CN106645197B - Online detection system for detecting particles on surface of precision optical element and application method - Google Patents
Online detection system for detecting particles on surface of precision optical element and application method Download PDFInfo
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- 230000003287 optical effect Effects 0.000 title claims abstract description 195
- 239000002245 particle Substances 0.000 title claims abstract description 151
- 238000001514 detection method Methods 0.000 title claims abstract description 59
- 238000000034 method Methods 0.000 title claims abstract description 45
- 238000003384 imaging method Methods 0.000 claims abstract description 72
- 238000004891 communication Methods 0.000 claims abstract description 7
- 230000007246 mechanism Effects 0.000 claims description 40
- 238000012937 correction Methods 0.000 claims description 13
- 238000012545 processing Methods 0.000 claims description 13
- 239000013618 particulate matter Substances 0.000 claims description 11
- 238000005286 illumination Methods 0.000 claims description 9
- 238000000429 assembly Methods 0.000 claims description 6
- 230000000712 assembly Effects 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims description 5
- 238000005452 bending Methods 0.000 claims description 4
- 230000008676 import Effects 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 230000000052 comparative effect Effects 0.000 claims description 2
- 238000012544 monitoring process Methods 0.000 abstract description 6
- 230000000694 effects Effects 0.000 description 15
- 238000012986 modification Methods 0.000 description 12
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- 230000006870 function Effects 0.000 description 10
- 231100000719 pollutant Toxicity 0.000 description 10
- 238000009826 distribution Methods 0.000 description 9
- 238000005259 measurement Methods 0.000 description 8
- 239000007787 solid Substances 0.000 description 8
- 230000003749 cleanliness Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000011897 real-time detection Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
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- 238000002407 reforming Methods 0.000 description 2
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- 239000013598 vector Substances 0.000 description 2
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- 238000011179 visual inspection Methods 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
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- 238000005516 engineering process Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- G01N21/94—Investigating contamination, e.g. dust
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Abstract
The invention discloses an online detection system for detecting particles on the surface of a precision optical element, which comprises the following components: the top of the box body is provided with a light inlet for laser to enter; an optical element disposed inside the case; wherein 2 linear light sources are oppositely arranged above the edge of the mirror frame of the optical element; an optical microscopic imaging device is arranged on one side of the box body; the imaging device realizes on-line detection of the particles on the surface of the optical element through an upper computer which is in communication connection with the imaging device. The invention provides an online detection system for detecting particles on the surface of a precise optical element, which can realize online monitoring of the particles on the surface of the optical element in an optical machine device through the cooperation of the optical element and a linear light source and the cooperation of an upper computer and an optical microscopic imaging device, and can provide clean state information on the surface of the optical element in real time with high efficiency and high precision. The invention provides a method for applying a detection system.
Description
Technical Field
The invention relates to a detection system combining detection measurement and image processing. More particularly, the invention relates to an on-line detection system and an application method for the state of particulate pollutants of a large-caliber optical element used in an optical mechanical system.
Background
During operation of an optical-mechanical system, the surface of the optical element is subject to various contaminations due to the influence of the operating environment, which are mainly caused by tiny particle residues in the environment and damage to the surface of the optical element caused by the high-power laser beam. Meanwhile, after the optical mechanical system operates for a period of time, solid particles are retained on the surface of the precision optical element, new particle pollution is generated by defects on the surface of the optical element after the optical element is irradiated by laser for many times, the clean state of the surface is critical to the safe operation of the system, so that the solid particles on the surface of the element are required to be detected, and for the optical element in the optical mechanical system, the solid particles are one of the key factors influencing the normal operation of the optical element, so that the detection of the particle pollutants on the surface of the large-caliber optical element is imperative.
In terms of nondestructive detection and identification of surface cleanliness, the methods mainly adopted at present are as follows: visual inspection, weighing, particle count detection, sonic detection, infrared spectroscopy detection, machine vision based detection, and the like. Wherein the visual inspection method and the weighing method are conventional methods specified in national standards and national army standards. The NIF adopts an indirect measurement method, a special cleaning liquid is used for flushing the optical surface with a certain area, and filter paper is used for collecting solid particles in the cleaning liquid to obtain the size and the quantity of the solid particles, and the surface cleanliness is indirectly represented; the real-time detection method based on sound waves is that pulse YAG laser is emitted to a detection surface, sound waves with specific frequency bands are generated when particle pollutants exist, and the sound waves are analyzed to obtain the size and the distribution of the corresponding particle matters; the infrared spectrum detection method is to compare the detected infrared reflection spectrum density distribution of the surface of the actual optical element with a series of samples of infrared reflection spectrum density distribution of different pollutants to judge the type and distribution of the pollutants; the three schemes respectively have the problems of high cost, low precision, low efficiency, difficult detection and the like to different degrees, and particularly in the aspect of efficiency, a large number of large-caliber optical elements of various types exist in an optical-mechanical system, and the detection efficiency is greatly reduced due to low detection speed, so that the use of the system is influenced.
The utility model provides a precision optics component surface cleanliness factor detecting system that Chongqing university was built, has put forward the image detection system based on machine vision method, has designed movable clamp and three-dimensional automatically controlled platform that is applicable to the component that waits to detect of multiple size. Dividing the edge of the detected object by using an edge detection operator, obtaining a closed area of the detected object by using a convex hull method, analyzing vectors to be detected formed by geometric space, gray space and transformation domain space parameters of the closed area of the detected object by using a correlation vector machine method, identifying solid particle residues and non-solid particle residues, and finally obtaining the cleanliness grade of the surface of the precision optical element. However, the system can only realize off-line measurement of the optical element, the optical element may generate new particle pollution in the process of carrying, the off-line system cannot display the state of the particle pollutant when the optical element operates, and the algorithm is complex and the application effect is general.
In a word, some progress has been made in the research work of detecting optical elements at home and abroad, but these technologies have not been capable of detecting the state of optical elements on line, and cannot measure the surface cleanliness of optical elements with high efficiency and high precision.
Disclosure of Invention
It is an object of the present invention to address at least the above problems and/or disadvantages and to provide at least the advantages described below.
The invention also aims to provide an online detection system for detecting the particles on the surface of the precise optical element, which can realize online monitoring of the particles on the surface of the optical element in the optical machine device through the cooperation of the optical element and a linear light source and the cooperation of an upper computer and an optical microscopic imaging device, and can provide the clean state information of the surface of the optical element in real time with high efficiency and high precision.
It is still another object of the present invention to provide a method for applying the detection system, which implements real-time detection analysis operation of particle contaminant parameter information of the surface of the optical element to be detected through correction of internal parameters of the optical microscopic imaging device and modeling of particle parameters of the standard plate, so as to display the state of the particle contaminant when the optical element is operated in real time through the upper computer.
To achieve these objects and other advantages and in accordance with the purpose of the invention, there is provided an in-line inspection system for inspecting particles on a surface of a precision optical element, comprising:
the top of the box body is provided with a light inlet for laser to enter;
the optical element is arranged in the box body and forms an included angle of 45 degrees with an incident light path of the laser so as to reflect the incident light path out of the box body;
wherein, the upper part of the rim edge of the optical element is oppositely provided with 2 linear light sources for symmetrically polishing the surface of the optical element;
an optical microscopic imaging device with a shooting angle perpendicular to the surface of the optical piece is arranged on one side of the box body;
the imaging device realizes on-line detection of the particles on the surface of the optical element through an upper computer which is in communication connection with the imaging device.
Preferably, the method includes: each of the line sources is in turn connected to the optical element by two clamping assemblies arranged in a removable opposite manner.
Preferably, each of the clamping assemblies includes:
a clamping mechanism matched with the optical element mirror frame;
the supporting mechanism is arranged on the clamping mechanism and matched with the linear light source;
the free end of the connecting piece is provided with an angle rotating mechanism, and the linear light source is provided with a connecting piece matched with the angle rotating mechanism so as to adjust the emergent light of the linear light source to be relatively parallel to the surface of the optical element through the angle rotating mechanism.
Preferably, the support mechanism includes:
a fixing part matched with the clamping mechanism;
the supporting part is sleeved in the fixing part and can stretch along the length direction of the fixing part;
the support part is provided with a through groove at one end close to the fixed end, a U-shaped groove matched with the angle rotating mechanism is arranged at the other end, and a first adjusting hole matched with the through groove is arranged on the fixed part to adjust the telescopic length of the support part;
the angle rotation mechanism includes:
a T-shaped connecting part matched with the connecting piece;
a flat fixing part arranged at one end of the T-shaped connecting part and matched with the U-shaped groove;
wherein, be provided with at least one on the supporting part to the second regulation hole of linear light source deflection angle is adjusted.
Preferably, the box body is provided with a mounting window matched with the optical microscopic imaging device;
the mounting window comprises an observation lens barrel extending into the box body and a bending part arranged at one end of the observation lens barrel and connected with the box body in a matching way;
one end of a lens of the optical microscopic imaging device extends into the observation lens barrel, and the other end of the lens of the optical microscopic imaging device is connected with the outer side wall of the box body through a fixing plate;
the end planes of the observation lens barrel and the lens, which face one end of the optical element, are configured to be parallel to the surface of the optical element, so that the barrel axes of the observation lens barrel and the lens are perpendicular to the surface of the optical element.
Preferably, the method further comprises: the optical microscopic imaging device is in communication connection with the upper computer through a control box.
The object of the invention is also achieved by a method for applying a detection system, comprising:
firstly, correcting and adjusting internal parameters of an optical microscopic imaging device by adopting an upper computer to obtain corresponding distortion parameters;
modeling the relation between the pixels of the particle image in the standard plate and the actual size of the particles by the upper computer through the standard plate with the particles of different sizes to obtain a model function between the pixels of the particle image and the actual size of the particles;
thirdly, adjusting and focusing the magnification of the optical microscopic imaging device through detection software in the upper computer so as to obtain a clear gray level picture of particles on the surface of the optical element to be detected through the optical microscopic imaging device, and storing the clear gray level picture into the upper computer;
and step four, the detection software imports the stored gray level picture, carries out distortion correction on the picture through the distortion parameters, and obtains the actual size of a certain particle on the surface of the optical element to be detected through model function operation so as to obtain corresponding parameter information related to the length, width, area and circumference of the particle.
Preferably, in the first step, the obtaining of the distortion parameter includes the steps of:
step S11: placing the checkered chessboard plane with black and white intervals into a detection system, and collecting images of the chessboard plane at different angles after focusing clearly;
step S12: according to the obtained images of the chessboard planes with different poses, an internal parameter model of the camera is obtained by using a plane camera parameter calibration method, and then corresponding distortion parameters are obtained;
in the second step, the obtaining of the model function includes the following steps:
s21: under the condition that the illumination conditions and the working distance of the image acquisition system are the same, placing a standard plate with typical particles with different sizes into a detection system, and obtaining particle images of the standard plate by referring to the methods from the third step to the fourth step;
s22: a local dynamic binarization method is used to obtain a binary image of the standard plate, and then the contour is extracted to obtain the pixel length and width of typical particles on the standard plate;
s23: placing a standard plate with typical particles under a measuring microscope, and measuring the actual length and width of the corresponding typical particles on the standard plate by using the measuring microscope;
s24: and (3) performing comparative modeling according to the actual length and width of the same particle and the length and width relation of the pixels obtained in S23 and S22 to obtain a model function between the two.
Preferably, in the third step, the vertical distance between the optical microscopic imaging device and the optical element to be measured is configured to be 430mm, and the magnification of the zoom lens in the optical microscopic imaging device is configured to be 0.055x-10.55x.
Preferably, the method further comprises:
step five, the detection system calculates the parameter information of each particle on the surface of the optical element to be detected to obtain particle statistical information matched with the particles on the surface of the optical element to be detected, and the particle statistical information is stored in an upper computer;
wherein the particle statistics include: the total number of particles on the surface of the optical element to be measured, the current situation and the dot-shaped particle number;
a linear shape the dot particle count is statistically calculated for (0-20 μm 20-50 μm 50-100 μm- ≡) each included in the interval and counting the number of particles and parameter information.
The invention at least comprises the following beneficial effects: firstly, the invention obtains better dark field gray level image through the matching of the linear light source and the surface of the optical element; the upper computer is matched with the optical microscopic imaging device, so that the on-line monitoring of the particle pollutants on the surface of the optical element in the optical device is realized, and the clean state information of the surface of the optical element is provided in real time with high efficiency and high precision.
Secondly, the invention enables the distance and the angle between the linear light source and the surface of the optical element to be adjustable through the clamping component arranged between the linear light source and the optical element mirror so as to adapt to the requirements of complex environment and high precision in actual use, and has the effects of good implementation effect, strong stability and good adaptability.
Thirdly, the invention obtains the installation window by reforming the monitoring window, so that the glass of the installation window is parallel to the surface of the optical element, and the working distance of the zoom lens is adapted by changing the distance between the glass of the installation window and the surface of the element, so that the invention has the effects of good adaptability, good stability and strong reliability.
Fourth, the invention also provides a method for applying the detection system of the linear light source, which realizes the real-time detection and analysis operation of the particle pollutant parameter information of the surface of the optical element to be detected by correcting the internal parameters of the optical microscopic imaging device and modeling the particle parameters of the standard plate, and the operation is easy to realize, and the state of the particle pollutant when the optical element operates is displayed in real time by the upper computer.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Drawings
FIG. 1 is a block diagram of an in-line detection system for detecting particulate matter on a surface of a precision optical element in accordance with one embodiment of the present invention;
FIG. 2 is a block diagram of the structure of the housing and internal components of the in-line inspection system in accordance with one embodiment of the present invention;
FIG. 3 is a block diagram of the support assembly of the in-line inspection system in accordance with one embodiment of the present invention;
FIG. 4 is a side view of FIG. 3;
FIG. 5 is a data processing flow diagram of distortion correction in an online detection system in accordance with one embodiment of the present invention;
FIG. 6 is a flow chart of data processing for local dynamic binarization in an on-line detection system in accordance with one embodiment of the present invention.
Detailed Description
The present invention is described in further detail below with reference to the drawings to enable those skilled in the art to practice the invention by referring to the description.
It will be understood that terms, such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
FIGS. 1-2 illustrate an implementation of an in-line inspection system for inspecting particulate matter on a surface of a precision optical element according to the present invention, comprising:
the box 1, its top has light entrance 10 for laser to enter, the large-caliber optical element is put in the box with detection window (optical microscopic imaging device), the main light path of the optical system is that the laser enters from the upper part of the box, reflects out of the box through the optical element;
the optical element 2 is arranged in the box body and forms an included angle of 45 degrees with an incident light path of the laser so as to reflect the incident light path out of the box body;
wherein, the upper part of the edge of the lens frame 20 of the optical element is oppositely provided with 2 line light sources 3 for symmetrically lighting the surface of the optical element, the optical element with an inclined angle of 45 degrees can form a dark field imaging system under the illumination of the oblique incident light of the two groups of line light sources, 2 line light sources are symmetrically arranged above the edge of the optical element lens frame, so that low-angle full-range symmetrical polishing of the optical element can be realized, and each line light source is configured to be strip-shaped and parallel to the upper surface of the optical element, so that surface particles of the optical element are ensured to be clearly displayed, and a dark field image with clear contrast is obtained;
an optical microscopic imaging device 4 with a shooting angle perpendicular to the surface of the optical piece is arranged on one side of the box body, the optical microscopic imaging device comprises a zoom lens 40 and a high-resolution CCD 41, the zoom range of the zoom lens is configured to be 0.055x-0.55x, in the actual imaging process, a lens with 0.055x magnification is used for particles with 100 mu m, particle pollution of an optical element can be detected in a full range, and a lens with 0.55x magnification is used for particles with 30 mu m. Normally, the pixel resolution achieved by a camera (video camera) under the minimum view (corresponding magnification is 0.55 x) is 17 μm, the pixel resolution achieved under the maximum view (corresponding magnification is 0.055 x) is 73 μm, but the pixel resolution achieved under the minimum view (corresponding magnification) is 10 μm because the dark field imaging system has scattering magnification effect on particle pollutants, and the particle with the actual size of about 10 μm can reach the size of 20 μm and above through the dark field imaging magnification;
the imaging device realizes on-line detection of the particles on the surface of the optical element through the upper computer 5 which is in communication connection with the imaging device. The method mainly uses the emergent light of the linear light source to be reflected by the clean surface of the ideal optical element and then not enter the lens, only forms scattering at the place polluted by the optical element, the scattered light enters the lens to form a brighter spot on the CCD target surface, if the optical element without particles is used as an object, a uniform dark field is obtained, and when dust exists on the surface of the optical element, the emergent light enters the objective lens to form an imaging light beam scattered by the dust. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, adaptations and/or modifications may be made according to user needs.
As shown in fig. 2, in another embodiment, it includes: each of said line sources is in turn connected to the optical element by means of two clamping assemblies 6 arranged in a removable opposite manner. The distance between the linear light source and the optical element can be adjusted by adopting the scheme, and the two linear light sources are supported at four points in space, so that the linear light sources have better stability and are beneficial to later maintenance and replacement. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, adaptations and/or modifications may be made according to user needs.
In another embodiment, as shown in fig. 3-4, each of the clamping assemblies includes:
a clamping mechanism 60, which is matched with the optical element lens frame, is configured into a U-shaped structure, and is also provided with a screw hole 601 for fixing the clamping mechanism on the lens frame;
a support mechanism 61 provided on the holding mechanism to cooperate with the line light source;
wherein the free end of the connector is provided with an angular rotation mechanism 62, and the linear light source is provided with a connector (not shown) cooperating with the angular rotation mechanism to adjust the outgoing light of the linear light source to be relatively parallel to the surface of the optical element by the angular rotation mechanism. The light source is located on the two sides of the optical element through the clamping mechanism, the surfaces of the optical element are symmetrically irradiated, and the line light source and the supporting mechanism are arranged in a mode of adjusting the angle according to the requirement in order to achieve a better illumination effect, so that the line light source can adapt to the actual use requirement, the flexible adjustment of the irradiation angle of the light source is achieved, and the device has the advantages of being good in adaptability, strong in implementation effect and good in stability. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, adaptations and/or modifications may be made according to user needs.
In another embodiment, as shown in fig. 3-4, the support mechanism includes:
a fixing portion 610 engaged with the clamping mechanism;
the supporting part 611 is sleeved in the fixing part and can stretch along the length direction of the fixing part, so that the heights of the linear light source and the surface of the optical element can be adjusted, and the linear light source and the surface of the optical element have better illumination effect;
wherein, the support part is provided with a through groove 612 near one fixed end, the other end is provided with a U-shaped groove 613 matched with the angle rotating mechanism, and the fixed part is provided with a first adjusting hole 614 matched with the through groove to adjust the telescopic length of the support part;
the angle rotation mechanism includes:
a T-shaped connection 620 for mating with the connector;
a flat fixing portion 621 provided at one end of the T-shaped connection portion to be fitted with the U-shaped groove;
wherein, at least one second adjusting hole 615 is provided on the supporting part to adjust the deflection angle of the linear light source. The technical scheme is adopted to provide a specific implementation mode of the line light source clamping mechanism required by dark field imaging, so as to provide an illumination light source for a precise optical element, facilitate detection of particle pollution on the surface of the element, enable the light source to be positioned on two sides of the optical element, symmetrically irradiate the surface of the element in a parallel lighting mode, realize dark field imaging in a vision system, realize flexible adjustment of the irradiation angle and the height of the line light source through the cooperation of the angle rotating mechanism and the supporting mechanism, and have the effect of adjusting the degree of freedom of the line light source by 2 degrees, so that the device is suitable for different use environments, achieves the best illumination effect, achieves the best dark field imaging effect, and has the advantages of good adaptability, good stability, strong implementation effect and strong operability. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, adaptations and/or modifications may be made according to user needs.
In another embodiment, as shown in fig. 1-2, the box is provided with a mounting window 7 matched with the optical microscopic imaging device;
the mounting window comprises an observation lens barrel 70 extending into the box body, and a bending part 71 arranged at one end of the observation lens barrel to be connected with the box body in a matching way, and the bending part is used for arranging the plane of the end of the observation lens barrel and the surface of the optical element in parallel;
one end of a lens of the optical microscopic imaging device extends into the observation lens barrel, and the other end of the lens of the optical microscopic imaging device is connected with the outer side wall of the box body through a fixing plate 8;
the end planes of the observation lens barrel and the lens, which face one end of the optical element, are configured to be parallel to the surface of the optical element, so that the barrel axes of the observation lens barrel and the lens are perpendicular to the surface of the optical element. The upper right side of the box body is provided with an observation window in the normal case, the white glass on the existing window forms an included angle of 45 degrees with the surface of the element, which is unfavorable for imaging of an imaging system, the installation window adopting the scheme is used for reforming the monitoring window, so that the window glass at the end of the observation lens barrel is parallel to the surface of the optical element, and the working distance between the monitoring window glass and the surface of the element can be adapted to the working distance of the varifocal lens. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, adaptations and/or modifications may be made according to user needs.
In another embodiment, the method further comprises: the optical microscopic imaging device is in communication connection with an upper computer through a control box 9. The scheme is adopted to transmit and transfer control signals through the control box, so that the workload of an upper computer is reduced, the working speed is improved, and the method has the advantages of good implementation effect, strong operability, good stability and high efficiency. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, adaptations and/or modifications may be made according to user needs.
The above solution may also be implemented by a method for applying a detection system, including:
firstly, correcting and adjusting internal parameters of an optical microscopic imaging device by adopting an upper computer to obtain corresponding distortion parameters, wherein the CCD acquires images with certain deviation, such as inclination, insufficient line continuity and the like, distortion correction is needed, and because an optical axis of the CCD is vertically arranged on the surface of an optical element, external parameters of a camera are fixed, only the distortion parameters in the internal parameters are required to be set, so that correction processing is needed to be carried out on pictures when image processing and measurement are carried out later;
modeling the relation between the pixels of the particle image in the standard plate and the actual size of the particles by the upper computer through the standard plate with the particles of different sizes to obtain a model function between the pixels of the particle image and the actual size of the particles;
thirdly, adjusting and focusing the magnification of the optical microscopic imaging device through detection software in the upper computer so as to obtain a clear gray level picture of particles on the surface of the optical element to be detected through the optical microscopic imaging device, and storing the gray level picture into the upper computer, wherein the detection system can observe an image of the whole area in a clear aperture of the optical element under the minimum magnification by using a lens with a large zoom ratio, measure the information such as the number and density distribution of all particles on the surface of the optical element, focus the particles in a specific area, and detect the size statistics rule of the particles in the area;
and step four, the detection software imports the stored gray level picture, carries out distortion correction on the picture through the distortion parameters, and obtains the actual size of a certain particle on the surface of the optical element to be detected through model function operation so as to obtain corresponding parameter information related to the length, width, area and circumference of the particle. In the third step of the scheme, before the detection of the particulate matters on the surface of the optical element to be detected, each firmware in the system is required to be adaptively adjusted, and the specific operation mainly comprises the following steps:
step S31: the mechanism 3 in the light source support rod is adjusted so that the light source is slightly higher than the surface of the optical element, and the light source support rod mechanism 1 is adjusted so that the emergent light of the light source is slightly parallel to the surface of the element.
Step S32: the retrofit window angle is mounted and adjusted such that the glass of the retrofit window is parallel to the optical element surface and the retrofit window cylinder axis is perpendicular to the optical element surface.
Step S33: the microimaging device is installed into the retrofit window.
Step S34: the light source is turned on, and the linear light source controller is adjusted so that the linear light source has high and constant brightness.
Step S35: the microscopic imaging device is connected with the control box, a CCD in the microscopic imaging device is connected with the control upper computer by using a network cable, and the control box is connected with the control upper computer by using a USB. And (5) opening a control box and a power supply of the microscopic imaging device.
The specific steps for detecting the particles on the surface of the optical element to be detected by using detection software in the upper computer include:
step S36: the surface particle detection system software of the optical element is turned on, the interface is shown in fig. 4, the camera button is clicked to be turned on, the area 1 in the interface is waited for displaying the surface image of the optical element, and the motor starts to initialize the button.
Step S37: entering an interface area 8, setting the magnification to be 0.055x, clicking a +/-button of a focusing control area until the image is clear, clicking a direct focusing button to obtain a clear image, clicking a button for storing the image, and storing the image into a hard disk of a computer.
Step S38: clicking a picture opening button, opening the stored picture, clicking a distortion correction button, correcting distortion parameters obtained by correcting parameters in the microscopic visual imaging device to correct distortion of the image, clicking an automatic processing button, measuring the actual size of an element by using a model obtained by modeling the relationship between the image pixels of the particles of the learning element and the actual size of the particles, displaying obtained result particle information in an interface area 7, and sorting according to the area from large to small, wherein each record comprises length, width, area and circumference.
The method mainly utilizes an optical element to form a dark field under the irradiation of parallel incident light of a low-angle symmetrical line light source, adjusts a zoom lens to a proper magnification, focuses and stores a gray level image captured by a high-resolution CCD, the gray level image is subjected to filtering (distortion correction) and dynamic local threshold processing (model parameters), a binary image is obtained to facilitate outline extraction, the obtained outline is obtained to be externally connected with a rectangle with minimum area, the size of particles and the spatial distribution and size distribution of particles are finally obtained, further, the on-line detection of particles on the surface of the optical element to be detected is realized through an upper computer, specifically, the system adopts a standard plate comparison method to realize the correct measurement of the size of the particles to be detected, a homogeneous optical element (with smaller volume and the same working distance of an image acquisition system) for calibration is arranged in the same detection system (with the same illumination condition at the moment), the actual size of particles is measured by using a measurement microscope, the image acquisition system is calculated, the size of the obtained particles after the outline is extracted, the two images are compared with the model F, the influence of noise brought by the background is avoided, the possible error of the on-line fitting is large, the model is good, the on-line fitting accuracy is realized, the method is easy, the on-line fitting accuracy is realized, the method is realized, the on-line fitting accuracy is good, the device is good, the on-line fitting accuracy is realized, the device is stable, and the on-line fitting accuracy is realized, and the device is better, and the on the condition. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, adaptations and/or modifications may be made according to user needs.
In another embodiment, in step one, the obtaining of the distortion parameter comprises the steps of:
step S11: placing a checkered chessboard plane with black and white intervals in a detection system, focusing clearly, and then collecting images of the checkered chessboard plane at different angles, wherein in the scheme, the checkered chessboard with black and white intervals is used as a calibration template to correct lens distortion, a geometric model of camera imaging is established by determining the conversion relation between physical dimensions and pixels and the three-dimensional geometric position of a certain point on the surface of a space object and the interrelation between the corresponding point in the images, and the geometric model of camera internal parameters can be obtained by shooting a pattern array plate with fixed spacing through a camera and calculating through a calibration algorithm, so that high-precision measurement and reconstruction results are obtained;
step S12: according to the obtained images of the chessboard planes with different poses, an internal parameter model of a camera is obtained by using a planar camera parameter calibration method, so that corresponding distortion parameters are obtained, the distortion parameters are obtained by adding and subtracting a compensation constant on the basis of the internal parameter model, the traditional camera calibration method is simple and practical, a calibration object with known size is needed, the internal and external parameters of the camera model are obtained by establishing the correspondence between the points with known coordinates on the calibration object and the image points of the calibration object and using a certain algorithm, the three-dimensional calibration object and the planar calibration object can be divided according to the differences of the calibration object, the three-dimensional calibration object can be calibrated by a single image, the calibration precision is higher, but the processing and maintenance of the high-precision three-dimensional calibration object are more difficult, and the planar calibration object is simpler to manufacture than the three-dimensional calibration object, and the precision is easy to ensure;
in the second step, the obtaining of the model function includes the following steps:
s21: under the condition that the illumination conditions and the working distance of the image acquisition system are the same, placing a standard plate with typical particles with different sizes into a detection system, and obtaining particle images of the standard plate by referring to the methods from the third step to the fourth step;
s22: the method is characterized in that a local dynamic binarization method is used to obtain a binary image of a standard plate, the outline is extracted to obtain the pixel length and width of typical particles on the standard plate, the inner wall of a box body is projected on an optical element due to higher brightness of a light source, a complex background is formed on a picture formed by a CCD, and therefore, the background and an object are separated by mistake by using a global threshold binarization method, so that the detection system uses the local dynamic binarization method to extract the characteristics of the outline, geometric dimension, gray scale, conversion space and the like of the particles after image binarization processing, and the pixel length and width which are relatively close to the actual dimension of the particles are further fitted;
s23: placing a standard plate with typical particles under a measuring microscope, and measuring the actual length and width of the corresponding typical particles on the standard plate by using the measuring microscope;
s24: and (3) comparing and modeling according to the actual length and width of the same particle and the length and width relation of the pixels obtained in the step (S23) and the step (S22), and obtaining a model function between the two, wherein the model function is simple and equivalent to multiplying a fixed coefficient, and the solid implementation effect is good. The data flow of distortion correction in the invention is shown in figure 5, the data processing flow of local dynamic binarization is shown in figure 6, after the distortion correction is carried out on the acquired picture, the acquired picture is operated with a model function in a standard plate by adopting the scheme, so that the particle parameter information with higher precision is obtained, and the method has the advantages of good implementation effect, stable detection precision and high precision. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, adaptations and/or modifications may be made according to user needs.
In another embodiment, in the third step, a vertical distance between the optical microscopic imaging device and the optical element to be measured is configured to be 430mm, and a magnification of a zoom lens in the optical microscopic imaging device is configured to be 0.055x-10.55x. By adopting the scheme, the vertical distance between the microscopic imaging device and the optical element to be measured and the size of the magnification are set, so that the microscopic imaging device has the advantages of higher measurement precision and better stability. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, adaptations and/or modifications may be made according to user needs.
In another embodiment, the method further comprises:
step five, the detection system calculates the parameter information of each particle on the surface of the optical element to be detected to obtain particle statistical information matched with the particles on the surface of the optical element to be detected, wherein the particle statistical information is used for counting the particle distribution information on the surface of the element in real time and is stored in an upper computer;
wherein the particle statistics include: the total number of particles on the surface of the optical element to be measured, the current situation and the dot-shaped particle number;
a linear shape the dot particle count is statistically calculated for (0-20 μm 20-50 μm 50-100 μm- ≡) each included in the interval and counting the number of particles and parameter information. By clicking the particle statistics and saving button in the detection software interface, the obtained particle statistics information can be saved in an Excel electronic table, wherein the total number of particles is displayed, and the current particle number and the dot particle number are displayed. The dot-shaped and linear particles respectively count the number of particles contained in each interval (0-20 mu m, 20-50 mu m, 50-100 mu m, 100 mu m-infinity), and the length, width, perimeter and area of each particle, so that the statistical analysis of all particle information of the optical element is realized, the optical element is more beneficial to more comprehensive cleaning and maintenance, and the working state of the optical element can be monitored in real time. And this is merely illustrative of a preferred embodiment and is not limited thereto. In practicing the present invention, adaptations and/or modifications may be made according to user needs.
The optical element in the detection system is positioned at the lower part of the sealed box body, the inclined 45 DEG upwards is realized, the reconstruction window is positioned at the upper part of the sealed box body, the window is opposite to the surface of the reflecting mirror, the microscopic vision imaging device is arranged in the reconstruction window, the imaging device is connected to the control box and the control upper computer, and the microscopic imaging device comprises a zoom lens and a high-resolution CCD.
The detection system for measuring the particle size distribution of the partial area of the surface under the high multiplying power mainly comprises the following steps:
step S41: the mechanism 3 in the light source support rod is adjusted so that the light source is slightly higher than the surface of the optical element, and the light source support rod mechanism 1 is adjusted so that the emergent light of the light source is slightly parallel to the surface of the element.
Step S42: the retrofit window angle is mounted and adjusted such that the glass of the retrofit window is parallel to the optical element surface and the retrofit window cylinder axis is perpendicular to the optical element surface.
Step S43: the microimaging device is installed into the retrofit window.
Step S44: the light source is turned on, and the linear light source controller is adjusted so that the linear light source has high and constant brightness.
Step S45: the microscopic imaging device is connected with the control box, a CCD in the microscopic imaging device is connected with the control upper computer by using a network cable, and the control box is connected with the control upper computer by using a USB. And (5) opening a control box and a power supply of the microscopic imaging device.
Step S46: the surface particle detection system software of the optical element is turned on, the interface is shown in fig. 4, the camera button is clicked to be turned on, the area 1 in the interface is waited for displaying the surface image of the optical element, and the motor starts to initialize the button.
Step S47: entering an interface area 8, setting the magnification to be 0.55x, clicking a +/-button of a focusing control area until the image is clear, clicking a direct focusing button to obtain the clear image, clicking a button for storing the image, and storing the image into a hard disk of a computer.
Step S48: clicking a picture opening button, opening the stored picture, clicking a distortion correction button, correcting distortion parameters obtained by correcting parameters in the microscopic visual imaging device to correct distortion of the image, clicking an automatic processing button, measuring the actual size of an element by using a model obtained by modeling the relationship between the image pixels of the particles of the learning element and the actual size of the particles, displaying obtained result particle information in an interface area 7, and sorting according to the area from large to small, wherein each record comprises length, width, area and circumference.
Step S49: clicking the particle statistics and saving button can save the obtained particle statistics information into an Excel electronic table, wherein the total number of particles is displayed, and the current particle number and the dot particle number are displayed. The dot-like and linear particles count the number of particles contained in each interval (0-20 mu m 20-50 mu m 50-100 mu m- ++) respectively, and the length, width, perimeter and area of each particle.
In the above steps, S41 to S44 are the steps of installing the symmetrical low-angle light source, S46 to S47 are the steps of capturing an image, and S48 to S49 are the steps of obtaining particle information using the captured image.
After the S41-S47 steps are completed, the specific image operation is carried out through a software interface, and the method mainly comprises the following steps:
step S51: the acquired image is opened, the software area 9 is entered, the histogram is clicked and displayed, and the pop-up window displays the histogram of the current image.
Step S52: clicking the histogram equalization button to obtain the result after the histogram equalization, and displaying the result in the area 1 in the interface.
Step S53, clicking the image subtracting button, popup selecting the subtracted image, and displaying the image subtracting result in the area 1.
Step S54: entering area 5, clicking manual measurement, then dragging left key in left area 1, and selecting the length to be measured.
And S55, clicking the local storage, dragging the left key in the left area 1, and selecting the local area to be stored by the rectangular frame.
And step S56, clicking the selected and enlarged part, dragging the left key in the left area 1, and selecting the local area to be displayed by the rectangular frame. The system detects particles on the surface of an optical element by using dark field imaging, the magnification of imaging in the system is not constant, and the influence of scattered light effects on the imaged size of particles is different for particles with different sizes, so that a nonlinear relation is presented.
The number of equipment and the scale of processing described herein are intended to simplify the description of the present invention. The application, modification and variation of the on-line detection system for detecting particulate matter on a surface of a precision optical element and the method of application thereof of the present invention will be apparent to those skilled in the art.
Although embodiments of the invention have been disclosed above, they are not limited to the use listed in the specification and embodiments. It can be applied to various fields suitable for the present invention. Additional modifications will readily occur to those skilled in the art. Therefore, the invention is not to be limited to the specific details and illustrations shown and described herein, without departing from the general concepts defined in the claims and their equivalents.
Claims (5)
1. An on-line detection system for detecting particulate matter on a surface of a precision optical element, comprising:
the top of the box body is provided with a light inlet for laser to enter;
the optical element is arranged in the box body and forms an included angle of 45 degrees with an incident light path of the laser so as to reflect the incident light path out of the box body;
wherein, the upper part of the rim edge of the optical element is oppositely provided with 2 linear light sources for symmetrically polishing the surface of the optical element;
an optical microscopic imaging device with a shooting angle perpendicular to the surface of the optical piece is arranged on one side of the box body;
the imaging device realizes on-line detection of the particles on the surface of the optical element through an upper computer which is in communication connection with the imaging device;
the box body is provided with a mounting window matched with the optical microscopic imaging device;
the mounting window comprises an observation lens barrel extending into the box body and a bending part arranged at one end of the observation lens barrel and connected with the box body in a matching way;
one end of a lens of the optical microscopic imaging device extends into the observation lens barrel, and the other end of the lens of the optical microscopic imaging device is connected with the outer side wall of the box body through a fixing plate;
the end plane of the observation lens barrel and the end plane of the lens, which faces one end of the optical element, are configured to be parallel to the surface of the optical element, so that the barrel axes of the observation lens barrel and the lens are perpendicular to the surface of the optical element;
further comprises: the optical microscopic imaging device is in communication connection with the upper computer through a control box;
a method of applying a detection system, comprising:
firstly, correcting and adjusting internal parameters of an optical microscopic imaging device by adopting an upper computer to obtain corresponding distortion parameters;
modeling the relation between the pixels of the particle image in the standard plate and the actual size of the particles by the upper computer through the standard plate with the particles of different sizes to obtain a model function between the pixels of the particle image and the actual size of the particles;
thirdly, adjusting and focusing the magnification of the optical microscopic imaging device through detection software in the upper computer so as to obtain a clear gray level picture of particles on the surface of the optical element to be detected through the optical microscopic imaging device, and storing the clear gray level picture into the upper computer;
step four, the detection software imports the stored gray level picture, carries out distortion correction on the picture through the distortion parameters, and obtains the actual size of a certain particle on the surface of the optical element to be detected through model function operation so as to obtain corresponding parameter information related to the length, width, area and circumference of the particle;
in step one, the obtaining of the distortion parameters comprises the steps of:
step S11: placing the checkered chessboard plane with black and white intervals into a detection system, and collecting images of the chessboard plane at different angles after focusing clearly;
step S12: according to the obtained images of the chessboard planes with different poses, an internal parameter model of the camera is obtained by using a plane camera parameter calibration method, and then corresponding distortion parameters are obtained;
in the second step, the obtaining of the model function includes the following steps:
s21: under the condition that the illumination conditions and the working distance of the image acquisition system are the same, placing a standard plate with typical particles with different sizes into a detection system, and obtaining particle images of the standard plate by referring to the methods from the third step to the fourth step;
s22: a local dynamic binarization method is used to obtain a binary image of the standard plate, and then the contour is extracted to obtain the pixel length and width of typical particles on the standard plate;
s23: placing a standard plate with typical particles under a measuring microscope, and measuring the actual length and width of the corresponding typical particles on the standard plate by using the measuring microscope;
s24: performing comparative modeling according to the actual length and width of the same particle and the length and width relation of pixels obtained in S23 and S22 to obtain a model function between the two;
in the online detection system, the data processing flow for carrying out distortion correction and local dynamic binarization comprises the following steps:
converting 8-bit single-channel data into floating point data;
calculating the gradient value of each pixel, taking the M-N field of each pixel, and calculating the sum averD of the gradient values of all the pixels in the field;
calculating the sum aver of the products of gradient values and gray values of all points in the field to obtain a threshold value aver/averD;
binarizing each pixel according to a threshold value;
further comprises:
step five, the detection system calculates the parameter information of each particle on the surface of the optical element to be detected to obtain particle statistical information matched with the particles on the surface of the optical element to be detected, and the particle statistical information is stored in an upper computer;
wherein the particle statistics include: the total number of particles on the surface of the optical element to be measured, the current situation and the dot-shaped particle number;
linear and punctiform particlesThe statistical count is toAnd counting the number of each particle and parameter information contained in the interval section.
2. An in-line detection system for detecting particulate matter on a surface of a precision optical element as recited in claim 1, comprising: each of the line sources is in turn connected to the optical element by two clamping assemblies arranged in a removable opposite manner.
3. An in-line inspection system for detecting particulate matter on a surface of a precision optical element as recited in claim 2, wherein each of the clamping assemblies comprises:
a clamping mechanism matched with the optical element mirror frame;
the supporting mechanism is arranged on the clamping mechanism and matched with the linear light source;
the linear light source is provided with a connecting piece matched with the angle rotating mechanism, and the free end of the connecting piece is provided with the angle rotating mechanism so as to adjust the emergent light of the linear light source to be relatively parallel to the surface of the optical element through the angle rotating mechanism.
4. An in-line detection system for detecting particulate matter on a surface of a precision optical element as recited in claim 3, wherein the support mechanism comprises:
a fixing part matched with the clamping mechanism;
the supporting part is sleeved in the fixing part and can stretch along the length direction of the fixing part;
the support part is provided with a through groove at one end close to the fixed end, a U-shaped groove matched with the angle rotating mechanism is arranged at the other end, and a first adjusting hole matched with the through groove is arranged on the fixed part to adjust the telescopic length of the support part;
the angle rotation mechanism includes:
a T-shaped connecting part matched with the connecting piece;
a flat fixing part arranged at one end of the T-shaped connecting part and matched with the U-shaped groove;
wherein, be provided with at least one on the supporting part to the second regulation hole of linear light source deflection angle is adjusted.
5. The on-line detecting system for detecting surface particles of a precision optical element according to claim 3, wherein in the third step, the vertical distance between the optical microscopic imaging device and the optical element to be detected is set to 430mm, and the magnification of the zoom lens in the optical microscopic imaging device is set to 0.055x-10.55x.
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