CN106500602A - Helium neon laser nano surveys ruler system - Google Patents
Helium neon laser nano surveys ruler system Download PDFInfo
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- CN106500602A CN106500602A CN201610896736.0A CN201610896736A CN106500602A CN 106500602 A CN106500602 A CN 106500602A CN 201610896736 A CN201610896736 A CN 201610896736A CN 106500602 A CN106500602 A CN 106500602A
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- reflecting surface
- prism
- hysteroscope
- corner cube
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/07—Construction or shape of active medium consisting of a plurality of parts, e.g. segments
- H01S3/073—Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers
- H01S3/076—Folded-path lasers
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- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
This application discloses a kind of helium neon laser nano surveys ruler system, including movable measuring staff, the helium neon laser containing corner cube prism refrative cavity and data acquisition process unit, helium neon laser includes that right-angle reflecting prism, corner cube prism hysteroscope, stress birefringence element, laser gain pipe, anti-reflection window and concave surface output hysteroscope, data acquisition process unit include polarization spectroscope, two photodetectors, opto-electronic conversion and amplifying circuits, signal processing circuit and display device.The application corner cube prism hysteroscope exports two hysteroscopes of the hysteroscope for the resonator cavity of helium neon laser with concave surface, and the static fixation of the two hysteroscopes is not affected by movable measuring staff, and system stability is high；Refrative cavity is constituted with right-angle reflecting prism and corner cube prism hysteroscope, right-angle reflecting prism often moves λ, the chamber length of laserresonator changes N λ, the resolution of system improves corresponding N times (numbers of the N for continuous first reflecting surface in right-angle reflecting prism, two neighboring first reflecting surface are perpendicular).
Description
Technical field
A kind of it relates to laser displacement field of sensing technologies, more particularly to helium neon laser nano survey ruler system.
Background technology
Chinese patent " displacement self-sensing helium neon laser system and its implementation " (ZL 99103514.3) is comprehensively utilized
Multiple laser physics phenomenons such as laser frequency mode split, laser mode competition, laser power tuning, a common helium neon laser is changed
One kind is caused not utilize interference but there is self calibrating function relatively simple displacement transducer again.The method has λ/8
Displacement measurement resolution (for wavelength is the helium neon laser of 632.8nm, λ/8 are 79nm).The agent structure of this invention is
One of one half common external cavity helium neon laser, two reflecting cavity mirror are connected on a line slideway (measuring staff) as sound
To axially move along laser optical axis.Chinese patent " with the displacement self-sensing HeNe Optical Maser Systems that opal makees hysteroscope "
(application number：200310115540.6) this system is improved, cat's eye reflector is connected as hysteroscope and line slideway,
The stability of raising system, has widened application.Chinese patent " survey chi and realize the subdivision side of nano measurement by nano laser
Method " (application number：200410088819.4) characteristic and the self-calibrating capabilities of optical wavelength can be traceable to using system, big using meter
Number, the method for surveying decimal, by increasing precision micro-displacement sensor piezoelectric ceramics (PZT) and appropriate signal processing electricity
The resolution of system is brought up to 10nm by road, and theoretical measurement range brings up to 50mm.But if it is desired to resolution is further carried
Height, is extremely difficult to precision micro-displacement sensor piezoelectric ceramics (PZT) and appropriate signal processing circuit, because which is counted greatly
The a length of 316.4nm of number half-wave used, the features such as accurate micrometric displacement piezoelectric transducer (PZT) has sluggish and non-linear, on
The raising that shortcoming limits the systemic resolution is stated, so being difficult the resolution for improving the system again.
Content of the invention
In view of drawbacks described above of the prior art or deficiency, are made that the present invention.
The invention provides a kind of helium neon laser nano surveys ruler system, including movable measuring staff, refrative cavity containing corner cube prism
Helium neon laser and data acquisition process unit；
The movable measuring staff, its one end are contacted with object under test；
The helium neon laser includes：
Corner cube prism refrative cavity, its are used for repeatedly turning back and exporting single-frequency laser for light, the corner cube prism refrative cavity
It is placed in parallel including the right-angle reflecting prism that is connected with the other end of the movable measuring staff and with the right-angle reflecting prism
Corner cube prism hysteroscope, the reflecting surface of the right-angle reflecting prism and the corner cube prism hysteroscope is coated with highly reflecting films；
Stress birefringence element, its are located at the light emission side of the corner cube prism refrative cavity, and the corner cube prism is folded
The single-frequency laser of chamber output becomes the crossed polarized light with two frequencies, and it is double that the corner cube prism refrative cavity is located at the stress
One end of refracting element；
Laser gain pipe, its with optical axis and are installed on the another of the stress birefringence element with the stress birefringence element
One end；
Anti-reflection window, its are installed on one end of the laser gain pipe along the optical axis direction, and it is double to be located at the stress
Between refracting element and the laser gain pipe；
Concave surface exports hysteroscope, and which is installed on the other end of the laser gain pipe along the optical axis direction, and exports described
The crossed polarized light of two frequencies；
The data acquisition process unit includes：
Polarization spectroscope, its are located at the light emission side that the concave surface exports hysteroscope, and separate defeated from concave surface output hysteroscope
Go out two crossed polarized lights of beam altogether；
Two photodetectors, receive the different crossed polarized light of two separate beam frequencies of the polarization spectroscope；
Opto-electronic conversion and amplifying circuit, two input are connected with the signal output part of two photodetectors respectively；
Signal processing circuit, its input are connected with the signal output part of the opto-electronic conversion and amplifying circuit, complete letter
Number processing function；
Display device, its are connected with the signal processing circuit.
Preferably, the right-angle reflecting prism includes N number of continuous first reflecting surface, two neighboring first reflecting surface
It is mutually perpendicular to, N number of first reflecting surface constitutes N/2 the first groove, N >=2 and N is even number；
The corner cube prism hysteroscope is included M continuous second reflecting surface and is connected with the second reflecting surface described in m-th
The 3rd reflecting surface, two neighboring second reflecting surface is mutually perpendicular to, M second reflecting surface constitute M/2 second recessed
Groove, is in 135 ° between the second reflecting surface and the 3rd reflecting surface described in m-th, and M >=2, M are even number and N/2-M/2=1；
First reflecting surface, second reflecting surface are identical with the size of the 3rd reflecting surface, the right angle reflection
Second groove of the first groove of prism and the corner cube prism hysteroscope is staggeredly corresponding；
Angle between the normal of incident ray and first the first reflecting surface is 45 °, and incident ray is through first first
Reflective surface to second the first reflecting surface, through second the first reflective surface to second the second reflecting surface, through second
Individual second reflective surface is carried out to the 3rd the first reflecting surface, according to this rule, through N-1 the second reflective surface to N
Individual first reflective surface, then impinge perpendicularly on after the first reflective surface of n-th on the 3rd reflecting surface, the described 3rd
Light is turned back by reflecting surface along former road, exports the single-frequency laser through the corner cube prism refrative cavity.
Preferably, the optical axis of the stress birefringence element is in level；The top of the corner cube prism hysteroscope is less than described
The horizontal plane that the optical axis of stress birefringence element is located.
Preferably, the reflecting surface of the right-angle reflecting prism and the corner cube prism hysteroscope is coated with reflectance and exceedes
99.99% highly reflecting films.
Preferably, N=10, the right-angle reflecting prism include 10 continuous first reflectings surface, two neighboring described
One reflecting surface is mutually perpendicular to, and 10 first reflectings surface constitute 5 the first grooves；
M=8, the corner cube prism hysteroscope include 8 continuous second reflectings surface and with the 8th the second reflecting surface phase
3rd reflecting surface of connection, 8 second reflectings surface constitute 4 the second grooves.
Compared with prior art, the present invention has the advantages that：Corner cube prism hysteroscope is helium with concave surface output hysteroscope
Two hysteroscopes of the resonator cavity of neon laser, the static fixation of the two hysteroscopes, are not affected by movable measuring staff, and system stability is high；
The refrative cavity that resonator cavity is constituted using right-angle reflecting prism and corner cube prism hysteroscope, right-angle reflecting prism often move λ, laser resonance
The chamber length in chamber changes N λ, and the resolution of system improves corresponding N times (continuous first reflections of the wherein N for right-angle reflecting prism
The number in face, two neighboring first reflecting surface are mutually perpendicular to).
Description of the drawings
By reading the detailed description made by non-limiting example made with reference to the following drawings, the application other
Feature, objects and advantages will become more apparent upon：
Fig. 1 is the structural representation that the helium neon laser nano of the offer of the present invention surveys ruler system；
Fig. 2 surveys the structural representation of the refrative cavity of ruler system for the helium neon laser nano that the present invention is provided；
The index path that Fig. 3 is surveyed in ruler system refrative cavity for the helium neon laser nano that the present invention is provided；
Fig. 4 surveys the structural representation of the refrative cavity of ruler system for the helium neon laser nano that one embodiment of the invention is provided；
Fig. 5 shows for the structure that the helium neon laser nano that one embodiment of the invention is provided surveys right-angle reflecting prism in ruler system
It is intended to；
Fig. 6 shows for the structure that the helium neon laser nano that one embodiment of the invention is provided surveys corner cube prism hysteroscope in ruler system
It is intended to；
The index path that Fig. 7 is surveyed in ruler system refrative cavity for the helium neon laser nano that one embodiment of the invention is provided.
Specific embodiment
With reference to the accompanying drawings and examples the application is described in further detail.It is understood that this place is retouched
The specific embodiment that states is used only for explaining related invention, rather than the restriction to the invention.It also should be noted that, in order to
It is easy to describe, in accompanying drawing, illustrate only the part related to invention.
It should be noted that in the case where not conflicting, the feature in embodiment and embodiment in the application can phase
Mutually combine.Below with reference to the accompanying drawings and in conjunction with the embodiments describing the application in detail.
The present invention is based on Principles of Laser：Laserresonator change of cavity length λ/2, correspond to laser frequency and change between a longitudinal mode
Every Δ.Its ultimate principle is：In standing-wave laser, the frequency change of laser and chamber length change satisfaction：
Wherein, v is laser frequency, and L is that chamber is long.By frequency splitting and mode competition, make any one in intensity tuning curve
Individual longitudinal mode spacing Δ is divided into 4 equal portions (correspond to 4 kinds of different polarization states) in equal size, thus can achieve λ/8 resolution sentence to
Displacement measurement.
As shown in Figure 1 to Figure 3, the invention provides a kind of helium neon laser nano survey ruler system, including movable measuring staff 1,
Helium neon laser 30 and data acquisition process unit 20 containing corner cube prism refrative cavity.He-Ne containing corner cube prism refrative cavity swashs
Light device 30 includes right-angle reflecting prism 2, corner cube prism hysteroscope 3, stress birefringence element 4, anti-reflection window 5,6 and of laser gain pipe
Concave surface exports hysteroscope 7, two hysteroscopes of corner cube prism hysteroscope 3, the concave surface output hysteroscope 7 for the resonator cavity of helium neon laser 30, He-Ne
Laser instrument 30 is one and half external cavity helium neon lasers；Data acquisition process unit 20 includes 8, two photodetections of polarization spectroscope
Device (the first photodetector 9, the second photodetector 10), opto-electronic conversion and amplifying circuit 11, signal processing circuit 12 and aobvious
Showing device 13.
Right-angle reflecting prism 2 and corner cube prism hysteroscope 3 are placed in parallel form right angle prism refrative cavity, right-angle reflecting prism and
The reflecting surface of corner cube prism hysteroscope is coated with highly reflecting films, is carried out with the light to entering corner cube prism refrative cavity efficient anti-
Penetrate.
One end of movable measuring staff 1 is contacted with object under test, and the other end is connected with right-angle reflecting prism 2；
Corner cube prism refrative cavity is used for repeatedly turning back for light, and right-angle reflecting prism 2 is connected with the other end of movable measuring staff 1
Connect, right-angle reflecting prism 2 can be moved with movable measuring staff 1, corner cube prism hysteroscope 3 is static fixation relative to system；
Stress birefringence element 4, which is located at the light emission side of corner cube prism refrative cavity, and corner cube prism refrative cavity is exported
Single-frequency laser becomes the crossed polarized light with two frequencies, and corner cube prism refrative cavity is located at one end of stress birefringence element；
Laser gain pipe 6, its with optical axis and are installed on the other end of stress birefringence element 4 with stress birefringence element；
Anti-reflection window 5, which is installed on one end of laser gain pipe 6 along optical axis direction, and be located at stress birefringence element and
Between laser gain pipe；
Concave surface exports hysteroscope 7, and which is installed on the other end of laser gain pipe 6 along optical axis direction, and exports two frequencies
Crossed polarized light, concave surface output hysteroscope 7 is static fixation relative to system；
Polarization spectroscope 8, its are located at the light emission side that concave surface exports hysteroscope 7, and separate beam common from the concave surface output output of hysteroscope 7
Two crossed polarized lights；
Two photodetectors, i.e. the first photodetector 9 and the second photodetector 10, receive polarization spectroscope and separate
The different crossed polarized light of two beam frequencies；
Opto-electronic conversion and amplification electricity 11, two input is connected with the signal output part of two photodetectors respectively；
Signal processing circuit 12, its input are connected with the signal output part of opto-electronic conversion and amplifying circuit 11, complete letter
Number processing function；
Display device 13, its are connected with signal processing circuit 12.
Wherein, stress birefringence element 4, anti-reflection window 5, laser gain pipe 6 and concave surface output cavity in helium neon laser 30
7 common optical axis of mirror, helium neon laser produce laser by vibrating, and laser is become cross-polarization by single-frequency laser by birefringence element 4
Double-frequency laser, concave surface output hysteroscope 7 output produce crossed polarized light.Corner cube prism hysteroscope 3 and concave surface output hysteroscope 7 are sharp
Two hysteroscopes of optical cavity, the static fixation of two hysteroscope are not affected by the movement of movable measuring staff 1, so as to solve system
Stability problem.
Data acquisition process unit 20 receives the crossed polarized light of input, is divided into two-beam by polarization spectroscope 8,
Received respectively, then be input to opto-electronic conversion and amplifying circuit 11 to carry out light by the first photodetector 9, the second photodetector 10
Electricity conversion and signal amplify, and the signal of telecommunication of generation is input to signal processing circuit 12 carries out signal processing, signal processing circuit 12
Again by the data input that handles well to display device 13, result is shown by display device 13 finally.
Further, right-angle reflecting prism includes N number of continuous first reflecting surface 20, two neighboring first reflecting surface, 20 phase
Mutually vertical, N number of first reflecting surface 20 constitutes N/2 the first groove 21, N >=2 and N is even number, by up in right-angle reflecting prism 2
Under reflecting surface be followed successively by first the first reflecting surface, second the first reflecting surface, the 3rd the first reflecting surface ... n-th
One reflecting surface；
Corner cube prism hysteroscope includes M continuous second reflecting surface 30 and the be connected the 3rd with the second reflecting surface of m-th
Reflecting surface 31, two neighboring second reflecting surface 30 are mutually perpendicular to, and M the second reflecting surface 30 constitutes M/2 the second groove 32, M
It is in 135 ° between individual second reflecting surface and the 3rd reflecting surface 32, M >=2, M are even number and N/2-M/2=1, in corner cube prism hysteroscope 3
Reflecting surface from top to bottom is followed successively by first the second reflecting surface, second the second reflecting surface, the 3rd the second reflecting surface ...
The second reflecting surface of m-th, the 3rd reflecting surface；
The size of the first reflecting surface, the second reflecting surface and the 3rd reflecting surface is identical, the first groove 21 of right-angle reflecting prism 2
Staggeredly corresponding with the second groove 32 of corner cube prism hysteroscope 3；
As shown in figure 3, the angle between the normal of incident ray and first the first reflecting surface is 45 °, each is first anti-
The direction for penetrating the light received on face and each second reflecting surface is in 45 ° with respective normal, and the 3rd reflecting surface is plane
Reflecting mirror, the 3rd reflecting surface are a vertical reflecting surface, to ensure that light is impinged perpendicularly on the second reflecting surface of m-th into 135 °
On 3rd reflecting surface.Incident ray is through first the first reflective surface to second the first reflecting surface, first anti-through second
The face of penetrating reflexes to second the second reflecting surface, through second the second reflective surface to the 3rd the first reflecting surface, rule according to this
Carry out, hang down to the first reflective surface of n-th, then after the first reflective surface of n-th through N-1 the second reflective surface
Directly incide on the 3rd reflecting surface, light is turned back by the 3rd reflecting surface along former road, exports single-frequency laser through corner cube prism refrative cavity.
Further, the optical axis of stress birefringence element is in level；The top of corner cube prism hysteroscope is less than stress birfringence
The horizontal plane that the optical axis of element is located.So guarantee that the laser that capillary tube is projected can reach first the first reflecting surface, and
Stress birefringence element can be entered through the light of first the first reflecting surface outgoing.
Further, in order to ensure to enter corner cube prism refrative cavity incident ray carry out efficient reflection, right angle
The reflecting surface of reflecting prism and corner cube prism hysteroscope is coated with highly reflecting films of the reflectance more than 99.99%.
Birefringence element 4 is inserted in laser instrument, due to birefringence effect, makes the laser frequency of helium neon laser occur to divide
Split, single-frequency laser becomes double-frequency laser, the mutually perpendicular line polarized light in two polarization directions of laser instrument output, i.e. o light are (parallel inclined
Shake light (∥ light)) and e light (orthogonal polarized light (⊥ light)), by changing the angle of birefringence element, two beams can be adjusted orthogonal
Frequency difference between polarized light.After the crossed polarized light of output is through 8 light splitting of polarization spectroscope, the first photodetector is incided respectively
9th, on the second photodetector 10, processed by opto-electronic conversion and amplifying circuit 11, signal processing circuit 12 afterwards, be eventually displayed in
In display device 13.
During measurement, promote movable measuring staff 1 to move when testee is moved, movable measuring staff 1 promote right-angle reflecting prism 2 with
Movement, the chamber length of laser instrument changes therewith, the polarization state of laser instrument output light by the polarization state of periodically-varied, i.e., four successively
Periodically occur：Only all to export → only have orthogonal polarized light defeated for parallel polarization light output → parallel polarized light and orthogonal polarized light
Go out → without light output.Laser beam is detected by the first photodetector 9 and the second photodetector 10, have accordingly four states according to
Secondary appearance：Only the first photodetector 9 is illuminated → and the first photodetector 9 and the second photodetector 10 be while be illuminated
→ only the second photodetector 10 is illuminated → and the first photodetector 9 and the second photodetector 10 be all not illuminated.Such as
This iterative cycles.Change per next state means that laser cavity length changes the displacement of λ/8, as right-angle reflecting prism is often moved
The displacement of λ, (N is the number of continuous first reflecting surface of right-angle reflecting prism, two neighboring for the displacement of laser cavity length change N λ
First reflecting surface is mutually perpendicular to), so the change per next state means that right-angle reflecting prism changes the displacement of λ/8N, that is, be
The resolution of system is λ/8N, and the sequencing that four states occur may determine that the direction of displacement.Opto-electronic conversion and amplifying circuit
11 signals for processing two photodetector outputs, signal processing circuit 12 process the output letter of opto-electronic conversion and amplifying circuit 11
Number, and have count, sentence to etc. function, the data that handles well are sent in display device 13 are shown afterwards, final real
The function of existing displacement.
As a kind of optional embodiment, as shown in Figures 4 to 7, preferred N=10, M=8 in the example.Reflect at right angle
Prism 2 ' includes that 10 continuous first reflectings surface, two neighboring first reflecting surface are mutually perpendicular to, and 10 the first reflectings surface constitute 5
Individual first groove；Corner cube prism hysteroscope 3 ' includes 8 continuous second reflectings surface and be connected the with the 8th the second reflecting surface
Three reflectings surface, 8 the second reflectings surface constitute 4 the second grooves.5 the first grooves are ensure that 10 in right-angle reflecting prism 2
One reflecting surface is as shown in figure 3,4 same the second grooves ensure that 8 the second reflectings surface such as Fig. 4 institutes in corner cube prism hysteroscope 3
The structure that shows.The size of the first reflecting surface, the second reflecting surface and the 3rd reflecting surface is identical, the first groove of right-angle reflecting prism 2
Staggeredly corresponding with the second groove of corner cube prism hysteroscope 3, the 3rd reflecting surface is plane mirror, and the 3rd reflecting surface vertically sets
Put, the 3rd reflecting surface and the 8th the second reflecting surface are into 135 °.The reflecting surface of right-angle reflecting prism and corner cube prism hysteroscope is plated
Have more than 99.99% highly reflecting films.
In the embodiment, define 10 the first reflectings surface from top to bottom of right-angle reflecting prism 2 ' in Fig. 3 and be followed successively by first
Prismatic reflection face 201, the second prismatic reflection face 202, prism reflecting surface 203, the 4th prismatic reflection face 204, pentaprism
Reflecting surface 205, the 6th prismatic reflection face 206, the 7th prismatic reflection face 207, the 8th prismatic reflection face 208, the 9th prismatic reflection
Face 209, the tenth prismatic reflection face 210；Define 8 the second reflectings surface from top to bottom of corner cube prism hysteroscope 3 ' in Fig. 4 to be followed successively by
First hysteroscope reflecting surface 301, the second hysteroscope reflecting surface 302, the 3rd hysteroscope reflecting surface 303, the 4th hysteroscope reflecting surface the 304, the 5th
Hysteroscope reflecting surface 305, the 6th hysteroscope reflecting surface 306, the 7th hysteroscope reflecting surface 307, the 8th hysteroscope reflecting surface 308, definition and the
3rd reflecting surface of the connection of eight hysteroscope reflecting surface 308 is the 9th hysteroscope reflecting surface 309, the 9th hysteroscope reflecting surface 309 and the 8th chamber
Into 135 ° between mirror reflecting surface 308, the 9th hysteroscope reflecting surface 309 is perpendicular.
Wherein, the angle between the normal in incident ray and the first prismatic reflection face 201 is 45 °, as shown in figure 5, specifically
Radiation direction be：Incident ray is mapped on the first prismatic reflection face 201 from capillary tube, is reflected through the second prismatic reflection face 202
To on the first hysteroscope reflecting surface 301, it is re-reflected on the second hysteroscope reflecting surface 302, then reflexes to prism reflecting surface 203
On, reflection successively is gone down, and until light is reflexed on the 9th hysteroscope reflecting surface 309 by the tenth reflecting surface 210 of prism, completes light
Incidence；According to the structure of the corner cube prism refrative cavity shown in Fig. 2-Fig. 5, light is vertically mapped to the 9th hysteroscope reflecting surface 309
After upper, 309 reflection light of the 9th hysteroscope reflecting surface, laser light incident light path are overlapped with reflected light path, and light is returned according to former road afterwards
Return, then capillary tube is returned to through the multiple reflections of refrative cavity, eventually arrive at concave surface output hysteroscope 7 and form laser generation.Right-angled edge
Mirror refrative cavity realizes turning back for light.
The advance route of light is clear that from Fig. 5, it will be seen that light is from laser gain pipe in through 18
Secondary reflection eventually arrives at the 9th hysteroscope reflecting surface 309, according to backtracking after being reflected by the 9th hysteroscope reflecting surface 309, enters back into
In laser gain pipe, laser generation is formed, so as to produce laser.Due to being to fold cavity configuration, with incident ray after turning back
Parallel has ten light, and therefore, right-angle reflecting prism 2 ' often moves the displacement of λ, and laser cavity length will change the displacement of 10 λ,
Correspond to laser frequency and will change 20 longitudinal mode spacings, i.e., 20 longitudinal mode spacings are divided into 80 equal portions, so four kinds of polarization states
It is λ/80 to change every time and mean that right-angle reflecting prism 2 moves the resolution of the displacement of λ/80, i.e. system, and four states occur
Sequencing may determine that the direction of displacement, and the structure of resolution ratio non-folded cavities improves ten times.To wavelength X it is
For the helium neon laser of 632.8nm, the resolution of this system is 7.9nm, needs not move through electricity subdivision so as to become one
High-resolution displacement sensor apparatus, with boundless application prospect.
Above description is only the preferred embodiment and the explanation to institute's application technology principle of the application.People in the art
Member should be appreciated that involved invention scope in the application, however it is not limited to the technology of the particular combination of above-mentioned technical characteristic
Scheme, while should also cover in the case of without departing from the inventive concept, is carried out by above-mentioned technical characteristic or its equivalent feature
Combination in any and other technical schemes for being formed.Such as features described above has similar work(with (but not limited to) disclosed herein
The technical scheme that the technical characteristic of energy is replaced mutually and formed.
Claims (5)
1. helium neon laser nano surveys ruler system, it is characterised in that swash including movable measuring staff, the He-Ne containing corner cube prism refrative cavity
Light device and data acquisition process unit；
The movable measuring staff, its one end are contacted with object under test；
The helium neon laser includes：
Corner cube prism refrative cavity, its are used for repeatedly turning back and exporting single-frequency laser for light, and the corner cube prism refrative cavity includes
The right-angle reflecting prism that is connected with the other end of the movable measuring staff and straight with what the right-angle reflecting prism was placed in parallel
The reflecting surface of angle prism hysteroscope, the right-angle reflecting prism and the corner cube prism hysteroscope is coated with highly reflecting films；
Stress birefringence element, its are located at the light emission side of the corner cube prism refrative cavity, and will be defeated for the corner cube prism refrative cavity
The single-frequency laser for going out becomes the crossed polarized light with two frequencies, and the corner cube prism refrative cavity is located at the stress birfringence
One end of element；
Laser gain pipe, its with optical axis and are installed on the another of the stress birefringence element with the stress birefringence element
End；
Anti-reflection window, its are installed on one end of the laser gain pipe along the optical axis direction, and are located at the stress birfringence
Between element and the laser gain pipe；
Concave surface exports hysteroscope, and which is installed on the other end of the laser gain pipe along the optical axis direction, and exports described two
The crossed polarized light of frequency；
The data acquisition process unit includes：
Polarization spectroscope, its are located at the light emission side that the concave surface exports hysteroscope, and separate from the output of concave surface output hysteroscope altogether
Two crossed polarized lights of beam；
Two photodetectors, receive the different crossed polarized light of two separate beam frequencies of the polarization spectroscope；
Opto-electronic conversion and amplifying circuit, two input are connected with the signal output part of two photodetectors respectively；
Signal processing circuit, its input are connected with the signal output part of the opto-electronic conversion and amplifying circuit, are completed at signal
Reason function；
Display device, its are connected with the signal processing circuit.
2. the helium neon laser nano according to claims 1 surveys ruler system, it is characterised in that
The right-angle reflecting prism includes that N number of continuous first reflecting surface, two neighboring first reflecting surface are mutually perpendicular to, N
Individual first reflecting surface constitutes N/2 the first groove, N >=2 and N is even number；
The corner cube prism hysteroscope includes M continuous second reflectings surface and be connected the with the second reflecting surface described in m-th
Three reflectings surface, two neighboring second reflecting surface are mutually perpendicular to, and M second reflecting surface constitutes M/2 the second groove, the
M is in 135 ° between second reflecting surface and the 3rd reflecting surface, and M >=2, M are even number and N/2-M/2=1；
First reflecting surface, second reflecting surface are identical with the size of the 3rd reflecting surface, the right-angle reflecting prism
The first groove and the corner cube prism hysteroscope the second groove staggeredly corresponding；
Angle between the normal of incident ray and first the first reflecting surface is 45 °, and incident ray is reflected through first first
Face reflexes to second the first reflecting surface, through second the first reflective surface to second the second reflecting surface, through second
Two reflective surfaces are carried out to the 3rd the first reflecting surface, according to this rule, through N-1 the second reflective surfaces to n-th the
One reflective surface, then impinge perpendicularly on after the first reflective surface of n-th on the 3rd reflecting surface, the 3rd reflection
Light is turned back by face along former road, exports the single-frequency laser through the corner cube prism refrative cavity.
3. helium neon laser nano according to claim 1 and 2 surveys ruler system, it is characterised in that the stress birfringence
The optical axis of element is in level；Level of the top of the corner cube prism hysteroscope less than the optical axis place of the stress birefringence element
Face.
4. helium neon laser nano according to claim 1 surveys ruler system, it is characterised in that the right-angle reflecting prism and
The reflecting surface of the corner cube prism hysteroscope is coated with highly reflecting films of the reflectance more than 99.99%.
5. the helium neon laser nano according to 1,2 or 4 any one of claim surveys ruler system, it is characterised in that
N=10, the right-angle reflecting prism include 10 continuous first reflectings surface, and two neighboring first reflecting surface is mutual
Vertically, 10 first reflectings surface constitute 5 the first grooves；
M=8, the corner cube prism hysteroscope are included 8 continuous second reflectings surface and are connected with the 8th second reflecting surface
The 3rd reflecting surface, 8 second reflectings surface constitute 4 the second grooves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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