CN207456742U - GRIN Lens transmission wavefront measuring device - Google Patents

GRIN Lens transmission wavefront measuring device Download PDF

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Publication number
CN207456742U
CN207456742U CN201720614776.1U CN201720614776U CN207456742U CN 207456742 U CN207456742 U CN 207456742U CN 201720614776 U CN201720614776 U CN 201720614776U CN 207456742 U CN207456742 U CN 207456742U
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China
Prior art keywords
grin lens
microcobjective
measuring device
lens transmission
transmission wavefront
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Expired - Fee Related
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CN201720614776.1U
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Chinese (zh)
Inventor
崔京杰
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Xi'an Caminack Photoelectric Technology Co Ltd
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Individual
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Abstract

The utility model belongs to optical field, it is related to a kind of GRIN Lens transmission wavefront measuring device, which includes light source, converging lenses, target plate, collimating mirror, diaphragm, the first microcobjective, the second microcobjective, positioning datum structure, Shack Hartmann wave front sensor and control computer;Converging lenses, target plate, collimating mirror, diaphragm, the first microcobjective, the second microcobjective, positioning datum structure and Shack Hartmann wave front sensor are successively set on the emitting light path of light source;Shack Hartmann wave front sensor is connected with control computer;GRIN Lens to be measured is placed between the first microcobjective and the second microcobjective.The utility model provides a kind of device that the measurement of GRIN Lens transmission wavefront is realized based on Shack Hartmann wave front sensor not being affected by the external environment and can ensure measuring accuracy.

Description

GRIN Lens transmission wavefront measuring device
Technical field
The utility model belongs to optical field, is related to a kind of GRIN Lens transmission wavefront measuring device more particularly to one Kind realizes the device of GRIN Lens transmission wavefront measurement based on Shack-Hartmann wavefront sensor.
Background technology
GRIN Lens is also known as gradient variable refractivity lens, and it is the column light of radially gradual change to refer to its index distribution Learn lens.It can make the light transmitted vertically generate continuous refraction, smooth and continuously converge to so as to fulfill emergent ray A bit.Since gradient-index lens have end face collimation, coupling and imaging characteristic, in addition its cylindric compact shape is special Point is not only applied successfully to imaging field (duplicator, facsimile machine, endoscope and CD lens etc.), but also in fiber optic communication In, it is widely used in passive devices and the active coupler parts such as optoisolator, optical circulator, wavelength division multiplexer and light filtering In.
High-precision measurement is carried out to GRIN Lens transmission wavefront, so as to intuitively obtain GRIN Lens aberration and its The relation of index distribution.This is by the improvement to GRIN Lens production technology, so as to improve its imaging performance, has important Engineering value.
At present, optical transmission wavefront is mostly measured using laser interferometer method.Since GRIN Lens service band is visible Light, numerical aperture is big, and appearance and size is small, and both ends of the surface are parallel plane, and GRIN Lens transmission wavefront is measured using interferometry It has the disadvantage that:1) laser interferometer single-wavelength working can not realize white light transmittant wavefront measurement;2) Piezoelectric Ceramic Static phase-shift type laser interferometer, which is easily disturbed and vibrated by air draught, to be influenced, and dynamic laser interferometer is only in specific band work Make, and testing efficiency and less economical;3) since GRIN Lens both ends of the surface reflect so that interference fringe is overlapped mutually, seriously Influence transmission wavefront measurement result.Therefore, GRIN Lens transmission wavefront testing requirement can not be met using laser interferometer.
Utility model content
In order to solve the problems, such as present in background technology, the utility model provide it is a kind of be not affected by the external environment and It can ensure the device that the measurement of GRIN Lens transmission wavefront is realized based on Shack-Hartmann wavefront sensor of measuring accuracy.
To achieve these goals, the utility model adopts the following technical solution:
A kind of GRIN Lens transmission wavefront measuring device, it is characterised in that:The GRIN Lens transmission wavefront measurement Device include light source, converging lenses, target plate, collimating mirror, diaphragm, the first microcobjective, the second microcobjective, positioning datum structure, Shack-Hartmann wavefront sensor and computer;The converging lenses, target plate, collimating mirror, diaphragm, the first microcobjective, second Microcobjective, positioning datum structure and Shack-Hartmann wavefront sensor are successively set on the emitting light path of light source;It is described Shack-Hartmann wavefront sensor is connected with computer;GRIN Lens to be measured is placed in the first microcobjective and the second micro- object Between mirror.
Above-mentioned target plate is placed in the focal position of collimating mirror;Loophole is provided on the target plate;The diameter of the loophole Meet following relation:
D=2.44 λ f/D
Wherein:
λ is the centre wavelength of light source;
F is the focal length of collimating mirror;
D is the clear aperture of collimating mirror;
D is the diameter of loophole on target plate.
The numerical aperture of above-mentioned first microcobjective and the second microcobjective is all higher than the numerical aperture of GRIN Lens to be measured Footpath.
Above-mentioned positioning datum structure is placed in the front end of Shack-Hartmann wavefront sensor.
Above-mentioned positioning datum structure is a metallic plate, and taper loophole is provided on the metallic plate;The taper loophole Center overlapped with the target surface center of Shack-Hartmann wavefront sensor.
Above-mentioned collimating mirror is achromatism collimating mirror.
Above-mentioned diaphragm is diaphragm for eliminating stray light.
Above-mentioned light source is the monochromatic source or white light source in the range of visible light wave range.
The utility model has the advantages that:
The utility model provides a kind of GRIN Lens transmission wavefront measuring device, which surveys Measuring device includes light source, converging lenses, target plate, collimating mirror, diaphragm, the first microcobjective, the second microcobjective, positioning datum knot Structure, Shack-Hartmann wavefront sensor and control computer;Converging lenses, target plate, collimating mirror, diaphragm, the first microcobjective, Second microcobjective, positioning datum structure and Shack-Hartmann wavefront sensor are successively set on the emitting light path of light source; Shack-Hartmann wavefront sensor is connected with control computer;GRIN Lens to be measured is placed in the first microcobjective and second and shows Between speck mirror.GRIN Lens transmission wavefront measuring device provided by the utility model is based on Shack-Hartmann wavefront Sensor realizes the transmission wavefront measurement of dynamic high precision GRIN Lens, compensates for what conventional laser interferometer can not measure Shortcoming;The transmission wavefront that GRIN Lens is realized using the double microcobjectives of large-numerical aperture is measured, from GRIN Lens number It is worth the limitation in aperture, from the influence of external environment (air draught disturbance, vibration etc.);By being missed in advance to measuring system wavefront Difference calibration, actual measured results will deduct systematic wavefront, so as to improve GRIN Lens transmission wavefront measurement accuracy;Knot Structure is simple, stability is high, reproducible, and measurement result confidence level is high.
Description of the drawings
Fig. 1 is the structure diagram of GRIN Lens transmission wavefront measuring device provided by the utility model;
Wherein:
1- light sources;2- converging lenses;3- target plates;4- collimating mirrors;5- diaphragms;The first microcobjectives of 6-;7- self-focusings to be measured are saturating Mirror;The second microcobjectives of 8-;9- positioning datum structures;10- Shack-Hartmann wavefront sensors;11- computers.
Specific embodiment
Referring to Fig. 1, the utility model provides a kind of GRIN Lens transmission wavefront measuring device, and the GRIN Lens is saturating Penetrating Wavefront measuring apparatus includes light source 1, converging lenses 2, target plate 3, collimating mirror 4, diaphragm 5, the first microcobjective 6, the second micro- object Mirror 8, positioning datum structure 9, Shack-Hartmann wavefront sensor 10 and computer 11;Converging lenses 2, target plate 3, collimating mirror 4, Diaphragm 5, the first microcobjective 6, the second microcobjective 8, positioning datum structure 9 and Shack-Hartmann wavefront sensor 10 according to It is secondary to be arranged on the emitting light path of light source 1;Shack-Hartmann wavefront sensor 10 is connected with computer 11;Self-focusing to be measured is saturating Mirror 7 is placed between the first microcobjective 6 and the second microcobjective 8.In Fig. 1, black solid line is fixing device, and dotted line is test section Domain.
Wherein, target plate 3 is placed in the focal position of collimating mirror 4;Loophole is provided on target plate 3;The diameter of loophole meets Following relation:
D=2.44 λ f/D
Wherein:
λ is the centre wavelength of light source 1;
F is the focal length of collimating mirror 4;
D is the clear aperture of collimating mirror 4;
D is the diameter of loophole on target plate 3.
The numerical aperture of first microcobjective 6 and the second microcobjective 8 is all higher than the numerical aperture of GRIN Lens 7 to be measured Footpath;Positioning datum structure 9 is placed in the front end of Shack-Hartmann wavefront sensor 10, can facilitate dismounting;In positioning datum structure 9 It is provided with taper loophole;The center of taper loophole is overlapped with the target surface center of Shack-Hartmann wavefront sensor 10;Collimation Mirror 4 is achromatism collimating mirror, ensures that different wavelengths of light collimation is consistent in the range of visible light wave range;Diaphragm 5 is diaphragm for eliminating stray light, Influence of the background miscellaneous light to measurement result can be eliminated;Light source 1 is the monochromatic source or white light source in the range of visible light wave range.It is to be measured GRIN Lens 7 is fixed on five dimension adjustment mechanisms.
Based on GRIN Lens transmission wavefront measuring device provided by the utility model, GRIN Lens transmission is being carried out During wavefront measurement, concrete operations mode is:
1) GRIN Lens transmission wavefront measuring system is built and to the wavefront of GRIN Lens transmission wavefront measuring system Error is demarcated:
1.1) GRIN Lens transmission wavefront measuring system is built, GRIN Lens transmission wavefront measuring system includes light source 1st, converging lenses 2, target plate 3, collimating mirror 4, diaphragm 5, the first microcobjective 6, the second microcobjective 8, positioning datum structure 9, Shack- Hartmann wave front sensor 10 and control computer 11;Converging lenses 2, target plate 3, collimating mirror 4, diaphragm 5, the first microcobjective 6, Second microcobjective 8, positioning datum structure 9 and Shack-Hartmann wavefront sensor 10 are successively set on the emergent light of light source 1 On the road;Shack-Hartmann wavefront sensor 10 is connected with computer 11;GRIN Lens 7 to be measured be placed in the first microcobjective 6 with Between second microcobjective 8;
1.2) wavefront error of GRIN Lens transmission wavefront measuring system is demarcated:Light source 1 exports diverging light warp Convergent mirror 2 is converged on the loophole of target plate 3, then the collimation output of collimated mirror 4, passes through 5 and first microcobjective of diaphragm, 6 meeting It is poly-, then by the second microcobjective 8, be incident on Shack-Hartmann wavefront sensor 10, pass through computer 11 and wave front acquisition And the wavefront that analysis software obtains deducting defocus is W0;Then, positioning datum structure 9 is passed fixed to Shack-Hartmann wavefront 10 front end of sensor, records the center of hot spot, this position is transmission wavefront measuring basis position;
2) wavefront of GRIN Lens 7 to be measured is measured according to GRIN Lens transmission wavefront measuring system.
GRIN Lens 7 to be measured is placed in optical system for testing;Light source 1 exports the concentrated mirror 2 of diverging light and converges to target plate 3 On loophole, then the collimation output of collimated mirror 4, GRIN Lens 7 to be measured is converged to by 5 and first microcobjective 6 of diaphragm Object space position is collimated into directional light through 7 and second microcobjective 8 of GRIN Lens to be measured, is incident to by positioning datum mechanism 9 On Shack-Hartmann wavefront sensor 10;The posture of GRIN Lens 7 to be measured is adjusted, passes through computer 11 and wave front acquisition point Analysis software monitors in real time, ensures that facula position is overlapped with the reference position that systematic wavefront is demarcated;At this point, remove positioning datum Mechanism 9, it is W that measurement wavefront, which is calculated, by wavefront analysis software1, deduct the wavefront error W of system0, obtain self-focusing to be measured The transmission wavefront W of lens 7It surveysFor:
WIt surveys=W1-W0

Claims (8)

1. a kind of GRIN Lens transmission wavefront measuring device, it is characterised in that:The GRIN Lens transmission wavefront measurement dress It puts including light source (1), converging lenses (2), target plate (3), collimating mirror (4), diaphragm (5), the first microcobjective (6), the second micro- object Mirror (8), positioning datum structure (9), Shack-Hartmann wavefront sensor (10) and control computer (11);The converging lenses (2), target plate (3), collimating mirror (4), diaphragm (5), the first microcobjective (6), the second microcobjective (8), positioning datum structure (9) And Shack-Hartmann wavefront sensor (10) is successively set on the emitting light path of light source (1);The Shack-Hartmann ripple Front sensor (10) is connected with control computer (11);GRIN Lens (7) to be measured is placed in the first microcobjective (6) and is shown with second Between speck mirror (8).
2. GRIN Lens transmission wavefront measuring device according to claim 1, it is characterised in that:The target plate (3) is put In the focal position of collimating mirror (4);Loophole is provided on the target plate (3);The diameter of the loophole meets following relation:
D=2.44 λ f/D
Wherein:
λ is the centre wavelength of light source (1);
F is the focal length of collimating mirror (4);
D is the clear aperture of collimating mirror (4);
D is the diameter of loophole on target plate (3).
3. GRIN Lens transmission wavefront measuring device according to claim 2, it is characterised in that:The first micro- object The numerical aperture of mirror (6) and the second microcobjective (8) is all higher than the numerical aperture of GRIN Lens to be measured (7).
4. the GRIN Lens transmission wavefront measuring device according to claim 1 or 2 or 3, it is characterised in that:The positioning Benchmark architecture (9) is placed in the front end of Shack-Hartmann wavefront sensor (10).
5. GRIN Lens transmission wavefront measuring device according to claim 4, it is characterised in that:The positioning datum knot Structure (9) is metallic plate, and taper loophole is provided on the metallic plate;The center of the taper loophole and Shack-Hartmann The target surface center of Wavefront sensor (10) overlaps.
6. GRIN Lens transmission wavefront measuring device according to claim 5, it is characterised in that:The collimating mirror (4) It is achromatism collimating mirror.
7. GRIN Lens transmission wavefront measuring device according to claim 6, it is characterised in that:The diaphragm (5) is Diaphragm for eliminating stray light.
8. GRIN Lens transmission wavefront measuring device according to claim 7, it is characterised in that:The light source (1) is Monochromatic source or white light source in the range of visible light wave range.
CN201720614776.1U 2017-05-27 2017-05-27 GRIN Lens transmission wavefront measuring device Expired - Fee Related CN207456742U (en)

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Application Number Priority Date Filing Date Title
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106959207A (en) * 2017-05-27 2017-07-18 崔京杰 GRIN Lens transmission wavefront measurement apparatus and method
CN109773354A (en) * 2019-03-05 2019-05-21 江苏中烟工业有限责任公司 A method of accurately calculating diaphragm for eliminating stray light and eyeglass distance and diaphragm for eliminating stray light clear aperture
CN112504479A (en) * 2020-12-02 2021-03-16 中国人民解放军国防科技大学 Novel wavefront measuring device and method, equipment and medium

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106959207A (en) * 2017-05-27 2017-07-18 崔京杰 GRIN Lens transmission wavefront measurement apparatus and method
CN109773354A (en) * 2019-03-05 2019-05-21 江苏中烟工业有限责任公司 A method of accurately calculating diaphragm for eliminating stray light and eyeglass distance and diaphragm for eliminating stray light clear aperture
CN112504479A (en) * 2020-12-02 2021-03-16 中国人民解放军国防科技大学 Novel wavefront measuring device and method, equipment and medium
CN112504479B (en) * 2020-12-02 2022-05-03 中国人民解放军国防科技大学 Novel wavefront measuring device and method, equipment and medium

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GR01 Patent grant
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Effective date of registration: 20180611

Address after: 710119 Lin Yin world 23-2216, information Avenue, Xi'an high tech Zone, Shaanxi, China. 23-2216

Patentee after: Xi'an Heim Dole Photoelectric Technology Co., Ltd.

Address before: 710065 Xingjia City, zhangeight East Road, Yanta District, Xi'an, Shaanxi

Patentee before: Cui Jingjie

TR01 Transfer of patent right
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Effective date of registration: 20190114

Address after: 710119 Room 2216, Building 23, Linyin World, No. 1 Zhangbajie Information Avenue, Xi'an High-tech Zone, Shaanxi Province

Patentee after: Xi'an Caminack Photoelectric Technology Co., Ltd.

Address before: 710119 Lin Yin world 23-2216, information Avenue, Xi'an high tech Zone, Shaanxi, China. 23-2216

Patentee before: Xi'an Heim Dole Photoelectric Technology Co., Ltd.

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180605

Termination date: 20210527