CN105928949A - Device and method for online monitoring particles on surface of optical elements - Google Patents
Device and method for online monitoring particles on surface of optical elements Download PDFInfo
- Publication number
- CN105928949A CN105928949A CN201610238030.5A CN201610238030A CN105928949A CN 105928949 A CN105928949 A CN 105928949A CN 201610238030 A CN201610238030 A CN 201610238030A CN 105928949 A CN105928949 A CN 105928949A
- Authority
- CN
- China
- Prior art keywords
- zoom
- motor
- fixed
- imaging system
- dark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 62
- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000012544 monitoring process Methods 0.000 title claims abstract description 18
- 239000002245 particle Substances 0.000 title claims abstract description 7
- 238000003384 imaging method Methods 0.000 claims abstract description 63
- 238000006073 displacement reaction Methods 0.000 claims abstract description 26
- 238000005286 illumination Methods 0.000 claims abstract description 25
- 230000004888 barrier function Effects 0.000 claims description 30
- 230000005693 optoelectronics Effects 0.000 claims description 29
- 239000013618 particulate matter Substances 0.000 claims description 27
- 230000000007 visual effect Effects 0.000 claims description 6
- 230000004069 differentiation Effects 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims 1
- 239000003344 environmental pollutant Substances 0.000 abstract description 5
- 231100000719 pollutant Toxicity 0.000 abstract description 5
- 238000005070 sampling Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 210000003464 cuspid Anatomy 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Studio Devices (AREA)
Abstract
The invention discloses a device and method for online monitoring particles on the surface of optical elements. The device comprises optical reflectors (3,9), a fixing rack (4), a dark field imaging system (5), an optical reflector case (6), two dark field illumination sources (7), a bright field imaging system (8), and a linear displacement platform (12); wherein two optical reflectors (3,9) and the fixing rack (4) are arranged on the optical reflector case (6); the dark field imaging system (5), the bright field imaging system (8), and the linear displacement platform (12) are arranged on the fixing rack (4), the linear displacement platform (12) drives the bright field imaging system (8) to move; and two dark field illumination sources (7) are arranged on two sides of the optical reflector (9). The provided device and method can monitor the pollutants on the surface of optical elements under different resolutions.
Description
Technical field
The present embodiments relate to optical element surface cleaning monitoring technical field, be specifically related to one
Plant optical element surface particulate matter on-Line Monitor Device and the method for on-line monitoring thereof.
Background technology
There are some pieces of speculums in high energy laser running gear, the running route of laser leads to
Cross the reflection of mirror body and change.If there is particulate pollutant in mirror surface, high energy laser
Mirror surface will be caused damage.Therefore, steady in order to ensure high energy laser running gear
Fixed operation, needs a kind of monitoring system of development badly, for the clean state of monitoring minute surface.
In view of this, the special proposition present invention.
Summary of the invention
The main purpose of the embodiment of the present invention is to provide a kind of optical element surface particulate matter to exist
Line monitoring device, it solves at least in part as how different resolution monitors optical element table
The technical problem of surface pollution thing.Supervise online additionally, also provide for a kind of optical element surface particulate matter
The method surveyed.
To achieve these goals, according to an aspect of the invention, it is provided techniques below side
Case:
A kind of optical element surface particulate matter on-Line Monitor Device, described device includes:
Optical mirror (3,9), fixed mount (4), dark-field imaging system (5), optics are anti-
Penetrate mirrored cabinet body (6), two dark-ground illumination light sources (7), light field imaging system (8), linear displacement
Platform (12)；Wherein, described optical mirror (3,9) and described fixed mount (4) are arranged on
On described optical mirror casing (6)；Described dark-field imaging system (5), described light field become
As system (8) and described linear displacement platform (12) are arranged on described fixed mount (4), institute
Stating linear displacement platform (12) drives described light field imaging system (8) to move；Described two details in a play not acted out on stage, but told through dialogues are shone
Source, Mingguang City (7) is separately positioned on the both sides of described optical mirror (9).
To achieve these goals, according to another aspect of the present invention, additionally provide on a kind of utilization
Stating the method that device carries out optical element surface particulate matter on-line monitoring, described method includes:
Adjust the angles and positions of described dark-ground illumination light source so that described dark-ground illumination light source
Homogenizer skim over described optical mirror upper surface；
Control lens barrier described in described baffle plate folding driven by motor to rotate, when described lens barrier
When moving to described right optoelectronic switch front, described baffle plate folding motor stop motion, open institute
State lens barrier；
By nibbling of the little gear of zoom described in described zoom driven by motor and described zoom gear wheel
Close, and control described focus motor and the motion of described focusing gear according to the readability of image；
Close described dark-ground illumination light source, described zoom camera lens is adjusted to minimum multiplying power, control
Described lens barrier is moved to the dead ahead of described zoom camera lens by described baffle plate folding motor；
Optical standard is broken up in the visual field that plate is placed on described light field imaging system, adjust described
Line focus axle is to be focused youngster black and white line on described optical standard differentiation plate；
By described linear displacement platform, the particulate matter of described mirror surface is adjusted to being stated clearly
In the visual field of imaging system, and by described line focus axle by described mirror surface
Grain thing is adjusted in the depth of field face of described microlens, carries out on-line monitoring.
Compared with prior art, technique scheme at least has the advantages that
The embodiment of the present invention is according to the principle of light/dark field imaging and feature, in mirrored side pair
Claim to arrange two lines lighting source, and the automatic focusing and focusing operation by zoom camera lens is real
Now with the purpose of different resolution monitoring mirror surface particulate matter；Then light field imaging system is utilized
System carries out sampling calibration to the particulate pollutant extracted in darkfield image, accurately determines that particle is dirty
The size of dye thing.The present invention can the clean state of on-line monitoring optical element surface, it is ensured that high energy
The stable operation of amount laser running gear, it is achieved that monitor optical element surface with different resolution
The technique effect of pollutant.
Certainly, the arbitrary product implementing the present invention is not necessarily required to realize above-described institute simultaneously
There is advantage.
Other features and advantages of the present invention will illustrate in the following description, and, part
Ground becomes apparent from specification, or understands by implementing the present invention.The present invention's
Purpose and further advantage can be special by institute in the specification write, claims and accompanying drawing
The method do not pointed out realizes and obtains.
Accompanying drawing explanation
Accompanying drawing, as the part of the present invention, is used for providing further understanding of the invention,
The schematic description and description of the present invention is used for explaining the present invention, but does not constitute the present invention
Improper restriction.Obviously, the accompanying drawing in describing below is only some embodiments, for ability
For the those of ordinary skill of territory, on the premise of not paying creative work, it is also possible to according to this
A little accompanying drawings obtain other accompanying drawings.In the accompanying drawings:
Fig. 1 is according to the optical element surface particulate matter on-line monitoring shown in an exemplary embodiment
The structural representation of device；
Fig. 2 is the structural representation according to the dark-field imaging system shown in another exemplary embodiment；
Fig. 3 is the structural representation according to the light field imaging system shown in an exemplary embodiment；
Fig. 4 be according to shown in an exemplary embodiment to carry out optical element surface particulate matter online
The schematic flow sheet of the method for monitoring.
These accompanying drawings and word describe and are not intended as limiting by any way the design model of the present invention
Enclose, but be that those skilled in the art illustrate idea of the invention by reference specific embodiment.
Detailed description of the invention
Below in conjunction with the accompanying drawings and the embodiment of the present invention is solved the technical problem that by specific embodiment,
The technical scheme used and the technique effect of realization carry out clear, complete description.Obviously,
Described embodiment is only a part of embodiment of the application, is not whole embodiments.
Based on the embodiment in the application, those of ordinary skill in the art are not paying creative work
Under premise, other equivalents all obtained or the embodiment of obvious modification all fall within the guarantor of the present invention
In the range of protecting.
It should be noted that in the following description, understand for convenience, give many tools
Body details.However, it will be apparent that the realization of the present invention can not have these details.
It should be noted that in the case of the most clearly limiting or do not conflict, in the present invention
Each embodiment and technical characteristic therein can be mutually combined and form technical scheme.
Fig. 1 schematically illustrates the structure of optical element surface particulate matter on-Line Monitor Device
And working environment.Fig. 2 schematically illustrates the structure of dark-field imaging system.Fig. 3 is exemplary
Show the structure of light field imaging system.As Figure 1-3, the embodiment of the present invention provides
Optical element surface particulate matter on-Line Monitor Device includes optical mirror 3,9, fixed mount 4,
Dark-field imaging system 5, optical mirror casing 6, two dark-ground illumination light source 7, light field imaging
System 8, linear displacement platform 12.Wherein, optical mirror 3,9 are fixed on speculum casing
On 6.Fixed mount 4 is arranged on optical mirror casing 6.Dark-field imaging system 5, light field
Imaging system 8 and linear displacement platform 12 are arranged on fixed mount 4, and linear displacement platform 12 drives
Light field imaging system 8 is moved.Two dark-ground illumination light sources 7 are arranged on the two of optical mirror 9
Side.
In the above-described embodiments, optical mirror casing 6 is fixed on ground by four foundation bolts
On face.
Preferably, the angle of optical mirror 3,9 and horizontal plane is 45 degree.
Preferably, fixed mount 4 is fixed on the truss of speculum casing 6.
Preferably, dark-field imaging system 5 is fixed on fixed mount 4 by installing hole 10,11.
Preferably, dark-ground illumination light source 7 is symmetrically arranged at the both sides of optical mirror 9, shines
Penetrate the particulate matter on optical mirror 9 surface, be consequently formed dark field illumination system；Dark-ground illumination light
Source is preferably Linear lighting illuminating source.
In a preferred embodiment, speculum casing 6 can be provided with square opening.Incident
Laser beam 1 enters along the square opening on optical mirror casing 6, through optical mirror 9,
After two secondary reflections of 3, shoot laser bundle 2 penetrates along the square opening on speculum casing 6.
On the basis of above-described embodiment, dark-field imaging system 5 may include that details in a play not acted out on stage, but told through dialogues camera
13, left fixing bar 14, camera fixed plate 15, zoom motor 16, left support arm 17, Zuo Guang
Electric switch 18, left optoelectronic switch seat 19, focusing gear wheel 20, motor fixing frame 21, zoom
Little gear 22, zoom gear wheel 23, catch 24,26, zoom camera lens 25, lens barrier
27, locking nut 28, baffle plate rotary shaft 29, right optoelectronic switch 30, focus motor 31, the right side
Optoelectronic switch seat 32, focus on little gear 33, baffle plate folding motor 34, right support arm 35, right
Fixing bar 36.Wherein, details in a play not acted out on stage, but told through dialogues motor 13 is fixed in camera fixed plate 15.Camera is fixed
Plate 15 is fixed bar 36 by left fixing bar 14 with the right side and is connected with fixed mount 4.Motor fixing frame
21 are connected with left support arm 17 and right support arm 35.Zoom camera lens 25 and details in a play not acted out on stage, but told through dialogues motor 13
It is connected.Zoom motor 16 is fixed on motor fixing frame 21.The little gear of zoom 22 and zoom
Motor 16 is connected.Zoom gear wheel 23 is fixed on zoom camera lens 25.By zoom motor
16 drive the little gear of zoom 22 to rotate, and the little gear of zoom 22 and zoom gear wheel 23 engage.
Focus motor 31 is fixed on motor fixing frame 21.Focus on little gear 33 and zoom motor 31
It is connected.Focus on gear wheel 20 to be fixed on zoom camera lens 25.Focus motor 31 drives and focuses on
Little gear 33 rotates.Focus on little gear 33 and focusing gear wheel 20 engages.Baffle plate folding electricity
Machine 34 is fixed on motor fixing frame 21, baffle plate folding motor 34 and baffle plate rotary shaft 29 phase
Even.Lens barrier 27 is arranged in baffle plate rotary shaft 29 by locking nut 28.Left photoelectricity
Switch 18 is arranged on left optoelectronic switch seat 19, and left optoelectronic switch seat 19 is fixed on left support
On arm 17.Right optoelectronic switch 30 is arranged on right optoelectronic switch seat 32, right optoelectronic switch seat
32 are fixed on right support arm 35.Catch 24,26 are fixed on zoom gear wheel 23.
Preferably, motor fixing frame 21 is by screw and left support arm 17 and right support arm 35
It is connected.
Preferably, it is that standard F mouth connects between zoom camera lens 25 and details in a play not acted out on stage, but told through dialogues motor 13.
Preferably, lens barrier 27 is arranged in baffle plate rotary shaft 29 by locking nut 28.
Wherein, dark-field imaging system 5 can pass through details in a play not acted out on stage, but told through dialogues camera 13, left fixing bar 14, phase
Machine fixed plate 15, zoom motor 16, left support arm 17, left optoelectronic switch 18, left light are established by cable
Close seat 19, focus on gear wheel 20, motor fixing frame 21, the little gear of zoom 22, zoom canine tooth
Wheel 23, catch 24,26, zoom camera lens 25, lens barrier 27, locking nut 28, gear
Plate rotary shaft 29, right optoelectronic switch 30, focus motor 31, right optoelectronic switch seat 32, focusing
Little gear 33, baffle plate folding motor 34, right support arm 35 and the right side are fixed bar 36 and are achieved certainly
Dynamic focusing and focusing, it is achieved thereby that with the mesh of different resolution monitoring mirror surface particulate matter
Mark.
Wherein, automatic focusing can be accomplished by:
When zoom gear wheel 23 rotates, catch 24,26 rotate along with zoom gear wheel 23.
When catch 24,26 when turning to the front of left optoelectronic switch 18, can block left optoelectronic switch
The signal of 18, makes zoom motor 16 stop, thus completes the automatic focusing of zoom camera lens 25.
The embodiment of the present invention can also control zoom camera lens 25 by changing the position of catch 24,25
Carry out automatic focusing, it is achieved under different resolution, monitor the mesh of the particulate matter on optical mirror surface
's.
Wherein, automatically focus on and can be accomplished by:
After zoom camera lens 25 completes focusing, dark-field imaging system is in defocus blur state.Will
Focus on gear wheel 20 to be fixed on zoom camera lens 25 focusing ring, driven by focus motor 31
Focus on little gear 33 and focus on gear wheel 20, thus realizing the automatic focusing of out-of-focus image.
The embodiment of the present invention arranges camera lens gear in zoom camera lens 25 front of dark-field imaging system 5
Plate 27, and drive camera lens catch 27 to transport by baffle plate folding motor 34 and baffle plate rotary shaft 29
Dynamic.When dark-field imaging system 5 gathers image, lens barrier 27 can be controlled and open, and
Lens barrier 27 moves to trigger baffle plate folding motor 34 during right optoelectronic switch 30 dead ahead
Stop signal, it is achieved opening of lens barrier 27.Adopt when dark-field imaging system 5 completes image
After collection, control lens barrier 27 and move to the dead ahead of zoom camera lens 25, such that it is able to avoid
Light laser damages zoom camera lens 25 and details in a play not acted out on stage, but told through dialogues camera 13.
As example, the workflow of dark-field imaging system can be: first, controls baffle plate and opens
Closing motor 34 drives lens barrier 27 to rotate, when lens barrier 27 moves to right optoelectronic switch
During 30 front, the stop motion of baffle plate folding motor 34, opens the camera lens of zoom camera lens 25 front end
Baffle plate 27.Then, the little gear of zoom 22 and zoom gear wheel are driven by zoom motor 16
The engagement of 23, completes the focusing of dark-field imaging system, finally according to the readability control of image
Focus motor 31 processed and focus on gear wheel 20 and focus on the motion of little gear 33, it is achieved details in a play not acted out on stage, but told through dialogues
The focusing of image.Hereby it is achieved that the collection of darkfield image and focusing under different resolution.Finally,
Close the dark-ground illumination light source 7 of dark-field imaging system, by the zoom camera lens in dark-field imaging system
25 adjust to minimum multiplying power, control baffle plate folding motor 34 and move to lens barrier 27 become
Times camera lens 25 dead ahead.
On the basis of above-described embodiment, light field imaging system 8 may include that coaxial-illuminating light
Source, mounting blocks 37, fixed plate 38, light field camera 39, microlens 40, line focus axle
41, camera lens retainer ring 42,43 and bright field illumination light source 44.Wherein, coaxial-illuminating light source sets
Put on microlens.Linear displacement platform 12 is provided with slide block, light field camera 39 and microlens
(40) it is connected.Bright field illumination light source 44 is arranged on microlens 40.Microlens 40
It is fixed on line focus axle 41 by camera lens retainer ring 42,43.By line focus axle
Optical mirror 9 upper surface is adjusted to the depth of field face of microlens 40 by 41.Line focus
Axle 41 is arranged in fixed plate 38.Fixed plate 38 is connected with mounting blocks 37.Mounting blocks 37
It is fixed on the slide block of linear displacement platform 12.
In the above-described embodiments, microlens 40 is fixed on linearly by camera lens retainer ring 42,43
On focal axis 41, so that microlens 40 moves along with line focus axle 41.
Preferably, connected by standard C mouth between light field camera 39 and microlens 40.
Preferably, line focus axle 41 is arranged in fixed plate 38 by screw, fixed plate
38 are connected with mounting blocks 37 by screw.
In the above-described embodiments, light field imaging system 8 uses coaxial-illuminating light source.Coaxial photograph
The light that source, Mingguang City sends penetrates from microlens, and light is radiated in highlighted state on optical element,
It is around all black background, is achieved in bright field illumination environment.Afterwards, to optical mirror 9
The particulate pollutant on surface carries out sampling calibration；Light field imaging system is fixed on linear displacement platform
On the slide block of 12, light field imaging system is driven to move by slide block, it is achieved under light field environment
Sampling to optical element surface particulate matter.Linear displacement platform 12 drives whole light field imaging system
System 8 motion, it is achieved the particulate matter of diverse location is monitored.
Preferably, light field imaging system 8 is fixed on the slide block of linear displacement platform 12, passes through
The motion of slide block realizes light field imaging system 8 and samples the particulate matter of mirror surface.
Light field imaging system 8 can be by the motion of line focus axle 41, by optical mirror
The particulate matter of 9 upper surfaces adjusts to the depth of field face of microlens 40, it is achieved to particulate matter
Calibration.After completing sampling calibration, light field imaging system 8 is transported by the slide block of linear displacement platform 12
Move the zero-bit to linear displacement platform 12, such that it is able to avoid light field imaging system 8 to block laser
Light path.
Light field imaging system by the collection to desirable particle size, thus can realize dark-field imaging
The particulate matter extracted in system carries out sampling calibration.Specifically, dark-field imaging system 5 extracts
The desirable particle size gone out, need to be by the light field imaging system physics to particulate matter in units of pixel
Size is calibrated.As it is shown on figure 3, method particularly includes: light field imaging system 8 is fixing online
Property displacement platform 12 slide block on, drive light field imaging system 8 to optics by the motion of slide block
The particulate matter of speculum 9 surface diverse location carries out sampling calibration.Microlens 40 front end and
Distance between optical mirror 9 upper surface is adjusted by line focus axle 41, with control
The upper surface of optical mirror 9 processed is in the depth of field face of microlens 40.
Said apparatus embodiment is utilized to carry out optics unit additionally, the embodiment of the present invention also provides for one
The method of part surface particles thing on-line monitoring.As shown in Figure 4, the method includes:
S400: adjust the angles and positions of dark-ground illumination light source so that the light of dark-ground illumination light source
Bundle skims over optical mirror upper surface uniformly.
S401: control baffle plate folding driven by motor lens barrier and rotate, when lens barrier moves to
During right optoelectronic switch front, baffle plate folding motor stop motion, open lens barrier.
S402: by the zoom little gear of driven by motor zoom and the engagement of zoom gear wheel, and root
Control focus motor according to the readability of image and focus on the motion of gear.
S403: close dark-ground illumination light source, adjusts zoom camera lens to minimum multiplying power, controls gear
Lens barrier is moved to the dead ahead of zoom camera lens by plate folding motor.
S404: optical standard broken up in the visual field that plate is placed on light field imaging system, adjusts line
Property focal axis with to optical standard differentiation plate on black and white line youngster is focused.
S405: the particulate matter of mirror surface adjusted to light field imaging system by linear displacement platform
In the visual field of system, and by line focus axle, the particulate matter of mirror surface is adjusted to microlens
Depth of field face in, carry out on-line monitoring.
After step S405 has performed, the embodiment of the present invention can also include step S406.
S406: use linear displacement platform to move light field imaging system to side.
Although each step is retouched by the present embodiment according to the mode of above-mentioned precedence
State, it will be recognized to those skilled in the art that for the effect realizing the present embodiment, different
Step between perform not necessarily in such order, its can simultaneously (parallel) execution or with
Reverse order performs, and these simply change all within protection scope of the present invention.
Said apparatus embodiment may be used for performing said method embodiment, its know-why, institute
The technique effect solving the technical problem that and producing is similar, and person of ordinary skill in the field can
To be well understood to, for convenience and simplicity of description, the specific works of the method for foregoing description
Process, is referred to the corresponding process in aforementioned means embodiment, does not repeats them here.
It is to be noted that and respectively assembly of the invention embodiments and methods embodiment is carried out above
Describe, but the details describing an embodiment also apply be applicable to another embodiment.
The technical scheme provided the embodiment of the present invention above is described in detail.Although
Apply concrete individual example herein principle and the embodiment of the present invention are set forth, but,
The explanation of above-described embodiment is only applicable to help to understand the principle of the embodiment of the present invention；Meanwhile, right
For those skilled in the art, according to the embodiment of the present invention, in detailed description of the invention and should
All can make a change within the scope of with.
It should be understood that mark and word in accompanying drawing are intended merely to be illustrated more clearly that this
Bright, it is not intended as the improper restriction to scope.
Term " includes " or any other like term is intended to comprising of nonexcludability,
So that include that the process of a series of key element, method, article or equipment/device not only wrap
Include those key elements, but also include other key element being not expressly set out, or also include these
The key element that process, method, article or equipment/device are intrinsic.
Particular embodiments described above, to the purpose of the present invention, technical scheme and beneficial effect
Further described, be it should be understood that and the foregoing is only the concrete of the present invention
Embodiment, is not limited to the present invention, all within the spirit and principles in the present invention,
Any modification, equivalent substitution and improvement etc. done, should be included in protection scope of the present invention
Within.
Claims (6)
1. an optical element surface particulate matter on-Line Monitor Device, it is characterised in that described
Device includes: optical mirror (3,9), fixed mount (4), dark-field imaging system (5),
Optical mirror casing (6), two dark-ground illumination light sources (7), light field imaging system (8), line
Property displacement platform (12)；Wherein, described optical mirror (3,9) and described fixed mount (4)
It is arranged on described optical mirror casing (6)；Described dark-field imaging system (5), described
Light field imaging system (8) and described linear displacement platform (12) are arranged on described fixed mount (4)
On, described linear displacement platform (12) drives described light field imaging system (8) to move；Described two
Dark-ground illumination light source (7) is separately positioned on the both sides of described optical mirror (9).
Device the most according to claim 1, it is characterised in that described dark-field imaging system
System (5) including: details in a play not acted out on stage, but told through dialogues camera (13), left fixing bar (14), camera fixed plate (15),
Zoom motor (16), left support arm (17), left optoelectronic switch (18), left optoelectronic switch seat
(19), focus on gear wheel (20), motor fixing frame (21), the little gear of zoom (22), become
Times gear wheel (23), catch (24,26), zoom camera lens (25), lens barrier (27),
Locking nut (28), baffle plate rotary shaft (29), right optoelectronic switch (30), focus motor (31),
Right optoelectronic switch seat (32), focus on little gear (33), baffle plate folding motor (34), right
Brace (35), right fixing bar (36)；Wherein, described details in a play not acted out on stage, but told through dialogues motor (13) is fixed on described
In camera fixed plate (15), described camera fixed plate (15) fixes bar (14) by a described left side
Fix bar (36) to be connected with described fixed mount (4) with the described right side, described motor fixing frame (21)
It is connected with described left support arm (17) and described right support arm (35)；Described zoom camera lens (25)
It is connected with described details in a play not acted out on stage, but told through dialogues motor (13)；It is solid that described zoom motor (16) is fixed on described motor
Determining on frame (21), the little gear of described zoom (22) is connected with described zoom motor (16),
Described zoom gear wheel (23) is fixed on described zoom camera lens (25), by described zoom
Motor (16) drives the little gear of described zoom (22) to rotate, the little gear of described zoom (22)
Engage with described zoom gear wheel (23)；Described focus motor (31) is fixed on described motor
On fixed mount (21), the little gear of described focusing (33) is connected with described zoom motor (31),
Described focusing gear wheel (20) is fixed on described zoom camera lens (25), described focus motor
(31) the little gear of described focusing (33) is driven to rotate, the little gear of described focusing (33) and institute
State focusing gear wheel (20) engagement；Described baffle plate folding motor (34) is fixed on described motor
On fixed mount (21), described baffle plate folding motor (34) and described baffle plate rotary shaft (29)
Being connected, described lens barrier (27) is arranged on described baffle plate by described locking nut (28)
In rotary shaft (29)；Described left optoelectronic switch (18) is arranged on described left optoelectronic switch seat (19)
On, described left optoelectronic switch seat (19) is fixed on described left support arm (17)；The described right side
Optoelectronic switch (30) is arranged on described right optoelectronic switch seat (32), described right optoelectronic switch
Seat (32) is fixed on described right support arm (35)；Described catch (24,26) is fixed on
On described zoom gear wheel (23).
Device the most according to claim 2, it is characterised in that described light field imaging system
System (8) including: coaxial-illuminating light source, mounting blocks (37), fixed plate (38), light field phase
Machine (39), microlens (40), line focus axle (41), camera lens retainer ring (42,43)
With bright field illumination light source (44)；Wherein, described coaxial-illuminating light source is arranged on described microscope
On head, described linear displacement platform (12) is provided with slide block, described light field camera (39) and described
Microlens (40) is connected, and described bright field illumination light source (44) is arranged on described microlens
(40), on, described microlens (40) is fixed on by described camera lens retainer ring (42,43)
On described line focus axle (41), by described line focus axle (41) by described optical reflection
Mirror (9) upper surface adjusts to the depth of field face of described microlens (40), described linear poly-
Focal axis (41) is arranged in described fixed plate (38), described fixed plate (38) and mounting blocks (37)
Being connected, described mounting blocks (37) is fixed on the slide block of described linear displacement platform (12).
Device the most according to claim 3, it is characterised in that described zoom camera lens (25)
Being provided with focusing ring, described zoom gear wheel (23) is fixed on described focusing ring.
Device the most according to claim 4, it is characterised in that described lens barrier (27)
It is arranged on the front of zoom camera lens (25), and is revolved by baffle plate folding motor (34) and baffle plate
Rotating shaft (29) drives camera lens catch (27) motion；When dark-field imaging system (5) gathers image
Control lens barrier (27) to open, and lens barrier (27) moves to right optoelectronic switch (30)
Trigger baffle plate folding motor (34) during dead ahead to stop, it is achieved opening of lens barrier (27)；
After dark-field imaging system (5) completes IMAQ, control lens barrier (27) and move to
The dead ahead of zoom camera lens (25).
6. one kind utilizes arbitrary described device in the claims 3-5 to carry out optical element
The method of surface particles thing on-line monitoring, it is characterised in that described method includes:
Adjust the angles and positions of described dark-ground illumination light source so that described dark-ground illumination light source
Homogenizer skim over described optical mirror upper surface；
Control lens barrier described in described baffle plate folding driven by motor to rotate, when described lens barrier
When moving to described right optoelectronic switch front, described baffle plate folding motor stop motion, open institute
State lens barrier；
By nibbling of the little gear of zoom described in described zoom driven by motor and described zoom gear wheel
Close, and control described focus motor and the motion of described focusing gear according to the readability of image；
Close described dark-ground illumination light source, described zoom camera lens is adjusted to minimum multiplying power, control
Described lens barrier is moved to the dead ahead of described zoom camera lens by described baffle plate folding motor；
Optical standard is broken up in the visual field that plate is placed on described light field imaging system, adjust described
Line focus axle is to be focused youngster black and white line on described optical standard differentiation plate；
By described linear displacement platform, the particulate matter of described mirror surface is adjusted to being stated clearly
In the visual field of imaging system, and by described line focus axle by described mirror surface
Grain thing is adjusted in the depth of field face of described microlens, carries out on-line monitoring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610238030.5A CN105928949B (en) | 2016-04-18 | 2016-04-18 | The method of optical element surface particulate matter on-Line Monitor Device and its on-line monitoring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610238030.5A CN105928949B (en) | 2016-04-18 | 2016-04-18 | The method of optical element surface particulate matter on-Line Monitor Device and its on-line monitoring |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105928949A true CN105928949A (en) | 2016-09-07 |
| CN105928949B CN105928949B (en) | 2019-05-10 |
Family
ID=56839415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610238030.5A Active CN105928949B (en) | 2016-04-18 | 2016-04-18 | The method of optical element surface particulate matter on-Line Monitor Device and its on-line monitoring |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105928949B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106645197A (en) * | 2016-12-29 | 2017-05-10 | 中国工程物理研究院激光聚变研究中心 | Online detection system for detecting particles on surface of precise optical element and application method |
| CN108572126A (en) * | 2018-04-20 | 2018-09-25 | 中国科学院生态环境研究中心 | A kind of particulate matter-water termination water quality parameter in-situ measurement system |
| CN109092730A (en) * | 2018-10-24 | 2018-12-28 | 中国工程物理研究院激光聚变研究中心 | Device and method for optical element online clean surface monitoring and processing |
| CN111272771A (en) * | 2020-03-03 | 2020-06-12 | 中国科学院光电技术研究所 | High-resolution particle detection device |
| CN113790751A (en) * | 2021-08-10 | 2021-12-14 | 天津大学 | Flexible area controllable illumination light source device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103489809A (en) * | 2013-09-22 | 2014-01-01 | 上海华力微电子有限公司 | Defect detection system for particles on surface of wafer and working method of defect detection system |
| CN103630549A (en) * | 2009-01-13 | 2014-03-12 | 联达科技设备私人有限公司 | System and method for inspecting a wafer |
| WO2014057009A1 (en) * | 2012-10-10 | 2014-04-17 | Dürr Ecoclean GmbH | Determining the soiling of a workpiece |
| CN104101603A (en) * | 2013-04-12 | 2014-10-15 | 宝山钢铁股份有限公司 | Device and method for detecting surface defect on strip steel |
| CN104897693A (en) * | 2015-06-12 | 2015-09-09 | 武汉中导光电设备有限公司 | Glass surface defect enhancement device and detection method thereof |
-
2016
- 2016-04-18 CN CN201610238030.5A patent/CN105928949B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103630549A (en) * | 2009-01-13 | 2014-03-12 | 联达科技设备私人有限公司 | System and method for inspecting a wafer |
| WO2014057009A1 (en) * | 2012-10-10 | 2014-04-17 | Dürr Ecoclean GmbH | Determining the soiling of a workpiece |
| CN104101603A (en) * | 2013-04-12 | 2014-10-15 | 宝山钢铁股份有限公司 | Device and method for detecting surface defect on strip steel |
| CN103489809A (en) * | 2013-09-22 | 2014-01-01 | 上海华力微电子有限公司 | Defect detection system for particles on surface of wafer and working method of defect detection system |
| CN104897693A (en) * | 2015-06-12 | 2015-09-09 | 武汉中导光电设备有限公司 | Glass surface defect enhancement device and detection method thereof |
Non-Patent Citations (2)
| Title |
|---|
| 罗李焱 等: "显微视觉系统对柱状微零件自动聚焦技术研究", 《计算机工程与应用》 * |
| 陶显 等: "基于机器视觉的大口径光学元件表面损伤检测技术研究进展", 《第三十三届中国控制会议论文集（B卷）》 * |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106645197A (en) * | 2016-12-29 | 2017-05-10 | 中国工程物理研究院激光聚变研究中心 | Online detection system for detecting particles on surface of precise optical element and application method |
| CN106645197B (en) * | 2016-12-29 | 2024-01-30 | 中国工程物理研究院激光聚变研究中心 | Online detection system for detecting particles on surface of precision optical element and application method |
| CN108572126A (en) * | 2018-04-20 | 2018-09-25 | 中国科学院生态环境研究中心 | A kind of particulate matter-water termination water quality parameter in-situ measurement system |
| CN108572126B (en) * | 2018-04-20 | 2020-06-30 | 中国科学院生态环境研究中心 | Particle-water interface water quality parameter in-situ measurement system |
| CN109092730A (en) * | 2018-10-24 | 2018-12-28 | 中国工程物理研究院激光聚变研究中心 | Device and method for optical element online clean surface monitoring and processing |
| CN109092730B (en) * | 2018-10-24 | 2023-10-20 | 中国工程物理研究院激光聚变研究中心 | Device and method for on-line surface cleaning monitoring and treatment of optical element |
| CN111272771A (en) * | 2020-03-03 | 2020-06-12 | 中国科学院光电技术研究所 | High-resolution particle detection device |
| CN111272771B (en) * | 2020-03-03 | 2023-03-31 | 中国科学院光电技术研究所 | High-resolution particle detection device |
| CN113790751A (en) * | 2021-08-10 | 2021-12-14 | 天津大学 | Flexible area controllable illumination light source device |
| CN113790751B (en) * | 2021-08-10 | 2024-04-05 | 天津大学 | Illumination light source device with controllable flexible area |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105928949B (en) | 2019-05-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105928949A (en) | Device and method for online monitoring particles on surface of optical elements | |
| JP5764455B2 (en) | Microscope illumination system, microscope and oblique incidence illumination method | |
| CN103293162B (en) | Lighting system and method used for dark field detection of defect in spherical optical element surface | |
| CN104111524B (en) | The method of workflow in digit microscope and optimization digit microscope | |
| CN104034258B (en) | With pancratic galvanometer scanning camera and method | |
| JP2001512237A5 (en) | ||
| CN102288622A (en) | Method and device for detecting internal defect of optical element | |
| CN202256191U (en) | Coated glass inside defect tomography display device | |
| CN108152299A (en) | The beauty defects detection device and detection method of high-precision optical element | |
| CN101807012A (en) | Automatic focus light path structure of direct-write lithography machine | |
| CN107064173A (en) | The detection means and detection method of large-scale planar optical elements beauty defects | |
| EP0277444A1 (en) | Micro laser beam machine for intervening at objects having thin layers of material | |
| FR2562249A1 (en) | HIGHLY RADIO-ACTIVE, WELDED WET CELL FOR A NUCLEAR FACILITY, WITH A DEVICE FOR RECOGNIZING LEAKS AND A METHOD FOR THE USE OF SUCH A CELL | |
| CN207923076U (en) | Rotary scanning type 3-D imaging system based on lamella optical illumination | |
| JP5328406B2 (en) | Laser processing method, laser processing apparatus, and solar panel manufacturing method | |
| CN108152294A (en) | A kind of ultra-smooth eyeglass flaw inspection devices and methods therefor | |
| CN116718603A (en) | Diffraction imaging defect detection system and detection method thereof | |
| JP2018136200A5 (en) | ||
| CN113447489B (en) | Method and device for removing influence of halation in surface defect detection of large-curvature optical lens | |
| KR100606568B1 (en) | A Flood Light for appearance inspection of LCD surface | |
| CN214443822U (en) | Laser repairing device | |
| KR102129239B1 (en) | Multifocal optical inspection device | |
| CN108273806B (en) | A kind of laser cleaning equipment camera lens and laser cleaning equipment | |
| CN106370660A (en) | Strainometer AOI defect identification detection device | |
| KR100749006B1 (en) | Apparatus for a dust inspection |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |