CN106596057A - Surface shape inspection method of large-aperture reflector assembly - Google Patents
Surface shape inspection method of large-aperture reflector assembly Download PDFInfo
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- CN106596057A CN106596057A CN201611029649.1A CN201611029649A CN106596057A CN 106596057 A CN106596057 A CN 106596057A CN 201611029649 A CN201611029649 A CN 201611029649A CN 106596057 A CN106596057 A CN 106596057A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The present invention relates to a surface shape inspection method of a large-aperture reflector assembly and belongs to the optical precision measurement technical field. The mirror surface of a reflector in the reflector assembly faces upwards, and an interferometer is adopted to measure the surface shape data W0(m*n) of the reflector in the reflector assembly; the mirror surface of the reflector in the reflector assembly faces downwards, and the interferometer is adopted to measure the surface shape data W0180(i*j) of the reflector in the reflector assembly; surface shape data matrix normalization processing is performed on W0(m*n) and W0180(i*j), so that F0(a*b)=Wa*b+Ka*b and F180(a*b)=Wa*b+G180(a*b)+Ka*b can be obtained; image superposition is performed on normalized surface shape data F0(a*b) and F180(a*b), gravity deformation is eliminated, so that reflector zero-gravity surface shape data F=(F0(a*b)+F180(a*b))/2=Wa*b+Ka*b can be obtained, if the root-mean-square value of the difference value Ka*b of F and Wa*b is not larger than 0.003lambda (lambda=632.8nm), it is considered that the assembling of the reflector assembly meets requirements; and if the root-mean-square value of the difference value Ka*b of F and Wa*b is larger than 0.003lambda, it is considered that the assembling of the reflector assembly does not meet requirements, and the reflector assembly is required to be reassembled.
Description
Technical field
The present invention relates to a kind of face shape method of inspection of large caliber reflecting mirror component, belongs to optical precision measurement technology neck
Domain, the method is used to detect whether the assembling of mirror assembly meets the requirements that described heavy caliber to refer to that aperture of a mirror is
Ф800mm-Ф1200mm。
Background technology
The discrete supporting construction of large-diameter optical part bipod has the advantages of assembling is simple, and mechanic boundary condition is simple,
It is past but shortcoming is exactly optical module deforms larger, and the wavefront surface shape testing result of final optical module under gravity environment
Toward the result for containing the multifactor interference fusion such as the original face shape of optical element, gravity deformation, erection stress deformation, and due to weight
Force deformation error is larger, and erection stress distortion inaccuracy can be submerged in gravity error, leads to not accurately judge assembly precision.
In-orbit to use because optical sensor majority is to debug on ground, when ground is debug, the test that gravity is caused is missed
Difference, it is in-orbit after can disappear automatically.Therefore, when optical sensor ground is debug, it is important to which erection stress error and gravity are missed
Difference is distinguished, and strictly controls erection stress error, and its influence degree is controlled in the range of technical requirements.
The problem of test is removed for large caliber reflecting mirror gravity error, domestic scholars propose heavy caliber spacing reflection mirror
The method of the unloading in naked mirror stage, carries out unloading sanction by special supporting construction to its gravity, and it is anti-that strict control support force is introduced
Mirror deformation is penetrated, the requirement of reflecting mirror high-precision surface shape detection is met, 06 phase in 2011 is specifically referred to《Application Optics》's《Big mouth
The Research on Supporting Techniques of footpath spacing reflection mirror high-precision surface shape detection》One is literary, or 2003《China's Space science association space
The 16th academic meeting paper collection of detection Professional Committee》In《Light-duty high resolution camera Unloading Technology research》One is literary.
These methods can be seen that by its method of testing and be disadvantageous in that measuring accuracy is limited by unloading structure, gravity deformation
Can not be completely eliminated, and be not suitable for the zero gravity face shape test of mirror assembly assembling stage.
The content of the invention
The present invention technology solve problem be：Overcome the deficiencies in the prior art, there is provided a kind of large caliber reflecting mirror component
The face shape method of inspection, provide reasonably for the discrete zero gravity face shape for supporting reflecting mirror the to debug test phase test of heavy caliber
Engineering construction method, and method of testing improves zero gravity face shape measuring accuracy simply not comprising simulation analysis and calculation error.
The present invention technical solution be：
A kind of face shape method of inspection of large caliber reflecting mirror component, it is characterised in that：Mirror assembly include reflecting mirror, six
Individual supporting leg and gripper shoe, reflecting mirror to be tested is fixed together with six supporting legs by gluing, and six supporting legs with
Fagging is fixed together；
The device that the method for testing is used includes test tower, fold mirror, compensator and interferometer；From the sphere that interferometer sends
Wavefront light beam or plane wave front light beam are reached in fold mirror after non-spherical wavefront light beam after the compensation of compensator, and light beam is by folding
Reach on reflecting mirror after the refraction of mirror, light beam backtracking after reflecting mirror forms interference fringe on interferometer；
Described test tower includes top braces platform and side plate, and having on top braces platform can make reflecting mirror and six
Individual supporting leg passes through and can not make the through hole that gripper shoe passes through；Through hole is carried on one of side plate, is sent for interferometer
Light beam passes through；
When reflecting mirror minute surface upward when, top braces platform be used for support fold mirror, compensator and interferometer, top braces
The cavity that platform, side plate and ground surround is used to hold mirror assembly；Interferometer, compensator, fold mirror are placed on from right to left
On the top braces platform of test tower, mirror assembly is placed on the inside of test tower；
When reflecting mirror minute surface down when, reflecting mirror in mirror assembly and six supporting legs pass through top braces platform
On through hole and carried out by gripper shoe spacing on top braces platform；Fold mirror and compensator are placed on from left to right by top
In the cavity that support platform, side plate and ground surround, interferometer is placed on test tower outside, and the light beam that interferometer sends can
It is transferred on compensator by the through hole on side plate；
The step of the method, includes：
(1) mirror in mirror assembly faces up, with the face shape of reflecting mirror in interferometer measurement mirror assembly
Data W0(m×n), and W0(m×n)=Wm×n+G0(m×n)+Km×n；Wherein, Wm×nFor reflecting mirror part status when original face graphic data,
Wm×nFor given value, G0(m×n)For gravity face graphic data, G0(m×n)For unknown-value, Km×nFor rigging error face graphic data, Km×nFor not
Know value；
(2) mirror in mirror assembly faces down, with the face shape of reflecting mirror in interferometer measurement mirror assembly
Data W180(i×j), and W180(i×j)=Wi×j+G180(i×j)+Ki×j；Wherein, Wi×jFor reflecting mirror part status when original face figurate number
According to Wi×jFor given value, G180(i×j)For gravity face graphic data, G180(i×j)For unknown-value, Ki×jFor rigging error face graphic data,
Ki×jFor unknown-value；
(3) face graphic data W for obtaining step (1)0(m×n)Face graphic data W obtained with step (2)180(i×j)The face of carrying out shape
Data matrix normalized, the face figurate number when mirror for obtaining obtaining after normalized in mirror assembly faces up
According to F0(a×b)=Wa×b+G0(a×b)+Ka×bFace graphic data F when facing down with the mirror in mirror assembly180(a×b)=Wa×b
+G180(a×b)+Ka×b, Wa×bFor reflecting mirror part status when original face graphic data, Wa×bFor given value；G0(a×b)For speculum group
Gravity face graphic data when mirror in part faces up, after normalized；G180(a×b)For the reflection in mirror assembly
Mirror minute surface down when, the gravity face graphic data after normalized；
(4) face graphic data F after the normalized for obtaining step (3)0(a×b)And F180(a×b)Image overlay is carried out, is disappeared
Except gravity deformation, surface shape of reflector in zero gravity state data F=(F is obtained0(a×b)+F180(a×b))/2=Wa×b+Ka×bIf, F and Wa×b
Difference Ka×bRoot-mean-square value be not more than 0.003 λ (λ=632.8nm), it is believed that the assembling of mirror assembly meets the requirements, if
F and Wa×bDifference Ka×bRoot-mean-square value be more than 0.003 λ, it is believed that the assembling of mirror assembly is undesirable, need to be again right
Mirror assembly is assembled.
Present invention advantage compared with prior art is：
(1) the zero gravity face shape test of mirror assembly is supported to provide more simple engineering construction for heavy caliber is discrete
Method；
(2) do not need Mechanics Simulation data to support, extra simulation calculation error will not be introduced.
(3) test result does not include gravity deformation error, and to be accurately positioned erection stress error objective technique base is provided
Plinth.
Description of the drawings
Fig. 1 is the FB(flow block) of the inventive method；
The structural representation of device when Fig. 2 is faced upwards for mirror；
The structural representation of device when Fig. 3 faces down for mirror；
Fig. 4 is emulation datagram.
Specific embodiment
The face shape method of inspection of a kind of large caliber reflecting mirror component, mainly in large caliber reflecting mirror and bipod structures
Between carry out injecting glue positioning and be assembled into the test of zero gravity face shape after discrete support component, i.e., reflecting mirror to be tested is propped up with six
Lower limb is fixed together by gluing, and six supporting legs are fixed together with gripper shoe, reflecting mirror, six supporting legs and
Gripper shoe groups are into mirror assembly 5；The device that the method for testing is used includes test tower 4, fold mirror 3, compensator 2 and interferometer 1；
The spheric wave front light beam sent from interferometer 1 or plane wave front light beam are after non-spherical wavefront light beam after the compensation of compensator 2
Reach in fold mirror 3, light beam by reaching after the refraction of fold mirror 3 on reflecting mirror, light beam after reflecting mirror backtracking to interference
Interference fringe is formed on instrument 1；
Described test tower 4 includes top braces platform and side plate, have on top braces platform can make reflecting mirror and
The through hole that six supporting legs pass through and pass through can not gripper shoe；Through hole is carried on one of side plate, is sent for interferometer 1
Light beam pass through；
When reflecting mirror minute surface upward when, top braces platform be used for support fold mirror 3, compensator 2 and interferometer 1, top
The cavity that support platform, side plate and ground surround is used to hold mirror assembly 5；Interferometer 1, compensator 2, fold mirror 3 are from dextrad
A left side is placed on the top braces platform of test tower 4, and mirror assembly 5 is placed on the inside of test tower 4；
When reflecting mirror minute surface down when, the reflecting mirror and six supporting legs in mirror assembly 5 is flat through top braces
Through hole on platform is simultaneously carried out spacing on top braces platform by gripper shoe；Fold mirror 3 and compensator 2 be placed on from left to right by
In the cavity that top braces platform, side plate and ground surround, interferometer 1 is placed on test tower 4 outside, and interferometer 1 sends
Light beam can be transferred on compensator 2 by the through hole on side plate；
The step of the method, includes：
(1) mirror in mirror assembly 5 faces up, and with interferometer 1 face of reflecting mirror in mirror assembly 5 is measured
Graphic data W0(m×n), and W0(m×n)=Wm×n+G0(m×n)+Km×n；Wherein, Wm×nFor reflecting mirror part status when original face figurate number
According to Wm×nFor given value, G0(m×n)For gravity face graphic data, G0(m×n)For unknown-value, Km×nFor rigging error face graphic data, Km×n
For unknown-value；
(2) mirror in mirror assembly 5 faces down, and with interferometer 1 face of reflecting mirror in mirror assembly 5 is measured
Graphic data W180(i×j), and W180(i×j)=Wi×j+G180(i×j)+Ki×j；Wherein, Wi×jFor reflecting mirror part status when original face shape
Data, Wi×jFor given value, G180(i×j)For gravity face graphic data, G180(i×j)For unknown-value, Ki×jFor rigging error face graphic data,
Ki×jFor unknown-value；
(3) face graphic data W for obtaining step (1)0(m×n)Face graphic data W obtained with step (2)180(i×j)The face of carrying out shape
Data matrix normalized, the face shape when mirror for obtaining obtaining after normalized in mirror assembly 5 faces up
Data F0(a×b)=Wa×b+G0(a×b)+Ka×bFace graphic data F when facing down with the mirror in mirror assembly 5180(a×b)=
Wa×b+G180(a×b)+Ka×b, Wa×bFor reflecting mirror part status when original face graphic data, Wa×bFor given value；G0(a×b)For reflection
Gravity face graphic data when mirror in mirror assembly 5 faces up, after normalized；G180(a×b)For in mirror assembly 5
Mirror when facing down, the gravity face graphic data after normalized；
(4) face graphic data F after the normalized for obtaining step (3)0(a×b)And F180(a×b)Image overlay is carried out, is disappeared
Except gravity deformation, surface shape of reflector in zero gravity state data F=(F is obtained0(a×b)+F180(a×b))/2=Wa×b+Ka×bIf, F and Wa×b
Difference Ka×bRoot-mean-square value be not more than 0.003 λ (λ=632.8nm), it is believed that the assembling of mirror assembly (5) meets the requirements,
If F and Wa×bDifference Ka×bRoot-mean-square value be more than 0.003 λ, it is believed that the assembling of mirror assembly 5 is undesirable, need weight
Newly mirror assembly 5 is assembled.
One kind can realize that heavy caliber is discrete and support mirror assembly gravity error to remove method of testing, using heavy caliber from
Dissipate and support mirror assembly mirror deformation under gravity field action to be elastic deformation, and the deformation is straight up and perpendicular in minute surface
Numerical value is identical during straight test downwards, opposite in phase the characteristics of, surveyed by the acquisition face shape to minute surface straight up and straight down
Attempt picture, graph data matrix normalization is then carried out to the face graphic data of different matrix dimensions and center, and then be superimposed
The average image, finally obtains the discrete face shape supported under reflecting mirror spare part gravity of heavy caliber.Such as Fig. 4 FEM Numerical Simulations institute
Show, Fig. 4 (a) is the emulation Deformation of surface figure figure that obtains straight up of mirror mirror, Fig. 4 (b) be mirror mirror straight down
The emulation Deformation of surface figure figure for obtaining, in the case of the situation for not considering other external force and naked mirror surface-shaped, Fig. 4 (a) and Fig. 4 (b)
Emulation Deformation of surface figure figure numerical value is identical, opposite in phase, superimposed to obtain Fig. 4 (c) zero-gravity simulation Deformation of surface figure figures.The method from
All it is accurate from the point of view of theoretical and emulation.
The flow process of the inventive method as shown in figure 1, test philosophy figure as shown in Figure 2 and Figure 3.The present invention keeps heavy caliber anti-
Mirror discrete support component state inside is penetrated unchanged, and the deformation that reflecting mirror occurs is all in the range of elastic deformation, with can be extensive
Renaturation and repeatability.180 ° of Turnover testing mirror assemblies, the optical element wavefront difference that its gravity is caused is equal in theory,
Conversely, being superimposed by image unification in phase in place, it is possible to which effectively removing gravity affects, and obtains surface shape of reflector in zero gravity state.
Specific method flow is as follows：
(1) mirror in mirror assembly 5 faces up, and with interferometer 1 face of reflecting mirror in mirror assembly 5 is measured
Graphic data W0(m×n), and W0(m×n)=Wm×n+G0(m×n)+Km×n；Wherein, Wm×nFor reflecting mirror part status when original face figurate number
According to Wm×nFor given value, G0(m×n)For gravity face graphic data, G0(m×n)For unknown-value, Km×nFor rigging error face graphic data, Km×n
For unknown-value；
(2) mirror in mirror assembly 5 faces down, and with interferometer 1 face of reflecting mirror in mirror assembly 5 is measured
Graphic data W180(i×j), and W180(i×j)=Wi×j+G180(i×j)+Ki×j；Wherein, Wi×jFor reflecting mirror part status when original face shape
Data, Wi×jFor given value, G180(i×j)For gravity face graphic data, G180(i×j)For unknown-value, Ki×jFor rigging error face graphic data,
Ki×jFor unknown-value；
(3) face graphic data W for obtaining step (1)0(m×n)Face graphic data W obtained with step (2)180(i×j)The face of carrying out shape
Data matrix normalized, the face shape when mirror for obtaining obtaining after normalized in mirror assembly 5 faces up
Data F0(a×b)=Wa×b+G0(a×b)+Ka×bFace graphic data F when facing down with the mirror in mirror assembly 5180(a×b)=
Wa×b+G180(a×b)+Ka×b, Wa×bFor reflecting mirror part status when original face graphic data, Wa×bFor given value；G0(a×b)For reflection
Gravity face graphic data when mirror in mirror assembly 5 faces up, after normalized；G180(a×b)For in mirror assembly 5
Mirror when facing down, the gravity face graphic data after normalized；
(4) face graphic data F after the normalized for obtaining step (3)0(a×b)And F180(a×b)Image overlay is carried out, is disappeared
Except gravity deformation, surface shape of reflector in zero gravity state data F=(F is obtained0(a×b)+F180(a×b))/2=Wa×b+Ka×bIf, F and Wa×b
Difference Ka×bRoot-mean-square value be not more than 0.003 λ (λ=632.8nm), it is believed that the assembling of mirror assembly 5 meets the requirements, such as
Fruit F and Wa×bDifference Ka×bRoot-mean-square value be more than 0.003 λ, it is believed that the assembling of mirror assembly 5 is undesirable, need again
Mirror assembly 5 is assembled.
One kind can realize that heavy caliber is discrete and support mirror assembly gravity error to remove method of testing, and its feature is：
Mirror assembly mirror deformation under gravity field action is supported to be elastic deformation using heavy caliber is discrete, and the deformation is in minute surface
Straight up with numerical value is identical when testing straight down, opposite in phase the characteristics of, by minute surface straight up and straight down
Acquisition face shape test image, then graph data matrix normalizing is carried out to the face graphic data of different matrix dimensions and center
Change, and then superposed average image, finally obtain the discrete face shape supported under reflecting mirror spare part gravity of heavy caliber.The inventive method
Test philosophy is simple, engineering construction is strong, and not comprising simulation analysis and calculation error, measuring accuracy is higher；Using objectively survey
Examination principle and data processing method, meet the requirement of space application reliability；Can be applicable to large caliber reflecting mirror component and debug rank
The shape test of section zero gravity face.
With reference to the accompanying drawings and examples the invention will be further described.
Embodiment 1
The face shape method of inspection of a kind of large caliber reflecting mirror component, mainly in large caliber reflecting mirror and bipod structures
Between carry out injecting glue positioning and be assembled into the test of zero gravity face shape after discrete support component, i.e., reflecting mirror to be tested is propped up with six
Lower limb is fixed together by gluing, and six supporting legs are fixed together with gripper shoe, reflecting mirror, six supporting legs and
Gripper shoe groups are into mirror assembly 5；The device that the method for testing is used includes test tower 4, fold mirror 3, compensator 2 and interferometer 1；
The spheric wave front light beam sent from interferometer 1 or plane wave front light beam are after non-spherical wavefront light beam after the compensation of compensator 2
Reach in fold mirror 3, light beam by reaching after the refraction of fold mirror 3 on reflecting mirror, light beam after reflecting mirror backtracking to interference
Interference fringe is formed on instrument 1；
Described test tower 4 includes top braces platform and side plate, have on top braces platform can make reflecting mirror and
The through hole that six supporting legs pass through and pass through can not gripper shoe；Through hole is carried on one of side plate, is sent for interferometer 1
Light beam pass through；
As shown in Fig. 2 when reflecting mirror minute surface upward when, top braces platform is used to supporting fold mirror 3, compensator 2 and dry
Interferometer 1, the cavity that top braces platform, side plate and ground surround is used to hold mirror assembly 5；Interferometer 1, compensator 2, folding
Mirror 3 is placed on from right to left on the top braces platform of test tower 4, and mirror assembly 5 is placed on the inside of test tower 4；
As shown in figure 3, when reflecting mirror minute surface down when, the reflecting mirror and six supporting legs in mirror assembly 5 is passed through
Through hole on top braces platform is simultaneously carried out spacing on top braces platform by gripper shoe；Fold mirror 3 and compensator 2 from a left side to
The right side is placed in the cavity surrounded by top braces platform, side plate and ground, and interferometer 1 is placed on the outside of test tower 4, and interferes
The light beam that instrument 1 sends can be transferred on compensator 2 by the through hole on side plate；
As shown in figure 1, the step of the method includes：
(1) mirror in mirror assembly 5 faces up, and with interferometer 1 face of reflecting mirror in mirror assembly 5 is measured
Graphic data W0(m×n)(λ=632.8nm, the data are root-mean-square statistical value RMS to=0.118 λ, and below all concrete data are
), and W RMS0(m×n)=Wm×n+G0(m×n)+Km×n；Wherein, Wm×nFor reflecting mirror part status when original face graphic data, Wm×n=
0.023 λ, G0(m×n)For gravity face graphic data, G0(m×n)For unknown-value, Km×nFor rigging error face graphic data, Km×nFor unknown-value；
(2) mirror in mirror assembly 5 faces down, and with interferometer 1 face of reflecting mirror in mirror assembly 5 is measured
Graphic data W180(i×j)=0.120 λ, and W180(i×j)=Wi×j+G180(i×j)+Ki×j；Wherein, Wi×jFor reflecting mirror part status when
Original face graphic data, Wi×j=0.023 λ, G180(i×j)For gravity face graphic data, G180(i×j)For unknown-value, Ki×jFor rigging error
Face graphic data, Ki×jFor unknown-value；
(3) face graphic data W for obtaining step (1)0(m×n)Face graphic data W obtained with step (2)180(i×j)The face of carrying out shape
Data matrix normalized, the face shape when mirror for obtaining obtaining after normalized in mirror assembly 5 faces up
Data F0(a×b)=Wa×b+G0(a×b)+Ka×b=W0(m×n)When mirror in=0.118 λ and mirror assembly 5 faces down
Face graphic data F180(a×b)=Wa×b+G180(a×b)+Ka×b=W180(i×j)=0.120 λ, wherein Wa×bFor reflecting mirror part status when
Original face graphic data, Wa×b=Wm×n=Wi×j=0.023 λ；G0(a×b)When facing up for the mirror in mirror assembly 5, return
Gravity face graphic data after one change process；G180(a×b)When facing down for the mirror in mirror assembly 5, normalized
Gravity face graphic data afterwards；
(4) face graphic data F after the normalized for obtaining step (3)0(a×b)And F180(a×b)Image overlay is carried out, is disappeared
Except gravity deformation, surface shape of reflector in zero gravity state data F=(F is obtained0(a×b)+F180(a×b))/2=Wa×b+Ka×b=0.025 λ, most
K is understood eventuallya×b=0.002 λ, judges accordingly F and Wa×bDifference Ka×bThe λ of root-mean-square value ＜ 0.003 (λ=632.8nm), reflection
The erection stress error control of mirror assembly 5 in place, meets the requirements, and is not required to ressemble mirror assembly 5.
Claims (1)
1. the face shape method of inspection of a kind of large caliber reflecting mirror component, it is characterised in that：Mirror assembly (5) including reflecting mirror,
Six supporting legs and gripper shoe, reflecting mirror to be tested is fixed together with six supporting legs by gluing, and six supporting legs with
Gripper shoe is fixed together；
The device that the method for testing is used includes test tower (4), fold mirror (3), compensator (2) and interferometer (1)；From interferometer
(1) the spheric wave front light beam for sending or plane wave front light beam are reached after non-spherical wavefront light beam after the compensation of compensator (2)
In fold mirror (3), light beam is reached after the refraction of fold mirror (3) on reflecting mirror, light beam by reflecting mirror after backtracking to interference
Instrument forms interference fringe on (1)；
Including top braces platform and side plate, having on top braces platform can make reflecting mirror and six to described test tower (4)
Individual supporting leg passes through and can not make the through hole that gripper shoe passes through；Through hole is carried on one of side plate, is sent for interferometer (1)
Light beam pass through；
When reflecting mirror minute surface upward when, top braces platform be used for support fold mirror (3), compensator (2) and interferometer (1), top
The cavity that portion's support platform, side plate and ground surround is used to hold mirror assembly (5)；Interferometer (1), compensator (2), fold mirror
(3) it is placed on from right to left on the top braces platform of test tower (4), mirror assembly (5) is placed on the interior of test tower (4)
Portion；
When reflecting mirror minute surface down when, reflecting mirror in mirror assembly (5) and six supporting legs pass through top braces platform
On through hole and carried out by gripper shoe spacing on top braces platform；Fold mirror (3) and compensator (2) are placed on from left to right
In the cavity surrounded by top braces platform, side plate and ground, interferometer (1) is placed on test tower (4) outside, and interferometer
(1) light beam for sending can be transferred on compensator (2) by the through hole on side plate；
The step of the method, includes：
(1) mirror in mirror assembly (5) faces up, and with interferometer (1) reflecting mirror in mirror assembly (5) is measured
Face graphic data W0(m×n), and W0(m×n)=Wm×n+G0(m×n)+Km×n；Wherein, Wm×nFor reflecting mirror part status when original face figurate number
According to Wm×nFor given value, G0(m×n)For gravity face graphic data, G0(m×n)For unknown-value, Km×nFor rigging error face graphic data, Km×n
For unknown-value；
(2) mirror in mirror assembly (5) faces down, and with interferometer (1) reflecting mirror in mirror assembly (5) is measured
Face graphic data W180(i×j), and W180(i×j)=Wi×j+G180(i×j)+Ki×j；Wherein, Wi×jFor reflecting mirror part status when original face
Graphic data, Wi×jFor given value, G180(i×j)For gravity face graphic data, G180(i×j)For unknown-value, Ki×jFor rigging error face figurate number
According to Ki×jFor unknown-value；
(3) face graphic data W for obtaining step (1)0(m×n)Face graphic data W obtained with step (2)180(i×j)The face of carrying out graphic data
Matrix normalization process, the face figurate number when mirror for obtaining obtaining after normalized in mirror assembly (5) faces up
According to F0(a×b)=Wa×b+G0(a×b)+Ka×bFace graphic data F when facing down with the mirror in mirror assembly (5)180(a×b)=
Wa×b+G180(a×b)+Ka×b, Wa×bFor reflecting mirror part status when original face graphic data, Wa×bFor given value；G0(a×b)For reflection
Gravity face graphic data when mirror in mirror assembly (5) faces up, after normalized；G180(a×b)For mirror assembly
(5) the gravity face graphic data when mirror in faces down, after normalized；
(4) face graphic data F after the normalized for obtaining step (3)0(a×b)And F180(a×b)Image overlay is carried out, weight is eliminated
Force deformation, obtains surface shape of reflector in zero gravity state data F=(F0(a×b)+F180(a×b))/2=Wa×b+Ka×bIf, F and Wa×bDifference
Value Ka×bRoot-mean-square value be not more than 0.003 λ (λ=632.8nm), it is believed that the assembling of mirror assembly (5) meets the requirements, if F
With Wa×bDifference Ka×bRoot-mean-square value be more than 0.003 λ, it is believed that the assembling of mirror assembly (5) is undesirable, need again
Mirror assembly (5) is assembled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611029649.1A CN106596057B (en) | 2016-11-14 | 2016-11-14 | A kind of face shape method of inspection of large caliber reflecting mirror component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611029649.1A CN106596057B (en) | 2016-11-14 | 2016-11-14 | A kind of face shape method of inspection of large caliber reflecting mirror component |
Publications (2)
| Publication Number | Publication Date |
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| CN106596057A true CN106596057A (en) | 2017-04-26 |
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