CN104697438A - Motion-compensated corner reflection mirror laser interferometer and using method - Google Patents
Motion-compensated corner reflection mirror laser interferometer and using method Download PDFInfo
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- CN104697438A CN104697438A CN201510143547.1A CN201510143547A CN104697438A CN 104697438 A CN104697438 A CN 104697438A CN 201510143547 A CN201510143547 A CN 201510143547A CN 104697438 A CN104697438 A CN 104697438A
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Abstract
The invention discloses a motion-compensated corner reflection mirror laser interferometer and a using method. The laser interferometer comprises a laser source, a beam splitter mirror, a micro-motion corner reflection mirror, a measurement corner reflection mirror and a photoelectric detector and further comprises a movable micro-motion platform, wherein the micro-motion corner reflection mirror and the measurement corner reflection mirror each comprises an inwards-sunken right-angle reflection plane, and the micro-motion corner reflection mirror is connected to the micro-motion platform. The micro-motion platform is preferentially made from piezoelectric ceramic. The improved corner reflection mirror laser interferometer enables the micro-motion corner reflection mirror to displace through the movable micro-motion platform and can obtain the decimal parts of interference waves difficult to measure in the laser interference process through the measurement corner reflection mirror, the laser source, the beam splitter mirror and the photoelectric detector, and the measurement accuracy of the laser interferometer can be further improved.
Description
Technical field
The present invention relates to a kind of Precision Inspection and instrument field, particularly a kind of motion compensation formula corner reflector laser interferometer and using method.
Background technology
The appearance of laser instrument, makes ancient interference technique be developed rapidly, and laser has that brightness is high, good directionality, monochromaticity and the feature such as coherence is good, and laser interferometry techniques is comparative maturity.Laser interferometry system is applied widely: the measurement of accurate length, angle is as the detection of linear scale, grating, gauge block, precision lead screw; Position detecting system in exact instrument is as the control of precision optical machinery, correction; Position detecting system in large scale integrated circuit specialized equipment and detecting instrument; Minute sized measurement etc.In most of laser interference length-measuring system, all have employed Michelson interferometer or similar light channel structure.
The light beam that single frequency laser interferometer sends from laser instrument, is divided into two-way by spectroscope after beam-expanding collimation, and reflects can be combined in spectroscope from stationary mirror and moving reflector respectively and produce interference fringe.When moving reflector moves, the light intensity change of interference fringe is converted to electric impulse signal by the photo-electric conversion element in receptacle and electronic circuit etc., after shaping, amplification, input up-down counter calculate overall pulse number, calculating formula L=N × λ/2 are pressed again by robot calculator, in formula, λ is optical maser wavelength (N is electric pulse sum), calculates the displacement L of moving reflector.
One of weakness of single frequency laser interferometer only counts the integral part of laser interference ripple, and be difficult to measure less than the interference situation of a wavelength for what exist in laser interference process, and measuring accuracy is limited.
Single frequency laser interferometer is owing to measuring the problem of structure, and its measuring accuracy is limited to the wavelength of laser, and its precision can only be generally the integral multiple of its wavelength, is difficult to promote again.Along with the requirement of commercial production to precision measurement is more and more higher, the measuring accuracy of surveying instrument is had higher requirement.
Summary of the invention
The object of the invention is to overcome existing laser interferometer measurement precision and only can measure integral multiple wavelength in acquisition laser interference, measuring accuracy is difficult to the drawback promoted, a kind of motion compensation formula corner reflector laser interferometer is provided, additionally provide a kind of using method simultaneously, this laser interferometer is on the basis of existing Michelson laser interferometer, adopt this micrometric displacement structure of piezoelectric ceramics, except measured angular catoptron integral multiple can be obtained except the displacement part of optical maser wavelength, the displacement part obtaining being less than optical maser wavelength can also be measured, therefore this laser interferometer improves the measuring accuracy of conventional laser interference measuring instrument greatly.
In order to realize foregoing invention object, the invention provides following technical scheme:
A kind of motion compensation formula corner reflector laser interferometer, comprise lasing light emitter, spectroscope, fine motion corner reflector, measured angular catoptron, also comprise moveable micromotion platform, described fine motion corner reflector and described measured angular catoptron include a right angle reflecting surface caved inward, and described fine motion corner reflector is connected on micromotion platform.
The laser that this lasing light emitter sends is to being divided into two bundle laser during spectroscope, wherein beam of laser injects fine motion corner reflector after dichroic mirror, after the reflection of fine motion corner reflector, incide photodetector; Another beam of laser incides measured angular catoptron after spectroscope transmission, reflexes to photodetector through measured angular catoptron, and photodetector can detect the interference situation of two bundle laser.
Because fine motion corner reflector is connected on micromotion platform, micromotion platform refers to that very little displacement can occur for it, and precision reaches nano-precision.When micromotion platform keeps motionless, during measured angular catoptron generation certain displacement, photodetector can record the quantity that wavelength is the laser interference ripple of λ, what now measure due to photodetector is an integer laser interference ripple, do not comprise the distance part Δ d being less than optical maser wavelength, this part also and and can not embody with the interference quantity of laser interference ripple, the reaction of distance d size that therefore the laser interference wave number amount of this measurement is corresponding be in fact in the actual distance that is subjected to displacement of measured angular catoptron integral multiple in the part of optical maser wavelength, when measured angular catoptron keeps motionless, micromotion platform is subjected to displacement, corresponding fine motion corner reflector also can be subjected to displacement, fine motion corner reflector after being subjected to displacement can change the light path of this Shu Jiguang, two bundle laser light path differences thus received by photodetector change, laser interference can be produced, until photodetector detects when creating a laser interference ripple, i.e. the strongest interference state or the most weak interference state, micromotion platform stops displacement, the distance be now subjected to displacement according to micromotion platform can calculate the displacement Δ d being less than optical maser wavelength of measured angular mirror displacements part.
Therefore, this laser interferometry instrument accurately can obtain the length more accurately of measured angular catoptron displacement, can record the displacement part being less than laser interference wavelength, thus improve measuring accuracy.
Preferably, described micromotion platform is piezoelectric ceramics.
Piezoelectric ceramics is a kind of ceramic material mechanical energy and electric energy can changed mutually, its deformation quantity produced under electric field action is very little, be no more than at most the micrometric displacement of 1/10000000th of size own, have repetitive distortion recovery capability, good stability, precision are high.
Preferably, the displacement maximal value that the described piezoelectric ceramics surface connecting described fine motion corner reflector produces equals the optical maser wavelength of described lasing light emitter, and its displacement accuracy can reach nanometer.
The invention also discloses a kind of using method of motion compensation formula corner reflector laser interferometer, comprise the following steps:
Step one, described fine motion corner reflector to be fixed on described micromotion platform, to adjust the position of described lasing light emitter, spectroscope, fine motion corner reflector, measured angular catoptron, photodetector;
Step 2, start described lasing light emitter, the laser that described lasing light emitter sends is to described spectroscope, and the laser after described dichroic mirror is incident to described fine motion corner reflector, reflexes to described photodetector through described fine motion corner reflector; The laser that described lasing light emitter sends is to described spectroscope, described measured angular catoptron is incided after described spectroscope transmission, reflex to described photodetector through described measured angular catoptron, photodetector can detect laser interference state, and optical interference circuit has adjusted;
Step 3, first measured angular catoptron is fixed on the reference position of the Relative ranging of measurand, now control described micromotion platform to move, fine motion corner reflector is moved along laser incident direction, when described photodetector records a laser interference ripple, the strongest interference state or the most weak interference state, fixing described micromotion platform.By described measured angular catoptron at optical interference circuit direction displacement d, it be the quantity of the laser interference ripple of λ is N that corresponding described photodetector records wavelength, now calculates the displacement obtaining described measured angular catoptron according to laser wavelength lambda
Step 4, fixing described measured angular catoptron, control described micromotion platform to move, described fine motion corner reflector is moved along the direction of described laser incidence, when described photodetector records a laser interference ripple again, now micromotion platform displacement is l, then can obtain the distance, delta d be not detected that described measured angular catoptron is less than optical maser wavelength part in the displacement of optical interference circuit direction is l, thus, the displacement that can obtain the catoptron of measured angular described in step 3 more accurately value is
Because the moving direction of micromotion platform in step 4 is the direction along laser incidence, so the displacement l of its micromotion platform is equivalent to the light path 2l adding this beam laser, if another light beam light path amount 2 Δ d that the partial distance Δ d that the light path recruitment of this beam laser just in time equals to be less than in measured angular catoptron displacement optical maser wavelength brings, i.e. 2 Δ d=2l, so Δ d=l, the displacement that therefore can obtain measured angular catoptron more accurately value is
Preferably, the sense of displacement of the described fine motion corner reflector in described step 4 is the direction along described laser reflection, and the displacement of the so last described measured angular catoptron obtained more accurately value is
When the direction that the sense of displacement of fine motion corner reflector is along laser reflection, the displacement l of its micromotion platform is equivalent to the light path 2l decreasing this beam laser, if the light path reduction of this beam laser adds another light beam light path amount that the partial distance Δ d being less than optical maser wavelength in measured angular catoptron displacement brings, just in time equal one and interfere wavelength 2 Δ d+2l=λ, namely
therefore, the displacement of the measured angular catoptron that can be obtained by the method more accurately value is
Compared with prior art, beneficial effect of the present invention: this improved type angle reflector laser interference instrument is by arranging a removable micromotion platform, the fine motion corner reflector with the right angle plane of reflection is arranged on micromotion platform, conjunction measuring corner reflector, lasing light emitter, spectroscope, photodetector, except integral multiple can be obtained in measured angular catoptron displacement in the length thereof of optical maser wavelength, the partial distance length being less than optical maser wavelength obtaining being difficult in laser interference process measure can also be measured, improve the measuring accuracy of this laser interferometer, easy to operate, calculate simple, good reliability.
Accompanying drawing illustrates:
Laser optical path schematic diagram when Fig. 1 is a kind of motion compensation formula corner reflector laser interferometer use of the present invention.
Mark in figure:
1, lasing light emitter, 2, spectroscope, 3, fine motion corner reflector, 4, measured angular catoptron, 5, photodetector, 6, micromotion platform.
Embodiment
Below in conjunction with test example and embodiment, the present invention is described in further detail.But this should be interpreted as that the scope of the above-mentioned theme of the present invention is only limitted to following embodiment, all technology realized based on content of the present invention all belong to scope of the present invention.
As shown in Figure 1, a kind of motion compensation formula corner reflector laser interferometer, comprise lasing light emitter 1, spectroscope 2, fine motion corner reflector 3, measured angular catoptron 4, photodetector 5, micromotion platform 6, wherein fine motion corner reflector 3 and measured angular catoptron 4 include a right angle reflecting surface caved inward, fine motion corner reflector 3 is connected on micromotion platform 6, this fine motion corner reflector 3 is the corner reflectors that can be subjected to displacement, and the displacement of its fine motion is produced by the mobile of micromotion platform 6.
The laser that this lasing light emitter 1 sends is to being divided into two bundle laser during spectroscope 2, wherein beam of laser injects fine motion corner reflector 3 after spectroscope 2 reflects, after fine motion corner reflector 3 reflects, incide photodetector 5; Another beam of laser incides measured angular catoptron 4 after spectroscope 2 transmission, reflexes to photodetector 5 through measured angular catoptron 4, and photodetector 5 can detect the interference situation of two bundle laser.
The micromotion platform 6 of indication of the present invention refers to that device of very little displacement can occur for it, and its mobile accuracy can be as small as nanometer range.Because fine motion corner reflector 3 is connected on micromotion platform 6, when measured angular catoptron 4 keeps motionless, micromotion platform 6 is subjected to displacement, corresponding fine motion corner reflector 3 also can be subjected to displacement, fine motion corner reflector 3 after being subjected to displacement can increase or decrease should the light path of Shu Jiguang, two bundle laser light path differences thus received by photodetector 5 change, and interfere change.
Concrete, when micromotion platform 6 keeps motionless, when certain displacement occurs measured angular catoptron 4, if this displacement actual value to be measured is d '.The quantity that wavelength is the laser interference ripple of λ can be recorded by photodetector 5, what measure due to photodetector 5 is an integer laser interference wave number amount, the distance size reaction that the laser interference wave number amount of this measurement is corresponding be that in the actual distance that is subjected to displacement of measured angular catoptron 4, integral multiple, in the partial-length d of optical maser wavelength, does not comprise in actual value the partial distance Δ d being less than optical maser wavelength in fact.When measured angular catoptron 4 keeps motionless, micromotion platform 6 is subjected to displacement, corresponding fine motion corner reflector 3 also can be subjected to displacement l, fine motion corner reflector 3 after being subjected to displacement can change the light path of this Shu Jiguang, two bundle laser light path differences thus received by photodetector 5 change, the change of laser interference can be produced, when photodetector 5 detect create a laser interference ripple time, micromotion platform 6 stops mobile, now suppose that the position amount that micromotion platform 6 occurs is l, the displacement Δ d being less than optical maser wavelength of measured angular catoptron 4 displaced portion can be calculated according to the displacement of micromotion platform 6 generation.So this laser interferometry instrument accurately can obtain the length more accurately of measured angular catoptron 4 displacement, the displacement part being less than laser interference wavelength can be recorded, thus improve measuring accuracy.
Preferably this micromotion platform 6 is piezoelectric ceramics, piezoelectric ceramics is a kind of ceramic material mechanical energy and electric energy can changed mutually, its deformation quantity produced under electric field action is very little, be no more than at most the micrometric displacement of 1/10000000th of size own, have repetitive distortion recovery capability, good stability, precision are high.
The invention also discloses a kind of using method of motion compensation formula corner reflector laser interferometer, comprise the following steps:
Step one, fine motion corner reflector 3 to be fixed on described micromotion platform 6, to adjust the position of lasing light emitter 1, spectroscope 2, fine motion corner reflector 3, measured angular catoptron 4, photodetector 5;
Step 2, startup lasing light emitter 1, the laser that lasing light emitter 1 sends reflects to described spectroscope 2, reflexes to described fine motion corner reflector 3 through described spectroscope 2, reflexes to described photodetector 5 through described fine motion corner reflector 3; The laser that lasing light emitter 1 sends is to spectroscope 2, and after the transmission of described spectroscope 2, incide measured angular catoptron 4, reflex to photodetector 5 through measured angular catoptron 4, photodetector 5 can detect laser interference state, and optical interference circuit has adjusted;
Step 3, first measured angular catoptron 4 is fixed on the reference position of the Relative ranging of measurand, now control micromotion platform 6 to move, fine motion corner reflector 3 is moved along laser incident direction, when photodetector 5 records a laser interference ripple, i.e. the strongest interference state or the most weak interference state, fixing described micromotion platform 6.By described measured angular catoptron 4 at optical interference circuit direction displacement d, it be the quantity of the laser interference ripple of λ is N that corresponding photodetector 5 records wavelength, now calculates the displacement obtaining described measured angular catoptron 4 according to laser wavelength lambda
Step 4, fixation measuring corner reflector 4, control micromotion platform 6 to move, fine motion corner reflector 3 is moved in laser incident direction, when photodetector 5 records an interference wave again, now micromotion platform displacement is set to distance l, then can obtain in tested measured angular catoptron 4 displacement the partial-length being less than optical maser wavelength failing to be recorded by photodetector 5, therefore can obtain step 3 survey displacement exact value be
In above-mentioned steps four, when the direction that the moving direction of micromotion platform 6 is along laser incidence, so the displacement l of its micromotion platform 6 is equivalent to the light path 2l adding this beam laser, if another light beam light path amount 2 Δ d that the partial distance Δ d that the light path recruitment of this beam laser just in time equals to be less than in measured angular catoptron 4 displacement optical maser wavelength brings, i.e. 2 Δ d=2l, so Δ d=l, the displacement that therefore can obtain measured angular catoptron 4 more accurately value is
when the direction that the sense of displacement of fine motion corner reflector 3 is along laser reflection, the displacement l of its micromotion platform 6 is equivalent to the light path 2l decreasing this beam laser, if the light path reduction of this beam laser adds another light beam light path amount that the partial distance Δ d being less than optical maser wavelength in measured angular catoptron 4 displacement brings, just in time equal one and interfere wavelength 2 Δ d+2l=λ, namely
therefore, the displacement of the measured angular catoptron 4 that can be obtained by the method more accurately value is
Above embodiment only in order to the present invention is described and and unrestricted technical scheme described in the invention, although this instructions with reference to each above-mentioned embodiment to present invention has been detailed description, but the present invention is not limited to above-mentioned embodiment, therefore anyly the present invention is modified or equivalent to replace; And all do not depart from technical scheme and the improvement thereof of the spirit and scope of invention, it all should be encompassed in the middle of right of the present invention.
Claims (5)
1. a motion compensation formula corner reflector laser interferometer, comprise lasing light emitter (1), spectroscope (2), fine motion corner reflector (3), measured angular catoptron (4), photodetector (5), it is characterized in that, also comprise moveable micromotion platform (6), described fine motion corner reflector (3) and measured angular catoptron (4) include a right angle reflecting surface caved inward, and described fine motion corner reflector (3) is connected on described micromotion platform (6).
2. a kind of motion compensation formula corner reflector laser interferometer according to claim 1, it is characterized in that, described micromotion platform (6) is piezoelectric ceramics.
3. a kind of motion compensation formula corner reflector laser interferometer according to claim 2, it is characterized in that, the displacement maximal value that the described piezoelectric ceramics connecting described fine motion corner reflector (3) produces equals the optical maser wavelength of described lasing light emitter (1).
4. a using method for motion compensation formula corner reflector laser interferometer, is characterized in that, comprise as arbitrary in claim 1-3 as described in a kind of motion compensation formula corner reflector laser interferometer, comprise the following steps:
Step one, described fine motion corner reflector (3) to be fixed on described micromotion platform (6), to adjust the position of described lasing light emitter (1), spectroscope (2), fine motion corner reflector (3), measured angular catoptron (4), photodetector (5);
Step 2, start described lasing light emitter, the laser that described lasing light emitter (1) sends is to described spectroscope (2), laser after described spectroscope (2) reflection is incident to described fine motion corner reflector (3), reflexes to described photodetector (5) through described fine motion corner reflector (3); The laser that described lasing light emitter (1) sends is to described spectroscope (2), described measured angular catoptron (4) is incided after described spectroscope (2) transmission, described photodetector (5) is reflexed to through described measured angular catoptron (4), photodetector (5) can detect laser interference state, and optical interference circuit has adjusted;
Step 3, first measured angular catoptron (4) is fixed on the reference position of the Relative ranging of measurand, now control described micromotion platform (6) mobile, fine motion corner reflector (3) is moved along laser incident direction, when described photodetector (5) records a laser interference ripple, i.e. the strongest interference state or the most weak interference state, fixing described micromotion platform (6); By described measured angular catoptron (4) at optical interference circuit direction displacement d, it be the quantity of the laser interference ripple of λ is N that corresponding described photodetector (5) records wavelength, now calculates the displacement obtaining described measured angular catoptron (4) according to laser wavelength lambda
Step 4, fixing described measured angular catoptron (4), control described micromotion platform (6) mobile, described fine motion corner reflector (3) is moved along the direction of described laser incidence, when described photodetector (5) records a laser interference ripple again, now micromotion platform (6) displacement is l, then can obtain the distance, delta d be not detected that described measured angular catoptron (4) is less than optical maser wavelength part in the displacement of optical interference circuit direction is l, thus, the displacement that can obtain the catoptron of measured angular described in step 3 (4) more accurately value is
5. the using method of a kind of motion compensation formula corner reflector laser interferometer according to claim 4, it is characterized in that, the sense of displacement of the described fine motion corner reflector (3) in described step 4 is the direction along described laser reflection, and the displacement of the so last described measured angular catoptron (4) obtained more accurately value is
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| CN105277118A (en) * | 2015-11-27 | 2016-01-27 | 成都信息工程大学 | Laser wavelength correction-type corner reflector laser interferometer and wavelength correction method |
| CN105352435A (en) * | 2015-11-27 | 2016-02-24 | 成都信息工程大学 | Laser wavelength correction type corner reflector laser interferometer and measuring method |
| CN106989678A (en) * | 2017-06-14 | 2017-07-28 | 山东同其智能科技有限公司 | A kind of device of utilization laser interferometry displacement |
| CN111780664A (en) * | 2020-06-29 | 2020-10-16 | 四川大学 | Michelson interferometer system capable of simultaneously outputting double-frequency fringes orthogonal to polarization direction and simultaneous output method |
| CN112525171A (en) * | 2020-11-24 | 2021-03-19 | 四川省机械技术服务中心 | Large-space high-precision pose measurement system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105352435A (en) * | 2015-11-27 | 2016-02-24 | 成都信息工程大学 | Laser wavelength correction type corner reflector laser interferometer and measuring method |
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| CN111780664A (en) * | 2020-06-29 | 2020-10-16 | 四川大学 | Michelson interferometer system capable of simultaneously outputting double-frequency fringes orthogonal to polarization direction and simultaneous output method |
| CN111780664B (en) * | 2020-06-29 | 2021-11-09 | 四川大学 | Output method for simultaneously outputting dual-frequency stripes with orthogonal polarization directions |
| CN112525171A (en) * | 2020-11-24 | 2021-03-19 | 四川省机械技术服务中心 | Large-space high-precision pose measurement system |
| CN112525171B (en) * | 2020-11-24 | 2022-09-13 | 四川省机械技术服务中心有限责任公司 | Large-space high-precision pose measurement system |
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