CN208282781U - The displacement sensor of amplification factor can be improved - Google Patents
The displacement sensor of amplification factor can be improved Download PDFInfo
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- CN208282781U CN208282781U CN201821066996.6U CN201821066996U CN208282781U CN 208282781 U CN208282781 U CN 208282781U CN 201821066996 U CN201821066996 U CN 201821066996U CN 208282781 U CN208282781 U CN 208282781U
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- reflecting surface
- amplification factor
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Abstract
The utility model provides a kind of displacement sensor that amplification factor can be improved, the displacement sensor that amplification factor can be improved includes triangular wave reflecting mirror, the triangular wave reflecting mirror includes at least three reflectings surface, and at least three reflecting surface is sequentially distributed along moving direction；Laser source, for launching laser beam, and the laser beam is incident to a reflecting surface of triangular wave reflecting mirror；Microscope group is reflected, including at least two reflecting mirrors, at least two reflecting mirror are sequentially distributed along moving direction；Photodetector for receiving through reflective surface, and is not reflected the received laser beam of microscope group, and measure its incoming position；The incoming position variable quantity of processing system, the laser beam for being received according to photodetector calculates the change in displacement value of testee.The utility model may be implemented more times of amplifications of measurement displacement, the amplification factor and measurement accuracy of displacement sensor then can be improved by the setting of multiple reflecting mirrors.
Description
Technical field
The utility model relates to field of measuring technique, in particular to a kind of displacement sensor that amplification factor can be improved.
Background technique
Displacement measurement new principle based on optical triangulation amplifying method is on the basis of optical triangulation amplifying method, in conjunction with three
Angle wave optical device and high-precision PSD (Position Sensitive Device, position sensitive (sensitivity) detector) are realized
's.Triangular wave optical device segments linear displacement at equal intervals, while reducing optical device machining accuracy and size requirement, drop
The size requirement of low high-precision PSD realizes high precision position shift measurement in a small range.Displacement based on optical triangulation amplifying method is surveyed
Amount principle is after relative displacement occurs for reading head and triangular wave optical reflection component, to amplify by optical triangulation, horizontal small position
It moves t and is amplified to T on photodetector (PSD), the precision of linear measure longimetry can be greatly promoted.However position in the prior art
Displacement sensor, for example, utility model is entitled " to can be improved the displacement sensing of amplification factor application No. is 201810481645.X
Device " in the displacement sensor that provides, amplification factor is still limited, then causes measurement accuracy limited.
Utility model content
The purpose of this utility model is to provide a kind of displacement biographies that amplification factor can be improved that measurement accuracy can be improved
Sensor.
To achieve the goals above, the utility model the following technical schemes are provided:
A kind of displacement sensor that amplification factor can be improved, comprising:
Triangular wave reflecting mirror, including at least three reflectings surface, at least three reflecting surface are sequentially distributed along moving direction；
Laser source, for launching laser beam, and the laser beam is incident to a reflecting surface of triangular wave reflecting mirror；
Microscope group is reflected, including at least two reflecting mirrors, at least two reflecting mirror are sequentially distributed along moving direction；
Each reflecting mirror at least corresponds to a reflecting surface, and the reflecting mirror is for receiving corresponding reflective surface
Laser beam, and reflect received laser beam again；
The reflecting surface for receiving the laser beam of laser source transmitting or the laser beam of reflecting mirror reflection, and makes received
Laser beam reflects again；
Photodetector for receiving through reflective surface and no longer by the received laser beam of reflection microscope group, and measures it
Incoming position；
Processing system, the incoming position variable quantity of the laser beam for being received according to photodetector, calculates tested
The change in displacement value of object.
As an embodiment, be parallel to each other between at least two reflecting mirror, and every two reflecting mirror it
Between by the connection of transition part, laciniation is integrally formed.
As an embodiment, at least two reflecting mirror is directly connected to, and is integrally formed "-" type structure.
As an embodiment, the mirror parallel is in the reflecting surface, the laser beam of laser source transmitting and anti-
The acute angle for penetrating face formation is equal to the angle of twice of reflecting surface and horizontal plane.
It as an embodiment, further include shell, laser source, reflection microscope group and photodetector are fixedly installed on
In shell, a reading head is formed.
As an embodiment, the reading head is at least two, and the position between at least two reading head
Set relationship satisfaction: in measurement process, at least one reading head can read incidence of the laser beam on photodetector
Location variation.
On the other hand, the utility model provides one kind the above-mentioned displacement sensor that amplification factor can be improved simultaneously, including with
Lower step:
Testee is fixed on triangular wave reflecting mirror or reading head；
Laser source, triangular wave reflecting mirror, photodetector, the positional relationship for reflecting microscope group are adjusted, so that laser source emits
Laser beam be incident to a reflecting surface of triangular wave reflecting mirror, a corresponding reflection is incident to after the reflective surface
Mirror, reflecting mirror receive the laser beam of the correspondence reflective surface of triangular wave reflecting mirror, and received laser beam is made to reflex to three
Next reflecting surface of angle wave reflection mirror, and laser beam passes through repeatedly instead between reflecting mirror and the reflecting surface of triangular wave reflecting mirror
Photodetector is finally incident to after penetrating；
Emit laser beam, the laser beam is between reflecting mirror and the reflecting surface of triangular wave reflecting mirror after multiple reflections, quilt
Photodetector detects its original incident position；
Testee displacement, in displacement process, the variation of the incoming position of photodetector detection laser beam, until quilt
It surveys object and stops displacement；
The incoming position variable quantity for the laser beam that processing system is detected by photodetector, calculates testee
Shift value.
Compared with prior art, the utility model has the following beneficial effects:
The displacement sensor of amplification factor can be improved in the utility model, compared to application No. is the positions of 201810481645.X
Displacement sensor is realized multiple reflections, is then realized more times of amplifications, solve amplification factor by the setting of multiple reflecting mirrors
The problem of limitation, improves measurement accuracy so as to increase amplification factor.
By the setting of multiple reading heads, in measurement process, if some reading head cannot read the position of laser beam
It when variable quantity, switches to another reading head and measures, therefore can ensure and can realize effective measurement in displacement process,
Realize continuous dislocation measurement.
Detailed description of the invention
It, below will be to use required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment
Attached drawing briefly introduce, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore should not be seen
Work is the restriction to range, for those of ordinary skill in the art, without creative efforts, can be with
Other relevant drawings are obtained according to these attached drawings.
Fig. 1 show a kind of measuring principle of the displacement sensor that amplification factor can be improved of structure of the offer of embodiment 1
Schematic diagram.
The laser beam that Fig. 2 show a kind of displacement sensor that amplification factor can be improved of structure of the offer of embodiment 1 enters
Firing angle degree schematic diagram.
Fig. 3 show displacement and calculates formula principle schematic diagram.
Fig. 4 show a kind of measuring principle of the displacement sensor that amplification factor can be improved of structure of the offer of embodiment 2
Schematic diagram.
Fig. 5 show a kind of measuring principle of the displacement sensor that amplification factor can be improved of structure of the offer of embodiment 3
Schematic diagram.
The measurement that Fig. 6 show the displacement sensor that amplification factor can be improved of another structure of the offer of embodiment 3 is former
Manage schematic diagram.
Figure label explanation:
Laser source 1, laser beam 2, triangular wave reflecting mirror 3, reflecting surface 31 reflect microscope group 4, reflecting mirror 41, photodetector
5, shell 6.
Specific embodiment
Below in conjunction with attached drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out clear
Chu completely describes.It should be appreciated that specific embodiment described herein is used only for explaining the utility model, it is not used to limit
Determine the utility model.Based on the embodiments of the present invention, those skilled in the art are in no creative work under the premise of institute
The every other embodiment obtained, belongs to the protection scope of the utility model.
Embodiment 1
Referring to Fig. 1, a kind of displacement sensor that amplification factor can be improved, including laser source 1 are provided in the present embodiment,
Laser beam 2, triangular wave reflecting mirror 3, triangular wave reflecting mirror 3 include reflecting surface 31, reflect microscope group 4, reflection microscope group 4 includes anti-
Penetrate mirror 41, photodetector 5, shell 6.
The utility model can be improved in the displacement sensor of amplification factor:
Laser source 1 launches laser beam 2, and makes first reflecting surface 31 of 2 directive triangular wave reflecting mirror 3 of laser beam；It is right
First reflecting mirror 41 of the reflection microscope group 4 of first reflecting surface 31 is answered to be used to receive laser beam 2 by the of triangular wave reflecting mirror 3
The laser beam of one reflecting surface 31 reflection, and the laser beam is made to be incident to the measurement process of first reflecting surface 31 in laser beam 2
In, along second reflecting surface 31 of same multipath tolerant to triangular wave reflecting mirror 3；Second reflection of corresponding second reflecting surface
Mirror 41 makes the laser beam reflex to triangle for receiving the laser beam reflected by second reflecting surface 31 of triangular wave reflecting mirror
The third reflecting surface 31 of wave reflection mirror 3；Photodetector 5 reflexes to triangular wave reflecting mirror 3 for receiving second reflecting mirror
Third reflecting surface 31 after the laser beam 2 that is reflected through third reflecting surface 31, and measure its incoming position；Processing system is used
The change in displacement value of testee is calculated in the incoming position variable quantity of the laser beam 2 received according to photodetector 5.
In order to ensure the amplification performance for the displacement sensor that amplification factor can be improved, it is incident to the laser of photodetector 5
The angle of beam and photodetector 5 is preferably less than 45 degree.
As shown in Figure 1, photodetector 5 uses PSD, the laser beam 2 before displacement is indicated by the solid line, the laser beam after displacement
2 are represented by dashed line, and the transmission path of laser beam 2 is as follows:
Laser source 1 launches laser beam 2 before being displaced, and makes first reflecting surface of 2 directive triangular wave reflecting mirror 3 of laser beam
31；First reflecting mirror 41 of the reflection microscope group 4 of corresponding first reflecting surface 31 is for receiving laser beam 2 by triangular wave reflecting mirror
The laser beam of 3 first reflecting surface 31 reflection, and the laser beam is made to be incident to the measurement of first reflecting surface 31 in laser beam 2
In the process, along second reflecting surface 31 of same multipath tolerant to triangular wave reflecting mirror 3；Second of corresponding second reflecting surface
Reflecting mirror 41 reflexes to the laser beam for receiving the laser beam reflected by second reflecting surface 31 of triangular wave reflecting mirror
The third reflecting surface 31 of triangular wave reflecting mirror 3；It is anti-to reflex to triangular wave for second reflecting mirror of reception for photodetector 5
The laser beam 2 reflected after the third reflecting surface 31 of mirror 3 through third reflecting surface 31 is penetrated, and measures its incoming position；Remember at this time
For the first incoming position.
It (is shown as in Fig. 1 to left dislocation, laser source 1, reflection microscope group 4 and 5 sync bit of photodetector when displacement after displacement
Move), laser source 1 launches laser beam 2, and makes first reflecting surface 31 of 2 directive triangular wave reflecting mirror 3 of laser beam；Corresponding the
First reflecting mirror 41 of the reflection microscope group 4 of one reflecting surface 31 is for receiving laser beam 2 by first of triangular wave reflecting mirror 3
The laser beam that reflecting surface 31 reflects, and make the laser beam in the measurement process that laser beam 2 is incident to first reflecting surface 31, edge
Same multipath tolerant to triangular wave reflecting mirror 3 second reflecting surface 31；Second reflecting mirror 41 of corresponding second reflecting surface
The laser beam that second reflecting surface 31 for receiving by triangular wave reflecting mirror reflects, and it is anti-so that the laser beam is reflexed to triangular wave
Penetrate the third reflecting surface 31 of mirror 3；Photodetector 5, reflex to triangular wave reflecting mirror 3 for receiving second reflecting mirror
The laser beam 2 reflected after three reflectings surface 31 through third reflecting surface 31, and measure its incoming position；It is denoted as the second incidence at this time
Position.The displacement of laser source 1, the i.e. displacement of testee can be calculated according to the first incoming position and the second incoming position
Amount.Calculating process can be obtained according to triangle geometrical relationship, as shown in figure 3,θ is
It is incident to the laser beam of photodetector and the angle of photodetector, δ is photodetector and testee direction of displacement
Acute angle.
As a kind of preferably embodiment, as shown in Figure 1, the folder of the reflecting surface 31 of triangular wave reflecting mirror 3 and horizontal plane
Angle is first for 150 degree (only for being horizontally to the right positive direction and be rotated in the counterclockwise direction) microscope group 4 being reflected in guarantee
Reflecting mirror 41 receives the laser beam that laser beam 2 is reflected by first reflecting surface 31 of triangular wave reflecting mirror 3, and the laser beam is made to exist
Laser beam 2 is incident in the measurement process of the same reflecting surface 31, along second of same multipath tolerant to triangular wave reflecting mirror 3
Reflecting surface；The reflecting mirror 41 of corresponding second reflecting surface is received by the laser of second reflective surface of triangular wave reflecting mirror
Beam, and in the case where the third reflecting surface for making the laser beam reflex to triangular wave reflecting mirror, the setting that can have other different
Mode.
For example, can realize that first reflecting mirror 41 of reflection microscope group 4 is sharp for receiving in the following way shown in Fig. 2
The laser beam that light beam 2 is reflected by first reflecting surface 31 of triangular wave reflecting mirror 3, and it is incident to the laser beam in laser beam 2
In the measurement process of the same reflecting surface 31, along second reflecting surface of same multipath tolerant to triangular wave reflecting mirror 3；Corresponding the
The reflecting mirror 41 of two reflectings surface swashs this for receiving by the laser beam of second reflective surface of triangular wave reflecting mirror
Light beam reflexes to the third reflecting surface of triangular wave reflecting mirror: reflecting mirror is parallel with reflecting surface, laser beam 2 and first reflecting surface
31 acute angle is equal to the angle of twice reflecting surface 31 and horizontal plane, i.e. the angle 1 indicated in Fig. 2 is equal to angle 2.
As shown in Figure 2, for triangular wave reflecting mirror 3, meet reflecting surface be parallel to each other (i.e. with the angle of horizontal plane one
Cause) under conditions of, there is no limit that is, for the angle of two reflectings surface of formation triangular wave, there is no limit examples for specific structure
It is as shown in Figure 2 120 degree for the angle of two reflectings surface；In another example the angle for shown in Fig. 3 being two reflectings surface is 150
Degree, etc..And triangular wave also not necessarily needs isosceles triangle wave, that is, formed triangular wave two reflectings surface and horizontal plane it is sharp
Angle angle can be equal, can also be unequal.
The above-mentioned displacement sensor that amplification factor can be improved can also include shell 6, laser source 1, reflection microscope group 4 and photoelectricity
Detector 5 is fixedly installed in shell 6, forms reading head, and the laser beam 2 and its reflected beams that laser source 1 emits can be with
Pass through the transmitting-receiving end face of reading head.Laser source 1, reflection microscope group 4 and photodetector 5 are fixedly installed in shell 6, Ke Yibao
It holds mutual position to fix, can also ensure that three keeps synchronous shift.
It when measurement, can be fixed on testee, be read using by triangular wave reflecting mirror 3 according to practical situations
Head remains stationary, and when testee is subjected to displacement, relative motion occurs for triangular wave reflecting mirror 3 and reading head, and reading head can
The triangular wave reflecting mirror 3 i.e. shift value of testee is obtained with measurement；Alternatively, measured object can also be fixed on using by reading head
On body, triangular wave reflecting mirror 3 is remained stationary, and testee, which is subjected to displacement, drives reading head movement, reading head and triangle wave reflection
Relative displacement occurs for mirror 3, and reading head can measure the relative displacement between reading head and triangular wave reflecting mirror 3, so obtain by
Survey the shift value of object；Measurement selects triangular wave reflecting mirror 3 or reading head to be fixed on testee, improves measurement just
Benefit.
Based on the above-mentioned displacement sensor that amplification factor can be improved, measurement method the following steps are included:
Testee is fixed on triangular wave reflecting mirror or reading head；
Laser beam, triangular wave reflecting mirror, photodetector, the positional relationship for reflecting microscope group are adjusted, so that in reflection group
First reflecting mirror receives laser beam by the laser beam of the correspondence reflective surface of triangular wave reflecting mirror, and the laser beam is made to exist
Laser beam is incident in the measurement process of first reflecting surface, along second reflection of same multipath tolerant to triangular wave reflecting mirror
Face；Second reflecting mirror of corresponding second reflecting surface is used to receive swashing by second reflective surface of triangular wave reflecting mirror
Light beam, and so that the laser beam is reflexed to the third reflecting surface of triangular wave reflecting mirror, and photodetector can receive second
A reflecting mirror reflexes to the laser beam through third reflective surface after the third reflecting surface of triangular wave reflecting mirror, and measures it
Incoming position；
Emit laser beam, the laser beam is between reflecting mirror and the reflecting surface of triangular wave reflecting mirror after multiple reflections, quilt
Photodetector detects its original incident position；
Testee displacement, in displacement process, the variation of the incoming position of photodetector detection laser beam, until quilt
It surveys object and stops displacement；
The incoming position variable quantity for the laser beam that processing system is detected by photodetector, calculates testee
Shift value.
Embodiment 2
Fig. 4 is seen, as shown in figure 4, in the displacement sensor that amplification factor can be improved in the present embodiment and embodiment 1
The displacement sensor that amplification factor can be improved is compared, and difference is: multiple reflecting mirrors in the present embodiment are directly connected to,
It is integrally formed "-" type structure.
Embodiment 3
Can be refering to Fig. 5, it can described in the displacement sensor that amplification factor can be improved and embodiment 2 in the present embodiment
The displacement sensor for improving amplification factor is compared, and difference is: the displacement that amplification factor can be improved provided in the present embodiment passes
In sensor, including two reading heads, two reading header structures are consistent, and at symmetrically placed.
Continuous dislocation measurement may be implemented in the displacement sensor that amplification factor can be improved described in the present embodiment.Specifically,
One of two laser beams can be selected to measure, when one of laser beam reflection point is located at certain positions of reflecting surface, as instead
The top in face, intersection position of two reflectings surface etc. are penetrated, the length of corresponding photodetector is again limited, it is thus possible to can not reflect
To corresponding photodetector, which can not just calculate its shift value, another laser beam reflection point is located at another
The other positions of a reflecting surface can be reflected into corresponding photodetector and can carry out conversion measurement, can be realized testee
At mobile per a moment, at least one can be reflected into pair in the laser beam that each reflecting surface 31 is reflected on triangular wave reflecting mirror 3
The photodetector answered, processing system can toggle the reflection laser beam position change for calculating two photodetectors at this time
Change, be overlapped accumulative, to realize the measurement for being displaced disposable variation or continuous increment type change in displacement to testee, surveys
Amount method is simple, reliable, easy to operate, and can be improved measurement accuracy.
When measuring using the displacement sensor that amplification factor can be improved described in the present embodiment, its step are as follows:
Testee is fixed on triangular wave reflecting mirror or reading head；
Laser beam, triangular wave reflecting mirror, photodetector, the positional relationship for reflecting microscope group are adjusted, so that in reflection group
First reflecting mirror receives the laser beam that laser beam is reflected by the correspondence reflecting surface group of triangular wave reflecting mirror, and makes the laser beam
In the measurement process that laser beam is incident to first reflecting surface, second along same multipath tolerant to triangular wave reflecting mirror is anti-
Penetrate face；Second reflecting mirror of corresponding second reflecting surface is for receiving by second reflective surface of triangular wave reflecting mirror
Laser beam, and so that the laser beam is reflexed to the third reflecting surface of triangular wave reflecting mirror, and photodetector can receive
Two reflecting mirrors reflex to the laser beam through third reflective surface after the third reflecting surface of triangular wave reflecting mirror, and measure
Its incoming position；When the photodetector can not receive the laser beam of reflection, then switch to another reading head repeat it is above-mentioned
Operating process；
Emit laser beam, the laser beam is between reflecting mirror and the reflecting surface of triangular wave reflecting mirror after multiple reflections, quilt
Photodetector detects its original incident position；
Testee displacement, in displacement process, the variation of the incoming position of photodetector detection laser beam, until quilt
It surveys object and stops displacement；
The incoming position variable quantity for the laser beam that processing system is detected by photodetector, calculates testee
Shift value.
It is readily comprehensible, in the present embodiment, the purpose that two reading heads are set be avoid wherein one group of photodetector connect
When can not receive laser beam, laser beam can be received by another group of photodetector, realize displacement measurement, therefore in addition to such as Fig. 5
Shown in outside set-up mode, can also have other set-up modes, as long as two reading heads are arranged in a staggered manner, so that two reading heads
In the laser beam reflecting surface that is incident to triangular wave reflecting mirror original incident point position it is different, realize wherein one group of photodetection
When device does not receive laser beam, laser beam can be received by another group of photodetector.
Meanwhile another structure provided in the present embodiment being provided in conjunction with Fig. 6, Fig. 6, it include 3 readings in the structure
Head.It is readily comprehensible, guaranteeing the case where photodetector of at least one group reading head receives the incoming position of laser beam
Under, the quantity and placement location of reading head are not limited.
Similarly, one or more sets measuring system (readings can also be arranged in displacement sensor described in embodiment 1 again
Head) realize continuous measurement.
Although the displacement sensing apparatus for the amplifying factors that above-mentioned several embodiments provide, reflecting surface three, reflecting mirror is
Two, it is readily understood that, the quantity of reflecting surface and reflecting mirror can be more, more when reflecting mirror is more with reflecting surface
A reflecting mirror is sequentially arranged along moving direction with reflecting surface, is being guaranteed the reflecting mirror, is at least being corresponded to a reflecting surface,
The reflecting mirror is used to receive the laser beam of corresponding reflective surface, and reflects laser beam；Reflecting surface, it is sharp for receiving
The laser beam of light source transmitting or the laser beam of reflecting mirror reflection, and in the case where reflecting laser beam, do not limit reflecting surface
With the quantity of reflecting mirror.
Above description is only a specific implementation of the present invention, but the protection scope of the utility model is not limited to
In this, anyone skilled in the art can readily occur in variation within the technical scope disclosed by the utility model
Or replacement, should all it cover within the protection scope of the present utility model.
Claims (6)
1. a kind of displacement sensor that amplification factor can be improved characterized by comprising
Triangular wave reflecting mirror, including at least three reflectings surface, at least three reflecting surface are sequentially distributed along moving direction；
Laser source, for launching laser beam, and the laser beam is incident to a reflecting surface of triangular wave reflecting mirror；
Microscope group is reflected, including at least two reflecting mirrors, at least two reflecting mirror are sequentially distributed along moving direction；
Each reflecting mirror at least corresponds to a reflecting surface, and the reflecting mirror is used to receive swashing for corresponding reflective surface
Light beam, and reflect received laser beam again；
The reflecting surface for receiving the laser beam of laser source transmitting or the laser beam of reflecting mirror reflection, and makes received laser
Shu Zaici reflects；
Photodetector for receiving through reflective surface and no longer by the received laser beam of reflection microscope group, and measures its incidence
Position；
Processing system, the incoming position variable quantity of the laser beam for being received according to photodetector, calculates testee
Change in displacement value.
2. the displacement sensor according to claim 1 that amplification factor can be improved, which is characterized in that described at least two is anti-
It penetrates between mirror and is parallel to each other, and laciniation is integrally formed by a transition part connection between every two reflecting mirror.
3. the displacement sensor according to claim 1 that amplification factor can be improved, which is characterized in that described at least two is anti-
It penetrates mirror to be directly connected to, is integrally formed "-" type structure.
4. the displacement sensor according to claim 1 that amplification factor can be improved, which is characterized in that the mirror parallel
In the reflecting surface, the acute angle that the laser beam and reflecting surface of laser source transmitting are formed is equal to twice of reflecting surface and horizontal plane
Angle.
5. the displacement sensor according to claim 1 to 4 that amplification factor can be improved, which is characterized in that further include shell
Body, laser source, reflection microscope group and photodetector are fixedly installed in shell, form a reading head.
6. the displacement sensor according to claim 5 that amplification factor can be improved, which is characterized in that the reading head is extremely
It is two few, and the positional relationship between at least two reading head meets: in measurement process, at least one reading head can
To read incoming position variable quantity of the laser beam on photodetector.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201821066996.6U CN208282781U (en) | 2018-07-06 | 2018-07-06 | The displacement sensor of amplification factor can be improved |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201821066996.6U CN208282781U (en) | 2018-07-06 | 2018-07-06 | The displacement sensor of amplification factor can be improved |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108534688A (en) * | 2018-07-06 | 2018-09-14 | 北方民族大学 | The displacement sensor and its measurement method of amplification factor can be improved |
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2018
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108534688A (en) * | 2018-07-06 | 2018-09-14 | 北方民族大学 | The displacement sensor and its measurement method of amplification factor can be improved |
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