CN1321322C - Differential interference chromatography for measuring three dimension refractive index - Google Patents
Differential interference chromatography for measuring three dimension refractive index Download PDFInfo
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- CN1321322C CN1321322C CNB2004100541920A CN200410054192A CN1321322C CN 1321322 C CN1321322 C CN 1321322C CN B2004100541920 A CNB2004100541920 A CN B2004100541920A CN 200410054192 A CN200410054192 A CN 200410054192A CN 1321322 C CN1321322 C CN 1321322C
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- 238000004587 chromatography analysis Methods 0.000 title claims abstract description 13
- 230000003287 optical effect Effects 0.000 claims abstract description 55
- 238000005259 measurement Methods 0.000 claims abstract description 25
- 238000001914 filtration Methods 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims abstract description 20
- 238000001514 detection method Methods 0.000 claims abstract description 6
- 230000001105 regulatory effect Effects 0.000 claims description 16
- 238000006073 displacement reaction Methods 0.000 claims description 10
- 230000001427 coherent effect Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000000149 argon plasma sintering Methods 0.000 claims 1
- 238000011160 research Methods 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract description 3
- 230000000704 physical effect Effects 0.000 abstract description 2
- 238000000053 physical method Methods 0.000 abstract 1
- 238000004458 analytical method Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 238000005305 interferometry Methods 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 238000005210 holographic interferometry Methods 0.000 description 1
- 238000001093 holography Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 238000012113 quantitative test Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
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Abstract
The present invention discloses a differential interference chromatography method for measuring the three-dimensional refractivity and a measuring instrument thereof, which is the combination based on a Michaelson interference and optical confocal filtering method, specifically the back scattering light of dots in a medium to be measured is extracted by utilizing a focusing detection light beam and confocal optical filtering. The variation of the light path of a micrometer magnitude microregion is measured by comparing the continuous scanning and the interference, and thereby, the spatial quantity value distribution of the refractivity is measured. The present invention solves the problem that the existing integral interference method can not effectively measure the three-dimensional refractivity, and the differential interference chromatography measuring instrument has the advantages of high measurement precision and simple structure. Because various physical properties of the temperature, the concentration, the density of substances and the like are closely relevant to the refractivity and the differential interference chromatography measurement uses the refractivity of the substances as the primitive physical measurement quantity, the present invention can indirectly measure various physical quantities relevant to the refractivity by measuring the refractivity and has wide application potential in the fields of scientific research and engineering.
Description
Technical field
The present invention relates to measure the differential interference chromatography method and the surveying instrument thereof of three-dimensional refractive index.
Background technology
Refractive index is one of fundamental physical quantity that characterizes optical transparency material optical property.In the various optical transparency materials, the variation such as density, concentration, temperature, stress and so on physical quantities and thing phase, structural form etc. all can cause change of refractive.Space distribution and time according to refractive index change, and can analyze and even definite other multiple physics " amount ".Therefore, the measurement of refractive index is the measurement with basic meaning, and has a wide range of applications, and is the very big nondestructiving detecting means of a kind of development potentiality.In this class detection technique, based on classical interferometry and Holographic Interferometry principle, occupy an leading position.Yet existing various transmission-type interferometric method generally only is suitable for measuring the two dimensional field amount.Because the interference that the transmission-type interferometry is observed is the integrating effect after light passes through medium,, could carry out quantitative test exactly so must suppose that medium is a constant along the index distribution of a certain direction (normally observed ray).Though holography has the characteristic of three-dimensional record and reproduction, can not record three-dimensional refractive index with common used plain mode.In recent years, external very active to the research of chromatographic technique, it is fewer that the research of domestic this respect is also carried out.Utilize the optical chromatography method,, select suitable algorithm then, utilize computing machine to carry out field amount reconstruct, can obtain the index distribution on some sections in the medium, realize the three dimensional field measurement by obtaining light field data at a plurality of projecting directions.But, because the physical process of multi-direction detecting remains the integration interference effect of intercepting and capturing light, and must finish an amount reconstruct, so measurement sensitivity and precision are not high by complicated algorithm.Adopt multi-direction detecting, also can cause the apparatus complexity inevitably, measure and the loaded down with trivial details N.Reinecke of analytical calculation process, G.Petritsch, D.Schmitz, D.Mewes, Tomographic measurement techniques-visualization of multiphase flows, Chem.Eng.Technol.21 (1998) 1,7-18.
Summary of the invention
The objective of the invention is Measurement and analysis for three-dimensional physical field amount a kind of differential interference chromatography method of measuring three-dimensional refractive index and simple in structure and have a measuring instrument than high measurement accuracy is provided.
The differential interference chromatography method of measurement three-dimensional refractive index of the present invention is to adopt to survey object lens, half-reflecting mirror and plane mirror and measured object composition Michelson optical interference circuit; Survey object lens, confocal lens and pinhole filter and form the confocal wave-filtration optical road; Michelson's optical interference circuit and confocal filtering light path constitute jointly surveys the light group, the coherent light that utilizes half-reflecting mirror that light source is sent is divided into two bundles, wherein a branch of through surveying the front focus that object lens converge at the confocal wave-filtration optical road, make the front focus on confocal wave-filtration optical road be in measured object inside, the backscattering of confocal wave-filtration optical road front focus forms thing light, another bundle reflects to form reference light by plane mirror, thing light and reference light produce interference signal at the unthreaded hole center of pinhole filter, send into A/D converter after converting interference signal to electric signal with photoelectric commutator, by A/D converter is digital signal with analog signal conversion in real time, this digital signal is imported Computer Storage after the data acquisition unit collection, and provide refractive index by computing machine and calculate the result, simultaneously send the control signal that the front focus that makes the confocal wave-filtration optical road moves by computing machine in measured object, control precision optical machinery regulating device drives to be surveyed the light group and does the 3-D scanning displacement.
Be used to realize the measuring instrument of the differential interference chromatography method of above-mentioned measurement three-dimensional refractive index, comprise casing with light hole, the interior coaxial cable of casing device successively has: survey object lens, 45 ° of tilting half-reflecting mirrors, confocal lens, pinhole filter and photoelectric commutator, device has plane mirror and coherent source respectively in the both sides of half-reflecting mirror minute surface, cabinet is installed in to be done on the three-dimensional precision optical machinery regulating device that moves, the input end of the A/D converter that the output terminal of photoelectric commutator is outer with being arranged on casing links to each other, the output terminal of A/D converter is connected with the input end of data acquisition unit, the output terminal of data acquisition unit is connected with input end and computer, being used for of computing machine output controlled the precision optical machinery regulating device and makes the signal of three-dimensional motion and be connected by the action execution unit of signal wire with the precision optical machinery regulating device, and the displacement transducer in the precision optical machinery regulating device is connected with the input end of data acquisition unit by signal wire.
The principle of work of differential interference laminar analysis measurement instrument is based on the combination of michelson interference and the confocal filtering method of optics, promptly use the focusing-detection light beam, utilize confocal optics filtering to extract the backscattering light of measured medium inside " point " (diameter is the zone of several microns), compare by continuous sweep and interference, the change in optical path length of (micron dimension) between the metering Microcell is thereby the space value of definite refractive index distributes (absolute index of refraction).
Above-mentioned coherent source is a continuous wave laser, for example He-Ne laser instrument, or other monochromatic source.
Among the present invention, survey object lens, half-reflecting mirror and plane mirror and measured object and form Michelson's optical interference circuit; Survey object lens, confocal lens and pinhole filter and form the confocal wave-filtration optical road, Michelson's optical interference circuit and confocal filtering light path combine, and constitute to survey the light group.The backscattering light of confocal wave-filtration optical road front focus (thing light) produces interference with reference light on the back focus of confocal wave-filtration optical road, the logical light center of pinhole filter just is positioned on the back focus of confocal lens; Interference signal is received and converts to electric signal after by pinhole filter by photoelectric commutator, A/D converter is a digital signal with the analog signal conversion of photoelectric commutator output in real time, this digital signal is admitted to Computer Storage then through the data acquisition unit collection; Data analysis software and Control Software are housed in the computing machine, the former provides refractive index and related physical field quantitative analysis result of calculation (space distribution of absolute index of refraction and the physical vision that makes up according to refractive index), the latter is used to control the precision optical machinery regulating device, does the 3-D scanning displacement to drive casing.
The present invention is with optical interference and optics is confocal combines, and back scattering differential measurement method and differential interference laminar analysis measurement instrument are provided.The present invention had not only solved in the past can not effectively measure the problem of three-dimensional refractive index with the integration interference technique, and the differential interference laminar analysis measurement instrument measuring accuracy height that is provided, simple in structure.Because multiple other physical propertys such as the temperature of material, concentration, density are all closely related with refractive index, and the differential interference laminar analysis measurement with the refractive index of material as the original measurement physical quantity, therefore, the present invention can come indirect determination other multiple physical quantity relevant with refractive index by measuring refractive index, all have application potential widely in scientific research and engineering field, can be widely used in the measurement of field refractive indexes such as physics, chemistry, chemical industry, material, pharmacy, biology, medical science, environment and related physical quantity.
Description of drawings
Fig. 1 is the structural representation of differential interference laminar analysis measurement instrument,
Fig. 2 is that refractive index is calculated and measuring point location synoptic diagram.
Embodiment
With reference to Fig. 1, differential interference laminar analysis measurement instrument of the present invention comprises the casing 15 with light hole 16, in the casing from left to right coaxial cable successively device have: survey object lens 1,45 ° of tilting half-reflecting mirrors 2, confocal lens 3, pinhole filter 4 and photoelectric commutator 6, device has plane mirror 5 and coherent source 7 respectively in the both sides of half-reflecting mirror 2 minute surfaces, cabinet 15 is installed in by dovetail groove and does on the three-dimensional precision optical machinery regulating device 14 that moves, three-dimensional precision optical machinery regulating device 14 is provided with the displacement transducer 13 and the action execution unit 12 of Displacement Measurement, the resolution of displacement transducer is 0.01～0.1 micron, can adopt the PP 281 R scramblers of Heidenhain company; Performance element 12 comprises high precision stepper motor and driver, for example can adopt the stepper motor VRDM364 LH and the driver D921 of BergerLahr company.The input end of the A/D converter 9 that the output terminal of photoelectric commutator 6 is outer with being arranged on casing links to each other, the output terminal of A/D converter 9 is connected with the input end of data acquisition unit 10, the output terminal of data acquisition unit 10 is connected with the input end of computing machine 11, computing machine 11 output be used to control the signal that precision optical machinery regulating device 14 is done three-dimensional motion, be connected with action execution unit 12 in the precision optical machinery regulating device 14 by signal wire, the displacement transducer 13 in the precision optical machinery regulating device 14 is connected by the input end of signal wire with data acquisition unit 10.Data acquisition unit 10 also can place computing machine 11.
Above-mentioned photoelectric commutator 6 can adopt photomultiplier, for example the R7400U-20 of Hamamatsu company; A/D converter 9 can adopt the ADC MAX1072 or the MAX1075 of Maxim/Dallas company; Data acquisition unit 10 can be a data collecting card, and for example the PXI module of general company is opened up in Sichuan.Coherent source 7 is helium-neon laser or other monochromatic source, and its installing and locating should guarantee that the beam axis of incident half-reflecting mirror 2 is vertical with the primary optical axis and the plane mirror 5 of confocal filtering system.
During measurement, measured object 8 is placed the place ahead of cabinet light hole 16.Here, survey object lens 1, half-reflecting mirror 2, plane mirror 5 composition michelson interference light paths; Survey object lens 1, confocal lens 3, pinhole filter 4 composition confocal wave-filtration optical roads; Michelson interference light path and confocal filtering light path combine, and constitute to survey the light group.Send the coherent parallel lights bundle by coherent source 7, inject half-reflecting mirror 2 with 45.Light beam is divided into two-way through half-reflecting mirror 2 effect, and one the tunnel is propagated left along the optical axis of object lens 1 by half-reflecting mirror 2 reflections, forms and visits object test light; Half-reflecting mirror 2 is crossed by another Reuter, and the normal incidence plane mirror 5 then, is reflected to form reference light by plane mirror 5.Visiting object test light focuses on through surveying object lens 1, form the taper detecting light beam and inject measured object 8, on the light beam convergent point in measured object 8, visiting object test light is dispersed on all directions, the backscattering light that wherein is in the input ray pencil scope returns by former road, become directional light after surveying object lens 1, some sees through this bundle light half-reflecting mirror 2 and continues backward (among the figure right-hand) and propagate; Reference light after plane mirror 5 and half-reflecting mirror 2 reflect, converges and propagation backward with thing light earlier.Thing light and reference light be by confocal lens 3, is that the logical light center of pinhole filter 4 converges in its back focus, and interferes.When the front focus of surveying object lens 1 is in the inside of measured object 8, detection light group is moved with respect to the incident direction of measured object 8 along light, promptly make longitudinal scanning, shown in the four-headed arrow among Fig. 1, then the focus point of thing light moves in measured object continuously.So focus point changes continuously to the light path of interference field, and the light path of reference light remains unchanged, so the optical path difference of the two can change continuously along with the carrying out of scanning process, and interference strength also changes thereupon.Can realize the measurement of three-dimensional refractive index thus.
Referring to Fig. 2, by the interferometry theory, for any 1 O on the sweep trace
1As long as measure its contiguous 1 O
2To an O
1Optical path difference and survey the scanning amount of movement of light group, just can calculate an O according to the relation between optical path difference, refractive index and the geometry distance three
2Refractive index, and determine a some O
2The position.In Fig. 2, to establish under the original state, the front focus of surveying object lens 1 just is positioned at the surface point O of measured object 8, is that initial point is set up coordinate system O-xyz with an O.Move a distance, d when surveying object lens 1 with surveying the light group
1After, detecting light beam focuses on an O because of the deviation effect of measured medium
1The place.If the refractive index of measured object is uniformly, perhaps as some O and some O
1Spacing very little, thereby can think when refractive index between these 2 is constant, by refraction law and optical path difference analysis, can obtain following two computing formula:
δ
1＝n
1d
1 (2)
Can calculate an O and O by formula (1)
1Between refractive index n
1, and formula (2) provides an O and put O
1Between apart from δ
1Δ in the formula (1)
1Be to survey object lens 1 along z axle displacement d
1The optical path difference that the back is measured, its concrete numerical value is determined by the variation cycle (order of interference) of the wavelength of surveying light wave and interference strength, every appearance one minor peaks of interference strength, expression has produced the optical path difference of λ/2, and λ is the wavelength of light wave.Point O
1The position and after refractive index determines, continue along z axially before scanning, can utilize formula
(N=1,2,3 ..., be the measuring point sequence number)
δ
N＝n
Nd
N (4)
Calculate the position and the refractive index of series of points on the sweep trace successively.After finishing the scanning of a vertical line, laterally move and survey the light group, promptly change the x of sweep trace, the y coordinate again can be along another vertical line scanning.Like this,, just can carry out three-dimensional measurement, obtain the index distribution of area of space measured object according to certain sweeping scheme.Formula (1), (2), derive under paraxial condition in (3), (4), so the design of actual measuring system, visit object test light and can not adopt angle pencil of ray, and must be light pencil, promptly paraxial light.
Claims (3)
1. the differential interference chromatography method of measurement of species three-dimensional refractive index, this method adopt surveys object lens (1), half-reflecting mirror (2) and plane mirror (5) and measured object (8) composition Michelson optical interference circuit; Survey object lens (1), confocal lens (3) and pinhole filter (4) and form the confocal wave-filtration optical road; Michelson's optical interference circuit and confocal filtering light path constitute jointly surveys the light group, the coherent light that utilizes half-reflecting mirror (2) that light source is sent is divided into two bundles, wherein a branch of through surveying the front focus that object lens (1) converge at the confocal wave-filtration optical road, make the front focus on confocal wave-filtration optical road be in measured object inside, the backscattering of confocal wave-filtration optical road front focus forms thing light, another bundle reflects to form reference light by plane mirror (5), thing light and reference light produce interference signal at the unthreaded hole center of pinhole filter, send into A/D converter after converting interference signal to electric signal with photoelectric commutator, by A/D converter is digital signal with analog signal conversion in real time, this digital signal is imported Computer Storage after the data acquisition unit collection, and provide refractive index by computing machine and calculate the result, simultaneously send the control signal that the front focus that makes the confocal wave-filtration optical road moves in measured object by computing machine, control precision optical machinery regulating device drives detection light group and does the 3-D scanning displacement, it is characterized in that: light source (7) used in this method is for having good coherence's continuous wave laser, the optical transparency material of measured object (8) for having light scattering character, in measuring process, the light path of reference light remains unchanged, make detection light group make longitudinal scanning to measured object (8), after finishing the scanning of a vertical line, laterally move and survey the light group, again along another vertical line scanning, Strength Changes data by data acquisition unit continuous acquisition thing light and reference light interference signal, in longitudinal scanning, maximum value of the every appearance of the interference signal of thing light and reference light, it is the optical path difference of every generation λ/2, calculate a refractive index value, the refractive index of each measuring point and the longitudinal pitch of each measuring point are calculated with following formula respectively:
δ
N＝n
Nd
N
N in the formula
NIt is the refractive index of N measuring point; N=1,2,3 ..., be the sequence number of longitudinal scanning measuring point; δ
NIt is the distance between N measuring point and the N-1 measuring point; d
NBe to survey object lens with surveying the distance that the light group moves; Δ
NBe and d
NCorresponding optical path difference, Δ
N=λ/2, λ is an optical wavelength of surveying light.
2. be used to realize the measuring instrument of the differential interference chromatography method of the described measurement three-dimensional refractive index of claim 1, it is characterized in that this measuring instrument comprises the casing (15) that has light hole (16), the interior coaxial cable of casing device successively has: survey object lens (1), 45 ° of tilting half-reflecting mirrors (2), confocal lens (3), pinhole filter (4) and photoelectric commutator (6), be equipped with fixed plane mirror (5) respectively in the both sides of half-reflecting mirror (2) minute surface and have good coherence's continuous wave laser (7), cabinet (15) is installed in to be done on the three-dimensional precision optical machinery regulating device (14) that moves, the input end of the A/D converter (9) that the output terminal of photoelectric commutator (6) is outer with being arranged on casing links to each other, the output terminal of A/D converter (9) is connected with the input end of data acquisition unit (10), the output terminal of data acquisition unit (10) is connected with the input end of computing machine (11), being used for of computing machine (11) output controlled precision optical machinery regulating device (14) and makes the signal of three-dimensional motion and be connected with the action execution unit (12) of precision optical machinery regulating device (14) by signal wire, and the displacement transducer (13) in the precision optical machinery regulating device (14) is connected by the input end of signal wire with data acquisition unit (10).
3. measuring instrument according to claim 2 is characterized in that said continuous wave laser (7) with good coherence is the He-Ne laser instrument.
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| CNB2004100541920A CN1321322C (en) | 2004-08-30 | 2004-08-30 | Differential interference chromatography for measuring three dimension refractive index |
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Families Citing this family (11)
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| CN100498421C (en) * | 2005-07-21 | 2009-06-10 | 中国科学院光电技术研究所 | Optical coherence tomography system using microlens or microprism array for scanning |
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| EP1962081B1 (en) * | 2007-02-21 | 2016-09-14 | Agfa HealthCare N.V. | System for optical coherence tomography |
| CN101614526B (en) * | 2009-07-02 | 2010-09-29 | 浙江大学 | Double-confocal method for measuring thickness and refractive index and measuring device |
| CN105675546A (en) * | 2016-03-15 | 2016-06-15 | 东北大学 | Refractive-index tomography reconstruction device and method |
| CN106872469B (en) * | 2017-03-16 | 2019-11-19 | 浙江大学 | A kind of chromatography phase microscopic method and device based on corner-sharing interference |
| CN108535735A (en) * | 2018-04-13 | 2018-09-14 | 长春理工大学 | Range simulation device for indoor continuously adjustable |
| CN109991190B (en) * | 2019-04-19 | 2020-08-11 | 北京理工大学 | Transverse subtraction differential confocal lens refractive index measuring method |
| CN109991191B (en) * | 2019-04-19 | 2020-12-11 | 北京理工大学 | Refractive index measuring method for bilateral dislocation differential confocal lens |
| CN111337455B (en) * | 2020-04-17 | 2022-09-23 | 湖南文理学院 | Concentration detection system for electroplating solution |
| CN114280007A (en) * | 2021-11-24 | 2022-04-05 | 中国科学院福建物质结构研究所 | Device and method for testing refractive index of optical material |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4493555A (en) * | 1982-09-22 | 1985-01-15 | Honeywell Inc. | High sensitivity focal sensor for electron beam and high resolution optical lithographic printers |
| EP0814318A2 (en) * | 1996-06-17 | 1997-12-29 | THE INSTITUTE OF PHYSICAL & CHEMICAL RESEARCH | Method of measuring thickness and refractive indices of component layers of laminated structure and measuring apparatus for carrying out the same |
| JP2001141652A (en) * | 1999-11-18 | 2001-05-25 | Japan Science & Technology Corp | Method and apparatus for simultaneous measurement of refractive index and thickness of object to be measured by light interference method |
| CN1369702A (en) * | 2002-03-19 | 2002-09-18 | 天津大学 | High-speed optical interference chromatographic imaging apparats |
| JP2003106934A (en) * | 2001-09-28 | 2003-04-09 | Nikon Corp | Device and method for measuring optical path length, device and method for measuring thickness, and device and method for measuring inclined component of refractive index distribution |
-
2004
- 2004-08-30 CN CNB2004100541920A patent/CN1321322C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4493555A (en) * | 1982-09-22 | 1985-01-15 | Honeywell Inc. | High sensitivity focal sensor for electron beam and high resolution optical lithographic printers |
| EP0814318A2 (en) * | 1996-06-17 | 1997-12-29 | THE INSTITUTE OF PHYSICAL & CHEMICAL RESEARCH | Method of measuring thickness and refractive indices of component layers of laminated structure and measuring apparatus for carrying out the same |
| JP2001141652A (en) * | 1999-11-18 | 2001-05-25 | Japan Science & Technology Corp | Method and apparatus for simultaneous measurement of refractive index and thickness of object to be measured by light interference method |
| JP2003106934A (en) * | 2001-09-28 | 2003-04-09 | Nikon Corp | Device and method for measuring optical path length, device and method for measuring thickness, and device and method for measuring inclined component of refractive index distribution |
| CN1369702A (en) * | 2002-03-19 | 2002-09-18 | 天津大学 | High-speed optical interference chromatographic imaging apparats |
Non-Patent Citations (5)
| Title |
|---|
| 基于光CT技术的生物组织折射率测量原理分析 薛玲玲 等，南开大学学报，第33卷第2期 2000 * |
| 基于光CT技术的生物组织折射率测量原理分析 薛玲玲 等，南开大学学报，第33卷第2期 2000;生物组织折射率测量的一种简便方法 王新宇 等，光电子.激光，第13卷第9期 2002;相干检测偏振共焦扫描显微成像技术 唐志列 等，应用激光，第20卷第3期 2000;用干涉原理测定液体折射率的新方法 雷华等，光学技术，第27卷第5期 2001 * |
| 生物组织折射率测量的一种简便方法 王新宇 等，光电子.激光，第13卷第9期 2002 * |
| 用干涉原理测定液体折射率的新方法 雷华等，光学技术，第27卷第5期 2001 * |
| 相干检测偏振共焦扫描显微成像技术 唐志列 等，应用激光，第20卷第3期 2000 * |
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