CN104019764B - 2 × 2 array light source scan-type surface shape measurement optical system scaling methods - Google Patents
2 × 2 array light source scan-type surface shape measurement optical system scaling methods Download PDFInfo
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- CN104019764B CN104019764B CN201410279851.4A CN201410279851A CN104019764B CN 104019764 B CN104019764 B CN 104019764B CN 201410279851 A CN201410279851 A CN 201410279851A CN 104019764 B CN104019764 B CN 104019764B
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Abstract
A kind of open 2 × 2 array light source scan-type surface shape measurement optical system caliberating device and the methods of the present invention, it is characterised in that comprise the following steps: assembling scan-type surface shape measurement optical system and calibrating platform；Starting laser instrument (1), four bundle directional lights invest described calibrating platform；Adjust on described calibrating platform；According to the single actuations step number driving total step number to set mark laser instrument (1)；Complete CCD data line collection；Complete CCD imaging region-wide row, column data acquisition；Complete the angle calibration in optical system test dynamic range.Its remarkable result is: the method is while simplied system structure, it is possible to increase the measurement efficiency of original system, improves the ability of face, surface shape on-line checking further.
Description
Technical field
The invention belongs to machine vision technique detection field, be specifically related to a kind of 2 × 2 array light source scan-type surface shape measurement optical system scaling methods.
Background technology
Improve 2 × 2 scan-type surface shape measurement optical system measuring methods at present to have: Light path correction method and system calibrating method.Incident angle of light skew in scanning process, by adding light beam fine adjustment stage in the optical path, is modified so that reference light can be along backtracking, and the method has formed patent of invention by Light path correction method.
But this kind of method all increases micro-adjusting mechanism, in use, the error of micro-adjusting mechanism itself and use, the most easily causes measurement error, reduce optical system number surface shape measurement and fitting precision.
Summary of the invention
This purpose of the present invention relates generally to a kind of array light source scan-type surface shape measurement optical system scaling method, its design utilizes 2 × 2 array image-forming points to obtain, with reference to the demarcation of self-reference principle, the nonlinearity erron that optical system test object partial face shape graded introduces mutually, to full filed scope measurement data correction, thus improve optical system number surface shape measurement and fitting precision.
For reaching above-mentioned purpose, the present invention states a kind of 2 × 2 array light source scan-type surface shape measurement optical system scaling methods, it is characterised in that comprise the following steps:
Step one, after assembling scan-type surface shape measurement optical system, arranging calibrating platform on the emitting light path of scan-type surface shape measurement optical system, the directional light that scan-type surface shape measurement optical system penetrates can be returned described scan-type surface shape measurement optical system along former road reflected in parallel by this calibrating platform；
Step 2, the laser instrument (1) started in described scan-type surface shape measurement optical system, preheat 30 minutes, the most collimated system of light (2) collimation that laser instrument (1) sends, then enter beam-expanding system (4) by spectroscope (3) to expand, light beam after wedge mirror group (5) will expand is divided into four bundle directional lights and penetrates from scan-type surface shape measurement optical system, and invests described calibrating platform；
Step 3, adjust precise 2-D beat platform (8) on described calibrating platform, the fixture (7) being fixed on precise 2-D beat platform (8) moves, the reflecting mirror (6) making fixture (7) clamp is vertical with scan-type surface shape measurement optical system, after reflecting mirror (6) reflection four bundle directional light passes sequentially through wedge mirror group (5) and beam-expanding system (4), after spectroscope (3) is refracted to pentaprism (9), again by imaging len (10) in the upper imaging of CCD (11), in the image that CCD (11) observes, four hot spots are positioned at the center of image；
Step 4, driving step number according to the angle of visual field range set calibrating platform of scan-type surface shape measurement optical system；The single actuations step number of laser instrument (1) in scan-type surface shape measurement optical system is set according to the fine degree driven required for step number；
CCD gathers the required step number driven of a row or column data to drive step number to refer to, single actuations step number can be set as 1～3 pixel, the pixel of single actuations step number is the fewest, and fine degree is the highest, and fine degree correspond to the single actuations step number of a pixel.
Step 5, any one determined in four hot spots are for reference to hot spot, drive the piezoelectric ceramics mechanism on precise 2-D beat platform (8), making to change with reference to facula position, record, with reference to facula position and four facula position relative variations, completes CCD data line collection；
Step 6, repetition step 3, to step 5, complete CCD imaging region-wide row, column data acquisition, can realize the angle calibration in scan-type surface shape measurement optical system test dynamic range according to imaging facula position and relativeness.
Described angle calibration is the result according to image imaging, in each image, the center of that hot spot of the left side is as reference, calculate center and the relation with reference to hot spot center of other three hot spots, formula (1a) and (1b) can be used to represent:
Δxni=xni-xn1-Δxi0-----------------------------(1a)
Δyni=yni-yn1-Δyi0-----------------------------(1b)
I=2,3,4 in formula, represent other three hot spots in addition to reference to hot spot, Δ x in imagei0Represent that ideally i-th hot spot x coordinate is poor with reference to hot spot x coordinate, Δ yi0Represent ideally i-th hot spot y-coordinate with reference to hot spot y-coordinate poor, n=1,2,3..., represent the n-th width image, xn1Represent the x coordinate with reference to hot spot, y in the n-th width imagen1Represent the y-coordinate with reference to hot spot, x in the n-th width imageniRepresent in the n-th width image except with reference to the x coordinate of other hot spots, y in addition to hot spotniRepresent in the n-th width image except with reference to the y-coordinate of other hot spots, Δ x in addition to hot spotniRepresent i-th hot spot x coordinate and the poor correction value with reference to hot spot x coordinate, Δ y in the n-th width imageniRepresent i-th hot spot y-coordinate and the poor correction value with reference to hot spot y-coordinate in the n-th width image；
After having processed, the x coordinate with each image reference hot spot is transverse axis, and y-coordinate is the longitudinal axis, and correction value process obtained makes correction card, for table look-up when measuring correction, or interpolation calculation correction.
The remarkable result of the present invention is: system calibrating method is by analyzing error Producing reason in the shape test process of scan-type face, show that system accuracy becomes the conclusion of nonlinear function with test object partial face shape gradient, for 2 × 2 array scanning formula scan modes, propose reference mutually and self-reference scaling method, and design its special calibrating device, it is achieved that optical system test scope overall situation Accurate Calibration.Therefore when measuring, test data can be modified, improve the precision of systematic survey.
The method is while simplied system structure, it is possible to increase the measurement efficiency of original system, improves the ability of face, surface shape on-line checking further.
Accompanying drawing explanation
Fig. 1 is the demarcation schematic diagram of the present invention；
Fig. 2 is imaging facula distribution schematic diagram；
Fig. 3 is the method step figure of the present invention.
Detailed description of the invention
With specific embodiment, the present invention is described in further detail below in conjunction with the accompanying drawings.
As shown in Figure 3: a kind of 2 × 2 array light source scan-type surface shape measurement optical system scaling methods, it is characterised in that comprise the following steps:
Step one, after assembling scan-type surface shape measurement optical system, arranging calibrating platform on the emitting light path of scan-type surface shape measurement optical system, the directional light that scan-type surface shape measurement optical system penetrates can be returned described scan-type surface shape measurement optical system along former road reflected in parallel by this calibrating platform；
Step 2, the laser instrument 1 started in described scan-type surface shape measurement optical system, preheat 30 minutes, the most collimated system of light 2 that laser instrument 1 sends collimates, then enter beam-expanding system 4 by spectroscope 3 to expand, light beam after wedge mirror group 5 will expand is divided into four bundle directional lights and penetrates from scan-type surface shape measurement optical system, and invests described calibrating platform；
Step 3, the precise 2-D beat platform 8 adjusted on described calibrating platform, the fixture 7 being fixed on precise 2-D beat platform 8 moves, the reflecting mirror 6 making fixture 7 clamp is vertical with scan-type surface shape measurement optical system, reflecting mirror 6 reflects after four bundle directional lights pass sequentially through wedge mirror group 5 and beam-expanding system 4, after spectroscope 3 is refracted to pentaprism 9, again by imaging len 10 imaging on CCD11, in the image that CCD11 observes, four hot spots are positioned at the center of image；
Step 4, driving step number according to the angle of visual field range set calibrating platform of scan-type surface shape measurement optical system；The single actuations step number of laser instrument 1 in scan-type surface shape measurement optical system is set according to the fine degree driven required for step number；
Step 5, any one determined in four hot spots are for reference to hot spot, drive the piezoelectric ceramics mechanism on precise 2-D beat platform 8, making to change with reference to facula position, record, with reference to facula position and four facula position relative variations, completes CCD data line collection；
Step 6, repetition step 3, to step 5, complete CCD imaging region-wide row, column data acquisition, it is achieved the angle calibration in scan-type surface shape measurement optical system test dynamic range.
Described angle calibration is the result according to image imaging, and in each image, the center of that hot spot of the left side is as reference, calculates center and the relation with reference to hot spot center of other three hot spots, can represent with formula 1a and 1b:
Δxni=xni-xn1-Δxi0-----------------------------1a
Δyni=yni-yn1-Δyi0-----------------------------1b
I=2,3,4 in formula, represent other three hot spots in addition to reference to hot spot, Δ x in imagei0Represent that ideally i-th hot spot x coordinate is poor with reference to hot spot x coordinate, Δ yi0Represent ideally i-th hot spot y-coordinate with reference to hot spot y-coordinate poor, n=1,2,3..., represent the n-th width image, xn1Represent the x coordinate with reference to hot spot, y in the n-th width imagen1Represent the y-coordinate with reference to hot spot, x in the n-th width imageniRepresent in the n-th width image except with reference to the x coordinate of other hot spots, y in addition to hot spotniRepresent in the n-th width image except with reference to the y-coordinate of other hot spots, Δ x in addition to hot spotniRepresent i-th hot spot x coordinate and the poor correction value with reference to hot spot x coordinate, Δ y in the n-th width imageniRepresent i-th hot spot y-coordinate and the poor correction value with reference to hot spot y-coordinate in the n-th width image；
After having processed, the x coordinate with each image reference hot spot is transverse axis, and y-coordinate is the longitudinal axis, and correction value process obtained makes correction card, for table look-up when measuring correction, or interpolation calculation correction.
Correction card is as follows:
。
Error correction:
During tested planar optical elements is measured by scan-type surface shape measurement optical system, according to the position enquiring correction card of first hot spot, if the center of first hot spot does not has at correction card, then carry out interpolation calculation.Obtain the optical system error value in this width image and the center of other three hot spots is modified, by the center calculating measured point direction of normal of revised 4 hot spots the face shape that obtained tested planar optical elements by the reconstruct of face shape.
Claims (2)
1. an array light source scan-type surface shape measurement optical system scaling method, it is characterised in that bag
Include following steps:
Step one, after assembling scan-type surface shape measurement optical system, in scan-type surface shape measurement optical system
Arranging calibrating platform on the emitting light path of system, scan-type surface shape measurement optical system can be penetrated by this calibrating platform
Directional light return described scan-type surface shape measurement optical system along former road reflected in parallel；
Step 2, the laser instrument (1) started in described scan-type surface shape measurement optical system, preheat 30 points
Clock, the most collimated system of light (2) collimation that laser instrument (1) sends, is then entered by spectroscope (3)
Entering beam-expanding system (4) to expand, the light beam after wedge mirror group (5) will expand is divided into four bundle directional lights from sweeping
Retouch the injection of formula surface shape measurement optical system, and invest described calibrating platform；
Step 3, precise 2-D beat platform (8) adjusted on described calibrating platform, be fixed on precise 2-D
Fixture (7) on beat platform (8) moves, and makes reflecting mirror (6) that fixture (7) clamps and sweeps
Retouching formula surface shape measurement optical system vertical, reflecting mirror (6) reflection four bundle directional light passes sequentially through wedge mirror group (5)
After beam-expanding system (4), after spectroscope (3) is refracted to pentaprism (9), then by imaging len (10)
In the upper imaging of CCD (11), in the image that CCD (11) observes, four hot spots are positioned at the center of image；
Step 4, driving according to the angle of visual field range set calibrating platform of scan-type surface shape measurement optical system
Step number；Laser instrument in scan-type surface shape measurement optical system is set according to the fine degree driven required for step number
(1) single actuations step number；
Step 5, any one determined in four hot spots, for reference to hot spot, drive precise 2-D beat platform
(8) the piezoelectric ceramics mechanism on, makes to change with reference to facula position, record reference facula position and four
Facula position relative variation, completes CCD data line collection；
Step 6, repetition step 3, to step 5, complete CCD imaging region-wide row, column data acquisition, real
Angle calibration in existing scan-type surface shape measurement optical system test dynamic range.
2 × 2 array light source scan-type surface shape measurement optical system scaling method the most according to claim 1,
It is characterized in that: described angle calibration is the result according to image imaging, with that light of the left side in each image
The center of speckle is reference, calculates center and the pass with reference to hot spot center of other three hot spots
System, can use formula (1a) and (1b) to represent:
Δxni=xni-xn1-Δxi0-----------------------------(1a)
Δyni=yni-yn1-Δyi0-----------------------------(1b)
I=2,3,4 in formula, represent other three hot spots in addition to reference to hot spot, Δ x in imagei0Represent ideal
Under state, i-th hot spot x coordinate is poor with reference to hot spot x coordinate, Δ yi0Represent ideally i-th light
Speckle y-coordinate with reference to hot spot y-coordinate poor, n=1,2,3..., represent the n-th width image, xn1Represent n-th
With reference to the x coordinate of hot spot, y in width imagen1Represent the y-coordinate with reference to hot spot, x in the n-th width imageniRepresent the
Except with reference to the x coordinate of other hot spots, y in addition to hot spot in n width imageniRepresent in the n-th width image except with reference in addition to hot spot
The y-coordinate of other hot spots, Δ xniRepresent that in the n-th width image, i-th hot spot x coordinate is sat with reference to hot spot x
Target difference correction value, Δ yniRepresent i-th hot spot y-coordinate and reference hot spot y-coordinate in the n-th width image
Difference correction value；
After having processed, the x coordinate with each image reference hot spot is transverse axis, and y-coordinate is the longitudinal axis, will process
To correction value make correction card, for tabling look-up correction, or interpolation calculation correction when measuring.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1371939A1 (en) * | 2002-05-15 | 2003-12-17 | Icos Vision Systems N.V. | A device for measuring in three dimensions a topographical shape of an object |
| CN102322820A (en) * | 2011-09-14 | 2012-01-18 | 西南科技大学 | Automatic separation method for front and rear surface reflected light spots in surface shape detection system |
| CN103245303A (en) * | 2013-05-17 | 2013-08-14 | 中国工程物理研究院激光聚变研究中心 | Multi-pose large-caliber plane optical element surface shape detecting device and method |
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| JP2008256464A (en) * | 2007-04-03 | 2008-10-23 | Nikon Corp | Measurement apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1371939A1 (en) * | 2002-05-15 | 2003-12-17 | Icos Vision Systems N.V. | A device for measuring in three dimensions a topographical shape of an object |
| CN102322820A (en) * | 2011-09-14 | 2012-01-18 | 西南科技大学 | Automatic separation method for front and rear surface reflected light spots in surface shape detection system |
| CN103245303A (en) * | 2013-05-17 | 2013-08-14 | 中国工程物理研究院激光聚变研究中心 | Multi-pose large-caliber plane optical element surface shape detecting device and method |
Non-Patent Citations (1)
| Title |
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| 基于高分辨力CCD的大口径光学元件疵病检测;程晓锋等;《强激光与粒子束》;20091130;第21卷(第11期);第1677-1680页 * |
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