reflected point
Scan and rotate for the centre of sphere；
（4）It is described to be incided by the light beam of d scanning system on scanning lens, second one-dimensional scanning galvanometer
Reflecting surface in the focal point of scanning lens, be scanned through that the light beam of lens is parallel with optical axis, focus on rear Jiao of convergent lens
At point, the laser light convergent lens, become the sample that parallel light transmission is located at its front focus；
（5）Received through the light of sample by microcobjective, the rear focus of the microcobjective is with burnt before the convergent lens
Point overlaps, and sample is placed on focal point after the microcobjective, described to be irradiated by the light that microcobjective receives through microscope field lens
To CCD imaging surfaces, the microcobjective field lens forms 4f systems with microcobjective, and the CCD is in Jiao before the microcobjective
Face；
（6）The sample light closes beam with the reference light by polarization splitting prism, closes the light after beam and is united through polarizer
One polarization direction, the polarization splitting prism and polarizer are placed between CCD and microcobjective field lens, CCD shooting record samples
The interference pattern of product road laser and reference arm laser；
（7）The light path system build it is intact in the case of, piezoelectric ceramics control speculum be first in 0 phase difference position,
D scanning system, which rotates, makes angle track transmission sample of the directional light according to setting, meanwhile, the quick shooting images of CCD, scanning
After a cycle, interference image bag p1 is obtained；
（8）Change the position of the piezoelectric ceramics control speculum, reference arm and the optical path difference on sample road is changed successively
1/4 λ, 2/4 λ, 3/4 λ, λ, 1/4 λ, 2/4 λ ..., λ is the wavelength of light beam, repeats such as step（7）In scanning and recording method
Interference image bag p2, p3, p4, p5, p6, p7 ... are obtained successively, using p1, p2, p3,4 adjacent p4 interference image bags, fortune
The phase integral figure under each scanning angle is obtained with four step Phase-shifting algorithms and solution envelope algorithm, then becomes with anti-Radon and gets in return
To the refractive index three-dimensional distribution map at t1 moment；Using interference image bag p2, p3, p4, p5, three-dimensional point of the refractive index at t2 moment is obtained
Butut, by that analogy, three-dimensional record rapidly can be carried out to change sample three-dimensional refractive index distribution.
In system building preferred scheme, the laser sends light beam and expands 3mm through extender lens is with a tight waist；The reference arm
In two lens laser beam expanding is arrived into 10mm or so；The angle of half wave plate is adjusted, makes to incide in polarization splitting prism
Light have 50% reflection, 50% transmission；Convergent lens and microcobjective all use 1.4NA immersion oil lens in sample road, to ensure
Unidirectional maximum scan angle reaches 60 °；When d scanning system applies 0 voltage signal, the optical axis of all lens in system
With light path key light overlapping of axles；
In control method preferred scheme, piezoelectric ceramics is operated in the best section of linear change, demarcates every time mobile reflection
The distance of mirror, realize accurate phase shift；CCD shooting speeds are 5000 frame per second, and the angle scanning cycle is 20ms, and angle is swept
Track is retouched to cover -60 °~60 ° of linear angles scanning illumination.
Present invention also offers a kind of microscope equipment for realizing chromatography phase, including：
（1）Laser, send laser；
（2）The light beam that the laser is sent passes sequentially through beam expanding lens before beam splitting, speculum, half wave plate and
Reflection and transmission occur in the first polarization splitting prism for the first polarization splitting prism, light beam, wherein described reflected light is formed
The reference arm of light path, the transmitted light form the sample road of light path；
（3）Reference light in described reference arm is with passing sequentially through speculum, gathering before the sample combiner on sample road
Focus lens, piezoelectric ceramics control speculum and collimation lens.Wherein, the rear focus weight of the front focus of condenser lens and collimation lens
Close on the pip of piezoelectric ceramics control speculum；
（4）Described sample Lu Yu reference arms pass sequentially through d scanning system, scanning lens before closing beam, assembled thoroughly
Mirror, sample, microcobjective, speculum and micro- field lens, wherein scanning lens, convergent lens, microcobjective, micro- field lens are continuous
Any two form 4f systems, the sweep center point of d scanning system is located at the rear focal point of scanning lens, and sample is located at
At the front focus of convergent lens；Wherein d scanning system is made up of two one-dimensional scanning galvanometers and two parfocal lens, and two
Individual one-dimensional vibration mirror scanning angle is mutually perpendicular to, and is respectively at saturating along the rear focus of paths direction first lens and second
The front focus of mirror, when galvanometer rotates, laser beam can be centered on the pip of second one-dimensional scanning galvanometer, in radiation
Shape rotates；
（5）The sample Lu Guangyu reference arms light closes beam in the second polarization splitting prism, closes the laser light polarization after beam
Piece is incided on CCD imaging surfaces, and CCD imaging surfaces are located on the front focal plane of micro- field lens；
Wherein in preferred scheme, beam expanding lens by the beam expander that laser is sent to 3mm, in reference arm condenser lens with
Collimation lens is by reference arm beam expander to 10mm；Scanning lens uses two inches in sample road, and focal length 150mm is double glued saturating
Mirror；Convergent lens uses 1 inch of entrance pupil, 1.4NA immersion oil lens；Microcobjective uses 1.4NA, 100X immersion oil lens；Micro- thing
Mirror field lens uses two inches, focal length 200mm cemented doublets；
The operation principle of the present invention is as follows：
Laser, which sends laser and expanded through beam expanding lens, to be irradiated on speculum, and half ripple is passed through after being reflected by speculum
Piece is irradiated in the first polarization splitting prism, because the just polarised light that laser is sent is by adjusting the angle of half wave plate
Degree can adjust p in laser beam, s components and then the transflection ratio for adjusting the first polarization splitting prism；
Laser is divided into sample light and reference light at the first polarization splitting prism, reference light be irradiated to successively speculum,
Condenser lens, piezoelectric ceramics control speculum, collimation lens, wherein condenser lens and collimation lens can further expand light beam
Beam, speculum bend light path " Z " type with piezoelectric ceramics control galvanometer, and piezoelectric ceramics can change reference when applying different voltages
The light path on road, moves quarter-wave every time, realizes four step phase shifts；
Sample road laser passes sequentially through d scanning system, scanning lens, convergent lens, sample, microcobjective, speculum
With micro- field lens, wherein d scanning system is made up of two one-dimensional galvanometers and two parfocal lens, two parfocal lens
4f systems are formed, the rotary shaft of two one-dimensional galvanometers is mutually perpendicular to, and respectively in the conjugate planes of 4f systems, one-dimensional is shaken when two
When mirror rotates, light beam can radially rotate using the pip of second lens as the centre of sphere.The reflection of second one-dimensional galvanometer
For point positioned at the focal point of scanning lens, the light when d scanning system rotates through scanning lens is parallel to the poly- of primary optical axis
Jiao Guang, convergent lens form 4f systems with scanning lens, and the light through convergent lens is the directional light of overconvergence lens front focus,
Sample is placed in the front focus of convergent lens, and convergent lens is the immersion oil lens that NA is equal to 1.4, and focal length only has scanning lens
1 percent, so can be with very wide-angle when focus on light that on convergent lens back focal plane and chief ray is parallel with primary optical axis
Scanning transmission sample, -67 °~67 ° of scanning can be realized in theory.Microcobjective forms 4f systems with convergent lens, passes through
The light of sample turns into the light parallel to primary optical axis focused on its front focal plane, microcobjective and microscopic field after entering microcobjective
Mirror forms 4f systems, and the emergent light of micro- field lens is directional light.
Sample light closes beam with reference light at the second polarization splitting prism, closes the laser light polarizer after beam and is irradiated to
On CCD imaging surfaces, wherein CCD imaging surfaces are centrally located at microscope field lens front focus, and adjustment polarizer angle can change dry
Relate to the contrast of striped.
During system operation, setting piezoelectric ceramics voltage be followed successively by V0, V1, V2, V3, V4, V5, V6 ..., make reference arm according to
It is secondary to change light path 1/4 λ, 2/4 λ, 3/4 λ, λ, 1/4 λ, 2/4 λ ..., and in constantly circulation.When voltage is V0, pressure is maintained
Electroceramics voltage is constant, vibration mirror scanning, while CCD is shot, and interference image I is obtained according to scanning track（x,y）0001, I（x,
y）0002, I（x,y）0003, I（x,y）0004, I（x,y）0005……I（x,y）000n, n size sets according to the requirement measured every time
Calmly, later for simplicity general（X, y）Ignore and do not write；Change piezoelectric ceramics voltage arrive V1, maintenance piezoelectric ceramics voltage it is constant,
Vibration mirror scanning, while CCD is shot, and interference image I is obtained according to scanning track1001, I1002, I1003, I1004, I1005……I1000n,
Track is scanned with just the same before, the number of pictures of CCD shootings is also just the same；With reference to this mode, with piezoelectric ceramics
Constantly change obtained data and be followed successively by I2001, I2002, I2003, I2004, I2005……I2000n, I3001, I3002, I3003, I3004,
I3005……I3000n... ..., naming rule represents which figure shot in a cycle, number generation above for three after subscript
Gauge pressure piezoelectric voltage changes number.Phase distribution figure is obtained using the method for four step phase shifts according to obtained interference pattern, formula is
In formula, k represents piezoelectric voltage and changes number, and i represents which figure of shooting in a cycle；
Phase diagram is connected as continuous phase surface by 2-D solution envelope algorithm again, its formula is：
Φ(k,i)=unwrap2(φ(k,i))
Unwrap2 is 2-D solution envelope function, then is by the background process that disappears, its formula
Φ′(k,i)=Φ(k,i)-Φ(0,0)(k,i)-(Φ(i)back-Φ(0,0)(i)back)
Wherein, Φ (i)backThe background phase figure obtained in the case of for no sample, Φ (0,0) (k, i) are Φ (k, i)
The phase value of phase image most upper left point, Φ (i)backTo be not added with the background phase figure of sample, Φ (0,0) (i)backFor background phase
The phase value of bit image most upper left point.By subtract upper left angle phase value can intialization phase starting point, set for all phase diagrams
Fixed unified standard.
When kth time change piezoelectric ceramics voltage is obtained after above-mentioned processing, the phase distribution figure under n+1 transmission angle
Φ (k, 0~n), n+1 phase transmission angle θ (0~n) according to scanning track be to determine or can be asked according to interference image
, it is that cocoa obtains by two-dimentional Radon conversion, the three-dimensional refractive index distribution of sample when kth time changes piezoelectric ceramics voltage.Assuming that
Piezoelectric ceramics changes primary voltage per 20ms, you can realizes 50Hz three dimensional Phase information record, and 20ms response cycle
For stable control can be realized for piezoelectric ceramics.
Compared with prior art, the present invention has technique effect beneficial below：
（1）The stability of a system is higher, and controllability is stronger, and economy is more preferable, can realize the angle scanning of complexity；
（2）The speed for chromatographing phase microscopic system can be improved more than 4 times；
（3）Apparatus structure is succinct, and fast and easy adjusts in high precision.
Brief description of the drawings
Fig. 1 is the structural representation of the microscope equipment of the controllable high-speed layer phase separation position of the present invention；
Fig. 2 is the structural representation of d scanning system in the micro- device in the controllable high-speed layer phase separation position of the present invention；
Fig. 3 is controllable high-speed layer phase separation position afm signal control mode schematic diagram.
Embodiment
As shown in figure 1, a kind of microscope equipment of high speed controllable layer phase separation position, including：Laser 1, beam expanding lens 2, speculum
3, half wave plate 4, the first polarization splitting prism 5, speculum 6, condenser lens 7, piezoelectric ceramics control speculum 8, collimation
Lens 9, d scanning system 10, scanning lens 11, convergent lens 12, sample 13, microcobjective 14, speculum 15, microscopic field
Mirror 16, the second polarization splitting prism 17, polarizer 18, CCD19；As shown in Fig. 2 d scanning system 10 is by one-dimensional scanning lens
101, lens 102, lens 103, one-dimensional scanning lens 104 form.
Wherein, laser 1 sends laser beam, and light beam is expanded by beam expanding lens 2 and is irradiated on speculum 3, by reflection
The laser that mirror 3 reflects, transmission half wave plate 4, is irradiated on the first polarization splitting prism 5, by adjusting half ripple
The angle of piece 4 can change s in light beam, the ratio of p-polarization light, and then adjust the first polarization splitting prism 5 to laser beam
Transflection ratio, wherein the light of the first polarization splitting prism 5 reflection forms system reference road, the transmission of the first polarization splitting prism 5
Light forms the sample road of system.
The illumination of first polarization splitting prism 5 reflection is mapped on speculum 6, and the light transmission reflected through speculum 6 focuses on saturating
Mirror 7 focuses on piezoelectric ceramics control speculum 8 surface, and the light transmission collimation lens 9 reflected through piezoelectric ceramics control speculum 8 becomes
Into directional light.Wherein, when applying voltage change trickle movement can occur for piezoelectric ceramics control speculum 8, pass through demarcation
It can realize and change the λ of reference arm light path 1/4 every time, realize four step phase shifts.
The transmitted light of first polarization splitting prism 5 is irradiated in d scanning system 10, the middle two-dimensional scan according to Fig. 2
System construction drawing, laser are irradiated on one-dimensional scanning galvanometer 101, and the reflected light of one-dimensional scanning galvanometer 101 is irradiated to lens 102
On, the pip of one-dimensional scanning galvanometer 101 is located at the rear focal point of one-dimensional lens 102, and lens 102 and 103 form 4f systems, and one
The pip of dimension scanning galvanometer 104 is located in the rear focus of lens 103, and directional light is incided in d scanning system 10, can
Exiting parallel, when two one-dimensional scanning galvanometers 101 and 104 rotate, collimated light beam can be with the reflection of one-dimensional scanning galvanometer 104
Radially rotated centered on point.The emergent light of d scanning system 10 is irradiated on scanning lens 11, wherein scanning lens 11
The rear focus one-dimensional scanning galvanometer 104 that is located at d scanning system 10 pip on, focused on through the light of scanning lens 11
On the back focal plane of convergent lens 12, wherein scanning lens 11 forms 4f systems, the outgoing of convergent lens 12 with convergent lens 12
Light was the directional light of its front focus, before convergent lens 12 uses NA1.4 immersion oil lens, sample 13 to place convergent lens 12
Focal point, -60 °~60 ° of angle scanning can be realized to sample 13 by the scanning of d scanning system 10.Microcobjective 14 is
1.4NA, 100X microcobjective form 4f systems with convergent lens 12, and the illumination that microcobjective 14 receives is mapped to speculum 15
On, sample light is irradiated to after speculum reflects on micro- field lens 16, and micro- field lens 16 forms 4f systems, sample with microcobjective 14
Product light after micro- field lens 16 by microcobjective field lens front focus directional light.
Sample arm closes beam with reference path at the second polarization splitting prism 17, closes the light after beam and is shone through polarizer 18
It is mapped on CCD19 imaging surfaces, CCD19 imaging surfaces center overlaps with the rear focus of microscope field lens 16, and polarizer 18 can be unified
Polarization direction, the interference of sample road and reference arm is realized, when changing the angle of polarizer 18, the saturating of s light and p light can be adjusted
It is excessive, and then adjust the contrast of interference fringe.
During system operation, the control of the signal of system is as shown in figure 3, I is CCD control signals, each pulse signal, CCD
Piece image is gathered, the frequency in Fig. 3 I is only to signify frequency, and specific frequency is depending on sample complexity；II is piezoelectric ceramics
Control voltage signal, v1, v2, v3, v4, piezoelectric ceramics is represented respectively under voltage control, the light path of reference arm changes respectively
1/4 λ, 2/4 λ, 3/4 λ, λ, realize four step phase shifts；III is vibration mirror scanning signal, is scanned every time during scanning for one direction, during backhaul
Between account for whole cycle very little ratio, piezoelectric ceramics control voltage signal changed in the time of primary voltage, one week of vibration mirror scanning
Phase.The image data of vibration mirror scanning a cycle shooting is the data under same phase difference, and continuous four intermittent scannings obtain
The complete four steps phase shift of image construction one three-dimensional refractive index distribution raw data packets, the cycle is circulation during due to whole scanning
, so the time required to three-dimensional refractive index distribution single-frame images picking rate is vibration mirror scanning a cycle.
Claims (6)
- A kind of 1. microscope equipment of controllable high-speed layer phase separation position, it is characterised in that including：Laser, and beam expanding lens, speculum, half wave plate and the first polarization spectro rib being sequentially arranged along laser light path Mirror；First polarization splitting prism is used to the laser light path being divided into sample light light path and reference light light path；The d scanning system that is sequentially arranged along sample light light path, the first 4f systems, sample, the 2nd 4f systems；The two dimension is swept Retouch system to be made up of two one-dimensional scanning galvanometers and two parfocal lens, the scanning angle of described two one-dimensional galvanometers is mutually hung down Directly；The piezoelectric ceramics control speculum being arranged in reference light light path, for changing the sample light light path and reference light light path Optical path difference；The piezoelectric ceramics control speculum includes speculum and controls the piezoelectric ceramics of speculum generation micro-displacement；Second polarization splitting prism, for by sample light and with reference to combiner；The polarizer and CCD being sequentially arranged along the second polarization splitting prism emitting light path.
- 2. the microscope equipment of controllable high-speed layer phase separation position as claimed in claim 1, it is characterised in that the first described 4f systems Including the scanning lens and convergent lens being sequentially arranged；The 2nd 4f systems include the microcobjective and microscopic field being sequentially arranged Mirror.
- 3. the microscope equipment of controllable high-speed layer phase separation position as claimed in claim 2, it is characterised in that the scanning lens uses Two inches, focal length 150mm cemented doublets；The convergent lens uses 1 inch of entrance pupil, 1.4NA immersion oil lens；The micro- thing Mirror uses 1.4NA, 100X immersion oil lens；The micro- field lens uses two inches, focal length 200mm cemented doublets.
- 4. a kind of microscopic method of controllable high-speed layer phase separation position, it is characterised in that comprise the following steps：1) laser launches laser beam, and the light beam is expanded by beam expanding lens and is irradiated on speculum, reflected through speculum Laser transmission half wave plate enter polarization splitting prism, rotate the half wave plate and adjust p-polarization light in light beam With the component of s polarised lights, light intensity of the adjustment sample road with reference arm；Light beam on sample road is focused on sample, and collects the transmitted light through sample, by the light beam in reference arm and institute Transmission combiner is stated, is interfered behind unified polarization direction, recycles CCD collection interference patterns；Light beam on the sample road is irradiated to d scanning system, and the d scanning system is mutually hung down by two direction of vibration The one-dimensional galvanometer directly put forms, and has two lens between described two one-dimensional galvanometers；2) according to the λ of optical path difference knots modification 1/4,2/4 λ, 3/4 λ, λ, successively and the light path of sample road and reference arm described in varying cyclically Difference, and in each change, sample is scanned using the light beam on the sample road, collected and each light by CCD The corresponding interference image bag pi of path difference knots modification；Described reference arm is provided with the piezoelectric ceramics control speculum for the optical path difference for being used to change the sample road and reference arm；Institute The piezoelectric ceramics that the piezoelectric ceramics control speculum stated includes speculum and controls speculum that micro-displacement occurs；3) using interference image bag pi as starting point, pi, p (i+1), p (i+2) are extracted successively, four interference image bags of p (i+3), is used Four step Phase-shifting algorithms obtain the phase integral figure under each scanning angle with solution envelope algorithm, then convert to obtain with anti-Radon The refractive index three-dimensional distribution map at corresponding moment.
- 5. the microscopic method of controllable high-speed layer phase separation position as claimed in claim 4, it is characterised in that described sample road and ginseng Examine and formed after routeing the beam expander that same laser is sent through polarization splitting prism beam splitting.
- 6. the microscopic method of controllable high-speed layer phase separation position as claimed in claim 5, it is characterised in that what the laser was sent Beam expander closes beam to beam splitting after 3mm after beam expander in the reference arm to 10mm with the light beam on the sample road.
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| CN85102287B (en) * | 1985-04-01 | 1987-05-20 | 中国科学院长春光学精密机械研究所 | Measure device for minimal optical path difference |
| CN100403087C (en) * | 2006-09-26 | 2008-07-16 | 浙江大学 | Digital micro-lens components based interference-free parallel OCT imaging method and system |
| WO2009009081A2 (en) * | 2007-07-10 | 2009-01-15 | Massachusetts Institute Of Technology | Tomographic phase microscopy |
| CN102507020B (en) * | 2011-11-01 | 2013-05-08 | 南京理工大学 | Microlens array-based synchronized phase-shifting interference test method and test device |
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