CN106645197A - Online detection system for detecting particles on surface of precise optical element and application method - Google Patents
Online detection system for detecting particles on surface of precise optical element and application method Download PDFInfo
- Publication number
- CN106645197A CN106645197A CN201611233039.3A CN201611233039A CN106645197A CN 106645197 A CN106645197 A CN 106645197A CN 201611233039 A CN201611233039 A CN 201611233039A CN 106645197 A CN106645197 A CN 106645197A
- Authority
- CN
- China
- Prior art keywords
- optical element
- particle
- optical
- imaging device
- detecting system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 154
- 239000002245 particle Substances 0.000 title claims abstract description 121
- 238000000034 method Methods 0.000 title claims abstract description 36
- 238000001514 detection method Methods 0.000 title claims abstract description 35
- 238000003384 imaging method Methods 0.000 claims abstract description 65
- 230000007246 mechanism Effects 0.000 claims description 24
- 239000013618 particulate matter Substances 0.000 claims description 21
- 238000012937 correction Methods 0.000 claims description 16
- 238000009434 installation Methods 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 11
- 230000000712 assembly Effects 0.000 claims description 7
- 238000000429 assembly Methods 0.000 claims description 7
- 238000005375 photometry Methods 0.000 claims description 7
- 238000005498 polishing Methods 0.000 claims description 4
- 238000005452 bending Methods 0.000 claims description 3
- 230000008676 import Effects 0.000 claims description 3
- 238000007689 inspection Methods 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 abstract description 9
- 238000004891 communication Methods 0.000 abstract description 2
- 239000000356 contaminant Substances 0.000 abstract 1
- 230000008901 benefit Effects 0.000 description 12
- 239000003344 environmental pollutant Substances 0.000 description 12
- 231100000719 pollutant Toxicity 0.000 description 12
- 230000009466 transformation Effects 0.000 description 12
- 230000000694 effects Effects 0.000 description 10
- 238000005259 measurement Methods 0.000 description 9
- 238000012986 modification Methods 0.000 description 9
- 230000004048 modification Effects 0.000 description 9
- 239000007787 solid Substances 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 4
- 239000005357 flat glass Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 238000011897 real-time detection Methods 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000002329 infrared spectrum Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000000879 optical micrograph Methods 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004438 eyesight Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 238000007619 statistical method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Microscoopes, Condenser (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses an online detection system for detecting particles on a surface of a precise optical element. The online detection system comprises a box body and an optical element, wherein a light inlet which can be used for laser to enter is formed in the top of the box body; the optical element is arranged inside the box body; two linear light sources are oppositely arranged on the edge of a mirror frame of the optical element; one side of the box body is provided with an optical microscopic imaging apparatus; and the imaging apparatus is in communication connection with a principal computer so as to realize the online detection for the particles on the surface of the optical element. According to the online detection system for detecting the particles on the surface of the precise optical element, by virtue of the cooperation of the optical element and the linear light sources and the cooperation of the principal computer and the optical microscopic imaging apparatus, the online monitoring for particle contaminants on the surface of the optical element in an optical machine apparatus can be realized, and information about a surface clean state of the optical element can be efficiently and precisely provided in real time. The invention provides a method for using the detection system.
Description
Technical field
The present invention relates to a kind of belong to the detecting system that detection measurement and image procossing are combined.More specifically, the present invention
It is related to the particulate pollutant state on-line detecting system and application process of a kind of optical elements of large caliber used in optical-mechanical system.
Background technology
In running, due to the impact of running environment, optical element surface can produce various pollutions to optical-mechanical system, this
The damage produced to optical element surface essentially from the molecule residue and high-power laser beam in environment is polluted a bit.
After a period of time of optical-mechanical system operation simultaneously, precison optical component surface detention solid particle, optical element is through the more of laser
The defect on its surface can produce new particle contamination after secondary irradiation, and safety of the clean state on surface to system during system operation
Operation is very crucial, thus needs to detect the solid particulate matter of element surface, and for the optics unit in optical-mechanical system
For part, solid particle is one of the key factor for affecting its normal work, therefore dirty to optical elements of large caliber surface particles
The detection of dye thing is imperative.
And in terms of surface cleanliness Non-Destructive Testing and identification, at present the main method for adopting has：Ocular estimate, weight method,
Particle counting detection, sonic detection, infrared spectrum detection and the detection based on machine vision etc..Wherein ocular estimate and weight method
It is national standard and conventional method specified in national army's mark.NIF is rushed using the method for measurement indirectly using special cleaning fluid
The optical surface of certain area is washed, with filter paper the solid particle in cleaning fluid is collected, obtain its size and number, secondary indication table
Face cleanliness factor；It is to detection surface, when there is particulate pollutant by transmitting pulsed YAG laser based on the real-time detection method of sound wave
The sound wave of special frequency band can be produced, the sound wave is analyzed, size and the distribution of correspondence particulate matter is obtained；Infrared spectrum detection method be by
The actual optical components surface infrared light reflection spectral density distribution of detection, from different pollutant infrared light reflection spectral densities point
The serial sample of cloth compares, and judges type and the distribution of pollutant；These three schemes are respectively present to varying degrees expense and hold high
Expensive, precision is high, inefficient and the problems such as detection difficult, especially in terms of efficiency, exists in optical-mechanical system substantial amounts of various
The optical elements of large caliber of type, detection speed will cause slowly detection efficiency to substantially reduce, and impact system is used.
The precison optical component surface cleanliness detecting system that University Of Chongqing builds, it is proposed that based on machine vision method
Image detecting system, devises the floating holder and three-dimensional electric control platform suitable for sizes element to be detected.Using edge
Detective operators are partitioned into checked object edge, and with the method for convex hull the closed area of checked object is obtained, using interconnection vector machine
Method, the vector to be detected for treating the geometric space, gray space and transform domain spatial parameter composition of detection object closed area enters
Row analysis, identifies solid particle residue and non-solid particle residue thing, finally gives the cleaning on precison optical component surface
Degree grade.But the system can only realize the off-line measurement of optical element, optical element may be chromogenic during carrying
New particle contamination, and off-line system is unable to particulate pollutant state when display optics are run, and algorithm is complicated, uses
Effect is general.
In a word, the detection research work both at home and abroad to optical element has made some progress, but these technologies are not yet real
Now line detection optics element state, and can not efficiently, the surface cleanliness of high-acruracy survey optical element.
The content of the invention
It is an object of the invention to solve at least the above and/or defect, and provide at least will be described later excellent
Point.
It is a still further object of the present invention to provide a kind of on-line detecting system of detection precison optical component surface particles thing,
It can be realized to light in optical mechanical apparatus by optical element and line source, the cooperation of host computer and optical micro imaging device
The on-line monitoring of element surface particulate pollutant is learned, and optical element surface clean state letter efficiently, is accurately provided in real time
Breath.
It is a still further object of the present invention to provide a kind of method of application detecting system, it to optical microphotograph imaging by filling
The correction of internal reference, and the modeling to on-gauge plate particle parameter are put, photometry element surface particulate pollutant parameter is treated in realization
The real-time detection analytic operation of information, particulate pollutant state during being run by the real-time display optics of host computer.
In order to realize these purposes of the invention and further advantage, there is provided one kind detection precison optical component surface
The on-line detecting system of particulate matter, including：
Casing, its top is provided with the light inlet for being available for laser to enter；
Be arranged on box house, and with the input path of laser in 45 degree of angles so that input path to be reflected the light of casing
Learn element；
Wherein, the picture frame edge top of the optical element is relatively set with, symmetrically to be beaten light element surface
2 line sources of light；
The casing side is provided with the optical micro imaging device of shooting angle and optical element perpendicular；
The imaging device is by communicating with the host computer of connection and then realizing existing optical element surface particulate matter
Line is detected.
Preferably, wherein, including：Each line source passes through two clamp assemblies being removably oppositely arranged
And then be connected with optical element.
Preferably, wherein, each clamp assemblies include：
The clamping device being engaged with optical element picture frame；
It is arranged on clamping device, with the supporting mechanism coordinated with line source；
Wherein, the free end of the connector arranges angled rotating mechanism, is provided with the line source and angle rotation
The connector that rotation mechanism is engaged, the emergent light of line source is adjusted to the surface with optical element by angle rotating mechanism
It is opposing parallel.
Preferably, wherein, the supporting mechanism includes：
The fixed part being engaged with clamping device；
And be set in fixed part, and the supporting part that can be stretched along the length direction of fixed part；
Wherein, the supporting part is provided with groove near fixed one end, and the other end is provided with and angle rotating mechanism phase
The U-lag of cooperation, is provided with the fixed part and is engaged with groove, to adjust the first adjustment hole of supporting part collapsing length；
The angle rotating mechanism includes：
The one T-shaped connecting portion being engaged with connector；
One is arranged on T-shaped connecting portion one end, with the flat fixed part being engaged with U-lag；
Wherein, at least one is provided with the supporting part, with the second regulation being adjusted to line source deflection angle
Hole.
Preferably, wherein, the installation window being engaged with optical micro imaging device is provided with the casing；
The installation window includes that one stretches into the observation lens barrel of box house, and be arranged on observe lens barrel one end with casing
The bending part being connected；
Wherein, camera lens one end of the optical micro imaging device stretches to observation lens barrel, and the other end passes through a fixed plate
And then be connected with the lateral wall of casing；
Observation lens barrel, the camera lens be configured to towards the transverse plane of optical element one end it is parallel with optical element surface,
So that the cylinder axle of observation lens barrel and camera lens is vertical with optical element surface.
Preferably, wherein, also include：The optical micro imaging device by a control box and host computer communication link
Connect.
The purpose of the present invention can also be realized by a kind of method of application detecting system, including：
Step one, regulation is corrected using host computer to the inner parameter of optical micro imaging device, corresponding to obtain
Distortion parameter；
Step 2, host computer by the on-gauge plate with different size particle, to the pixel of particle image in on-gauge plate with
Particle actual size relation is modeled, to obtain pattern function therebetween；
Step 3, by the inspection software in host computer, is adjusted poly- to the enlargement ratio of optical micro imaging device
Jiao, to obtain clearly optical element surface particulate matter gray scale picture to be measured by optical micro imaging device, and preserves supreme
Position machine；
Step 4, the inspection software imports the gray scale picture for preserving, and line distortion is entered to picture by the distortion parameter
Correction, then by pattern function computing to obtain the actual size of a certain particulate matter of optical element surface to be measured, it is corresponding to obtain
The parameter information related with regard to particle length, width, area, girth.
Preferably, wherein, in step one, the distortion parameter is comprised the steps of：
Step S11：To be placed in detecting system with chequered with black and white trellis chessboard plane, chessboard is gathered after focus
Image of the plane in different angles；
Step S12：According to the image of gained different positions and pose chessboard plane, using plane camera parameter standardization camera is obtained
Internal reference exponential model, and then obtain corresponding distortion parameter；
In step 2, the pattern function is comprised the following steps：
S21：In the case of the operating distance identical of lighting condition and image capturing system, will be with typically different size
The on-gauge plate of particle is placed in detecting system, and with reference to the method for step 3 to step 4 the particle image of on-gauge plate is obtained；
S22：Using the method for local dynamic station binaryzation, to obtain the bianry image of on-gauge plate, and then extract profile to obtain
The pixel length and width of Typical particle on on-gauge plate；
S23：On-gauge plate with Typical particle is placed under measuring microscope, is measured on on-gauge plate using measuring microscope
The actual length and width of corresponding Typical particle；
S24：Contrast is carried out according to the actual length and width and pixel length and width relation of the same particle obtained in S23, S22 to build
Mould, obtains pattern function between the two.
Preferably, wherein, in step 3, the optical micro imaging device it is vertical with optical element to be measured away from
From 430mm is configured to, the enlargement ratio of zoom camera lens is configured to 0.055x- in the optical micro imaging device
10.55x。
Preferably, wherein, also include：
Step 5, the detecting system is counted by treating the parameter information of each particle of photometry element surface, is obtained
To the particle statistic information matched with optical element surface particle to be measured, and preserve into host computer；
Wherein, the particle statistic information includes：The total number of optical element surface particle to be measured, and it is therein existing
Shape, point-like numbers of particles；
Wire, point-like numbers of particles statistics are respectively to (0-20 μm 20-50 μm 50-100 μm 100 μm of-∞) segment
Included in each numbers of particles and parameter information counted.
The present invention at least includes following beneficial effect：First, cooperation of the present invention by line source and optical element surface,
To obtain more preferably details in a play not acted out on stage, but told through dialogues gray level image；By the cooperation of host computer and optical micro imaging device, realize in optical mechanical apparatus
The on-line monitoring of optical element surface particulate pollutant, and optical element surface clean state efficiently, is accurately provided in real time
Information.
Second, clamp assemblies of the present invention by the setting between line source and optical element mirror so that line source and light
Learn element surface distance and adjustable angle, to adapt to actually used complex environment and high-precision requirement, with can implement effect
Really good, stability is strong, the good effect of adaptability.
Third, the present invention obtains an installation window by carrying out transformation to monitoring window so that install window window glass and light
Learn element surface parallel, and the distance between window glass and element surface are installed by changing, to adapt to zoom lens
Operating distance, good stability good with adaptability, highly reliable effect.
Fourth, the method that the present invention also provides a kind of application detecting system of line source, it to optical microphotograph by being imaged
Photometry element surface particulate pollutant ginseng is treated in the correction of device internal reference, and the modeling to on-gauge plate particle parameter, realization
The real-time detection analytic operation of number information, and computing letter is easily achieved, when being run by the real-time display optics of host computer
Particulate pollutant state.
The further advantage of the present invention, target and feature embody part by description below, and part will also be by this
The research of invention and practice and be understood by the person skilled in the art.
Description of the drawings
Fig. 1 is the group of the on-line detecting system that precison optical component surface particles thing is detected in one embodiment of the present of invention
Into block diagram；
The structured flowchart of casing and inner member in Fig. 2 one embodiment of the present of invention on-line detecting systems；
The composition frame chart of support component in Fig. 3 one embodiment of the present of invention on-line detecting systems；
Fig. 4 is the lateral plan of Fig. 3；
The flow chart of data processing figure of distortion correction in Fig. 5 one embodiment of the present of invention on-line detecting systems；
The flow chart of data processing figure of local dynamic station binaryzation in Fig. 6 one embodiment of the present of invention on-line detecting systems.
Specific embodiment
Below in conjunction with the accompanying drawings the present invention is described in further detail, to make those skilled in the art with reference to specification text
Word can be implemented according to this.
It should be appreciated that it is used herein such as " have ", "comprising" and " including " term do not allot one or many
The presence or addition of individual other elements or its combination.
Fig. 1-2 shows a kind of on-line detecting system of detection precison optical component surface particles thing of the invention
Way of realization, including：
Casing 1, its top is provided with the light inlet 10 for being available for laser to enter, and optical elements of large caliber is positioned over detection
The box house of window (optical micro imaging device), the main optical path of optical-mechanical system is that laser is entered from casing top, Jing optics unit
Part reflects casing；
Be arranged on box house, and with the input path of laser in 45 degree of angles so that input path to be reflected the light of casing
Learn element 2；
Wherein, the edge of picture frame 20 top of the optical element is relatively set with, to carry out symmetrically to light element surface
2 line sources 3 of polishing, oblique 45 ° of optical elements upwards can form dark-field imaging under the oblique incident ray illumination of two groups of line sources
System, and 2 line sources being symmetrically installed above optical element picture frame edge, can realize the full model of the low angle to optical element
Enclose symmetrical polishing, and each line source be configured to it is in bar shaped and parallel with optical element upper surface, to ensure clearly to show optics
Element surface particle, obtains darkfield image with distinct contrast；
The casing side is provided with the optical micro imaging device 4 of shooting angle and optical element perpendicular, optics
Microscopic imaging device includes zoom lens 40 and high-resolution CCD 41, and the zooming range of zoom lens is configured to
0.055x-0.55x, during actual imaging, the particulate matter for 100 μm using 0.055 × multiplication factor camera lens, can be with
Gamut detects the particle contamination of optical element, and the particulate matter for 30 μm, using the camera lens of 0.55 × multiplication factor.It is logical
Chang Xiangji (video camera) is 17 μm in the pixel resolution that the minimum visual field (corresponding multiplication factor is 0.55x) is issued to, most
The pixel resolution that the big visual field (corresponding multiplication factor is 0.055x) is issued to is 73 μm, but and due to dark-field imaging system pair
Particulate pollutant has scattering enlarge-effect, and actual size is 10 μm or so of particulate matter, and being amplified by dark-field imaging to reach
20 μm and dimensions above, therefore the pixel that Particulate Pollution monitoring accuracy can reach under the minimum visual field (i.e. maximum amplification)
Resolution ratio is 10 μm；
The imaging device is by communicating with the host computer 5 of connection and then realizing existing optical element surface particulate matter
Line is detected.Mainly do not entered after the reflection of ideal optical components clean surface using the emergent light of linear light sorurce using this scheme
Enter camera lens, only form scattering where optical element pollution, scattered light enters camera lens, and in CCD target surfaces brighter point is formed, if
With agranular optical element as object, then uniform details in a play not acted out on stage, but told through dialogues is obtained, and when optical element surface has dust, into thing
Mirror imaging be dust scattering light shafts, which can provide bright particle picture, contrast in dark background, can make point
Resolution is improved, observable less than the camera lens limit the submicroscopic particle of small particle-i.e., with can implementation result it is good, operability
By force, simple structure, detection speed is fast, and accuracy of detection is high, is capable of achieving the benefit of on-line real time monitoring.Also, this mode
A kind of simply explanation of preferred embodiments, but be not limited thereto.When the present invention is implemented, can be fitted according to user's demand
Answering property is replaced and/or changed.
As shown in Fig. 2 in another kind of embodiment, including：Each line source is by being removably oppositely arranged
Two clamp assemblies 6 so that be connected with optical element.Can with the distance of optical element using the line source that causes of this scheme
Adjustment, and spatially four-point supporting is carried out to two linear light sorurces, to make it have more preferable stability, beneficial to later maintenance
With the benefit changed.Also, this mode is a kind of explanation of preferred embodiments, but is not limited thereto.Implementing this
During invention, adaptability replacement and/or modification can be carried out according to user's demand.
As shown in Figure 3-4, in another kind of embodiment, each clamp assemblies include：
The clamping device 60 being engaged with optical element picture frame, it is configured to U-shaped structure, and screw is additionally provided with thereon
601, clamping device is fixed on picture frame；
It is arranged on clamping device, with the supporting mechanism 61 coordinated with line source；
Wherein, the free end of the connector arranges angled rotating mechanism 62, is provided with the line source and angle
The connector (not shown) that rotating mechanism is engaged, with by angle rotating mechanism by the emergent light of line source adjust to optics
The surface of element is opposing parallel.Light source is caused to be located at the both sides of optical element by clamping device using this scheme, it is symmetrical to shine
Penetrate on element surface, be the effect for realizing preferably illumination, it will be set to adjust on demand between line source and supporting mechanism
The mode of angle so that its adapt to it is actual use needs, the irradiating angle for realizing light source is adjusted flexibly, with adaptability
It is good, can implementation result it is strong, the benefit of good stability.Also, this mode is a kind of explanation of preferred embodiments, but not
It is confined to this.When the present invention is implemented, adaptability replacement and/or modification can be carried out according to user's demand.
As shown in Figure 3-4, in another kind of embodiment, the supporting mechanism includes：
The fixed part 610 being engaged with clamping device；
And be set in fixed part, and the supporting part 611 that can be stretched along the length direction of fixed part, it causes line source
With the height-adjustable on the surface of optical element, to make it have more preferable illuminating effect；
Wherein, the supporting part is provided with groove 612 near fixed one end, and the other end is provided with and angle rotating mechanism
The U-lag 613 being engaged, is provided with the fixed part and is engaged with groove, to adjust the first tune of supporting part collapsing length
Knothole 614；
The angle rotating mechanism includes：
The one T-shaped connecting portion 620 being engaged with connector；
One is arranged on T-shaped connecting portion one end, with the flat fixed part 621 being engaged with U-lag；
Wherein, at least one is provided with the supporting part, with the second regulation being adjusted to line source deflection angle
Hole 615.A kind of specific embodiment of the line source clamping device needed for dark-field imaging is provided using this scheme, with to precision
Optical element provides lighting source, is easy to detecting element surface particles thing to pollute, and light source is located at the both sides of optical element, using flat
Row polishing mode, symmetrical illumination element surface realizes dark-field imaging in vision system, by angle rotating mechanism and the machine of support
The cooperation of structure, realizes being adjusted flexibly for line source irradiating angle and height, with the effect that 2 frees degree adjustment are carried out to line source
Really, so as to adapt to different use environments, optimal illuminating effect is reached, to reach optimal dark-field imaging effect, with suitable
Answering property is good, good stability, can strong, the workable benefit of implementation result.Also, this mode is a kind of preferable reality
The explanation of example, but be not limited thereto.Implement the present invention when, can according to user's demand carry out adaptability replacement and/or
Modification.
As shown in Figure 1-2, in another kind of embodiment, it is provided with the casing and is engaged with optical micro imaging device
Installation window 7；
The installation window includes that one stretches into the observation lens barrel 70 of box house, and be arranged on observe lens barrel one end with case
The bending part 71 that body is connected, its be used for will observation lens barrel transverse plane be arranged on the surface of optical element it is parallel；
Wherein, camera lens one end of the optical micro imaging device stretches to observation lens barrel, and the other end passes through a fixed plate 8
And then be connected with the lateral wall of casing；
Observation lens barrel, the camera lens be configured to towards the transverse plane of optical element one end it is parallel with optical element surface,
So that the cylinder axle of observation lens barrel and camera lens is vertical with optical element surface.The upper right side of normal conditions lower box carries observation window
Mouthful, and the white glass on existing window and element surface angle at 45 °, it is unfavorable for the imaging of imaging system, using this scheme
Installation window carry out transforming to monitoring window so that the window glass at observation lens barrel end is parallel with optical element surface, and
, to adapt to the operating distance of zoom lens, can have by changing the distance between monitoring window glass and element surface
Can implementation result it is good, workable, it is easy to implement, good stability, the reliable benefit of accuracy of detection.Also, this side
Formula is a kind of explanation of preferred embodiments, but is not limited thereto.When the present invention is implemented, can be carried out according to user's demand
Adaptability is replaced and/or changed.
In another kind of embodiment, also include：The optical micro imaging device is led to by a control box 9 with host computer
Letter connection.The transmission and transfer transmission of signal is controlled by control box using this scheme, to mitigate the work of host computer
Amount, improve operating rate, with can implementation result it is good, workable, good stability, the benefit of efficiency high.Also, this
The mode of kind is a kind of explanation of preferred embodiments, but is not limited thereto.When the present invention is implemented, can be according to user's demand
Carry out adaptability replacement and/or modification.
Above scheme can also be realized by a kind of method of application detecting system, including：
Step one, regulation is corrected using host computer to the inner parameter of optical micro imaging device, corresponding to obtain
Distortion parameter, CCD is collected and understand after image some deviations, is such as inclined, situations such as lines continuation degree is inadequate, therefore need to be done distortion and be rectified
Just process, and because the optical axis of CCD is vertically installed in optical element surface, therefore the external parameter of camera is fixed, and is only needed here
Distortion parameter in intrinsic parameter is set, picture is done at correction when image procossing and the work for measuring are done in order to after
Reason；
Step 2, host computer by the on-gauge plate with different size particle, to the pixel of particle image in on-gauge plate with
Particle actual size relation is modeled, to obtain pattern function therebetween；
Step 3, by the inspection software in host computer, is adjusted poly- to the enlargement ratio of optical micro imaging device
Jiao, to obtain clearly optical element surface particulate matter gray scale picture to be measured by optical micro imaging device, and preserves supreme
Position machine, detecting system uses the camera lens of big zoom ratio, can be under minimum multiplying power, it was observed that in optical element clear aperature comprehensively
Long-pending image, measures the information such as whole numbers of particles and Density Distribution of optical element surface, while specific region can be focused on
Particle, detect the size statistic rule of the particle in the region；
Step 4, the inspection software imports the gray scale picture for preserving, and line distortion is entered to picture by the distortion parameter
Correction, then by pattern function computing to obtain the actual size of a certain particulate matter of optical element surface to be measured, it is corresponding to obtain
The parameter information related with regard to particle length, width, area, girth.Using the step three in this scheme, light-metering is being treated
Before element surface particulate matter is detected, in addition it is also necessary to which each firmware in system carries out accommodation, its specific behaviour
Make mainly to include that step is as follows：
Step S31：Adjust mechanism 3 in light source support bar so that light source is slightly above optical element surface, adjust light source and support
Linkage 1 so that the emergent light of light source is slightly parallel in element surface.
Step S32：Install and adjust transformation window angle so that the glass collimating optics surface of transformation window, and
Transformation window cylinder axle is perpendicular to optical element surface.
Step S33：Installation microscopic imaging device is in transformation window.
Step S34：Light source is opened, line source controller is adjusted so that line source brightness is high and constant.
Step S35：Microscopic imaging device and control box are connected, the CCD in microscopic imaging device is used into netting twine and control
Host computer connection processed, control box is connected with control host computer using USB.Open control box, microscopic imaging device power supply.
And adopt and the concrete step that photometry element surface particulate matter is detected is treated by the inspection software in host computer
Suddenly include：
Step S36：Optical element surface particle detection system software is opened, accompanying drawing 4 is seen at interface, click on opening camera and press
Button, waits the display optics surface image of region 1 in interface, motor to start to initialize button.
Step S37：Into interface zone 8, setting enlargement ratio is 0.055x, clicks on the +/- button in focus control region, directly
To image than more visible, through focus button is clicked on, obtain clearly image, clicked on and preserve image button, be saved in computer
Hard disk.
Step S38：Click on and open picture buttons, open the picture of above-mentioned preservation, distortion correction button is clicked on, using above-mentioned
The correction of micro-vision imaging device intrinsic parameter obtains distortion parameter and distortion correction is carried out to image, and click automatically processes button, should
With above-mentioned element particle image pixel and the actual size of particle actual size relationship modeling gained model measurement element, obtain
As a result particle information is displayed in interface zone 7, sorts from big to small according to area, per bar record comprising length, width, area,
Girth.
This programme mainly can form details in a play not acted out on stage, but told through dialogues using optical element under the parallel input light irradiation of the symmetrical line source of low angle,
And adjust zoom lens to suitable enlargement ratio under, focus on, preserve the gray level image that high resolution CCD is captured, gray level image enters
Filtering (distortion correction) and dynamic local threshold process (model parameter) are crossed, bianry image is obtained and is easy to extract profile, for
The profile for arriving obtains minimum area boundary rectangle, finally gives the size of particle and the spatial distribution of particle and Size Distribution, enters
And realize treating the on-line checking of photometry element surface particulate matter by host computer, specifically, the system adopts on-gauge plate
Realizing the right metric to tested desirable particle size, (small volume is adapted to method of comparison will to be used for the homogeneity optical element demarcated
Micro- sem observation) it is placed in same detecting system that (now lighting condition is identical, IMAQ system with the optical element for using online
The operating distance of system is identical), the actual size of particle is measured using measuring microscope, calculate system acquisition image and extract wheel
Gained granular size after exterior feature, both contrast modeling F, and the impact of the noise brought due to complex background in image is too high to avoid
The model of exponent number may be absorbed in over-fitting (test error is larger) phenomenon, using regularization kernel method model of fit, obtain precision
Higher grain parameter information, realizes on-line checking, with can implementation result it is good, good stability, accuracy of detection degree, it is easy to implement
Benefit.Also, this mode is a kind of explanation of preferred embodiments, but is not limited thereto.When the present invention is implemented,
Adaptability replacement and/or modification can be carried out according to user's demand.
In another kind of embodiment, in step one, the distortion parameter is comprised the steps of：
Step S11：To be placed in detecting system with chequered with black and white trellis chessboard plane, chessboard is gathered after focus
Plane different angles image, in this programme using chequered with black and white trellis chessboard to carry out corrective lens as calibrating template abnormal
Become, it passes through to determine the conversion relation between physical size and pixel, and the three-dimensional geometry position for determining space object surface point
Put and its correlation in the picture between corresponding points, set up the geometrical model of camera imaging, shot with solid by camera
Determining deviation pattern array flat board, through the calculating of calibration algorithm, it can be deduced that the geometrical model of camera internal parameter, so as to obtain
High-precision measurement and reconstructed results；
Step S12：According to the image of gained different positions and pose chessboard plane, using plane camera parameter standardization camera is obtained
Internal reference exponential model, and then obtain corresponding distortion parameter, the acquisition of distortion parameter is to add and subtract one on the basis of internal reference exponential model
Individual penalty constant, simple and practical, traditional camera standardization needs to use the known demarcation thing of size, is sat by setting up to demarcate on thing
The known point of mark with it is corresponding between its picture point, the inside and outside parameter of camera model is obtained using certain algorithm, according to demarcation
The difference of thing can be divided into three-dimensional scaling thing and plane demarcates thing, and three-dimensional scaling thing can be demarcated by single image, demarcate essence
Degree is higher, but the processing and maintenance of high-accuracy three-dimensional scaling thing are more difficult, and plane demarcates thing and makes letter than three-dimensional scaling thing
Single, precision easily ensures；
In step 2, the pattern function is comprised the following steps：
S21：In the case of the operating distance identical of lighting condition and image capturing system, will be with typically different size
The on-gauge plate of particle is placed in detecting system, and with reference to the method for step 3 to step 4 the particle image of on-gauge plate is obtained；
S22：Using the method for local dynamic station binaryzation, to obtain the bianry image of on-gauge plate, and then extract profile to obtain
The pixel length and width of Typical particle on on-gauge plate, because light-source brightness is higher, cause cabinet wall to have projection on optical element,
And the background of complexity is constituted on the picture that CCD is formed, therefore using global threshold binarization method, wrong background and thing can be divided
Body, therefore the method for local dynamic station binaryzation used in this detecting system, with by extracting particle after image binaryzation process
The feature such as profile, physical dimension, gray scale and transformation space, further fitting is long with the pixel that particle actual size is closer to
It is wide；
S23：On-gauge plate with Typical particle is placed under measuring microscope, is measured on on-gauge plate using measuring microscope
The actual length and width of corresponding Typical particle；
S24：Contrast is carried out according to the actual length and width and pixel length and width relation of the same particle obtained in S23, S22 to build
Mould, obtains pattern function between the two, and its pattern function is simple, equivalent to being multiplied by a fixed coefficient, admittedly can implementation result
It is good.In the present invention distortion correction data flow as shown in figure 5, local dynamic station binaryzation flow chart of data processing as shown in fig. 6,
Using this scheme by carrying out to the picture for collecting after distortion correction, the pattern function in on-gauge plate carries out computing,
The grain parameter information higher to obtain precision, with can implementation result it is good, accuracy of detection is stable, the benefit of high precision.
Also, this mode is a kind of explanation of preferred embodiments, but is not limited thereto.When the present invention is implemented, can be according to making
User's demand carries out adaptability replacement and/or modification.
In another kind of embodiment, in step 3, the optical micro imaging device is vertical with optical element to be measured
Distance is configured to 430mm, and the enlargement ratio of zoom (zoom) camera lens is configured in the optical micro imaging device
0.055x-10.55x.Using vertical range of this scheme to microscopic imaging device and optical element to be measured, and enlargement ratio
Size be configured, stability more preferable benefit higher to make it have certainty of measurement.Also, this mode is
A kind of explanation of preferred embodiments, but be not limited thereto.When the present invention is implemented, adaptability can be carried out according to user's demand
Replace and/or change.
In another kind of embodiment, also include：
Step 5, the detecting system is counted by treating the parameter information of each particle of photometry element surface, is obtained
To the particle statistic information matched with optical element surface particle to be measured, it is used for the distribution of particles of real-time statistics element surface
Information, and preserve into host computer；
Wherein, the particle statistic information includes：The total number of optical element surface particle to be measured, and it is therein existing
Shape, point-like numbers of particles；
Wire, point-like numbers of particles statistics are respectively to (0-20 μm 20-50 μm 50-100 μm 100 μm of-∞) segment
Included in each numbers of particles and parameter information counted.Using this scheme by clicking on inspection software interface in
Grain statistics and save button, the particle statistic information for obtaining can be saved in Excel electrical forms, wherein showing that particle is total
Number, wherein present situation numbers of particles, point-like numbers of particles.Point-like and linear particle count respectively (0-20 μm of 20-50 μm of 50-
100 μm of 100 μm of-∞) numbers of particles that includes of each segment, and each particle length and width, girth, area, realize to optics unit
The all particle information statistical analyses of part, be beneficial to is carried out advantageously to it, more comprehensively cleaning, while can be to its work
Carry out real-time monitoring as state, with can implementation result it is good, the strong benefit of stability.Also, this mode is one kind
The explanation of preferred embodiments, but be not limited thereto.When the present invention is implemented, adaptability replacement can be carried out according to user's demand
And/or modification.
Optical element in the detecting system of the present invention is located at seal case bottom, and oblique 45 ° upwards, and transformation window is located at sealing
Casing top, just to mirror surface, micro-vision imaging device is arranged on transformation window interior to window, and imaging device is connected to
Control box and control host computer, microscopic imaging device includes zoom lens and high resolution CCD.
And apply the big multiplying power bottom surface section regions particulate Size Distribution of detecting system measurement of the present invention mainly to have following
Step：
Step S41：Adjust mechanism 3 in light source support bar so that light source is slightly above optical element surface, adjust light source and support
Linkage 1 so that the emergent light of light source is slightly parallel in element surface.
Step S42：Install and adjust transformation window angle so that the glass collimating optics surface of transformation window, and
Transformation window cylinder axle is perpendicular to optical element surface.
Step S43：Installation microscopic imaging device is in transformation window.
Step S44：Light source is opened, line source controller is adjusted so that line source brightness is high and constant.
Step S45：Microscopic imaging device and control box are connected, the CCD in microscopic imaging device is used into netting twine and control
Host computer connection processed, control box is connected with control host computer using USB.Open control box, microscopic imaging device power supply.
Step S46：Optical element surface particle detection system software is opened, accompanying drawing 4 is seen at interface, click on opening camera and press
Button, waits the display optics surface image of region 1 in interface, motor to start to initialize button.
Step S47：Into interface zone 8, setting enlargement ratio is 0.55x, clicks on the +/- button in focus control region, directly
To image than more visible, through focus button is clicked on, obtain clearly image, clicked on and preserve image button, be saved in computer
Hard disk.
Step S48：Click on and open picture buttons, open the picture of above-mentioned preservation, distortion correction button is clicked on, using above-mentioned
The correction of micro-vision imaging device intrinsic parameter obtains distortion parameter and distortion correction is carried out to image, and click automatically processes button, should
With above-mentioned element particle image pixel and the actual size of particle actual size relationship modeling gained model measurement element, obtain
As a result particle information is displayed in interface zone 7, sorts from big to small according to area, per bar record comprising length, width, area,
Girth.
Step S49：Particle statistic and save button are clicked on, the particle statistic information for obtaining Excel can be saved in electric
In sub-table, wherein showing total number of particles mesh, wherein present situation numbers of particles, point-like numbers of particles.Point-like and linear particle are distinguished
The numbers of particles that statistics (0-20 μm 20-50 μm 50-100 μm 100 μm of-∞) each segment is included, and each particle length and width,
Girth, area.
S41-S44 is the installation steps of symmetrical low angle light source in above-mentioned steps, and S46-S47 is the step of gathering image,
S48-S49 is the step of obtaining particle information using collection image.
Carrying out image concrete operations by software interface after the completion of S41-S47 steps mainly has following steps：
Step S51：Acquired image is opened, into software area 9, is clicked on and is shown histogram, pop-up window shows works as
The histogram of front image.
Step S52：Histogram equalization button is clicked on, the result after histogram equalization is obtained and is displayed in region 1. in interface
Step S53:Click on image and subtract button, pop-up dialogue box is selected and subtracted image, the knot that display image subtracts in region 1
Really.
Step S54：Into region 5, manual measurement is clicked on, then dragged in the left button of left area 1, choose the length to be measured
Degree.
Step S55:Click on and preserve local, drag in the left button of left area 1, rectangle frame chooses the regional area to be preserved.
Step S56:Click on to select and amplify, drag in the left button of left area 1, rectangle frame chooses the regional area to be shown.
System detects optical element surface particulate matter using dark-field imaging, the multiplication factor being imaged in systems be not it is constant, it is right
In different size of particulate matter, impact difference of the luminous effect to particle imaging size is scattered, non-linear relation is presented.
Number of devices described herein and treatment scale are the explanations for simplifying the present invention.Detection essence to the present invention
The technology of the on-line detecting system of close optical element surface particulate matter and its application, modifications and variations of application process to this area
It is obvious for personnel.
Although embodiment of the present invention is disclosed as above, it is not restricted to listed in specification and embodiment
With.It can be applied to completely various suitable the field of the invention.For those skilled in the art, can be easily
Realize other modification.Therefore under the universal limited without departing substantially from claim and equivalency range, the present invention is not limited
In specific details and shown here as the legend with description.
Claims (10)
1. it is a kind of detection precison optical component surface particles thing on-line detecting system, it is characterised in that include：
Casing, its top is provided with the light inlet for being available for laser to enter；
Box house is arranged on, and it is first with the optics that input path is reflected casing in 45 degree of angles with the input path of laser
Part；
Wherein, the picture frame edge top of the optical element is relatively set with, to carry out symmetrical polishing 2 to light element surface
Line source；
The casing side is provided with the optical micro imaging device of shooting angle and optical element perpendicular；
The imaging device is by communicating with the online inspection of the host computer and then realization of connection to optical element surface particulate matter
Survey.
2. the on-line detecting system of precison optical component surface particles thing is detected as claimed in claim 1, it is characterised in that bag
Include：Each line source is further connected by two clamp assemblies being removably oppositely arranged with optical element.
3. the on-line detecting system of precison optical component surface particles thing is detected as claimed in claim 2, it is characterised in that each
The clamp assemblies include：
The clamping device being engaged with optical element picture frame；
It is arranged on clamping device, with the supporting mechanism coordinated with line source；
Wherein, the free end of the connector arranges angled rotating mechanism, is provided with the line source and angle whirler
The connector that structure is engaged, the emergent light of line source is adjusted to relative with the surface of optical element by angle rotating mechanism
It is parallel.
4. the on-line detecting system of precison optical component surface particles thing is detected as claimed in claim 3, it is characterised in that institute
Stating supporting mechanism includes：
The fixed part being engaged with clamping device；
And be set in fixed part, and the supporting part that can be stretched along the length direction of fixed part；
Wherein, the supporting part is provided with groove near fixed one end, and the other end is provided with and is engaged with angle rotating mechanism
U-lag, be provided with the fixed part and be engaged with groove, to adjust the first adjustment hole of supporting part collapsing length；
The angle rotating mechanism includes：
The one T-shaped connecting portion being engaged with connector；
One is arranged on T-shaped connecting portion one end, with the flat fixed part being engaged with U-lag；
Wherein, at least one is provided with the supporting part, with the second adjustment hole being adjusted to line source deflection angle.
5. the on-line detecting system of precison optical component surface particles thing is detected as claimed in claim 1, it is characterised in that institute
State and the installation window being engaged with optical micro imaging device is provided with casing；
The installation window stretches into the observation lens barrel of box house including one, and is arranged on observation lens barrel one end to coordinate with casing
The bending part of connection；
Wherein, camera lens one end of the optical micro imaging device stretches to observation lens barrel, and the other end passes through a fixed plate further
It is connected with the lateral wall of casing；
Observation lens barrel, the camera lens be configured to towards the transverse plane of optical element one end it is parallel with optical element surface so that
The cylinder axle of observation lens barrel and camera lens is vertical with optical element surface.
6. the on-line detecting system of precison optical component surface particles thing is detected as claimed in claim 1, it is characterised in that also
Including：The optical micro imaging device is communicated to connect by a control box and host computer.
7. it is a kind of application as described in any one of claim 1-6 detecting system method, it is characterised in that include：
Step one, regulation is corrected using host computer to the inner parameter of optical micro imaging device, accordingly to be distorted
Parameter；
Step 2, host computer is by the on-gauge plate with different size particle, the pixel and particle to particle image in on-gauge plate
Actual size relation is modeled, to obtain pattern function therebetween；
Step 3, by the inspection software in host computer, to the enlargement ratio of optical micro imaging device focusing is adjusted, with
Clearly optical element surface particulate matter gray scale picture to be measured is obtained by optical micro imaging device, and is preserved to host computer；
Step 4, the inspection software imports the gray scale picture for preserving, and distortion correction is carried out to picture by the distortion parameter,
Again by pattern function computing to obtain the actual size of a certain particulate matter of optical element surface to be measured, with obtain it is corresponding with regard to
The related parameter information of particle length, width, area, girth.
8. application process as claimed in claim 7, it is characterised in that in step one, the distortion parameter is included
Following steps：
Step S11：To be placed in detecting system with chequered with black and white trellis chessboard plane, chessboard plane is gathered after focus
In the image of different angles；
Step S12：According to the image of gained different positions and pose chessboard plane, obtained in camera using plane camera parameter standardization
Parameter model, and then obtain corresponding distortion parameter；
In step 2, the pattern function is comprised the following steps：
S21：In the case of the operating distance identical of lighting condition and image capturing system, will be with typically different sized particles
On-gauge plate be placed in detecting system, obtain the particle image of on-gauge plate with reference to the method for step 3 to step 4；
S22：Using the method for local dynamic station binaryzation, to obtain the bianry image of on-gauge plate, and then extract profile to obtain standard
The pixel length and width of Typical particle on plate；
S23：On-gauge plate with Typical particle is placed under measuring microscope, using measuring microscope correspondence on on-gauge plate is measured
Typical particle actual length and width；
S24：Contrast modeling is carried out according to the actual length and width and pixel length and width relation of the same particle obtained in S23, S22, is obtained
Arrive pattern function between the two.
9. application process as claimed in claim 7, it is characterised in that in step 3, the optical micro imaging device with
The vertical range of optical element to be measured is configured to 430mm, the enlargement ratio of zoom camera lens in the optical micro imaging device
It is configured to 0.055x-10.55x.
10. application process as claimed in claim 7, it is characterised in that also include：
Step 5, the detecting system is counted by treating the parameter information of each particle of photometry element surface, obtain with
The particle statistic information that optical element surface particle to be measured matches, and preserve into host computer；
Wherein, the particle statistic information includes：The total number of optical element surface particle to be measured, and present situation therein, point
Shape numbers of particles；
Wire, point-like numbers of particles statistics are respectively to institute in (0-20 μm 20-50 μm 50-100 μm 100 μm of-∞) segment
Comprising each numbers of particles and parameter information counted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611233039.3A CN106645197B (en) | 2016-12-29 | 2016-12-29 | Online detection system for detecting particles on surface of precision optical element and application method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611233039.3A CN106645197B (en) | 2016-12-29 | 2016-12-29 | Online detection system for detecting particles on surface of precision optical element and application method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106645197A true CN106645197A (en) | 2017-05-10 |
| CN106645197B CN106645197B (en) | 2024-01-30 |
Family
ID=58832557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611233039.3A Active CN106645197B (en) | 2016-12-29 | 2016-12-29 | Online detection system for detecting particles on surface of precision optical element and application method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106645197B (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107764705A (en) * | 2017-09-28 | 2018-03-06 | 珠海格力电器股份有限公司 | The detection method of water purifier and its cleannes, device and system |
| CN108648185A (en) * | 2018-05-11 | 2018-10-12 | 机械工业第四设计研究院有限公司 | A kind of method of cleaning equipment particulate matter cleaning efficiency before on-line checking application |
| CN108956095A (en) * | 2018-05-17 | 2018-12-07 | 北京风云天地信息科技有限公司 | A kind of optical lens pollution level measurement method and device |
| CN109087290A (en) * | 2018-07-24 | 2018-12-25 | 中国科学院上海光学精密机械研究所 | Optical element surface flaw inspection method based on spectral estimation Yu electronics light splitting technology |
| CN109092730A (en) * | 2018-10-24 | 2018-12-28 | 中国工程物理研究院激光聚变研究中心 | Device and method for optical element online clean surface monitoring and processing |
| CN110426400A (en) * | 2019-07-18 | 2019-11-08 | 成都新西旺自动化科技有限公司 | For touch screen can operating space automatic polisher and its automatic method for polishing |
| CN112611741A (en) * | 2020-12-07 | 2021-04-06 | 中国工程物理研究院激光聚变研究中心 | Device and method for detecting fluorescent characteristic particles on surface of optical element |
| CN112639438A (en) * | 2018-06-21 | 2021-04-09 | 通快光电器件有限公司 | Laser sensor module indicating readiness for use |
| CN113189005A (en) * | 2021-05-10 | 2021-07-30 | 郑州大学 | Portable surface defect integrated detection device and surface defect automatic detection method |
| CN113917491A (en) * | 2021-09-29 | 2022-01-11 | 山东师范大学 | Integrated atmospheric aerosol detection system and method based on CCD laser radar |
Citations (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4377340A (en) * | 1980-10-24 | 1983-03-22 | Hamamatsu Systems, Inc. | Method and apparatus for detecting particles on a material |
| US20020159052A1 (en) * | 2001-03-22 | 2002-10-31 | Alex Klooster | Holographic scatterometer for detection and analysis of wafer surface deposits |
| JP2003007681A (en) * | 2001-06-25 | 2003-01-10 | Hitachi Ltd | Method and apparatus for detecting floating foreign object in plasma treatment apparatus, and treatment apparatus of semiconductor device |
| WO2004031754A1 (en) * | 2002-09-30 | 2004-04-15 | Applied Materials Israel, Ltd. | Dark field inspection system |
| US6879391B1 (en) * | 1999-05-26 | 2005-04-12 | Kla-Tencor Technologies | Particle detection method and apparatus |
| US20050162642A1 (en) * | 2004-01-28 | 2005-07-28 | Kabushiki Kaisha Topcon | Lens meter |
| WO2006046236A1 (en) * | 2004-10-26 | 2006-05-04 | May High-Tech Solutions, Ltd. | Method and apparatus for residue detection on a polished wafer |
| KR20110000583A (en) * | 2008-05-22 | 2011-01-03 | 도꾸리쯔교세이호진상교기쥬쯔소고겡뀨죠 | Method for inspecting defects, and defect inspecting apparatus |
| CN102243365A (en) * | 2011-07-11 | 2011-11-16 | 中国科学院西安光学精密机械研究所 | Turning optical imaging system |
| CN102507596A (en) * | 2011-11-18 | 2012-06-20 | 中国工程物理研究院激光聚变研究中心 | Optical element surface defect detecting system based on active laser beam scanning |
| CN202330294U (en) * | 2011-11-08 | 2012-07-11 | 中国科学院深圳先进技术研究院 | Surface defect detection device based on machine vision |
| CN102661956A (en) * | 2012-04-24 | 2012-09-12 | 浙江大学 | Super-smooth surface defect detection system and distortion correction method thereof |
| CN103245303A (en) * | 2013-05-17 | 2013-08-14 | 中国工程物理研究院激光聚变研究中心 | Multi-pose large-caliber plane optical element surface shape detecting device and method |
| CN103472577A (en) * | 2013-09-29 | 2013-12-25 | 吴江市晴亿纺织有限公司 | Clamping type glasses magnifying glass |
| CN204142654U (en) * | 2014-08-28 | 2015-02-04 | 福建省万达汽车玻璃工业有限公司 | Verifying attachment before a kind of car coated glass plated film |
| CN105181601A (en) * | 2015-09-02 | 2015-12-23 | 哈尔滨工业大学 | Fine-tunable microscopic detection apparatus for large-aperture curved surface optical element micro-defect restoration |
| CN105203503A (en) * | 2015-09-16 | 2015-12-30 | 同济大学 | Surface detection method for super-smooth optical substrate for high-power laser thin film element |
| CN105247342A (en) * | 2013-02-28 | 2016-01-13 | 尼尔·M·戴 | Method and apparatus for particle size determination |
| CN105928949A (en) * | 2016-04-18 | 2016-09-07 | 中国科学院自动化研究所 | Device and method for online monitoring particles on surface of optical elements |
| CN106124172A (en) * | 2016-08-16 | 2016-11-16 | 台州市质量技术监督检测研究院 | Vehicle lamp light distribution performance device for fast detecting and method |
| CN206362529U (en) * | 2016-12-29 | 2017-07-28 | 中国工程物理研究院激光聚变研究中心 | Detect the on-line detecting system of precison optical component surface particles thing |
-
2016
- 2016-12-29 CN CN201611233039.3A patent/CN106645197B/en active Active
Patent Citations (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4377340A (en) * | 1980-10-24 | 1983-03-22 | Hamamatsu Systems, Inc. | Method and apparatus for detecting particles on a material |
| US6879391B1 (en) * | 1999-05-26 | 2005-04-12 | Kla-Tencor Technologies | Particle detection method and apparatus |
| US20020159052A1 (en) * | 2001-03-22 | 2002-10-31 | Alex Klooster | Holographic scatterometer for detection and analysis of wafer surface deposits |
| JP2003007681A (en) * | 2001-06-25 | 2003-01-10 | Hitachi Ltd | Method and apparatus for detecting floating foreign object in plasma treatment apparatus, and treatment apparatus of semiconductor device |
| WO2004031754A1 (en) * | 2002-09-30 | 2004-04-15 | Applied Materials Israel, Ltd. | Dark field inspection system |
| US20050162642A1 (en) * | 2004-01-28 | 2005-07-28 | Kabushiki Kaisha Topcon | Lens meter |
| WO2006046236A1 (en) * | 2004-10-26 | 2006-05-04 | May High-Tech Solutions, Ltd. | Method and apparatus for residue detection on a polished wafer |
| KR20110000583A (en) * | 2008-05-22 | 2011-01-03 | 도꾸리쯔교세이호진상교기쥬쯔소고겡뀨죠 | Method for inspecting defects, and defect inspecting apparatus |
| CN102243365A (en) * | 2011-07-11 | 2011-11-16 | 中国科学院西安光学精密机械研究所 | Turning optical imaging system |
| CN202330294U (en) * | 2011-11-08 | 2012-07-11 | 中国科学院深圳先进技术研究院 | Surface defect detection device based on machine vision |
| CN102507596A (en) * | 2011-11-18 | 2012-06-20 | 中国工程物理研究院激光聚变研究中心 | Optical element surface defect detecting system based on active laser beam scanning |
| CN102661956A (en) * | 2012-04-24 | 2012-09-12 | 浙江大学 | Super-smooth surface defect detection system and distortion correction method thereof |
| CN105247342A (en) * | 2013-02-28 | 2016-01-13 | 尼尔·M·戴 | Method and apparatus for particle size determination |
| CN103245303A (en) * | 2013-05-17 | 2013-08-14 | 中国工程物理研究院激光聚变研究中心 | Multi-pose large-caliber plane optical element surface shape detecting device and method |
| CN103472577A (en) * | 2013-09-29 | 2013-12-25 | 吴江市晴亿纺织有限公司 | Clamping type glasses magnifying glass |
| CN204142654U (en) * | 2014-08-28 | 2015-02-04 | 福建省万达汽车玻璃工业有限公司 | Verifying attachment before a kind of car coated glass plated film |
| CN105181601A (en) * | 2015-09-02 | 2015-12-23 | 哈尔滨工业大学 | Fine-tunable microscopic detection apparatus for large-aperture curved surface optical element micro-defect restoration |
| CN105203503A (en) * | 2015-09-16 | 2015-12-30 | 同济大学 | Surface detection method for super-smooth optical substrate for high-power laser thin film element |
| CN105928949A (en) * | 2016-04-18 | 2016-09-07 | 中国科学院自动化研究所 | Device and method for online monitoring particles on surface of optical elements |
| CN106124172A (en) * | 2016-08-16 | 2016-11-16 | 台州市质量技术监督检测研究院 | Vehicle lamp light distribution performance device for fast detecting and method |
| CN206362529U (en) * | 2016-12-29 | 2017-07-28 | 中国工程物理研究院激光聚变研究中心 | Detect the on-line detecting system of precison optical component surface particles thing |
Non-Patent Citations (7)
| Title |
|---|
| DARJI R，等: "Scattering corrections in small particle imaging", MICRON, vol. 28, no. 2, pages 95 - 100, XP025865911, DOI: 10.1016/S0968-4328(96)00053-4 * |
| 杨甬英;陆春华;梁蛟;刘东;杨李茗;李瑞洁;: "光学元件表面缺陷的显微散射暗场成像及数字化评价系统", 光学学报, no. 06, pages 1031 - 1038 * |
| 王世通: "精密表面缺陷检测散射成像理论建模及系统分析研究", 万方学位论文, pages 1 - 123 * |
| 王玉增: "颗粒显微图象二值化方法研究", 济南大学学报, no. 2, pages 155 - 156 * |
| 王科: "光学元件表面疵病散射法检测技术研究", 中国优秀硕士学位论文电子期刊工程科技Ⅱ辑, no. 04, pages 1 - 77 * |
| 程晓锋;徐旭;张林;贺群;袁晓东;蒋晓东;郑万国;: "基于高分辨力CCD的大口径光学元件疵病检测", 强激光与粒子束, no. 11, pages 1677 - 1680 * |
| 苗心向，等: "激光装置污染物诱导光学元件表面损伤实验研究", 中国激光, vol. 42, no. 06, pages 9 - 15 * |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107764705B (en) * | 2017-09-28 | 2020-06-16 | 珠海格力电器股份有限公司 | Water purifier and cleanliness detection method, device and system thereof |
| CN107764705A (en) * | 2017-09-28 | 2018-03-06 | 珠海格力电器股份有限公司 | The detection method of water purifier and its cleannes, device and system |
| CN108648185A (en) * | 2018-05-11 | 2018-10-12 | 机械工业第四设计研究院有限公司 | A kind of method of cleaning equipment particulate matter cleaning efficiency before on-line checking application |
| CN108648185B (en) * | 2018-05-11 | 2022-04-15 | 机械工业第四设计研究院有限公司 | Method for online detection of cleaning efficiency of particles of cleaning equipment before coating |
| CN108956095A (en) * | 2018-05-17 | 2018-12-07 | 北京风云天地信息科技有限公司 | A kind of optical lens pollution level measurement method and device |
| CN112639438A (en) * | 2018-06-21 | 2021-04-09 | 通快光电器件有限公司 | Laser sensor module indicating readiness for use |
| CN109087290B (en) * | 2018-07-24 | 2022-03-08 | 中国科学院上海光学精密机械研究所 | Optical element surface defect detection method based on spectral estimation and electronic beam splitting technology |
| CN109087290A (en) * | 2018-07-24 | 2018-12-25 | 中国科学院上海光学精密机械研究所 | Optical element surface flaw inspection method based on spectral estimation Yu electronics light splitting technology |
| CN109092730A (en) * | 2018-10-24 | 2018-12-28 | 中国工程物理研究院激光聚变研究中心 | Device and method for optical element online clean surface monitoring and processing |
| CN109092730B (en) * | 2018-10-24 | 2023-10-20 | 中国工程物理研究院激光聚变研究中心 | Device and method for on-line surface cleaning monitoring and treatment of optical element |
| CN110426400A (en) * | 2019-07-18 | 2019-11-08 | 成都新西旺自动化科技有限公司 | For touch screen can operating space automatic polisher and its automatic method for polishing |
| CN112611741A (en) * | 2020-12-07 | 2021-04-06 | 中国工程物理研究院激光聚变研究中心 | Device and method for detecting fluorescent characteristic particles on surface of optical element |
| CN113189005A (en) * | 2021-05-10 | 2021-07-30 | 郑州大学 | Portable surface defect integrated detection device and surface defect automatic detection method |
| CN113189005B (en) * | 2021-05-10 | 2022-06-28 | 郑州大学 | Portable surface defect integrated detection device and surface defect automatic detection method |
| CN113917491A (en) * | 2021-09-29 | 2022-01-11 | 山东师范大学 | Integrated atmospheric aerosol detection system and method based on CCD laser radar |
| CN113917491B (en) * | 2021-09-29 | 2024-06-07 | 山东师范大学 | Integrated atmospheric aerosol detection system and method based on CCD laser radar |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106645197B (en) | 2024-01-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106645197A (en) | Online detection system for detecting particles on surface of precise optical element and application method | |
| CN101655614B (en) | Method and device for detecting cloud pattern defects of liquid crystal display panel | |
| US7639862B2 (en) | Method and apparatus for quantifying pigment dispersion quality by paint drawdown | |
| JP7339643B2 (en) | Systems and methods for testing the refractive power and thickness of ophthalmic lenses immersed in solutions | |
| CN110411346B (en) | Method for quickly positioning surface micro-defects of aspheric fused quartz element | |
| CN109856156A (en) | A kind of display panel tiny flaw determination method and device based on AOI | |
| CN105021628A (en) | Detection method for surface defects of optical fiber image inverter | |
| CN102636496B (en) | Defect width calibration standardizing method in optical surface defect dark field detection | |
| JP2001519890A (en) | Techniques for detecting three-dimensional defect locations in transparent structures | |
| CN107664644A (en) | A kind of apparent automatic detection device of object based on machine vision and method | |
| CN108287165A (en) | Defect inspection method and defect inspection system | |
| CN201141839Y (en) | Device for detecting tiny bearing surface defect by computer vision technology | |
| CN110108715A (en) | A kind of defect inspection method of Plane-parallel Transparent Materiel | |
| CN112881424A (en) | AI + fluorescence permeation small-sized pipe surface defect detection and quality grading method and system | |
| CN110260945B (en) | Total reflection type gas-liquid interface flow display method and gas-liquid interface position identification method | |
| CN117576093B (en) | EL image-based solar cell piece hidden crack detection method | |
| CN111458345A (en) | Visual detection mechanism for defects of mask | |
| CN206362529U (en) | Detect the on-line detecting system of precison optical component surface particles thing | |
| CN112504240B (en) | Laser demarcation device calibration system and calibration method | |
| KR20190029765A (en) | Optical measurement of step size and plated metal thickness | |
| CN110412056A (en) | A kind of vehicle-mounted glass molds group automatic optical detection method and device | |
| CN110579184A (en) | Product appearance online detection device and use method thereof | |
| US10168524B2 (en) | Optical measurement of bump hieght | |
| CN113758939B (en) | Method for representing metal surface cleanliness by using metal surface reflection and scattering spectrum | |
| CN209264595U (en) | Illuminating source structure and column workpiece detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |