CN106872469B - A kind of chromatography phase microscopic method and device based on corner-sharing interference - Google Patents
A kind of chromatography phase microscopic method and device based on corner-sharing interference Download PDFInfo
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Abstract
The present invention discloses a kind of chromatography phase microscope equipment and method based on corner-sharing interference, including laser, scanning galvanometer system and the first beam splitter being sequentially arranged, laser beam is divided into reference light and sample light by the first beam splitter: equipped with what is be sequentially arranged along sample arm: illumination objective lens, for making illumination light become parallel light sample；Image-forming objective lens, for receiving the sample light of sample reflection；Equipped with what is be sequentially arranged along reference path: the first reflecting mirror changes reference path light path by periodically mobile self-position；Compensator, for compensating the optical path difference between reference path and sample arm；Second beam splitter, for the sample light of reference light and sample reflection to be carried out conjunction beam；And image acquisition units, the interference image generated for recording reference light and sample light；Further include computer, according within the first reflecting mirror each period Multiple-Scan sample record obtain multiple interference image packets, solve the sample three-dimensional refractive index distribution map in the corresponding period.
Description
Technical field
The invention belongs to the micro- field of super-resolution optical, in particular to the chromatography phase microscopic method of a kind of corner-sharing interference and
Device.
Background technique
In micro-imaging, the index distribution of sample has served very important.Firstly, refractive index is as a kind of day
Right label discloses the special construction of cell interior；Secondly, optical heterogeneity influences the light path that sample generates, thus directly
Image quality is influenced, therefore the 3D index distribution of quantitative measurment sample is most important.It is glimmering in fluorescence-based microtechnic
The Iimaging Stability of effect and phototoxicity impact cell sample and system that light blob generates sample.And it is aobvious based on phase
Microtechnology, the influence such as differential interference contrast's microscopy and phasecontrast microscope to sample is minimum, but this typical transmission
Formula phase imaging method only can measure the mean refractive index of sample and can not differentiate to the refractive index of axial direction.Refractive index
3d space variation be first by chromatography phase microscopy (TPM) measurement, this technology based on measurement along multiple directions
Refractive index projection.
In order to reconstruct a chromatography phase diagram, it is necessary to record the phase information of sample in different directions.Usually by with
In it is quantitative reply wavefront phase information method include phase shift method, fringe-adjusted technology and intensity transmission equation method.At these
In method, phase shift method is most accurate and is influenced a kind of the smallest method by strength non-uniformity.It is rolled in measurement along multiple directions
Main method there are two types of penetrating in the projection of rate: change direction or the rotation sample of illumination light.Although illumination light scanning method
The coverage area of angle in one dimension is smaller than sample rotates method, but two-dimensional angle scanning may be implemented in this method,
Keep sample in the TPM device of illuminated scan, the angle of reference path be it is fixed, therefore, when sample wall optical path tilt
When, the phase information that sample introduces will be inclined by phase background and flood, and introducing ambient noise will affect resolution ratio.With oblique illumination
Relevant phase background will reduce detectable phase gradient, and especially when light angle is very big, this influence is more significant.
The striped and background that phase introduces mix the uniformity that will affect wavefront, to reduce the accuracy of measurement phase.
Summary of the invention
The present invention provides a kind of chromatography phase microscopic methods and device based on corner-sharing interference.In the apparatus of the present
The optical path of reference arm and sample arm is set to carry out corner-sharing scanning around sample with identical angle, to ensure that in large angle illumination
It is suitable when the recovery precision of Shi Xiangwei is with vertical incidence.The signal of PZT control simultaneously uses sawtooth signal, reduces it because voltage is cut
Changing leads to shake bring interference, and system more stable precision, sample phase acquisition of information speed is per second up to 50 frames, living in three-dimensional
Body bio-imaging, diagnosing tumor and material Defect Detection etc. be biomedical and materials science field in be widely used before
Scape.
The specific technical solution of the present invention is as follows:
It is a kind of based on corner-sharing interference chromatography phase microscope equipment, including be sequentially arranged laser, scanning galvanometer system
With the first beam splitter, laser beam is divided into reference light and sample light by first beam splitter；
Equipped with what is be sequentially arranged along sample arm:
Illumination objective lens, for making illumination light become parallel light sample；
Image-forming objective lens, for receiving the sample light of sample reflection；
Equipped with what is be sequentially arranged along reference path:
Movable first reflecting mirror changes reference path light path by periodically mobile self-position；
Compensator, for compensating the optical path difference between reference path and sample arm；
Second beam splitter, for the sample light of reference light and sample reflection to be carried out conjunction beam；
And image acquisition units, the interference image generated for recording reference light and sample light；
Further include computer, according within the first reflecting mirror each period Multiple-Scan sample record obtain multiple interference patterns
As packet, the sample three-dimensional refractive index distribution map in the corresponding period is solved.
Preferably, half wave plate is arranged between the laser and scanning galvanometer system, for adjusting laser
Linear polarization it is consistent with sample light light intensity to make reference light to change the beam intensity ratio of reference light Yu sample light, to obtain most
Good comparison interference fringe.
Preferably, first beam splitter and the second beam splitter is all made of polarization splitting prism.
Preferably, the compensator is glass stack made of being stacked as several sheet glass.In order to enable reference light
Road and sample arm optical path difference generate interference in relevant wavelength range, so sheet glass heap is added as light in reference light
Journey compensation, adjusts optical path difference between reference light and sample light, keeps its almost the same.
Preferably, further including the piezoelectric ceramics being mounted on the first reflecting mirror, for described in periodical linear movement
The first reflecting mirror.
Preferably, the control signal of the piezoelectric ceramics uses sawtooth signal, it can be reduced because voltage switching is led
Cause shake bring interference.
Preferably, the image acquisition units include setting gradually along optical path:
Field lens, for sample light and reference light to be imaged；
Polarizing film, for changing the contrast for the interference pattern that sample light and reference light generate；
CCD, the interference image generated for recording reference light and sample light.
The present invention also provides a kind of chromatography phase microscopic methods based on corner-sharing interference, comprising steps of
1) laser beam beam splitting be sample light and reference light,
2) sample optical illumination sample is utilized, the sample light and reference light for collecting sample scattering generate interference image；
3) control reference path light path is in cyclically-varying, and compensates the light that reference path is generated relative to sample arm
Journey；
4) in each period of change P of reference path light path, control reference light and sample light with identical angle around
Sample carries out corner-sharing and scans multiple periods；
5) the interference image packet for belonging to each scan period in a change in optical path length period P is collected, each light path is calculated
The refractive index three-dimensional distribution map of sample in period of change P.
Preferably, obtaining sample according to the refractive index three-dimensional distribution map of sample in continuous multiple change in optical path length period P
The distribution map that the three-dimensional refractive index of product changes over time.
Preferably, in the step 5), with four step phase-shifting methods and 2 π phase ambiguity overcoring method --- phases
Unwrapping method calculation interferogram picture corresponding phase integral figure under each scanning angle recycles Radon inverse transformation to obtain often
The refractive index three-dimensional distribution map of sample in a time cycle P.
The principle of the present invention is as follows:
The laser that laser issues becomes point light source after single mode optical fiber filters, and then becomes flat by the first collimated
Half wave plate is penetrated after row light, since the light that laser issues is linearly polarized light, therefore can by rotation half wave plate
To change the polarization direction of laser linearly polarized light, so as to adjust through the divided reference light of the first polarization spectroscope below and sample light
Beam intensity ratio changes the exit direction of directional light through the directional light of half wave plate, so after 2-D vibration mirror scanning system
It is divided to form reference light and sample light by the first polarization spectroscope afterwards；
Reference light successively passes through the second lens and converges on the first reflecting mirror of piezoelectric ceramics control, thoroughly using the 4th
Through the glass stack of compensation optical path after mirror, the 6th lens, it is then incident on the second polarization spectroscope；
Sample light is scanned lens post-concentration to illumination objective lens back focal plane, when 2-D vibration mirror scanning system carries out one-dimensional sweep
When retouching, the focused light spot for being scanned lens will carry out one-dimensional linear scanning on illumination objective lens back focal plane, by illumination objective lens
After become parallel light sample, and illumination sample is scanned in a manner of triangle, as shown in figure 5, illumination objective lens use NA for 1.4
Immersion oil object lens (noil=1.518), the scanning range of light angle α is -60 °~60 ° (theoretically can reach -67 °~67 °),
Its angle scanning range can be realized by the way that the direction 2-D vibration mirror scanning system y (or the direction the x) scanning range of front is arranged, and be illuminated
The phase information that carry sample after light transmission sample is received by image-forming objective lens, is then reflected into the second polarization point by reflecting mirror
On light microscopic；
Reference light and sample light become directional light after being incident on field lens after the second polarization spectroscope closes beam, then pass through
It crosses after polarizing film and interference pattern is recorded by CCD.
In the control of optical system, the control voltage of piezoelectric ceramics is by V1And V2It determines, voltage input signal is the period to be
The sawtooth signal (as shown in Figure 2) of P (100ms):Wherein,It indicates
X is rounded downwards, in one cycle, the first reflecting mirror linear movement of piezoelectric ceramics control makes reference light generate a wavelength
Light path knots modification, movement speedAt the same time, the scan period of 2-D vibration mirror scanning system is P/4
(25ms) controls signal as shown in figure 3, may be expressed as:Wherein, θuAnd θd
Indicate the maximum scan angle on 2-D vibration mirror both sides；During scanning, speed CCD per second with 5000 frames, sampled signal is such as
Shown in Fig. 4, image caused by fast recording reference light and the sample interference of light.
In the face CCD, sample light and reference light can be respectively indicated in t moment, the light field of spatial position (x, y) are as follows:
Wherein, φ (x, y, t)=φ (x, y, t+P/4) is the phase of sample, kmIndicate that the wave vector in medium, ω indicate
Light wave angular frequency AsIndicate sample light amplitude, ArIt indicates to refer to light amplitude, θxAnd θyIndicate sample light and x and y-axis angle
Complementary angle, M are the amplification factor of system.The interference strength of reference light and sample light may be expressed as:
Therefore just CCD can record within the scope of 4 groups of 2-D vibration mirror scanning system angle scannings in a piezoelectric ceramics period P
The interference pattern that n (n is depending on the sample frequency of CCD and the ratio between the scan frequency of 2-D vibration mirror scanning system) a light angle generates
As packet S1 (I11, I12..., I1n), S2 (I21, I22..., I2n), S3 (I31, I32..., I3n), S4 (I41, I42..., I40n), therefore
4 intensity under a light angle of i-th (i=1,2 ..., n) may be expressed as:
Using four step phase-shifting methods, phase diagram under available i-th of light angle:
Wherein, angle (x) is the function for seeking x phase.Then 2 π phases are released using two-dimensional phase unwrapping method
Phase ambiguity makes phase diagram become continuous phase bitmap, and calculating is expressed as:
Wherein, unwrap2 (x) is a function to x unwrapping.Sample is then taken out, is equally asked with the aforedescribed process
It obtains containing only the phase having powerful connectionsUsing background null method, α can be obtainediThe accurate phase of sample, side under angle
Method indicates are as follows:
Benefit can solve within the scope of -60 °~60 ° scanning light angles the accurate of sample under n angle with the aforedescribed process
Phase distribution.Then recycle inverse Radon transform that can calculate each spatial position (x of samples,ys,zs) in chromatography refractive index
It is distributed n (xs,ys,zs), chromatography distribution can be reconstructed into the three-dimensional refractive index distribution map of sample using algorithm.
Within the different piezoelectric ceramics periods, benefit with the aforedescribed process, roll over by the three-dimensional reconstructed under available different moments
Rate distribution map is penetrated, so as to the moving situation for observing living body biological cell.
Compared with prior art, the invention has the following beneficial technical effects:
(1) sample light and reference light are interfered using corner-sharing, and it is multiple to improve phase for the ambient noise introduced when can reduce oblique illumination
Former precision；
(2) piezoelectric ceramics in reference path is controlled using linear voltage, and piezoelectricity is made pottery when can reduce ccd signal acquisition
Noise caused by porcelain is shaken improves the accuracy of system stability and phase retrieval；
(3) step voltage signal is used relative to original piezoelectric ceramics, the present invention is controlled using sawtooth signal, reduced
Piezoelectric ceramics voltage jump change frequency, can extend piezoelectric ceramics service life；
(4) system imaging speed depends on mechanical control movement mechanism, and piezoelectric ceramics uses sawtooth signal in reference light
Control is conducive to improve system imaging speed, to improve the temporal resolution of dynamic sample phase recovery；
(5) system apparatus arrangements are compact, are conducive to modularization；
Detailed description of the invention
Fig. 1 is a kind of embodiment schematic diagram of the chromatography phase microscopic method of the invention based on corner-sharing interference；
Fig. 2 is the voltage control signal schematic diagram of piezoelectric ceramics；
Fig. 3 is the voltage control signal schematic diagram of 2-D vibration mirror scanning system；
Fig. 4 is the signal control schematic diagram of ccd image acquisition；
Fig. 5 is under the control of 2-D vibration mirror scanning system, and optical path scanning angle on sample changes schematic diagram.
Specific embodiment
Below with reference to embodiment and attached drawing, the present invention will be described in detail, but the present invention is not limited to this.
Chromatography phase microscope equipment as shown in Figure 1, comprising:
He-Ne laser 1, for issuing the laser of 632.8nm wavelength；
Single mode optical fiber 2 makes it become ideal point light source for carrying out pin-hole filter-ing to laser；
First lens 3 are used for collimation laser；
Half wave plate 4, for adjusting the linear polarization of laser, the polarized component of P light and S light changes reference
The beam intensity ratio of light and sample light；
Scanning galvanometer system, it is saturating by the first one-dimensional scanning galvanometer 5, the second one-dimensional scanning galvanometer 8, the second lens 6 and third
Mirror 7 forms；First one-dimensional scanning galvanometer 5 and the second one-dimensional scanning galvanometer 8, for changing the angle between laser and optical axis；Second
Lens 6 and the third lens 7 make first for constituting 4f system with the first one-dimensional scanning galvanometer 5 and the second one-dimensional scanning galvanometer 8
One-dimensional scanning galvanometer accurate imaging is on the second one-dimensional scanning galvanometer；
First polarization splitting prism 9, for laser beam to be divided into reference light and sample light；
4th lens 10 and the 5th lens 12, for constituting 4f system with piezoelectric ceramics；
First reflecting mirror 11 of piezoelectric ceramics, the light path for periodically-varied reference path are installed；
6th lens 13 constitute 4f system with the 5th lens 12 and piezoelectric ceramics；
Glass stack 14, the light path generated for compensating reference light relative to sample in sample arm；
Scanning lens 16, for making sample light be focused at illumination objective lens back focal plane；
Illumination objective lens 17, for making illumination light become parallel light sample；
Sample 18, for being imaged；
Image-forming objective lens 19, for receiving the scattering light of sample sending；
Second reflecting mirror 20, for sample light to be reflected into and the same optical path of reference light；
Second polarization spectroscope 15, for reference light and sample light to be carried out conjunction beam；
Field lens 21, for sample light and reference light to be imaged onto CCD；
Polarizing film 22, for changing the contrast for the interference pattern that sample light and reference light generate；
CCD23, the interference image generated for recording reference light and sample light；
Computer 14, for controlling piezoelectric ceramics, the Image Acquisition of d scanning system and CCD.
The course of work of the present embodiment middle layer phase separation position microscope equipment is as follows:
(1) laser 1 launches laser beam, and light beam is incident on the first lens 3 and carries out after the filtering of single mode optical fiber 2
Collimation becomes directional light, and the directional light after collimation enters the linear polarization that half wave plate 4 changes polarization laser, rotation two
/ mono- wave plate 4 adjusts the polarized component of P-polarized light and S polarized light, and then it is equal with sample arm optical path light intensity to adjust reference arm；
(2) directional light transmitted by half wave plate 4 changes parallel light emergence angle through a d scanning system, and two
Galvanometer scanning system is tieed up by 8 groups of the orthogonal first one-dimensional scanning galvanometer 5 in two scanning directions and the second one-dimensional scanning galvanometer
At placing the second lens 6 and the third lens 7, placement location between 5 second one-dimensional scanning galvanometer 8 of the first one-dimensional scanning galvanometer
A 4f system is formed, i.e. 5 second one-dimensional scanning galvanometer 8 of the first one-dimensional scanning galvanometer is placed on the focal plane of 4f system front and back, warp
It crosses and carries out conical scan by the centre of sphere of 8 reflection point of the second one-dimensional scanning galvanometer by the directional light of d scanning system outgoing, and pass through
The transmission of first polarization spectroscope 9 and reflection are respectively classified into reference light and sample light；
(3) reference light transmitted is incident on 10 post-concentration of the 4th lens to the first reflecting mirror 11 for being equipped with piezoelectric ceramics
On, focus is overlapped with 8 reflection point of the second one-dimensional scanning galvanometer after the 4th lens 10, and when piezoelectric ceramics not upper voltage, first is anti-
The reflection point for penetrating mirror 11 is located on the front focal plane of the 4th lens 10, and the first reflecting mirror 11 is mobile under the control of piezoelectric ceramics to be changed
Reference path light path, piezoelectric ceramics each period make reference light change the light path of a wavelength, reflect through the first reflecting mirror 11
Reference light becomes directional light, the 5th lens 11 and the confocal formation 4f system of the 4th lens 10 after being incident on the 5th lens 12；
(4) directional light transmitted through the 5th lens 12 is assembled through the 6th lens 13, and converging light is by one by divided glass
Glass stack made of piece heap 14 is folded is to compensate the light path that sample arm generates；
(5) burnt after scanning lens 16 post-concentration to illumination objective lens 17 through the sample light of the first polarization spectroscope 9 reflection
On face, after be incident on illumination objective lens and become parallel light sample 18, illumination objective lens 17 and scanning lens 16 are confocal, sample 18
On the focal plane of illumination objective lens 17, the light that sample 18 to be illuminated issues is anti-through the second reflecting mirror after being received by image-forming objective lens 19
20 are penetrated, image-forming objective lens 19 and illumination objective lens 17 are confocal；
(6) the sample light and the reference light reflected is incident on field lens 21 after the second polarization spectroscope 15 closes beam
On, field lens 21 and image-forming objective lens 19 and the 6th lens 13 are confocal, sample light and reference light formed after field lens 21 and optical axis at
The parallel reference light and sample light of equal angular, parallel reference light and sample light be incident on after polarizing film 22 be placed in it is described
It generates interference on CCD23 on 21 front focal plane of field lens to be imaged, reference light is adjusted in rotatory polarization piece 22 and sample light exists
Interference pattern contrast on CCD23 reaches highest；
(7) scan frequency and scanning mode of the travel frequency of piezoelectric ceramics and 2-D vibration mirror scanning system are by computer 24
Software Labview control, carries out linear movement under the driving of piezoelectric ceramics sawtooth voltage signal (as shown in Figure 2) with period P,
The change in optical path length for generating reference arm relative sample arm linearly in this period P；2-D vibration mirror scanning system with the P/4 period into
Row scanning (as shown in Figure 3), i.e., 2-D vibration mirror scanning system scans sample arm within a period of motion of piezoelectric ceramics
Four periods, CCD23 fast recording (sampled signal is as shown in Figure 4) 2-D vibration mirror scanning system are different within four scan periods
4 interference image packets S1, S2, S3 and the S4 obtained when illuminating sample under light angle；With four step phase-shifting methods and 2 π phase modes
Paste overcoring method --- phase unwrapping winding calculates corresponding phase integral figure under each scanning angle, recycles Radon inverse transformation
Obtain the refractive index three-dimensional distribution map of sample in first time cycle P；
(8) piezoelectric ceramics repeats the scanning and recording method of step (7) under the voltage signal driving of next cycle P,
Next group of 4 interference images packet S5, S6, S7 and S8 are successively obtained, the sample three-dimensional refractive index in corresponding period P is equally solved
Distribution map；And so on, the distribution map that can be changed over time with the three-dimensional refractive index of quick obtaining biopsy samples.
In the optical system built, each adjacent two lens form a 4f system；The 4th in reference path is saturating
The sum of focal length of mirror 10, the 5th lens 12 and the 6th lens 13 in sample arm scanning lens 16, illumination objective lens 16 and at
The sum of focal length as object lens 19 is equal, to guarantee that reference light and sample light light path are almost the same, while meeting the 5th lens 12
The product of 10 focal length of the 4th lens of focal distance ratio and 13 focal length of the 6th lens be equal to 17 focal distance ratio scanning lens of illumination objective lens, 16 focal length with
The product of 19 focal length of image-forming objective lens, to guarantee that reference light and sample light spot size are consistent on CCD；Illumination objective lens 17 and imaging
Object lens 19 use the immersion oil microcobjective of 1.49NA and 100X；Piezoelectric ceramics selects linear work area, and moving period is
100ms, 2-D vibration mirror scanning angle range are -60 °~60 °, and CCD image taking speed is that 5000 frames are per second.
The foregoing is merely preferable implementation examples of the invention, are not intended to restrict the invention, it is all in spirit of that invention and
Within principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (9)
1. it is a kind of based on corner-sharing interference chromatography phase microscope equipment, including be sequentially arranged laser, scanning galvanometer system and
Laser beam is divided into reference light and sample light by first beam splitter by the first beam splitter, it is characterised in that:
Equipped with what is be sequentially arranged along sample arm:
Illumination objective lens, for making illumination light become parallel light sample；
Image-forming objective lens, for receiving the sample light of sample reflection；
Equipped with what is be sequentially arranged along reference path:
Movable first reflecting mirror changes reference path light path by its periodically mobile position；
Compensator, the compensator is glass stack made of being stacked as several sheet glass, for compensating reference path and sample
Optical path difference between optical path；
Second beam splitter, for the sample light of reference light and sample reflection to be carried out conjunction beam；Sample light and reference light are after field lens
It is formed and optical axis is at the parallel reference light and sample light of equal angular, parallel reference light and sample light are incident on after polarizing film
Interference is generated on the CCD being placed on the field lens front focal plane to be imaged；
And image acquisition units, the interference image generated for recording reference light and sample light；
Further include computer, according within the first reflecting mirror each period Multiple-Scan sample record obtain
Multiple interference image packets solve the sample three-dimensional refractive index distribution map in the corresponding period.
2. chromatography phase microscope equipment as described in claim 1, it is characterised in that: in the laser and scanning galvanometer system
Between be arranged half wave plate, for adjusting the linear polarization of laser, to change the beam intensity ratio of reference light Yu sample light.
3. chromatography phase microscope equipment as described in claim 1, it is characterised in that: first beam splitter and the second beam splitting
Device is all made of polarization splitting prism.
4. chromatography phase microscope equipment as described in claim 1, it is characterised in that: further include being mounted on the first reflecting mirror
Piezoelectric ceramics, for the first reflecting mirror described in periodical linear movement.
5. chromatography phase microscope equipment as claimed in claim 4, it is characterised in that: the control signal of the piezoelectric ceramics uses
Sawtooth signal.
6. chromatography phase microscope equipment as described in claim 1, it is characterised in that: the image acquisition units include along light
What road was set gradually:
Field lens, for sample light and reference light to be imaged；
Polarizing film, for changing the contrast for the interference pattern that sample light and reference light generate；
CCD, the interference image generated for recording reference light and sample light.
7. a kind of chromatography phase microscopic method based on chromatography phase microscope equipment described in claim 1, it is characterised in that: packet
Include step:
1) laser beam beam splitting is sample light and reference light；
2) sample optical illumination sample is utilized, the sample light and reference light for collecting sample scattering generate interference image；
3) control reference path light path is in cyclically-varying, and compensates the light path that reference path is generated relative to sample arm；
4) in each period of change P of reference path light path, reference light and sample light are controlled with identical angle around sample
It carries out corner-sharing and scans multiple periods；
5) the interference image packet for belonging to each scan period in a change in optical path length period P is collected, each change in optical path length is calculated
The refractive index three-dimensional distribution map of sample in period P.
8. chromatography phase microscopic method as claimed in claim 7, it is characterised in that: according to continuous multiple change in optical path length periods
The refractive index three-dimensional distribution map of sample in P, obtains the distribution map that the three-dimensional refractive index of sample changes over time.
9. chromatography phase microscopic method as claimed in claim 8, it is characterised in that: in the step 5), with four steps
Phase-shifting method and 2 π phase ambiguity overcoring methods --- phase unwrapping winding calculation interferogram picture corresponding phase under each scanning angle
Position integrogram, recycles Radon inverse transformation to obtain the refractive index three-dimensional distribution map of sample in each time cycle P.
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| CN110411333A (en) * | 2019-06-28 | 2019-11-05 | 北方工业大学 | Novel laser polarization phase shift interference chromatography measuring device and method |
| US11561389B2 (en) * | 2019-12-27 | 2023-01-24 | The Chinese University Of Hong Kong | High spatial and temporal resolution synthetic aperture phase microscopy (HISTR-SAPM) |
| CN113758901B (en) * | 2020-06-04 | 2024-04-12 | 中国科学院苏州纳米技术与纳米仿生研究所 | Diffraction tomography microscopic imaging system and method |
| CN114397089B (en) * | 2021-11-03 | 2023-11-14 | 深圳技术大学 | Lens testing method based on wave surface interference information |
| CN115541599B (en) * | 2022-11-30 | 2023-01-31 | 常州微亿智造科技有限公司 | Defect detection method and system based on optical coherence tomography |
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