CN113008518A - Splicing detection method and system based on shack Hartmann wavefront sensor - Google Patents
Splicing detection method and system based on shack Hartmann wavefront sensor Download PDFInfo
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- CN113008518A CN113008518A CN202110215748.3A CN202110215748A CN113008518A CN 113008518 A CN113008518 A CN 113008518A CN 202110215748 A CN202110215748 A CN 202110215748A CN 113008518 A CN113008518 A CN 113008518A
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
Abstract
The invention discloses a splicing detection method based on a shack Hartmann wavefront sensor, which comprises the following steps: building a light path detection system; placing a lens to be detected in a light path; the wavefront sensor transmits the received optical signal to a computer to complete the detection of a sub-area; aligning the light path to another subregion of the lens to be detected; repeating the previous step until all the areas to be measured are detected; and splicing the detected multiple sub-regions by using a wave front splicing algorithm, thereby completing the splicing detection of the whole region. The invention also discloses a splicing detection system based on the shack Hartmann wavefront sensor. The invention uses the shack Hartmann wave-front sensor to collect optical signals, tests different areas of the large-caliber tested system for many times by using the small-aperture optical detection system, and splices the small apertures of the different areas into a large caliber by the wave-front splicing algorithm, thereby realizing the whole-area detection, improving the precision of the whole detection system and reducing the detection cost.
Description
Technical Field
The invention relates to quality detection of a large-aperture optical system, in particular to a splicing detection method and system based on a shack Hartmann wavefront sensor.
Background
With the development of the fields of aerospace, semiconductors, medical treatment and the like, the requirements on large-caliber optical elements are higher and higher, wherein the quality detection of the large-caliber optical elements is very important. For quality detection of a large-aperture optical system, the conventional common equipment is the American ZYGO laser interferometer, but the equipment is very expensive and has low spatial resolution, so that the inspection precision of the optical system is influenced.
Disclosure of Invention
The purpose of the invention is as follows: in view of the above problems, the present invention aims to provide a splicing detection method and system based on a shack hartmann wavefront sensor, which uses a small-caliber system to realize the quality detection of a large-caliber lens to be detected.
The technical scheme is as follows: the splicing detection method based on the shack Hartmann wavefront sensor comprises the following steps of:
s1: the method comprises the steps of building a light path detection system, building a laser, a spatial filter, a beam splitter prism, a collimating lens group and a standard reflector on an optical platform along the propagation direction of a light path in sequence, turning laser emitted by the laser by 90 degrees through the beam splitter prism and then entering the collimating lens group, respectively arranging a wavefront sensor and the collimating lens group on two sides of the beam splitter prism, connecting the wavefront sensor with a computer, starting the laser, the wavefront sensor and the computer after debugging the light path, and finely adjusting the position of the laser through a computer screen to optimize the system;
s2: placing a lens to be measured in a light path, wherein the lens to be measured is arranged between a collimating lens group and a standard reflector;
s3: laser output by the laser passes through a spatial filter, the filtered light passes through a beam splitter prism, the light passing through the beam splitter prism is bent by 90 degrees and enters a collimating lens group, and the light passing through the collimating lens group becomes parallel light;
s4: after parallel light passes through the lens to be detected, the light path passes through the standard reflector, returns to the lens to be detected, the collimating mirror and the light splitting prism, and then enters the wavefront sensor, and the wavefront sensor transmits the received light signal to a computer to complete the detection of a sub-area;
s5: moving the lens to be detected along the direction vertical to the light path, aligning the light path to another subregion of the lens to be detected, and transmitting the acquired optical signal to a computer by the wavefront sensor, wherein the light path is overlapped with the subregion detected last time;
s6: repeating the step S5 until all the areas to be measured are detected;
s7: and splicing the detected multiple sub-regions by using a wave front splicing algorithm, thereby completing the splicing detection of the whole region.
Further, when the sub-region detection is performed twice in the measurement region of the lens to be measured, the step S7 includes: fitting and unifying the overlapped parts of the wavefront phase values obtained by the two measurements to the same reference surface, wherein the fitting process is represented as:
wherein, W1(x,y)，W2(x, y) represents the phase values of the two sub-areas measured by the wavefront sensor; w10(x,y)，W20(x, y) represents the actual phase values of the two sub-regions; a isi，biRepresents the amount of tilt of sub-region i in the x, y directions; c. CiRepresenting defocus of the sub-region, diRepresenting the amount of translation in the optical axis direction caused by the inconsistency of the sub-region reference surfaces;
the overlapping regions of the two measurements have the same phase information, i.e. W should be present in the overlapping region10(x,y)＝W20(x, y), so in the overlap region:
W2(x,y)＝W1(x,y)+ax+by+c(x2+y2)+d
wherein a ═ a2-a1，b＝b2-b1，c＝c2-c1，d＝d2-d1；
Taking four points in the overlapping area, solving to obtain the solutions of the parameters a, b, c and d, but because various errors exist, using a plurality of points in the overlapping area to perform least square fitting to obtain the 4 parameters so as to reduce the influence of random errors on the splicing precision, wherein the least square expression of the N points is as follows:
wherein, Deltai(x,y)＝Wi2(x,y)-Wi1(x,y)；
Solving the above equation to obtain values of the splicing parameters a, b, c, d, and representing the unified wavefront phase map as:
W2'(x,y)＝W2(x,y)-(ax+by+c(x2+y2)+d)。
further, for the splicing of a plurality of sub-regions, firstly, one sub-region is selected as a reference, the sub-region intersected with the sub-region is spliced with the sub-region, then the spliced large region is used as a reference, and the like is carried out until the whole measurement range is covered, so that the splicing of the whole region is completed.
Further, the wavefront sensor adopts a shack Hartmann wavefront sensor.
Further, the lens to be measured is arranged on the two-dimensional platform and used for adjusting the height of the lens to be measured and the displacement perpendicular to the direction of the light path, the two-dimensional platform is connected with the controller, and the two-dimensional platform is moved to the designated position through the controller.
The splicing detection system based on the shack Hartmann wavefront sensor comprises a laser, a spatial filter, a beam splitter prism, a collimating lens group and a standard reflector which are sequentially arranged along the transmission direction of an optical path, wherein laser emitted by the laser is turned by 90 degrees through the beam splitter prism and enters the collimating lens group, the wavefront sensor and the collimating lens group are respectively arranged on two sides of the beam splitter prism and are connected with a computer, and the wavefront sensor adopts the shack Hartmann wavefront sensor.
Furthermore, according to the requirement of the lens to be measured, collimating lens groups with different calibers are matched, and light passing through the collimating lens groups becomes parallel light.
Furthermore, a diaphragm is arranged between the wavefront sensor and the beam splitter prism, and stray light is limited from entering the wavefront sensor.
Has the advantages that: compared with the prior art, the invention has the following remarkable advantages: the invention utilizes the wavefront sensor to collect optical signals, tests different areas of a large-caliber tested system for many times by using an optical detection system with small aperture, and splices the small apertures of the different areas into a large aperture by using a wavefront splicing algorithm, thereby realizing the detection of the whole area, improving the precision of the whole detection system and reducing the detection cost; the use of the shack Hartmann wavefront sensor improves the measurement spectral range and has wide measurement dynamic range; and according to the requirements of the lens to be measured, collimating lenses with different calibers can be matched.
Drawings
FIG. 1 is a schematic diagram of the optical path of the present invention;
fig. 2 is a schematic diagram of the wave front splicing principle.
Detailed Description
The splicing detection method based on the shack Hartmann wavefront sensor comprises the following steps:
s1: the method comprises the steps of building a light path detection system, building a laser 1, a spatial filter 2, a beam splitter prism 3, a collimating lens group and a standard reflector 7 on an optical platform in sequence along the propagation direction of a light path, turning laser emitted by the laser 1 through the beam splitter prism 3 by 90 degrees and then entering the collimating lens group, respectively arranging a wavefront sensor 10 and the collimating lens group on two sides of the beam splitter prism 3, connecting the wavefront sensor 10 with a computer 11, debugging the light path, starting the laser 1, the wavefront sensor 10 and the computer 11, and finely adjusting the position of the laser 1 through a screen of the computer 11 to optimize the system, wherein the wavefront sensor 10 adopts a shack Hartmann wavefront sensor, and the light path diagram is shown in figure 1;
s2: placing a lens 6 to be measured in a light path, wherein the lens 6 to be measured is arranged between the collimating lens group and the standard reflector 7; the lens 6 to be measured is fixed on the two-dimensional platform and used for adjusting the height of the lens 6 to be measured and the displacement perpendicular to the direction of the light path, the splicing position is calculated through software, the two-dimensional platform is connected with the controller, and the two-dimensional platform is moved to the designated position through the controller;
s3: laser output by the laser 1 passes through the spatial filter 2, the filtered light passes through the beam splitter prism 3, the light passing through the beam splitter prism 3 is bent by 90 degrees and enters the collimating lens group, and the light passing through the collimating lens group becomes parallel light;
s4: after parallel light passes through the lens 6 to be detected, a light path passes through the standard reflector 7, returns to the lens 6 to be detected, the collimating mirror and the beam splitter prism 3 and enters the wavefront sensor 10, and the wavefront sensor 10 transmits a received optical signal to a computer 11 to complete detection of a sub-area;
s5: moving the lens 6 to be detected along the direction vertical to the light path, aligning the light path to another subregion of the lens 6 to be detected, and transmitting the collected optical signal to the computer 11 by the wavefront sensor 10, wherein the light path is overlapped with the last detected subregion;
s6: repeating the step S5 until all the areas to be measured are detected;
s7: and splicing the detected multiple sub-regions by using a wave front splicing algorithm, thereby completing the splicing detection of the whole region.
As shown in fig. 2, when the sub-region detection is performed twice in the measurement region of the lens 6 to be measured, the wavefront splicing algorithm of step S7 includes: fitting and unifying the overlapped parts of the wavefront phase values obtained by the two measurements to the same reference surface, wherein the fitting process is represented as:
wherein, W1(x,y)，W2(x, y) represents the phase values of the two sub-regions measured by the wavefront sensor 10; w10(x,y)，W20(x, y) represents the actual phase values of the two sub-regions; a isi，biRepresents the amount of tilt of sub-region i in the x, y directions; c. CiRepresenting defocus of the sub-region, diRepresenting the amount of translation in the optical axis direction caused by the inconsistency of the sub-region reference surfaces;
the overlapping regions of the two measurements have the same phase information, i.e. W should be present in the overlapping region10(x,y)＝W20(x, y), so in the overlap region:
W2(x,y)＝W1(x,y)+ax+by+c(x2+y2)+d
wherein a ═ a2-a1，b＝b2-b1，c＝c2-c1，d＝d2-d1；
Taking four points in the overlapping area, solving to obtain the solutions of the parameters a, b, c and d, but because various errors exist, using a plurality of points in the overlapping area to perform least square fitting to obtain the 4 parameters so as to reduce the influence of random errors on the splicing precision, wherein the least square expression of the N points is as follows:
wherein, Deltai(x,y)＝Wi2(x,y)-Wi1(x,y)；
Solving the above equation to obtain values of the splicing parameters a, b, c, d, and representing the unified wavefront phase map as:
W2'(x,y)＝W2(x,y)-(ax+by+c(x2+y2)+d)。
for the splicing of a plurality of sub-regions, firstly selecting one sub-region as a reference, splicing the sub-region intersected with the sub-region and the sub-region intersected with the sub-region, then using the spliced large region as a reference, and so on until the whole measuring range is covered, thereby completing the splicing of the whole region.
A window of the lens 6 to be tested is selected, table 1 shows information of the window to be tested, the same window is respectively detected by using the splicing test method of the embodiment and the existing ZYGO interferometer under the same test environment, the result of 10 times of measurement of the splicing test system is compared with the ZYGO interferometer, and table 2 shows a peak-valley PV value comparison result and a root-mean-square RMS value comparison result.
TABLE 1 Window information
TABLE 2 comparison of Peak to Val and root mean Square values
From the comparison in table 2, it is found that the accuracy and stability of the test window of the stitching test method of this embodiment are better than those of the ZYGO interferometer when the results of 10 measurements are compared.
This embodiment a concatenation detecting system based on shack hartmann wavefront sensor include along laser instrument 1, spatial filter 2, beam splitter prism 3, collimating lens group, the standard mirror 7 that the light path transmission direction set gradually, the laser that laser instrument 1 sent passes through beam splitter prism 3 and turns 90 degrees back and gets into collimating lens group, wavefront sensor 10 and collimating lens group set up respectively in beam splitter prism 3's both sides, are connected wavefront sensor 10 with computer 11. A diaphragm 8 is arranged between the wavefront sensor 10 and the beam splitter prism 3, and stray light is limited from entering the wavefront sensor 10. A relay lens 9 is provided between the diaphragm 8 and the wavefront sensor 10. The lens 6 to be measured is arranged between the collimating lens group and the standard reflector 7. The wavefront sensor 10 employs a shack hartmann wavefront sensor. The collimating lens group comprises a small collimating lens 4 and a large collimating lens 5, and the small collimating lens 4 is arranged between the large collimating lens 5 and the beam splitting prism 3. According to the requirement of the lens 6 to be measured, collimating lenses with different apertures are matched, and light passing through the collimating lenses becomes parallel light.
Claims (8)
1. A splicing detection method based on a shack Hartmann wavefront sensor is characterized by comprising the following steps:
s1: the method comprises the steps of building a light path detection system, building a laser (1), a spatial filter (2), a beam splitter prism (3), a collimating lens group and a standard reflector (7) on an optical platform in sequence along the light path propagation direction, turning laser emitted by the laser (1) by 90 degrees through the beam splitter prism (3) and then entering the collimating lens group, respectively arranging a wavefront sensor (10) and the collimating lens group on two sides of the beam splitter prism (3), and connecting the wavefront sensor (10) with a computer (11);
s2: placing a lens (6) to be measured into a light path, wherein the lens (6) to be measured is arranged between a collimating lens group and a standard reflector (7);
s3: laser output by the laser (1) passes through the spatial filter (2), and the filtered light passes through the beam splitter prism (3) and is bent by 90 degrees to enter the collimating lens group to become parallel light;
s4: parallel light passes through a lens (6) to be detected, then passes through a standard reflector (7), returns to the lens (6) to be detected, a collimating mirror group and a beam splitter prism (3), and then enters a wavefront sensor (10), and the wavefront sensor (10) transmits a received optical signal to a computer (11) to complete the detection of a sub-area;
s5: moving the lens (6) to be detected along the direction vertical to the light path, aligning the light path to another subregion of the lens (6) to be detected, and transmitting the collected optical signal to a computer (11) by the wavefront sensor (10), wherein the light path is overlapped with the subregion detected last time;
s6: repeating the step S5 until all the areas to be measured are detected;
s7: and splicing the detected multiple sub-regions by using a wave front splicing algorithm, thereby completing the splicing detection of the whole region.
2. The splicing detection method based on shack-hartmann wavefront sensor according to claim 1, characterized in that, when the measurement area of the lens (6) to be detected is subjected to two sub-area detections, the step S7 wavefront splicing algorithm comprises: fitting and unifying the overlapped parts of the wavefront phase values obtained by the two measurements to the same reference surface, wherein the fitting process is represented as:
wherein, W1(x,y)，W2(x, y) represents the phase values of the two sub-areas measured by the wavefront sensor (10); w10(x,y)，W20(x, y) represents the actual phase values of the two sub-regions; a isi，biRepresents the amount of tilt of sub-region i in the x, y directions; c. CiRepresenting defocus of the sub-region, diIndicating the amount of translation in the optical axis direction caused by the sub-region reference plane non-uniformity.
3. The shack hartmann wavefront sensor-based stitching detection method as recited in claim 2, wherein the stitching detection method is performed twiceThe measured overlapping regions have the same phase information, and should have W in the overlapping regions10(x,y)＝W20(x, y), so in the overlap region:
W2(x,y)＝W1(x,y)+ax+by+c(x2+y2)+d
wherein a ═ a2-a1，b＝b2-b1，c＝c2-c1，d＝d2-d1；
At least four points in the overlapping area are taken to obtain the solution of the parameters a, b, c and d.
4. The splicing detection method based on the shack-hartmann wavefront sensor according to claim 3, characterized in that the 4 parameters of a, b, c, d are obtained by performing least square fitting using a plurality of points in the overlapping area to reduce the influence of random errors on the splicing accuracy, and the least square expression of N points is:
wherein, Deltai(x,y)＝Wi2(x,y)-Wi1(x,y)；
Solving the above equation to obtain values of the splicing parameters a, b, c, d, and representing the unified wavefront phase map as:
W2'(x,y)＝W2(x,y)-(ax+by+c(x2+y2)+d)。
5. the splicing detection method based on a shack-hartmann wavefront sensor according to claim 1, characterized in that the wavefront sensor (10) adopts a shack-hartmann wavefront sensor.
6. The shack hartmann wavefront sensor-based stitching detection system according to claim 1, wherein the lens (6) to be detected is arranged on a two-dimensional platform, and the two-dimensional platform is connected with the controller.
7. The utility model provides a concatenation detecting system based on shack Hartmann wavefront sensor, its characterized in that includes laser instrument (1), spatial filter (2), beam splitter prism (3), collimating lens group, standard reflecting mirror (7) that set gradually along light path propagation direction, the laser that laser instrument (1) sent passes through beam splitter prism (3) turn and gets into collimating lens group after 90 degrees, and wavefront sensor (10) and collimating lens group set up respectively in the both sides of beam splitter prism (3), are connected wavefront sensor (10) and computer (11), wavefront sensor (10) adopt shack Hartmann wavefront sensor.
8. Splicing detection system based on a shack-hartmann wavefront sensor according to claim 7, characterized in that a diaphragm (8) is arranged between the wavefront sensor (10) and the beam splitter prism (3).
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