CN105928949B - The method of optical element surface particulate matter on-Line Monitor Device and its on-line monitoring - Google Patents
The method of optical element surface particulate matter on-Line Monitor Device and its on-line monitoring Download PDFInfo
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- CN105928949B CN105928949B CN201610238030.5A CN201610238030A CN105928949B CN 105928949 B CN105928949 B CN 105928949B CN 201610238030 A CN201610238030 A CN 201610238030A CN 105928949 B CN105928949 B CN 105928949B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 61
- 239000013618 particulate matter Substances 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000012544 monitoring process Methods 0.000 title claims abstract description 15
- 238000003384 imaging method Methods 0.000 claims abstract description 62
- 238000006073 displacement reaction Methods 0.000 claims abstract description 25
- 238000005286 illumination Methods 0.000 claims abstract description 25
- 230000004888 barrier function Effects 0.000 claims description 32
- 230000005693 optoelectronics Effects 0.000 claims description 28
- 230000004069 differentiation Effects 0.000 claims description 6
- 230000000007 visual effect Effects 0.000 claims description 5
- 230000005622 photoelectricity Effects 0.000 claims 2
- 239000003344 environmental pollutant Substances 0.000 abstract description 7
- 231100000719 pollutant Toxicity 0.000 abstract description 7
- 238000005070 sampling Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 4
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- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
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- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000026676 system process Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
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Abstract
The invention discloses a kind of optical element surface particulate matter on-Line Monitor Device and its methods of on-line monitoring.Wherein, the device includes optical mirror (3,9), fixed frame (4), dark-field imaging system (5), optical mirror cabinet (6), two dark-ground illumination light sources (7), light field imaging system (8), linear displacement platform (12)；Wherein, the optical mirror (3,9) and the fixed frame (4) are arranged on the optical mirror cabinet (6)；The dark-field imaging system (5), the light field imaging system (8) and the linear displacement platform (12) are arranged on the fixed frame (4), and the linear displacement platform (12) drives light field imaging system (8) movement；The two dark-ground illuminations light source (7) is separately positioned on the two sides of the optical mirror (9).The embodiment of the present invention is solved such as the technical issues of how different resolution monitors optical element surface pollutant as a result,.
Description
Technical field
The present embodiments relate to optical element surface cleaning monitoring technical fields, and in particular to a kind of optical element surface
The method of particulate matter on-Line Monitor Device and its on-line monitoring.
Background technique
There are the reflections that several pieces of reflecting mirrors, the running route of laser pass through mirror body in high energy laser running gear
Change.If mirror surface is there are when particulate pollutant, high energy laser will cause to damage to mirror surface.Therefore, in order to
The stable operation for ensuring high energy laser running gear needs to develop a kind of monitoring system, with the clean shape for monitoring mirror surface
State.
In view of this, the present invention is specifically proposed.
Summary of the invention
The main purpose of the embodiment of the present invention is to provide a kind of optical element surface particulate matter on-Line Monitor Device, until
It partially solves such as the technical issues of how different resolution monitors optical element surface pollutant.In addition, also providing one
The method of kind optical element surface particulate matter on-line monitoring.
To achieve the goals above, according to an aspect of the invention, there is provided following technical scheme:
A kind of optical element surface particulate matter on-Line Monitor Device, described device include:
Optical mirror (3,9), fixed frame (4), dark-field imaging system (5), optical mirror cabinet (6), two dark fields
Lighting source (7), light field imaging system (8), linear displacement platform (12)；Wherein, the optical mirror (3,9) and the fixation
Frame (4) is arranged on the optical mirror cabinet (6)；The dark-field imaging system (5), the light field imaging system (8) and
The linear displacement platform (12) is arranged on the fixed frame (4), and the linear displacement platform (12) drives light field imaging system
System (8) movement；Described two dark-ground illumination light sources (7) are separately positioned on the two sides of the optical mirror (9).
To achieve the goals above, according to another aspect of the present invention, additionally provide it is a kind of utilize above-mentioned apparatus carry out
The method of optical element surface particulate matter on-line monitoring, the described method includes:
The angles and positions of the dark-ground illumination light source are adjusted, so that the homogenizer of the dark-ground illumination light source skims over
The optical mirror upper surface；
It controls the baffle folding motor and drives the lens barrier rotation, when the lens barrier moves to the right light
When in front of electric switch, the baffle opens and closes motor stop motion, opens the lens barrier；
The engagement of the zoom pinion gear and the zoom gear wheel is driven by the zoom motor, and according to image
Readability controls the focus motor and the movement for focusing gear；
The dark-ground illumination light source is closed, the zoom camera lens is adjusted to minimum multiplying power, controls the baffle folding electricity
The lens barrier is moved to the front of the zoom camera lens by machine；
Optical standard differentiation plate is placed in the visual field of the light field imaging system, adjusts the line focus axis with right
Black and white line is focused youngster on the optical standard differentiation plate；
The particulate matter of the mirror surface is adjusted to the view of the light field imaging system by the linear displacement platform
In open country, and the particulate matter of the mirror surface is adjusted in the depth of field face of the microlens by the line focus axis,
It is monitored on-line.
Compared with prior art, above-mentioned technical proposal at least has the advantages that
The principle and feature that the embodiment of the present invention is imaged according to light/dark field are arranged symmetrically two lines in mirrored side
Lighting source, and realized by the automatic focusing of zoom camera lens and focusing operation and mirror surface particle is monitored with different resolution
The purpose of object；Then sampling calibration is carried out to the particulate pollutant extracted in darkfield image using light field imaging system, accurately
Determine the size of particulate pollutant.The present invention can monitor the clean state of optical element surface on-line, it is ensured that high energy laser fortune
The stable operation that luggage is set is realized with the technical effect of different resolution monitoring optical element surface pollutant.
Certainly, it implements any of the products of the present invention and is not necessarily required to realize all the above advantage simultaneously.
Other features and advantages of the present invention will be illustrated in the following description, also, partly becomes from specification
It obtains it is clear that understand through the implementation of the invention.Objectives and other advantages of the present invention can be by written explanation
Specifically noted method is achieved and obtained in book, claims and attached drawing.
Detailed description of the invention
Attached drawing is as a part of the invention, and for providing further understanding of the invention, of the invention is schematic
Examples and descriptions thereof are used to explain the present invention, but does not constitute an undue limitation on the present invention.Obviously, the accompanying drawings in the following description
Only some embodiments to those skilled in the art without creative efforts, can be with
Other accompanying drawings can also be obtained according to these attached drawings.In the accompanying drawings:
Fig. 1 is the structural representation according to the optical element surface particulate matter on-Line Monitor Device shown in an exemplary embodiment
Figure；
Fig. 2 is the structural schematic diagram according to the dark-field imaging system shown in another exemplary embodiment；
Fig. 3 is the structural schematic diagram according to the light field imaging system shown in an exemplary embodiment；
Fig. 4 is the stream according to the method for the progress optical element surface particulate matter on-line monitoring shown in an exemplary embodiment
Journey schematic diagram.
These attached drawings and verbal description are not intended to the conception range limiting the invention in any way, but by reference to
Specific embodiment is that those skilled in the art illustrate idea of the invention.
Specific embodiment
The technical issues of with reference to the accompanying drawing and specific embodiment is solved to the embodiment of the present invention, used technical side
Case and the technical effect of realization carry out clear, complete description.Obviously, described embodiment is only one of the application
Divide embodiment, is not whole embodiments.Based on the embodiment in the application, those of ordinary skill in the art are not paying creation
Property labour under the premise of, all other equivalent or obvious variant the embodiment obtained is fallen within the scope of protection of the present invention.
It should be noted that in the following description, understanding for convenience, giving many details.But it is very bright
Aobvious, realization of the invention can be without these details.
It should be noted that in the absence of clear limitations or conflicts, each embodiment in the present invention and its
In technical characteristic can be combined with each other and form technical solution.
Fig. 1 schematically illustrates the structure and working environment of optical element surface particulate matter on-Line Monitor Device.Fig. 2 shows
Show the structure of dark-field imaging system to example property.Fig. 3 schematically illustrates the structure of light field imaging system.As Fig. 1-3 institute
Show, optical element surface particulate matter on-Line Monitor Device provided in an embodiment of the present invention include optical mirror 3,9, fixed frame 4,
Dark-field imaging system 5, optical mirror cabinet 6, two dark-ground illumination light sources 7, light field imaging system 8, linear displacement platforms 12.Its
In, optical mirror 3,9 is fixed on reflecting mirror cabinet 6.Fixed frame 4 is arranged on optical mirror cabinet 6.Dark-field imaging system
System 5, light field imaging system 8 and linear displacement platform 12 are arranged on fixed frame 4, and linear displacement platform 12 drives light field imaging system 8
Movement.The two sides of optical mirror 9 are arranged in two dark-ground illumination light sources 7.
In the above-described embodiments, optical mirror cabinet 6 is fixed on the ground by four foundation bolts.
Preferably, optical mirror 3,9 and the angle of horizontal plane be 45 degree.
Preferably, fixed frame 4 is fixed on the truss of reflecting mirror cabinet 6.
Preferably, dark-field imaging system 5 is fixed on fixed frame 4 by mounting hole 10,11.
Preferably, dark-ground illumination light source 7 is symmetrically arranged at the two sides of optical mirror 9, irradiates 9 surface of optical mirror
Particulate matter, dark field illumination system is consequently formed；Dark-ground illumination light source is preferably Linear lighting illuminating source.
In a preferred embodiment, square hole can be equipped on reflecting mirror cabinet 6.Incoming laser beam 1 is along optics
Square hole on reflecting mirror cabinet 6 enters, and after two secondary reflections by optical mirror 9,3, shoot laser beam 2 is along reflecting mirror
Square hole on cabinet 6 projects.
On the basis of the above embodiments, dark-field imaging system 5 may include: dark field camera 13, left fixed link 14, camera
Fixed plate 15, left support arm 17, left optoelectronic switch 18, left optoelectronic switch base 19, focuses gear wheel 20, motor at zoom motor 16
Fixed frame 21, zoom pinion gear 22, zoom gear wheel 23, baffle 24,26, zoom camera lens 25, lens barrier 27, locking nut
28, baffle rotary shaft 29, right optoelectronic switch 30, focus motor 31, right optoelectronic switch base 32, focusing pinion gear 33, baffle folding
Motor 34, right support arm 35, right fixed link 36.Wherein, dark field camera 13 is fixed in camera fixed plate 15.Camera fixed plate 15
It is connected by left fixed link 14 and right fixed link 36 with fixed frame 4.Motor fixing frame 21 and left support arm 17 and right support arm 35
It is connected.Zoom camera lens 25 is connected with dark field camera 13.Zoom motor 16 is fixed on motor fixing frame 21.22 He of zoom pinion gear
Zoom motor 16 is connected.Zoom gear wheel 23 is fixed on zoom camera lens 25.Zoom pinion gear 22 is driven by zoom motor 16
Rotation, zoom pinion gear 22 and zoom gear wheel 23 engage.Focus motor 31 is fixed on motor fixing frame 21.Focus pinion gear
33 are connected with zoom motor 31.Gear wheel 20 is focused to be fixed on zoom camera lens 25.Focus motor 31, which drives, focuses pinion gear 33
Rotation.It focuses pinion gear 33 and focuses gear wheel 20 and engage.Baffle folding motor 34 is fixed on motor fixing frame 21, and baffle is opened
Motor 34 is closed to be connected with baffle rotary shaft 29.Lens barrier 27 is mounted in baffle rotary shaft 29 by locking nut 28.Zuo Guang
Electric switch 18 is mounted in left optoelectronic switch base 19, and left optoelectronic switch base 19 is fixed on left support arm 17.Right optoelectronic switch 30
It is mounted in right optoelectronic switch base 32, right optoelectronic switch base 32 is fixed on right support arm 35.It is big that baffle 24,26 is fixed on zoom
On gear 23.
Preferably, motor fixing frame 21 is connected by screw with left support arm 17 with right support arm 35.
It preferably, is F mouthfuls of standard connections between zoom camera lens 25 and dark field camera 13.
Preferably, lens barrier 27 is mounted in baffle rotary shaft 29 by locking nut 28.
Wherein, dark-field imaging system 5 can pass through dark field camera 13, left fixed link 14, camera fixed plate 15, zoom motor
16, left support arm 17, left optoelectronic switch 18, left optoelectronic switch base 19, focusing gear wheel 20, motor fixing frame 21, the small tooth of zoom
Wheel 22, zoom gear wheel 23, baffle 24,26, zoom camera lens 25, lens barrier 27, locking nut 28, baffle rotary shaft 29, the right side
Optoelectronic switch 30, right optoelectronic switch base 32, focuses pinion gear 33, baffle folding motor 34,35 and of right support arm at focus motor 31
Right fixed link 36 realizes automatic focusing and focusing, to realize with the mesh of different resolution monitoring mirror surface particulate matter
Mark.
Wherein, automatic focusing can be accomplished by the following way:
When zoom gear wheel 23 rotates, baffle 24,26 is rotated with zoom gear wheel 23.When baffle 24,26 turns to
When the front of left optoelectronic switch 18, the signal of left optoelectronic switch 18 can be blocked, stops zoom motor 16, to complete zoom mirror
First 25 automatic focusing.The embodiment of the present invention can also be carried out certainly by the position of change baffle 24,26, control zoom camera lens 25
The purpose that the particulate matter on optical mirror surface is monitored under different resolution is realized in dynamic focusing.
Wherein, automatic focus can be accomplished by the following way:
After zoom camera lens 25 completes focusing, dark-field imaging system is in defocus blur state.It is fixed gear wheel 20 will to be focused
On 25 focusing ring of zoom camera lens, by focus motor 31 drive focus pinion gear 33 and focus gear wheel 20, thus realize from
The automatic focusing of burnt image.
The embodiment of the present invention arranges lens barrier 27 in front of the zoom camera lens 25 of dark-field imaging system 5, and passes through baffle
It opens and closes motor 34 and baffle rotary shaft 29 drives lens barrier 27 to move.When dark-field imaging system 5 acquires image, can control
Lens barrier 27 is opened, and when lens barrier 27 moves to right 30 front of optoelectronic switch triggering baffle folding motor 34 stopping
Signal realizes the opening of lens barrier 27.After dark-field imaging system 5 completes Image Acquisition, control lens barrier 27 is moved to
The front of zoom camera lens 25, so as to avoid light laser damage zoom camera lens 25 and dark field camera 13.
As an example, the workflow of dark-field imaging system can be with are as follows: firstly, control baffle folding motor 34 drives camera lens
Baffle 27 rotates, and when lens barrier 27 moves to right 30 front of optoelectronic switch, baffle opens and closes 34 stop motion of motor, opens and becomes
The lens barrier 27 of times 25 front end of camera lens.Then, zoom pinion gear 22 and zoom gear wheel 23 are driven by zoom motor 16
Engagement, completes the focusing of dark-field imaging system, finally controls focus motor 31 according to the readability of image and focuses gear wheel
20 and focus pinion gear 33 movement, realize the focusing of darkfield image.Hereby it is achieved that under different resolution darkfield image acquisition
And focusing.Finally, closing the dark-ground illumination light source 7 of dark-field imaging system, the zoom camera lens 25 in dark-field imaging system is adjusted
To minimum multiplying power, baffle folding motor 34 is controlled by lens barrier 27 and moves to 25 front of zoom camera lens.
On the basis of the above embodiments, light field imaging system 8 may include: coaxial-illuminating light source, mounting blocks 37, fix
Plate 38, light field camera 39, microlens 40, line focus axis 41, camera lens fixed ring 42,43 and bright field illumination light source 44.Wherein,
Coaxial-illuminating light source is arranged on microlens.Linear displacement platform 12 is equipped with sliding block, and light field camera 39 is connected with microlens 40.
Bright field illumination light source 44 is mounted on microlens 40.Microlens 40 are fixed on line focus by camera lens fixed ring 42,43
On axis 41.9 upper surface of optical mirror is adjusted to the depth of field face of microlens 40 by line focus axis 41.Line focus
Axis 41 is mounted in fixed plate 38.Fixed plate 38 is connected with mounting blocks 37.Mounting blocks 37 are fixed on the sliding block of linear displacement platform 12
On.
In the above-described embodiments, camera lens fixed ring 42,43 are fixed on microlens 40 on line focus axis 41, to make
Microlens 40 are moved with line focus axis 41.
Preferably, pass through standard C mouthfuls of connection between light field camera 39 and microlens 40.
Preferably, line focus axis 41 is mounted in fixed plate 38 by screw, and fixed plate 38 passes through screw and mounting blocks
37 are connected.
In the above-described embodiments, coaxial-illuminating light source is used in light field imaging system 8.Coaxial-illuminating light source issue light from
It is projected in microlens, light is radiated on optical element in highlighted state, and surrounding is all black background, is achieved in bright field illumination
Environment.Later, sampling calibration is carried out to the particulate pollutant on 9 surface of optical mirror；Light field imaging system is fixed on linear position
On the sliding block of moving stage 12, the movement of light field imaging system is driven by sliding block, is realized under light field environment to optical element surface
The sampling of grain object.Linear displacement platform 12 drives entire light field imaging system 8 to move, and the particulate matter of different location is supervised in realization
It surveys.
Preferably, light field imaging system 8 is fixed on the sliding block of linear displacement platform 12, realizes light field by the movement of sliding block
Imaging system 8 samples the particulate matter of mirror surface.
Light field imaging system 8 can be by the movement of line focus axis 41, by the particulate matter tune of 9 upper surface of optical mirror
In the whole depth of field face to microlens 40, the calibration to particulate matter is realized.After completing sampling calibration, the sliding block of linear displacement platform 12
Light field imaging system 8 is moved to the zero-bit of linear displacement platform 12, so as to avoid light field imaging system 8 from blocking laser light
Road.
Light field imaging system can be by the acquisition to desirable particle size, to realize to extracted in dark-field imaging system
Grain object carries out sampling calibration.Specifically, the desirable particle size extracted in dark-field imaging system 5 need to be passed through as unit of pixel
Light field imaging system calibrates the physical size of particulate matter.As shown in figure 3, method particularly includes: light field imaging system 8 is fixed
On the sliding block of linear displacement platform 12, drive light field imaging system 8 to 9 surface difference position of optical mirror by the movement of sliding block
The particulate matter set carries out sampling calibration.The distance between 9 upper surface of 40 front end of microlens and optical mirror is by linearly gathering
Focal axis 41 is adjusted, to control the upper surface of optical mirror 9 in the depth of field face of microlens 40.
In addition, the embodiment of the present invention also provide it is a kind of using above-mentioned apparatus embodiment carry out optical element surface particulate matter exist
The method of line monitoring.As shown in figure 4, this method comprises:
S400: the angles and positions of adjustment dark-ground illumination light source, so that the homogenizer of dark-ground illumination light source skims over light
Learn reflecting mirror upper surface.
S401: control baffle folding motor drives lens barrier rotation, when lens barrier moves in front of right optoelectronic switch
When, baffle opens and closes motor stop motion, opens lens barrier.
S402: the engagement of zoom pinion gear and zoom gear wheel is driven by zoom motor, and according to the clear journey of image
Degree control focus motor and the movement for focusing gear.
S403: closing dark-ground illumination light source, and zoom camera lens is adjusted to minimum multiplying power, controls baffle folding motor for camera lens
Baffle moves to the front of zoom camera lens.
S404: optical standard differentiation plate is placed in the visual field of light field imaging system, adjusts line focus axis to light
Black and white line on standard differentiation plate is learned to be focused youngster.
S405: being adjusted the particulate matter of mirror surface to the visual field of light field imaging system by linear displacement platform, and
The particulate matter of mirror surface is adjusted in the depth of field face of microlens by line focus axis, is monitored on-line.
After step S405 has been executed, the embodiment of the present invention can also include step S406.
S406: light field imaging system is moved to side using linear displacement platform.
Although each step is described in the way of above-mentioned precedence in the present embodiment, this field skill
Art personnel are appreciated that the effect in order to realize the present embodiment, execute between different steps not necessarily in such order,
It (parallel) simultaneously can execute or be executed with reverse order, these simple variations are all within protection scope of the present invention.
Above-mentioned apparatus embodiment can be used for executing above method embodiment, technical principle, it is solved the technical issues of
And the technical effect generated is similar, person of ordinary skill in the field can be understood that, for the convenience and letter of description
Clean, the specific work process of the method for foregoing description can be no longer superfluous herein with reference to the corresponding process in aforementioned device embodiment
It states.
It should be pointed out that the device of the invention embodiments and methods embodiment is described respectively above, but it is right
The details of one embodiment description can also be applied to another embodiment.
Technical solution is provided for the embodiments of the invention above to be described in detail.Although applying herein specific
A example the principle of the present invention and embodiment are expounded, still, the explanation of above-described embodiment be only applicable to help manage
Solve the principle of the embodiment of the present invention；Meanwhile to those skilled in the art, according to an embodiment of the present invention, it is being embodied
It can be made a change within mode and application range.
It should be understood that the label and text in attached drawing are intended merely to be illustrated more clearly that the present invention, it is not intended as to this
The improper restriction of invention protection scope.
Term " includes " or any other like term are intended to cover non-exclusive inclusion, so that including a system
Process, method, article or equipment/device of column element not only includes those elements, but also including being not explicitly listed
Other elements, or further include the intrinsic element of these process, method, article or equipment/devices.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
It describes in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in guarantor of the invention
Within the scope of shield.
Claims (5)
1. a kind of optical element surface particulate matter on-Line Monitor Device, which is characterized in that described device includes: optical mirror
(3,9), fixed frame (4), dark-field imaging system (5), optical mirror cabinet (6), two dark-ground illumination light sources (7), light field at
As system (8), linear displacement platform (12)；Wherein, the optical mirror (3,9) and the fixed frame (4) are arranged in the light
It learns on reflecting mirror cabinet (6)；The dark-field imaging system (5), the light field imaging system (8) and the linear displacement platform (12)
It is arranged on the fixed frame (4), the linear displacement platform (12) drives light field imaging system (8) movement；It is described two
Dark-ground illumination light source (7) is symmetrically arranged at the two sides of the optical mirror (9)；
The dark-field imaging system (5) includes: dark field camera (13), left fixed link (14), camera fixed plate (15), zoom motor
(16), left support arm (17), left optoelectronic switch (18), left optoelectronic switch base (19), focusing gear wheel (20), motor fixing frame
(21), zoom pinion gear (22), zoom gear wheel (23), baffle (24,26), zoom camera lens (25), lens barrier (27), locking
Nut (28), right optoelectronic switch (30), focus motor (31), right optoelectronic switch base (32), focuses small tooth at baffle rotary shaft (29)
Take turns (33), baffle opens and closes motor (34), right support arm (35), right fixed link (36)；Wherein, the dark field camera (13) is fixed on
On the camera fixed plate (15), the camera fixed plate (15) passes through the left fixed link (14) and the right fixed link (36)
It is connected with the fixed frame (4), the motor fixing frame (21) and the left support arm (17) and the right support arm (35) phase
Even；The zoom camera lens (25) is connected with the dark field camera (13)；The zoom motor (16) is fixed on the motor and fixes
On frame (21), the zoom pinion gear (22) is connected with the zoom motor (16), and the zoom gear wheel (23) is fixed on institute
It states on zoom camera lens (25), drives the zoom pinion gear (22) to rotate by the zoom motor (16), the small tooth of zoom
Take turns (22) and the zoom gear wheel (23) engagement；The focus motor (31) is fixed on the motor fixing frame (21), institute
It states focusing pinion gear (33) to be connected with the zoom motor (31), the focusing gear wheel (20) is fixed on the zoom camera lens
(25) on, the focus motor (31) drives focusings pinion gear (33) rotation, the focusing pinion gear (33) and described gathers
Burnt gear wheel (20) engagement；Baffle folding motor (34) is fixed on the motor fixing frame (21), the baffle folding
Motor (34) is connected with the baffle rotary shaft (29), and the lens barrier (27) is mounted on institute by the locking nut (28)
It states on baffle rotary shaft (29)；The left optoelectronic switch (18) is mounted on the left optoelectronic switch base (19), the left photoelectricity
Switch base (19) is fixed on the left support arm (17)；The right optoelectronic switch (30) is mounted on the right optoelectronic switch base
(32) on, the right optoelectronic switch base (32) is fixed on the right support arm (35)；The baffle (24,26) is fixed on described
On zoom gear wheel (23).
2. the apparatus according to claim 1, which is characterized in that the light field imaging system (8) includes: coaxial-illuminating light
Source, mounting blocks (37), fixed plate (38), light field camera (39), microlens (40), line focus axis (41), camera lens fixed ring
(42,43) and bright field illumination light source (44)；Wherein, the coaxial-illuminating light source is arranged on the microlens, described linear
Displacement platform (12) is equipped with sliding block, and the light field camera (39) is connected with the microlens (40), the bright field illumination light source
(44) it is mounted on the microlens (40), the microlens (40) are fixed on by the camera lens fixed ring (42,43)
On the line focus axis (41), the optical mirror (9) upper surface is adjusted to institute by the line focus axis (41)
In the depth of field face for stating microlens (40), the line focus axis (41) is mounted on the fixed plate (38), the fixed plate
(38) it is connected with mounting blocks (37), the mounting blocks (37) are fixed on the sliding block of the linear displacement platform (12).
3. the apparatus of claim 2, which is characterized in that the zoom camera lens (25) is equipped with focusing ring, the zoom
Gear wheel (23) is fixed on the focusing ring.
4. device according to claim 3, which is characterized in that the lens barrier (27) is arranged in zoom camera lens (25)
Front, and lens barrier (27) movement is driven by baffle folding motor (34) and baffle rotary shaft (29)；Dark-field imaging system
(5) control lens barrier (27) is opened when acquiring image, and when lens barrier (27) moves to immediately ahead of right optoelectronic switch (30)
It triggers baffle folding motor (34) to stop, realizing the opening of lens barrier (27)；When dark-field imaging system (5) complete Image Acquisition
Afterwards, control lens barrier (27) moves to the front of zoom camera lens (25).
5. a kind of carry out optical element surface particulate matter on-line monitoring using the device any in the claims 2-4
Method, which is characterized in that the described method includes:
The angles and positions of the dark-ground illumination light source are adjusted, so that skimming over for the homogenizer of the dark-ground illumination light source is described
Optical mirror upper surface；
It controls the baffle folding motor and drives the lens barrier rotation, opened when the lens barrier moves to the right photoelectricity
When closing front, the baffle opens and closes motor stop motion, opens the lens barrier；
The engagement of the zoom pinion gear and the zoom gear wheel is driven by the zoom motor, and according to the clear of image
Focus motor described in extent control and the movement for focusing gear；
The dark-ground illumination light source is closed, the zoom camera lens is adjusted to minimum multiplying power, controlling the baffle folding motor will
The lens barrier moves to the front of the zoom camera lens；
Optical standard differentiation plate is placed in the visual field of the light field imaging system, adjusts the line focus axis to described
Black and white line is focused youngster on optical standard differentiation plate；
The particulate matter of the mirror surface is adjusted to the visual field of the light field imaging system by the linear displacement platform,
And the particulate matter of the mirror surface is adjusted in the depth of field face of the microlens by the line focus axis, it carries out
Line monitoring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610238030.5A CN105928949B (en) | 2016-04-18 | 2016-04-18 | The method of optical element surface particulate matter on-Line Monitor Device and its on-line monitoring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610238030.5A CN105928949B (en) | 2016-04-18 | 2016-04-18 | The method of optical element surface particulate matter on-Line Monitor Device and its on-line monitoring |
Publications (2)
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| CN106645197B (en) * | 2016-12-29 | 2024-01-30 | 中国工程物理研究院激光聚变研究中心 | Online detection system for detecting particles on surface of precision optical element and application method |
| CN108572126B (en) * | 2018-04-20 | 2020-06-30 | 中国科学院生态环境研究中心 | Particle-water interface water quality parameter in-situ measurement system |
| CN109092730B (en) * | 2018-10-24 | 2023-10-20 | 中国工程物理研究院激光聚变研究中心 | Device and method for on-line surface cleaning monitoring and treatment of optical element |
| CN111272771B (en) * | 2020-03-03 | 2023-03-31 | 中国科学院光电技术研究所 | High-resolution particle detection device |
| CN113790751B (en) * | 2021-08-10 | 2024-04-05 | 天津大学 | Illumination light source device with controllable flexible area |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103489809A (en) * | 2013-09-22 | 2014-01-01 | 上海华力微电子有限公司 | Defect detection system for particles on surface of wafer and working method of defect detection system |
| CN103630549A (en) * | 2009-01-13 | 2014-03-12 | 联达科技设备私人有限公司 | System and method for inspecting a wafer |
| WO2014057009A1 (en) * | 2012-10-10 | 2014-04-17 | Dürr Ecoclean GmbH | Determining the soiling of a workpiece |
| CN104101603A (en) * | 2013-04-12 | 2014-10-15 | 宝山钢铁股份有限公司 | Device and method for detecting surface defect on strip steel |
| CN104897693A (en) * | 2015-06-12 | 2015-09-09 | 武汉中导光电设备有限公司 | Glass surface defect enhancement device and detection method thereof |
-
2016
- 2016-04-18 CN CN201610238030.5A patent/CN105928949B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103630549A (en) * | 2009-01-13 | 2014-03-12 | 联达科技设备私人有限公司 | System and method for inspecting a wafer |
| WO2014057009A1 (en) * | 2012-10-10 | 2014-04-17 | Dürr Ecoclean GmbH | Determining the soiling of a workpiece |
| CN104101603A (en) * | 2013-04-12 | 2014-10-15 | 宝山钢铁股份有限公司 | Device and method for detecting surface defect on strip steel |
| CN103489809A (en) * | 2013-09-22 | 2014-01-01 | 上海华力微电子有限公司 | Defect detection system for particles on surface of wafer and working method of defect detection system |
| CN104897693A (en) * | 2015-06-12 | 2015-09-09 | 武汉中导光电设备有限公司 | Glass surface defect enhancement device and detection method thereof |
Non-Patent Citations (2)
| Title |
|---|
| 基于机器视觉的大口径光学元件表面损伤检测技术研究进展;陶显 等;《第三十三届中国控制会议论文集（B卷）》;20140730;第2935-2940页 * |
| 显微视觉系统对柱状微零件自动聚焦技术研究;罗李焱 等;《计算机工程与应用》;20141231;第122-126、142页 * |
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