CN1648682A - Laser feedback nano displaycement measuring device - Google Patents
Laser feedback nano displaycement measuring device Download PDFInfo
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Abstract
The present invention belongs to the field of laser measurement technology, and features that 632.8 nm He-Ne laser and outer high reflectivity reflector constitute one non-collimated multiple laser feedback system. The outer reflector is fixed onto the tested object, and when the tested object is shifted, the laser strength fluctuation frequency may reach several to decades times that of the traditional feedback mode to result in high order frequency multiplying effect in laser strength fluctuation. The laser strength fluctuation period corresponds to nanometer level change in the distance between the outer reflector and the laser, so that measuring the period number of the laser strength variation can obtain the displacement of the measured object. When the object changes its moving direction, the laser polarization state jumps between two orthogonal directions and this may be used in judging the moving direction of the object.
Description
Technical field
The invention belongs to the laser measuring technique field.
Background technology
Current laser technology has been successfully used to the high-acruracy survey to many physical quantitys, geometric sense.General measuring method commonly used is to utilize the interference of laser, i.e. laser interferometer.Its ultimate principle is that the light beam that laser instrument is exported is divided into two bundles, and a branch of is measuring beam; Another bundle is a reference beam, and when testee is subjected to displacement, the interference fringe of this two-beam will be moved, and the mobile number of recording interference fringe promptly is convertible into displacement variable.Whenever move an interference fringe corresponding to testee displacement 1/2nd optical wavelength, when using the He-Ne LASER Light Source of 632.8nm, the resolution of displacement measurement is 316.8nm.For improving Measurement Resolution, extensively adopt the position technology of segmentation mutually at present, can realize nano level displacement measurement.This class device is made up of laser instrument, beam splitter, interference system, frequency regulator, position phase subdividing device and signal processing unit, its complex structure, and each ingredient accuracy requirement height, whole device costs an arm and a leg.
Because laser feedback system, also claim the self-mixed interference system, an optical channel is only arranged, and can accomplish the non-cpntact measurement of " definitely ", have simultaneously simple in structure, compact, the easy advantage of collimation again, can solve problems such as conventional laser interference system light path complexity, costliness, collimation be difficult after its success.This potential good cost performance of feedback measuring system has become huge expulsive force.It can be used for the face shape and the pattern of displacement, speed, Doppler frequency displacement, absolute distance, retrofit piece surface, the measurement that places the 3D shape etc. of the cell on the laser beam focal plane, also can be used for 3 d image data reconstruction, mould analysis, flaw detection, or the like.Although but each scientific and technological power of the world has all carried out the research of laser feedback effect and application, still have two very not solutions of major issue.This is to influence the laser feedback system to realize high-technology index, enters the major reason of practical application.The first, existing feedback interferometer also has no idea the sense of displacement of feedback catoptron is judged.From the class crenellated phenomena of observing the feedback curve (the sawtooth vergence direction on the curve is relevant with the reflecting surface moving direction), scholar both domestic and external tries hard to use the class crenellated phenomena to solve the decision problem of laser feedback interferometer measurement sense of displacement again.Be restricted but declare in this way to the resolution that will make displacement measurement, because must use a complete cycle just can determine the vergence direction of waveform, so displacement less than half-wavelength, He-Ne laser instrument half-wavelength to 632.8 nanometers is 316 nanometers, just be difficult to measure, nano measurement just can not be realized.Second great knotty problem is segmentation.The segmentation problem solves exactly and how to realize than the more high-resolution measurement of half-wavelength, or says half-wavelength " chopped up " with interior displacement and measure.Some bibliographical informations burst down extremely weak returning, laser is output as quasi-sine-wave, wants to utilize this sinusoidal nature, copies the phase measurement technology of common laser interferometer to realize segmentation.But because this " sine wave " instability, and feedback interferes and has only one road signal, and this makes electronic fine-grained being difficult to realize.
Summary of the invention
The present invention proposes a kind of high resolving power, can differentiate the laser feed-back displacement measurement mechanism of measured object moving direction, can solve above-mentioned two problems effectively.
The invention is characterized in that it contains:
The multiple laser feedback of non-collimation system, it comprises:
632.8nm the He-Ne laser instrument, contain:
Gain tube, in He, Ne mixed gas are arranged, ratio is 7: 1;
Anti-reflection window is fixed on an end of above-mentioned gain tube;
Resonator cavity, it comprises:
The first inner chamber catoptron, it is positioned at the other end of above-mentioned anti-reflection window;
The second inner chamber catoptron is fixed on the other end of above-mentioned gain tube;
Laser feedback exocoel catoptron, it is the catoptron of a high reflectance, its surface normal and laser beam are in an angle;
Piezoelectric ceramics, i.e. PZT, it is fixed on the above-mentioned laser feedback exocoel catoptron, and under the input voltage effect, it promotes above-mentioned laser feedback exocoel catoptron and moves along the laser axis direction is left and right;
Above-mentioned gain tube, the first inner chamber catoptron and the piezoelectric ceramics fixed support of respectively hanging oneself is fixed on the mounting platform that is contained in the cover;
Metering circuit, it comprises:
Spectroscope, it is positioned at a side of the above-mentioned first inner chamber catoptron, near the above-mentioned first inner chamber catoptron;
First photodetector, it measures the light intensity of the laser output after above-mentioned spectroscope reflection;
Amplifier and counting circuit are counted through amplifying laggard horizontal pulse the output of above-mentioned first photodetector;
Polaroid, it separates the pairwise orthogonal polarized light of coming from above-mentioned spectroscope transmission;
Second photodetector, it is surveyed by the laser intensity behind the polaroid;
Voltage comparator, its input end links to each other with the output terminal of above-mentioned second photodetector, amplifier respectively, when above-mentioned laser feedback exocoel catoptron moves towards the direction away from above-mentioned laser instrument, its output high level control said counting device adds counting, otherwise, work subtracts counting, and described voltage comparator and above-mentioned second photodetector constitute above-mentioned counting circuit and add-subtract control unit.
Feature of the present invention also is, it contains:
The multiple laser feedback of non-collimation system, it comprises:
632.8nm the He-Ne laser instrument, contain:
Gain tube, in He, Ne mixed gas are arranged, ratio is 7: 1;
Resonator cavity, it comprises:
The first inner chamber catoptron is fixed on an end of above-mentioned gain tube;
The second inner chamber catoptron, it is positioned at the other end of above-mentioned gain tube;
Laser feedback exocoel catoptron, it is the catoptron of a high reflectance, its surface normal and laser beam are in an angle;
Piezoelectric ceramics, i.e. PZT, it is fixed on the above-mentioned laser feedback exocoel catoptron, and under the input voltage effect, it promotes above-mentioned laser feedback exocoel catoptron and moves along the laser axis direction is left and right;
Above-mentioned gain tube, the first inner chamber catoptron and the piezoelectric ceramics fixed support of respectively hanging oneself is fixed on the mounting platform that is contained in the cover;
Metering circuit, it comprises:
Spectroscope, it is positioned at a side of the above-mentioned first inner chamber catoptron, near the above-mentioned first inner chamber catoptron;
First photodetector, it measures the light intensity of the laser output after above-mentioned spectroscope reflection;
Amplifier and counting circuit are counted through amplifying laggard horizontal pulse the output of above-mentioned first photodetector;
Polaroid, it separates the pairwise orthogonal polarized light of coming from above-mentioned spectroscope transmission;
Second photodetector, it is surveyed by the laser intensity behind the polaroid;
Voltage comparator, its input end links to each other with the output terminal of above-mentioned second photodetector, when above-mentioned laser feedback exocoel catoptron moves towards the direction away from above-mentioned laser instrument, voltage comparator output high level is controlled the said counting device and is added counting, otherwise, work subtracts counting, and described voltage comparator and above-mentioned second photodetector constitute above-mentioned counting circuit and add-subtract control unit.
The present invention can realize declaring to surface nanometer-displacement, and device is simple, it is convenient to implement, price is also cheap.
Description of drawings
Fig. 1: laser feedback system schematic.
Fig. 2: the multiple feedback light path of laser synoptic diagram.
Fig. 3: half exocoel experimental provision synoptic diagram.
Fig. 4: full inner chamber experimental provision synoptic diagram.
Fig. 5: high-order frequency multiplication curve that laser intensity changes and laser polarization are with the phenomenon of exocoel direction of motion saltus step.
(a). measured waveform; (b). time shaft launches waveform.
Fig. 6: the high-order frequency multiplication curve that laser intensity changes.
(a). measured waveform; (b). time shaft launches waveform.
Embodiment
The present invention proposes a kind of displacement measurement method and device thereof of nanometer resolution.It is characterized in that utilizing the He-Ne laser instrument of half inner chamber or full inner chamber 632.8nm and the uncollimated external mirror of high reflectance to form the laser feedback system.External mirror and laser axis have certain included angle, and external mirror is fixed on the testee, when higher as if the reflectivity on testee surface, can not add external mirror.Self-mixed interference takes place with the light reflected back laser instrument of laser output in the inside of laser instrument in external mirror.When external mirror (or testee) when the laser axis moves, the change frequency of laser output intensity is the high-order frequency multiplication of traditional feedback interferometer, be 1/tens optical wavelength of the every fluctuation one-period of laser output intensity correspondence, directly promptly can realize nano level displacement measurement counting cycle of fluctuation of laser output intensity.The frequency multiple is relevant with following factors: the 1) initial distance of laser instrument and external mirror; 2) laser instrument capillary inner diameter; 3) angle of the surface normal of external mirror and laser beam; 4) reflectivity of external mirror or testee.
Based on above-mentioned device, the present invention comprises that also when the direction that moves when measured object changes, saltus step will take place the polarization state of laser, promptly when external mirror when the laser instrument, laser is a kind of polarization state; When external mirror during away from laser instrument, laser is the another kind of polarization state of quadrature with it.Between laser instrument and photodetector, insert spectroscope, laser output is divided into two-beam, one road light directly is detected the device detection and the periodicity that the output laser intensity changes is counted, and another road is surveyed by a polaroid, the plus-minus of its output control counter.Work as external mirror, i.e. testee when the direction near laser instrument moves, subtracts counting; When external mirror moves towards the direction away from laser instrument, add counting.Can realize direction identification to external mirror or testee displacement.
The present invention further comprises photodetector, amplifying circuit, the counter that respectively two ways of optical signals is received, amplifies, counts, and the voltage comparator of control counter plus-minus.
Principle of the present invention as shown in Figure 1.Fig. 1 is that the uncollimated external mirror of He-Ne laser instrument and high reflectance is formed the laser feedback system schematic.Among Fig. 1, half outside gas laser is by gain tube 5, first mirror M
17 and second mirror M
24 form, and are filled with He, Ne mixed gas in the gain tube 5, its ratio of component 7: 1.One end of gain tube is fixed anti-reflection window 6.Laserresonator is made up of first catoptron 7 and second catoptron 4, and reflection coefficient is respectively r
1=0.999 and r
2=0.994, they have constituted the inner chamber of laser instrument; The 3rd, laser feedback exocoel catoptron, reflection coefficient are r
3, it and second catoptron 4 are formed the exocoel of laser feedback, and the laser feedback outer cavity is long to be l; 2 is piezoelectric ceramics PZT or testee, is used to promote feedback exocoel mirror M
E3 along the laser axial-movement.If the surface normal of feedback exocoel catoptron 3 and the angle of laser beam are θ, then ultimate principle is as follows:
The laser oscillation condition that contains the feedback exocoel is provided by (1) formula:
r
1r
effexp[(g-α)L]exp(iωτ)＝1 (1)
In the formula: r
EffBe the equivalent reflectivity of external cavity mirror and laser coupled outgoing mirror, g is the gain for threshold value of laser, and α is the loss of laser inner chamber, and ω is the angular frequency of light wave, and τ is laser comes and goes a week at inner chamber time.If collimation exocoel and r
3When very little, multiple feedback can be left in the basket, then:
r
eff＝r
2[1+κexp(iωτ
1)] (2)
In the formula: τ
1To be laser come and go time in a week at exocoel to=2l/c, and κ represents the feedback factor, is determined by following formula:
Because r
3r
2So, κ 1, then:
|r
eff|≈r
2[1+κcos(ωτ
1)] (4)
What we defined normalization laser threshold gain is changed to Δ G, then:
ΔG＝(g-g
0)L＝-ln(|r
eff|/r
2)≈ηcos(ωτ
1) (5)
Because the variation of laser output intensity is proportional to Δ G, so laser intensity is sinusoidal rule with the long variation of exocoel, and long every the variations λ of exocoel/2 laser intensities one-period that fluctuates, this and traditional self-mixed interference match, and displacement measurement resolution is λ/2.
When the reflection coefficient of feedback mirror very big, as r
3=0.994, then must consider the influence of multiple feedback, the Equivalent Reflection Coefficient of this moment is:
In the formula: on behalf of light beam, m come and go at the m time of exocoel, and n represents light beam at the total round number of times of exocoel, f
mRepresent the m time feedback light to enter the coupling efficiency of inner chamber.
When outer cavity dumping, will influence feedback light at different levels and enter the relevant position of the coupling efficiency of inner chamber and outgoing beam and Returning beam condition mutually, and, the feedback optical orders that is coupled into inner chamber will be subjected to the influence of external cavity mirror tiltangle, the long l of exocoel and He-Ne laser instrument capillary inner diameter d, as shown in Figure 2.
Because θ is very little, so by exocoel feedback mirror M
EInner chamber can be interfered and be coupled into to the light of m (m＞2) secondary reflection with emergent light formation condition can approximate representation be:
[2(tg2θ+...+tg2(m-1)θ)+tg2mθ]l＜d (7)
Because the inclination and the reflectivity of feedback mirror are very high, make resonator cavity second mirror M
2With exocoel feedback mirror M
EConstituted the wedge type interference cavity, emergent light will be interfered at exocoel with the feedback light at different levels that satisfy (7) formula, form equal thick interference fringe.Because the feedback interference of light factors at different levels are different with the spacing of interference fringe, the efficient that makes feedback optically-coupled at different levels advance inner chamber produces difference.Because θ is very little, the light path that can suppose the m time feedback light is m a times that single comes and goes light path, coupling efficiency f
mCan be by the following formula approximate representation:
As θ=40 μ rad, during l=190mm, can calculate m=7 by (7), i.e. the mutually every variation one-period in exocoel position, the light intensity common property is given birth to seven stripeds, i.e. seven frequencys multiplication, this moment, the resolution of displacement measurement was λ/14.As θ=40 μ rad, during l=110mm, can calculate m=10 by (7), i.e. the mutually every variation one-period in exocoel position, the light intensity common property is given birth to ten stripeds, i.e. ten frequencys multiplication, this moment, the resolution of displacement measurement was λ/20.As θ=10 μ rad, during l=30mm, can calculate m=40 by (7), it is the mutually every variation one-period in exocoel position, the light intensity common property is given birth to 40 stripeds, i.e. 40 frequencys multiplication, and this moment, the resolution of displacement measurement was λ/80, if continue to shorten the initial length of exocoel, can obtain higher displacement measurement resolution.
In the angular range of 10,60 μ rad, when θ increased, the spacing of equal thick interference fringe reduced, and the coupling efficiency of high order feedback interference of light striped will increase greatly, will make the fringe intensity of output intensity more approaching.
The exponent number of laser output intensity high-order frequency multiplication is consistent with feedback light at the round number of times of exocoel, and the intensity of self-mixed interference striped is subjected to the influence of external cavity mirror pitch angle and coupling efficiency, and at certain slant range, fringe intensity reaches unanimity.
Example one
The experimental provision synoptic diagram as shown in Figure 3.Among Fig. 3: half outside gas laser is made up of gain tube 5 and second catoptron 4, first catoptron 7, is filled with He, Ne mixed gas in the gain tube 5, and ratio is 7: 1.One end of gain tube is fixed anti-reflection window 6.Resonator cavity is made up of first catoptron 7 and second catoptron 4, and reflection coefficient is respectively r
1=0.999 and r
2=0.994, they have constituted the inner chamber of laser instrument; The 3rd, laser feedback exocoel catoptron, reflection coefficient are r
3, it and second catoptron 4 are formed the exocoel of laser feedback, and the laser feedback outer cavity is long to be l.The initial cavity of laser feedback exocoel is long to be l=190mm.The surface normal of exocoel feedback mirror 3 and the angle theta of laser beam=40 μ rad; The 9th, spectroscope BS; The 10th, polaroid is used for the pairwise orthogonal polarized light separately; 16 is first photodetectors, and 11 is second photodetectors, the light intensity of first photodetector, 16 Laser Measurement output, and second photodetector 11 is surveyed by the laser intensity behind the polaroid; The 17th, amplifier and counting circuit; The 12nd, the voltage comparator of control counter plus-minus, when external mirror (or testee) moved towards the direction away from laser instrument, the output high level added counting, otherwise subtracts counting; The control module of the counter plus-minus that second photodetector 11 and voltage comparator 12 constitute; The 2nd, piezoelectric ceramics PZT promotes exocoel feedback mirror 3 and moves along the laser axis direction.The 1st, the fixed support of PZT; The 8th, the fixed support of laser mirror 7; The 13rd, mounting platform; 14, the 15th, the fixed support of laser gain pipe 5.Laserresonator and external mirror can be placed in the cover 18, to reduce the disturbance of external environment condition.
When after adding triangular voltage sweep voltage on the PZT, the waveform of measurement as shown in Figure 5, wherein (b) is that the time shaft of (a) launches waveform.Nethermost curve is the voltage that is added on the PZT among Fig. 5.The 1# curve is the laser intensity by 16 outputs of first photodetector, and the vibration frequency of the laser intensity of this moment is 7 times of traditional self-mixed interference, i.e. laser intensity fluctuation one-period is corresponding to long λ/14 that change of exocoel.Second photodetector 11 is surveyed be laser output through the laser intensity behind the polaroid, the 2# curve in the corresponding diagram 5,3# curve are that polaroid revolves that to turn 90 degrees the back resulting, 2# is orthogonal polarized light P
⊥, 3 is horizontal polarization light P.Can find by 2# among Fig. 5 and 3# curve: when the voltage of piezoelectric ceramics rises, be the feedback mirror when the direction near laser instrument moves, the polarization state of laser remains unchanged, still vertically vibration, and the output control counter of second photodetector 11 subtracts counting; When the voltage of piezoelectric ceramics descends, when to be the feedback mirror towards the direction away from laser instrument move, the polarization state generation saltus step of laser, the along continuous straight runs vibration, the output control counter of voltage comparator 12 adds counting, can discern the direction of motion of measured target, the resolution of simultaneous displacement is λ/14.
Example two
The experimental provision synoptic diagram still as shown in Figure 3.Just the initial distance with feedback mirror and laser instrument shortens, and makes l=30mm.The experimental result of this moment as shown in Figure 6, wherein (b) is that the time shaft of (a) launches waveform.1# curve among the figure is the voltage that is added on the PZT, and the 2# curve is the laser intensity by 16 outputs of first photodetector.The vibration frequency of the laser intensity of this moment is 40 times of traditional self-mixed interference, i.e. laser intensity fluctuation one-period is corresponding to long λ/80 that change of exocoel, because Wavelength of Laser is 632.8nm, so the resolution of displacement measurement is 8nm.The identification of testee direction of motion is with example one.
The measuring system of using full intracavity laser to constitute, experimental provision can obtain result same as described above as shown in Figure 4.Therefore the present invention can realize declaring to surface nanometer-displacement, and device is simple, it is convenient, cheap to implement.Need
What particularly point out is that when the initial distance of feedback mirror and laser instrument was nearer, the resolution of measurement can be higher.
Claims (2)
1, laser feedback nano displaycement measuring device is characterized in that, it is half intracavity, and it contains:
The multiple laser feedback of non-collimation system, it comprises:
632.8nm the He-Ne laser instrument, contain:
Gain tube, in He, Ne mixed gas are arranged, ratio is 7: 1;
Anti-reflection window is fixed on an end of above-mentioned gain tube;
Resonator cavity, it comprises:
The first inner chamber catoptron, it is positioned at the other end of above-mentioned anti-reflection window;
The second inner chamber catoptron is fixed on the other end of above-mentioned gain tube;
Laser feedback exocoel catoptron, it is the catoptron of a high reflectance, its surface normal and laser beam are in an angle;
Piezoelectric ceramics, i.e. PZT, it is fixed on the above-mentioned laser feedback exocoel catoptron, and under the input voltage effect, it promotes above-mentioned laser feedback exocoel catoptron and moves along the laser axis direction is left and right;
Above-mentioned gain tube, the first inner chamber catoptron and the piezoelectric ceramics fixed support of respectively hanging oneself is fixed on the mounting platform that is contained in the cover;
Metering circuit, it comprises:
Spectroscope, it is positioned at a side of the above-mentioned first inner chamber catoptron, near the above-mentioned first inner chamber catoptron;
First photodetector, it measures the light intensity of the laser output after above-mentioned spectroscope reflection;
Amplifier and counting circuit are counted through amplifying laggard horizontal pulse the output of above-mentioned first photodetector;
Polaroid, it separates the pairwise orthogonal polarized light of coming from above-mentioned spectroscope transmission;
Second photodetector, it is surveyed by the laser intensity behind the polaroid;
Voltage comparator, its input end links to each other with the output terminal of above-mentioned second photodetector, when above-mentioned laser feedback exocoel catoptron moves towards the direction away from above-mentioned laser instrument, its output high level control said counting device adds counting, otherwise, work subtracts counting, and described voltage comparator and above-mentioned second photodetector constitute above-mentioned counting circuit and add-subtract control unit.
2, laser feedback nano displaycement measuring device, its feature are that also it is a whole bore type, and it contains:
The multiple laser feedback of non-collimation system, it comprises:
632.8nm the He-Ne laser instrument, contain:
Gain tube, in He, Ne mixed gas are arranged, ratio is 7: 1;
Resonator cavity, it comprises:
The first inner chamber catoptron is fixed on an end of above-mentioned gain tube;
The second inner chamber catoptron, it is positioned at the other end of above-mentioned gain tube;
Laser feedback exocoel catoptron, it is the catoptron of a high reflectance, its surface normal and laser beam are in an angle;
Piezoelectric ceramics, i.e. PZT, it is fixed on the above-mentioned laser feedback exocoel catoptron, and under the input voltage effect, it promotes above-mentioned laser feedback exocoel catoptron and moves along the laser axis direction is left and right;
Above-mentioned gain tube, the first inner chamber catoptron and the piezoelectric ceramics fixed support of respectively hanging oneself is fixed on the mounting platform that is contained in the cover;
Metering circuit, it comprises:
Spectroscope, it is positioned at a side of the above-mentioned first inner chamber catoptron, near the above-mentioned first inner chamber catoptron;
First photodetector, it measures the light intensity of the laser output after above-mentioned spectroscope reflection;
Amplifier and counting circuit are counted through amplifying laggard horizontal pulse the output of above-mentioned first photodetector;
Polaroid, it separates the pairwise orthogonal polarized light of coming from above-mentioned spectroscope transmission;
Second photodetector, it is surveyed by the laser intensity behind the polaroid;
Voltage comparator, its input end links to each other with the output terminal of above-mentioned second photodetector, when above-mentioned laser feedback exocoel catoptron moves towards the direction away from above-mentioned laser instrument, voltage comparator output high level is controlled the said counting device and is added counting, otherwise, work subtracts counting, and described voltage comparator and above-mentioned second photodetector constitute above-mentioned counting circuit and add-subtract control unit.
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| JPH07140503A (en) * | 1993-11-16 | 1995-06-02 | Hitachi Ltd | Microdisplacement generator |
| US5565987A (en) * | 1995-03-23 | 1996-10-15 | Anvik Corporation | Fabry-Perot probe profilometer having feedback loop to maintain resonance |
| CN1070152C (en) * | 2000-07-27 | 2001-08-29 | 中国人民解放军国防科学技术大学 | Wide range nano level grating displacement sensor |
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