CN209027459U - The displacement sensor that amplification factor can be improved with refracting telescope - Google Patents
The displacement sensor that amplification factor can be improved with refracting telescope Download PDFInfo
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- CN209027459U CN209027459U CN201821794638.7U CN201821794638U CN209027459U CN 209027459 U CN209027459 U CN 209027459U CN 201821794638 U CN201821794638 U CN 201821794638U CN 209027459 U CN209027459 U CN 209027459U
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- laser beam
- refracting telescope
- reflecting mirror
- displacement sensor
- amplification factor
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Abstract
The utility model provides a kind of displacement sensor that amplification factor can be improved with refracting telescope, which includes laser source, and for launching laser beam, and the laser beam is incident to a reflecting surface of triangular wave reflecting mirror；Microscope group, including at least two reflecting mirrors are reflected, the reflecting mirror is used to receive the laser beam of corresponding reflective surface, and reflects received laser beam again；The laser beam of the reflecting surface, the laser beam for emitting laser source or reflecting mirror reflection reflects again；Refracting telescope for receiving through reflective surface and no longer by the received laser beam of reflection microscope group, and reflects laser beam；Photodetector for receiving the laser beam reflected through refracting telescope, and measures its incoming position.The utility model reduces the angle of laser light incident to photodetector, therefore displacement sensor can be further improved displacement measurement accuracy by the setting of refracting telescope.
Description
Technical field
The utility model relates to field of measuring technique, in particular to a kind of position that amplification factor can be improved with refracting telescope
Displacement sensor.
Background technique
Displacement measurement new principle based on optical triangulation amplifying method is on the basis of optical triangulation amplifying method, in conjunction with three
Angle wave optical device and high-precision PSD (Position Sensitive Device, position sensitive (sensitivity) detector) are realized
's.Triangular wave optical device segments linear displacement at equal intervals, while reducing optical device machining accuracy and size requirement, drop
The size requirement of low high-precision PSD realizes high precision position shift measurement in a small range.Displacement based on optical triangulation amplifying method is surveyed
Amount principle is after relative displacement occurs for reading head and triangular wave optical reflection component, to amplify by optical triangulation, horizontal small position
It moves t and is amplified to T on photodetector (PSD), the precision of linear measure longimetry can be greatly promoted.However position in the prior art
Displacement sensor, for example, application No. is 201810736602.1, it is entitled " can be improved amplification factor displacement sensor and
Its measurement method " in the displacement sensor that provides, displacement measurement principle and structure as shown in fig. 7, its displacement sensor measurement
Amplification factor is related with PSD incidence angle, and the amplification factor of sensor is easy to be affected, and ought as be incident in the laser beam of PSD
Incidence angle increase when, the measurement accuracy of PSD itself can decline.
Utility model content
The purpose of this utility model is to provide it is a kind of can be improved measurement accuracy can be improved amplification with refracting telescope
The displacement sensor of multiple.
To achieve the goals above, the utility model the following technical schemes are provided:
A kind of displacement sensor that amplification factor can be improved with refracting telescope, comprising:
Triangular wave reflecting mirror, including at least three reflectings surface, at least three reflecting surface are sequentially distributed along moving direction；
Laser source, for launching laser beam, and the laser beam is incident to a reflecting surface of triangular wave reflecting mirror；
Microscope group is reflected, including at least two reflecting mirrors, at least two reflecting mirror are sequentially distributed along moving direction；
Each reflecting mirror at least corresponds to a reflecting surface, and the reflecting mirror is for receiving corresponding reflective surface
Laser beam, and reflect received laser beam again；
The reflecting surface for receiving the laser beam of laser source transmitting or the laser beam of reflecting mirror reflection, and makes received
Laser beam reflects again；
Refracting telescope for receiving through reflective surface and no longer by the received laser beam of reflection microscope group, and makes laser beam
It reflects；
Photodetector for receiving the laser beam reflected through refracting telescope, and measures its incoming position；
Processing system, the incoming position variable quantity of the laser beam for being received according to photodetector, calculates tested
The change in displacement value of object.
As an embodiment, be parallel to each other between at least two reflecting mirror, and every two reflecting mirror it
Between by the connection of transition part, laciniation is integrally formed.
As an embodiment, at least two reflecting mirror is directly connected to, and is integrally formed "-" type structure.
As an embodiment, the mirror parallel is in the reflecting surface, the laser beam of laser source transmitting and anti-
The acute angle for penetrating face formation is equal to the angle of twice of reflecting surface and horizontal plane.
As an embodiment, the refracting telescope is bonded with photodetector.
As an embodiment, the laser beam is P-polarized light.
As an embodiment, the plane of incidence of the refracting telescope and exit facet are plane, and the plane of incidence and outgoing
Face is parallel to each other.
It as an embodiment, further include shell, laser source, reflection microscope group, refracting telescope and photodetector are solid
Surely it is set in shell, forms a reading head.
As an embodiment, the reading head is at least two, and the position between at least two reading head
Set relationship satisfaction: in measurement process, at least one reading head can read incidence of the laser beam on photodetector
Location variation.
Compared with prior art, the utility model has the following beneficial effects:
The utility model has the displacement sensor that amplification factor can be improved of refracting telescope, passes through setting for multiple reflecting mirrors
It sets, realizes multiple reflections, then realize more times of amplifications, solve the problems, such as amplification factor limitation, so as to increase amplification
Multiple improves measurement accuracy.
By the setting of multiple reading heads, in measurement process, if some reading head cannot read the position of laser beam
It when variable quantity, switches to another reading head and measures, therefore can ensure and can realize effective measurement in displacement process,
Realize continuous dislocation measurement.
By the setting of refracting telescope, while so that increasing displacement sensor amplification factor, laser light incident is reduced to photoelectricity
The angle of detector, to improve the measurement accuracy of displacement sensor.
It is plane by the plane of incidence and exit facet of refracting telescope, and the plane of incidence is parallel to each other with exit facet, so that incident
Laser position variable quantity to refracting telescope is identical as the laser position variable quantity of photodetector is incident to, to improve displacement
The measurement accuracy of sensor.
By using polarization laser, the intensity that laser is incident to photodetector by refraction is increased, refraction is reduced
Mirror reflects the ratio of incident light, in other words can reduce requirement of the system to laser light incident intensity.
Detailed description of the invention
It, below will be to use required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment
Attached drawing briefly introduce, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore should not be seen
Work is the restriction to range, for those of ordinary skill in the art, without creative efforts, can be with
Other relevant drawings are obtained according to these attached drawings.
Fig. 1 show a kind of displacement sensing that amplification factor can be improved with refracting telescope of structure of the offer of embodiment 1
The measuring principle schematic diagram of device.
Fig. 2 show a kind of displacement sensing that amplification factor can be improved with refracting telescope of structure of the offer of embodiment 1
The laser beam incident angle schematic diagram of device.
Fig. 3 show displacement and calculates formula principle schematic diagram.
Fig. 4 show a kind of displacement sensing that amplification factor can be improved with refracting telescope of structure of the offer of embodiment 2
The measuring principle schematic diagram of device.
Fig. 5 show a kind of displacement sensing that amplification factor can be improved with refracting telescope of structure of the offer of embodiment 3
The measuring principle schematic diagram of device.
The displacement that amplification factor can be improved with refracting telescope that Fig. 6 show another structure of the offer of embodiment 3 passes
The measuring principle schematic diagram of sensor.
Fig. 7 show the schematic illustration of existing displacement sensor.
Figure label explanation:
Laser source 1, laser beam 2, triangular wave reflecting mirror 3, reflecting surface 31 reflect microscope group 4, reflecting mirror 41, photodetector
5, shell 6, refracting telescope 7.
Specific embodiment
Below in conjunction with attached drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out clear
Chu completely describes.It should be appreciated that specific embodiment described herein is used only for explaining the utility model, it is not used to limit
Determine the utility model.Based on the embodiments of the present invention, those skilled in the art are in no creative work under the premise of institute
The every other embodiment obtained, belongs to the protection scope of the utility model.
Embodiment 1
Referring to Fig. 1, a kind of displacement sensor that amplification factor can be improved with refracting telescope is provided in the present embodiment,
Including laser source 1, laser beam 2, triangular wave reflecting mirror 3, triangular wave reflecting mirror 3 includes reflecting surface 31, reflects microscope group 4, reflection
Microscope group 4 includes reflecting mirror 41, photodetector 5, shell 6, refracting telescope 7.
The utility model is in the displacement sensor that amplification factor can be improved of refracting telescope:
Laser source 1 launches laser beam 2, and makes first reflecting surface 31 of 2 directive triangular wave reflecting mirror 3 of laser beam；It is right
First reflecting mirror 41 of the reflection microscope group 4 of first reflecting surface 31 is answered to be used to receive laser beam 2 by the of triangular wave reflecting mirror 3
The laser beam of one reflecting surface 31 reflection, and the laser beam is made to be incident to the measurement process of first reflecting surface 31 in laser beam 2
In, along second reflecting surface 31 of same multipath tolerant to triangular wave reflecting mirror 3；Second reflection of corresponding second reflecting surface
Mirror 41 makes the laser beam reflex to triangle for receiving the laser beam reflected by second reflecting surface 31 of triangular wave reflecting mirror
The third reflecting surface 31 of wave reflection mirror 3；The reception of refracting telescope 7 is reflected through reflecting surface 31 and is no longer swashed by reflection microscope group 4 is received
Light beam 2, and laser beam 2 is reflected；Photodetector 5 for receiving the laser beam 2 reflected through refracting telescope 7, and measures
Its incoming position；The incoming position variable quantity of processing system, the laser beam 2 for being received according to photodetector 5 calculates
The change in displacement value of testee.
In the present solution, while so that increasing displacement sensor amplification factor, reducing laser by the setting of refracting telescope
It is incident to the angle of photodetector, therefore improves the measurement accuracy of displacement sensor.
Readily comprehensible, when the angle of incident ray and photodetector receiving plane is too small, the hot spot of incident ray can be sent out
The offset of raw center of gravity, impacts the measurement accuracy of photodetector.By the setting of refracting telescope, so that increasing displacement sensing
While device amplification factor, the angle of laser light incident to photodetector is reduced, therefore displacement sensor can be improved displacement and survey
Accuracy of measurement.And in the present solution, being caused in order to avoid refraction occurs again for the laser beam after refracting telescope reflects to measurement accuracy
It influences, the refracting telescope is bonded with photodetector.
In further embodiment, the refracting telescope 7 is plane mirror.Entered by the refracting telescope of, fitting photodetector
Penetrating face and exit facet is plane, and the plane of incidence is parallel to each other with exit facet, so that being incident to the laser position variation of refracting telescope
Measure it is identical as the laser position variable quantity of photodetector is incident to, to improve the measurement accuracy of displacement sensor.
As a kind of preferably embodiment, the laser beam 2 is P-polarized light.Laser beam is reduced to enter with big incidence angle
The reflectivity for penetrating laser beam when refracting telescope reduces the ratio of refracting telescope reflection incident light, in other words can reduce system pair
The requirement of laser light incident intensity.
As shown in Figure 1, photodetector 5 uses PSD, the laser beam 2 before displacement is indicated by the solid line, the laser beam after displacement
2 are represented by dashed line, and the transmission path of laser beam 2 is as follows:
Laser source 1 launches laser beam 2 before being displaced, and makes first reflecting surface of 2 directive triangular wave reflecting mirror 3 of laser beam
31；First reflecting mirror 41 of the reflection microscope group 4 of corresponding first reflecting surface 31 is for receiving laser beam 2 by triangular wave reflecting mirror
The laser beam of 3 first reflecting surface 31 reflection, and the laser beam is made to be incident to the measurement of first reflecting surface 31 in laser beam 2
In the process, along second reflecting surface 31 of same multipath tolerant to triangular wave reflecting mirror 3；Second of corresponding second reflecting surface
Reflecting mirror 41 reflexes to the laser beam for receiving the laser beam reflected by second reflecting surface 31 of triangular wave reflecting mirror
The third reflecting surface 31 of triangular wave reflecting mirror 3；The reception of refracting telescope 7 is reflected through reflecting surface 31 and is no longer received by reflection microscope group 4
Laser beam 2, and laser beam 2 is reflected；Photodetector 5 receives the laser beam 2 reflected through refracting telescope 7, and measures
Its incoming position；It is denoted as the first incoming position at this time.
It (is shown as in Fig. 1 to left dislocation, laser source 1, reflection microscope group 4, refracting telescope 7 and photodetection when displacement after displacement
5 synchronous shift of device), laser source 1 launches laser beam 2, and makes first reflecting surface of 2 directive triangular wave reflecting mirror 3 of laser beam
31；First reflecting mirror 41 of the reflection microscope group 4 of corresponding first reflecting surface 31 is for receiving laser beam 2 by triangular wave reflecting mirror
The laser beam of 3 first reflecting surface 31 reflection, and the laser beam is made to be incident to the measurement of first reflecting surface 31 in laser beam 2
In the process, along second reflecting surface 31 of same multipath tolerant to triangular wave reflecting mirror 3；Second of corresponding second reflecting surface
Reflecting mirror 41 reflexes to the laser beam for receiving the laser beam reflected by second reflecting surface 31 of triangular wave reflecting mirror
The third reflecting surface 31 of triangular wave reflecting mirror 3；The reception of refracting telescope 7 is reflected through reflecting surface 31 and is no longer received by reflection microscope group 4
Laser beam 2, and laser beam 2 is reflected；Photodetector 5 receives the laser beam 2 reflected through refracting telescope 7, and measures
Its incoming position；It is denoted as the second incoming position at this time.Laser can be calculated according to the first incoming position and the second incoming position
The displacement in source 1, the i.e. displacement of testee.When the plane of incidence and exit facet of refracting telescope are plane, and the plane of incidence with go out
When the face of penetrating is parallel to each other, calculating process can be obtained according to triangle geometrical relationship, as shown in figure 3,θ is the angle for being incident to the laser beam and refracting telescope of refracting telescope, and δ is photodetection
The acute angle of device and testee direction of displacement.
As a kind of preferably embodiment, as shown in Figure 1, the folder of the reflecting surface 31 of triangular wave reflecting mirror 3 and horizontal plane
Angle is first for 150 degree (only for being horizontally to the right positive direction and be rotated in the counterclockwise direction) microscope group 4 being reflected in guarantee
Reflecting mirror 41 receives the laser beam that laser beam 2 is reflected by first reflecting surface 31 of triangular wave reflecting mirror 3, and the laser beam is made to exist
Laser beam 2 is incident in the measurement process of the same reflecting surface 31, along second of same multipath tolerant to triangular wave reflecting mirror 3
Reflecting surface；The reflecting mirror 41 of corresponding second reflecting surface is received by the laser of second reflective surface of triangular wave reflecting mirror
Beam, and in the case where the third reflecting surface for making the laser beam reflex to triangular wave reflecting mirror, the setting that can have other different
Mode.
For example, can realize that first reflecting mirror 41 of reflection microscope group 4 is sharp for receiving in the following way shown in Fig. 2
The laser beam that light beam 2 is reflected by first reflecting surface 31 of triangular wave reflecting mirror 3, and it is incident to the laser beam in laser beam 2
In the measurement process of the same reflecting surface 31, along second reflecting surface of same multipath tolerant to triangular wave reflecting mirror 3；Corresponding the
The reflecting mirror 41 of two reflectings surface swashs this for receiving by the laser beam of second reflective surface of triangular wave reflecting mirror
Light beam reflexes to the third reflecting surface of triangular wave reflecting mirror: reflecting mirror is parallel with reflecting surface, laser beam 2 and first reflecting surface
31 acute angle is equal to the angle of twice reflecting surface 31 and horizontal plane, i.e. the angle 1 indicated in Fig. 2 is equal to angle 2.
As shown in Figure 2, for triangular wave reflecting mirror 3, meet reflecting surface be parallel to each other (i.e. with the angle of horizontal plane one
Cause) under conditions of, there is no limit that is, for the angle of two reflectings surface of formation triangular wave, there is no limit examples for specific structure
It is as shown in Figure 2 120 degree for the angle of two reflectings surface；In another example the angle for shown in Fig. 3 being two reflectings surface is 150
Degree, etc..And triangular wave also not necessarily needs isosceles triangle wave, that is, formed triangular wave two reflectings surface and horizontal plane it is sharp
Angle angle can be equal, can also be unequal.
The above-mentioned displacement sensor that amplification factor can be improved with refracting telescope can also include shell 6, laser source 1, anti-
It penetrates microscope group 4, refracting telescope 7 and photodetector 5 to be fixedly installed in shell 6, forms reading head, the laser that laser source 1 emits
Beam 2 and its reflected beams can pass through the transmitting-receiving end face of reading head.Laser source 1, reflection microscope group 4 and photodetector 5 are solid
Surely it is set in shell 6, mutual position can be kept to fix, can also ensure that three keeps synchronous shift.
It when measurement, can be fixed on testee, be read using by triangular wave reflecting mirror 3 according to practical situations
Head remains stationary, and when testee is subjected to displacement, relative motion occurs for triangular wave reflecting mirror 3 and reading head, and reading head can
The triangular wave reflecting mirror 3 i.e. shift value of testee is obtained with measurement；Alternatively, measured object can also be fixed on using by reading head
On body, triangular wave reflecting mirror 3 is remained stationary, and testee, which is subjected to displacement, drives reading head movement, reading head and triangle wave reflection
Relative displacement occurs for mirror 3, and reading head can measure the relative displacement between reading head and triangular wave reflecting mirror 3, so obtain by
Survey the shift value of object；Measurement selects triangular wave reflecting mirror 3 or reading head to be fixed on testee, improves measurement just
Benefit.
Based on the above-mentioned displacement sensor that amplification factor can be improved with refracting telescope, measurement method includes following step
It is rapid:
Testee is fixed on triangular wave reflecting mirror or reading head；
Laser source, triangular wave reflecting mirror, photodetector, reflection microscope group, the positional relationship of refracting telescope are adjusted, so that laser
The laser beam of source transmitting is incident to a reflecting surface of triangular wave reflecting mirror, is incident in reflection microscope group after the reflective surface
A corresponding reflecting mirror, reflecting mirror receive the laser beam of the correspondence reflective surface of triangular wave reflecting mirror, and make received
Laser beam reflexes to next reflecting surface of triangular wave reflecting mirror, and laser beam is in the reflection of reflection microscope group and triangular wave reflecting mirror
Refracting telescope is incident between face after multiple reflections, refracting telescope receives through reflective surface and no longer received by reflection microscope group
Laser beam, and make laser beam occur to reflect and be incident to photodetector；
Emit laser beam, the laser beam between reflection microscope group and the reflecting surface of triangular wave reflecting mirror after multiple reflections simultaneously
After refracting telescope reflects, its original incident position is detected by photodetector；
Testee displacement, in displacement process, the variation of the incoming position of photodetector detection laser beam, until quilt
It surveys object and stops displacement；
The incoming position variable quantity for the laser beam that processing system is detected by photodetector, calculates testee
Shift value.
Embodiment 2
Fig. 4 is seen, as shown in figure 4, the displacement sensing that amplification factor can be improved with refracting telescope in the present embodiment
Device described in the embodiment 1 with refracting telescope the displacement sensor of amplification factor can be improved compared with, difference is: this implementation
Multiple reflecting mirrors in example are directly connected to, and are integrally formed "-" type structure.
Embodiment 3
It can the displacement sensor that amplification factor can be improved with refracting telescope and implementation refering to Fig. 5, in the present embodiment
The displacement sensor that amplification factor can be improved described in example 2 with refracting telescope is compared, and difference is: providing in the present embodiment
The displacement sensor that amplification factor can be improved with refracting telescope in, including two reading heads, two reading header structures are consistent,
And at symmetrically placed.
Continuous dislocation may be implemented in the displacement sensor that amplification factor can be improved described in the present embodiment with refracting telescope
Measurement.Specifically, one of two laser beams can be selected to measure, when one of laser beam reflection point is located at certain of reflecting surface
A little positions, such as the intersection position on the top of reflecting surface, two reflectings surface, the length of corresponding photodetector is again limited, therefore
Possibly corresponding photodetector can not be reflected into, which can not just calculate its shift value, another laser beam is anti-
Exit point is located at the other positions of another reflecting surface, can be reflected into corresponding photodetector and can carry out conversion measurement, can
Testee mobile per a moment is realized, at least one in the laser beam that each reflecting surface 31 is reflected on triangular wave reflecting mirror 3
It can be reflected into corresponding photodetector, the reflection that processing system can toggle two photodetectors of calculating at this time swashs
Light-beam position variation, is overlapped accumulative, is displaced disposable variation or continuous increment type change in displacement to testee to realize
Measurement, measurement method is simple, reliable, easy to operate, and can be improved measurement accuracy.
When being measured using the displacement sensor that amplification factor can be improved for having refracting telescope described in the present embodiment,
Steps are as follows:
Testee is fixed on triangular wave reflecting mirror or reading head；
Laser beam, triangular wave reflecting mirror, photodetector, reflection microscope group, the positional relationship of refracting telescope are adjusted, so that reflection
First reflecting mirror in microscope group receives laser beam by the laser beam of the correspondence reflective surface of triangular wave reflecting mirror, and makes this
Laser beam is in the measurement process that laser beam is incident to first reflecting surface, along the of same multipath tolerant to triangular wave reflecting mirror
Two reflectings surface；Second reflecting mirror of corresponding second reflecting surface is for receiving by second reflecting surface of triangular wave reflecting mirror
The laser beam of reflection, and the laser beam is made to reflex to the third reflecting surface of triangular wave reflecting mirror, refracting telescope reception is through reflecting surface
Reflection and no longer by the received laser beam of reflection microscope group, and make laser beam occur reflect and be incident to photodetector；
Emit laser beam, the laser beam is reflecting multiple reflections between microscope group and the reflecting surface of triangular wave reflecting mirror and passing through
After refracting telescope refraction, its original incident position is detected by photodetector；
Testee displacement, in displacement process, the variation of the incoming position of photodetector detection laser beam, until quilt
It surveys object and stops displacement；When the photodetector can not receive the laser beam of reflection, then the repetition of another reading head is switched to
Aforesaid operations process；
The incoming position variable quantity for the laser beam that processing system is detected by photodetector, calculates testee
Shift value.
It is readily comprehensible, in the present embodiment, the purpose that two reading heads are set be avoid wherein one group of photodetector connect
When can not receive laser beam, laser beam can be received by another group of photodetector, realize displacement measurement, therefore in addition to such as Fig. 5
Shown in outside set-up mode, can also have other set-up modes, in conjunction with Fig. 6, it will be understood that set as long as two reading heads are staggered
It sets, so that the laser beam in two reading heads is incident to the original incident point position difference of the reflecting surface of triangular wave reflecting mirror i.e.
It can.Meanwhile it is readily comprehensible in conjunction with Fig. 6, entering for laser beam is received in the photodetector for guaranteeing at least one group reading head
In the case where penetrating position, the quantity and placement location of reading head are not limited.
Similarly, a set of continuous measurement of measuring system realization can also be arranged in displacement sensor described in embodiment 1 again.
Although the displacement sensing apparatus for the amplifying factors that above-mentioned several embodiments provide, reflecting surface three, reflecting mirror is
Two, it is readily understood that, the quantity of reflecting surface and reflecting mirror can be for two and more than two, when reflecting mirror and reflecting surface
When being multiple, multiple reflecting mirrors are sequentially arranged along moving direction with reflecting surface, are guaranteeing that the reflecting mirror is at least one corresponding
The reflecting surface, the reflecting mirror are used to receive the laser beam of corresponding reflective surface, and reflect laser beam；Reflection
Face, for receiving the laser beam of laser source transmitting or the laser beam of reflecting mirror reflection, and in the case where reflecting laser beam,
The quantity of reflecting surface and reflecting mirror is not limited.
Above description is only a specific implementation of the present invention, but the protection scope of the utility model is not limited to
In this, anyone skilled in the art can readily occur in variation within the technical scope disclosed by the utility model
Or replacement, should all it cover within the protection scope of the present utility model.
Claims (9)
1. a kind of displacement sensor that amplification factor can be improved with refracting telescope characterized by comprising
Triangular wave reflecting mirror, including at least three reflectings surface, at least three reflecting surface are sequentially distributed along moving direction；
Laser source, for launching laser beam, and the laser beam is incident to a reflecting surface of triangular wave reflecting mirror；
Microscope group is reflected, including at least two reflecting mirrors, at least two reflecting mirror are sequentially distributed along moving direction；
Each reflecting mirror at least corresponds to a reflecting surface, and the reflecting mirror is used to receive swashing for corresponding reflective surface
Light beam, and reflect received laser beam again；
The reflecting surface for receiving the laser beam of laser source transmitting or the laser beam of reflecting mirror reflection, and makes received laser
Shu Zaici reflects；
Refracting telescope for receiving through reflective surface and no longer by the received laser beam of reflection microscope group, and makes laser beam
Refraction；
Photodetector for receiving the laser beam reflected through refracting telescope, and measures its incoming position；
Processing system, the incoming position variable quantity of the laser beam for being received according to photodetector, calculates testee
Change in displacement value.
2. the displacement sensor that amplification factor can be improved according to claim 1 with refracting telescope, which is characterized in that institute
It states and is parallel to each other between at least two reflecting mirrors, and pass through a transition part connection, whole shape between every two reflecting mirror
At laciniation.
3. the displacement sensor that amplification factor can be improved according to claim 1 with refracting telescope, which is characterized in that institute
It states at least two reflecting mirrors to be directly connected to, is integrally formed "-" type structure.
4. the displacement sensor that amplification factor can be improved according to claim 1 with refracting telescope, which is characterized in that institute
Mirror parallel is stated in the reflecting surface, the acute angle that the laser beam and reflecting surface of laser source transmitting are formed is equal to twice of reflection
The angle in face and horizontal plane.
5. the displacement sensor that amplification factor can be improved according to claim 1 with refracting telescope, which is characterized in that institute
Refracting telescope is stated to be bonded with photodetector.
6. the displacement sensor that amplification factor can be improved according to claim 1 with refracting telescope, which is characterized in that institute
Stating laser beam is P-polarized light.
7. the displacement sensor that amplification factor can be improved according to claim 1 with refracting telescope, which is characterized in that institute
It states the plane of incidence of refracting telescope and exit facet is plane, and the plane of incidence is parallel to each other with exit facet.
8. -7 any displacement sensor that amplification factor can be improved with refracting telescope according to claim 1, feature
It is, further includes shell, laser source, reflection microscope group, refracting telescope and photodetector is fixedly installed in shell, form one
Reading head.
9. the displacement sensor that amplification factor can be improved according to claim 8 with refracting telescope, which is characterized in that institute
Stating reading head is at least two, and the positional relationship between at least two reading head meets: in measurement process, at least
One reading head can read incoming position variable quantity of the laser beam on photodetector.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109141257A (en) * | 2018-11-01 | 2019-01-04 | 北方民族大学 | The displacement sensor and its measurement method that amplification factor can be improved with refracting telescope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109141257A (en) * | 2018-11-01 | 2019-01-04 | 北方民族大学 | The displacement sensor and its measurement method that amplification factor can be improved with refracting telescope |
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