CN105300279A - Laser tracker light spot position sensor PSD tracking zero point calibration method - Google Patents

Laser tracker light spot position sensor PSD tracking zero point calibration method Download PDF

Info

Publication number
CN105300279A
CN105300279A CN201510640028.6A CN201510640028A CN105300279A CN 105300279 A CN105300279 A CN 105300279A CN 201510640028 A CN201510640028 A CN 201510640028A CN 105300279 A CN105300279 A CN 105300279A
Authority
CN
China
Prior art keywords
zero point
circle
psd
tracks
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510640028.6A
Other languages
Chinese (zh)
Inventor
陈万荣
陈修祥
周维虎
孙华平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yangzhong Zhongke Weikang Intelligent Science & Technology Co Ltd
Original Assignee
Yangzhong Zhongke Weikang Intelligent Science & Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yangzhong Zhongke Weikang Intelligent Science & Technology Co Ltd filed Critical Yangzhong Zhongke Weikang Intelligent Science & Technology Co Ltd
Priority to CN201510640028.6A priority Critical patent/CN105300279A/en
Publication of CN105300279A publication Critical patent/CN105300279A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention relates to a laser tracker light spot position sensor PSD tracking zero point calibration method. The method comprises steps that, zero finding for an orientation motor and a pitching motor is carried out; a mirror surface of an optical tracking mirror is adjusted to horizontally face downwards, and attitude of the mirror surface is maintained; a coarse adjustment stage, the orientation motor rotates for one circle to form an enclosed circle, and a center of circle of the circular locus is estimated; attitude of the pitching motor is re-adjusted to make a position of a PSD light spot approach the center of circle after coarse adjustment; the orientation motor rotates for another circle, the center of circle of the enclosed circular locus is taken as a PSD tracking zero point. Through the method, zero point calibration can be realized without any external device, and the method further has advantages of rapid and convenient performance, high economic efficacy and accurate and practical performance.

Description

A kind of laser tracker facula position sensor PSD follows the tracks of the scaling method at zero point
Technical field
The present invention relates to apparatus measures and calibration field, particularly relate to the scaling method that a kind of laser tracker facula position sensor PSD follows the tracks of zero point.
Background technology
Laser tracker is the novel large scale 3 d space coordinate surveying instrument that gets up of newly-developed in the world, real-time follow-up can be carried out to moving target, having and install easy and simple to handle, measuring accuracy and efficiency advantages of higher, is the Main Means of large scale commercial measurement and scientific measurement.
The basic functional principle of laser tracker is: the measuring beam that laser instrument is launched, and is divided into two bundles through interference spectroscope, is a branch ofly directly transferred on interferometer, and another bundle is by tracking mirror homed on its target reverberator.Light ray parallel through target reflector reflection returns in elementary beam, arrives spectroscope rear portion laser beam and is reflected on facula position sensor, and another part light beam enters laser interferometer through interference spectroscope reflection and carries out displacement interferometer measurement.When target reflector moves, follower head must aim at reverberator by adjustment beam direction in real time, and laser interferometer just can carry out space distance measurement.So tracing control is the prerequisite realizing interferometry.
Usual tracking control system adopts PSD as feedback transducer.Because the attitude regulation of PSD, optical path adjusting can not reach perfect condition in installation process, therefore the geometric center of PSD not necessarily returns through level crossing and Ba Qiuyuan road the tracking being irradiated to PSD with laser beam and overlaps zero point, and the target of control system controls dimensional turntable to rotate and make miss distance be 0.Therefore the PSD accurate calibration of following the tracks of zero point for control system and precision measurement very important, in the urgent need to a kind of simple and efficient to handle, cost is low, do not affect again the PSD of precision follows the tracks of the scaling method at zero point.
Summary of the invention
Based on the problems referred to above, the present invention proposes the scaling method that a kind of laser tracker facula position sensor PSD follows the tracks of zero point, be mainly used in the quick and precisely demarcation that PSD follows the tracks of zero point, and then the precision tracking realizing laser tracker controls.
To achieve these goals, the invention provides the scaling method that a kind of laser tracker facula position sensor PSD follows the tracks of zero point, comprise the following steps:
Small change is carried out to azimuth-drive motor and pitching motor;
Adjustment optical tracking mirror minute surface level, and keeps minute surface attitude down;
Coarse tuning stage, gyrobearing motor one week, forms a closed circular, and estimates the center of circle of circular trace;
Readjust pitching motor attitude, make PSD facula position close to the coarse adjustment center of circle;
Gyrobearing motor one week again, then the center of circle of closed circle track is the tracking zero point of PSD.
The scaling method that described laser tracker facula position sensor PSD follows the tracks of zero point also comprises:
Repeatedly repeat above-mentioned steps, to assess or to improve the stated accuracy following the tracks of zero point.
As shown from the above technical solution, the scaling method that laser tracker facula position sensor PSD of the present invention follows the tracks of zero point need can not realize Zero calibration by any external devices, simplifies and follows the tracks of Zero calibration process, improve the convenience of demarcation; Accelerate to follow the tracks of Zero calibration speed by theory calculate, make method of the present invention fast accurate; Utilize the mechanical-optical setup feature of tracker self, achieve the demarcation following the tracks of zero point, there is economical and efficient, convenient and practical feature.
Accompanying drawing explanation
Fig. 1 is the principle schematic that PSD of the present invention follows the tracks of Zero calibration method.
Reference numeral implication wherein in figure is as follows: 1, pitching motor, and 2, azimuth-drive motor, 3, tracking mirror, 4, spectroscope, 5, catoptron, 6, tracker main body, 7, laser, 8, follow the tracks of zero point, 9, PSD.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in further detail.
The scaling method that PSD of the present invention follows the tracks of zero point need can not realize Zero calibration by any external devices, concrete principle is as follows: tracking minute surface is adjusted to level downward, gyrobearing motor one week, then can observe the situation of change of the facula position on PSD.Because emergent light and tracker vertical pivot are coaxial, (tracker carried out precision in advance and debug, both almost coaxials), if follow the tracks of minute surface and emergent light out of plumb, mirror-reflection light and emergent ray are a certain degree, vertical rotary shaft, then laser facula track is circular on PSD.Angle is large, then circular trace diameter is large, and vice versa.If it is vertical with emergent light to follow the tracks of minute surface, the upper hot spot invariant position of PSD.During actual measurement, only need adjust and follow the tracks of minute surface and emergent light near normal, the center of circle obtaining hot spot circular trace by numerical evaluation is PSD tracking zero point.
More specifically, PSD of the present invention follows the tracks of the scaling method at zero point and completes by five steps:
Step one, small change is carried out to azimuth-drive motor and pitching motor;
Step 2, adjustment optical tracking mirror minute surface level, and keep minute surface attitude down;
Step 3, gyrobearing motor one week, form a closed circular, and estimate the center of circle of circular trace, this is coarse tuning stage;
Step 4, readjust pitching motor attitude, make PSD facula position close to the coarse adjustment center of circle;
Step 5, again gyrobearing motor one week, then the center of circle of closed circle track is the tracking zero point of PSD.
Preferably, to follow the tracks of the scaling method at zero point further comprising the steps of for PSD of the present invention:
Step 6, repeatedly repetition above-mentioned steps five, to assess or to improve the stated accuracy following the tracks of zero point.
The above-mentioned steps of method of the present invention can manually have been come, by actual detection validation, method of the present invention has easy and simple to handle, economical and efficient, convenient and practical feature, and be close on coaxial basis at optical axis vertical pivot, mirror surface is adjusted to level down, manual rotation azimuth-drive motor one week, the spot tracks on PSD becomes closed circle, the center of circle then for following the tracks of zero point, has higher accuracy; The present invention utilizes the closed center of circle formed first as preliminary tracking zero point, readjust tracking lens, make facula position close to preliminary tracking zero point, again gyrobearing motor one week, the then new closed center of circle is follows the tracks of zero point, and two operation stepss just can realize the demarcation following the tracks of zero point;
The demarcation that the present invention follows the tracks of zero point by external unit, need not need the critical piece of dismounting tracker yet, and the software that only need carry by tracker, carrying out certain data processing can complete, easy and simple to handle.

Claims (2)

1. laser tracker facula position sensor PSD follows the tracks of the scaling method at zero point, comprises the following steps:
Small change is carried out to azimuth-drive motor and pitching motor;
Adjustment optical tracking mirror minute surface level, and keeps minute surface attitude down;
Coarse tuning stage, gyrobearing motor one week, forms a closed circular, and estimates the center of circle of circular trace;
Readjust pitching motor attitude, make PSD facula position close to the coarse adjustment center of circle;
Gyrobearing motor one week again, then the center of circle of closed circle track is the tracking zero point of PSD.
2. laser tracker facula position sensor PSD according to claim 1 follows the tracks of the scaling method at zero point,
Also comprise the following steps:
Repeatedly repeat above-mentioned steps, to assess or to improve the stated accuracy following the tracks of zero point.
CN201510640028.6A 2015-10-08 2015-10-08 Laser tracker light spot position sensor PSD tracking zero point calibration method Pending CN105300279A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510640028.6A CN105300279A (en) 2015-10-08 2015-10-08 Laser tracker light spot position sensor PSD tracking zero point calibration method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510640028.6A CN105300279A (en) 2015-10-08 2015-10-08 Laser tracker light spot position sensor PSD tracking zero point calibration method

Publications (1)

Publication Number Publication Date
CN105300279A true CN105300279A (en) 2016-02-03

Family

ID=55197822

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510640028.6A Pending CN105300279A (en) 2015-10-08 2015-10-08 Laser tracker light spot position sensor PSD tracking zero point calibration method

Country Status (1)

Country Link
CN (1) CN105300279A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107063082A (en) * 2016-10-19 2017-08-18 中国工程物理研究院流体物理研究所 A kind of balance loading head apparatus for detecting position and posture
CN108760650A (en) * 2018-05-25 2018-11-06 北京海光仪器有限公司 A kind of more lamp position rotary lighthouses are to photosystem
CN109141223A (en) * 2018-09-25 2019-01-04 成都飞机工业(集团)有限责任公司 A kind of efficiently accurate calibration method of the laser interferometer light path based on PSD
CN114265129A (en) * 2021-12-31 2022-04-01 西南交通大学 Meteorological monitoring laser standard zero calibration method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5589924A (en) * 1978-12-27 1980-07-08 Toshiba Corp Optical information reproduction unit
JPS57171205A (en) * 1981-04-14 1982-10-21 Mitsubishi Electric Corp Optical measuring method for pore
JPH07190735A (en) * 1993-12-27 1995-07-28 Tosok Corp Optical measuring device and its measuring method
CN104296655A (en) * 2014-09-26 2015-01-21 中国科学院光电研究院 Calibration method of image rotation formula initial angle of laser tracker
CN104315981A (en) * 2014-10-10 2015-01-28 中国科学院光电研究院 Laser tracker position sensitive detector (PSD) zero tracking calibrating method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5589924A (en) * 1978-12-27 1980-07-08 Toshiba Corp Optical information reproduction unit
JPS57171205A (en) * 1981-04-14 1982-10-21 Mitsubishi Electric Corp Optical measuring method for pore
JPH07190735A (en) * 1993-12-27 1995-07-28 Tosok Corp Optical measuring device and its measuring method
CN104296655A (en) * 2014-09-26 2015-01-21 中国科学院光电研究院 Calibration method of image rotation formula initial angle of laser tracker
CN104315981A (en) * 2014-10-10 2015-01-28 中国科学院光电研究院 Laser tracker position sensitive detector (PSD) zero tracking calibrating method

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107063082A (en) * 2016-10-19 2017-08-18 中国工程物理研究院流体物理研究所 A kind of balance loading head apparatus for detecting position and posture
CN107063082B (en) * 2016-10-19 2019-09-20 中国工程物理研究院流体物理研究所 A kind of balance loading head apparatus for detecting position and posture
CN108760650A (en) * 2018-05-25 2018-11-06 北京海光仪器有限公司 A kind of more lamp position rotary lighthouses are to photosystem
CN108760650B (en) * 2018-05-25 2023-10-13 北京海光仪器有限公司 Multi-lamp-position rotary lighthouse light focusing system
CN109141223A (en) * 2018-09-25 2019-01-04 成都飞机工业(集团)有限责任公司 A kind of efficiently accurate calibration method of the laser interferometer light path based on PSD
CN109141223B (en) * 2018-09-25 2020-06-16 成都飞机工业(集团)有限责任公司 PSD-based laser interferometer light path efficient and accurate calibration method
CN114265129A (en) * 2021-12-31 2022-04-01 西南交通大学 Meteorological monitoring laser standard zero calibration method

Similar Documents

Publication Publication Date Title
CN104315981A (en) Laser tracker position sensitive detector (PSD) zero tracking calibrating method
CN109141223B (en) PSD-based laser interferometer light path efficient and accurate calibration method
CN104296655B (en) A kind of laser tracker picture revolves the scaling method of formula initial angle
CN103900489B (en) A kind of line laser scanning three-dimensional contour measuring method and device
CN106873122B (en) A kind of device and method for large-diameter non-spherical reflecting mirror centering adjustment
CN105300279A (en) Laser tracker light spot position sensor PSD tracking zero point calibration method
CN105492860A (en) Laser measurement system and method capable of detecting 21 geometric errors
CN103033183B (en) Indoor precise positioning system and method for industrial robot
CN203535218U (en) A laser ranging optical path apparatus
CN110542542B (en) Device and method for detecting consistency of optical axis of optical simulator under condition of moving platform
CN105033751B (en) Online detection machining device and method for convex cone mirror
CN106643505B (en) A kind of verifying laser traces measuring system standard spherical reflector reduction shafting runout error method
CN104913732B (en) The normal tracking mode non-spherical measuring method and system interfered based on recombination laser
CN104296654A (en) Device and method for detecting zero position installation errors of position detector of laser tracker
JP2015169491A (en) Displacement detector and displacement detection method
WO2022222521A1 (en) Calibration system and measuring method by same
CN105987674A (en) Method and device for Z-axis perpendicularity error measurement based on image measurement
CN203494949U (en) Frame curve shape measuring device
CN106767403B (en) A kind of optical axis position error detection method of more optical axis optical systems
CN103542813A (en) Laser diameter measuring instrument based on boundary differential and environmental light self-calibration
CN104006789A (en) Device and method for measuring spatial dynamic angle
CN105066983A (en) Detection method and device of radical cooling temperature, flying speed, and movement track
CN101825446B (en) Device and method for measuring curvature radius of spherical reflector
CN105318843A (en) Method for detecting absolute surface shape of cylindrical lens using conjugate difference approach
CN111750773B (en) Method for measuring response of different light spot points on position sensitive detector

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20160203